A heating nozzle assembly

Abstract

The present invention discloses a heating suction nozzle assembly, a heating suction nozzle assembly, comprising an air-floating bearing seat, an air-floating bearing arranged in the air-floating bearing seat, a suction nozzle seat assembly connected to the air-floating bearing, a suction nozzle connected to the bottom of the suction nozzle seat assembly, a heating assembly connected to the suction nozzle, a vacuum tube arranged in the cavity of the air-floating bearing, a through hole arranged in the vacuum tube along its length, a hollow suction cup connected to the bottom of the through hole; an air hole arranged inside the suction nozzle; a cavity formed between the suction nozzle seat assembly, the air-floating bearing seat and the hollow suction cup; an upper air pumping hole and a lower air pumping hole respectively connected to the through hole and the cavity of the vacuum tube are arranged on the air-floating bearing. It is convenient to realize the rapid replacement of the suction nozzle and large-angle rotation during the mounting process.

Description

Technical Field

[0001] The invention relates to a heating nozzle assembly and belongs to the technical field of automation equipment. Background Art

[0002] Existing die bonders usually include a swing arm and a nozzle connected to the swing arm for picking up and placing chips. During the chip mounting process, the nozzle needs to be heated to complete the bonding and needs to be rotated at a large angle according to the change of the mounting position. The heater cable of the existing heating nozzle assembly is not easy to rotate, the rotation angle is limited, and the cable is easily broken when it is rotated as a whole. In addition, the nozzle is fixedly connected to the nozzle holder and cannot be automatically replaced.

[0003] The application number is: CN202320336260.0, and the patent name is: A prior application document for a heating nozzle device discloses a heatable nozzle, but the nozzle is locked by a fixed nut and is connected to the heating ring by a conventional heating cable. Although it can realize the heating function of the nozzle, it cannot meet the requirements of rapid replacement and rotation angle of the nozzle.

[0004] The application number is: CN201921916230.7, and the patent name is: In the prior application document of a heating nozzle with heat dissipation function, a heating nozzle that is convenient for rapid heat dissipation is disclosed. It mainly records how to achieve rapid heat dissipation of the nozzle heating module, but it also does not disclose how to achieve a quickly replaceable connection structure and rotation angle of the heating nozzle. Summary of the invention

[0005] The technical problem to be solved by the present invention is to provide a heating nozzle assembly, which realizes a more detachable and quick connection between the nozzle seat assembly and the air bearing through the connection method of magnetic attraction and vacuum suction cup. Under the premise of being able to achieve chip hot bonding, different nozzle assemblies can be quickly replaced as needed, and the heating nozzle assembly is connected by a coil wire to achieve the requirement of 360° rotation of the nozzle.

[0006] In order to solve the above technical problems, the technical solution adopted by the present invention is:

[0007] A heating nozzle assembly, comprising an air-floating bearing seat, an air-floating bearing arranged in the air-floating bearing seat, and a nozzle seat assembly connected to the air-floating bearing, wherein a nozzle is connected to the bottom of the nozzle seat assembly, a heating assembly is connected to the nozzle, a vacuum tube is arranged in the cavity of the air-floating bearing, a through hole is arranged in the vacuum tube along its length direction, and a hollow suction cup is connected to the bottom of the through hole;

[0008] The interior of the suction nozzle is provided with air holes;

[0009] The nozzle seat assembly is provided with a hollow connector located directly below the hollow suction cup and connected to the suction nozzle, and the upper and lower ends of the hollow part of the hollow connector are respectively connected to the hollow part of the hollow suction cup and the air hole of the suction nozzle;

[0010] A cavity is formed between the nozzle seat assembly, the air bearing seat and the hollow suction cup;

[0011] The air bearing is provided with an upper air pumping hole and a lower air pumping hole which are respectively connected with the through hole and the cavity of the vacuum tube.

[0012] The aforementioned heating nozzle assembly is characterized in that: the air bearing includes a tube body and a disk body connected to each other, the tube body is provided with a cavity penetrating the disk body, and the disk body is provided with a plurality of magnet blocks, the top center of the nozzle seat assembly is a circular ring structure that can be inserted into the cavity, and an annular magnetic plate is provided outside the circular ring structure.

[0013] The aforementioned heating nozzle assembly is characterized in that: a first sealing ring is provided on the bottom surface of the disk body and is sealedly connected to the top surface of the nozzle seat assembly, and a second sealing ring is provided at the connection between the hollow connecting piece and the nozzle seat assembly.

[0014] The aforementioned heating nozzle assembly is characterized in that: two convex rings are provided at the upper end of the vacuum tube, a third sealing ring is provided between the two convex rings, and the cavity above the two convex rings is connected to the upper air pumping hole, and a plurality of openings connected to the through hole are provided at the top of the vacuum tube;

[0015] The side surface of the vacuum tube is also provided with a plurality of through grooves communicating with the cavity along its length direction, and the cavity above the two convex rings is communicated with the through grooves and the lower air extraction hole.

[0016] The aforementioned heating nozzle assembly is characterized in that the hollow connecting piece is a hollow bolt, which passes through the nozzle seat assembly, and its head is located in the circular structure of the nozzle seat assembly, and the bottom is threadedly connected to the inner wall of the air hole of the nozzle.

[0017] The aforementioned heating nozzle assembly is characterized in that: the heating assembly includes a ceramic heater fixed on the outer side of the nozzle, a first electrode plate is arranged above the ceramic heater, a plurality of intermediate electrodes are arranged on the first electrode plate, and the intermediate electrodes are connected to the heating device or sensor in the ceramic heater through wires; a second electrode plate is arranged at the lower end of the air bearing, and elastic retractable electrodes corresponding to the number and position of the intermediate electrodes are arranged on the second electrode plate; a wire coil assembly is arranged on the outer ring of the second electrode plate, and the inner end of the wire coil assembly is connected to the second electrode plate, and the outer end is connected to the control board.

[0018] The aforementioned heating nozzle assembly is characterized in that: the nozzle seat assembly also includes a radiator arranged outside the ceramic heater and the first electrode plate, and a plurality of heat dissipation holes are arranged on the side of the radiator.

[0019] The aforementioned heating suction nozzle assembly is characterized in that: a vertical circuit connection board that is conductively connected to the edge of the second electrode plate is connected to the inner end of the wire coil assembly, and an angled opening is provided at the connection between the suction nozzle seat assembly and the air-floating bearing seat, and the outer end of the wire coil assembly passes through the angled opening and is connected to a control board arranged outside the air-floating bearing seat.

[0020] The aforementioned heating nozzle assembly is characterized in that the first sealing ring is a zirconia ceramic sealing ring.

[0021] The aforementioned heating nozzle assembly is characterized in that a ceramic shaft ring is provided on the bottom inner surface of the cavity, and mutually matching chamfered structures are provided at the bottom of the ceramic shaft ring and the top center of the nozzle seat assembly.

[0022] The beneficial effects of the present invention are:

[0023] 1. A vacuum chamber is formed at the connection between the nozzle seat assembly and the air bearing. After the initial positioning and connection by magnetic attraction, the nozzle assembly and the air bearing are quickly connected by vacuuming. When the nozzle assembly needs to be replaced, it can be quickly replaced by stopping the vacuuming and manually pulling to overcome the magnetic attraction.

[0024] 2. Use the coiled wire as the heating cable to connect the heater, so that during the chip hot-sticking process, the nozzle can be rotated as needed without damaging the cable;

[0025] 3. The heater and sensor on the nozzle are connected through the telescopic electrode set at the bottom of the air bearing. When the nozzle is connected to the nozzle seat, the electrode on the nozzle is connected to the telescopic electrode on the nozzle seat, which can not only connect the temperature controller to control the nozzle temperature, but also facilitate quick connection after replacing the nozzle. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 It is a front view of a heating nozzle assembly of the present invention;

[0027] Figure 2 is a front view of a heating nozzle assembly of the present invention;

[0028] Figure 3 yes Figure 2 AA section view;

[0029] Figure 4 is a side view of a heating nozzle assembly of the present invention;

[0030] Figure 5 yes Figure 4 BB cross-sectional view;

[0031] Figure 6 It is a front view of an air bearing of a heating nozzle assembly of the present invention;

[0032] Figure 7 It is a front view of an air bearing of a heating nozzle assembly of the present invention;

[0033] Figure 8 yes Figure 7 CC section view;

[0034] Fig. 9 It is a front view of a vacuum tube of a heating nozzle assembly of the present invention. DETAILED DESCRIPTION

[0035] The present invention will be further described below in conjunction with the accompanying drawings.

[0036] like Figure 1-Figure 9 As shown, a heating nozzle assembly comprises an air-floating bearing seat 10, an air-floating bearing 11 arranged in the air-floating bearing seat 10, and a nozzle seat assembly connected to the air-floating bearing 11, a nozzle 20 is connected to the bottom of the nozzle seat assembly, a heating assembly is connected to the nozzle 20, a vacuum tube 12 is arranged in the cavity 113 of the air-floating bearing 11, a through hole is arranged in the vacuum tube 12 along its length direction, a hollow suction cup 13 is connected to the bottom of the through hole; an air hole is arranged inside the nozzle 20; The suction nozzle seat assembly is provided with a hollow connecting piece 22 which is located directly below the hollow suction cup 13 and is connected to the suction nozzle 20, and the upper and lower ends of the hollow part of the hollow connecting piece 22 are respectively connected with the hollow part of the hollow suction cup 13 and the air hole of the suction nozzle 20; a cavity 50 is formed between the suction nozzle seat assembly, the air floating bearing seat 10 and the hollow suction cup 13; the air floating bearing 11 is provided with an upper exhaust hole 114 and a lower exhaust hole 115 which are respectively connected with the through hole of the vacuum tube 12 and the cavity 50.

[0037] like Figure 3 and Figure 5As shown, during assembly, the top of the nozzle seat assembly with the nozzle 20 installed is inserted into the cavity 113, so that a cavity 50 is formed between the nozzle seat assembly, the air bearing seat 10 and the hollow suction cup 13, and the through hole of the vacuum tube 12, the hollow part of the hollow suction cup 13 and the air hole of the nozzle 20 are connected, and the lower air pumping hole 115 connected to the external air pumping device is used to evacuate the cavity 50 to form a negative pressure inside, so that the nozzle seat assembly and the air bearing seat 10 are firmly connected, which is convenient for the air bearing seat 10 to drive to move or rotate; at the same time, the upper air pumping hole 114 is used to evacuate the air hole of the nozzle 20, which is convenient for removing the negative pressure to absorb the chip to be mounted, and the nozzle 20 is heated by the heating component, so that the heat is transferred to the sucked chip, which is convenient for the later completion of hot mounting. When the nozzle needs to be replaced, stop evacuating the cavity 50 to make the negative pressure disappear, and the nozzle seat assembly can be easily replaced.

[0038] In this embodiment, the air bearing 11 includes a tube body 111 and a disk body 112 connected to each other, the tube body 111 is provided with a cavity 113 penetrating the disk body 112, and the disk body 112 is provided with a plurality of magnet blocks 17, and the top center of the nozzle seat assembly is a circular ring structure that can be inserted into the cavity 113, and an annular magnetic plate 33 is provided outside the circular ring structure. When the nozzle seat assembly is connected to the disk body 112 of the air bearing 11, the initial positioning and connection are first completed by adsorbing the annular magnetic plate 33 by the magnet block 17, and then the fixed connection is completed by vacuuming the cavity 50 to form a negative pressure. At the same time, in order to ensure the sealing of the connection between the nozzle seat assembly and the air bearing seat 10, the bottom surface of the disk body 112 is provided with a first sealing ring 34 that is sealed and connected to the top surface of the nozzle seat assembly, and the connection between the hollow connector 22 and the nozzle seat assembly is provided with a second sealing ring 35.

[0039] In order to achieve rapid replacement of the nozzle holder assembly and synchronous rapid disconnection and connection of the heating assembly, in the present embodiment, the heating assembly includes a ceramic heater 21 fixed to the outer side of the nozzle 20, a first electrode plate 31 is arranged above the ceramic heater 21, a plurality of intermediate electrodes 32 are arranged on the first electrode plate 31, and the intermediate electrodes 32 are connected to the heating device or sensor in the ceramic heater 21 through wires; a second electrode plate 14 is arranged at the lower end of the air bearing 11, and elastic retractable electrodes 15 corresponding to the number and position of the intermediate electrodes 32 are arranged on the second electrode plate 14; a wire coil assembly 60 is arranged on the outer ring of the second electrode plate 13, and the inner end of the wire coil assembly 60 is connected to the second electrode plate 14, and the outer end is connected to the control board 40.

[0040] By arranging an elastic retractable electrode 15 extending out of the disc body 112 at the lower end of the air bearing 11 to connect with the middle electrode 32 of the heater assembly, the middle electrode 32 is connected to the heating device or sensor in the heating assembly through a wire. The length of the wire can be appropriately lengthened to compensate for the accuracy during assembly. The temperature at the suction nozzle 20 can be accurately controlled by using the sensor and the heater, so as to complete efficient thermal bonding.

[0041] At the same time, the electrical connection between the elastic retractable electrode 15 and the external control board 40 is achieved through the winding wire assembly 60 similar to the clockwork structure. When the air bearing drives the suction nozzle to rotate, the rotation space of the winding wire is very large, so the suction nozzle can rotate 360° and can be restored smoothly after the mounting is completed.

[0042] Furthermore, the edge of the second electrode plate 14 is connected to a vertical circuit connection plate 16 that is in electrical communication therewith, and the vertical circuit connection plate 16 is connected to the inner end of the wire coil assembly 60, and an angled opening 41 is provided at the connection between the nozzle seat assembly and the air bearing seat 10, and the outer end of the wire coil assembly 60 passes through the angled opening 41 and is connected to the control board 40 provided outside the air bearing seat 10. Since the wire coil assembly 60 is made of a conductor sheet with a certain rigidity, and the outer end is connected to the control board 40 by extending out of the angled opening 41 after bending, the strength of the bending part is ensured, and the inner end is connected through the vertical circuit connection plate 16, which ensures the rigidity of the entire wire coil assembly 60 in the vertical direction, and since it is a spiral structure, it will not cause any influence on axial rotation and stretching. In this embodiment, the cable of the wire coil assembly 60 is spiraled 5 times, which is sufficient to meet the requirement of 360° rotation of the nozzle, and will not cause any damage to the cable during long-term rotation and resetting.

[0043] In this embodiment, two convex rings 121 are provided at the upper end of the vacuum tube 12, a third sealing ring is provided between the two convex rings 121, and the cavity above the two convex rings 121 is connected to the upper air pumping hole 114, and a plurality of openings 123 connected to the through holes are provided at the top of the vacuum tube 12; a plurality of through grooves 122 connected to the cavity 50 are also provided along the length direction of the side of the vacuum tube 12, and the cavity above the two convex rings 121 is connected to the through grooves 122 and the lower air pumping hole 115. The third sealing ring is used to separate the upper and lower parts of the vacuum tube 12 into two independent cavities, the cavity above the third sealing ring is connected to the upper air pumping hole 114, and is connected to its through hole through the opening 123; the cavity below the third sealing ring is connected to the cavity 50 through the through groove 122, thereby forming two independent air pumping passages for the suction nozzle 20 and the cavity 50 to avoid mutual influence.

[0044] The hollow connector 22 is a hollow bolt that passes through the nozzle holder assembly. Its head is located in the circular structure of the nozzle holder assembly, and its bottom is threadedly connected to the inner wall of the air hole of the nozzle 20. The installation position of the nozzle 20 can be controlled by the degree of screwing.

[0045] The nozzle holder assembly also includes a heat sink 23 disposed outside the ceramic heater 21 and the first electrode plate 31. The side of the heat sink 23 is provided with a plurality of heat dissipation holes, which facilitates heat dissipation of the middle electrode above the nozzle during the hot-sticking process. At the same time, the first sealing ring 34 is a zirconia ceramic sealing ring, which can play a corresponding heat insulation effect while playing a sealing role.

[0046] A ceramic collar 18 is disposed on the inner surface of the bottom of the cavity 113 , and matching chamfered structures are disposed at the bottom of the ceramic collar 18 and the top center of the nozzle holder assembly to facilitate insertion of the nozzle holder assembly.

[0047] To sum up, the present invention provides a heating nozzle assembly, which realizes a more detachable and quick connection between the nozzle seat assembly and the air bearing through the connection method of magnetic attraction and vacuum suction cup. Under the premise of being able to achieve chip hot pasting, different nozzle assemblies can be quickly replaced as needed, and the heating nozzle assembly is connected by a coil wire, which realizes the requirement of 360° rotation of the nozzle.

[0048] The above shows and describes the basic principles, main features and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The above embodiments and descriptions are only for explaining the principles of the present invention. Without departing from the spirit and scope of the present invention, the present invention may have various changes and improvements, which fall within the scope of the present invention. The scope of protection of the present invention is defined by the attached claims and their equivalents.

Claims

1. A heating nozzle assembly, comprising an air bearing seat (10), an air bearing (11) arranged in the air bearing seat (10), and a nozzle seat assembly connected to the air bearing (11), a nozzle (20) being connected to the bottom of the nozzle seat assembly, and a heating assembly being connected to the nozzle (20), characterized in that: A vacuum tube (12) is arranged in the cavity (113) of the air bearing (11), a through hole is arranged in the vacuum tube (12) along its length direction, and a hollow suction cup (13) is connected to the bottom of the through hole; The suction nozzle (20) is provided with air holes inside; The suction nozzle seat assembly is provided with a hollow connecting piece (22) located directly below the hollow suction cup (13) and connected to the suction nozzle (20), and the upper and lower ends of the hollow portion of the hollow connecting piece (22) are respectively connected to the hollow portion of the hollow suction cup (13) and the air hole of the suction nozzle (20); A cavity (50) is formed between the suction nozzle seat assembly, the air bearing seat (10) and the hollow suction cup (13); The air bearing (11) is provided with an upper air pumping hole (114) and a lower air pumping hole (115) which are respectively connected to the through hole of the vacuum tube (12) and the cavity (50); The heating component comprises a ceramic heater (21) fixed to the outer side of the suction nozzle (20); a first electrode plate (31) is arranged above the ceramic heater (21); a plurality of intermediate electrodes (32) are arranged on the first electrode plate (31); the intermediate electrodes (32) are connected to a heating device or a sensor in the ceramic heater (21) via a wire; a second electrode plate (14) is arranged at the lower end of the air bearing (11); elastic retractable electrodes (15) corresponding in number and position to the intermediate electrodes (32) are arranged on the second electrode plate (14); a coil assembly (60) is arranged on the outer ring of the second electrode plate (14); the inner end of the coil assembly (60) is connected to the second electrode plate (14), and the outer end is connected to the control board (40).

2. A heating nozzle assembly according to claim 1, characterized in that: The air bearing (11) comprises a tube body (111) and a disk body (112) connected to each other, the tube body (111) is provided with a cavity (113) penetrating the disk body (112), and the disk body (112) is provided with a plurality of magnet blocks (17), the top center of the nozzle seat assembly is a circular ring structure that can be inserted into the cavity (113), and an annular magnetic plate (33) is provided outside the circular ring structure.

3. A heating nozzle assembly according to claim 2, characterized in that: The bottom surface of the tray body (112) is provided with a first sealing ring (34) which is sealed to the top surface of the nozzle seat assembly, and a second sealing ring (35) is provided at the connection between the hollow connecting piece (22) and the nozzle seat assembly.

4. A heating nozzle assembly according to claim 3, characterized in that: Two convex rings (121) are provided at the upper end of the vacuum tube (12), a third sealing ring is provided between the two convex rings (121), and the cavity located above the two convex rings (121) is communicated with the upper air extraction hole (114), and a plurality of openings (123) communicated with the through holes are provided at the top of the vacuum tube (12); The side surface of the vacuum tube (12) is also provided with a plurality of through grooves (122) in communication with the cavity (50) along its length direction, and the cavity above the two convex rings (121) is in communication with the through grooves (122) and the lower air extraction hole (115).

5. A heating nozzle assembly according to claim 2, characterized in that: The hollow connecting piece (22) is a hollow bolt that passes through the nozzle seat assembly, with its head located in the annular structure of the nozzle seat assembly and its bottom being threadedly connected to the inner wall of the air hole of the nozzle (20).

6. A heating nozzle assembly according to claim 1, characterized in that: The nozzle holder assembly further comprises a radiator (23) arranged outside the ceramic heater (21) and the first electrode plate (31), and a plurality of heat dissipation holes are arranged on the side of the radiator (23).

7. A heating nozzle assembly according to claim 1, characterized in that: A vertical circuit connection board (16) which is in electrical conduction with the second electrode plate (14) is connected to the edge of the second electrode plate (14); the vertical circuit connection board (16) is connected to the inner end of the wire coil assembly (60); an angled opening (41) is provided at the connection between the nozzle seat assembly and the air bearing seat (10); the outer end of the wire coil assembly (60) passes through the angled opening (41) and is connected to a control board (40) provided outside the air bearing seat (10).

8. The heating nozzle assembly according to claim 3, characterized in that: The first sealing ring (34) is a zirconia ceramic sealing ring.

9. A heating nozzle assembly according to claim 2, characterized in that: A ceramic shaft ring (18) is provided on the inner surface of the bottom of the cavity (113), and mutually matching chamfered structures are provided at the bottom of the ceramic shaft ring (18) and at the top center of the nozzle seat assembly.

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