An intelligent control system for clean room temperature and humidity

Abstract

The present invention discloses an intelligent control system for temperature and humidity in a clean room, comprising an air conditioner, wherein an air outlet is sleeved on the front end of the air conditioner, and knobs are provided at both the left and right ends of the air outlet, a screw is fixed to the left part of the right knob, and the end of the screw is threadedly connected to the air outlet, and a positioning rod is fixed to the right part of the left knob, and the end of the positioning rod is movably connected to the air outlet, and the ends of the screw and the positioning rod are both plugged into the air conditioner, and a swivel is connected to the outer rotation of the knob, and a connecting rod is fixed to the surface of the swivel. By sleeve-arranging the air outlet on the air outlet end of the air conditioner, the humidifying mechanism under the air outlet can also allow water mist to enter the air outlet while the air conditioner discharges wind, thereby allowing wind and water mist to enter the clean room together, so that the temperature and humidity of the clean room are detected by the temperature and humidity sensor, and the temperature of the air conditioner is controlled by the controller, and when humidification is needed, the atomizing plate is controlled to be energized, otherwise the atomizing plate is controlled to be de-energized when the humidity is sufficient, so that the water content in the air of the clean room is more uniform.

Description

Technical Field

[0001] The present invention relates to the technical field of clean room temperature and humidity control, and in particular to an intelligent control system for clean room temperature and humidity. Background Art

[0002] A cleanroom is a special type of environmental control facility whose main purpose is to minimize indoor particulate matter, microorganisms, and other contaminants that may affect product quality or process purity. These rooms are widely used in industries such as pharmaceuticals, semiconductor manufacturing, biotechnology, and precision machining to ensure that products are not contaminated. A cleanroom temperature and humidity intelligent control system refers to a system used to automatically adjust and monitor the temperature and humidity levels in the cleanroom. This system is critical to maintaining environmental stability and product quality during the production process. Typically, the system includes sensors, controllers, and actuators (such as heaters, coolers, humidifiers, or dehumidifiers) to regulate the environment. It also includes a software platform that provides a user interface that allows operators to monitor environmental parameters, set thresholds, receive alarm information, and perform historical data analysis. Such a system helps maintain a stable environmental condition, which is very important for many sensitive applications. For example, in the semiconductor manufacturing process, even small changes in temperature or humidity can cause product defects. Therefore, by intelligently controlling temperature and humidity, product yield can be improved and waste can be reduced.

[0003] Nowadays, the temperature and humidity control of some clean rooms are usually adjusted by air conditioners and humidifiers, but the humidifiers and air conditioners are often set separately, which causes the air outlet of the air conditioner and the water mist to be dispersed and inconsistent in direction, resulting in uneven moisture content in the air of the clean room. Summary of the Invention

[0004] The purpose of the present invention is to overcome the defects of the prior art and provide an intelligent control system for clean room temperature and humidity to solve the problems existing in the above-mentioned background technology.

[0005] The control mechanism is a kind of control mechanism of temperature and humidity in a clean room, comprises an air conditioner, the front end of the air conditioner is provided with an air outlet, the lower part of the air outlet is provided with a humidifying mechanism, the left part of the humidifying mechanism is provided with a control mechanism, one end of the control mechanism is connected with a temperature and humidity sensor through a signal line, the humidifying mechanism comprises a water box, a water inlet, a solenoid valve, a water pipe, an atomizing sheet, a water-absorbing cotton column, an upper water level sensor, and a lower water level sensor, the water box is fixed at the lower end of the air outlet, the water-absorbing cotton column is vertically arranged inside the water box, the atomizing sheet is connected to the upper end of the water-absorbing cotton column, a groove is provided at the bottom end of the air outlet, the atomizing sheet is plugged into the groove, a perforation is provided in the center of the groove, the water-absorbing cotton column and the perforation are interlaced, the control mechanism comprises a control box and a controller, the control box is fixed to the water box, the controller is installed inside the control box, the temperature and humidity sensor is respectively connected with the air conditioner and the atomizing sheet signal through the controller, and the upper water level sensor and the lower water level sensor are connected with the solenoid valve signal through the controller.

[0006] Furthermore, through a combination of CFD simulation and field verification, the air speed of the air conditioner and the atomization efficiency of the atomizer are configured to ensure the uniformity of the humidity distribution in the clean room, including the following steps:

[0007] S1. Model Building: Create a 3D model of the cleanroom, including the air conditioning vents, humidifier, and cleanroom walls.

[0008] S2. Meshing: Meshing the model;

[0009] S3. Set boundary conditions: Define the boundary conditions of the air conditioning outlet, humidification device, and clean room walls;

[0010] S4. Define the control equations, including the continuity equation, momentum equation, energy equation, and humidity transfer equation. The control equations are:

[0011] Continuity equation:

[0012]

[0013] Where ρ is the density of the fluid and u is the velocity vector of the fluid;

[0014] Momentum equation:

[0015]

[0016] Where p is the pressure of the fluid, τ is the stress tensor, and g is the acceleration due to gravity;

[0017] Energy equation:

[0018]

[0019] Where c pis the specific heat capacity, T is the temperature, k is the thermal conductivity, and Q is the heat source;

[0020] Humidity transfer equation:

[0021]

[0022] Where, Y represents the atomization efficiency, D is the diffusion coefficient, S Y is the source term, i.e., the water vapor generated by the atomizer;

[0023] S5. Set initial conditions: Set the initial temperature and humidity distribution inside the clean room;

[0024] S6. Simulation calculation: run the CFD simulation until the convergence criterion is reached;

[0025] S7. Result Analysis: Analyze the temperature and humidity distribution inside the cleanroom under different wind speed conditions;

[0026] S8. Optimization Iteration: Adjust the air conditioner's wind speed and the atomization efficiency of the atomizer based on the analysis results, and repeat the simulation until a satisfactory humidity distribution uniformity is achieved.

[0027] S9. On-site verification: Install multiple temperature and humidity sensors in the cleanroom to collect actual humidity distribution data.

[0028] S10. Data comparison: Compare the field measured data with the CFD simulation results to verify the effectiveness of the model.

[0029] Furthermore, setting boundary conditions in S3 specifically includes: setting different wind speeds at the air outlet as boundary conditions, setting the temperature and relative humidity of the air outlet; setting the clean room boundary, including setting the temperature of the clean room wall and setting the relative humidity of the clean room wall; setting the clean room boundary as a no-slip boundary condition.

[0030] Furthermore, the goal of the simulation calculation in S6 is to find the most appropriate wind speed setting to ensure uniform humidity distribution in the clean room. Specifically, by defining the standard deviation of humidity σ RH To evaluate the uniformity of humidity distribution, the goal of the simulation is to minimize σ RH ,include,

[0031] Define the objective function:

[0032] f(u, Y) = σ RH

[0033] Where u represents the velocity vector of the fluid, and Y represents the atomization efficiency;

[0034] Optimization problem:

[0035]

[0036] Constraints include wind speed range, humidity range, and atomization efficiency;

[0037] Simulation steps:

[0038] For each wind speed value, CFD simulation was run to obtain the humidity distribution in the clean room;

[0039] Calculate σ for each wind speed condition RH ,

[0040] Select σ RH The minimum wind speed value and atomization efficiency are taken as the optimal settings.

[0041] Furthermore, the specific steps of the optimization iteration in S8 include: setting the initial wind speed value and atomization efficiency value, performing CFD simulation using the set wind speed and atomization efficiency value, analyzing the simulation results, and obtaining the humidity distribution map and humidity uniformity evaluation index σ RH , evaluate the humidity distribution uniformity of the simulation results, if the humidity uniformity index σ RH If the expected target value is not achieved, the wind speed and atomization efficiency values ​​are adjusted according to the simulation results. The adjusted wind speed and atomization efficiency values ​​are used to perform CFD simulation again. The new simulation results are analyzed and the humidity uniformity index σ before and after the adjustment is compared. RH , if the new humidity uniformity index σ RH If the humidity uniformity index σ is improved but still fails to reach the target value, then return to S and continue to adjust the parameters. RH Once the target value has been reached or is close to it, the iteration process is stopped and a final simulation of the optimal settings is performed to confirm the uniformity of the humidity distribution.

[0042] Furthermore, knobs are provided at both ends of the air outlet, a screw is fixed to the left part of the right knob, and the end of the screw is threadedly connected to the air outlet, and a positioning rod is fixed to the right part of the left knob, and the end of the positioning rod is movably penetrated through the air outlet, and the ends of the screw and the positioning rod are both connected to the air conditioner, and the outside of the knob is rotatably connected to a swivel, and a connecting rod is fixed to the surface of the swivel, and a gear box is fixed to the upper end of the air outlet, and a gear is rotatably connected to the middle of the gear box, and the gear is symmetrically meshed with racks on the front and rear sides, and the end of the rack penetrates the gear box, and the end of the rack is fixed to the upper end of the connecting rod on the same side.

[0043] Furthermore, sliders are fixed at the front of the left and right ends of the air conditioner, and sliding grooves are opened at the rear of the left and right ends of the inner wall of the air outlet. The sliders are slidably connected to the sliding grooves, and the outer ends of the sliders are opened with sockets. The ends of the screw and the positioning rod are respectively plugged into the two sockets. A convex ring is provided on the outside of the knob, and an annular groove is provided on the inner wall of the rotating ring. The convex ring is located inside the annular groove and is movably connected to the annular groove.

[0044] Furthermore, the water inlet is arranged at the right end of the water box, the water outlet end of the solenoid valve is connected to the water inlet, the water inlet end of the solenoid valve is connected to the water outlet end of the water pipe, and the upper water level sensor and the lower water level sensor are respectively installed on the upper and lower sides of the left end of the inner wall of the water box.

[0045] Beneficial effects:

[0046] This application provides an intelligent control system for clean room temperature and humidity. The system achieves precise control of the temperature and humidity in the clean room through a series of technical measures. The specific beneficial effects are as follows:

[0047] 1. Air outlet design and installation convenience:

[0048] The specific slider and slide groove design simplifies the connection process between the air outlet and the air conditioner, making the installation and removal of the air outlet easier and faster, and facilitating maintenance and repair.

[0049] A combination of knobs, screws and positioning rods is used to ensure a firm connection between the air outlet and the air conditioner, preventing accidental detachment during use.

[0050] 2. Intelligent humidity control:

[0051] By integrating the humidification mechanism with the control mechanism, automatic adjustment of the humidity in the clean room is achieved.

[0052] Using the PID control algorithm, the working status of the air conditioner and atomizer can be automatically adjusted according to the real-time data of the temperature and humidity sensors to ensure that the humidity in the clean room is maintained within the set range.

[0053] The required atomization efficiency is calculated through mathematical models to ensure uniform humidity distribution in the clean room.

[0054] The automatic water replenishment system realizes automatic water replenishment through the cooperation of the upper water level sensor and the lower water level sensor to ensure the continuity of the atomizer operation.

[0055] 3. Accuracy of temperature control:

[0056] The application of PID control algorithm ensures precise control of the temperature in the clean room, reduces temperature fluctuations and improves the stability of the system.

[0057] 4. Uniformity of humidity distribution:

[0058] By combining CFD simulation with on-site verification, the wind speed of the air conditioner and the atomization efficiency of the atomizer are optimized to ensure the uniformity of humidity distribution in the clean room, improve product yield and reduce waste.

[0059] The air outlet adopts a diffusion design, with a fine grid structure inside to further disperse the airflow and improve the uniformity of humidity distribution.

[0060] 5. Consistency and efficiency of the production process:

[0061] By optimizing the humidity distribution in the clean room, the impact of environmental factors on the production process can be reduced and the yield and consistency of products can be improved.

[0062] Reduce scrap rate, reduce waste of raw materials and energy, and reduce production costs.

[0063] In summary, the technical solution of the present application can effectively solve the problems existing in the existing clean room temperature and humidity control system, improve the intelligence level and control accuracy of the system, and thus improve the quality and efficiency of the production process. BRIEF DESCRIPTION OF THE DRAWINGS

[0064] Figure 1 It is an overall schematic diagram of the present invention;

[0065] Figure 2 Schematic diagram of a top cross-section of the gear box of the present invention;

[0066] Figure 3 Schematic diagram of a top cross-section of an air outlet of the present invention;

[0067] Figure 4 This is a schematic diagram of the main cross-section of the water box of the present invention;

[0068] Figure 5 This is a circuit module diagram of the present invention.

[0069] In the figure: 1-air conditioner, 2-air outlet, 3-water box, 4-water inlet, 5-solenoid valve, 6-water pipe, 7-knob, 8-swivel, 9-connecting rod, 10-gear box, 11-control box, 12-temperature and humidity sensor, 13-rack, 14-gear, 15-convex ring, 16-chute, 17-screw, 18-positioning rod, 19-groove, 20-atomizing sheet, 21-absorbent cotton column, 22-upper water level sensor, 23-lower water level sensor, 24-controller. DETAILED DESCRIPTION

[0070] See also Figure 1-Figure 5 , an intelligent control system for temperature and humidity in a clean room, including an air conditioner 1, wherein the front end of the air conditioner 1 is provided with an air outlet 2, sliders are fixed to the front of the left and right ends of the air conditioner 1, and slide grooves 16 are opened at the rear of the left and right ends of the inner wall of the air outlet 2, and the sliders are slidably connected to the slide grooves 16. When the air outlet 2 is covered on the front air outlet end of the air conditioner 1, it is necessary to align the slider with the slide groove 16, and then slide the slider into the slide groove 16, so that the air outlet 2 can be covered outside the front air outlet end of the air conditioner 1.

[0071] The air outlet 2 is provided with a knob 7 at both ends. A screw 17 is fixed to the left part of the knob 7 at the right end, and the end of the screw 17 is threadedly connected to the air outlet 2. A positioning rod 18 is fixed to the right part of the knob 7 at the left end, and the end of the positioning rod 18 is movably penetrated by the air outlet 2. The ends of the screw 17 and the positioning rod 18 are both plugged into the air conditioner 1. A socket is provided at the outer end of the slider, and the ends of the screw 17 and the positioning rod 18 are respectively plugged into the two sockets. When the air outlet 2 is put on the outside of the front air outlet end of the air conditioner 1, the socket is made to correspond to the screw 17 and the positioning rod 18, and the screw 17 and the positioning rod 18 can be inserted into the socket to limit the air outlet 2 and prevent the air outlet 2 from separating from the air conditioner 1.

[0072] The outside of the knob 7 is rotatably connected to the swivel 8, and a convex ring 15 is provided on the outside of the knob 7. The inner wall of the swivel 8 is provided with an annular groove. The convex ring 15 is located inside the annular groove and is movably connected to the annular groove. When the knob 7 is rotated, the knob 7 and the swivel 8 rotate, and the convex ring 15 is located inside the annular groove and moves. In this way, the knob 7 and the swivel 8 will only rotate and will not move horizontally and separate.

[0073] A connecting rod 9 is fixed on the surface of the rotating ring 8, and a gear box 10 is fixed on the upper end of the air outlet 2. A gear 14 is connected to the middle of the gear box 10, and a rack 13 is symmetrically meshed on the front and rear sides of the gear 14. The end of the rack 13 passes through the gear box 10, and the end of the rack 13 is fixed to the upper end of the connecting rod 9 on the same side. When it is necessary to limit the air outlet 2, turn the knob 7 on the right end, and the knob 7 drives the screw 17 to cooperate with the thread of the air outlet 2 and screw it into the jack on the right. In this process, the rotating ring 8 on the right end drives the The connecting rod 9 moves to the left, and the connecting rod 9 drives one of the racks 13 to move to the left. As the rack 13 engages with the gear 14, the other rack 13 moves to the right. Then the other rack 13 drives the left end rotating ring 8 to move to the right. The left end rotating ring 8 drives the left end knob 7 to move to the right. The left end knob 7 drives the positioning rod 18 to move right and is inserted into the jack on the left end. This limits the air outlet 2 to prevent the air outlet 2 from separating from the air conditioner 1. When disassembling the air outlet 2, just reverse the right end knob 7. In this way, the air outlet 2 and the air conditioner 1 are easy to disassemble and install, and maintenance work is convenient.

[0074] A humidifying mechanism is installed at the lower part of the air outlet 2, and the humidifying mechanism includes a water box 3, a water inlet 4, a solenoid valve 5, a water pipe 6, an atomizing sheet 20, a water-absorbing cotton column 21, an upper water level sensor 22, and a lower water level sensor 23. The water box 3 is fixed to the lower end of the air outlet 2, the water-absorbing cotton column 21 is vertically arranged inside the water box 3, the atomizing sheet 20 is connected to the upper end of the water-absorbing cotton column 21, a groove 19 is opened at the bottom end of the air outlet 2, the atomizing sheet 20 is plugged into the groove 19, a perforation is provided in the center of the groove 19, the water-absorbing cotton column 21 is interspersed with the perforation, and the water inlet 4 is arranged in the water box. 3, the water outlet end of the solenoid valve 5 is connected to the water inlet 4, and the water inlet end of the solenoid valve 5 is connected to the water outlet end of the water pipe 6. The upper water level sensor 22 and the lower water level sensor 23 are respectively installed on the upper and lower sides of the left end of the inner wall of the water box 3. A control mechanism is installed on the left side of the humidifying mechanism. One end of the control mechanism is connected to the temperature and humidity sensor 12 through a signal line. The control mechanism includes a control box 11 and a controller 24. The control box 11 is fixed to the water box 3, and the controller 24 is installed inside the control box 11. The temperature and humidity sensor 12 is respectively connected to the air conditioner 1 and the atomizing piece through the controller 24. 20 signal connection, the upper water level sensor 22, the lower water level sensor 23 are connected to the electromagnetic valve 5 signal through the controller 24. After the air outlet 2 is installed, the electromagnetic valve 5 and the water pipe 6 can be connected by bolts, and then the upper water level sensor 22, the lower water level sensor 23, the controller 24, the electromagnetic valve 5, the atomizing piece 20, the temperature and humidity sensor 12, and the air conditioner 1 are connected to the power supply, and the temperature and humidity sensor 12 is installed on the wall of the clean room. In this way, when the temperature and humidity sensor 12 detects that the temperature inside the clean room is not enough, it can send a signal to the controller 24, and the controller 24 controls the air conditioner 1 to adjust the temperature. When the temperature and humidity sensor 12 detects that the temperature inside the clean room is not enough, it can send a signal to the controller 24, and the controller 24 controls the air conditioner 1 to adjust the temperature. When 12 detects that the humidity inside the clean room is insufficient, the controller 24 controls the atomizing sheet 20 to be energized. Because the absorbent cotton column 21 absorbs the water in the water box 3 and contacts the atomizing sheet 20, the atomizing sheet 20 uses electronic high-frequency oscillation and high-frequency resonance of the ceramic atomizing sheet to break up the liquid water molecular structure and produce a naturally flowing water mist located at the air outlet 2. Then the air discharged by the air conditioner 1 enters the air outlet 2 and mixes with the water mist and is discharged into the clean room. In this way, the water content in the air of the clean room is more uniform. If the temperature and humidity sensor 12 detects that the humidity inside the clean room is sufficient, the controller 24 controls the atomizing sheet 20 to be de-energized.

[0075] In addition, when the water level in the water box 3 decreases to below the lower water level sensor 23, the lower water level sensor 23 transmits a signal to the controller 24, and the controller 24 controls the solenoid valve 5 to open. At this time, the water pipe 6 discharges the water into the water box 3 along the solenoid valve 5 and the water inlet 4. The water inlet end of the water pipe 6 is externally connected to a pump. When the water level in the water box 3 reaches the upper water level sensor 22, the upper water level sensor 22 transmits a signal to the controller 24, and the controller 24 controls the solenoid valve 5 to close. In this way, the automatic water replenishment inside the water box 3 is more intelligent.

[0076] In a preferred embodiment, the temperature and humidity sensor (12) is configured to accurately measure changes in temperature and humidity in the clean room to ensure that the system can make correct adjustments. In order to improve the reliability of the system, multiple temperature and humidity sensors (12) can be installed at key locations, and their data can be averaged by the controller (24) to reduce the impact of single point failures. The accuracy requirements for the temperature and humidity sensor (12) are:

[0077] Humidity accuracy: ±0.5% RH (relative humidity);

[0078] Temperature accuracy: ±0.2℃;

[0079] Response time T90: less than 5 seconds

[0080] Tg0 represents the time it takes from the start of measurement to reach 90% of the final reading. A shorter response time means the sensor can adapt to environmental changes more quickly, which is important for real-time regulation.

[0081] In practice, the temperature and humidity sensor 12 may be configured as follows:

[0082] 1Sensor selection:

[0083] Type: Choose a digital temperature and humidity sensor, which generally has higher accuracy and faster response time.

[0084] Brand and model: For example, choose sensors from well-known brands such as Honeywell and Sensirion to ensure reliability and consistency.

[0085] 2Installation location:

[0086] Location selection: The temperature and humidity sensor should be installed in a representative location inside the clean room, preferably away from doors, windows or any place that may cause local temperature and humidity changes.

[0087] Quantity: If the cleanroom is large, consider installing multiple temperature and humidity sensors to ensure full coverage and improve the overall measurement accuracy by averaging.

[0088] 3. Data processing:

[0089] Data correction: Since environmental factors (such as pressure changes) may affect the measurement results, the sensor needs to be calibrated regularly.

[0090] Data fusion: If multiple sensors are used, consider using a data fusion algorithm to improve the stability of the measurements, such as using a Kalman filter to smooth the readings.

[0091] 4. Control strategies:

[0092] Feedback control: Once it detects that the temperature and humidity deviate from the preset range, the controller will immediately adjust the working status of the air conditioner and atomizer to restore them to the target value as soon as possible.

[0093] Predictive control: Based on historical data and current environmental conditions, future trends can be predicted and system settings can be adjusted in advance to avoid large fluctuations.

[0094] 5Maintenance and calibration:

[0095] Regular calibration: Calibrate the sensor at least once a year to ensure its accuracy.

[0096] Fault detection: Implement an automated fault detection mechanism to promptly notify maintenance personnel when a sensor anomaly occurs.

[0097] With the above configuration, the temperature and humidity sensor 12 can monitor environmental changes more accurately and timely, making the entire clean room temperature and humidity intelligent control system more efficient and reliable. This is crucial for maintaining a stable working environment, especially in application scenarios that are extremely sensitive to temperature and humidity changes.

[0098] In a preferred embodiment, the controller 24 uses a PID (Proportional Integral Derivative) control algorithm to adjust the working state of the air conditioner and the atomizer. Specifically, the PID (Proportional Integral Derivative) control algorithm is:

[0099] Proportional coefficient (Kp): This is used to respond immediately to deviations. The value of Kp determines how quickly the controller reacts to deviations. A higher Kp value can make the system respond faster to deviations, but it may cause system instability or oscillation.

[0100] Integral coefficient (Ki): Used to eliminate steady-state errors. The value of Ki determines the controller's ability to eliminate long-term deviations. Higher Ki values ​​can reduce steady-state errors, but may also result in slower system response or overshoot.

[0101] Differential coefficient (Kd): Used to predict future deviation trends and avoid overshoot. The value of Kd determines the controller's ability to predict future deviation trends. A higher Kd value can help the system stabilize faster and reduce overshoot.

[0102] Control logic:

[0103] Coordinated control: When the temperature and humidity sensor 12 detects that the temperature and humidity deviate from the set value, the controller 24 will adjust the working state of the air conditioner 1 and the atomizing plate 20 according to the PID control algorithm.

[0104] Linked Adjustment: When the temperature changes, the controller 24 will first adjust the operating state of the air conditioner 1; when the humidity changes, it will adjust the operating state of the atomizer 20. If both parameters need to be adjusted, the parameter with the greater impact on system stability will be adjusted first.

[0105] 1. The controller 24 uses a PID (Proportional Integral Derivative) control algorithm combined with real-time data from the temperature and humidity sensor 12 to adjust the temperature control of the air conditioner:

[0106] PID control loop: Use the PID control algorithm to control the temperature regulation of air conditioner 1 to ensure that the temperature in the clean room remains within the set range.

[0107] Parameter Optimization: Optimize temperature control performance by adjusting the values ​​of Kp, Ki, and Kd to ensure fast response without excessive oscillation.

[0108] Temperature set point: The temperature set point can be set according to the needs of the specific application. For example, in semiconductor manufacturing, the set point may need to be very precise.

[0109] Specific configuration example:

[0110] Assuming we need to control the temperature in the clean room at 22±1°C, we can configure the PID controller 24 as follows:

[0111] Initial parameter settings:

[0112] Temperature Control:

[0113] Kp=1.0

[0114] Ki=0.1

[0115] Kd=0.05

[0116] Experimental data collection:

[0117] Run the system in a real-world environment and collect data on temperature variations.

[0118] Record the response time and stability of the system under different PID parameters.

[0119] Parameter adjustment:

[0120] Adjust PID parameters according to experimental data to achieve the best control performance.

[0121] The Ziegler-Nichols method or other empirical methods can be used to determine appropriate PID parameters.

[0122] System testing:

[0123] After adjusting the PID parameters, retest the system's response time and stability.

[0124] Ensure that the system can operate stably within the set temperature range.

[0125] Maintenance and Calibration:

[0126] Regularly check whether the PID parameters are still suitable for the current environmental conditions.

[0127] If environmental conditions change (such as seasonal changes), the PID parameters may need to be readjusted.

[0128] Control logic:

[0129] Feedback control: Once the temperature and humidity sensor 12 detects that the temperature deviates from the set value, the controller 24 will adjust the working state of the air conditioner 1 according to the PID control algorithm to restore it to the target temperature as soon as possible.

[0130] Linked adjustment: When the temperature changes, controller 24 will first adjust the working state of air conditioner 1. If the temperature is close to the set point but still deviates, controller 24 will continue to use the PID algorithm to make subtle adjustments until the temperature stabilizes within the set range.

[0131] Through the above configuration, it can be ensured that the controller 24 plays the best performance in the clean room temperature and humidity intelligent control system of the present invention, thereby achieving more accurate technical effects.

[0132] 2. The controller 24 uses a PID (Proportional Integral Derivative) control algorithm combined with real-time data from the temperature and humidity sensor 12 to adjust the humidity control of the atomizer pair:

[0133] Humidity Control:

[0134] PID control loop: A PID control algorithm is used to control the working state of the atomizing sheet 20 to ensure that the humidity in the clean room is maintained within a set range.

[0135] Parameter Optimization: Optimize humidity control performance by adjusting the values ​​of Kp, Ki, and Kd to ensure fast response without excessive oscillation.

[0136] Humidity set point: The humidity set point also needs to be set according to the specific application requirements. For example, in the pharmaceutical industry, humidity control may need to be very strict.

[0137] Specific configuration example:

[0138] Assuming we need to control the humidity in the clean room to 45 ± 5% RH, we can configure the PID controller 24 as follows:

[0139] Initial parameter settings:

[0140] Humidity Control:

[0141] Kp=0.5

[0142] Ki=0.05

[0143] Kd=0.02

[0144] Experimental data collection:

[0145] Run the system in a real-world environment and collect data on humidity changes.

[0146] Record the response time and stability of the system under different PID parameters.

[0147] Parameter adjustment:

[0148] Adjust PID parameters according to experimental data to achieve the best control performance.

[0149] The Ziegler-Nichols method or other empirical methods can be used to determine appropriate PID parameters.

[0150] System testing:

[0151] After adjusting the PID parameters, retest the system's response time and stability.

[0152] Ensure that the system can operate stably within the set humidity range.

[0153] Maintenance and Calibration:

[0154] Regularly check whether the PID parameters are still suitable for the current environmental conditions.

[0155] If environmental conditions change (e.g., seasonal changes), the PIg parameters may need to be readjusted.

[0156] Control logic:

[0157] Feedback control:

[0158] Once the temperature and humidity sensor 12 detects that the humidity deviates from the set value, the controller 24 will adjust the working state of the atomizing plate 20 according to the PID control algorithm to restore the target humidity as soon as possible.

[0159] Linkage adjustment:

[0160] When the humidity changes, the controller 24 adjusts the working state of the atomizer 20. If the humidity is close to the set point but there is still a deviation, the controller 24 will continue to use the PID algorithm to make fine adjustments until the humidity stabilizes within the set range.

[0161] Additional configuration:

[0162] Adaptive control: Implement adaptive PID control based on fuzzy logic or neural networks to further improve control performance, especially under widely varying environmental conditions.

[0163] Multi-loop control: If there are multiple areas in the clean room that require separate temperature and humidity control, an independent PID control loop can be set up for each area.

[0164] Data recording and analysis: Record temperature and humidity change data and controller output for subsequent analysis and optimization of control strategies.

[0165] Through the above configuration, it can be ensured that the controller 24 plays the best performance in the clean room temperature and humidity intelligent control system of the present invention, thereby achieving more accurate technical effects.

[0166] In a preferred embodiment, the atomizing sheet 20 is configured according to the volume of the clean room. Specifically,

[0167] 1. Atomization efficiency:

[0168] Atomization efficiency is defined as the amount of water mist generated by the atomizing plate 20 per unit time.

[0169] The required fogging efficiency needs to be calculated based on the volume of the cleanroom and the required humidity change.

[0170] 2. Mathematical model:

[0171] Assume the volume of the clean room is V cubic meters m 3 .

[0172] Set the humidity to increase by ΔRH% within T minutes.

[0173] Assume that the air flow rate in the clean room is F cubic meters per minute (m 3 / min).

[0174] Assume that the atomization efficiency of the atomizing sheet 20 is E liters / minute (L / min).

[0175] 3. Calculation formula:

[0176] According to the ideal gas state equation and the properties of humid air, the required atomization efficiency E is calculated by the following relationship.

[0177] First, it is necessary to determine the amount of absolute humidity ΔAH (grams per cubic meter, g / m 3 ). This can be calculated using the following formula:

[0178]

[0179] Among them, ρ air is the air density (g / m3, g / m 3 ), can be approximately taken as 1.2g / m 3 .

[0180] Then, based on the required humidity increase and time T, calculate the absolute humidity increase per minute ΔAH min :

[0181]

[0182] Finally, according to the absolute humidity amount that needs to be increased per minute and the density of water 1g / cm 3 or 1000g / m 3 , calculate the amount of water mist E that needs to be generated per minute:

[0183]

[0184] Specific configuration example:

[0185] Assume we need to increase the humidity in the cleanroom by 5% RH in 30 minutes and the volume of the cleanroom is 1000m 3 , the air density is 1.2g / m 3 .

[0186] 1. Initial parameter settings:

[0187] V=1000m 3

[0188] ΔRH=5%

[0189] T=30min

[0190] ρ air =1.2g / m 3

[0191] 2. Calculate the required atomization efficiency:

[0192] First calculate the amount of absolute humidity that needs to be increased, ΔAH:

[0193]

[0194] Then calculate the absolute humidity that needs to be increased per minute ΔAH min :

[0195]

[0196] Finally, calculate the amount of water mist E that needs to be generated per minute:

[0197]

[0198] 3. Selection of atomizer 20:

[0199] Based on the calculation results, select a nebulizer disc 20 with a nebulization efficiency of at least 2 mL / min.

[0200] 4. System testing:

[0201] After adjusting the atomization efficiency, retest the system's response time and stability.

[0202] Ensure that the system can operate stably within the set humidity range.

[0203] 5. Maintenance and calibration:

[0204] Regularly check whether the atomization efficiency is still suitable for the current ambient conditions.

[0205] If environmental conditions change (such as seasonal changes), the atomization efficiency may need to be readjusted.

[0206] Through the above configuration, it can be ensured that the atomizing sheet 20 performs optimally in the clean room temperature and humidity intelligent control system of the present invention, thereby achieving a more precise technical effect.

[0207] In order to further improve the control logic of the automatic water replenishment system, we can refine it from the following aspects:

[0208] In a preferred embodiment, the upper water level sensor 22, the lower water level sensor 23, the solenoid valve 5

[0209] Configure to realize the control logic of the automatic water replenishment system. Specifically,

[0210] Set a reasonable water replenishment threshold:

[0211] When the water level is lower than the lower water level sensor 23, the solenoid valve 5 opens.

[0212] When the water level is higher than the upper water level sensor 22, the solenoid valve 5 is closed.

[0213] The positions of these two sensors can be adjusted according to the actual capacity of the water box and the frequency of use to reduce unnecessary water replenishment times and save water resources. Specific implementation method:

[0215] 1. Sensor position adjustment:

[0216] Lower water level sensor 23:

[0217] It is set at the lowest safe water level inside the water box 3 to ensure that the atomizing sheet 20 has enough water source when it works normally.

[0218] If the water level drops below the lower water level sensor 23, this indicates that the water level in the water box 3 is insufficient to maintain a normal atomization process and water replenishment is required.

[0219] Upper water level sensor 22:

[0220] It is set at the highest safe water level inside the water box 3 to prevent water from overflowing or exceeding the maximum working water level of the atomizing piece 20.

[0221] When the water level reaches the upper water level sensor 22, the solenoid valve 5 should be closed and water replenishment should be stopped.

[0222] 2. Water replenishment threshold setting:

[0223] Rehydration threshold:

[0224] Generally, the distance between the lower water level sensor 23 and the upper water level sensor 22 should be determined in consideration of the capacity and usage frequency of the water box 3 .

[0225] For example, if the capacity of the water box 3 is 10L and the average daily water consumption is 2L, the lower water level sensor 23 may be set at 2L, and the upper water level sensor 22 may be set at 8L.

[0226] This arrangement can ensure that the water box 3 has a safety margin of at least 2L during daily use, while avoiding unnecessary frequent water replenishment.

[0227] 3. Solenoid valve 5 control logic:

[0228] Hydration start:

[0229] When the water level drops to the lower water level sensor 23, the controller 24 receives a signal and opens the solenoid valve 5 to start water replenishment.

[0230] The water replenishment process continues until the water level rises to the upper water level sensor 22.

[0231] Hydration stop:

[0232] When the water level reaches the upper water level sensor 22, the controller 24 receives a signal and closes the solenoid valve 5 to stop water replenishment.

[0233] 4. Optimization of water replenishment cycle:

[0234] Frequency of use and water replenishment cycle:

[0235] According to the actual usage frequency and average water consumption of the water box 3, the water replenishment cycle can be further optimized to reduce unnecessary water replenishment.

[0236] For example, if the average daily water consumption of the water box 3 is 2 L and the capacity of the water box 3 is 10 L, it can be set to replenish water once every two days.

[0237] Smart Prediction:

[0238] By using historical data and current environmental conditions, the controller 24 can predict future water consumption trends and start the water replenishment process in advance to ensure that there is always enough water in the water box 3.

[0239] 5. Maintenance and calibration:

[0240] Calibrate the sensor regularly:

[0241] Perform calibration at least once a year to ensure sensor accuracy.

[0242] Clean the sensor regularly to avoid dirt accumulation that affects the sensitivity of the sensor.

[0243] Fault Detection:

[0244] Implement an automated fault detection mechanism to promptly notify maintenance personnel when a sensor anomaly occurs.

[0245] If a sensor fails, it should be replaced promptly to ensure the normal operation of the system.

[0246] Through the above configuration, it can be ensured that the automatic water replenishment system plays the best performance in the clean room temperature and humidity intelligent control system of the present invention, thereby achieving a more precise technical effect.

[0247] By optimizing the uniformity of humidity distribution in the cleanroom, the environmental conditions in the cleanroom can be ensured to be more stable and controllable, which is very important for many production processes that are sensitive to environmental conditions. Specifically, it includes:

[0248] Improve product yield

[0249] Reduce the impact of environmental factors: A more uniform humidity distribution in the cleanroom means less humidity variation throughout the cleanroom, which can reduce the impact of humidity fluctuations on products.

[0250] Improve the consistency of the production process: When the humidity is evenly distributed, the chemical reactions, physical changes and other processes in the production process will be more consistent, thereby improving the quality and consistency of the product.

[0251] Reduce defective products: In certain industries, such as semiconductor manufacturing, pharmaceuticals, and precision machining, even small changes in humidity can lead to poor or defective product quality. By optimizing humidity distribution, the probability of these defective products can be reduced.

[0252] Reduce waste

[0253] Reduced rejects due to environmental conditions: If the humidity distribution within the cleanroom is uneven, certain areas may have too high or too low humidity, which can cause product failure in those areas and result in rejects. By optimizing humidity distribution, this can be reduced.

[0254] Improved raw material utilization: In some production processes, the properties of raw materials are affected by humidity. For example, in the pharmaceutical industry, changes in humidity can affect the active ingredients of drugs. By controlling humidity distribution, raw material waste can be reduced and utilization can be improved.

[0255] Lower production costs: Less scrap means less waste of raw materials and energy, which reduces production costs.

[0256] By optimizing the uniformity of humidity distribution within a cleanroom, the required environmental conditions during production can be more consistently maintained, thereby improving product yields and reducing scrap. This is particularly important for environmentally sensitive production processes, such as semiconductor manufacturing, pharmaceuticals, biotechnology, and precision machining. Optimizing humidity distribution not only improves product quality but also reduces production costs and increases efficiency.

[0257] In a preferred embodiment, the wind speed of the air conditioner 1 and the atomization efficiency of the atomizer 20 are configured by combining CFD simulation and field verification to ensure uniformity of humidity distribution in the clean room, including the following steps:

[0258] S1. Model building: Use CAD software to create a 3D model of the clean room, including the air conditioning vents, humidification device, and clean room walls.

[0259] S2. Meshing: Meshing the model;

[0260] Select an appropriate mesh type (such as structured or unstructured).

[0261] Ensure good mesh quality to improve the accuracy of simulation results.

[0262] The grid is appropriately encrypted in key areas (such as near the air outlet) to improve the simulation accuracy.

[0263] S3. Set boundary conditions: Define the boundary conditions of the air conditioning outlet, humidification device, and clean room walls;

[0264] Outlet wind speed: Set different wind speeds as boundary conditions (for example, 0.3m / s, 0.4m / s, 0.5m / s, 0.6m / s).

[0265] Temperature: Set the temperature of the air outlet (for example, 20°C).

[0266] Humidity: Set the relative humidity at the air outlet (for example, 60% RH).

[0267] Cleanroom Boundary:

[0268] Temperature: Set the temperature of the cleanroom walls (e.g., 22°C).

[0269] Humidity: Set the relative humidity of the cleanroom walls (e.g., 50% RH).

[0270] Boundary type: can be set to no-slip boundary condition.

[0271] S4. Define the control equations, including the continuity equation, momentum equation, energy equation, and humidity transfer equation. The control equations are:

[0272] Continuity equation:

[0273]

[0274] Where ρ is the density of the fluid and u is the velocity vector of the fluid;

[0275] This equation describes the principle of conservation of mass, which states that the total mass of a fluid in any region of space remains constant.

[0276] In CFD simulations, this equation is used to ensure that mass is conserved during the flow of fluid within the cleanroom.

[0277] Momentum equation:

[0278]

[0279] Where p is the pressure of the fluid, τ is the stress tensor, and g is the acceleration due to gravity;

[0280] This equation describes the application of Newton's second law to fluids, which states that the acceleration of a fluid is equal to the force acting on it divided by its mass.

[0281] In CFD simulation, this equation is used to calculate the velocity distribution of the fluid in the clean room, especially the velocity distribution when the air conditioner 1 discharges the air.

[0282] Energy equation:

[0283]

[0284] Where c p is the specific heat capacity, T is the temperature, k is the thermal conductivity, and Q is the heat source;

[0285] This equation describes the principle of conservation of energy, which states that the total amount of energy in a closed system remains constant.

[0286] In the CFD simulation, this equation is used to calculate the temperature distribution in the clean room, especially the effect on the temperature when the air conditioner 1 is working.

[0287] Humidity transfer equation:

[0288]

[0289] Where, Y represents the atomization efficiency, D is the diffusion coefficient, S Y is the source term, i.e., the water vapor generated by the atomizer 20;

[0290] This equation describes how humidity (or water vapor concentration) changes over time.

[0291] In CFD simulation, this equation is used to calculate the humidity distribution in the clean room, especially the effect of the atomizer 20 on the humidity when it is working.

[0292] Example calculation process

[0293] Simulation conditions:

[0294] Initial conditions: clean room temperature is 22°C and humidity is 50% RH.

[0295] Boundary conditions:

[0296] Air outlet:

[0297] Wind speed: 0.3m / s, 0.4m / s, 0.5m / s, 0.6m / s

[0298] Temperature: 20℃

[0299] Humidity: 60% RH

[0300] Cleanroom Boundary:

[0301] Temperature: 22°C

[0302] Humidity: 50% RH

[0303] Boundary Type: No Slip

[0304] Simulation results:

[0305] Humidity distribution diagram: Analyze the humidity distribution diagram inside the clean room under different wind speed conditions.

[0306] Uniformity assessment:

[0307] For wind speed 0.3m / s, atomization efficiency 0.7, σ RH =0.05

[0308] For wind speed 0.4m / s, atomization efficiency 0.8, σ RH =0.04

[0309] For wind speed 0.5m / s, atomization efficiency 0.9, σ RH =0.03

[0310] For wind speed 0.6m / s, atomization efficiency 0.6, σ RH =0.04

[0311] Conclusion: When the wind speed is 0.5m / s and the atomization efficiency is 0.9, the humidity distribution in the clean room is most uniform.

[0312] S5. Set initial conditions: Set the initial temperature and humidity distribution inside the clean room;

[0313] S6. Simulation: Run the CFD simulation until the convergence criterion is reached. The goal of the simulation is to find the most appropriate wind speed setting to ensure uniform humidity distribution in the clean room. Specifically, the standard deviation of humidity σ is defined. RH To evaluate the uniformity of humidity distribution, the goal of the simulation is to minimize σ RH ,include,

[0314] Define the objective function:

[0315] f(u, Y) = σ RH

[0316] Where u represents the velocity vector of the fluid, and Y represents the atomization efficiency;

[0317] Optimization problem:

[0318]

[0319] Constraints:

[0320] Wind speed range: 0.3m / s≤u≤0.6m / s

[0321] Humidity range: 45% ≤ RH ≤ 55%

[0322] Atomization efficiency: Ymin ≤Y≤Y max

[0323] Simulation steps:

[0324] For each wind speed value, CFD simulation was run to obtain the humidity distribution in the clean room;

[0325] Calculate σ for each wind speed condition RH ;

[0326] Select σ RH The minimum wind speed value and atomization efficiency are taken as the optimal settings.

[0327] S7. Result Analysis: Analyze the temperature and humidity distribution inside the cleanroom under different wind speed conditions;

[0328] S8. Optimization iteration: Adjust the wind speed of the air conditioner 1 and the atomization efficiency of the atomizer 20 according to the analysis results, and repeat the simulation until a satisfactory humidity distribution uniformity is achieved; specifically, set the initial wind speed value and atomization efficiency value, perform CFD simulation using the set wind speed and atomization efficiency values, analyze the simulation results, and obtain the humidity distribution diagram and humidity uniformity evaluation index σ RH , evaluate the humidity distribution uniformity of the simulation results, if the humidity uniformity index σ RH If the expected target value is not achieved, the wind speed and atomization efficiency values ​​are adjusted according to the simulation results. The adjusted wind speed and atomization efficiency values ​​are used to perform CFD simulation again. The new simulation results are analyzed and the humidity uniformity index σ before and after the adjustment is compared. RH , if the new humidity uniformity index σ RH If the humidity uniformity index σ is improved but still fails to reach the target value, then return to S4 to continue adjusting the parameters. RH Once the target value has been reached or is close to it, the iteration process is stopped and a final simulation of the optimal settings is performed to confirm the uniformity of the humidity distribution.

[0329] Example Iteration Process

[0330] Assume that we need to control the humidity in the clean room between 45% RH and 55% RH, and the humidity distribution uniformity index σ RH needs to be less than 0.04.

[0331] 1. Initialization parameters:

[0332] Wind speed: 0.3m / s

[0333] Atomization efficiency: 0.7

[0334] 2. Preliminary simulation:

[0335] Perform CFD simulation.

[0336] σRH =0.05, which did not reach the target value.

[0337] 3. Parameter adjustment:

[0338] Try increasing the wind speed to 0.4m / s and the atomization efficiency to 0.8.

[0339] 4. Repeat the simulation:

[0340] Perform CFD simulation.

[0341] σ RH =0.04, close to the target value.

[0342] 5. Iterative optimization:

[0343] Try to further increase the wind speed to 0.5m / s and increase the atomization efficiency to 0.9.

[0344] Perform CFD simulation.

[0345] σ RH =0.03, reaching the target value.

[0346] 6. Result verification:

[0347] The final simulation was performed with the settings of wind speed 0.5 m / s and atomization efficiency 0.9.

[0348] Confirm the uniformity of humidity distribution.

[0349] in conclusion

[0350] After many iterations, we found that when the wind speed is 0.5m / s and the atomization efficiency is 0.9, the humidity distribution in the clean room is the most uniform, and σ RH It reached 0.03, meeting the set target value.

[0351] Through the above steps, we can continuously adjust and optimize the air speed of the air conditioner 1 and the atomization efficiency of the atomizer 20 to achieve the best humidity distribution uniformity. This process can be accelerated by automated tools, such as using optimization algorithms to automatically adjust parameters and evaluate the results, thereby reducing the need for manual intervention.

[0352] S9. On-site verification: Install multiple temperature and humidity sensors in the cleanroom to collect actual humidity distribution data.

[0353] S10. Data comparison: Compare the field measured data with the CFD simulation results to verify the effectiveness of the model.

[0354] Through the above steps, we can ensure the uniformity of humidity distribution within the cleanroom through a combination of CFD simulation and field verification, thereby improving product yield and reducing scrap. Furthermore, this method can help us optimize the air speed of air conditioner 1 and the atomization efficiency of atomizer 20 to achieve optimal humidity control.

[0355] In a preferred embodiment, the design of the air outlet is adjusted to ensure that the humidity distribution in the entire clean room is as uniform as possible.

[0356] In practice, the shape and size of the air outlet adopt a diffuse design, allowing the airflow to gradually diffuse upon entering the cleanroom, improving the uniformity of humidity distribution. Air outlet 2 needs to have a certain degree of angle adjustment to facilitate adjusting the direction of the airflow according to the specific layout of the cleanroom to ensure uniform humidity distribution. A fine grid structure is set inside air outlet 2 to further disperse the airflow, reduce turbulence, and ensure uniform humidity distribution.

[0357] Experimental verification:

[0358] Wind Tunnel Testing: Tests are conducted in a wind tunnel laboratory to verify the effectiveness of the air outlet design and wind speed settings.

[0359] On-site test: Install air outlet 2 in the clean room and conduct on-site test to ensure that the theoretical simulation results are consistent with the actual situation.

[0360] The technical solution of this application provides an intelligent control system for clean room temperature and humidity. The system achieves precise control of the temperature and humidity in the clean room through a series of technical measures. The specific beneficial effects are as follows:

[0361] 1. Air outlet design and installation convenience:

[0362] The specific slider and slide groove design simplifies the connection process between the air outlet and the air conditioner, making the installation and removal of the air outlet easier and faster, and facilitating maintenance and repair.

[0363] A combination of knobs, screws and positioning rods is used to ensure a firm connection between the air outlet and the air conditioner, preventing accidental detachment during use.

[0364] 2. Intelligent humidity control:

[0365] By integrating the humidification mechanism with the control mechanism, automatic adjustment of the humidity in the clean room is achieved.

[0366] Using the PID control algorithm, the working status of the air conditioner and atomizer can be automatically adjusted according to the real-time data of the temperature and humidity sensors to ensure that the humidity in the clean room is maintained within the set range.

[0367] The required atomization efficiency is calculated through mathematical models to ensure uniform humidity distribution in the clean room.

[0368] The automatic water replenishment system realizes automatic water replenishment through the cooperation of the upper water level sensor and the lower water level sensor to ensure the continuity of the atomizer operation.

[0369] 3. Accuracy of temperature control:

[0370] The application of PID control algorithm ensures precise control of the temperature in the clean room, reduces temperature fluctuations and improves the stability of the system.

[0371] 4. Uniformity of humidity distribution:

[0372] By combining CFD simulation with on-site verification, the wind speed of the air conditioner and the atomization efficiency of the atomizer are optimized to ensure the uniformity of humidity distribution in the clean room, improve product yield and reduce waste.

[0373] The air outlet adopts a diffusion design, with a fine grid structure inside to further disperse the airflow and improve the uniformity of humidity distribution.

[0374] 5. Consistency and efficiency of the production process:

[0375] By optimizing the humidity distribution in the clean room, the impact of environmental factors on the production process can be reduced and the yield and consistency of products can be improved.

[0376] Reduce scrap rate, reduce waste of raw materials and energy, and reduce production costs.

[0377] In summary, the technical solution of the present application can effectively solve the problems existing in the existing clean room temperature and humidity control system, improve the intelligence level and control accuracy of the system, and thus improve the quality and efficiency of the production process.

Claims

1. An intelligent control system for clean room temperature and humidity, comprising an air conditioner (1), characterized in that: The front end of the air conditioner (1) is sleeved with an air outlet (2), a humidifying mechanism is installed at the lower part of the air outlet (2), a control mechanism is installed at the left part of the humidifying mechanism, one end of the control mechanism is connected to a temperature and humidity sensor (12) via a signal line, the humidifying mechanism comprises a water box (3), a water inlet (4), a solenoid valve (5), a water delivery pipe (6), an atomizing sheet (20), a water-absorbing cotton column (21), an upper water level sensor (22), and a lower water level sensor (23), the water box (3) is fixed at the lower end of the air outlet (2), the water-absorbing cotton column (21) is vertically arranged inside the water box (3), the atomizing sheet (20) is connected to the upper end of the water-absorbing cotton column (21), the A groove (19) is provided at the bottom end of the air outlet (2), the atomizing plate (20) is inserted into the groove (19), a perforation is provided at the center of the groove (19), the absorbent cotton column (21) is interlaced with the perforation, the control mechanism comprises a control box (11) and a controller (24), the control box (11) is fixed to the water box (3), the controller (24) is installed inside the control box (11), the temperature and humidity sensor (12) is connected to the air conditioner (1) and the atomizing plate (20) respectively through the controller (24), and the upper water level sensor (22) and the lower water level sensor (23) are connected to the solenoid valve (5) through the controller (24); The air outlet (2) is provided with a knob (7) at both ends. A screw (17) is fixed to the left of the right knob (7). The end of the screw (17) is threadedly connected to the air outlet (2). A positioning rod (18) is fixed to the right of the left knob (7). The end of the positioning rod (18) is movably penetrated by the air outlet (2). The ends of the screw (17) and the positioning rod (18) are both plugged into the air conditioner (1). The outside of the knob (7) is rotatably connected to a rotating ring (8). A connecting rod (9) is fixed to the surface of the rotating ring (8). A gear box (10) is fixed to the upper end of the air outlet (2). A gear (14) is rotatably connected to the middle of the gear box (10). The gear (14) is symmetrically meshed with a rack (13) on both sides. The end of the rack (13) penetrates the gear box (10) and is fixed to the upper end of the connecting rod (9) on the same side. Sliders are fixed at the front of the left and right ends of the air conditioner (1), and slide grooves (16) are opened at the rear of the left and right ends of the inner wall of the air outlet (2). The slides are slidably connected to the slide grooves (16), and the outer ends of the slides are opened with sockets. The ends of the screw rod (17) and the positioning rod (18) are respectively plugged into the two sockets. A convex ring (15) is provided on the outside of the knob (7), and an annular groove is provided on the inner wall of the rotating ring (8). The convex ring (15) is located inside the annular groove and is movably connected to the annular groove.

2. The intelligent control system for clean room temperature and humidity according to claim 1, characterized in that: By combining CFD simulation and field verification, the wind speed of the air conditioner (1) and the atomization efficiency of the atomizer (20) are configured to ensure the uniformity of the humidity distribution in the clean room, including the following steps: S1. Model Building: Create a 3D model of the cleanroom, including the air conditioning vents, humidifier, and cleanroom walls. S2. Meshing: Meshing the model; S3. Set boundary conditions: Define the boundary conditions of the air conditioning outlet, humidification device, and clean room wall; S4. Define the control equations, including the continuity equation, momentum equation, energy equation, and humidity transfer equation. The control equations are: Continuity equation: Where ρ is the density of the fluid and u is the velocity vector of the fluid; Momentum equation: Where p is the pressure of the fluid, τ is the stress tensor, and g is the acceleration due to gravity; Energy equation: Where c p is the specific heat capacity, T is the temperature, k is the thermal conductivity, and Q is the heat source; Humidity transfer equation: Where, Y represents the atomization efficiency, D is the diffusion coefficient, S Y is the source term, i.e., the water vapor generated by the atomizer (20); S5. Set initial conditions: Set the initial temperature and humidity distribution inside the clean room; S6. Simulation calculation: Run the CFD simulation until the convergence criterion is reached; S7. Result Analysis: Analyze the temperature and humidity distribution inside the clean room under different wind speed conditions; S8. Optimization iteration: Adjust the wind speed of the air conditioner (1) and the atomization efficiency of the atomizer (20) according to the analysis results, and repeat the simulation until a satisfactory humidity distribution uniformity is achieved; S9. On-site verification: Install multiple temperature and humidity sensors in the clean room to collect actual humidity distribution data; S10. Data comparison: Compare the field measured data with the CFD simulation results to verify the effectiveness of the model.

3. The intelligent control system for clean room temperature and humidity according to claim 2, characterized in that: Setting boundary conditions in S3 specifically includes: setting different wind speeds at the air outlet as boundary conditions, setting the temperature and relative humidity of the air outlet; setting the clean room boundary, including setting the temperature of the clean room wall and setting the relative humidity of the clean room wall; setting the clean room boundary as a no-slip boundary condition.

4. The intelligent control system for clean room temperature and humidity according to claim 2, characterized in that: The goal of the simulation in S6 is to find the most appropriate wind speed setting to ensure uniform humidity distribution in the clean room. Specifically, by defining the standard deviation of humidity σ RH To evaluate the uniformity of humidity distribution, the goal of the simulation is to minimize σ RH ,include, Define the objective function: f(u,Y)=σ RH Where u represents the velocity vector of the fluid, and Y represents the atomization efficiency; Optimization problem: Constraints include wind speed range, humidity range, and atomization efficiency; Simulation steps: For each wind speed value, CFD simulation was run to obtain the humidity distribution in the clean room; Calculate σ for each wind speed condition RH ; Select σ RH The minimum wind speed value and atomization efficiency are taken as the optimal settings.

5. The intelligent control system for clean room temperature and humidity according to claim 4, characterized in that: The specific steps of the optimization iteration in S8 include: setting the initial wind speed value and atomization efficiency value, performing CFD simulation using the set wind speed and atomization efficiency value, analyzing the simulation results, and obtaining the humidity distribution map and humidity uniformity evaluation index σ RH , evaluate the humidity distribution uniformity of the simulation results, if the humidity uniformity index σ RH If the expected target value is not achieved, the wind speed and atomization efficiency values ​​are adjusted according to the simulation results. The adjusted wind speed and atomization efficiency values ​​are used to perform CFD simulation again. The new simulation results are analyzed and the humidity uniformity index σ before and after the adjustment is compared. RH , if the new humidity uniformity index σ RH If the humidity uniformity index σ is improved but still fails to reach the target value, then return to S4 to continue adjusting the parameters. RH Once the target value has been reached or is close to it, the iteration process is stopped and a final simulation of the optimal settings is performed to confirm the uniformity of the humidity distribution.

6. The intelligent control system for clean room temperature and humidity according to claim 1, characterized in that: The water inlet (4) is arranged at the right end of the water box (3), the water outlet end of the solenoid valve (5) is connected to the water inlet (4), the water inlet end of the solenoid valve (5) is connected to the water outlet end of the water pipe (6), and the upper water level sensor (22) and the lower water level sensor (23) are respectively installed on the upper and lower sides of the left end of the inner wall of the water box (3).

Images