A fully automatic test and sorting machine for semiconductor chips

Abstract

The present invention relates to a fully automatic testing and sorting machine for semiconductor chips, comprising a chassis, a loading and unloading manipulator arranged on the chassis, the chassis is provided with a unloading tray, a testing assembly, a tray conveying assembly and a preheating tray module, the tray conveying assembly is composed of a conveying frame fixed on the chassis, a conveying assembly arranged on the conveying frame, a loading assembly and a unloading assembly located at the left and right ends of the conveying frame, the loading assembly is used for placing the tray, and the unloading assembly is used for collecting the tray; the present invention has the advantage of ensuring that the trays are moved down one by one.

Description

Technical Field

[0001] The invention belongs to the technical field of semiconductor chip testing and sorting machines, and in particular relates to a fully automatic semiconductor chip testing and sorting machine. Background Art

[0002] In electronics, semiconductor chips are a way of miniaturizing circuits (mainly semiconductor devices, but also passive components, etc.) and are usually manufactured on the surface of semiconductor wafers. During the production process of semiconductor chips, in order to remove problematic semiconductor chips, the semiconductor chips are tested and sorted using semiconductor chip testing and sorting machines.

[0003] When the semiconductor chip testing and sorting machine in the prior art is in use, multiple material trays are stacked up and down and placed in a material tray conveying device. The material tray conveying device controls the material trays to move down one by one through the telescopic rod and the clamping block, and conveys them to the material picking area through the material tray conveying device to ensure the transportation of the chips. After that, the chip conveying preheating tray module is preheated by the loading and unloading robot. After that, after being tested by the test assembly, the chips are sorted into different unloading trays by the loading and unloading robot, thereby realizing the testing and sorting of semiconductor chips. However, the material trays are only moved down one by one through the telescopic rod and the clamping block, and sometimes the material tray clamping is unstable, resulting in multiple trays moving down. Summary of the invention

[0004] The object of the present invention is to overcome the deficiencies of the prior art and provide a fully automatic testing and sorting machine for semiconductor chips which can ensure that material trays are moved downward one by one.

[0005] The technical solution of the present invention is as follows:

[0006] A fully automatic testing and sorting machine for semiconductor chips, comprising a chassis, a loading and unloading manipulator arranged on the chassis, a loading tray, a testing assembly, a tray conveying assembly and a preheating tray module arranged on the chassis, the tray conveying assembly is composed of a conveying frame fixed on the chassis, a conveying assembly arranged on the conveying frame, a loading assembly and a unloading assembly located at the left and right ends of the conveying frame, the loading assembly is used to place the tray, and the unloading assembly is used to collect the tray;

[0007] The front and rear sides of the feeding assembly are both provided with a tray clamping module, and the tray clamping module is rotatably connected with a plurality of clamping heads in a circular array, and the two sides of the clamping head are respectively provided with a support and an extrusion airbag, and a pressure compensation component is provided in the tray clamping module, and the feeding assembly is provided with a driving module for driving the tray clamping module to rotate;

[0008] Based on the different positions of the clamping heads, the three clamping heads adjacent to the material tray are divided into a plug connector pre-inserted into the material tray, a support head located below the circumference of the plug connector, and a separation head located below the circumference. The support head is plugged into the material tray, and the separation head is used to move the material tray at the bottom downward to separate the material tray above. The support member is used to support the plug connector so that the plug connector can be aligned with the plug-in part of the material tray.

[0009] The extrusion airbag is used to push the plug connector and the separation head to rotate counterclockwise.

[0010] Further, the tray clamping module includes an intermediate shaft fixed on the feeding assembly and an outer cylinder rotatably and sealably connected to the intermediate shaft, the outer cylinder is transmitted to the driving module, the clamping head is rotatably connected to the outer wall of the outer cylinder, the extrusion airbag and the support are arranged on the outer wall of the outer cylinder, the pressure compensation component is arranged in the intermediate shaft, and the pressure compensation component is connected to the overflow valve fixed on the feeding assembly;

[0011] The front and rear ends of the outer cylinder are provided with circular holes in a circular array around the axis of the outer cylinder, the number of which is the same as that of the extrusion airbags and which are connected to the extrusion airbags, and the inflation valves are arranged in the circular holes;

[0012] The intermediate shaft is provided with an auxiliary pressure-compensating port located at the plug connector, and the intermediate shaft is provided with a separation pressure-compensating port located at the separation head. The separation pressure-compensating port and the auxiliary pressure-compensating port are both connected with the pressure-compensating component. When the inflation valve rotates to the auxiliary pressure-compensating port and the separation pressure-compensating port, the airbag is squeezed for pressure compensation.

[0013] Furthermore, the intermediate shaft is provided with an exhaust hole, two pressurizing chambers and two exhaust chambers, a partition plate is sealed and fixed in the middle of the exhaust chamber to separate it into two chambers, holes independently connected to the chambers are provided at both ends of the pressurizing chamber, and the exhaust chamber is independently connected to a relief valve, the pressure-compensating component comprises an extrusion piston connected in a sliding seal to the pressurizing chamber, a support cylinder fixed at both ends of the pressurizing chamber, a reciprocating screw connected in a rotating seal to the two support cylinders, and a transmission gear set fixed at both ends or one end of the reciprocating screw, the intermediate shaft is also provided with a notch for installing the transmission gear set, the transmission gear set meshes with the outer cylinder through the notch, the auxiliary pressure-compensating port and the separation pressure-compensating port are provided on the opposite side of the support cylinder, and the hole is located on the opposite side of the support cylinder;

[0014] The reciprocating screw is provided with a sealing sleeve, which is respectively sealed and connected to the extrusion piston and the support cylinder, and the sealing sleeve can realize telescopic adjustment;

[0015] The extrusion piston is connected to the reciprocating screw and can move back and forth along the reciprocating screw;

[0016] The front and rear ends of the pressurizing chamber are both connected to a gas replenishing one-way valve fixed to the front and rear of the intermediate shaft;

[0017] The exhaust hole is connected with the outer wall of the intermediate shaft in the radial direction, and the extrusion airbag is provided with a hole connected with the exhaust hole, and the hole is staggered with the auxiliary pressure-compensating port and the separation pressure-compensating port.

[0018] Furthermore, the inflation valve comprises a guide hole plate, an air inlet hole plate, a resistance rod plugged into the guide hole plate, and a sealing plate fixed to an end of the resistance rod away from the intermediate shaft, the guide hole plate and the air inlet hole plate are both arranged in the circular hole, and the guide hole plate is located on a side of the circular hole adjacent to the intermediate shaft;

[0019] The resistance rod sleeve is provided with a spring that resists against the guide hole plate. The spring can push the resistance rod to drive the sealing plate to seal against the guide hole plate so that the hole on the guide hole plate is closed. When the resistance rod resists against the outer wall of the intermediate shaft, the sealing plate seals against the air inlet hole plate so that the hole on the air inlet hole plate is closed.

[0020] Furthermore, the clamping head is provided with an insertion port for inserting the feed tray, and the upper and lower sides of the insertion port of the clamping head are respectively a pressing portion and an inserting portion, and the length of the inserting portion is smaller than the pressing portion;

[0021] Furthermore, clamping plates for plugging into the plug interface are provided on both sides of the material tray, the end of the clamping plate away from the material tray is triangular and has a circular chamfer on the end, a plug-in column is provided at the bottom of the material tray, and a plug-in hole for interference plugging of the plug-in column is opened at the upper end of the material tray.

[0022] Furthermore, the conveying assembly includes a conveying belt arranged on a conveying frame and contact rollers rotatably connected to both sides of the conveying frame.

[0023] Furthermore, the left end of the conveyor frame is a loading area, and the loading assembly includes four material guide frames arranged in a rectangular shape in the loading area. The four material guide frames are L-shaped, and a rectangular space for the supply tray to be placed is formed between the four material guide frames. A gap is provided between the lower end of the material guide frame and the conveyor belt for the supply tray to pass through.

[0024] Furthermore, the driving module includes a fixed plate fixed on the material guide frame, a clamping motor fixed on the fixed plate, a worm gear fixed on the outer cylinder, and a worm rotatably connected to the fixed plate. The clamping motor is driven by the worm and the worm gear. The fixed plate is fixed with a fixed shaft fixed on the intermediate shaft, and the overflow valve is fixed on the fixed plate.

[0025] Furthermore, a material unloading area is provided at the right end of the conveying frame, and the material unloading assembly includes four material guide racks arranged on the material unloading area, and the distribution relationship of the four material guide racks is the same as the distribution relationship of the material guide racks of the loading assembly. A material unloading plate is provided at the center position of the material unloading area, and a pneumatic telescopic rod fixed to the conveying frame is fixed on the lower side of the material unloading plate, and at least one material tray support assembly is provided on the front and rear sides of the material unloading area.

[0026] Compared with the prior art, the present invention has the following beneficial effects:

[0027] 1. The present invention realizes the rotational displacement of multiple clamping heads through the tray clamping module, and supports the plug connector to align with the third last tray arranged in the upper and lower arrangement through the support member, realizes the plug-in fixation of the second last tray through the support head, and squeezes the tray at the bottom to move down to the conveying component through the separation head and the extrusion airbag, thereby realizing the downward movement of the trays one by one;

[0028] 2. The present invention adopts a pressure supplement component to achieve pressure supplement for the extrusion airbag, ensuring that the extrusion airbag can push the separation head to press down the material tray, thereby ensuring the separation of the material tray.

[0029] In summary, the present invention has the advantage of ensuring that the material trays are moved downward one by one. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0031] Figure 2 For the present invention Figure 1 A schematic diagram of the structure of a tray conveying assembly;

[0032] Figure 3 For the present invention Figure 2 A schematic diagram of the enlarged structure of part A;

[0033] Figure 4 For the present invention Figure 2 A side view structural schematic diagram of;

[0034] Figure 5 For the present invention Figure 2 A schematic diagram of the structure of a tray support assembly;

[0035] Figure 6 For the present invention Figure 2 A schematic diagram of the structure of the tray clamping module and the tray;

[0036] Figure 7 For the present invention Figure 6 A schematic diagram of the structure of a tray clamping module;

[0037] Figure 8 For the present invention Figure 6 A schematic diagram of the enlarged structure of part B;

[0038] Fig. 9 For the present invention Figure 7 AA section diagram of the intermediate shaft and outer cylinder;

[0039] Fig.10 For the present invention Figure 6 Schematic diagram of the structure of the clamping head.

[0040] In the figure, 1. loading and unloading manipulator, 2. test component, 3. tray, 31. clamping plate, 32. plug-in column, 4. tray conveying component, 41. loading area, 42. guide rack, 43. tray clamping module, 431. outer cylinder, 4311. round hole, 432. inflation valve, 4321. resistance rod, 4322. guide hole plate, 4323. sealing plate, 4324. air inlet plate, 433. exhaust chamber, 434. support, 435. extrusion airbag, 436. intermediate shaft, 4361. support cylinder, 4362. air replenishment one-way valve, 4363. transmission gear set, 4364. extrusion piston, 4365. reciprocating screw, 437. clamping head, 4371. downward pressure Part, 4373, plug-in part, 4372, plug interface, 438, pressurized chamber, 439, separation head, 430, separation pressure-replenishing port, 4301, support head, 4302, plug connector, 4303, auxiliary pressure-replenishing port, 4304, exhaust hole, 44, tray support assembly, 441, fixed seat, 442, rotating tongue, 46, drive module, 461, fixed shaft, 462, overflow valve, 463, clamping motor, 464, worm, 465, worm gear, 47, unloading area, 48, conveyor frame, 49, conveyor belt, 40, contact roller, 401, fixed plate, 402, pneumatic telescopic rod, 403, unloading plate, 5, preheating tray module, 6, chassis, 7, unloading tray. DETAILED DESCRIPTION

[0041] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0042] like Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 6 , Figure 7As shown, a fully automatic test and sorting machine for semiconductor chips comprises a chassis 6, a loading and unloading manipulator 1 arranged on the chassis 6, a loading and unloading tray 7, a test component 2, a tray conveying component 4 and a preheating tray module 5 are arranged on the chassis 6, the loading and unloading manipulator 1 is used to put the semiconductor chips on the tray conveying component 4, the preheating tray module 5 and the test component 2 into the preheating tray module 5, the test component 2 and the loading and unloading tray 7, wherein the loading and unloading tray 7 can also be conveyed by the tray conveying component 4, the loading and unloading manipulator 1, the preheating tray module 5 and the side view component are all prior arts, so they are not repeated here, the tray conveying component 4 is composed of a conveying frame 48 fixed on the chassis 6, a conveying component arranged on the conveying frame 48, a loading component and a unloading component located at the left and right ends of the conveying frame 48, the loading component is used to place the tray 3, and the unloading component is used to collect the tray 3;

[0043] A tray clamping module 43 is provided on both the front and rear sides of the feeding assembly. A plurality of clamping heads 437 are rotatably connected to the tray clamping module 43 in a circular array. Support members 434 and extrusion airbags 435 are provided on both sides of the clamping head 437. A pressure compensation component is provided in the tray clamping module 43. A driving module 46 for driving the tray clamping module 43 to rotate is provided on the feeding assembly.

[0044] Based on the different positions of the clamping heads 437, the three clamping heads 437 adjacent to the tray 3 are divided into a plug connector 4302 pre-inserted into the tray 3, a support head 4301 located below the circumference of the plug connector 4302, and a separation head 439 located below the circumference. The support head 4301 is plugged into the tray 3, and the separation head 439 is used to move the tray 3 located at the bottom downward to separate the tray 3 above. The support member 434 is used to support the plug connector 4302 so that the plug connector 4302 can be aligned with the plug-in portion 4373 of the tray 3.

[0045] The extrusion airbag 435 is used to push the plug connector 4302 and the separation head 439 to rotate counterclockwise;

[0046] When in use, after the material tray 3 is plugged and fixed up and down, it is placed in the loading assembly. At this time, the material tray 3 does not contact the material tray clamping module 43. Then, the material tray clamping module 43 is driven to work, and the material tray 3 located at the bottom is placed in the plug connector 4302. As the plug connector 4302 rotates, the plug connector 4302 is gradually inserted into the material tray 3. At this time, the plug connector 4302 becomes the support head 4301 due to the change of position. The support head 4301 supports the material tray 3, and the support head 4301 continues to rotate around the material tray clamping module 43. As the support head 4301 rotates with the material tray clamping module 43, the support head 4301 rotates around the point position with the material tray clamping module 43 and Gradually displace horizontally to disengage from the plug connector 4302, at which time the support head 4301 is converted into a separation head 439, the extrusion airbag 435 is connected to the pressure compensation component and pushes the separation head 439 to rotate counterclockwise to push the lowest tray 3 to disengage from the second-to-last tray 3 and drop it onto the conveying assembly, after which the conveying assembly drives the tray 3 to move, the loading and unloading manipulator 1 drives the chips on the tray 3 to move one by one to the preheating tray module 5 for preheating, the test assembly 2 is tested, and different unloading trays 7 are placed according to the test results, and when the chip test on the tray 3 is completed, the next tray 3 moves to the conveying assembly, and the tray 3 without chips is moved to the unloading assembly by the conveying assembly;

[0047] When one clamping head 437 changes into the plug connector 4302 due to position change, in order to ensure that the clamping head 437 always faces the material tray 3, the clamping head 437 is pushed by squeezing the airbag 435, and under the factor of gravity, the clamping head 437 rotates counterclockwise to the direction facing the material tray 3;

[0048] Preferably, when the material tray 3 located at the bottom contacts the conveying assembly, the material tray 3 located at the bottom is disengaged from the penultimate material tray 3 to avoid shaking of the material tray 3 .

[0049] In this embodiment, if Figure 2 , Figure 6 , Figure 7 , Figure 8 As shown, the tray clamping module 43 includes an intermediate shaft 436 fixed on the feeding assembly and an outer cylinder 431 rotatably and sealably connected to the intermediate shaft 436, the outer cylinder 431 is driven by the driving module 46, the clamping head 437 is rotatably connected to the outer wall of the outer cylinder 431, the extrusion airbag 435 and the support member 434 are arranged on the outer wall of the outer cylinder 431, the pressure compensation component is arranged in the intermediate shaft 436, and the pressure compensation component is connected to the overflow valve 462 fixed on the feeding assembly;

[0050] The front and rear ends of the outer cylinder 431 are provided with circular holes 4311 in a circular array around the axis of the outer cylinder 431, the number of which is the same as that of the extrusion airbags 435 and which are connected to the extrusion airbags 435, and the inflation valves 432 are arranged in the circular holes 4311;

[0051] The intermediate shaft is provided with an auxiliary pressure-compensating port 4303 located at the plug connector 4302, and the intermediate shaft is provided with a separation pressure-compensating port 430 located at the separation head 439. The separation pressure-compensating port 430 and the auxiliary pressure-compensating port 4303 are both connected with the pressure-compensating component. When the inflation valve 432 rotates to the auxiliary pressure-compensating port 4303 and the separation pressure-compensating port 430, the airbag 435 is squeezed to compensate pressure.

[0052] When in use, the driving module 46 drives the outer cylinder 431 to rotate, and the outer cylinder 431 drives the clamping head 437 to rotate. When the inflation valve enters the auxiliary pressure replenishing port 4303 or the separation gas replenishing port, the pressure replenishing assembly inflates the extrusion airbag 435 through the inflation valve 432, so that the extrusion airbag 435 can push the clamping head 437 to rotate;

[0053] The overflow valve 462 is used to control the pressure of the pressure compensating assembly to prevent the pressure generated by the pressure compensating assembly from being too high and damaging the extrusion airbag 435 .

[0054] In this embodiment, if Figure 6 , Figure 7 , Fig. 9 As shown, the intermediate shaft is provided with an exhaust hole 4304, two pressurizing chambers 438 and two exhaust chambers 433. A partition plate is sealed and fixed in the middle of the exhaust chamber 433 to separate it into two chambers. Holes independently connected to the chambers are provided at both ends of the pressurizing chamber 438. The exhaust chamber 433 is independently connected to the overflow valve 462. The pressure replenishing component includes an extrusion piston 4364 connected in a sliding seal to the pressurizing chamber 438, a support cylinder 4361 fixed at both ends of the pressurizing chamber 438, and a rotating seal connection. The reciprocating screw 4365 connected to the two support cylinders 4361 and the transmission gear set 4363 fixed on both ends or one end of the reciprocating screw 4365, the intermediate shaft is also provided with a notch for the transmission gear set 4363 to be installed, the transmission gear set 4363 passes through the notch and meshes with the outer cylinder 431, the auxiliary pressure-compensating port 4303 and the separation pressure-compensating port 430 are provided on the opposite side of the support cylinder 4361 to ensure normal air intake and exhaust, and the holes are located on the opposite side of the support cylinder 4361;

[0055] The reciprocating screw 4365 is provided with a sealing sleeve, which is respectively sealed and connected to the extrusion piston 4364 and the support cylinder 4361. The sealing sleeve can realize telescopic adjustment. The sealing sleeve is a corrugated telescopic tube made of elastic material or other pipes that can realize sealing and telescopic.

[0056] The extrusion piston 4364 is connected to the reciprocating screw 4365 and can move back and forth along the reciprocating screw 4365;

[0057] Both the front and rear ends of the pressurizing chamber 438 are connected to a gas replenishing one-way valve 4362 fixed to the front and rear of the intermediate shaft 436;

[0058] The exhaust hole 4304 is connected to the outer wall of the intermediate shaft in the radial direction, and the extrusion airbag 435 is provided with a hole connected to the exhaust hole 4304, and the hole is staggered with the auxiliary pressure-compensating port 4303 and the separation pressure-compensating port 430;

[0059] When in use, as the outer cylinder 431 rotates, the transmission gear set 4363 drives the reciprocating screw 4365 to rotate, the reciprocating screw 4365 drives the reciprocating screw 4365 to rotate, and the reciprocating screw 4365 drives the extrusion piston 4364 to move. As the extrusion piston 4364 moves, the pressures of the pressurized chambers 438 on both sides of the extrusion piston 4364 are high and low, respectively. The high-pressure air pushes the inflation valve 432 to open, replenishing gas for the extrusion airbag 435, thereby ensuring the rotation of the separation head 439 and the plug connector 4302. Correspondingly, the chamber connected to the high-pressure pressurized chamber 438 is depressurized through the relief valve 462 to avoid damage to the extrusion airbag 435.

[0060] The inflation valve 432 corresponding to the low-pressure pressurized chamber 438 is closed, and the gas replenishment check valve 4362 is opened, and the low-pressure pressurized chamber 438 is replenished with gas at this time;

[0061] When the extrusion airbag 435 passes through the exhaust hole 4304 , the air in the extrusion airbag 435 is discharged through the exhaust hole 4304 , so that the extrusion airbag 435 does not squeeze the support head 4301 when the support head 4301 does not become the separation head 439 .

[0062] In this embodiment, if Figure 7 , Figure 8 As shown, the inflation valve includes a guide hole plate 4322, an air inlet hole plate 4324, a resistance rod 4321 plugged into the guide hole plate 4322, and a sealing plate 4323 fixed on the end of the resistance rod 4321 away from the intermediate shaft. The guide hole plate 4322 and the air inlet hole plate 4324 are both sealed and fixed in the circular hole 4311, and the guide hole plate 4322 is located on the side of the circular hole 4311 close to the intermediate shaft.

[0063] The abutment rod 4321 is sleeved with a spring that abuts against the guide hole plate 4322. The spring can push the abutment rod 4321 to drive the sealing plate 4323 to seal against the guide hole plate 4322, so that the hole on the guide hole plate 4322 is closed. When the abutment rod 4321 abuts against the outer wall of the intermediate shaft, the sealing plate 4323 seals against the air inlet hole plate 4324, so that the hole on the air inlet hole plate 4324 is closed.

[0064] When in use, the extrusion piston 4364 moves, and the high-pressure gas pushes the sealing plate 4323 to move upward, so that air enters the extrusion airbag 435 from the guide hole plate 4322 and the air inlet hole plate 4324. As for the low-pressure pressurized chamber 438, the sealing plate 4323 cannot be pushed upward due to the low pressure. At this time, the spring pushes the sealing plate 4323 to contact and seal with the guide hole plate 4322, and the air cannot be discharged from the extrusion airbag 435.

[0065] Among them, under the action of the overflow valve 462, the maximum air pressure of the pressurizing chamber 438 is determined. Under the maximum air pressure of the pressurizing chamber 438, in order to ensure that the pressurizing chamber 438 cannot push the sealing plate 4323 to contact the air inlet hole plate 4324, springs of different hardness can be selected according to the maximum air pressure of the pressurizing chamber 438 to ensure that the pressurizing chamber 438 cannot push the sealing plate 4323 to contact the air inlet hole plate 4324.

[0066] In this embodiment, if Figure 6 , Fig.10 As shown, the clamping head 437 is provided with an insertion port 4372 for inserting the feed tray 3, and the upper and lower sides of the insertion port of the clamping head 437 are respectively a pressing portion 4371 and an inserting portion 4373, and the length of the inserting portion 4373 is smaller than the pressing portion 4371;

[0067] Clamping plates 31 for plugging into the plug interface 4372 are provided on both sides of the material tray 3. The end of the clamping plate 31 away from the material tray 3 is triangular and has a circular chamfer on the end. A plug-in column 32 is provided at the bottom of the material tray 3, and a plug-in hole for interference plugging of the plug-in column 32 is opened at the upper end of the material tray 3.

[0068] When in use, after the plug-in portion 4373 rotates to below the clamping plates 31 of the three trays 3 from bottom to top, the clamping head 437 is now the plug-in connector 4302. When the outer cylinder 431 drives the plug-in connector 4302 to rotate, the pressing portion 4371 contacts the clamping plate 31 and moves along the clamping displacement until the plug-in port 4372 is plugged into the end of the clamping plate 31. At this time, the clamping head 437 is the supporting head 4301. When the supporting head 4301 continues to rotate downward, after the plug-in portion 4373 is separated from the clamping plate 31, the supporting head 4301 is converted into the separating head 439.

[0069] The clamping head 437 contacts the horizontal surface of the clamping plate 31, and when the clamping head 437 is rotated and inserted into the clamping plate 31, some deformation may occur to ensure the insertion;

[0070] When the clamping head 437 is the separation head 439, the pressing portion 4371 contacts the clamping plate 31 and pushes the material tray 3 downward under the action of the squeezing airbag 435, so that the plug-in column 32 is separated from the plug-in hole.

[0071] In this embodiment, if Figure 2As shown, the conveying assembly includes a conveying belt 49 disposed on a conveying frame 48 and contact rollers 40 rotatably connected to both sides of the conveying frame 48;

[0072] When in use, the conveyor belt 49 and the contact roller 40 convey the tray 3;

[0073] Preferably, the contact roller 40 is divided into three parts on the left and right sides, the front-to-back spacing of the rollers on the left and right sides is larger than the front-to-back spacing of the material tray 3, the front-to-back spacing of the middle contact roller 40 is smaller than the front-to-back spacing of the material tray 3, and the front-to-back spacing of the contact rollers 40 on the left and right sides gradually decreases to the spacing of the middle contact roller 40 to form an eight-shaped roller arrangement, and the material of the outer ring of the contact roller 40 is elastic rubber.

[0074] In this embodiment, if Figure 2 As shown, the left end of the conveyor frame 48 is a loading area 41, and the loading assembly includes four guide frames 42 arranged in a rectangular shape in the loading area 41. The four guide frames 42 are L-shaped, and a rectangular space for placing the feed tray 3 is formed between the four guide frames 42. A gap for the feed tray 3 to pass through is provided between the lower end of the guide frame 42 and the conveyor belt 49;

[0075] When in use, the material tray 3 is guided up and down by the material guide frame 42 to ensure that the material tray 3 moves vertically downward.

[0076] In this embodiment, if Figure 2 , Figure 3 , Figure 4 As shown, the driving module 46 includes a fixed plate 401 fixed on the guide frame 42, a clamping motor 463 fixed on the fixed plate 401, a worm gear 465 fixed on the outer cylinder 431, and a worm 464 rotatably connected to the fixed plate 401, the clamping motor 463 is driven by the worm gear 465 through the worm 464, the fixed plate 401 is fixed with a fixed shaft 461 fixed on the intermediate shaft, and the overflow valve 462 is fixed on the fixed plate 401;

[0077] When in use, the clamping motor 463 drives the worm 464 and the worm wheel 465 to rotate, so as to drive the outer cylinder 431 to rotate, and the self-locking of the worm 464 and the worm wheel 465 prevents the outer cylinder 431 from rotating when the clamping motor 463 is not working.

[0078] In this embodiment, if Figure 3 As shown, a material unloading area 47 is provided at the right end of the conveying frame 48, and the material unloading assembly includes four material guide frames 42 arranged on the material unloading area 47, and the distribution relationship of the four material guide frames 42 is the same as the distribution relationship of the material guide frames 42 of the loading assembly, and a material unloading plate 403 is provided at the center of the material unloading area 47, and a pneumatic telescopic rod 402 fixed to the conveying frame 48 is fixed on the lower side of the material unloading plate 403, and at least one material tray support assembly 44 is provided on both the front and rear sides of the material unloading area 47;

[0079] The tray support assembly 44 includes a fixed seat 441 fixed on the unloading area 47 and a rotating tongue 442 rotatably connected to the fixed seat 441. The rotating tongue 442 is fixed with a torsion spring fixed to the fixed seat 441. The lower side of the rotating tongue 442 is in horizontal contact with the side of the fixed seat 441, so that the rotating tongue 442 cannot rotate downward.

[0080] When in use, the material tray 3 is pushed upward by the pneumatic telescopic rod 402 and the unloading plate 403, and the material tray 3 moves upward along the guide frame 42. Then, the material tray 3 pushes the rotating tongue 442 to rotate and continues to move upward until the rotating tongue 442 is reset. At this time, the unloading plate 403 and the pneumatic telescopic rod 402 are reset, and the material tray 3 falls on the rotating tongue 442.

[0081] Although the present invention has been described in detail with reference to the aforementioned embodiments, it is still possible for those skilled in the art to modify the technical solutions described in the aforementioned embodiments, or to make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A fully automatic test and sorting machine for semiconductor chips, comprising a chassis, a loading and unloading manipulator arranged on the chassis, wherein the chassis is provided with a loading tray, a test assembly, a tray conveying assembly and a preheating tray module, characterized in that: The tray conveying assembly is composed of a conveying frame fixed on the chassis, a conveying assembly arranged on the conveying frame, a loading assembly and a unloading assembly located at the left and right ends of the conveying frame, the loading assembly is used to place the tray, and the unloading assembly is used to collect the tray; The front and rear sides of the feeding assembly are both provided with a tray clamping module, and the tray clamping module is rotatably connected with a plurality of clamping heads in a circular array, and the two sides of the clamping head are respectively provided with a support and an extrusion airbag, and a pressure compensation component is provided in the tray clamping module, and the feeding assembly is provided with a driving module for driving the tray clamping module to rotate; Based on the different positions of the clamping heads, the three clamping heads adjacent to the material tray are divided into a plug connector pre-inserted into the material tray, a support head located below the circumference of the plug connector, and a separation head located below the circumference of the support head. The support head is plugged into the material tray, and the separation head is used to move the material tray at the bottom downward to separate the material tray above. The support member is used to support the plug connector so that the plug connector can be aligned with the plug-in part of the material tray. The extrusion airbag is used to push the plug connector and the separation head to rotate counterclockwise; The tray clamping module includes an intermediate shaft fixed on the feeding assembly and an outer cylinder rotatably and sealably connected to the intermediate shaft, the outer cylinder is driven by the driving module, the clamping head is rotatably connected to the outer wall of the outer cylinder, the extrusion airbag and the support are arranged on the outer wall of the outer cylinder, the pressure compensation component is arranged in the intermediate shaft, and the pressure compensation component is connected to a relief valve fixed on the feeding assembly; The front and rear ends of the outer cylinder are provided with circular holes in a circular array around the axis of the outer cylinder, the number of which is the same as that of the extrusion airbags and which are connected to the extrusion airbags, and the inflation valves are arranged in the circular holes; The intermediate shaft is provided with an auxiliary pressure-compensating port located at the plug connector, and the intermediate shaft is provided with a separation pressure-compensating port located at the separation head. The separation pressure-compensating port and the auxiliary pressure-compensating port are both connected with the pressure-compensating component. When the inflation valve rotates to the auxiliary pressure-compensating port and the separation pressure-compensating port, the airbag is squeezed for pressure compensation.

2. A semiconductor chip fully automatic testing and sorting machine according to claim 1, characterized in that: The intermediate shaft is provided with an exhaust hole, two pressurizing chambers and two exhaust chambers. A partition plate is sealed and fixed in the middle of the exhaust chamber to separate it into two chambers. Holes independently connected to the chambers are provided at both ends of the pressurizing chamber. The exhaust chamber is independently connected to a relief valve. The pressure-compensating component includes an extrusion piston connected in a sliding seal to the pressurizing chamber, a support cylinder fixed at both ends of the pressurizing chamber, a reciprocating screw connected in a rotating seal to the two support cylinders, and a transmission gear set fixed at both ends or one end of the reciprocating screw. The intermediate shaft is also provided with a notch for the installation of the transmission gear set, and the transmission gear set meshes with the outer cylinder through the notch. The auxiliary pressure-compensating port and the separation pressure-compensating port are provided on the opposite sides of the support cylinder, and the hole is located on the opposite side of the support cylinder. The reciprocating screw is provided with a sealing sleeve, which is respectively sealed and connected to the extrusion piston and the support cylinder, and the sealing sleeve can realize telescopic adjustment; The extrusion piston is connected to the reciprocating screw and can move back and forth along the reciprocating screw; The front and rear ends of the pressurizing chamber are both connected to a gas replenishing one-way valve fixed to the front and rear of the intermediate shaft; The exhaust hole is connected with the outer wall of the intermediate shaft in the radial direction, and the extrusion airbag is provided with a hole connected with the exhaust hole, and the hole is staggered with the auxiliary pressure-compensating port and the separation pressure-compensating port.

3. A semiconductor chip fully automatic testing and sorting machine according to claim 2, characterized in that: The inflation valve comprises a guide hole plate, an air inlet hole plate, a resistance rod plugged into the guide hole plate, and a sealing plate fixed on an end of the resistance rod away from the intermediate shaft. The guide hole plate and the air inlet hole plate are both arranged in the circular hole, and the guide hole plate is located on a side of the circular hole adjacent to the intermediate shaft. The resistance rod sleeve is provided with a spring that resists against the guide hole plate. The spring can push the resistance rod to drive the sealing plate to seal against the guide hole plate so that the hole on the guide hole plate is closed. When the resistance rod resists against the outer wall of the intermediate shaft, the sealing plate seals against the air inlet hole plate so that the hole on the air inlet hole plate is closed.

4. A semiconductor chip fully automatic testing and sorting machine according to claim 3, characterized in that: The clamping head is provided with an insertion port for inserting the feed tray, and the upper and lower sides of the insertion port of the clamping head are respectively a pressing portion and an inserting portion, and the length of the inserting portion is smaller than the pressing portion.

5. A semiconductor chip fully automatic testing and sorting machine according to claim 4, characterized in that: Clamping plates for plugging into the plug interface are provided on both sides of the material tray. The end of the clamping plate away from the material tray is triangular and has a circular chamfer on the end. A plug-in column is provided at the bottom of the material tray, and a plug-in hole for interference plugging of the plug-in column is opened at the upper end of the material tray.

6. A semiconductor chip fully automatic testing and sorting machine according to claim 5, characterized in that: The conveying assembly comprises a conveying belt arranged on a conveying frame and contact rollers rotatably connected to two sides of the conveying frame.

7. A semiconductor chip fully automatic testing and sorting machine according to claim 6, characterized in that: The left end of the conveyor frame is the loading area, and the loading assembly includes four guide frames arranged in a rectangular shape in the loading area. The four guide frames are L-shaped, and a rectangular space for the feed tray to be placed is formed between the four guide frames. A gap for the feed tray to pass through is provided between the lower end of the guide frame and the conveyor belt.

8. The fully automatic test and sorting machine for semiconductor chips according to claim 7, characterized in that: The driving module includes a fixed plate fixed on the material guide frame, a clamping motor fixed on the fixed plate, a worm wheel fixed on the outer cylinder, and a worm rotatably connected to the fixed plate. The clamping motor is driven by the worm and the worm wheel. The fixed plate is fixed with a fixed shaft fixed on the intermediate shaft, and the overflow valve is fixed on the fixed plate.

9. A semiconductor chip fully automatic testing and sorting machine according to claim 8, characterized in that: A material unloading area is arranged at the right end of the conveying frame, and the material unloading assembly includes four material guide racks arranged on the material unloading area. The distribution relationship of the four material guide racks is the same as the distribution relationship of the material guide racks of the loading assembly. A material unloading plate is arranged at the center position of the material unloading area, and a pneumatic telescopic rod fixed to the conveying frame is fixed on the lower side of the material unloading plate. At least one material tray support assembly is arranged on the front and rear sides of the material unloading area.

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