Chip processing debugging method, system, device and readable storage medium

Abstract

The present invention discloses a chip processing debugging method, which includes: taking a point on a chip processing plane as a feature point, the feature point being the intersection of the processing plane and the main axis of a focusing device; rotating the chip around a tangent axis by a preset angle, the tangent axis being a straight line perpendicular to the main axis of the focusing device and passing through the focus of an energy beam; obtaining the position change of the feature point before and after the rotation, and judging whether the chip processing height is available; if the chip processing height is not available, adjusting the distance between the processing plane and the focus based on the position change of the feature point before and after the rotation. Compared with the prior art, the present invention can complete the debugging of the chip height at a top-down perspective, without the need to introduce new equipment, and the application of this method can achieve a debugging accuracy that exceeds the prior art. Furthermore, the present invention provides a variety of different debugging strategies, and the chip processing height can be corrected by freely selecting an automatic debugging method based on a functional relationship or a manual debugging method based on different usage scenarios, thereby improving the adaptability of the present solution.

Description

Technical Field

[0001] The present invention belongs to the technical field of integrated circuit processing, and in particular relates to a chip processing and debugging method, system, equipment and a readable storage medium. Background Art

[0002] Nowadays, integrated circuits have played a very important role in all walks of life and are the cornerstone of the modern information society. An integrated circuit is a circuit with specific functions that integrates a certain number of common electronic components, such as resistors, capacitors, transistors, etc., and the connections between these components through semiconductor technology.

[0003] In the prior art, it is usually necessary to place the chip in the machine, and modify the integrated circuit based on the energy beam and auxiliary gas of the machine. Among them, the energy beam and auxiliary gas of the machine have a certain working height. If the processing position of the chip is too high, it is easy to cause the gas needle loaded with gas to collide with the chip and damage the chip. If the processing position of the chip is too low, the effect of the energy beam and auxiliary gas will be significantly deteriorated, which will reduce the modification efficiency of the integrated circuit and reduce the utilization rate of energy / gas.

[0004] Therefore, in view of the above technical problems, it is necessary to provide an improved processing height adjustment method.

[0005] The information disclosed in this background technology section is only intended to enhance the understanding of the overall background of the invention and should not be regarded as an acknowledgment or any form of suggestion that the information constitutes the prior art already known to a person skilled in the art. Summary of the invention

[0006] The object of the present invention is to provide a chip processing debugging method, system, device and readable storage medium, which can quickly locate the optimal processing height during chip processing.

[0007] In order to achieve the above object, a technical solution provided by a specific embodiment of the present invention is as follows:

[0008] In a first aspect, the present invention provides a chip processing and debugging method, which comprises:

[0009] A point on the chip processing plane is taken as a feature point, and the feature point is the intersection of the processing plane and the main axis of the focusing device;

[0010] Rotate the chip around a tangent axis by a preset angle, wherein the tangent axis is a straight line perpendicular to the main axis of the focusing device and passing through the focus of the energy beam;

[0011] Obtaining the position change of the feature point before and after the rotation, and determining whether the chip processing height is available;

[0012] If the chip processing height is not available, the distance between the processing plane and the focus is adjusted based on the position change of the feature point before and after the rotation.

[0013] In one or more embodiments of the present invention, the acquiring the position change of the feature point before and after the rotation and judging whether the chip processing height is available includes:

[0014] Calculating the Euclidean distance between the feature points before and after the chip is rotated;

[0015] If the Euclidean distance is greater than a preset effective threshold, the current chip processing height is unavailable;

[0016] If the Euclidean distance is less than or equal to a preset effective threshold, the current chip processing is highly usable.

[0017] In one or more embodiments of the present invention, adjusting the distance between the processing plane and the focus based on the position change of the feature point before and after the rotation includes:

[0018] Moving the rotated chip in a direction perpendicular to the main axis of the focusing device so that the feature point coincides with the main axis of the focusing device again;

[0019] The chip after the translation is rotated to keep the distance between the feature point and the focus unchanged, so that the angle between the processing plane and the main axis of the focusing device is consistent with the initial state of the chip.

[0020] In one or more embodiments of the present invention, the method further comprises: in n rounds of debugging of the chip processing height

[0021]

[0022] in, is the size of the preset angle in the i-th round of debugging, The size of the preset angle in the i+1th round of debugging.

[0023] In one or more embodiments of the present invention, the preset angle is greater than -10° and less than 45°.

[0024] In one or more embodiments of the present invention, adjusting the distance between the processing plane and the focus based on the position change of the feature point before and after the rotation includes:

[0025] Obtaining a functional relationship between the chip processing height adjustment value and a preset angle and a position change of the feature point before and after the rotation;

[0026] Substitute the preset angle corresponding to the chip to be debugged and the corresponding coordinates of the feature points before and after rotation into the function to obtain a processing height adjustment value;

[0027] The chip is reset and moved based on the process height adjustment value.

[0028] In one or more embodiments of the present invention, before rotating the chip around the tangential axis by a preset angle, the method further includes:

[0029] A point is selected on the chip, and the chip is moved in a direction perpendicular to the main axis of the focusing device so that the point is located on the main axis of the focusing device, and the point is used as a feature point.

[0030] In a second aspect, the present invention provides a chip processing and debugging system, comprising:

[0031] An initialization module, used for taking a point on the chip processing plane as a feature point, wherein the feature point is an intersection of the processing plane and a main axis of a focusing device;

[0032] A rotation module, used for rotating the chip around a tangent axis by a preset angle, wherein the tangent axis is a straight line perpendicular to the main axis of the focusing device and passing through the focus of the energy beam;

[0033] A judgment module, used for obtaining the position change of the feature point before and after the rotation, and judging whether the chip processing height is available;

[0034] A debugging module is used to adjust the distance between the processing plane and the focus based on the position change of the feature point before and after the rotation when the chip processing height is unavailable.

[0035] In a third aspect, the present invention provides a computer device, comprising: a memory and a processor, wherein the memory and the processor are communicatively connected to each other, computer instructions are stored in the memory, and the processor executes the chip processing and debugging method by executing the computer instructions.

[0036] In a fourth aspect, the present invention provides a computer-readable storage medium, wherein the computer-readable storage medium stores computer instructions, and the computer instructions are used to enable a computer to execute the chip processing and debugging method.

[0037] Compared with the prior art, when the chip is processed in the machine, the operator can still use the existing equipment and observe from a top-down perspective using the display device. They only need to see the relationship between the energy beam focus and the chip in the height direction. Based on the chip processing debugging method provided by the present invention, by obtaining the coordinates corresponding to the feature points before and after rotation along the tangent axis, it is determined whether the current processing height of the chip is appropriate. The chip height can be debugged from a top-down perspective without the need to introduce new equipment. The method can also achieve debugging accuracy that exceeds the prior art.

[0038] Furthermore, the present invention provides a variety of different debugging strategies, and can select automatic debugging based on functional relationships or manual debugging methods to correct the chip processing height, thereby improving the adaptability and convenience of the present solution. Specifically, automatic debugging can deduce the functional relationship between corresponding variables based on existing data sets, thereby achieving the effect of quickly obtaining the height that the chip needs to be adjusted. Manual operation is suitable for processing chips under any circumstances, and even if the equipment is replaced and used for the first time, it can achieve a higher adjustment accuracy, with a high degree of stability and adaptability. BRIEF DESCRIPTION OF THE DRAWINGS

[0039] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0040] Figure 1 This is a schematic diagram of a chip processing and debugging scenario in one embodiment of the present invention;

[0041] Figure 2 It is a schematic flow chart of a chip processing and debugging method in one embodiment of the present invention;

[0042] Figure 3 is a structural block diagram of a chip processing and debugging system in one embodiment of the present invention;

[0043] Figure 4 is a structural block diagram of an electronic device in one embodiment of the present invention;

[0044] Figure 5 is a schematic diagram of a focusing device according to an exemplary embodiment of the present invention;

[0045] Figure 6 This is a schematic diagram of a chip before debugging in a specific embodiment of the present invention;

[0046] Figure 7 It is a cross-sectional view of a chip processing plane before and after rotation around the tangent axis at a viewing angle in a specific embodiment of the present invention. DETAILED DESCRIPTION

[0047] The specific implementation modes of the present invention are described in detail below in conjunction with the accompanying drawings, but it should be understood that the protection scope of the present invention is not limited by the specific implementation modes.

[0048] Unless explicitly stated otherwise, throughout the specification and claims, the term “comprise” or variations such as “include” or “comprising”, etc., will be understood to include the stated elements or components but not to exclude other elements or components.

[0049] There is a chip processing and debugging method in the existing technical solution, which specifically includes: outside the chip processing machine, first fix the chip to be debugged on the sample loading platform, and place the sample loading platform with the chip to be debugged under a microscope, turn on the microscope light, and adjust the height and position of the above-mentioned sample loading platform until the point to be processed on the chip surface can be clearly observed under the microscope.

[0050] The principle is that the focal length of the microscope is known, and the light of the microscope is used to simulate the effect of energy beam imaging. When the chip can be clearly observed under the eyepiece, it means that the height of the sample loading platform is adapted to the focal length of the microscope. After placing the chip on the machine, the processing height can be adaptively adjusted according to the height under the microscope to complete the debugging.

[0051] However, since this operation inevitably requires the simulation of energy beam imaging, external equipment must be introduced. At the same time, the simulation process needs to be carried out outside the machine, which requires multiple adjustments for chips of different heights, or for points to be processed at different heights on the same chip, greatly increasing the number of samples in and out, and increasing economic and time costs. In addition, the simulation imaging process relies entirely on the operator's naked eye observation, and there is subjectivity in the definition of clear imaging, which will inevitably lead to certain errors, making it difficult to guarantee the debugging accuracy.

[0052] The inventor of the present invention has found the main shortcomings of the prior art, and based on the shortcomings of the prior art, has proposed a new technical implementation idea: taking a point on the chip processing plane as a feature point, rotating the chip around the tangent axis, judging whether the current processing height is available based on the position change of the feature point, and providing a basis for the subsequent chip debugging. The feature point is the intersection of the chip processing plane and the main axis of the focusing device, and the tangent axis is a straight line passing through the energy beam focus and perpendicular to the main axis of the focusing device. It can be understood that the closer the processing plane is to the energy beam focus, the smaller the position change of the feature point before and after the chip rotates.

[0053] Furthermore, the present invention provides a variety of different debugging strategies according to different usage scenarios. Among them, automatic debugging can deduce the functional relationship between corresponding variables based on the existing data set, thereby quickly obtaining the height value that the chip needs to adjust. Manual operation is suitable for processing the chip under any circumstances, even if it is a device that has been replaced and used for the first time, it can achieve a high adjustment accuracy and has a high degree of stability and adaptability.

[0054] Please refer to Figure 1, which is a schematic diagram of an application scenario of the chip processing and debugging method provided by the present invention under an implementation mode, and the scenario specifically includes: a user terminal 101, a processing machine 102 and an image acquisition unit 103.

[0055] It should be noted that communication connections are provided between the user terminal 101, the processing machine 102 and the image acquisition unit 103, and the communication network derived from the above communication connection may include various connection types, including but not limited to: wired connection, wireless connection or optical fiber cable connection, etc. At the same time, the communication network may be a local area network, a metropolitan area network, a wide area network or any combination of the three.

[0056] The processing machine 102 is composed of multiple sets of rotating arms, a sample loading platform, an energy beam generating device, an energy beam focusing device, etc. The energy beam generating device can emit an energy beam in a preset direction, and the energy beam focusing device focuses the energy beam emitted in parallel or in a scattered state to a point, which is the focus of the energy beam. The sample loading platform is used to fix and install the chip to be processed. Multiple sets of rotating arms are connected to the sample loading platform, which can drive the sample loading platform to translate or rotate around any axis based on the instructions of the user terminal.

[0057] The image acquisition unit 103 is disposed on one side of the energy beam generating device, and acquires the image of the chip in real time from a top-down perspective and transmits it to the user terminal 101 .

[0058] The user terminal 101 receives the real-time image of the chip under the top-down view sent by the image acquisition unit 103, and reflects the image to the user through the display area. The center of the display area is always the projection point of the focus under the top-down view. On the other hand, the user terminal 101 is also used to input control instructions to control the processing machine 102 to process the chip.

[0059] It should be noted that the user terminal 101 is installed with a computer software program that matches the chip processing and debugging method provided by the present method; the user terminal 101 may include but is not limited to a desktop computer (PC), a desktop computer, a smart phone, a handheld computer, a tablet computer, a personal digital assistant (PDA), and other portable electronic devices or wearable electronic devices, and the embodiments of the present invention do not limit the above contents.

[0060] It should also be noted that the chip processing and debugging method of the embodiment of the present invention can be applied to the chip processing and debugging system of the embodiment of the present invention. The chip processing and debugging system can be configured in a terminal. The terminal can include but is not limited to a PC (Personal Computer), a PDA (tablet computer), a smart phone, a smart wearable device, and the like.

[0061] Please refer to Figure 2FIG. 1 is a flow chart of chip processing and debugging in one embodiment of the present invention. The chip processing and debugging method specifically includes the following steps:

[0062] S201: taking a point on the chip processing plane as a feature point, where the feature point is the intersection of the processing plane and the main axis of the focusing device;

[0063] It should be noted that the energy beam mentioned in the present invention refers to a high-energy beam that can be used for processing such as modification, welding, hole making, spraying, surface modification or etching of integrated circuits, which may include but is not limited to: ion beam, electron beam, laser beam, etc. The high-energy beam has an extremely high energy density, is easy to control, and is easy to automate the processing process. At the same time, the use of the above-mentioned high-energy beam for processing also has the advantages of fast processing speed, small thermal impact on the workpiece, and small deformation of the workpiece.

[0064] Correspondingly, for different selections of energy beams, the above-mentioned focusing device may also include but is not limited to: a lens, a magnetic field generating device or an electric field generating device. It can be understood that after the energy beam is emitted from the generating device, it is mostly in a parallel or scattered state. Processing the workpiece with the energy beam in this state will result in low energy utilization and low processing accuracy.

[0065] The use of a focusing device can focus the energy beam to a point, thereby obtaining a higher power density and spatial resolution, making the processing efficiency at the focus higher and the processing accuracy of the point to be processed higher. It should be understood that the embodiment of the present invention does not limit the selection of the energy beam and the corresponding focusing device, and can be adaptively adjusted based on changes in the processing scene.

[0066] It should also be noted that the main axis of the focusing device refers to a line along which rotational symmetry can be achieved in the energy focusing system. The main axis of the focusing device is intended to define the propagation path of the energy beam in the energy focusing system, and in the embodiments of the present invention, it also serves as a reference to define the movement direction, etc.

[0067] Reference Figure 5 FIG. 1 is a schematic diagram of a focusing device according to an exemplary embodiment of the present invention. Taking a lens as a focusing device as an example, the main axis of the focusing device refers to a straight line passing through the optical center and perpendicular to the lens. Energy beams parallel to the main axis intersect at a point after passing through the lens, and the point is the focus.

[0068] S202: Rotating the chip around the tangent axis by a preset angle;

[0069] It should be noted that the tangent axis is a straight line that is perpendicular to the main axis of the focusing device and passes through the focus of the energy beam; the tangent axis can also be called the azimuth axis, rotation axis or T-axis in the spatial rectangular coordinate system, which is used to locate the rotation direction and angle of a certain element in the system and is an axis independent of the coordinate axis.

[0070] In an exemplary embodiment of the present invention, if a spatial rectangular coordinate system is established with the main axis of the focusing device as the Z axis and the focus of the energy beam as the origin, the above-mentioned tangent axis is any straight line passing through the origin in the XY plane of the spatial rectangular coordinate system.

[0071] It is understandable that the greater the difference between the current distance between the chip feature point and the focus and the available height, the greater the change in the position of the feature point before and after the chip rotates by the preset angle. To avoid the situation where the distance is too far during the first adjustment, exceeding the imaging area of ​​the image acquisition unit and being inconvenient to measure, it is preferred to set the rotation angle for the first debugging to 5°~10°.

[0072] Furthermore, when the manual debugging method is used, and the first debugging does not directly make the chip processing height available. During the second to Nth debugging process, the chip processing height will gradually approach the available height. Therefore, in an exemplary embodiment, in order to speed up the debugging rate, in the n rounds of debugging of the chip processing height,

[0073]

[0074] in, is the size of the preset angle in the i-th round of debugging, The size of the preset angle in the i+1th round of debugging.

[0075] It is understandable that as the number of debugging rounds increases, the distance between the focus and the feature point in the main axis direction of the focusing device will gradually decrease. Because when rotating by the same angle, the degree of change in the corresponding position of the feature point before and after the preset angle is positively correlated with the current distance between the feature point and the focus. Therefore, preferably, when the difference between the current height of the chip and the available height is small, it is necessary to gradually expand the size of the preset rotation angle to increase the debugging efficiency and accuracy.

[0076] S203: Obtaining the position change of the feature point before and after the rotation, and determining whether the chip processing height is available;

[0077] In an exemplary embodiment, the acquisition of the position change of the feature points before and after the rotation and the determination of whether the chip processing height is available include: calculating the Euclidean distance between the feature points before and after the rotation; if the Euclidean distance is greater than a preset effective threshold, the current chip processing height is unavailable; if the Euclidean distance is less than or equal to the preset effective threshold, the current chip processing height is available. The embodiment of the present invention does not limit the method for measuring the Euclidean distance between the feature points before and after the rotation. It may include but is not limited to: based on coordinate calculation, laser ranging, etc.

[0078] In an exemplary embodiment, the step of obtaining the position change of the feature point before and after rotation and determining whether the chip processing height is available also includes: determining the height difference of the feature point in the main axis direction of the focusing device before and after rotation, if the height difference is greater than a preset effective threshold, the current chip processing height is unavailable, otherwise when the height difference is less than or equal to the preset effective threshold, the current chip processing height is available.

[0079] Judging whether the processing height is available based on the height difference can reduce the difficulty of calculation. On the one hand, when a spatial rectangular coordinate system is established and the coordinates are used for calculation, there is no need to perform mixed calculations on multiple parameters in the coordinates at the same time, only the vertical coordinates need to be calculated; on the other hand, when other distance measurement methods are used, the Euclidean distance needs to be operated in three-dimensional space, and the height difference only needs to be based on the projection of the two points to be measured in the plane, which is more convenient and accurate. In summary, this embodiment is more suitable for scenarios where the vertical coordinates of feature points can be obtained or there is a side view.

[0080] In an exemplary embodiment, the step of obtaining the position change of the feature point before and after rotation to determine whether the chip processing height is available also includes: obtaining the projection distance of the feature point on a plane perpendicular to the main axis of the focusing device before and after rotation, if the projection distance is greater than a preset effective threshold, the current chip processing height is unavailable, conversely when the projection distance is less than or equal to the preset effective threshold, the current chip processing height is available.

[0081] Since in the prior art, the image acquisition unit can only acquire and send to the user the picture from the top view, that is, the picture from the view along the energy beam emission direction, the present embodiment is more suitable for the current device. The processing height can be judged at the imaging angle of the prior art, and similarly to the previous embodiment, the present embodiment also has similar beneficial effects.

[0082] For example, Figure 6 As shown in FIG. 1 , it is a schematic diagram of a chip before debugging in a specific embodiment of the present invention. Figure 7 , which is a cross-sectional view of a chip processing plane before and after rotation around the tangent axis at a viewing angle in a specific embodiment of the present invention.

[0083] It should be noted that Figure 7 It is a view along the tangent axis direction, cut along a plane passing through the focus and perpendicular to the tangent axis. Figure 6 The spatial rectangular coordinate system is established as shown in the figure. Point A is the corresponding feature point before the machining plane rotates around the tangent axis. Figure 7 , point A' is the corresponding feature point after the machining plane rotates around the tangent axis.

[0084] Using the judgment method corresponding to Example 1, the effective threshold is set to N. If the coordinate calculation method is adopted, the coordinates of point A can be obtained as (x1, y1, z1), and the coordinates of point A' can be obtained as (x2, y2, z2). The Euclidean distance between point A and point A' can be expressed as

[0085]

[0086] When R1>N, it is determined that the current processing height is unavailable; when R1≤N, it is determined that the current processing height is available.

[0087] Using the judgment method corresponding to Example 2, the effective threshold is set to M. If the coordinate calculation method is adopted, the vertical coordinates of point A and point A' can be obtained as z1 and z2 respectively. The height difference between point A and point A' can be expressed as

[0088]

[0089] When R2>M, it is determined that the current processing height is unavailable; when R2≤M, it is determined that the current processing height is available.

[0090] Using the judgment method corresponding to Example 3, the effective threshold L is set. If the coordinate calculation method is adopted, the projection coordinates of point A and point A' on the plane perpendicular to the main axis of the focusing device can be obtained as (x1, y1) and (x2, y2) respectively. The projection point distance between point A and point A' can be expressed as

[0091]

[0092] When R3>L, it is determined that the current processing height is unavailable; when R3≤L, it is determined that the current processing height is available.

[0093] It should be noted that the specific value of the effective threshold is not limited in the embodiment of the present invention. However, it is understandable that the larger the value of the effective threshold, the looser the distance requirement between the focus and the point to be processed, and conversely, the smaller the value of the effective threshold, the stricter the distance requirement between the focus and the point to be processed. When the effective threshold is 0, the focus and the point to be processed must coincide before processing can be performed.

[0094] It should also be noted that the user terminal usually only provides a view from the energy beam outlet to the focus direction. It is understandable that due to different workpiece processing requirements, the angle between its initial state and the main axis of the focusing device is difficult to determine, and the image viewing angle provided is constant. Therefore, in different working scenarios, the brightness of each point of the workpiece in the user terminal display area is different, and the clarity of the image is also different.

[0095] Furthermore, on the workpiece to be processed, any point that intersects with the main axis of the focusing device can be used as a feature point. Preferably, in order to enable the user to observe and adjust more clearly and intuitively in the display area, a point with high brightness or easy to observe can be selected on the workpiece to be processed, and the chip can be moved in a direction perpendicular to the main axis of the focusing device to move the point to the main axis of the focusing device, and then the point can be used as a feature point.

[0096] S204: If the chip processing height is not available, adjusting the distance between the processing plane and the focus based on the position change of the feature point before and after the rotation.

[0097] In an exemplary embodiment, the distance between the processing plane and the focus is adjusted based on the position change of the feature point before and after the rotation, including: moving the rotated chip in a direction perpendicular to the main axis of the focusing device so that the feature point coincides with the main axis of the focusing device again; rotating and translating the chip to keep the distance between the feature point and the focus unchanged so that the angle between the processing plane and the main axis of the focusing device is consistent with the initial state of the chip.

[0098] It can be understood that if a spatial rectangular coordinate system is established with the main axis of the focusing device as the Z axis and the focus of the energy beam as the origin, when the chip feature point is located below the focus of the energy beam, the tangent axis is located above the chip processing plane, and after rotating around the tangent axis, the vertical coordinate of the feature point will definitely increase; when the chip feature point is located above the focus of the energy beam, the tangent axis is located below the chip processing plane, and after rotating around the tangent axis, the vertical coordinate of the feature point will definitely decrease. That is, after rotating around the tangent axis, the feature point is closer to the focus of the energy beam in the direction of the main axis of the focusing device. However, after the rotation, the horizontal coordinate, the vertical coordinate, and the angle between the processing plane and the main axis of the focusing device are all changed. Therefore, the above method is used to restore the other parameters of the chip processing plane to the initial state without changing the processing height of the feature point.

[0099] In an exemplary embodiment, after translating the chip, a reset axis can be set on the chip processing plane, and the reset axis is a straight line passing through the feature point and parallel to the tangent axis. By rotating around the reset axis, the angle between the chip processing plane and the main axis of the focusing device can be restored to the initial state without changing the feature point processing height. This avoids the adjustment of the processing height causing the desired angle of the processing plane to change, thereby affecting the final processing effect.

[0100] In another exemplary embodiment, the distance between the processing plane and the focus is adjusted based on the position change of the feature point before and after the rotation, including: obtaining the functional relationship between the chip processing height adjustment value and the preset angle and the position change of the feature point before and after the rotation; substituting the preset angle corresponding to the chip to be debugged and the corresponding coordinates of the feature point before and after the rotation into the function to obtain the processing height adjustment value; resetting the chip, and moving the chip based on the processing height adjustment value.

[0101] After multiple debugging of the chip processing height, the functional relationship between the chip processing height adjustment value and the preset angle and the position change of the feature point before and after the rotation can be obtained based on historical data. Based on this functional relationship, the obtained data can be mapped to the corresponding processing height value that should be adjusted after one rotation.

[0102] For example, a credible historical data set is called to train a neural network model. The credible historical data set includes the feature point coordinates and / or height difference and / or Euclidean distance and / or projection distance and the processing height value that needs to be adjusted for the chip processing plane after rotating the preset angle. When the training accuracy reaches the preset value, the relevant information of the feature points after the chip to be processed is rotated by an angle can be input into the neural network model, and the height value that the corresponding chip processing plane should be adjusted to is calculated. The chip is then reset, that is, the chip is restored to its position and angle before rotation. The chip is moved along the main axis direction of the focusing device by the corresponding height value. The positive or negative value of the height value determines the direction of movement.

[0103] Please refer to Figure 3 As shown, based on the same inventive concept as the aforementioned chip processing and debugging method, an embodiment of the present invention provides a chip processing and debugging system 300, which includes: an initialization module 301, a rotation module 302, a judgment module 303 and a debugging module 304.

[0104] Specifically, the initialization module 301 is used to take a point on the chip processing plane as a feature point, and the feature point is the intersection of the processing plane and the main axis of the focusing device; the rotation module 302 is used to rotate the chip around the tangent axis by a preset angle, and the tangent axis is a straight line perpendicular to the main axis of the focusing device and passing through the focus of the energy beam; the judgment module 303 is used to obtain the position change of the feature point before and after the rotation, and judge whether the chip processing height is available; the debugging module 304 is used to adjust the distance between the processing plane and the focus based on the position change of the feature point before and after the rotation when the chip processing height is not available.

[0105] It should be noted that the initialization module 301 is also used to select a point on the chip, move the chip in a direction perpendicular to the main axis of the focusing device, so that the point is located on the main axis of the focusing device, and use the point as a feature point.

[0106] The judgment module 303 is also used to calculate the Euclidean distance between the feature points before and after the chip is rotated; when the Euclidean distance is greater than a preset effective threshold, it is judged that the current chip processing height is unavailable; when the Euclidean distance is less than or equal to the preset effective threshold, it is judged that the current chip processing height is available.

[0107] The debugging module 304 is also used to move the rotated chip in a direction perpendicular to the main axis of the focusing device so that the feature point coincides with the main axis of the focusing device again; rotate the translated chip to keep the distance between the feature point and the focus unchanged so that the angle between the processing plane and the main axis of the focusing device is consistent with the initial state of the chip.

[0108]

[0109] in, is the size of the preset angle in the i-th round of debugging, The preset angle is the size of the preset angle in the (i+1) round of debugging. At the same time, the preset angle is preferably greater than -10° and less than 45°.

[0110] The debugging module 304 is also used to obtain the functional relationship between the chip processing height adjustment value and the preset angle and the position change of the feature point before and after rotation; substitute the preset angle corresponding to the chip to be debugged and the corresponding coordinates of the feature point before and after rotation into the function to obtain the processing height adjustment value; reset the chip, and move the chip based on the processing height adjustment value.

[0111] Please refer to Figure 4 As shown, an embodiment of the present invention further provides an electronic device 400, which includes at least one processor 401, a memory 402 (such as a non-volatile memory), a memory 403, and a communication interface 404, and the at least one processor 401, the memory 402, the memory 403, and the communication interface 404 are connected together via an internal bus 405. At least one processor 401 is used to call at least one program instruction stored or encoded in the memory 402, so that the at least one processor 401 performs various operations and functions of the chip processing debugging method described in various embodiments of this specification.

[0112] In the embodiments of the present specification, the electronic device 400 may include, but is not limited to, personal computers, server computers, workstations, desktop computers, laptop computers, notebook computers, mobile electronic devices, smart phones, tablet computers, cellular phones, personal digital assistants (PDAs), handheld devices, messaging devices, wearable electronic devices, consumer electronic devices, and the like.

[0113] An embodiment of the present invention further provides a computer-readable medium carrying computer execution instructions. When the computer execution instructions are executed by a processor, they can be used to implement various operations and functions of the chip processing and debugging method described in various embodiments of this specification.

[0114] The computer-readable medium in the present invention may be a computer-readable signal medium or a computer-readable storage medium or any combination of the above two. The computer-readable storage medium may be, for example, but not limited to, an electrical, magnetic, optical, electromagnetic, infrared, or semiconductor system, device or device, or any combination of the above. More specific examples of computer-readable storage media may include, but are not limited to: an electrical connection with one or more wires, a portable computer disk, a hard disk, a random access memory (RAM), a read-only memory (ROM), an erasable programmable read-only memory (EPROM or flash memory), an optical fiber, a portable compact disk read-only memory (CD-ROM), an optical storage device, a magnetic storage device, or any suitable combination of the above. In the present invention, a computer-readable storage medium may be any tangible medium containing or storing a program, which may be used by or in combination with an instruction execution system, device or device.

[0115] In the present invention, a computer-readable signal medium may include a data signal propagated in a baseband or as part of a carrier wave, which carries a computer-readable program code. Such propagated data signals may take a variety of forms, including but not limited to electromagnetic signals, optical signals, or any suitable combination of the above. A computer-readable signal medium may also be any computer-readable medium other than a computer-readable storage medium, which may send, propagate, or transmit a program for use by or in conjunction with an instruction execution system, device, or device. The program code contained on the computer-readable medium may be transmitted using any appropriate medium, including but not limited to: wireless, wire, optical cable, RF, etc., or any suitable combination of the above.

[0116] It will be appreciated by those skilled in the art that embodiments of the present invention may be provided as methods, systems, or computer program products. Therefore, the present invention may take the form of a complete hardware embodiment, a complete software embodiment, or an embodiment combining software and hardware. Furthermore, the present invention may take the form of a computer program product implemented on one or more computer-usable storage media (including but not limited to disk storage, CD-ROM, optical storage, etc.) containing computer-usable program code.

[0117] The present invention is described with reference to flowcharts and / or block diagrams of methods, apparatuses, systems, and computer program products according to embodiments of the present invention. It should be understood that each process and / or block in the flowchart and / or block diagram, as well as a combination of processes and / or blocks in the flowchart and / or block diagram, can be implemented by computer program instructions. These computer program instructions can be provided to a processor of a general-purpose computer, a special-purpose computer, an embedded processor, or other programmable data processing device to generate a machine, so that the instructions executed by the processor of the computer or other programmable data processing device generate instructions for implementing the process in the flowchart. Figure 1 A process or multiple processes and / or boxes Figure 1 A device that provides the functions specified in a block or multiple blocks.

[0118] The foregoing description of specific exemplary embodiments of the present invention is for the purpose of illustration and demonstration. These descriptions are not intended to limit the present invention to the precise form disclosed, and it is clear that many changes and variations can be made based on the above teachings. The purpose of selecting and describing the exemplary embodiments is to explain the specific principles of the present invention and its practical application, so that those skilled in the art can realize and utilize various different exemplary embodiments of the present invention and various different selections and changes. The scope of the present invention is intended to be limited by the claims and their equivalents.

Claims

1. A chip processing and debugging method, characterized in that: include: A point on the chip processing plane is taken as a feature point, and the feature point is the intersection of the processing plane and the main axis of the focusing device; Rotate the chip around a tangent axis by a preset angle, wherein the tangent axis is a straight line perpendicular to the main axis of the focusing device and passing through the focus of the energy beam; Obtaining the position change of the feature point before and after the rotation, and determining whether the chip processing height is available; If the chip processing height is not available, adjusting the distance between the processing plane and the focus based on the position change of the feature point before and after the rotation; Wherein, the obtaining of the position change of the feature points before and after the rotation and judging whether the chip processing height is available includes: calculating the Euclidean distance between the feature points before and after the chip rotation; if the Euclidean distance is greater than a preset effective threshold, the current chip processing height is unavailable; if the Euclidean distance is less than or equal to the preset effective threshold, the current chip processing height is available; The method of adjusting the distance between the processing plane and the focus based on the position change of the feature point before and after the rotation includes: moving the rotated chip in a direction perpendicular to the main axis of the focusing device so that the feature point coincides with the main axis of the focusing device again; rotating the translated chip to keep the distance between the feature point and the focus unchanged so that the angle between the processing plane and the main axis of the focusing device is consistent with the initial state of the chip.

2. The chip processing and debugging method according to claim 1, characterized in that: The method further comprises: in n rounds of debugging of the chip processing height i i+1 ≥θ i ,i <n;i,n∈N + Among them, θ i is the size of the preset angle in the i-th round of debugging, θ i+1 The size of the preset angle in the i+1th round of debugging.

3. The chip processing and debugging method according to claim 2, characterized in that: The preset angle is greater than -10° and less than 45°.

4. The chip processing and debugging method according to claim 1, characterized in that: The adjusting the distance between the processing plane and the focus based on the position change of the feature point before and after the rotation includes: Obtaining a functional relationship between the chip processing height adjustment value and a preset angle and a position change of the feature point before and after the rotation; Substitute the preset angle corresponding to the chip to be debugged and the corresponding coordinates of the feature points before and after rotation into the function to obtain a processing height adjustment value; The chip is reset and moved based on the process height adjustment value.

5. The chip processing and debugging method according to claim 1, characterized in that: Before rotating the chip around the tangent axis by a preset angle, the method further includes: A point is selected on the chip, and the chip is moved in a direction perpendicular to the main axis of the focusing device so that the point is located on the main axis of the focusing device, and the point is used as a feature point.

6. A chip processing and debugging system, characterized in that: include: An initialization module, used for taking a point on the chip processing plane as a feature point, wherein the feature point is an intersection of the processing plane and a main axis of a focusing device; A rotation module, used for rotating the chip around a tangent axis by a preset angle, wherein the tangent axis is a straight line perpendicular to the main axis of the focusing device and passing through the focus of the energy beam; A judgment module, used for obtaining the position change of the feature point before and after the rotation, and judging whether the chip processing height is available; Wherein, the obtaining of the position change of the feature points before and after the rotation and judging whether the chip processing height is available includes: calculating the Euclidean distance between the feature points before and after the chip rotation; if the Euclidean distance is greater than a preset effective threshold, the current chip processing height is unavailable; if the Euclidean distance is less than or equal to the preset effective threshold, the current chip processing height is available; A debugging module, used for adjusting the distance between the processing plane and the focus based on the position change of the feature point before and after the rotation when the chip processing height is unavailable; The method of adjusting the distance between the processing plane and the focus based on the position change of the feature point before and after the rotation includes: moving the rotated chip in a direction perpendicular to the main axis of the focusing device so that the feature point coincides with the main axis of the focusing device again; rotating and translating the chip so that the distance between the feature point and the focus remains unchanged so that the angle between the processing plane and the main axis of the focusing device is consistent with the initial state of the chip.

7. A computer device, characterized in that: include: A memory and a processor, wherein the memory and the processor are communicatively connected to each other, the memory stores computer instructions, and the processor executes the chip processing and debugging method according to any one of claims 1 to 5 by executing the computer instructions.

8. A computer-readable storage medium, characterized in that: The computer-readable storage medium stores computer instructions, and the computer instructions are used to enable a computer to execute the chip processing and debugging method according to any one of claims 1 to 5.

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