A loading chamber, epitaxial growth equipment and tray picking and placing method

Abstract

The present application provides a loading chamber and an epitaxial growth device. The loading chamber of the present application includes a chamber body, a cover plate and at least one switch door assembly. The chamber body includes a bottom plate and a side wall connected to the bottom plate. The bottom plate and the side wall form a receiving chamber. One end of the cover plate is hinged to the corresponding first side plate in the side wall. The cover plate is used to close the receiving chamber. The switch door assembly includes a first transmission member and a first driving member. The first end of the first transmission member is connected to the cover plate to drive the cover plate to rotate so that the cover plate closes or opens the receiving chamber. The first driving member is connected to the second end of the first transmission member to control the movement of the first transmission member so that the first transmission member drives the cover plate to rotate. The second side plate adjacent to the first side plate in the side wall is provided with a strip hole, and the first transmission member is inserted into the strip hole. The loading chamber and epitaxial growth device of the present application can automatically control the opening and closing of the cover plate without manual operation.

Description

Technical Field

[0001] The present application relates to the field of semiconductor production technology, and in particular to a loading chamber, an epitaxial growth device, and a tray placement method. Background Art

[0002] The working process of the epitaxial growth equipment is to send the wafer into the reaction chamber for epitaxial reaction, then send out the wafer that has completed the reaction and send in a new wafer to continue the epitaxial reaction. In the related technology, the wafers in the crystal box are usually placed on the tray of the loading chamber manually, and then the tray and the wafers are sent into the reaction chamber for epitaxial reaction. After the wafer completes the epitaxial reaction, the wafer that has completed the reaction is sent back to the loading chamber, and the wafer is taken out from the loading chamber and stored in the crystal box. At the same time, the new wafer is placed in the loading chamber and continues to be sent to the reaction chamber for epitaxial reaction; in this process, the sealed chamber of the loading chamber and the reaction chamber needs to be opened to replace the wafer. After the wafer is replaced, it needs to be purged with argon gas, and the loading chamber and the reaction chamber are evacuated to a vacuum environment again.

[0003] However, the current loading chamber can only hold one wafer, and the wafer needs to be replaced each time a wafer is made. After the wafer is replaced, it needs to be purged with argon gas, and the loading chamber and reaction chamber need to be evacuated to a vacuum environment again. The time interval for manual wafer replacement is short, the efficiency is low, the operating cost is high, and it is inconvenient to use. Summary of the invention

[0004] The main technical problem solved by the present application is to provide a loading chamber, an epitaxial growth device and a tray placement method, which can improve work efficiency.

[0005] In order to solve the above technical problems, the first technical solution adopted in the present application provides a loading chamber, the loading chamber comprising: a chamber body, the chamber body comprising a bottom plate and a side wall connected to the bottom plate, the bottom plate and the side wall forming a receiving chamber, and the side wall being provided with a material taking port; a cover plate, the cover plate being arranged on a side of the side wall away from the bottom plate, the cover plate being used to close the receiving chamber; at least one tray bearing group, the tray bearing group being arranged in the receiving chamber; the tray bearing group comprising at least two tray carriers, the tray carriers being used to carry an epitaxial tray, the at least two tray carriers being arranged at intervals from a position close to the material taking port toward a direction away from the material taking port; wherein the material taking port is used for an external manipulator to extend into the receiving chamber to take and place the epitaxial tray on the tray carrier; when the external manipulator takes and places the epitaxial tray on the tray carrier away from the material taking port in the tray bearing group, the height of the bearing surface of the tray carrier close to the material taking port in the tray bearing group is made smaller than the height of the bearing surface of the tray carrier away from the material taking port.

[0006] Among them, all the tray carriers in the tray carrying group are fixed carriers, and the orthographic projections of the carrying surfaces of all the tray carriers on the side wall having the material taking port are all located inside the material taking port.

[0007] Among them, the at least two pallet platforms include a fixed platform and at least one lifting platform, the distance between the fixed platform and the feeding port is greater than the distance between the lifting platform and the feeding port; the orthographic projection of the bearing surface of the fixed platform on the side wall having the feeding port is located in the feeding port; the lifting platform has a lifting state and an avoidance state; the height of the bearing surface of the lifting platform in the lifting state is greater than the height of the bearing surface of the lifting platform in the avoidance state, and is equal to the height of the bearing surface of the fixed platform; when the external manipulator extends into the accommodating cavity to take and place a certain lifting platform, the lifting platform is in the lifting state, and all other lifting platforms between the lifting platform and the feeding port are in the avoidance state; when the external manipulator extends into the accommodating cavity to take and place the fixed platform, all the lifting platforms are in the avoidance state.

[0008] Among them, the fixed carrier includes a first carrying body, and the first carrying body is fixedly mounted on the base plate by a first fixing member; a first mounting hole is opened at the center of the first carrying body, and the first fixing member is passed through the first mounting hole, wherein the first end of the first fixing member is fixedly connected to the base plate, and the second end of the first fixing member is located in the first mounting hole.

[0009] Among them, the lifting platform includes a second carrying body and a lifting assembly, the second carrying body is arranged on one side of the base plate, and the lifting assembly includes a third transmission member and a third driving member, the first end of the third transmission member is fixedly connected to the second carrying body to drive the second carrying body to approach and move away from the base plate; the third driving member is connected to the second end of the third transmission member, and is used to control the movement of the third transmission member so that the third transmission member drives the second carrying body to approach and move away from the base plate.

[0010] Among them, the base plate is provided with a lifting channel, the third transmission member includes a supporting sleeve, and the supporting sleeve is inserted into the lifting channel; the second bearing body is fixedly connected to the supporting sleeve through a second fixing member; a second mounting hole is provided at the center of the second bearing body, and the second fixing member is passed through the second mounting hole, wherein the first end of the second fixing member is fixedly connected to the supporting sleeve, and the second end of the second fixing member is located in the second mounting hole; the fixed end of the third driving member is fixedly connected to the base plate, the output end of the third driving member is inserted into the lifting channel, and the output end of the third driving member is connected to an end of the supporting sleeve away from the second bearing body.

[0011] Wherein, one end of the cover plate is hinged to the first side plate in the side wall; the loading chamber also includes at least one switch door assembly, the switch door assembly includes a first transmission member and a first driving member, the first end of the first transmission member is connected to the cover plate to drive the cover plate to rotate, so that the cover plate closes or opens the accommodating chamber; the first driving member is connected to the second end of the first transmission member, and is used to control the movement of the first transmission member so that the first transmission member drives the cover plate to rotate; wherein a second side plate in the side wall adjacent to the first side plate is provided with a strip hole, the strip hole extends from one end of the second side plate close to the cover plate to one end of the second side plate close to the bottom plate, and the first transmission member is inserted into the strip hole.

[0012] In order to solve the above technical problems, the second technical solution adopted in the present application is to provide an epitaxial growth device, wherein the epitaxial growth device includes any one of the above-mentioned loading chambers.

[0013] In order to solve the above-mentioned technical problems, the third technical solution adopted in the present application is to provide a pallet picking and placing method, which is applied to any one of the above-mentioned loading chambers, and the pallet picking and placing method includes: receiving a picking and placing instruction, the picking and placing instruction including the position information of the target pallet carrier; determining the position of the target pallet carrier in the pallet carrying group according to the position information of the target pallet carrier, and making the height of the bearing surface of all other pallet carriers in the pallet carrying group located between the target pallet carrier and the material collection port smaller than the height of the bearing surface of the target pallet carrier; and utilizing an external manipulator to extend into the accommodating cavity through the material collection port to pick up and place the extension pallet on the target pallet carrier.

[0014] Wherein, the at least two pallet platforms include a fixed platform and at least one lifting platform, the distance between the fixed platform and the feeding port is greater than the distance between the lifting platform and the feeding port; the orthographic projection of the bearing surface of the fixed platform on the side wall having the feeding port is located inside the feeding port; the lifting platform has a lifting state and an avoiding state; the height of the bearing surface of the lifting platform in the lifting state is greater than the height of the bearing surface of the lifting platform in the avoiding state, and is equal to the height of the bearing surface of the fixed platform; the The method comprises the following steps: determining the position information of the target pallet carrier, determining the position of the target pallet carrier in the pallet carrying group, and making the height of the carrying surface of all other pallet carriers in the pallet carrying group between the target pallet carrier and the feeding port smaller than the height of the carrying surface of the target pallet carrier, including: when the target pallet carrier is a lifting type carrier, controlling the target pallet carrier to be in a lifting state, and controlling all other lifting platforms between the target pallet carrier and the feeding port to be in an avoiding state; when the target pallet carrier is a fixed type carrier, controlling all the lifting platforms to be in an avoiding state.

[0015] Different from the prior art, the beneficial effects of the present application are as follows: in the loading chamber, epitaxial growth equipment and tray placement method provided by the present application, the loading chamber includes a chamber body, a cover plate and at least one tray carrying group, the chamber body includes a bottom plate and a side wall connected to the bottom plate, the bottom plate and the side wall form a accommodating cavity, a material removal port is provided on the side wall, the cover plate is arranged on a side of the side wall away from the bottom plate, the cover plate is used to close the accommodating cavity, the tray carrying group is arranged in the accommodating cavity, the tray carrying group includes at least two tray carriers, the tray carriers are used to carry the epitaxial tray, and the at least two tray carriers are spaced apart from the position close to the material removal port toward the direction away from the material removal port; wherein the material removal port is used for an external robot to extend into the accommodating cavity to pick up and place the epitaxial tray on the tray carrier; when the external robot picks up and places the epitaxial tray on the tray carrier away from the material removal port in the tray carrying group, the height of the carrying surface of the tray carrier close to the material removal port in the tray carrying group is made smaller than the height of the carrying surface of the tray carrier away from the material removal port. At least one pallet carrying group is provided, each pallet carrying group includes at least two pallet platforms, and at least two pallet platforms are spaced apart from a position close to a material picking port toward a direction away from the material picking port, and the material picking port is used for an external robot to extend into the accommodating cavity to pick up and place the epitaxial pallet on the pallet carrier. When the external robot picks up and places the epitaxial pallet on the pallet carrier away from the material picking port in the pallet carrying group, the height of the bearing surface of the pallet carrier close to the material picking port in the pallet carrying group is made smaller than the height of the bearing surface of the pallet carrier away from the material picking port. This can avoid interference caused by the positions of other pallet carriers when picking up and placing the epitaxial pallet on a certain pallet carrier, thereby ensuring the safety of picking up and placing the epitaxial pallet. Therefore, the loading chamber, epitaxial growth equipment and tray placement method of the present application can store multiple epitaxial trays by providing at least one tray carrying group and each tray carrying group including at least two tray carriers. Multiple wafers can be processed without opening the cover of the loading chamber. When an external robot takes and places the epitaxial tray on the tray carrier far away from the material loading port in the tray carrying group, the height of the carrying surface of the tray carrier close to the material loading port in the tray carrying group is controlled to be smaller than the height of the carrying surface of the tray carrier far away from the material loading port. The operation mode of each tray carrier is flexible, so that the storage of the epitaxial trays has higher work efficiency and safety, and the equipment has good stability. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0017] Figure 1 It is a schematic diagram of the structure of the cover of the loading chamber provided in an embodiment of the present application being closed;

[0018] Figure 2 It is a schematic diagram of the structure of the cover of the loading chamber provided in an embodiment of the present application being opened;

[0019] Figure 3 yes Figure 1 A schematic diagram of the structure of the loading chamber after removing the cover plate;

[0020] Figure 4 is a schematic diagram of the layout of a tray carrier in a loading chamber in one embodiment of the present application;

[0021] Figure 5 is a schematic diagram of the layout of a tray carrier in a loading chamber in another embodiment of the present application;

[0022] Figure 6 is a schematic diagram of the layout of a tray carrier in a loading chamber in another embodiment of the present application;

[0023] Figure 7 yes Figure 2 A first cross-sectional structural schematic diagram of a loading chamber;

[0024] Figure 8 yes Figure 7 A detailed schematic diagram of local A;

[0025] Fig. 9 yes Figure 7 A detailed schematic diagram of local B;

[0026] Fig.10 yes Figure 1 A schematic cross-sectional structure diagram of a loading chamber;

[0027] Fig.11 yes Figure 2 A second cross-sectional structural schematic diagram of a loading chamber;

[0028] Fig.12 yes Figure 1 A schematic diagram of the structure of the cover plate;

[0029] Fig.13 yes Fig.12 A schematic cross-sectional view of a cover plate;

[0030] Fig.14 yes Fig.13 A partial schematic diagram of .

[0031] Explanation of reference numerals: 10, chamber body; 100, bottom plate; 101, side wall; 1011, first side plate; 1012, second side plate; 1013, third side plate; 102, accommodating chamber; 103, strip hole; 104, accommodating groove; 105, material taking port; 106, air inlet; 107, exhaust port; 11, tray bearing group; 110, tray carrier; 111, first bearing body; 112, first fixing member; 113, first mounting hole; 114, second bearing body; 115, lifting assembly; 1150, third transmission member; 1151, third driving member; 1152, lifting channel; 1153, supporting sleeve; 116, second fixing member; 117, second mounting hole; 12, cover plate; 120, substrate; 1201, first recessed portion; 1202, second recessed portion; 1203, first sealing groove; 1204, second sealing groove; 121, transparent plate; 1210, overlapping portion; 122, pressing plate; 1220, pressing portion; 1221, third sealing groove; 123, observation port; 124, sealing ring; 1241, first sealing ring; 1242, second sealing ring; 1243, third sealing ring; 125, photoelectric detection mechanism; 126, handle; 14, door switch assembly; 140, first transmission member; 141, first driving member; 16, door lock assembly; 161, first engaging member; 1610, connecting portion; 1611, first engaging portion; 162, second engaging member; 1620, second transmission member; 1621, second driving member; 1622, second engaging portion; 18, extension tray. DETAILED DESCRIPTION

[0032] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0033] It should be noted that when an element is referred to as being "disposed on" another element, it may be directly on the other element or there may be another element centered thereon. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be another element centered thereon at the same time. The terms "vertical", "horizontal", "left", "right" and similar expressions used herein are for illustrative purposes only and do not represent the only implementation method.

[0034] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those generally understood by those skilled in the art to which the present application belongs. The terms used herein in the specification of the present application are only for the purpose of describing specific embodiments and are not intended to limit the present application. The term "and / or" used herein includes any and all combinations of one or more of the related listed items.

[0035] See also Figures 1 to 3 ,in, Figure 1 is a schematic diagram of the structure of the cover of the loading chamber provided in an embodiment of the present application being closed, Figure 2 3 is a schematic diagram of the structure of the cover of the loading chamber provided in the embodiment of the present application being opened, and 4 is Figure 1 Schematic diagram of the structure of the loading chamber after removing the cover plate. The embodiment of the present application provides a loading chamber, which includes a chamber body 10 and a cover plate 12; the chamber body 10 includes a bottom plate 100 and a side wall 101 connected to the bottom plate 100, and a material removal port 105 is provided on the side wall 101, and the bottom plate 100 and the side wall 101 form a receiving chamber 102; the cover plate 12 is arranged on a side of the side wall 101 away from the bottom plate 100, and the cover plate 12 is used to close the receiving chamber 102. The receiving chamber 102 is used to place an epitaxial tray 18, and the epitaxial tray 18 is used to carry wafers to be subjected to epitaxial reaction or wafers after the reaction is completed.

[0036] The loading chamber further includes at least one tray carrying group 11, which is disposed in the accommodating chamber 102; the tray carrying group 11 includes at least two tray carriers 110, which are used to carry the epitaxial tray 18, and at least two tray carriers 110 are arranged at intervals from a position close to the material taking port 105 to a direction away from the material taking port 105; the material taking port 105 is used for an external robot to reach into the accommodating chamber 102 to pick up and place the epitaxial tray 18 on the tray carrier 110. It can be understood that by providing the material taking port 105 on the side wall 101 of the loading chamber, an external robot can reach into the accommodating chamber 102 through the material taking port 105 to pick up and place the epitaxial tray 18 on the tray carrier 110, and transfer the wafers on the epitaxial tray 18 through the material taking port 105.

[0037] When the external robot takes and places the extension tray 18 on the tray carrier 110 in the tray carrying group 11 away from the material picking port 105, the height of the carrying surface of the tray carrier 110 in the tray carrying group 11 close to the material picking port 105 is made smaller than the height of the carrying surface of the tray carrier 110 away from the material picking port 105. Specifically, the positions of the respective tray carriers 110 in the same tray carrying group 11 can be adjusted so that an external manipulator can place an epitaxial tray 18 on the tray carrier 110 through the material removal port 105 or remove the epitaxial tray 18 placed on the tray carrier 110. For example, when taking and placing an epitaxial tray 18 on a tray carrier 110 in the tray carrying group 11, the positions of all other tray carriers 110 in the tray carrying group 11 whose distance from the material removal port 105 is smaller than the distance between the tray carrier 110 and the material removal port 105 can be controlled so that the heights of the carrying surfaces of all other tray carriers 110 are smaller than the height of the carrying surface of the tray carrier 110. Therefore, there is no other tray carrier 110 blocking the pallet carrier 110 and the material removal port 105, thereby ensuring the safety of the operation of taking and placing the epitaxial tray 18.

[0038] In the embodiment of the present application, by providing at least one tray carrying group 11 and each tray carrying group 11 including at least two tray carriers 110, storage of multiple epitaxial trays 18 is achieved. Multiple wafers can be processed without opening the cover of the loading chamber. When an external robot takes and places the epitaxial tray 18 on the tray carrier 110 away from the material loading port 105 in the tray carrying group 11, the height of the carrying surface of the tray carrier 110 close to the material loading port 105 in the tray carrying group 11 is controlled to be smaller than the height of the carrying surface of the tray carrier 110 away from the material loading port 105. The operation mode of each tray carrier 110 is flexible, so that the storage of the epitaxial trays 18 has high working efficiency and safety, and the equipment has good stability.

[0039] In one embodiment, all the tray carriers 110 in the tray carrier group 11 are fixed carriers, and the orthographic projections of the carrying surfaces of all the tray carriers 110 on the side wall having the material extraction port 105 are located inside the material extraction port 105 . Specifically, the height of the fixed carrier cannot be adjusted during use. Therefore, when all the pallet carriers 110 in a pallet carrying group 11 are fixed carriers, it is necessary to set the orthographic projections of the carrying surfaces of all the pallet carriers 110 on the side wall with the material picking port 105 to be located within the material picking port 105, so as to ensure that an external robot can pick up and place the extension tray 18 on each pallet carrier 110 through the material picking port 105; and because the height of the carrying surface of the pallet carrier 110 close to the material picking port 105 in the pallet carrying group 11 is smaller than the height of the carrying surface of the pallet carrier 110 far away from the material picking port 105, the heights of all the fixed carriers in the same pallet carrying group 11 present a state of "the farther away from the material picking port 105, the higher the height of the fixed carrier", so that when an external robot picks up and places the extension tray 18 on any pallet carrier 110 through the material picking port 105, no other pallet carriers 110 form an obstruction on the picking and placing path.

[0040] In another embodiment, at least two tray platforms 110 include a fixed platform and at least one lifting platform, and the distance between the fixed platform and the feeding port 105 is greater than the distance between the lifting platform and the feeding port 105; the orthographic projection of the bearing surface of the fixed platform on the side wall with the feeding port 105 is located inside the feeding port 105; the lifting platform has a lifting state and an avoiding state; the height of the bearing surface of the lifting platform in the lifting state is greater than the height of the bearing surface of the lifting platform in the avoiding state, and is equal to the height of the bearing surface of the fixed platform; when an external manipulator extends into the accommodating cavity 102 to pick up and place a lifting platform, the lifting platform is in the lifting state, and all other lifting platforms between the lifting platform and the feeding port 105 are in the avoiding state; when an external manipulator extends into the accommodating cavity 102 to pick up and place a fixed platform, all lifting platforms are in the avoiding state. Specifically, the height of the lifting platform can be adjusted during use. Therefore, when a tray carrying group 11 includes a fixed platform and a lifting platform, the distance between the fixed platform and the feeding port 105 needs to be greater than the distance between the lifting platform and the feeding port 105, that is, the fixed platform is set at the farthest position from the feeding port 105, and the lifting platform is set between the feeding port 105 and the fixed platform. Similarly, it is also necessary to set the orthographic projection of the carrying surface of the fixed platform on the side wall on the side with the feeding port 105 to be located inside the feeding port 105, so as to ensure that an external robot can pick up and place the extension tray 18 on the fixed platform through the feeding port 105. It can be understood that the lifting platform has a lifting state and an avoiding state. The height of the load-bearing surface of the lifting platform in the lifting state is greater than the height of the load-bearing surface of the lifting platform in the avoiding state, and is equal to the height of the load-bearing surface of the fixed platform. Therefore, when the lifting platform is in the lifting state, the external manipulator can take and place the extension tray 18 on the lifting platform through the material taking port 105. When the lifting platform is in the avoiding state, the external manipulator can pass through the material taking port 105 from above the lifting platform to take and place the extension tray 18 on other tray carriers 110 behind the lifting platform; therefore, when the external manipulator reaches into the accommodating cavity 102 to take and place a certain When there is an epitaxial tray 18 on a lifting platform, the lifting platform is in a lifting state, and all other lifting platforms between the lifting platform and the material collection port 105 are in an avoiding state, so that the external robot can pass through the top of all other lifting platforms between the lifting platform and the material collection port 105 through the material collection port 105 to pick up and place the epitaxial tray 18 on the lifting platform; when the external robot extends into the accommodating cavity 102 to pick up and place the epitaxial tray 18 on the fixed platform, all the lifting platforms are in an avoiding state, so that the external robot can pass through the top of all the lifting platforms through the material collection port 105 to pick up and place the epitaxial tray 18 on the fixed platform.

[0041] Please combine Figure 4, Figure 4 1 is a schematic diagram of the layout of the tray carrier in the loading chamber in one embodiment of the present application. As an operative embodiment, the loading chamber includes a tray carrier group 11, and the tray carrier group 11 includes two tray carriers 110, specifically a fixed carrier and a lifting carrier, which are respectively denoted as fixed carrier a and lifting carrier a, wherein lifting carrier a is arranged between the material taking port 105 and the fixed carrier a, and lifting carrier a has a lifting state and an avoidance state, and the height of the bearing surface of lifting carrier a in the lifting state is greater than the height of the bearing surface of lifting carrier a in the avoidance state, and is equal to the height of the bearing surface of fixed carrier a, so when lifting carrier a is in the lifting state, the external manipulator can take and place the extension tray 18 on lifting carrier a through the material taking port 105, and when lifting carrier a is in the avoidance state, the external manipulator can pass through the lifting carrier a through the material taking port 105 to take and place the extension tray 18 on the fixed carrier a.

[0042] Please combine Figure 5 , Figure 5 FIG. 1 is a schematic diagram of the layout of a tray carrier in a loading chamber in another embodiment of the present application. As another possible implementation, the loading chamber includes a tray carrier group 11 and Figure 4 The embodiment shown is different in that the pallet load group 11 includes three pallet platforms 110, specifically one fixed platform and two lifting platforms, which are respectively denoted as fixed platform a, lifting platform a and lifting platform b, wherein lifting platform a and lifting platform b are arranged between the material taking port 105 and the fixed platform. Similarly, lifting platform a and lifting platform b have a lifting state and an avoidance state, and the height of the load surface of lifting platform a and lifting platform b in the lifting state is greater than the height of the load surface in the avoidance state, and is equal to the height of the load surface of the fixed platform a. Therefore, when the external manipulator takes and places the epitaxial tray 18 on the lifting platform a, the lifting platform a is in a lifting state, and other tray platforms 110 are not required; when the external manipulator takes and places the epitaxial tray 18 on the lifting platform b, the lifting platform b is in a lifting state, and the lifting platform a between the lifting platform b and the material taking port 105 is in a avoiding state, so that the external manipulator can pass through the lifting platform a through the material taking port 105 to take and place the epitaxial tray 18 on the lifting platform b; when the external manipulator extends into the accommodating cavity 102 to take and place the epitaxial tray 18 on the fixed platform a, the lifting platform a and the lifting platform b are both in an avoiding state, so that the external manipulator can pass through the lifting platform a and the lifting platform b through the material taking port 105 to take and place the epitaxial tray 18 on the fixed platform a. In other embodiments, the tray carrying group 11 may also include a fixed platform and more than three lifting platforms.

[0043] Please combine Figure 6 , Figure 6 FIG. 1 is a schematic diagram of the layout of the tray carrier in the loading chamber in another embodiment of the present application. As another possible implementation method, Figure 4 The embodiment shown is different in that the loading chamber includes two tray bearing groups 11, each of which includes a fixed platform and a lifting platform, which are respectively denoted as fixed platform a and lifting platform a, wherein lifting platform a is arranged between the material taking port 105 and the fixed platform a, and lifting platform a has a lifting state and an avoidance state, and the height of the bearing surface of lifting platform a in the lifting state is greater than the height of the bearing surface of lifting platform a in the avoidance state, and is equal to the height of the bearing surface of fixed platform a. Therefore, for each tray bearing group 11, when lifting platform a is in the lifting state, an external manipulator can pick up and place the extension tray 18 on lifting platform a through the material taking port 105, and when lifting platform a is in the avoidance state, the external manipulator can pass through the lifting platform a from above through the material taking port 105 to pick up and place the extension tray 18 on the fixed platform a.

[0044] Please combine Figure 7 and Figure 8 ,in, Figure 7 yes Figure 2 A first cross-sectional structural schematic diagram of a loading chamber, Figure 8 yes Figure 7 In one embodiment, the fixed stage includes a first carrier body 111, and the first carrier body 111 is fixedly mounted on the base plate 100 through a first fixing member 112; a first mounting hole 113 is provided at the center of the first carrier body 111, and the first fixing member 112 is passed through the first mounting hole 113, wherein a first end of the first fixing member 112 is fixedly connected to the base plate 100, and a second end of the first fixing member 112 is located in the first mounting hole 113.

[0045] Please combine Figure 7 and Fig. 9 ,in, Fig. 9 yes Figure 7 In one embodiment, the lifting platform includes a second bearing body 114 and a lifting assembly 115, the second bearing body 114 is arranged on one side of the bottom plate 100, and the lifting assembly 115 includes a third transmission member 1150 and a third driving member 1151, the first end of the third transmission member 1150 is fixedly connected to the second bearing body 114 to drive the second bearing body 114 to approach and move away from the bottom plate 100; the third driving member 1151 is connected to the second end of the third transmission member 1150, and is used to control the movement of the third transmission member 1150, so that the third transmission member 1150 drives the second bearing body 114 to approach and move away from the bottom plate 100.

[0046] Furthermore, the base plate 100 is provided with a lifting channel 1152, and the third transmission member 1150 includes a support sleeve 1153, which is inserted into the lifting channel 1152; the second bearing body 114 is fixedly connected to the support sleeve 1153 through the second fixing member 116; a second mounting hole 117 is provided at the center of the second bearing body 114, and the second fixing member 116 is passed through the second mounting hole 117, wherein the first end of the second fixing member 116 is fixedly connected to the support sleeve 1153, and the second end of the second fixing member 116 is located in the second mounting hole 117; the fixed end of the third driving member 1151 is fixedly connected to the base plate 100, and the output end of the third driving member 1151 is inserted into the lifting channel 1152, and the output end of the third driving member 1151 is connected to one end of the support sleeve 1153 away from the second bearing body 114. Specifically, when the lifting platform rises, the output end of the third driving member 1151 extends upward to drive the supporting sleeve 1153 to rise. During the process of the supporting sleeve 1153 rising along the lifting channel 1152, it drives the second supporting body 114 to rise from the initial height to the preset height, and the lifting platform is in a lifting state; when the lifting platform descends, the output end of the third driving member 1151 contracts downward to drive the supporting sleeve 1153 to descend. During the process of the supporting sleeve 1153 descending along the lifting channel 1152, it drives the second supporting body 114 to descend to the initial height, and the lifting platform is in an avoiding state.

[0047] The present application also provides a pallet picking and placing method, which is applied to the above-mentioned loading chamber, and the pallet picking and placing method includes the following steps:

[0048] Step S11: receiving a material picking and placing instruction, wherein the material picking and placing instruction includes the position information of the target tray carrier.

[0049] Specifically, the material picking and placing instruction refers to an instruction to control the external robot to place the epitaxial tray 18 on the target tray carrier through the material picking port 105 or to take out the epitaxial tray 18 placed on the target tray carrier. It can be understood that when the material picking and placing instruction is to place the epitaxial tray 18 on the target tray carrier, it is necessary to ensure that there is no epitaxial tray 18 on the target tray carrier to prevent the epitaxial tray 18 from being mistakenly placed on the tray carrier 110 where the epitaxial tray 18 is already placed; when the material picking and placing instruction is to take out the epitaxial tray 18 placed on the target tray carrier, it is necessary to ensure that there is an epitaxial tray 18 on the target tray carrier and there are wafers on the epitaxial tray 18 to prevent the situation where the wafer cannot be taken.

[0050] Step S12: Determine the position of the target pallet carrier in the pallet carrying group based on the position information of the target pallet carrier, and make the height of the carrying surface of all other pallet carriers in the pallet carrying group between the target pallet carrier and the material picking port 105 smaller than the height of the carrying surface of the target pallet carrier.

[0051] It can be understood that after determining the position of the target pallet carrier, the height positions of all other pallet carriers 110 in the pallet carrying group 11 located between the material collection port 105 and the target pallet carrier can be controlled so that the height of the carrying surface of all other pallet carriers 110 is smaller than the height of the carrying surface of the target pallet carrier. As a result, there is no other pallet carrier 110 blocking the target pallet carrier and the material collection port 105.

[0052] Step S13: using an external robot to reach into the accommodating cavity through the material taking opening 105 to take and place the epitaxial tray 18 on the target tray carrier.

[0053] After an external robot extends into the accommodating cavity 102 from the material picking port 105 and passes over other tray carriers 110 between the target tray carrier and the material picking port 105, it can complete the material picking and placing instructions of placing the epitaxial tray 18 on the target tray carrier or taking out the epitaxial tray 18 placed on the target tray carrier, thereby ensuring the safety of the operation of picking and placing the epitaxial tray 18.

[0054] In one embodiment, at least two pallet carriers 110 include a fixed carrier and at least one lifting carrier, and the distance between the fixed carrier and the feeding port 105 is greater than the distance between the lifting carrier and the feeding port 105; the orthographic projection of the bearing surface of the fixed carrier on the side wall with the feeding port 105 is located inside the feeding port 105; the lifting carrier has a lifting state and an avoiding state; the height of the bearing surface of the lifting carrier in the lifting state is greater than the height of the bearing surface of the lifting carrier in the avoiding state, and is equal to the height of the bearing surface of the fixed carrier; the above-mentioned step S12 may specifically include: when the target pallet carrier is a lifting carrier, controlling the target pallet carrier to be in the lifting state, and controlling all other lifting carriers between the target pallet carrier and the feeding port 105 to be in the avoiding state; when the target pallet carrier is a fixed carrier, controlling all the lifting carriers to be in the avoiding state.

[0055] Specifically, when the tray carrying group 11 includes a fixed carrier and a lifting carrier, the distance between the fixed carrier and the feeding port 105 needs to be greater than the distance between the lifting carrier and the feeding port 105, that is, the fixed carrier is set at the position farthest from the feeding port 105, and the lifting carrier is set between the feeding port 105 and the fixed carrier. Similarly, it is also necessary to set the orthographic projection of the carrying surface of the fixed carrier on the side wall on the side with the feeding port 105 to be located inside the feeding port 105, so as to ensure that an external robot can pick up and place the extension tray 18 on the fixed carrier through the feeding port 105. It can be understood that when the target pallet carrier is a lifting carrier, the target pallet carrier is controlled to be in a lifting state, and all other lifting carriers between the target pallet carrier and the material collection port 105 are in an avoiding state, so that an external robot can pass through the top of all other lifting carriers between the target pallet carrier and the material collection port 105 through the material collection port 105 to pick up and place the epitaxial pallet 18 on the target pallet carrier; when the target pallet carrier is a fixed carrier, all lifting carriers are controlled to be in an avoiding state, so that an external robot can pass through the top of all lifting carriers through the material collection port 105 to pick up and place the epitaxial pallet 18 on the target pallet carrier.

[0056] See also Figure 1-Figure 3 , Fig.10 and Fig.11 ,in, Fig.10 yes Figure 1 A schematic diagram of the cross-sectional structure of the loading chamber, Fig.11 yes Figure 2 A second cross-sectional structural diagram of the loading chamber. In one embodiment, one end of the cover plate 12 is hinged to the corresponding first side plate 1011 in the side wall 101; the loading chamber further comprises at least one switch door assembly 14, the switch door assembly 14 comprises a first transmission member 140 and a first driving member 141, the first driving member 141 is connected to the second end of the first transmission member 140, the first end of the first transmission member 140 is connected to the cover plate 12, the first driving member 141 is used to control the movement of the first transmission member 140, so that the first transmission member 140 drives the cover plate 12 to rotate, and the cover plate 12 has a first position of closing the accommodating chamber 102 and a second position of opening the accommodating chamber 102 after rotation. The second side plate 1012 adjacent to the first side plate 1011 in the side wall 101 is provided with a strip hole 103, the strip hole 103 extends from one end of the second side plate 1012 close to the cover plate 12 to one end of the second side plate 1012 close to the bottom plate 100, and the first transmission member 140 is inserted into the strip hole 103. It can be understood that the first transmission member 140 can extend out of the strip hole 103 or retract into the strip hole 103 under the drive of the first driving member 141, such as Figure 1 and Fig.10As shown, when the cover plate 12 is in the first position, the cover plate 12 is in contact with the side wall 101 of the chamber body 10, and the first transmission member 140 is accommodated in a position where the strip hole 103 is away from the first side plate 1011. As the cover plate 12 rotates to the second position, as shown in FIG. Figure 2 and Fig.11 As shown, the first transmission member 140 connected to the cover plate 12 is close to the first side plate 1011 , and the portion of the first transmission member 140 that does not extend out of the strip hole 103 is accommodated in the position of the strip hole 103 close to the first side plate 1011 .

[0057] In the embodiment of the present application, at least one switch door assembly 14 is provided, and the switch door assembly 14 includes a first transmission member 140 and a first driving member 141. The first driving member 141 is connected to the second end of the first transmission member 140, and the first end of the first transmission member 140 is connected to the cover plate 12. The first driving member 141 is used to control the movement of the first transmission member 140, so that the first transmission member 140 drives the cover plate 12 to rotate, so that the cover plate 12 closes or opens the accommodating chamber 102; therefore, the loading chamber of the present application can automatically control the opening and closing of the cover plate 12 through the first driving member 141, without manual operation, reducing the safety hazards caused by human operation during equipment operation, and having high working efficiency and safety. A strip hole 103 for accommodating the first transmission member 140 is opened on the second side plate 1012 adjacent to the first side plate 1011 connected to the cover plate 12. Since the positions of the first transmission member 140 are different when the cover plate 12 closes the accommodating cavity 102 and when the cover plate 12 opens the accommodating cavity 102, the strip hole 103 has space for accommodating the first transmission member 140 in different positions, thereby ensuring the control stability of the opening and closing door assembly 14.

[0058] Specifically, the first end of the first transmission member 140 is hinged to the side of the cover plate 12 facing the bottom plate 100, the fixed end of the first driving member 141 is fixedly connected to the second side plate 1012, the output end of the first driving member 141 is inserted into the strip hole 103, and the output end of the first driving member 141 is hinged to the second end of the first transmission member 140. As an embodiment, the first transmission member 140 can be a supporting connecting rod, one end of the supporting connecting rod is hinged to the cover plate 12, and the other end is hinged to the output end of the first driving member 141, such as Fig.10 As shown, when the cover plate 12 is in the first position, all or most of the supporting connecting rods are inserted into the strip-shaped holes 103. As the cover plate 12 rotates to the second position, as shown in FIG. Figure 2 and Fig.11 As shown, although the output end of the first driving member 141 pushes the supporting connecting rod to extend out of the strip hole 103 , a portion of the supporting connecting rod is still inserted into the strip hole 103 .

[0059] In one embodiment, two switch door assemblies 14 are provided, and the two switch door assemblies 14 are respectively provided corresponding to the two second side plates 1012 adjacent to the first side plate 1011 in the side wall 101, and the first driving members 141 of the two switch door assemblies 14 are started and stopped synchronously, so as to simultaneously control the movement of the correspondingly connected first transmission members 140. Figure 2 As shown, the loading chamber is provided with two switch door assemblies 14, and the two switch door assemblies 14 are axially symmetrically arranged on two second side plates 1012 adjacent to the first side plate 1011. The two switch door assemblies 14 cooperate to open or close the cover plate 12 at the same time, which has a better control effect.

[0060] It is understandable that the first driving member 141 can be a cylinder or a hydraulic cylinder. For example, if the mass of the cover plate 12 is large, a large thrust or pull is required to close or open it. At this time, the first driving member 141 can be a hydraulic cylinder that can output heavy loads. If the mass of the cover plate 12 is small, too much thrust or pull is not required. At this time, the first driving member 141 can be a cylinder that outputs light loads. In one embodiment, the first driving member 141 includes a driving cylinder, and an interlocking mechanism including a pilot check valve is provided at both ends of the driving cylinder (not shown). By selecting an interlocking mechanism including a pilot check valve, the driving cylinder can still maintain the state before the failure when the equipment fails and the power and gas are cut off, driving the first transmission member 140 to automatically stop at the original position, and the cover plate 12 will not fall suddenly to cause danger, so that the loading chamber of the present application has better safety performance.

[0061] In one embodiment, the loading chamber further includes a door lock assembly 16; the door lock assembly 16 includes a first engaging member 161 and a second engaging member 162, wherein the first engaging member 161 is disposed on the cover plate 12, and the second engaging member 162 is disposed on the side wall 101, and when the cover plate 12 is close to the side wall 101 and closes the accommodating chamber 102, the first engaging member 161 engages with the second engaging member 162. As an implementable embodiment, the door lock assembly 16 can be engaged by means of a protrusion and a groove structure that cooperate with each other, wherein the first engaging member 161 is one of the protrusion and the groove, and the second engaging member 162 is the other of the protrusion and the groove, and the size of the protrusion can be slightly smaller than the size of the groove, so as to facilitate the insertion of the protrusion structure into the groove. Of course, the first engaging member 161 and the second engaging member 162 are not limited to the structure of the protrusion and the groove, and other engaging structures can also be adopted. By providing a door lock assembly 16 including a first engaging member 161 and a second engaging member 162 , when the cover plate 12 closes the accommodating cavity 102 , the first engaging member 161 engages with the second engaging member 162 , thereby preventing the cover plate 12 from moving and keeping the accommodating cavity 102 in a sealed state.

[0062] Furthermore, a receiving groove 104 is provided on the other side plate in the side wall 101 which is different from the first side plate 1011. The receiving groove 104 extends from one end of the other side plate close to the cover plate 12 to one end of the other side plate close to the bottom plate 100. The first engaging member 161 includes a connecting portion 1610 and a first engaging portion 1611. The connecting portion 1610 extends from the side of the cover plate 12 toward the bottom plate 100 in a direction away from the cover plate 12. The end of the connecting portion 1610 away from the cover plate 12 is provided with the first engaging portion 1611. When the cover plate 12 is close to the side wall 101 and closes the receiving cavity 102, the first engaging portion 1611 is received in the receiving groove 104. The second engaging member 162 includes a second transmission member 1620, a second driving member 1621 and a second engaging member 1622. Part 1622, the second transmission member 1620 is accommodated in the accommodating groove 104, the middle part of the second transmission member 1620 is hinged to the groove wall of the accommodating groove 104, the first end of the second transmission member 1620 is provided with a second clamping part 1622, the fixed end of the second driving member 1621 is fixedly connected to the other side plate, the output end of the second driving member 1621 is inserted into the accommodating groove 104, and the output end of the second driving member 1621 is hinged to the second end of the second transmission member 1620; when the output end of the second driving member 1621 drives the second end of the second transmission member 1620 to move, it drives the first end of the second transmission member 1620 to rotate around the middle part of the second transmission member 1620, so that the second clamping part 1622 is engaged with or separated from the first clamping part 1611. It can be understood that when the cover plate 12 is close to the side wall 101 and closes the accommodating cavity 102, the first clamping part 1611 is inserted into the accommodating groove 104, such as Fig.10 As shown, the second end of the second transmission member 1620 is driven to move upward by the output end of the second driving member 1621, thereby driving the first end of the second transmission member 1620 to rotate downward around the middle of the second transmission member 1620, so that the second engaging portion 1622 located at the first end of the second transmission member 1620 is engaged with the first engaging portion 1611; when the cover plate 12 wants to open the accommodating chamber 102, it is necessary to unlock the door lock assembly 16 first. At this time, the second end of the second transmission member 1620 is driven to move downward by the output end of the second driving member 1621, thereby driving the first end of the second transmission member 1620 to rotate upward around the middle of the second transmission member 1620, so that the second engaging portion 1622 located at the first end of the second transmission member 1620 is separated from the first engaging portion 1611, thereby releasing the cover plate 12. After that, the switch door assembly 14 can drive the cover plate 12 to rotate to open the accommodating chamber 102.

[0063] In one embodiment, two door lock assemblies 16 are provided, and the other side panels are two second side panels 1012 adjacent to the first side panel 1011 in the side wall 101. The two door lock assemblies 16 are respectively provided corresponding to the two second side panels 1012, and the second driving members 1621 of the two door lock assemblies 16 are started and stopped synchronously, so as to simultaneously control the movement of the correspondingly connected second transmission members 1620. Figure 2 As shown, the loading chamber is provided with two locking door assemblies 16, and the two locking door assemblies 16 are axially symmetrically arranged on two second side plates 1012 adjacent to the first side plate 1011. The two locking door assemblies 16 cooperate to simultaneously lock or release the cover plate 12, which has a better control effect.

[0064] In another embodiment, the locking door assembly 16 is provided with one, and the other side plate is a third side plate 1013 in the side wall 101 opposite to the first side plate 1011. It can be understood that the loading chamber can also be provided with only one locking door assembly 16, and the locking door assembly 16 is provided on the third side plate 1013 opposite to the first side plate 1011. Compared with the solution of two locking door assemblies 16, one locking door assembly 16 can effectively save costs while ensuring the control effect.

[0065] In one embodiment, the door lock assembly 16 further includes a detection sensor (not shown), which is electrically connected to the second driving member 1621, and the detection sensor is used to control the output end of the second driving member 1621 to drive the second end of the second transmission member 1620 to move. The door lock assembly 16 of the present application can automatically control the position of the second transmission member 1620 according to the detection result of the detection sensor, without manual operation, thereby reducing the safety hazards caused by human operation during the operation of the device, and has the advantage of high safety.

[0066] In one embodiment, the bottom plate 100 is provided with an air inlet 106 and an air outlet 107, and both the air inlet 106 and the air outlet 107 are connected to the accommodating chamber 102. It can be understood that the air inlet 106 is used to purge inert gas into the accommodating chamber 102 to purify the chamber, and can purge inert gas to the epitaxial tray 18 and the wafers on the epitaxial tray 18 to clean the wafers; the air outlet 107 is used to pump the accommodating chamber 102 into a negative pressure and exhaust the air in the accommodating chamber 102.

[0067] Please combine Figure 12 to Figure 14 ,in, Fig.12 yes Figure 1 A schematic diagram of the structure of the cover plate; Fig.13 yes Fig.12 A schematic cross-sectional view of a cover plate; Fig.14 yes Fig.13In one embodiment, the cover plate 12 includes a stacked substrate 120, a transparent plate 121 and a pressing plate 122, the first end of the substrate 120 is hinged to the first side plate 1011, an observation port 123 is provided in the middle of the substrate 120, the edge of the transparent plate 121 is placed on the substrate 120 and covers the observation port 123, the pressing plate 122 is annular, and covers the edge of the transparent plate 121 and at least part of the substrate 120; sealing rings 124 are provided between the transparent plate 121 and the substrate 120, and between the transparent plate 121 and the pressing plate 122, and the sealing rings 124 form intervals between the transparent plate 121 and the substrate 120 and the pressing plate 122. The cover plate 12 may specifically include a substrate 120 located at the lower layer, a pressure plate 122 located at the upper layer, and a transparent plate 121 located between the substrate 120 and the pressure plate 122; specifically, an observation port 123 is opened in the middle of the substrate 120, and then a sealing ring 124 is arranged on the substrate 120 along the periphery of the observation port 123, and then the transparent plate 121 is pressed on the sealing ring 124 on the substrate 120. Since the size of the transparent plate 121 is larger than the size of the observation port 123 opened on the substrate 120, the edge position of the transparent plate 121 is pressed on the sealing ring 124 at this time, and the middle position of the transparent plate 121 completely covers the observation port 123; then a sealing ring 124 is arranged on the edge position area of ​​the transparent plate 121. A circle of sealing ring 124 is formed, and the annular pressure plate 122 is pressed on the sealing ring 124 on the transparent plate 121. Since the size of the outer ring edge of the pressure plate 122 is larger than the size of the transparent plate 121, and the size of the inner ring edge of the pressure plate 122 is smaller than the size of the transparent plate 121, the outer ring edge of the pressure plate 122 is directly pressed on the substrate 120, and the inner ring edge of the pressure plate 122 is pressed on the sealing ring 124 on the transparent plate 121. Then, the outer ring edge of the pressure plate 122 is fixedly connected to the substrate 120 in direct contact, and the structural installation of the cover plate 12 is completed. The structure of the cover plate 12 can use the transparent plate 121 and the observation port 123 to realize direct observation of the interior of the loading chamber.

[0068] It can be understood that the transparent plate 121 can be a plate with high transparency such as a quartz plate or a glass plate, while the substrate 120 and the pressure plate 122 are metal plates. In this case, the sealing ring 124 arranged between the substrate 120 and the transparent plate 121 and the sealing ring 124 arranged between the transparent plate 121 and the pressure plate 122, in addition to the sealing function, can also prevent the transparent plate 121 made of brittle material from coming into direct contact with the substrate 120 and the pressure plate 122 made of metal plates and causing them to break, and play a buffering role between the substrate 120 and the transparent plate 121 and between the transparent plate 121 and the pressure plate 122.

[0069] Specifically, the substrate 120 is provided with a receiving portion around the observation port 123, and the receiving portion includes a first recessed portion 1201 and a second recessed portion 1202. The surface of the substrate 120 facing the pressing plate 122 is recessed to form the first recessed portion 1201, and the bottom surface of the first recessed portion 1201 near the observation port 123 is recessed to form the second recessed portion 1202; the side surface of the transparent plate 121 protrudes outward to form a lap portion 1210, and the bottom surface of the lap portion 1210 is placed on the bottom surface of the second recessed portion 1202; the bottom surface of the second recessed portion 1202 is provided with a first sealing groove 1201. 3. A first sealing ring 1241 is disposed in the first sealing groove 1203; a second sealing groove 1204 is formed on the side wall 101 of the second recessed portion 1202, and a second sealing ring 1242 is disposed in the second sealing groove 1204; the inner wall of the pressing plate 122 extends inward to form a pressing portion 1220, the bottom surface of the pressing plate 122 is placed on the bottom surface of the first recessed portion 1201, and the pressing portion 1220 covers at least part of the upper surface of the overlapping portion 1210; a third sealing groove 1221 is formed on the bottom surface of the pressing portion 1220, and a third sealing ring 1243 is disposed in the third sealing groove 1221. Fig.13 and Fig.14As shown, an observation port 123 is provided in the middle of the substrate 120, and a receiving portion is provided on the substrate 120 along the periphery of the observation port 123, the receiving portion comprising a first recessed portion 1201 provided around the observation port 123 and a second recessed portion 1202 located between the first recessed portion 1201 and the observation port 123, the recessed depth of the second recessed portion 1202 being greater than the first recessed portion 1201; the side surface of the transparent plate 121 protrudes outward to form a lap portion 1210, the bottom surface of the lap portion 1210 is placed on the bottom surface of the second recessed portion 1202, and at this time, the side surface of the lap portion 1210 faces the side wall where the second recessed portion 1202 and the first recessed portion 1201 are connected. 101, by opening a first sealing groove 1203 on the bottom surface of the second recessed portion 1202, embedding a first sealing ring 1241 in the first sealing groove 1203, and opening a second sealing groove 1204 on the side wall 101 of the second recessed portion 1202, embedding a second sealing ring 1242 in the second sealing groove 1204, the bottom surface of the overlapping portion 1210 of the transparent plate 121 is pressed on the first sealing ring 1241, and the side surface of the receiving portion is against the second sealing ring 1242, so that the transparent plate 121 is prevented from directly contacting the substrate 120, and the first sealing ring 1241 and the second sealing ring 1242 play a buffering role between the substrate 120 and the transparent plate 121. In addition, the bottom surface of the pressing plate 122 is placed on the bottom surface of the first recessed portion 1201, the pressing plate 122 and the substrate 120 are directly in contact and fixedly connected through the first recessed portion 1201, and the inner wall of the annular pressing plate 122 extends inwardly to form a pressing portion 1220, and the pressing portion 1220 covers at least part of the overlapping portion 1210 of the transparent plate 121, thereby limiting the transparent plate 121 between the substrate 120 and the pressing plate 122. A third sealing groove 1221 is formed on the bottom surface of the pressing portion 1220 of the pressing plate 122, and a third sealing ring 1243 is embedded in the third sealing groove 1221. The third sealing ring 1243 is pressed on the upper surface of the overlapping portion 1210 of the transparent plate 121, so that the pressing portion 1220 of the pressing plate 122 does not directly contact the upper surface of the overlapping portion 1210 of the transparent plate 121, and the third sealing ring 1243 plays a buffering role between the transparent plate 121 and the pressing plate 122.

[0070] In one embodiment, a photoelectric detection mechanism 125 is installed on the transparent plate 121, and the photoelectric detection mechanism 125 is used to detect whether there is a wafer on the epitaxial tray 18. By setting the photoelectric detection mechanism 125 on the transparent plate 121, it is possible to detect whether there is a wafer on the epitaxial tray 18, and then control the external robot to select to pick up or transport the wafer on the epitaxial tray 18 according to the detection result, so as to prevent the wafer from being picked up by mistake or failing to be picked up.

[0071] In one embodiment, a handle 126 is disposed at the second end of the base plate 120. By disposing the handle 126 at the second end of the base plate 120, it is convenient to manually open and close the cover plate 12 when needed.

[0072] The embodiment of the present application also provides an epitaxial growth device (not shown), including a reaction chamber, a transfer chamber and a loading chamber, wherein the loading chamber is the loading chamber described in any of the above embodiments. The epitaxial growth device may be a silicon carbide epitaxial device, wherein the wafer to be reacted in the loading chamber is transferred to the reaction chamber by a robot in the transfer chamber, so that the wafer is epitaxially grown in the reaction chamber by a vapor phase growth technique, and the wafer after the reaction is completed is then transferred to the loading chamber by a robot in the transfer chamber.

[0073] In an embodiment of the present application, in a loading chamber of an epitaxial growth device, multiple epitaxial trays 18 are stored by providing at least one tray carrying group 11 and each tray carrying group 11 includes at least two tray carriers 110. Multiple wafers can be processed without opening the cover of the loading chamber. When an external robot takes and places the epitaxial tray 18 on the tray carrier 110 in the tray carrying group 11 away from the material loading port 105, the height of the carrying surface of the tray carrier 110 in the tray carrying group 11 close to the material loading port 105 is controlled to be smaller than the height of the carrying surface of the tray carrier 110 away from the material loading port 105. The operation mode of each tray carrier 110 is flexible, so that the storage of the epitaxial trays 18 has high working efficiency and safety, and the equipment has good stability.

[0074] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0075] Those skilled in the art should recognize that the above embodiments are only used to illustrate the present application and are not used as limitations on the present application. As long as they are within the spirit of the present application, appropriate changes and modifications to the above embodiments are within the scope of protection required by the present application.

Claims

1. A loading chamber, characterized in that: The loading chamber comprises: A chamber body, the chamber body comprising a bottom plate and a side wall connected to the bottom plate, the bottom plate and the side wall forming a containing cavity, and a material taking port is provided on the side wall; A cover plate, the cover plate is arranged on a side of the side wall away from the bottom plate, and the cover plate is used to close the accommodating cavity; At least one tray carrying group, the tray carrying group is arranged in the accommodating cavity; the tray carrying group includes at least two tray carriers, the tray carriers are used to carry the extension tray, and the at least two tray carriers are arranged at intervals from a position close to the material taking port to a direction away from the material taking port; The material taking port is used for an external manipulator to reach into the accommodating cavity to take and place the epitaxial tray on the tray carrier; when the external manipulator takes and places the epitaxial tray on the tray carrier in the tray bearing group away from the material taking port, the height of the bearing surface of the tray carrier in the tray bearing group close to the material taking port is made smaller than the height of the bearing surface of the tray carrier away from the material taking port; The at least two pallet platforms include a fixed platform and at least one lifting platform, the distance between the fixed platform and the feeding port is greater than the distance between the lifting platform and the feeding port; the orthographic projection of the bearing surface of the fixed platform on the side wall having the feeding port is located inside the feeding port; the lifting platform has a lifting state and an avoiding state; when the external manipulator reaches into the accommodating cavity to take and place a certain lifting platform, the lifting platform is in the lifting state, and all other lifting platforms between the lifting platform and the feeding port are in the avoiding state; when the external manipulator reaches into the accommodating cavity to take and place the fixed platform, all the lifting platforms are in the avoiding state.

2. The loading chamber according to claim 1, characterized in that: The height of the bearing surface of the lifting platform in the lifting state is greater than the height of the bearing surface of the lifting platform in the avoiding state, and is equal to the height of the bearing surface of the fixed platform.

3. The loading chamber according to claim 1, characterized in that: The fixed carrier includes a first carrying body, which is fixedly mounted on the base plate by a first fixing member; a first mounting hole is opened at the center of the first carrying body, and the first fixing member is inserted into the first mounting hole, wherein the first end of the first fixing member is fixedly connected to the base plate, and the second end of the first fixing member is located in the first mounting hole.

4. The loading chamber according to claim 1, characterized in that: The lifting platform includes a second carrying body and a lifting assembly, the second carrying body is arranged on one side of the base plate, and the lifting assembly includes a third transmission member and a third driving member, the first end of the third transmission member is fixedly connected to the second carrying body to drive the second carrying body to approach and move away from the base plate; the third driving member is connected to the second end of the third transmission member, and is used to control the movement of the third transmission member so that the third transmission member drives the second carrying body to approach and move away from the base plate.

5. The loading chamber according to claim 4, characterized in that: The bottom plate is provided with a lifting channel, and the third transmission member comprises a supporting sleeve, and the supporting sleeve is inserted into the lifting channel; The second bearing body is fixedly connected to the supporting sleeve via a second fixing member; a second mounting hole is opened at the center of the second bearing body, and the second fixing member is inserted into the second mounting hole, wherein a first end of the second fixing member is fixedly connected to the supporting sleeve, and a second end of the second fixing member is located in the second mounting hole; The fixed end of the third driving member is fixedly connected to the bottom plate, the output end of the third driving member is inserted into the lifting channel, and the output end of the third driving member is connected to an end of the supporting sleeve away from the second bearing body.

6. The loading chamber according to any one of claims 1 to 5, characterized in that: One end of the cover plate is hinged to the first side plate in the side wall; The loading chamber further comprises at least one switch door assembly, wherein the switch door assembly comprises a first transmission member and a first driving member, wherein a first end of the first transmission member is connected to the cover plate to drive the cover plate to rotate so that the cover plate closes or opens the accommodating chamber; the first driving member is connected to a second end of the first transmission member and is used to control the movement of the first transmission member so that the first transmission member drives the cover plate to rotate; Among them, a second side plate adjacent to the first side plate in the side wall is provided with a strip hole, the strip hole extends from an end of the second side plate close to the cover plate to an end of the second side plate close to the bottom plate, and the first transmission member is inserted in the strip hole.

7. An epitaxial growth device, characterized in that: The epitaxial growth equipment comprises the loading chamber according to any one of claims 1-6.

8. A pallet picking and placing method, characterized in that: The pallet picking and placing method is applied to the loading chamber according to any one of claims 1 to 6, and the pallet picking and placing method comprises: Receiving a material picking and placing instruction, wherein the material picking and placing instruction includes position information of a target pallet carrier; According to the position information of the target pallet platform, the position of the target pallet platform in the pallet bearing group is determined, and the height of the bearing surface of all other pallet platforms in the pallet bearing group between the target pallet platform and the material taking port is made smaller than the height of the bearing surface of the target pallet platform; An external manipulator is used to extend into the accommodating cavity through the material taking opening to take and place the epitaxial tray on the target tray carrier.

9. The pallet picking and placing method according to claim 8, characterized in that: The at least two tray platforms include a fixed platform and at least one lifting platform, the distance between the fixed platform and the feeding port is greater than the distance between the lifting platform and the feeding port; the orthographic projection of the bearing surface of the fixed platform on the side wall having the feeding port is located inside the feeding port; the lifting platform has a lifting state and an avoiding state; the height of the bearing surface of the lifting platform in the lifting state is greater than the height of the bearing surface of the lifting platform in the avoiding state, and is equal to the height of the bearing surface of the fixed platform; The method of determining the position of the target pallet platform in the pallet bearing group according to the position information of the target pallet platform, and making the height of the bearing surface of all other pallet platforms in the pallet bearing group between the target pallet platform and the material taking port smaller than the height of the bearing surface of the target pallet platform, comprises: When the target pallet platform is a lifting platform, the target pallet platform is controlled to be in a lifting state, and all other lifting platforms between the target pallet platform and the material taking port are controlled to be in a avoiding state; When the target tray platform is a fixed platform, all the lifting platforms are controlled to be in an avoidance state.

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