A gas supply device for silicon carbide epitaxial chemical vapor deposition system

Abstract

The present invention is applicable to the technical field of chemical vapor deposition, and provides a gas supply device for a silicon carbide epitaxial chemical vapor deposition system, comprising a precipitation box and a sealing cover; a gas supply pipe assembly matched with a semi-annular pipe is inserted between two L-shaped guide pipes; mounting pipes matched with sealing rings are evenly penetrated through the circumferential side surfaces of the precipitation box; a piston air outlet assembly is connected to the end of the mounting pipe; a guide assembly matched with each piston air outlet assembly is rotatably arranged inside the precipitation box, and the device draws each group of reaction gases into the corresponding collecting ball shell by cooperating with the piston air outlet assembly, and the flowing airflow drives the paddle blades to rotate, and pre-mixes the multiple groups of reaction gases entering the collecting ball shell, and the multiple groups of piston air outlet assemblies are evenly arranged in the precipitation box, and the reaction gases can be transported to multiple areas in the precipitation box, thereby improving the uniformity of dispersion of the reaction gases in each area in the precipitation box and improving the uniformity of mixing between multiple reaction gases.

Description

Technical Field

[0001] The invention relates to the technical field of chemical vapor deposition, and more specifically to a gas supply device for a silicon carbide epitaxial chemical vapor deposition system. Background Art

[0002] Silicon carbide is an inorganic substance with the chemical formula SiC. It is made of quartz sand, petroleum coke (or coal coke), sawdust (salt is needed to produce green silicon carbide) and other raw materials through high-temperature smelting in a resistance furnace. Chemical vapor deposition is a chemical technology that mainly uses one or several gas phase compounds or single substances containing thin film elements to react chemically on the surface of a substrate to form a thin film.

[0003] By combining silicon carbide crystal materials in the semiconductor field with chemical vapor deposition technology, it can not only help improve the performance of crystals or crystal films, but also produce some crystals that cannot be prepared by many other means.

[0004] At medium or high temperatures, solid substances are formed and deposited on a substrate through gas phase chemical reactions between gaseous initial compounds. In the prior art, the required reaction gases are introduced into a precipitation box through various groups of gas supply pipes to mix with the heated silicon carbide crystals placed in the precipitation box to undergo chemical reactions to form a thin film. However, during the process of chemical vapor deposition of silicon carbide, it is easy to cause uneven mixing between multiple reaction gases in the chemical vapor deposition reaction area, resulting in large differences in the concentration of a single reaction gas at different positions in the chemical vapor deposition reaction area, reducing the synchronization of the chemical vapor deposition reaction at the end face of the silicon carbide crystal plate and the unevenness of the thickness of the reaction precipitate at different regional positions. Summary of the invention

[0005] In view of the deficiencies in the prior art, the purpose of the present invention is to provide a gas supply device for a silicon carbide epitaxial chemical vapor deposition system, in which each group of gas supply pipes is continuously ventilated, and each group of reaction gases is drawn into the corresponding collecting ball shell in cooperation with a piston gas outlet assembly. The flowing airflow drives the blades to rotate, and pre-mixes the multiple groups of reaction gases entering the collecting ball shell. Multiple groups of piston gas outlet assemblies are evenly arranged in a precipitation box, and the reaction gases can be transported to multiple areas in the precipitation box, thereby improving the uniformity of dispersion of the reaction gases in various areas in the precipitation box and improving the uniformity of mixing between multiple reaction gases.

[0006] To achieve the above object, the present invention provides the following technical solutions:

[0007] A gas supply device for a silicon carbide epitaxial chemical vapor deposition system comprises a sedimentation box and a sealing cover arranged on the sedimentation box; a plurality of ear plates are evenly fixed on the circumferential side surface of the sedimentation box; a semi-annular tube is fixed between each of the ear plates; an L-shaped guide tube is symmetrically fixed in the semi-annular tube; an air supply pipe assembly compatible with the semi-annular tube is passed through two of the L-shaped guide tubes; the air supply pipe assembly comprises an outer hose; a plurality of air supply pipes are arranged in a circular array inside the outer hose, and a plurality of collecting ball shells are arranged in a linear array inside the outer hose; a connecting pipe is arranged in communication between the collecting ball shell and each air supply pipe; a first one-way valve is arranged on the connecting pipe; each of the collecting ball shells is connected to an ear tube through the outer hose; a sealing ring is arranged at the end of the ear tube; mounting tubes that are plug-matched with the sealing ring are evenly arranged on the circumferential side surface of the sedimentation box; a piston air outlet assembly is arranged at the end of the mounting tube; a guide assembly compatible with each piston air outlet assembly is rotatably arranged inside the sedimentation box.

[0008] The present invention is further configured as follows: the sealing cover and the outer peripheral side surface of the sedimentation box are fixed with connecting flanges; the sealing cover and the connecting flanges on the sedimentation box are fixedly connected by fastening bolts; a supporting platform for supporting silicon carbide crystals is fixed to the inner bottom surface of the sedimentation box, and a spiral electric heating wire is installed inside it; a temperature sensor and an air pressure sensor are installed on the top of the sealing cover, and a controller is installed on the top; the input end of the controller is electrically connected to the temperature sensor and the air pressure sensor respectively, and its output end is electrically connected to the spiral electric heating wire.

[0009] The present invention is further configured as follows: support plates are symmetrically fixed to the inner wall of the sedimentation box; a support ring is fixed between the two support plates and is coaxial with the sedimentation box; an annular groove is provided on the inner peripheral side of the support ring; the guide assembly includes a swivel; an annular rail is fixed on the outer peripheral side of the swivel and is rotatably matched with the annular groove; a fixing ring is fixed to the bottom of the swivel; a number of vertical plates are evenly fixed on the surface of the fixing ring; sliding grooves are symmetrically provided on the sides of the vertical plates, and a socket is provided on the side between the two sliding grooves.

[0010] The present invention is further configured as follows: an isolation cover is fixed on the top of the sealing cover, and an annular plate is rotatably arranged through the top of the sealing cover; a number of slides that slide with corresponding slide grooves are evenly fixed on the bottom of the annular plate; a fixed plate is fixed between two adjacent slides; a first piston cylinder is fixed through the side of the fixed plate; a first piston rod is slidably arranged inside the first piston cylinder; a first piston that slides with the first piston cylinder is fixed at one end of the first piston rod, and a plug-in ball that plugs with the socket is fixed at the other end of the first piston rod; a return spring is fixed between the first piston and the first piston cylinder.

[0011] The present invention is further configured as follows: a guide rope tube is provided through the end of the first piston cylinder; a screw is provided through the top of the sealing cover for rotation; a handle is fixed to the top of the screw, and a ball seat is fixed to the bottom of the screw; a ball head is provided in a ball joint in the ball seat; a connecting rope that passes through the corresponding guide rope tube is connected between the first piston and the ball head.

[0012] The present invention is further configured as follows: an inner magnet arranged inside the isolation cover is fixed on the top of the annular plate; a mounting frame is fixed on the top of the sealing cover; a driving motor electrically connected to the output end of the controller is installed on the top of the mounting frame; a mounting plate is fixed on the output end of the driving motor; an external magnet arranged outside the isolation cover is fixedly installed on the bottom surface of the mounting plate.

[0013] The present invention is further configured as follows: a plurality of curved guide plates are evenly fixed on the circumferential side surface of the fixed ring; a connecting rod is fixed on the bottom surface of the curved guide plate; a plurality of first stirring plates are evenly fixed on the circumferential side surface of the connecting rod; the piston air outlet assembly includes a second piston cylinder fixedly connected to the mounting tube by fastening bolts; an exhaust pipe is connected to the circumferential side surface of the second piston cylinder; a second piston is slidably arranged inside the second piston cylinder; a second piston rod is fixed on the side surface of the second piston; a guide ball matched with the curved guide plate is fixed on the end of the second piston rod; a connecting spring sleeved on the second piston rod is connected between the second piston and the second piston cylinder.

[0014] The present invention is further configured as follows: a support plate is fixed to the end of the exhaust pipe; a guide column is fixed to the side of the support plate; a baffle is slidably arranged on the guide column; a support spring sleeved on the support plate is fixed between the baffle and the support plate; a second one-way valve is arranged on the exhaust pipe; a spiral groove is opened on the inner circumferential side of the exhaust pipe; an annular sleeve is rotatably arranged on the circumferential side of the baffle; a rotating rod is fixed to the circumferential side of the annular sleeve, and an extension plate is fixed to the circumferential side of the annular sleeve; a plurality of second stirring plates are evenly fixed to the side of the extension plate; a connecting ball that slides in cooperation with the spiral groove is fixed to the end of the rotating rod.

[0015] The present invention is further configured as follows: a third one-way valve is arranged on the ear tube; a filling layer is filled between the outer hose and each air supply pipe; a rotating shaft is arranged on the inner wall of the collecting ball shell for uniform rotation; a stirring blade is fixed on the rotating shaft; a cold air inlet pipe and an air outlet pipe are sequentially connected to the side surfaces of the sedimentation box; an exhaust pipe is connected to the side surfaces of the sedimentation box; a connecting pipe is connected to the side surfaces of the exhaust pipe; a control valve electrically connected to the output end of the controller is arranged on the connecting pipe.

[0016] The advantages of the present invention are:

[0017] In the present invention, each group of air supply pipes is continuously ventilated, and each group of reaction gases is drawn into the corresponding collecting ball shell in cooperation with the piston air outlet assembly. The flowing airflow drives the blades to rotate, and the multiple groups of reaction gases entering the collecting ball shell are pre-mixed. The multiple groups of piston air outlet assemblies are evenly arranged in the sedimentation box, and the reaction gases can be transported to multiple areas in the sedimentation box, thereby improving the uniformity of dispersion of the reaction gases in various areas of the sedimentation box and improving the uniformity of mixing between the multiple reaction gases.

[0018] The present invention controls the rotation of the guide component to drive the second piston in each group of piston outlet components to slide back and forth in the second piston cylinder, and periodically and quantitatively draws the premixed mixed gas in the corresponding collecting ball shell into the second piston cylinder. During the discharge through the exhaust pipe, the airflow pushes the baffle to slide along the guide column, thereby driving the connecting ball to slide in the spiral groove, and then driving the annular sleeve to rotate, so that each group of second stirring plates stirs the discharged mixed gas, further improving the mixing degree of the mixed gas. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 The present invention is a schematic structural diagram of a gas supply device for a silicon carbide epitaxial chemical vapor deposition system.

[0020] Figure 2 It is a schematic structural diagram of the sedimentation box of the present invention.

[0021] Figure 3 It is a schematic structural diagram of the sealing cover of the present invention.

[0022] Figure 4 It is a schematic structural diagram of the sealing cover of the present invention from another angle.

[0023] Figure 5 For the present invention Figure 4 A magnified image of area A.

[0024] Figure 6 It is a schematic structural diagram of the guide assembly of the present invention.

[0025] Figure 7 It is a schematic structural diagram of the piston air outlet assembly of the present invention.

[0026] Figure 8 For the present invention Figure 7 A magnified view of area B.

[0027] Fig. 9 It is a schematic structural diagram of the air supply pipe assembly of the present invention.

[0028] Fig.10 It is a structural schematic diagram of a partial cross-sectional view of the air supply pipe assembly of the present invention.

[0029] Fig.11 For the present invention Fig.10 Schematic diagram of the structure from the right view perspective.

[0030] Fig.12 It is a structural schematic diagram of the sedimentation box, piston air outlet component and guide component assembly of the present invention.

[0031] Fig.13 For the present invention Fig.12 Schematic diagram of the structure from a top-down perspective.

[0032] In the figure: 1, sedimentation box; 2, sealing cover; 3, ear plate; 4, semi-annular tube; 5, L-shaped guide tube; 6, air supply pipe assembly; 7, outer hose; 8, air supply pipe; 9, collecting ball shell; 10, connecting pipe; 11, first one-way valve; 12, ear tube; 13, sealing ring; 14, mounting pipe; 15, piston outlet assembly; 16, guide assembly; 17, connecting flange; 18, bearing platform; 19, temperature sensor; 20, air pressure sensor; 21, controller; 22, support plate; 23, support ring; 24, annular groove; 25, swivel; 26, annular rail; 27, fixed ring; 28, vertical plate; 29, slide groove; 30, jack; 31, isolation cover; 32, annular plate; 33, slide plate; 34, fixed plate; 35, first piston cylinder; 36, first piston rod; 37, first piston; 38, plug ball; 39, reset spring; 4 0, guide rope tube; 41, screw; 42, handle; 43, ball seat; 44, ball head; 45, connecting rope; 46, inner magnet; 47, mounting frame; 48, drive motor; 49, mounting plate; 50, outer magnet; 51, curved guide plate; 52, connecting rod; 53, first stirring plate; 54, second piston cylinder; 55, exhaust pipe; 56, second piston; 57, second piston rod; 58, connecting spring; 59, Support plate; 60, guide column; 61, baffle; 62, support spring; 63, second one-way valve; 64, spiral groove; 65, rotating rod; 66, connecting ball; 67, third one-way valve; 68, filling layer; 69, rotating shaft; 70, moving blade; 71, cold air inlet pipe; 72, air outlet pipe; 73, exhaust pipe; 74, connecting pipe; 75, guide ball; 76, annular sleeve; 77, extension plate; 78, second stirring plate. DETAILED DESCRIPTION

[0033] It should be noted that, in the absence of conflict, the embodiments and features in the embodiments of the present application may be combined with each other. The present invention will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.

[0034] It should be noted that, unless otherwise specified, all technical and scientific terms used in this application have the same meanings as commonly understood by ordinary technicians in the technical field to which this application belongs.

[0035] In the present invention, unless otherwise specified, the directions used, such as "up" and "down", usually refer to the directions shown in the drawings, or to the vertical, perpendicular or gravity directions; similarly, for ease of understanding and description, "left" and "right" usually refer to the left and right shown in the drawings; "inside" and "outside" refer to the inside and outside relative to the outline of each component itself, but the above-mentioned directions are not used to limit the present invention.

[0036] For example, see Figure 1-13 , the present invention provides the following technical solutions:

[0037] A gas supply device for a silicon carbide epitaxial chemical vapor deposition system, specifically, comprises a precipitation box 1 and a sealing cover 2 covered on the precipitation box 1; a plurality of ear plates 3 are evenly fixed on the side surface of the precipitation box 1; a semi-annular tube 4 is fixed between each ear plate 3; an L-shaped guide tube 5 is symmetrically fixed in the semi-annular tube 4; a gas supply pipe assembly 6 adapted to the semi-annular tube 4 is passed through between the two L-shaped guide tubes 5; the gas supply pipe assembly 6 comprises an outer hose 7; a plurality of gas supply pipes 8 are arranged in a circumferential array inside the outer hose 7, and a plurality of gas supply pipes 8 are arranged in a linear array inside the outer hose 7; A number of collecting ball shells 9 are arranged; a connecting pipe 10 is arranged between the collecting ball shells 9 and each air supply pipe 8; a first one-way valve 11 is arranged on the connecting pipe 10; each collecting ball shell 9 is penetrated by an outer hose 7 and is connected to an ear tube 12; a sealing ring 13 is arranged at the end of the ear tube 12; mounting tubes 14 which are plugged into and matched with the sealing ring 13 are evenly penetrated on the side surface of the sedimentation box 1; a piston air outlet assembly 15 is arranged at the end of the mounting tube 14; a guide assembly 16 which is adapted to each piston air outlet assembly 15 is rotatably arranged inside the sedimentation box 1.

[0038] Working principle of the first embodiment:

[0039] The corresponding reaction gas continuously flows through each group of gas supply pipes 8, and both ends of the gas supply pipes 8 are connected to the corresponding external reaction gas storage tanks. The corresponding boosting equipment is used to realize the circulation and transportation of the corresponding reaction gas in the reaction gas storage. The piston gas outlet assembly 15 is used to draw each group of reaction gas into the corresponding collecting ball shell 9 to pre-mix multiple groups of reaction gases. Multiple groups of piston gas outlet assemblies 15 are evenly arranged in the sedimentation box 1, and the reaction gas can be transported to multiple areas in the sedimentation box 1, thereby improving the uniformity of dispersion of the reaction gas in each area of ​​the sedimentation box 1, and at the same time improving the uniformity of mixing between multiple reaction gases.

[0040] For example 2, please refer to Figure 1-13, this embodiment 2 makes the following improvements on the basis of embodiment 1. Specifically, the sealing cover 2 and the outer peripheral side of the sedimentation box 1 are fixed with a connecting flange 17; the sealing cover 2 and the connecting flange 17 on the sedimentation box 1 are fixedly connected by fastening bolts; a supporting platform 18 for supporting silicon carbide crystals is fixed to the inner bottom surface of the sedimentation box 1, and a spiral electric heating wire is installed inside it; a temperature sensor 19 and an air pressure sensor 20 are installed on the top of the sealing cover 2, and a controller 21 is installed on the top; the input end of the controller 21 is electrically connected to the temperature sensor 19 and the air pressure sensor 20 respectively, and its output end is electrically connected to the spiral electric heating wire.

[0041] Support plates 22 are symmetrically fixed to the inner wall of the sedimentation box 1; a support ring 23 is fixed between the two support plates 22 and is coaxial with the sedimentation box 1; an annular groove 24 is provided on the inner peripheral side of the support ring 23; the guide assembly 16 includes a swivel 25; an annular rail 26 that rotates with the annular groove 24 is fixed to the outer peripheral side of the swivel 25; a fixing ring 27 is fixed to the bottom of the swivel 25; a number of vertical plates 28 are evenly fixed on the surface of the fixing ring 27; sliding grooves 29 are symmetrically provided on the sides of the vertical plates 28, and a socket 30 is provided on the side between the two sliding grooves 29.

[0042] An isolation cover 31 is fixed on the top of the sealing cover 2, and an annular plate 32 is rotatably provided on the top thereof; a plurality of slide plates 33 slidably matched with the corresponding slide grooves 29 are evenly fixed on the bottom of the annular plate 32; a fixing plate 34 is fixed between two adjacent slide plates 33; a first piston cylinder 35 is fixed on the side of the fixing plate 34; a first piston rod 36 is slidably provided inside the first piston cylinder 35; a first piston 37 slidably matched with the first piston cylinder 35 is fixed at one end of the first piston rod 36, and a plug-in ball 38 pluggable matched with the socket 30 is fixed at the other end thereof; a return spring 39 is fixed between the first piston 37 and the first piston cylinder 35.

[0043] A guide rope tube 40 is provided at the end of the first piston cylinder 35; a screw rod 41 is provided at the top of the sealing cover 2 for rotation through a thread; a handle 42 is fixed to the top of the screw rod 41, and a ball seat 43 is fixed to the bottom of the screw rod 41; a ball head 44 is provided at a ball joint in the ball seat 43; a connecting rope 45 that passes through the corresponding guide rope tube 40 is connected between the first piston 37 and the ball head 44.

[0044] A cold air inlet pipe 71 and an air outlet pipe 72 are sequentially connected to the side of the sedimentation box 1; an exhaust pipe 73 is connected to the side of the sedimentation box 1; a connecting pipe 74 is connected to the side of the exhaust pipe 73; and a control valve electrically connected to the output end of the controller 21 is provided on the connecting pipe 74.

[0045] Working principle of the second embodiment:

[0046] By inserting each set of sealing rings 13 on the outer hose 7 into the corresponding mounting tube 14 and fixing the connection by tightening bolts, the outer hose 7 is placed in the semi-annular tube 4, and its two ends are respectively connected to the inlet pipe and outlet pipe of the corresponding external reaction gas storage tube, thereby completing the assembly of the gas supply pipe assembly 6.

[0047] By sliding the slide plate 33 on the sealing cover 2 down along the corresponding slide groove 29, the plug-in ball 38 slides along the side of the vertical plate 28. At this time, the return spring 39 is compressed. When the plug-in ball 38 slides to the position of the socket 30, under the elastic return force of the return spring 39, the plug-in ball 38 is driven to be inserted into the corresponding socket 30, completing the clamping and fixing of the slide plate 33 and the guide assembly 16, so that the guide assembly 16 can rotate synchronously with the rotation of the annular plate 32; when the sealing cover 2 needs to be removed, it is necessary to rotate the screw rod 41 to drive the screw rod 41 to rotate and rise, and pull the corresponding first piston 37 along the inner wall of the first piston cylinder 35 through each group of connecting ropes 45, so that the return spring 39 is compressed, and the plug-in ball 38 is pulled out from the corresponding socket 30, and the clamping and fixing of the guide assembly 16 can be released.

[0048] By placing the silicon carbide crystal into the supporting platform 18, a sealing cover 2 is installed on the cover to complete the clamping fixation of the slide plate 33 and the guide assembly 16, and the sealing cover 2 is fixed to the sedimentation box 1 by tightening bolts; the temperature and air pressure inside the sedimentation box 1 are monitored in real time by the temperature sensor 19 and the air pressure sensor 20.

[0049] By connecting the exhaust pipe 73 to an external vacuum pump, the external vacuum pump is controlled to start, and the air in the precipitation box 1 is extracted through the exhaust pipe 73; the inside of the precipitation box 1 is heated by controlling the start of the spiral electric heating wire; after the silicon carbide epitaxial chemical vapor deposition is completed, cold air is introduced into the precipitation box 1 through the box cold air inlet pipe 71 to cool the silicon carbide crystals after coating, and then discharged through the outlet pipe 72.

[0050] For example 3, please refer to Figure 1-13 The third embodiment makes the following improvements on the basis of the second embodiment. Specifically, an inner magnet 46 arranged inside the isolation cover 31 is fixed on the top of the annular plate 32; a mounting frame 47 is fixed on the top of the sealing cover 2; a driving motor 48 electrically connected to the output end of the controller 21 is installed on the top of the mounting frame 47; a mounting plate 49 is fixed on the output end of the driving motor 48; an outer magnet 50 arranged outside the isolation cover 31 is fixedly installed on the bottom surface of the mounting plate 49.

[0051] A number of curved guide plates 51 are evenly fixed on the side surface of the fixed ring 27; a connecting rod 52 is fixed on the bottom surface of the curved guide plate 51; a number of first stirring plates 53 are evenly fixed on the side surface of the connecting rod 52; the piston air outlet assembly 15 includes a second piston cylinder 54 fixedly connected to the mounting tube 14 by fastening bolts; an exhaust pipe 55 is connected to the side surface of the second piston cylinder 54; a second piston 56 is slidably arranged inside the second piston cylinder 54; a second piston rod 57 is fixed on the side surface of the second piston 56; a guide ball 75 compatible with the curved guide plate 51 is fixed on the end of the second piston rod 57; a connecting spring 58 sleeved on the second piston rod 57 is connected between the second piston 56 and the second piston cylinder 54.

[0052] A support plate 59 is fixed to the end of the exhaust pipe 55; a guide column 60 is fixed to the side of the support plate 59; a baffle 61 is slidably arranged on the guide column 60; a support spring 62 sleeved on the support plate 59 is fixed between the baffle 61 and the support plate 59;

[0053] A second one-way valve 63 is provided on the exhaust pipe 55; a spiral groove 64 is provided on the inner circumferential side of the exhaust pipe 55; an annular sleeve 76 is rotatably provided on the circumferential side of the baffle 61; a rotating rod 65 is fixed to the circumferential side of the annular sleeve 76, and an extension plate 77 is fixed to the circumferential side of the annular sleeve 76; a plurality of second stirring plates 78 are evenly fixed to the side of the extension plate 77; a connecting ball 66 that slides with the spiral groove 64 is fixed to the end of the rotating rod 65.

[0054] The ear tube 12 is provided with a third one-way valve 67 ; a filling layer 68 is provided between the outer hose 7 and each air supply pipe 8 ; a rotating shaft 69 is provided on the inner wall of the collecting ball shell 9 for uniform rotation; and a moving blade 70 is fixed on the rotating shaft 69 .

[0055] Working principle of the third embodiment:

[0056] The inner magnet 46, the isolation cover 31 and the outer magnet 50 form a magnetic transmission coupling. The magnetic transmission coupling is a non-contact coupling. It is generally composed of two inner and outer magnets, which are separated by an isolation cover in the middle. The inner magnet is connected to the driven part, and the outer magnet is connected to the power part. In addition to the buffering and vibration absorption function of the elastic coupling, the biggest feature of the magnetic transmission coupling is that it breaks the structural form of the traditional coupling and adopts a new magnetic coupling principle to achieve the transmission of force and torque between the driving shaft and the driven shaft without direct contact, and can transform the dynamic seal into a static seal to achieve zero leakage.

[0057] By controlling the start-up drive motor 48 to drive the outer magnet 50 to rotate, the inner magnet 46 together with the annular plate 32 is driven to rotate, and then the guide assembly 16 is driven to rotate. In the initial state, at least one group of guide balls 75 corresponding to the multiple groups of piston air outlet assemblies 15 is pressed against the fixed ring 27 under the elastic force of the corresponding connecting spring 58, and the remaining guide balls 75 are pressed against the highest point of the curved guide plate 51, so that each group of piston air outlet assemblies 15 can both draw air and exhaust air, thereby achieving continuity of air supply.

[0058] By arranging a first one-way valve 11 on the connecting tube 10 and a third one-way valve 67 on the ear tube 12, the premixed gas in the collecting ball shell 9 can only be discharged into the second piston cylinder 54 through the sealing ring 13, and by arranging a second one-way valve 63 on the exhaust pipe 55, the premixed gas in the second piston cylinder 54 can only be discharged into the sedimentation box 1 through the exhaust pipe 55; when the guide ball 75 slides from the fixed ring 27 to the curved guide plate 51, the second piston 56 slides toward the inside of the sedimentation box 1 to realize the pumping action; when the guide ball 75 slides from the curved guide plate 51 to the fixed ring 27, the second piston 56 discharges the premixed gas into the sedimentation box 1 through the exhaust pipe 55 to realize the exhaust action.

[0059] Each group of air supply pipes 8 is continuously ventilated, and each group of reaction gases is drawn into the corresponding collecting ball shell 9 in cooperation with the piston air outlet assembly 15. The flowing airflow drives the moving blades 70 to rotate, and the multiple groups of reaction gases entering the collecting ball shell 9 are pre-mixed. The multiple groups of piston air outlet assemblies 15 are evenly arranged in the sedimentation box 1, and the reaction gases can be transported to multiple areas in the sedimentation box 1, thereby improving the uniformity of dispersion of the reaction gases in various areas of the sedimentation box 1, and at the same time improving the uniformity of mixing between multiple reaction gases.

[0060] When the premixed gas is discharged through the exhaust pipe 55, the airflow pushes the baffle 61 to slide along the guide column 60, thereby driving the connecting ball 66 to slide in the spiral groove 64, and then driving the annular sleeve 76 to rotate, so that each group of second stirring plates 78 stirs the discharged mixed gas, further improving the mixing degree of the mixed gas.

[0061] Obviously, the above-described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present invention.

[0062] It should be noted that the terms used herein are only for describing specific embodiments and are not intended to limit the exemplary embodiments according to the present application. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. In addition, it should be understood that when the terms "comprise" and / or "include" are used in this specification, it indicates the presence of features, steps, operations, devices, components and / or combinations thereof.

[0063] It should be noted that the terms "first", "second", etc. in the specification and claims of the present application and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the numbers used in this way can be interchanged where appropriate, so that the embodiments of the present application described herein can be implemented in an order other than those illustrated or described herein.

[0064] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

[0065] The above is only a preferred embodiment of the present invention, and the protection scope of the present invention is not limited to the above embodiments. All technical solutions under the concept of the present invention belong to the protection scope of the present invention. It should be pointed out that for ordinary technicians in this technical field, some improvements and modifications without departing from the principle of the present invention should also be regarded as the protection scope of the present invention.

Claims

1. A gas supply device for a silicon carbide epitaxial chemical vapor deposition system, comprising a precipitation box (1) and a sealing cover (2) disposed on the precipitation box (1); characterized in that: A plurality of ear plates (3) are evenly fixed on the side surface of the sedimentation box (1); a semi-annular tube (4) is fixed between each of the ear plates (3); an L-shaped guide tube (5) is symmetrically fixed in the semi-annular tube (4); and an air supply pipe assembly (6) adapted to the semi-annular tube (4) is passed through between the two L-shaped guide tubes (5); The air supply pipe assembly (6) comprises an outer hose (7); a plurality of air supply pipes (8) are arranged in a circumferential array inside the outer hose (7), and a plurality of collecting ball shells (9) are arranged in a linear array inside the outer hose (7); a connecting pipe (10) is arranged in communication between the collecting ball shell (9) and each of the air supply pipes (8); and a first one-way valve (11) is arranged on the connecting pipe (10); Each of the collecting ball shells (9) penetrates the outer hose (7) and is connected to an ear tube (12); the end of the ear tube (12) is connected to a sealing ring (13); and the side surface of the sedimentation box (1) is evenly penetrated by mounting tubes (14) that are plugged into and matched with the sealing ring (13); The end of the mounting pipe (14) is connected to a piston outlet assembly (15); a guide assembly (16) adapted to each piston outlet assembly (15) is rotatably arranged inside the sedimentation box (1); A support plate (22) is symmetrically fixed to the inner wall of the sedimentation box (1); a support ring (23) is fixed between the two support plates (22) and is coaxial with the sedimentation box (1); an annular groove (24) is provided on the inner circumferential side of the support ring (23); the guide assembly (16) comprises a rotating ring (25); an annular rail (26) that is rotatably matched with the annular groove (24) is fixed to the outer circumferential side of the rotating ring (25); a fixing ring (27) is fixed to the bottom of the rotating ring (25); a plurality of vertical plates (28) are evenly fixed on the surface of the fixing ring (27); sliding grooves (29) are symmetrically provided on the side of the vertical plate (28), and a plug hole (30) is provided on the side of the vertical plate (28) located between the two sliding grooves (29); A plurality of curved guide plates (51) are evenly fixed on the circumferential side surface of the fixing ring (27); a connecting rod (52) is fixed on the bottom surface of the curved guide plate (51); a plurality of first stirring plates (53) are evenly fixed on the circumferential side surface of the connecting rod (52); the piston air outlet assembly (15) comprises a second piston cylinder (54) fixedly connected to the mounting tube (14) by means of fastening bolts; an exhaust pipe (55) is connected to the circumferential side surface of the second piston cylinder (54); a second piston (56) is slidably arranged inside the second piston cylinder (54); a second piston rod (57) is fixed on the side surface of the second piston (56); a guide ball (75) adapted to the curved guide plate (51) is fixed on the end of the second piston rod (57); a connecting spring (58) sleeved on the second piston rod (57) is connected between the second piston (56) and the second piston cylinder (54); A support plate (59) is fixed to the end of the exhaust pipe (55); a guide column (60) is fixed to the side of the support plate (59); a baffle plate (61) is slidably arranged on the guide column (60); a support spring (62) sleeved on the support plate (59) is fixed between the baffle plate (61) and the support plate (59); a second one-way valve (63) is arranged on the exhaust pipe (55); a spiral groove (64) is provided on the inner circumferential side of the exhaust pipe (55); an annular sleeve (76) is rotatably arranged on the circumferential side of the baffle plate (61); a rotating rod (65) is fixed to the circumferential side of the annular sleeve (76), and an extension plate (77) is fixed to the circumferential side of the annular sleeve (76); a plurality of second stirring plates (78) are evenly fixed to the side of the extension plate (77); a connecting ball (66) slidably engaged with the spiral groove (64) is fixed to the end of the rotating rod (65); The ear tube (12) is provided with a third one-way valve (67); a filling layer (68) is provided between the outer hose (7) and each air supply pipe (8); a rotating shaft (69) is provided on the inner wall of the collecting ball shell (9) so as to rotate evenly; a shifting blade (70) is fixed on the rotating shaft (69); a cold air inlet pipe (71) and an air outlet pipe (72) are provided on the peripheral side of the sedimentation box (1) in sequence; an exhaust pipe (73) is provided on the peripheral side of the sedimentation box (1); a connecting pipe (74) is provided on the peripheral side of the exhaust pipe (73); a control valve electrically connected to an output end of the controller (21) is provided on the connecting pipe (74).

2. The gas supply device for a silicon carbide epitaxial chemical vapor deposition system according to claim 1, characterized in that: The sealing cover (2) and the sedimentation box (1) are both fixed with connecting flanges (17) on their outer peripheral sides; the sealing cover (2) and the connecting flanges (17) on the sedimentation box (1) are fixedly connected by fastening bolts; A support platform (18) for supporting silicon carbide crystals is fixed to the bottom surface of the precipitation box (1), and a spiral electric heating wire is installed inside the support platform (18); a temperature sensor (19) and an air pressure sensor (20) are installed on the top of the sealing cover (2), and a controller (21) is installed on the top; the input end of the controller (21) is electrically connected to the temperature sensor (19) and the air pressure sensor (20), respectively, and the output end is electrically connected to the spiral electric heating wire.

3. The gas supply device of a silicon carbide epitaxial chemical vapor deposition system according to claim 2, characterized in that: An isolation cover (31) is fixed on the top of the sealing cover (2), and an annular plate (32) is rotatably provided through the top of the sealing cover (2); a plurality of slide plates (33) slidably matched with corresponding slide grooves (29) are evenly fixed on the bottom of the annular plate (32); A fixing plate (34) is fixed between two adjacent slide plates (33); a first piston cylinder (35) is fixedly passed through the side of the fixing plate (34); a first piston rod (36) is slidably arranged inside the first piston cylinder (35); a first piston (37) slidably matched with the first piston cylinder (35) is fixed at one end of the first piston rod (36), and a plug-in ball (38) plug-fitted with the plug hole (30) is fixed at the other end; a return spring (39) is fixed between the first piston (37) and the first piston cylinder (35).

4. The gas supply device for a silicon carbide epitaxial chemical vapor deposition system according to claim 3, characterized in that: A guide rope tube (40) is provided through the end of the first piston cylinder (35); a screw rod (41) is provided through the top of the sealing cover (2) for rotation; a handle (42) is fixed to the top of the screw rod (41), and a ball seat (43) is fixed to the bottom of the screw rod (41); a ball head (44) is provided in a ball hinge in the ball seat (43); a connecting rope (45) passing through the corresponding guide rope tube (40) is connected between the first piston (37) and the ball head (44).

5. The gas supply device for a silicon carbide epitaxial chemical vapor deposition system according to claim 4, characterized in that: An inner magnet (46) arranged inside the isolation cover (31) is fixed on the top of the annular plate (32); a mounting frame (47) is fixed on the top of the sealing cover (2); a driving motor (48) electrically connected to an output end of a controller (21) is mounted on the top of the mounting frame (47); a mounting plate (49) is fixed to the output end of the driving motor (48); and an outer magnet (50) arranged outside the isolation cover (31) is fixedly mounted on the bottom surface of the mounting plate (49).

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