Transfer chambers of semiconductor process equipment and semiconductor process equipment

Abstract

This invention provides a transfer chamber for semiconductor process equipment and the semiconductor process equipment itself, comprising: a cavity, a driving element, and a first plate, a second plate, a primary linkage mechanism, and a secondary linkage mechanism disposed within the cavity. Transfer ports are provided on two opposing walls of the cavity. The first and second plates extend in parallel directions, with the second plate positioned above the first plate. The second plate carries the workpiece to be processed. The driving element drives the first plate to reciprocate along its extension direction. The primary linkage mechanism converts the translational motion of the first plate into rotational power, which is then transmitted to the secondary linkage mechanism. The secondary linkage mechanism converts the rotational power into linear power, which is transmitted to the second plate to drive it to reciprocate along its extension direction. When the second plate reaches the first and second stroke endpoints, the workpiece can be removed from the cavity through the two transfer ports. This transfer chamber uses only one driving element, resulting in a small number of driving sources and a simple structure.

Description

Technical Field

[0001] This invention relates to the field of semiconductor technology, and more specifically, to a transfer chamber and semiconductor process equipment. Background Technology

[0002] In the manufacturing process of solar cells, silicon wafers and other components need to undergo multiple processes to sequentially form multiple film layers on the silicon wafers. Figure 1 The process flow for silicon wafer fabrication is shown. The semiconductor process equipment has multiple process chambers 200 and transfer chambers 100, which are arranged linearly. Each transfer chamber 100 is located between two process chambers 200. The transfer chamber 100 is used to transfer silicon wafers from an adjacent preceding process chamber to an adjacent following process chamber, so that the silicon wafers flow sequentially from front to back in each chamber.

[0003] Specifically, a transfer device is installed inside the transfer chamber to switch the position of the silicon wafer. Currently, the transfer device typically has a robotic arm and two drive sources. The robotic arm is used to carry the silicon wafer, one drive source is used to drive the robotic arm to rotate, and the rotation of the robotic arm changes direction to change the corresponding process chamber. The other drive source is used to drive the robotic arm to extend or retract, so that the robotic arm can enter or exit the process chamber.

[0004] However, using this transmission chamber to transfer silicon wafers results in a large number of driving sources and a complex structure. Summary of the Invention

[0005] The present invention aims to solve at least one of the technical problems existing in the prior art, and proposes a transfer chamber for semiconductor process equipment and semiconductor process equipment.

[0006] To achieve the purpose of this invention, a transfer chamber for a semiconductor process apparatus is provided, comprising: a cavity and a transfer device; transfer ports are provided on two opposing cavity walls of the cavity.

[0007] The transmission device includes a driving component and a first plate, a second plate, a primary linkage mechanism, and a secondary linkage mechanism disposed within the cavity. The first plate and the second plate are parallel along their extension directions, with the second plate positioned above the first plate. The side of the second plate facing away from the first plate is used to support the workpiece to be processed, and the second plate can move relative to the first plate along its extension direction. The driving component is connected to the first plate in a transmission manner and is used to drive the first plate to reciprocate and translate along its extension direction.

[0008] The primary linkage mechanism is used to convert the translational motion of the first plate into rotational power and transmit it to the secondary linkage mechanism; the secondary linkage mechanism is used to convert the rotational power into linear power and transmit it to the second plate to drive the second plate to reciprocate along its extension direction; and when the second plate moves from the initial position to the end of the first stroke, the workpiece is removed from the cavity through one of the two transfer ports, and when the second plate moves from the initial position to the end of the second stroke, the workpiece is removed from the cavity through the other of the two transfer ports.

[0009] As described above, in the transmission chamber, the primary linkage mechanism includes a first rack and a linkage gear. The extension direction of the first rack is parallel to the extension direction of the first plate. The linkage gear meshes with the first rack and is configured to rotate with the translation of the first plate. The rotation axis of the linkage gear is parallel to the horizontal plane, and the extension direction of the rotation axis of the linkage gear is perpendicular to the extension direction of the first plate. The secondary linkage mechanism includes a second rack that is drivenly connected to the linkage gear. The extension direction of the second rack is parallel to the extension direction of the second plate and is fastened to the side of the second plate facing the first plate.

[0010] The transmission chamber described above further includes a fixed plate disposed within the chamber and fastened to the chamber wall. The fixed plate is located below the first plate and its extension direction is parallel to that of the first plate. A first rack is fastened to the side of the fixed plate facing the first plate. The first plate has a through hole, and a linkage gear is located within the through hole and rotatably connected to the first plate. The linkage gear meshes with the second rack.

[0011] In the transmission chamber described above, at least one slide is formed on the first plate, and the extension direction of the slide is parallel to the extension direction of the first plate; at least one of the fixed plate and the second plate is fastened with a sliding member, and the sliding member slides in cooperation with the slide.

[0012] The transmission chamber as described above, wherein the first plate has a side side that is parallel to the centerline of the transfer port and perpendicular to the horizontal plane, and a slide is formed on the side side.

[0013] In the transmission chamber described above, the sliding member includes a connecting rod and a roller, the roller being rotatably connected to one end of the connecting rod, and the other end of the connecting rod being fastened to one of a fixed plate and a second plate.

[0014] As described above, in the transmission chamber, the driving member is used to provide rotational power, and the transmission device further includes a transmission device for converting the rotational power provided by the driving member into linear power and transmitting it to the first plate.

[0015] As described above, in the transmission chamber, the transmission device includes a driving gear and a driven rack. The driving member is connected to the driving gear, the driving gear meshes with the driven rack, the driven rack is fastened to the first plate, and the extension direction of the driven rack is parallel to the extension direction of the first plate.

[0016] The transmission chamber as described above, wherein the driven rack is fastened to the side of the first plate facing the fixed plate.

[0017] In the transmission chamber described above, a step is formed on the fixed plate. The step includes a first step surface and a second step surface. The distance between the first step surface and the side of the fixed plate facing away from the first plate body is a first distance, and the distance between the second step surface and the side of the fixed plate facing away from the first plate body is a second distance. The first distance is greater than the second distance. The driven rack is in contact with the first step surface, and the extension direction of the rotation axis of the driving gear is perpendicular to the extension direction of the first plate body and the horizontal plane. The first rack is connected to the second step surface.

[0018] The transmission chamber as described above, wherein the drive gear is located between the first stepped surface and the first plate.

[0019] The transmission chamber as described above, wherein the driving element includes:

[0020] The main shaft has one end extending into the cavity to provide rotational power for the transmission device, while the other end extends to the outside of the cavity.

[0021] A rotary motor is located outside the cavity and is connected to the other end of the main shaft for transmission.

[0022] A seal is used to seal a cavity, thus isolating the cavity from the external environment.

[0023] In the transmission chamber described above, the sealing element is a magnetohydrodynamic sealing transmission element disposed outside the chamber, which is used to transmit the rotational power of the rotary motor to the main shaft.

[0024] As described above, in the transfer chamber, a plurality of anti-slip pads are provided on the side of the second plate facing away from the first plate; the transfer chamber also includes a carrier plate, which is placed on the anti-slip pads, and the side of the carrier plate facing away from the second plate is used to support the workpiece to be processed.

[0025] As another technical solution, the present invention also provides a semiconductor process apparatus, comprising: a plurality of process chambers and at least one transfer chamber provided in any of the embodiments of the present invention, wherein each transfer chamber is located between two process chambers.

[0026] The present invention has the following beneficial effects:

[0027] This invention provides a transfer chamber for semiconductor process equipment and the semiconductor process equipment. The transfer chamber is equipped with only one driving element. Therefore, the number of driving sources is small, the structure is simple, and only one driving element needs to be controlled to transfer the workpiece, making the control operation simple.

[0028] Furthermore, the second plate used to receive the workpiece achieves orientation change through reciprocating translation, eliminating the need for rotation. This reduces the time required for the workpiece to be transferred between adjacent process chambers, thus improving transport efficiency. Attached Figure Description

[0029] Figure 1 This is a schematic diagram of the silicon wafer fabrication process in related technologies;

[0030] Figure 2 A schematic diagram of a transmission chamber provided as an example of related technologies;

[0031] Figure 3 for Figure 2 The diagram shows a three-dimensional structural schematic of the transmission device in the transmission chamber.

[0032] Figure 4 A schematic diagram of a semiconductor process apparatus provided in an embodiment of this application;

[0033] Figure 5 for Figure 4 The diagram shown illustrates the transmission chamber when the second plate is at the end of the first stroke.

[0034] Figure 6 for Figure 4 The diagram shown illustrates the transmission chamber when the second plate is at the end of the second stroke.

[0035] Figure 7 A schematic diagram of another transmission device provided in the embodiments of this application;

[0036] Figure 8 A schematic diagram of another transmission device provided in the embodiments of this application;

[0037] Figure 9 for Figure 4 A three-dimensional schematic diagram of the transmission device in the transmission chamber is shown;

[0038] Figure 10 for Figure 4 The front view of the transmission device in the transmission chamber shown;

[0039] Figure 11 for Figure 4 An exploded view of the transmission device in the transmission chamber is shown.

[0040] Figure 12 for Figure 4A simplified motion analysis diagram of the primary and secondary linkage mechanisms in the transmission chamber is shown.

[0041] Figure 13 for Figure 4 A partial schematic diagram of the transmission device in the transmission chamber shown.

[0042] Explanation of reference numerals in the attached figures:

[0043] 1000 - Semiconductor process equipment;

[0044] 100 - Transmission chamber;

[0045] 110 - Cavity; 111 - Transmission port;

[0046] 120 - Transmission device; 121 - First plate; 1211 - Slide rail; 122 - Second plate; 1221 - Through hole; 1222 - Rotating shaft; 1223 - Anti-slip pad; 123 - Primary linkage mechanism; 1231 - First rack; 1232 - Linkage gear; 124 - Secondary linkage mechanism; 1241 - Second rack; 1242 - Reversing gear; 125 - Driving component; 1251 - Rotary motor; 1252 - Main shaft; 1253 - Seal; 126 - Fixed plate; 1261 - First step surface; 1262 - Second step surface; 127 - Transmission device; 1271 - Driving gear; 1272 - Driven rack; 128 - Sliding component; 1281 - Connecting rod; 1282 - Roller;

[0047] 130 - Carrier plate;

[0048] 200 - Process Chamber. Detailed Implementation

[0049] To enable those skilled in the art to better understand the technical solution of the present invention, the transmission chamber provided by the present invention will be described in detail below with reference to the accompanying drawings.

[0050] Figure 2 A schematic diagram of the transmission chamber 100a provided as an example of related technology. Figure 3 It shows Figure 2 Three-dimensional structure of the transmission device in the transmission chamber 100a. (See also...) Figure 2 and Figure 3 In the example of the related technology, the transmission device used in the transmission chamber 100a includes a first drive source 125a, a second drive source 125b, and a first gear 123a, a second gear 123b, a base 126a, a pulley system 124a, a connecting seat 121a and a robot arm 122a disposed in the transmission chamber 100a.

[0051] The shaft of the first drive source 125a is connected to the first gear 123a for driving the first gear 123a to rotate. The second gear 123b meshes with the first gear 123a and is fixed below the base 126a. A pulley system 124a is disposed on the side of the base 126a facing away from the second gear 123b. The pulley system 124a includes a driving pulley 1241a, a driven pulley 1242a, and a belt 1243a. The belt 1243a is wound around the driving pulley 1241a and the driven pulley 1242a. The shaft of the second drive source 125b passes through the base 126a and is connected to the driving pulley 1241a for driving. A connecting seat 121a is located above the base 126a and the pulley system 124a. The connecting seat 121a is slidably disposed on the side of the base 126a facing away from the second gear 123b and is connected to the belt 1243a. One end of the robot 122a is fixedly connected to the connecting base 121a, and the other end is a free end. The extension direction of the robot 122a is parallel to the extension direction of the base 126a. The robot 122a can be used to carry silicon wafers waiting to be processed.

[0052] In the initial state, the base 126a of the transmission device extends along the arrangement direction of each process chamber 200, and the free end of the robot arm 122a is aligned with the adjacent preceding process chamber 200. It should be understood that the operation of the transmission chamber 100a provided in the examples of related art is roughly as follows:

[0053] The robotic arm 122a picks up the part. The shaft of the second drive source 125b rotates to drive the drive pulley 1241a to rotate, the belt 1243a moves and drives the connecting seat 121a to move along the first direction on the base 126a. Figure 2 The robot arm 122a slides into the adjacent previous process chamber 200 to receive the workpiece to be processed after the previous process.

[0054] The robotic arm 122a returns to the transfer chamber 100a. The shaft of the second drive source 125b rotates to drive the drive pulley 1241a to rotate, the belt 1243a moves and drives the connecting seat 121a along the second direction on the base 126a. Figure 2 The robot arm 122a slides from the adjacent previous process chamber 200 and retracts into the transfer chamber 100a, so that the workpiece to be processed is transferred to the transfer chamber 100a.

[0055] The robot arm 122a reverses direction. The shaft of the first drive source 125a rotates to drive the base 126a to rotate, and the robot arm 122a rotates accordingly; until the base 126a rotates 180°, the robot arm 122a rotates until its free end is aligned with the adjacent next process chamber 200.

[0056] The robotic arm 122a places the component. The shaft of the second drive source 125b rotates to drive the drive pulley 1241a to rotate, the belt 1243a moves and drives the connecting seat 121a to move along the second direction on the base 126a. Figure 2 The robot arm 122a slides into the adjacent next process chamber 200 to place the workpiece to be processed in the process chamber 200 for processing.

[0057] The robotic arm 122a returns to the transfer chamber 100a. The shaft of the second drive source 125b rotates to drive the drive pulley 1241a to rotate, the belt 1243a moves and drives the connecting seat 121a on the base 126a along the first direction ( Figure 2 The robot arm 122a slides from the adjacent next process chamber 200 and retracts into the transfer chamber 100a.

[0058] The robot arm 122a changes direction. The shaft of the first drive source 125a rotates to drive the base 126a to rotate, and the robot arm 122a rotates accordingly; until the base 126a rotates 180°, the robot arm 122a rotates to the free end and realigns with the adjacent previous process chamber 200, ready for the next transfer.

[0059] Although this transmission device can switch the position of the workpiece between two adjacent process chambers, it requires two drive sources to drive the robot arm to rotate and extend, resulting in a large number of drive sources and a complex structure.

[0060] In addition, the transfer chamber has the following technical problems: First, it requires separate control of two drive sources to switch the robot arm between rotation and extension movements, making the control process complex; second, the robot arm's direction change is achieved by rotating the base, which requires a large transfer chamber to allow the base to rotate within it, and the base rotation takes longer than translation, resulting in low transfer efficiency; third, the workpiece needs to be in a high-temperature process environment, which leads to a high temperature in the process chamber. The heat from the process chamber is conducted to the transfer chamber, causing the belt of the pulley system to be easily damaged by the high temperature, resulting in low operational stability of the transfer device. Furthermore, the belt is prone to decomposition at high temperatures, producing impurity gases that flow into the process chamber and affect the processing quality of the workpiece.

[0061] To address the aforementioned technical problems, embodiments of this application provide a transfer chamber for a semiconductor process apparatus and a semiconductor process apparatus.

[0062] The semiconductor process equipment provided in this application includes multiple process chambers and at least one transfer chamber of the semiconductor process equipment. The process chambers and the transfer chambers are arranged linearly, and any one transfer chamber is located between two process chambers for transferring the workpiece to be processed from an adjacent preceding process chamber to an adjacent following process chamber, so that the workpiece to be processed flows sequentially in each process chamber.

[0063] Figure 4 A schematic diagram of a semiconductor process apparatus provided in an embodiment of this application is shown. Please refer to [link / reference]. Figure 4 The semiconductor process equipment 1000 has two process chambers 200 and one transfer chamber 100. It is understood that the number of process chambers 200 and transfer chambers is not limited to the above-mentioned number and can be designed according to actual operating conditions.

[0064] The transmission chamber 100 provided in the embodiments of this application will now be described in detail with reference to the accompanying drawings.

[0065] The transmission chamber 100 provided in this application embodiment includes a cavity 110 and a transmission device 120 (refer to the following...) Figure 9 As shown), each of the two opposing cavity walls in the cavity 110 is provided with a transfer port 111 (see below). Figure 6 As shown), one of the two transfer ports 111 is connected to the interior of the adjacent preceding process chamber 200, and the other of the two transfer ports 111 is connected to the interior of the adjacent following process chamber 200.

[0066] The transmission device 120 includes a drive unit 125, and a first plate 121, a second plate 122, a primary linkage mechanism 123, and a secondary linkage mechanism 124 disposed within the cavity 110 (see below). Figure 7 (As shown). The first plate 121 and the second plate 122 extend in parallel directions, specifically parallel to the extension direction of line II. The second plate 122 is located above the first plate 121. The side of the second plate 122 facing away from the first plate 121 is used to support the workpiece to be processed. The second plate 122 can move relative to the first plate 121 along its extension direction (i.e., parallel to the extension direction of line II).

[0067] The driving component 125 is connected to the first plate 121 for driving the first plate 121 to reciprocate along its extension direction (i.e., the extension direction parallel to line II). The primary linkage mechanism 123 converts the translational motion of the first plate 121 into rotational power, which is then transmitted to the secondary linkage mechanism 124. The secondary linkage mechanism 124 converts the rotational power into linear power, which is then transmitted to the second plate 122 to drive the second plate 122 to reciprocate along its extension direction (i.e., the extension direction parallel to line II).

[0068] In other words, both the first plate 121 and the second plate 122 can move along the first horizontal direction ( Figure 4 It can move in a straight line (X) or along the second horizontal direction (X). Figure 4 The line moves in a straight line (Y). The first horizontal direction X and the second horizontal direction Y are both parallel to the line II, and the first horizontal direction X and the second horizontal direction Y are opposite.

[0069] When the transmission device 120 is in the initial state, such as Figure 4 As shown, at this time, both the first plate 121 and the second plate 122 are in their initial positions, and the first plate 121 and the second plate 122 are located inside the cavity 110. Figure 5 for Figure 4 The schematic diagram shown illustrates the transmission chamber 100 when the second plate 122 is located at the end of the first stroke. Figure 5 As shown, when the driving component 125 drives the first plate 121 to translate from the initial position to the first limit position, the second plate 122 can translate from the initial position to the first stroke end point along the first horizontal direction X. At this time, the second plate 122 is removed from the cavity 110 through one of the two transfer ports 111 and extends into the adjacent previous process chamber 200 to pick up the part. Figure 6 for Figure 4 The schematic diagram shown depicts the transmission chamber 100 when the second plate 122 is at the end of the second stroke. Figure 6 As shown, when the driving member 125 drives the first plate 121 to translate from the initial position to the second limit position, the second plate 122 can translate from the initial position to the second stroke end point along the second horizontal direction Y. At this time, the second plate 122 is removed from the cavity 110 by the other of the two transfer ports 111 and extends into the adjacent previous process chamber 200 to place the part.

[0070] It should be understood that, please refer to the following: Figure 4 , Figure 5 and Figure 6 The first plate 121 and the second plate 122 can translate in the same direction. Alternatively, the first plate 121 and the second plate 122 can also translate in opposite directions. This embodiment uses the translation of the first plate 121 and the second plate 122 in the same direction as an example to roughly illustrate the working process of the transmission chamber 100:

[0071] Retrieval. The drive unit 125 operates to drive the first plate 121 to move along the first horizontal direction X. The primary linkage mechanism 123 provides rotational power to the secondary linkage mechanism 124 as the first plate 121 moves. The secondary linkage mechanism 124 converts the rotational power into linear power, which in turn drives the second plate 122 to move along the first horizontal direction X. Until the first plate 121 moves to the first limit position, the second plate 122 moves to the first stroke end point. The unloaded second plate 122 extends into the adjacent previous process chamber 200 to receive the workpiece to be processed after the process.

[0072] The workpiece to be processed is transferred to the transfer chamber 100. The drive unit 125 operates to drive the first plate 121 to move along the second horizontal direction Y, thereby driving the second plate 122 to also move along the second horizontal direction Y; until the first plate 121 returns from the first extreme position to the initial position, and the second plate 122 correspondingly returns from the first stroke end point to the initial position, the second plate 122 exits from the adjacent previous process chamber 200 and retracts into the transfer chamber 100, so that the workpiece to be processed is transferred into the transfer chamber 100.

[0073] The drive unit 125 operates to continue driving the first plate 121 to move along the second horizontal direction Y, thereby driving the second plate 122 to continue moving along the second horizontal direction Y; until the first plate 121 moves to the second limit position, the second plate 122 moves to the second stroke end point, and the second plate 122 extends into the adjacent subsequent process chamber 200 to place the workpiece to be processed in the process chamber 200 for processing, and the processed workpiece is taken away by the transmission device 120 of the subsequent transmission chamber.

[0074] The second plate 122 returns to the transfer chamber 100. The drive unit 125 operates to drive the first plate 121 to move along the first horizontal direction X, thereby driving the second plate 122 to also move along the first horizontal direction X; until the first plate 121 returns from the second extreme position to the initial position, the second plate 122 correspondingly returns from the second stroke end point to the initial position, and the unloaded second plate 122 exits from the adjacent next process chamber 200 and retracts into the transfer chamber 100, ready for the next transfer.

[0075] As can be seen, the transmission chamber 100 of this embodiment is provided with only one driving element 125. Therefore, the number of driving sources is small, the structure is simple, and only one driving element 125 needs to be controlled to transfer the workpiece to be processed, making the control operation simple.

[0076] Furthermore, the second plate 122, used to receive the workpiece, achieves reversal by reciprocating translation, eliminating the need for rotation. This reduces the time required for the workpiece to be transferred between adjacent process chambers 200, improving transfer efficiency. Simultaneously, the transfer chamber 100 is designed to accommodate only the first plate 121 and the second plate 122 extending in a direction parallel to line II, resulting in a relatively small volume and thus reducing production costs.

[0077] Specifically, for example in Figure 4 In the example shown, the distance between the two opposing cavity walls of cavity 110 along the direction parallel to line II is D, and the lengths of the first plate 121 and the second plate 122 along the direction parallel to line II are both d. When the transmission device 120 is in its initial state, the projections of the first plate 121 and the second plate 122 in their initial positions on the horizontal plane coincide. The distance between either end of the first plate 121 and the second plate 122 and the opposing cavity wall is θ. Therefore, Dd = 2θ, and 0 mm ≤ θ ≤ 20 mm. In this way, the dimension of cavity 110 along the direction parallel to line II is approximately equal to the lengths of the first plate 121 and the second plate 122, minimizing the volume of the transmission chamber 100 and improving the utilization rate of cavity 110. Of course, in other examples, the lengths of the first plate 121 and the second plate 122 can be different.

[0078] This section will detail the specific implementation methods of the primary linkage mechanism 123 and the secondary linkage mechanism 124 in some embodiments of this application.

[0079] To convert the translational motion of the first plate 121 into rotational power, the primary linkage mechanism 123 includes a first rack and a linkage gear. The extension direction of the first rack is parallel to the extension direction of the first plate 121, that is, the first rack also extends in a direction parallel to line II. The linkage gear meshes with the first rack and is configured to rotate with the translational motion of the first plate 121. The rotation axis of the linkage gear is parallel to the horizontal plane, and the extension direction of the rotation axis of the linkage gear is also perpendicular to the extension direction of the first plate 121. The secondary linkage mechanism 124 includes a second rack. The extension direction of the second rack is parallel to the extension direction of the second plate 122, that is, the second rack also extends in a direction parallel to line II. The second rack is fastened to the side of the second plate 122 facing the first plate 121, and the second rack is also drivenly connected to the linkage gear. Thus, the power transmission process of the transmission device 120 is as follows: the driving component 125 drives the first plate 121 to move, the linkage gear rotates as the first plate 121 moves, and the second rack moves under the drive of the rotational power provided by the linkage gear, thereby driving the second plate 122 to move.

[0080] It should be noted that the connection between the second rack and the linkage gear should be interpreted broadly, meaning that the second rack and the linkage gear are directly meshed (see below). Figure 7 As shown below, it can also be understood that the second rack and the linkage gear are driven by an intermediate medium (see below). Figure 8 (As shown).

[0081] Figure 7 A schematic diagram of another transmission device provided for an embodiment of this application. As an optional example of this application, please refer to... Figure 7 The first rack 1231 can be fastened to the first surface of the first plate 121 facing the second plate 122, and the linkage gear 1232 meshes with both the first rack 1231 and the second rack 1241. Here, the linkage gear 1232 can be connected to the cavity wall of the cavity 110 and can rotate relative to the cavity wall, and the cavity wall provides a stable mounting for the linkage gear 1232.

[0082] Figure 7 In the example shown, the transmission principle of the primary linkage mechanism 123 and the secondary linkage mechanism 124 is as follows: the first rack 1231 moves with the first plate 121, and the first rack 1231 and the linkage gear 1232 form a rack and pinion mechanism to convert the translation of the first plate 121 into rotational power. The linkage gear 1232 and the second rack 1241 form a rack and pinion mechanism to convert the rotational power into linear power. It should be understood that in this embodiment, the first plate 121 and the second plate 122 move in different directions. Specifically, when the driving member 125 drives the first plate 121 to move along the first horizontal direction X, the linkage gear 1232 rotates clockwise, and the second rack 1241 drives the second plate 122 to move along the second horizontal direction Y.

[0083] Figure 8 This is a schematic diagram of another transmission device provided in an embodiment of this application. Please refer to... Figure 8 ,exist Figure 7 Based on the example shown, the secondary linkage mechanism 124 may further include a reversing gear 1242. Both the linkage gear 1232 and the reversing gear 1242 are located between the first plate 121 and the second plate 122, and both can be connected to the cavity wall. The first rack 1231 meshes with the linkage gear 1232, the linkage gear 1232 directly meshes with the reversing gear 1242, and the reversing gear 1242 meshes with the second rack 1241. By providing the reversing gear 1242, the first plate 121 and the second plate 122 can translate in the same direction.

[0084] Furthermore, the linkage gear 1232 and the reversing gear 1242 form a gear pair. By reasonably designing the transmission ratio of this gear pair, the translation speed of the second plate 122 can be greater than that of the first plate 121. In this way, the displacement of the second plate 122 is greater than that of the first plate 121. This shortens the stroke range of the first plate 121 while ensuring that the second plate 122 moves out of the cavity 110, thereby helping to shorten the transmission time and effectively improve the transmission efficiency.

[0085] Of course, in some embodiments, the transmission device 120 may also include multiple gear pairs located between the linkage gear 1232 and the reversing gear 1242, so as to transmit the rotational power of the linkage gear 1232 to the reversing gear 1242.

[0086] Figure 9 for Figure 4 The diagram shows a three-dimensional view of the transmission device 120 in the transmission chamber 100. Figure 10 for Figure 4 The front view of the transmission device 120 in the transmission chamber 100 is shown. Figure 11 for Figure 4 The diagram shows an exploded view of the transmission device 120 in the transmission chamber 100. As another alternative example of this application, please refer to [the following text is also included]. Figure 4 , Figures 9 to 11 The transmission device 120 also includes a fixing plate 126 disposed within the cavity 110 and fastened to the cavity wall. The fixing plate 126 is located below the first plate 121, and the extending direction of the fixing plate 126 is parallel to the extending direction of the first plate 121. Thus, the fixing plate 126 extends in a direction parallel to line II, and the first plate 121 can move relative to the fixing plate 126. The first rack 1231 is fastened to the side of the fixing plate 126 facing the first plate 121. The first plate 121 is provided with a through hole 1221, and the linkage gear 1232 is located within the through hole 1221. The linkage gear 1232 is rotatably connected to the first plate 121 through a rotating shaft 1222, and the linkage gear 1232 simultaneously meshes with the first rack 1231 and the second rack 1241.

[0087] In this example, the transmission principle of the primary linkage mechanism 123 and the secondary linkage mechanism 124 is as follows: the driving component 125 drives the first plate 121 to translate, and the linkage gear 1232 meshes with the first rack 1231. Since the first rack 1231 is fixed on the fixed plate 126, when the first plate 121 translates, the linkage gear 1232 will roll along the first rack 1231. The linkage gear 1232 can be regarded as rotating around the rotation axis 1222. The second rack 1241, which meshes with the linkage gear 1232, drives the second plate 122 to translate. Specifically, when the first plate 121 translates along the first horizontal direction X, the linkage gear 1232 rolls with the first rack 1231, causing the linkage gear 1232 to rotate counterclockwise. Then, the second rack 1241 and the second plate 122 also translate along the first horizontal direction X.

[0088] Therefore, it can be seen that the first plate 121 and the second plate 122 of the transmission device 120 in this embodiment translate in the same direction. In this way, on the one hand, when the second plate 122 reaches the end of the first or second stroke, it extends in the same direction as the first plate 121, which helps to avoid the transmission device 120 occupying too much space. On the other hand, since the first plate 121 and the second plate 122 move in the same direction, the first plate 121 can provide support for the second plate 122 during the linear movement of the second plate 122, which helps to improve the stability of the second plate 122.

[0089] Moreover, in this embodiment, the linkage gear 1232 is mounted on the first plate 121 without needing to be rotatably connected to the cavity wall. As a result, the transmission device 120 has a high degree of integration and can be installed as a separate component, making installation convenient.

[0090] Figure 12 for Figure 4 A simplified motion analysis diagram of the primary linkage mechanism 123 and the secondary linkage mechanism 124 in the transmission chamber 100 is shown. Furthermore, as... Figure 12As shown, point A is the rotation center of the linkage gear 1232, point B is the meshing point between the linkage gear 1232 and the first rack 1231, and point C is the meshing point between the linkage gear 1232 and the second rack 1241. Taking the movement of the first plate 121 along the second horizontal direction Y as an example, assuming the translational velocity of the first plate 121 is V1, and the rotation center of the linkage gear 1232 rotates clockwise and moves with the first plate 121, then the linear velocity of the rotation center A is also V1, and the angular velocity is w, V1 = w * r, where r is the length of line AB. If the first rack 1231 is fixed, then the instantaneous velocity at point B is 0. The motion trend of the meshing point (i.e. point C) of the linkage gear 1232 and the second rack 1241 can be regarded as rotating clockwise with point B as the origin. Then the linear velocity of point C is V2 = w*R, where R is the length of line BC and R = 2r. Therefore, V2 = 2w*r = 2V1.

[0091] In other words, the moving speed of the second plate 122 is twice that of the first plate 121. Based on the proportional relationship between speed and displacement, it can be deduced that the displacement of the second plate 122 is also twice that of the first plate 121. This greatly shortens the travel range of the first plate 121, thereby reducing the transmission time and effectively improving transmission efficiency.

[0092] Furthermore, the transmission device 120 can be a symmetrical structure. Specifically, the linkage gear 1232 is located in the middle of the first plate 121. In this way, the first plate 121 can reciprocate in two opposite directions to realize the extension and retraction of the second plate 122, and the displacement of the first plate 121 from the initial position to the first limit position is the same as the displacement from the initial position to the second limit position, so that the length of the second plate 122 extending into the two adjacent process chambers 200 is consistent, thereby ensuring the consistency of the process.

[0093] according to Figure 4 In the example shown, the lengths of the first plate 121 and the second plate 122 along their extension direction (i.e., the extension direction parallel to line II) are both d. Please refer to this example together. Figure 5 When the first plate 121 moves along the first horizontal direction X and its displacement reaches d / 2, the second plate 122's displacement along the first horizontal direction X reaches d. The second plate 122 then translates to the end of its first stroke and extends into the adjacent preceding process chamber 200. Please combine this with... Figure 6 When the first plate 121 moves along the second horizontal direction Y and the displacement reaches d / 2, the second plate 122 moves along the second horizontal direction Y and the displacement reaches d. The second plate 122 then moves to the second stroke end point and extends into the adjacent next process chamber 200.

[0094] The length of the aforementioned fixing plate 126 along its extension direction (i.e., the extension direction parallel to line II) can also be d. When the transmission device 120 is in the initial state, the projections of the first plate 121, the second plate 122, and the fixing plate 126 on the horizontal plane coincide. In this way, the volume of the transmission chamber 100 is minimized as much as possible, and the utilization rate of the chamber 110 is improved.

[0095] As described above, the primary linkage mechanism 123 and the secondary linkage mechanism 124 of the transmission device 120 mainly adopt a gear and rack mechanism. The gear and rack mechanism is made of metal, and compared to a belt, the high-temperature process environment has less impact on it, thus helping to improve the transmission stability of the transmission chamber 100. Furthermore, the metal primary linkage mechanism 123 and the secondary linkage mechanism 124 will not decompose and release impurity gases due to high temperatures, preventing impurity gases from entering the process chamber 200 and affecting process quality.

[0096] There are several possibilities for the specific implementation of the aforementioned driver 125.

[0097] In one possible scenario, the drive element 125 is used to provide linear power to directly drive the first plate 121 to translate. In this embodiment, the drive element 125 can specifically be a linear motor, an electric actuator, etc.

[0098] In another possible scenario, such as Figures 9 to 11 As shown, the driving component 125 provides rotational power, and the transmission device 120 further includes a transmission device 127, which converts the rotational power provided by the driving component 125 into linear power and transmits it to the first plate 121. In this embodiment, the driving component 125 can specifically be a stepper motor, a servo motor, etc. The transmission device 127 may include, but is not limited to, the following possible implementations. For example, the transmission device 127 can be a lead screw and nut mechanism. Another example is that the transmission device 127 can be a worm gear mechanism. Yet another example is... Figure 11 As shown, the transmission device 127 may include a driving gear 1271 and a driven rack 1272. The driving member 125 is connected to the driving gear 1271, the driving gear 1271 meshes with the driven rack 1272, and the driven rack 1272 is fastened to the first plate 121 and extends along the extension direction of the first plate 121 (i.e., parallel to the extension direction of line II). Thus, the transmission device 127 is a gear and rack mechanism, which has the advantages of smooth transmission and high reliability.

[0099] The following section will describe in detail the positional relationship between the transmission device 127, consisting of the driving gear 1271 and the driven rack 1272, and other components of the transmission device 120.

[0100] The driven rack 1272 can be fastened to the side of the first plate 121. The side is the side of the first plate 121 that is perpendicular to the horizontal plane and parallel to the extending direction of line II. Alternatively, in an alternative embodiment, such as... Figure 13 As shown, the driven rack 1272 is fastened to the side of the first plate 121 facing the fixed plate 126. Wherein, Figure 13 for Figure 4 A partial schematic diagram of the transmission device 120 in the transmission chamber 100 is shown. In contrast, Figure 13 In the example shown, the fixed plate 126, the driven rack 1272, the first plate 121, and the second plate 122 are stacked sequentially along the thickness direction of the second plate 122, making full use of the cavity 110 in the height direction ( Figure 4 The space in the middle is Z).

[0101] Regardless of whether the driven rack 1272 is connected to the side of the first plate 121 or to the side of the first plate 121 facing the fixed plate 126, the rotation axis of the driving gear 1271 can be designed to be perpendicular to the horizontal plane and line II, or it can be designed to be perpendicular to line II and parallel to the horizontal plane. When the rotation axis of the driving gear 1271 is perpendicular to line II and parallel to the horizontal plane, the driving gear 1271 can be connected to the cavity wall of the cavity 110, and the cavity 110 provides mounting for the driving gear 1271.

[0102] In the embodiment where the driven rack 1272 is connected to the side of the first plate 121 facing the fixed plate 126, and the rotation axis of the driving gear 1271 is perpendicular to the horizontal plane and line II, please refer to [reference needed]. Figure 13 As shown, a step is further formed on the fixing plate 126. The step includes a first step surface 1261 and a second step surface 1262. The distance between the first step surface 1261 and the side of the fixing plate 126 facing away from the first plate body 121 is a first distance H1, and the distance between the second step surface 1262 and the side of the fixing plate 126 facing away from the first plate body 121 is a second distance H2. The first distance H1 is greater than the second distance H2. In this example, the driven rack 1272 is in contact with the first step surface 1261, and the first rack 1231 is connected to the second step surface 1262.

[0103] Thus, when the driven rack 1272 and the first rack 1231 are both located below the first plate 121, and the linkage gear 1232 meshes with both the first rack 1231 and the second rack 1241, the above arrangement can separate the driven rack 1272 from the first rack 1231, which helps to reduce the possibility of interference between the primary linkage mechanism 123 and the transmission device 127.

[0104] As a further optional example, the driving gear 1271 can be disposed between the first stepped surface 1261 and the first plate 121. In this way, the driving gear 1271 can easily mesh with the driven rack 1272, and the driving gear 1271 is separated from the first rack 1231, which helps reduce the possibility of interference between the primary linkage mechanism 123 and the transmission device 127. Furthermore, the transmission device 120 has a compact structure and high integration.

[0105] In some embodiments of this application, please refer to [the relevant documentation]. Figures 4 to 6 ,as well as Figures 9 to 11 The aforementioned drive component 125 may specifically include a spindle 1252, a rotary motor 1251, and a seal 1253. One end of the spindle 1252 extends into the cavity 110 to provide rotational power for the transmission device 127, while the other end extends outside the cavity 110. The rotary motor 1251 is located outside the cavity 110 and is connected to the other end of the spindle 1252 for driving the spindle 1252 to rotate. The seal 1253 seals the cavity 110, isolating it from the external environment.

[0106] This design places the rotary motor 1251 outside the cavity 110 to prevent it from occupying the internal space of the cavity 110 and to facilitate maintenance of the drive component 125. Furthermore, by designing a sealing element 1253, the vacuum sealing performance of the transmission chamber 100 and the process chamber 200 can be guaranteed to ensure the process quality of the workpiece.

[0107] For example, the seal 1253 may be a magnetohydrodynamic bearing, which is sleeved on the spindle 1252, cooperates with the spindle 1252, and is fixedly connected to the cavity 110. The magnetohydrodynamic bearing seals the cavity 110 by blocking the gap between the spindle 1252 and the cavity 110.

[0108] Replaceable examples, such as Figures 4 to 6 ,as well as Figures 9 to 11 As shown, the seal 1253 can also be, for example, a magnetic fluid sealing drive, which is disposed outside the cavity 110 and is used to transmit the rotational power of the rotary motor 1251 to the main shaft 1252. With this configuration, the sealing effect of the magnetic fluid sealing drive is reliable, ensuring that the inside of the cavity 110 is isolated from the external environment, and the magnetic fluid sealing drive can also transmit power.

[0109] Based on the above embodiments, please refer to Figure 11 and Figure 13As shown, four slide rails 1211 are formed on the first plate 121. The extension direction of the slide rails 1211 is parallel to the extension direction of the first plate 121, that is, the slide rails 1211 extend in a direction parallel to the straight line II. Two of the four slide rails 1211 are located above the other two. The second plate 122 is provided with two sets of sliding members 128, and the two sets of sliding members 128 are respectively slidably disposed in the two upper slide rails 1211. The fixed plate 126 is also provided with two sets of sliding members 128, and the two sets of sliding members 128 are slidably disposed in the two lower slide rails 1211.

[0110] Thus, by setting the slider 128 on the fixed plate 126 to cooperate with the slide rail 1211, the first plate 121 is guided to translate along the extension direction of the slide rail 1211. That is, the cooperation between the slider 128 and the slide rail 1211 has a guiding function to ensure that the first plate 121 moves back and forth along its extension direction (i.e., parallel to the extension direction of line II). Similarly, by setting the slider 128 on the second plate 122 to cooperate with the slide rail 1211, the second plate 122 is guided to translate along the extension direction of the slide rail 1211.

[0111] It should be noted that in some embodiments, only one of the fixed plate 126 and the second plate 122 may be fastened with a sliding member 128. In contrast, when both the fixed plate 126 and the second plate 122 are connected with sliding members 128, both the first plate 121 and the second plate 122 can be guided to reciprocate along the extending direction of the first plate 121. In some alternative embodiments, a slide rail 1211 may be formed on the fixed plate 126, the extending direction of which is parallel to the extending direction of the first plate 121; conversely, the first plate 121 is fastened with a sliding member 128.

[0112] It is understood that the number of slides 1211 is not limited to the above number and can be designed according to the actual working conditions. For example, two slides 1211 can be formed on the first plate 121, the slider 128 on the second plate 122 is slidably disposed on one of the slides 1211, and the slider 128 on the fixed plate 126 is slidably disposed on the other slide 1211.

[0113] Specifically, in Figure 10 and Figure 11In the example shown, each group of sliders 128 on the second plate 122 contains 9 sliders 128, so the corresponding slide rail 1211 contains 9 sliders 128; each group of sliders 128 on the fixed plate 126 contains 10 sliders 128, so the corresponding slide rail 1211 contains 10 sliders 128. It can be understood that the number of sliders 128 in each slide rail 1211 is not limited to the above numbers and can be designed according to actual working conditions. For example, the number of sliders 128 in each slide rail 1211 can be 1 or 2. Figure 10 In the example shown, by designing the slide rail 1211 to have 9 or 10 sliding members 128, the number of sliding members 128 that cooperate with the slide rail 1211 is increased, effectively improving the guiding effect and ensuring that the first plate 121 and / or the second plate 122 can reciprocate along its extension direction (i.e., the extension direction parallel to the line II).

[0114] In some feasible embodiments, when the second plate 122 is provided with a slider 128, the slider 128 can be fastened to the side of the second plate 122 facing the first plate 121. Correspondingly, the slide rail 1211 that cooperates with the slider 128 can be provided on the side of the first plate 121 facing the second plate 122.

[0115] In other possible ways, such as Figure 11 and Figure 13 As shown, the slide rail 1211 can be formed on the side of the first plate 121, and the slider 128 is connected to one of the side of the second plate 122 and the side of the fixed plate 126. By setting the slide rail 1211 on the side surface, it is beneficial to reduce the possibility of interference between the slider 128 and the primary linkage mechanism 123 and the secondary linkage mechanism 124.

[0116] The aforementioned slider 128 can be implemented in several ways. For example, slider 128 can be a slider. Another example is that slider 128 can be a pulley. And yet another example, please refer to [further details omitted]. Figure 13 The sliding member 128 includes a connecting rod 1281 and a roller 1282. The roller 1282 is rotatably connected to one end of the connecting rod 1281, and the other end of the connecting rod 1281 is fastened to one of the fixed plate 126 and the second plate 122. Compared with a slider or pulley, this embodiment sets the sliding member 128 to include a roller 1282. The roller 1282 rolls along the slide rail 1211, and the friction between it and the slide rail 1211 is rolling friction. The frictional force generated by rolling friction is small, so as to ensure the smooth linear movement of the first plate 121 and the second plate 122 as much as possible.

[0117] The aforementioned slide 1211 can also be implemented in several ways. Please refer to [the relevant documentation] for details. Figure 13As shown, slide 1211 can be a groove. Of course, in other examples, a guide rail can also be connected to the first plate 121, and slide 1211 is the guide groove on the guide rail.

[0118] In some embodiments, combined with Figure 5 and Figure 9 As shown, the second plate 122 has multiple anti-slip pads 1223 on its side facing away from the first plate 121. The transfer chamber 100 also includes a carrier plate 130, which is placed on the anti-slip pads 1223. The side of the carrier plate 130 facing away from the second plate 122 is used to support the workpiece to be processed. With this design, the anti-slip pads 1223 provide an anti-slip function, and the carrier plate 130 and the workpiece it supports can be stably placed on the second plate 122. The carrier plate 130 can support one or more workpieces to be processed.

[0119] It is understood that the above embodiments are merely exemplary implementations used to illustrate the principles of the present invention, and the present invention is not limited thereto. For those skilled in the art, various modifications and improvements can be made without departing from the spirit and essence of the present invention, and these modifications and improvements are also considered to be within the scope of protection of the present invention.

Claims

1. A transfer chamber for a semiconductor process apparatus, characterized in that, include: The cavity has transfer ports on both opposite cavity walls; The transmission device includes a driving component and a first plate, a second plate, a primary linkage mechanism, and a secondary linkage mechanism disposed within the cavity. The first plate and the second plate extend in parallel directions. The second plate is located above the first plate. The side of the second plate facing away from the first plate is used to support the workpiece to be processed. The second plate can move relative to the first plate along its extension direction. The driving component is connected to the first plate body in a transmission manner, and is used to drive the first plate body to reciprocate and translate along its extension direction. The primary linkage mechanism is used to convert the translational motion of the first plate into rotational power and transmit it to the secondary linkage mechanism. The secondary linkage mechanism is used to convert the rotational power into linear power and transmit it to the second plate to drive the second plate to reciprocate and translate along its extension direction. Furthermore, when the second plate moves from its initial position to the end of the first stroke, the workpiece to be processed is removed from the cavity through one of the two transfer ports; when the second plate moves from its initial position to the end of the second stroke, the workpiece to be processed is removed from the cavity through the other of the two transfer ports.

2. The transmission chamber according to claim 1, characterized in that, The primary linkage mechanism includes a first rack and a linkage gear. The extension direction of the first rack is parallel to the extension direction of the first plate. The linkage gear meshes with the first rack and is configured to rotate as the first plate translates. The rotation axis of the linkage gear is parallel to the horizontal plane, and the extension direction of the rotation axis of the linkage gear is perpendicular to the extension direction of the first plate. The secondary linkage mechanism includes a second rack that is connected to the linkage gear. The extension direction of the second rack is parallel to the extension direction of the second plate and is fastened to the side of the second plate facing the first plate.

3. The transmission chamber according to claim 2, characterized in that, It also includes a fixing plate disposed in the cavity and fastened to the cavity wall, the fixing plate being located below the first plate, and the extending direction of the fixing plate being parallel to the extending direction of the first plate. The first rack is fastened to the side of the fixing plate facing the first plate body. The first plate body is provided with a through hole. The linkage gear is located in the through hole and is rotatably connected to the first plate body. The linkage gear meshes with the second rack.

4. The transmission chamber according to claim 3, characterized in that, At least one slide is formed on the first plate, and the extension direction of the slide is parallel to the extension direction of the first plate. At least one of the fixed plate and the second plate is fastened to a sliding member, and the sliding member slides in conjunction with the slide rail.

5. The transmission chamber according to claim 4, characterized in that, The first plate has a side surface that is parallel to the center line of the transfer slot and perpendicular to the horizontal plane, and the slide is formed on the side surface.

6. The transmission chamber according to claim 4, characterized in that, The sliding element includes a connecting rod and a roller. The roller is rotatably connected to one end of the connecting rod, and the other end of the connecting rod is fastened to one of the fixed plate and the second plate.

7. The transmission chamber according to any one of claims 3 to 6, characterized in that, The driving component is used to provide rotational power, and the transmission device further includes a transmission device, which is used to convert the rotational power provided by the driving component into linear power and transmit it to the first plate.

8. The transmission chamber according to claim 7, characterized in that, The transmission device includes a driving gear and a driven rack. The driving member is connected to the driving gear, the driving gear meshes with the driven rack, the driven rack is fastened to the first plate, and the extension direction of the driven rack is parallel to the extension direction of the first plate.

9. The transmission chamber according to claim 8, characterized in that, The driven rack is fastened to the side of the first plate facing the fixed plate.

10. The transmission chamber according to claim 9, characterized in that, A step is formed on the fixing plate. The step includes a first step surface and a second step surface. The distance between the first step surface and the side of the fixing plate facing away from the first plate body is a first distance. The distance between the second step surface and the side of the fixing plate facing away from the first plate body is a second distance. The first distance is greater than the second distance. The driven rack is in contact with the first stepped surface, and the extension direction of the rotation axis of the driving gear is perpendicular to the extension direction of the first plate and the horizontal plane. The first rack is connected to the second stepped surface.

11. The transmission chamber according to claim 10, characterized in that, The drive gear is located between the first stepped surface and the first plate.

12. The transmission chamber according to any one of claims 1 to 6, characterized in that, The second plate has multiple anti-slip pads on the side facing away from the first plate. The transmission chamber also includes a carrier plate, which is placed on the anti-slip pad. The side of the carrier plate facing away from the second plate is used to support the workpiece to be processed.

13. A semiconductor process apparatus, characterized in that, include: A plurality of process chambers and at least one transfer chamber of the semiconductor process apparatus as described in any one of claims 1 to 12, each of the transfer chambers being located between two of the process chambers.

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