Magnetron coating device for coated glass production

Abstract

The present invention discloses a magnetron coating device for producing coated glass, and relates to the technical field of coating. The magnetron coating device comprises a transmission platform, a working room and a bearing assembly. A conveying mechanism is arranged at the inner upper end of the transmission platform, and the working room is arranged at the middle position above the transmission platform. Compared with the current magnetron coating device, a linear motor and a sealing assembly are arranged. The linear motor drives the sputtering assembly to move horizontally in the working room to coat glasses of different specifications. On the one hand, the sealing performance of the working room during coating can be improved by the sealing assembly. On the other hand, compared with the magnetron coating equipment currently used in the production line, when the glass to be coated in the present invention enters and exits the feed port, the working room will not be polluted by the external environment, thereby ensuring the effect of glass coating. At the same time, the present invention can also reduce the time of evacuating the working room, thereby improving work efficiency.

Description

Technical Field

[0001] The invention relates to the technical field of coating, in particular to a magnetron coating device for producing coated glass. Background Art

[0002] Coated glass is a type of glass with a thin film deposited on the surface by physical or chemical methods. It is mainly used to improve its optical properties, enhance durability or provide specific functionality. Compared with other coating methods, magnetron coating technology has been widely used by glass manufacturers because of its advantages such as high coating quality, strong adhesion, and precise control of the composition and thickness of the film layer.

[0003] Patent documents CN110144558A and CN117448757A both disclose a magnetron coating device. However, the existing magnetron coating device has the following deficiencies when coating glass: first, during production on an assembly line, the glass to be coated often needs to frequently enter and exit the interior of the magnetron coating device, and each time the working room of the magnetron coating device is opened and closed, various impurities in the external environment will enter the magnetron coating device along with the flow of gas; second, in order to ensure work efficiency, the glass to be coated will frequently accelerate and decelerate on the assembly line to ensure rapid entry into the coating chamber, and currently a vacuum suction cup is usually used to fix the glass to be coated. Glass, but the vacuum suction cup will usually encounter the problem of damaged sealing after long-term use. The current magnetron coating equipment is basically unable to adjust the moving speed of the glass to be coated on the assembly line in real time according to the sealing of the vacuum suction cup; thirdly, when the magnetron coating equipment is working, a large number of target atoms will be sucked away with the operation of the vacuum system. In order to prevent the vacuum system from malfunctioning, some magnetron coating equipment will be equipped with a filter to intercept target atoms, such as patent document CN110467356A, but the existing target atom interception technology often requires the filter to be replaced after shutdown, and the service life of the filter is short, which increases the labor intensity of the staff. Summary of the invention

[0004] The object of the present invention is to provide a magnetron coating device for producing coated glass to solve the problems raised in the prior art.

[0005] To achieve the above-mentioned purpose, the present invention provides the following technical scheme: a magnetron coating device for producing coated glass, the magnetron coating device comprising a transmission platform, a studio and a bearing assembly, a transmission mechanism is arranged at the upper end of the transmission platform, the studio is arranged at the middle position above the transmission platform, the bearing assembly is arranged on the transmission mechanism, a feed port is arranged at the lower end of the studio, a sealing assembly is arranged at the side end of the feed port, an air inlet pipe is arranged at the outer side of the studio, an air outlet pipe is arranged above the studio, the air inlet pipe is connected to an external argon supply system, the air outlet pipe is connected to an external vacuum system, a mounting frame is arranged at the upper end of the studio, and a sputtering assembly is arranged below the mounting frame (the function realized by the sputtering assembly belongs to the present invention) Conventional technical means in the field, the specific structure is not described), a linear motor is arranged at one end of the mounting frame close to the sputtering assembly, and the sputtering assembly is fixedly mounted at the working end of the linear motor. When the present invention is working, the glass to be coated needs to be placed on the bearing seat, and then the bearing assembly is driven to move horizontally by the transmission mechanism to facilitate the movement of the glass to be coated into the working chamber. When the glass to be coated is moved into the working chamber, the gas in the working chamber is sucked away by the external vacuum system, and argon is delivered to the working chamber by the external argon supply system, and the target atoms are sputtered onto the glass to be coated by the sputtering assembly. Compared with the current magnetron coating device, the present invention drives the sputtering assembly to move horizontally in the working chamber by a linear motor to coat glasses of different specifications.

[0006] Furthermore, the supporting assembly includes a fixed seat and a supporting seat, a second cylinder is arranged inside the fixed seat, a working end of the second cylinder is connected to the supporting seat, a sealing groove is arranged on the outer side of the supporting seat, the sealing groove cooperates with the sealing assembly, and the supporting seat cooperates with the feed port. When the supporting assembly is located directly below the feed port, the supporting seat is driven to rise into the working chamber by the second cylinder, and the working chamber is isolated from the external environment by the supporting seat. The sealing assembly achieves the purpose of double sealing to avoid affecting the glass coating effect.

[0007] Furthermore, a cavity is provided inside the bearing seat, a first through hole is provided above the cavity, an air pump is also provided inside the fixed seat, and the air pump is connected to the cavity through a telescopic tube. When the staff places the glass to be coated on the bearing seat, the gas in the cavity can be discharged to the outside through the air pump, so as to avoid the glass to be coated moving on the bearing seat due to inertia when the conveying mechanism drives the bearing assembly to accelerate or decelerate. Compared with the current bearing devices such as vacuum suction cups, the present invention is provided with a second through hole, and the second through hole is provided below the cavity. A sensing block is provided inside the second through hole, and the sensing block is movably installed in the second through hole through a sensing spring rod, and a sensing spring is wound on the sensing spring rod. A piezoelectric sheet is provided at one end of the sensing block close to the sensing spring, and compressed gas is provided at one end of the sensing block away from the cavity. The piezoelectric sheet is electrically connected to the conveying mechanism (the conveying mechanism The functions realized belong to conventional technical means in this field, and the specific structure is not described). When the air pump in the present invention is not turned on, the induction spring wound on the induction spring rod is in a natural state without load. When the glass to be coated is placed on the bearing seat and the air pump is in the turned-on state, the cavity is in a negative pressure state. Under the action of compressed air, the induction block will move toward the direction of the cavity. At this time, the induction spring is in a compressed state, and the piezoelectric sheet on the induction block will be synchronously subjected to a group of forces, thereby generating a group of electrical signals. When the surface of the bearing seat is uneven due to various reasons, or the connection end of the telescopic tube, the cavity and the air pump leaks, so that the negative pressure state of the cavity is destroyed, the electrical signal on the piezoelectric sheet will change. When the transmission mechanism detects that the electrical signal on the piezoelectric sheet has changed, the staff can reduce the speed at which the transmission mechanism drives the bearing assembly to move, so as to avoid the glass to be coated on the bearing assembly from sliding due to excessive acceleration changes.

[0008] Furthermore, the sealing assembly includes a first sealing plate, a first groove, a liquid storage tank and a first cylinder. The first groove is provided with two groups. The two groups of the first grooves are relatively arranged on both sides of the feed port. A group of first sealing plates is arranged in each group of the first grooves. The ends of the two groups of the first grooves that are away from each other are connected through a first connecting groove, and the ends of the two groups of the first grooves that are close to each other are connected through a second connecting groove. The liquid storage tank is arranged below the working room, and a piston is arranged at the middle position inside the liquid storage tank. Hydraulic oil is arranged on both sides of the piston, and the hydraulic oil does not fill the liquid storage tank. The piston is connected to the working end of the first cylinder, and the upper end of the liquid storage tank is connected to the end of the first groove close to the feed port through a first conduit, and the lower end of the liquid storage tank is connected to the end of the first groove away from the feed port through a second conduit.

[0009] Furthermore, the sealing assembly also includes a second sealing plate and a second groove, the second grooves are provided with four groups, and the four groups of second grooves are respectively arranged around the feed port, a group of second sealing plates are arranged in each group of the second grooves, and each group of the second sealing plates is movably installed in the second grooves through a sealing spring, and the ends of the four groups of the second grooves away from the feed port are connected through a third connecting groove, and one end of one group of the second grooves away from the feed port is connected to the first conduit, and the second sealing plate cooperates with the sealing groove. When the present invention is not working, the two groups of the first sealing plates are in contact with each other, and at the same time, the four groups of the second sealing plates are not located in the feed port, and the working room is separated from the external environment by the two groups of the first sealing plates. When the bearing seat extends into the feed port and the four groups of the second sealing plates are aligned with the sealing grooves outside the bearing seat, the staff can drive the piston to move up through the first cylinder. At this time, the hydraulic oil at the upper end of the liquid storage tank will enter the four groups of the second grooves and the ends of the two groups of the first grooves close to the feed port. Under the action of the hydraulic pressure, the four groups of the second sealing plates will enter In the sealing groove outside the bearing seat, the two groups of first sealing plates will shrink into the first groove. When the glass coating is completed, the staff can drive the piston downward through the first cylinder. Since the hydraulic oil does not fill the liquid storage tank, the four groups of second sealing plates will shrink into the second groove first under the action of the sealing spring during the downward movement of the piston. At this time, the staff can drive the bearing seat downward through the second cylinder but not move out of the feed port (it only needs to ensure that the upper surface of the bearing seat is located below the two groups of first sealing plates). The working room is isolated from the external environment by the bearing seat. Finally, the staff can continue to drive the piston downward through the first cylinder until the two groups of first sealing plates are closed again. Compared with the magnetron coating equipment currently used in the production line, the present invention can improve the sealing of the working room during coating through the four groups of second sealing plates on the one hand, and the working room will not be polluted by the external environment when the bearing seat enters and exits the feed port, thereby ensuring the effect of glass coating. Finally, compared with the current magnetron coating equipment, the present invention can reduce the time of vacuuming the working room, thereby improving work efficiency.

[0010] Furthermore, a separation frame is provided in the working chamber, a filtering mechanism is provided in the separation frame, and the air outlet pipe is connected with the working chamber through the filtering mechanism.

[0011] Furthermore, the filtering mechanism includes a first separation chamber, a fixing frame, a motor and a baffle, the fixing frame is arranged in the first separation chamber, the upper end of the fixing frame is connected with the air outlet pipe through the air outlet channel, the lower end of the fixing frame is connected with the motor, the side end of the first separation chamber is connected with the working room through the second separation chamber, four groups of filter screens are arranged on the fixing frame, and two groups of baffles are arranged, the two groups of baffles are relatively arranged at the two inner ends of the fixing frame, the two groups of baffles and the second separation chamber are not on the same side of the fixing frame, and each group of baffles is fixedly connected to the upper end of the inner wall of the first separation chamber. During the coating process of the present invention, the external vacuum system will continuously draw away the gas in the working room. At this time, the gas in the working room will flow along the second separation chamber-first separation chamber-air outlet channel-air outlet pipe. When the gas flows into the second separation chamber , part of the target atoms in the gas will collide with the adjusting block. When the gas flows into the first separation chamber, the remaining target atoms in the gas will adhere to the filter. The adjusting block and the filter are used to prevent the target atoms in the gas from entering the external vacuum system, thereby preventing the external vacuum system from being blocked. During the operation of the filtering mechanism of the present invention, only the filter close to the second separation chamber will be attached with target atoms. When the filter close to the second separation chamber has too many target atoms attached to it, which affects the gas flow, the staff can drive the fixed frame to rotate through a motor to interchange the filter close to the baffle with the filter close to the second separation chamber. Compared with the current direct use of filters to intercept target atoms, if the gas flow rate is found to be abnormal during the operation of the present invention, the filter can be replaced without stopping the machine, thereby improving work efficiency.

[0012] Furthermore, an adjusting block is provided inside the second separation chamber, and a distance measuring mechanism is provided at the side end of the second separation chamber (the function realized by the distance measuring mechanism belongs to the conventional technical means in this field, and the specific structure is not described), and an electromagnet is provided at the end of the second separation chamber away from the distance measuring mechanism, and a magnetic block is embedded in the end of the adjusting block close to the electromagnet. The present invention can intercept a part of the target material atoms in the gas through the adjusting block, thereby improving the service life of the filter. The present invention detects the width of the second separation chamber through the distance measuring mechanism. As the work proceeds, a certain thickness of target material atoms will be attached to the adjusting block, thereby affecting the width of the second separation chamber. At this time, the staff can turn on the electromagnet and drive the adjusting block away from the distance measuring mechanism through the electromagnet, so as to ensure that the width of the second separation chamber is always maintained in its original state, and avoid changes in the width of the second separation chamber, so as to affect the gas flow rate in the working room.

[0013] Compared with the prior art, the beneficial effects of the present invention are as follows: compared with the current magnetron coating device provided with a linear motor and a sealing component, the linear motor drives the sputtering component to move horizontally in the working chamber to coat the glass to be coated with different specifications; on the one hand, the sealing component can improve the sealing of the working chamber during coating; on the other hand, compared with the magnetron coating equipment currently used in the production line, the working chamber of the present invention will not be polluted by the external environment when the glass to be coated enters and exits the feed port, thereby ensuring the effect of glass coating; at the same time, the present invention can also reduce the time of evacuating the working chamber, thereby improving work efficiency; the present invention is also provided with a second through hole and a sensing block; when the negative pressure state of the cavity is destroyed due to various reasons, the conveying mechanism can The electrical signal generated by the electric sheet adjusts the speed of movement of the supporting component in real time, so as to avoid sliding of the glass to be coated on the supporting component due to excessive acceleration change. Finally, the present invention is also provided with a filtering mechanism. Compared with the current direct use of filter screens to intercept target atoms, the present invention intercepts target atoms through an adjustment block and four groups of filter screens. The adjustment block can intercept a part of the target atoms in the gas, thereby increasing the service life of the filter screen. If the gas flow rate is found to be abnormal during operation, the present invention can replace the filter screen without stopping the machine, thereby improving work efficiency. In addition, the present invention can ensure that the width of the second separation chamber is always maintained in its original state through a distance measuring mechanism and an electromagnet, thereby avoiding changes in the width of the second separation chamber that affect the gas flow rate in the studio. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0015] Figure 2 It is a schematic diagram of the internal structure of the studio of the present invention;

[0016] Figure 3 It is a schematic diagram of the structure of the bearing assembly of the present invention;

[0017] Figure 4 It is a schematic diagram of the structure of the bearing seat of the present invention;

[0018] Figure 5 It is a schematic diagram of the structure of the sealing assembly of the present invention;

[0019] Figure 6 For the present invention Figure 5 Schematic diagram of the structure of the middle A part;

[0020] Figure 7 It is a schematic diagram of the separation internal structure of the present invention;

[0021] Figure 8 For the present invention Figure 7 Schematic diagram of the BB structure.

[0022] In the figure: 1, transmission platform; 11, transmission mechanism; 2, working room; 21, air inlet pipe; 22, air outlet pipe; 23, mounting frame; 24, sputtering assembly; 25, separation frame; 251, adjustment block; 252, first separation chamber; 253, air outlet channel; 254, electromagnet; 255, second separation chamber; 256, distance measuring mechanism; 257, fixing frame; 2571, filter screen; 258, motor; 259, baffle; 26, sealing assembly Part; 261, first sealing plate; 262, second sealing plate; 263, first groove; 264, second groove; 265, liquid storage tank; 2651, piston; 266, first cylinder; 27, feed port; 3, bearing assembly; 31, fixing seat; 311, air pump; 312, second cylinder; 32, bearing seat; 321, first through hole; 322, telescopic tube; 323, cavity; 324, second through hole; 325, induction block. DETAILED DESCRIPTION

[0023] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0024] Example: Figure 1-Figure 2 As shown, the present invention provides a technical solution, a magnetron coating device for producing coated glass, the magnetron coating device comprises a transmission platform 1, a studio 2 and a bearing assembly 3, a conveying mechanism 11 is arranged at the upper end of the transmission platform 1, the studio 2 is arranged at the middle position above the transmission platform 1, the bearing assembly 3 is arranged on the conveying mechanism 11, a feed port 27 is arranged at the lower end of the studio 2, a sealing assembly 26 is arranged at the side end of the feed port 27, an air inlet pipe 21 is arranged at the outer side of the studio 2, an air outlet pipe 22 is arranged above the studio 2, the air inlet pipe 21 is connected to an external argon supply system, and the air outlet pipe 22 is connected to an external vacuum system, a mounting frame 23 is arranged at the upper end of the studio 2, a sputtering assembly 24 is arranged below the mounting frame 23 (the function realized by the sputtering assembly 24 belongs to the conventional technical means in this field, and the specific structure is not described), a linear motor is arranged at one end of the mounting frame 23 close to the sputtering assembly 24, and the sputtering assembly 24 is fixedly installed at the working end of the linear motor.

[0025] like Figure 2-Figure 4 As shown, the bearing assembly 3 includes a fixed seat 31 and a bearing seat 32. A second cylinder 312 is arranged inside the fixed seat 31. The working end of the second cylinder 312 is connected to the bearing seat 32. A sealing groove is arranged on the outer side of the bearing seat 32. The sealing groove cooperates with the sealing assembly 26. The bearing seat 32 cooperates with the feed port 27.

[0026] When the present invention is working, the glass to be coated needs to be placed on the supporting seat 32, and then the supporting assembly 3 is driven to move horizontally by the conveying mechanism 11. When the supporting assembly 3 is located directly below the feed port 27, the supporting seat 32 is driven to rise into the working room 2 by the second cylinder 312. The working room 2 is isolated from the external environment by the supporting seat 32, and the sealing assembly 26 is used to achieve the purpose of double sealing to prevent the glass coating effect from being affected. Finally, the gas in the working room 2 is sucked away by the external vacuum system, and argon is delivered to the working room 2 by the external argon supply system. The target atoms are sputtered onto the glass to be coated by the sputtering assembly 24. Compared with the current magnetron coating device, the present invention drives the sputtering assembly 24 to move horizontally in the working room 2 by a linear motor, so as to coat glasses of different specifications to be coated.

[0027] like Figure 2-Figure 4As shown, a cavity 323 is provided inside the bearing seat 32, a first through hole 321 is provided above the cavity 323, an air pump 311 is further provided inside the fixing seat 31, and the air pump 311 is connected to the cavity 323 through a telescopic tube 322. When the staff places the glass to be coated on the bearing seat 32, the gas in the cavity 323 can be discharged to the outside through the air pump 311, so as to avoid the glass to be coated from moving on the bearing seat 32 due to inertia when the conveying mechanism 11 drives the bearing assembly 3 to accelerate or decelerate. Compared with the current vacuum suction cup and other carrying devices, the present invention is provided with a second through hole 324, the second through hole 324 is arranged below the cavity 323, and a sensing block 325 is arranged inside the second through hole 324. The sensing block 325 is movably installed in the second through hole 324 through a sensing spring rod, and a sensing spring is wound on the sensing spring rod. A piezoelectric sheet is arranged at one end of the sensing block 325 close to the sensing spring, and compressed gas is arranged at one end of the sensing block 325 away from the cavity 323. The piezoelectric sheet is electrically connected to the conveying mechanism 11, (the conveying mechanism The functions realized by the structure 11 belong to conventional technical means in this field, and the specific structure is not described). When the air pump 311 in the present invention is not turned on, the induction spring wound on the induction spring rod is in a natural state without load. When the glass to be coated is placed on the bearing seat 32 and the air pump 311 is in an on state, the cavity 323 is in a negative pressure state. Under the action of compressed air, the induction block 325 will move toward the direction of the cavity 323. At this time, the induction spring is in a compressed state, and the piezoelectric sheet on the induction block 325 will be synchronously subjected to a group of forces, thereby generating a group of electrical signals. When the surface of the bearing seat 32 is uneven due to various reasons, or the connection end between the telescopic tube 322 and the cavity 323 and the air pump 311 leaks, so that the negative pressure state of the cavity 323 is destroyed, the electrical signal on the piezoelectric sheet will change. When the transmission mechanism 11 detects that the electrical signal on the piezoelectric sheet has changed, the staff can reduce the speed at which the transmission mechanism 11 drives the bearing assembly 3 to move, so as to avoid the glass to be coated on the bearing assembly 3 from sliding due to excessive acceleration changes.

[0028] like Figure 2 , Figure 5 , Figure 6As shown, the sealing assembly 26 includes a first sealing plate 261, a first groove 263, a liquid storage tank 265 and a first cylinder 266. Two groups of first grooves 263 are provided. The two groups of first grooves 263 are relatively arranged on both sides of the feed port 27. A group of first sealing plates 261 is arranged in each group of first grooves 263. The ends of the two groups of first grooves 263 that are away from each other are connected through the first connecting groove, and the ends of the two groups of first grooves 263 that are close to each other are connected through the second connecting groove. The liquid storage tank 265 is arranged below the studio 2. A piston 2651 is arranged at the middle position inside the liquid storage tank 265. Hydraulic oil is arranged on both sides of the piston 2651. The hydraulic oil does not fill the liquid storage tank 265. The piston 2651 is connected to the working end of the first cylinder 266. The upper end of the liquid storage tank 265 is connected to the end of the first groove 263 close to the feed port 27 through the first conduit, and the lower end of the liquid storage tank 265 is connected to the end of the first groove 263 away from the feed port 27 through the second conduit.

[0029] like Figure 2 , Figure 5 , Figure 6 As shown, the sealing assembly 26 also includes a second sealing plate 262 and a second groove 264. The second groove 264 is provided with four groups. The four groups of second grooves 264 are respectively arranged around the feed port 27. A group of second sealing plates 262 is arranged in each group of second grooves 264. Each group of second sealing plates 262 is movably installed in the second groove 264 through a sealing spring. The ends of the four groups of second grooves 264 away from the feed port 27 are connected through a third connecting groove, and one end of one group of second grooves 264 away from the feed port 27 is connected to the first conduit, and the second sealing plate 262 cooperates with the sealing groove.

[0030] When the present invention is not in operation, the two sets of first sealing plates 261 are in contact with each other, and the four sets of second sealing plates 262 are not located in the feed port 27 (such as Figure 5As shown in the figure, the working room 2 is separated from the external environment by two groups of first sealing plates 261. When the bearing seat 32 extends into the feed port 27 and the four groups of second sealing plates 262 are aligned with the sealing grooves outside the bearing seat 32, the staff can drive the piston 2651 to move upward through the first cylinder 266. At this time, the hydraulic oil at the upper end of the liquid storage tank 265 will enter the four groups of second grooves 264 and the end of the two groups of first grooves 263 close to the feed port 27. Under the action of hydraulic pressure, the four groups of second sealing plates 262 will enter the sealing grooves outside the bearing seat 32, and the two groups of first sealing plates 261 will shrink into the first grooves 263. When the glass coating is completed, the staff can drive the piston 2651 to move downward through the first cylinder 266. Since the hydraulic oil does not fill the liquid storage tank 265, the four groups of second sealing plates 262 are under the action of the sealing springs during the downward movement of the piston 2651. It will first shrink into the second groove 264. At this time, the staff can drive the supporting seat 32 to move downward but not out of the feed port 27 through the second cylinder 312 (it only needs to ensure that the upper surface of the supporting seat 32 is located below the two groups of first sealing plates 261). The working room 2 is isolated from the external environment by the supporting seat 32. Finally, the staff can continue to drive the piston 2651 downward through the first cylinder 266 until the two groups of first sealing plates 261 are closed again. Compared with the magnetron coating equipment currently used in the production line, the present invention can improve the sealing of the working room 2 during coating through four groups of second sealing plates 262. On the other hand, when the supporting seat 32 enters and exits the feed port 27, the working room 2 will not be contaminated by the external environment, thereby ensuring the effect of glass coating. Finally, compared with the current magnetron coating equipment, the present invention can reduce the time of evacuating the working room 2, thereby improving work efficiency.

[0031] like Figure 7-Figure 8 As shown, a separation frame 25 is further provided in the working room 2, and a filtering mechanism is provided in the separation frame 25, and the air outlet pipe 22 is connected to the working room 2 through the filtering mechanism.

[0032] like Figure 7-Figure 8 As shown, the filtering mechanism includes a first separation chamber 252, a fixing frame 257, a motor 258 and a baffle 259. The fixing frame 257 is arranged in the first separation chamber 252. The upper end of the fixing frame 257 is connected to the air outlet pipe 22 through the air outlet channel 253, and the lower end of the fixing frame 257 is connected to the motor 258. The side end of the first separation chamber 252 is connected to the working room 2 through the second separation chamber 255. Four groups of filter screens 2571 are arranged on the fixing frame 257, and two groups of baffles 259 are arranged. The two groups of baffles 259 are relatively arranged at the two ends inside the fixing frame 257. The two groups of baffles 259 and the second separation chamber 255 are not on the same side of the fixing frame 257, and each group of baffles 259 is fixedly connected to the upper end of the inner wall of the first separation chamber 252.

[0033] like Figure 7As shown, an adjustment block 251 is provided inside the second separation chamber 255, a distance measuring mechanism 256 is provided at the side end of the second separation chamber 255 (the function realized by the distance measuring mechanism 256 belongs to the conventional technical means in this field, and the specific structure is not described), an electromagnet 254 is provided at the end of the second separation chamber 255 away from the distance measuring mechanism 256, and a magnetic block is embedded in the end of the adjustment block 251 close to the electromagnet 254.

[0034] During the coating process of the present invention, the external vacuum system will continuously extract the gas in the studio 2. At this time, the gas in the studio 2 will flow along the second separation chamber 255-the first separation chamber 252-the gas outlet channel 253-the gas outlet pipe 22. When the gas flows into the second separation chamber 255, a part of the target material atoms in the gas will collide with the adjustment block 251. When the gas flows into the first separation chamber 252, the remaining target material atoms in the gas will adhere to the filter screen 2571. The adjustment block 251 and the filter screen 2571 are used to prevent the target material atoms in the gas from entering the external vacuum system, thereby preventing the external vacuum system from being blocked. During the operation of the filtering mechanism of the present invention, only the filter screen 2571 close to the second separation chamber 255 will be attached with target material atoms. When the filter screen 2571 close to the second separation chamber 255 has too many target material atoms attached to it, which affects the gas flow, the staff can drive the fixed frame 257 to rotate through the motor 258, so as to separate the filter screen 2571 close to the baffle 259 and the filter screen 2571 close to the first separation chamber 252. The filter screens 2571 of the second separation chamber 255 are interchanged. Compared with the current direct use of the filter screen 2571 to intercept target atoms, if the gas flow rate is found to be abnormal during the working process, the filter screen 2571 can be replaced without stopping the machine, thereby improving the working efficiency. Finally, the present invention is also provided with an adjustment block 251, a distance measuring mechanism 256 and an electromagnet 254. The adjustment block 251 can intercept a part of the target atoms in the gas, thereby increasing the service life of the filter screen 2571. The present invention detects the width of the second separation chamber 255 through the distance measuring mechanism 256. As the work proceeds, a certain thickness of target atoms will be attached to the adjustment block 251, thereby affecting the width of the second separation chamber 255. At this time, the staff can turn on the electromagnet 254 and drive the adjustment block 251 away from the distance measuring mechanism 256 through the electromagnet 254, thereby ensuring that the width of the second separation chamber 255 is always maintained in the original state, avoiding changes in the width of the second separation chamber 255, so as to affect the gas flow rate in the studio 2.

[0035] The working principle of the present invention is as follows: before working, the glass to be coated is placed on the bearing seat 32 and the air pump 311 is turned on. The bearing assembly 3 is driven to move to the position directly below the feed port 27 by the conveying mechanism 11. Then, the bearing seat 32 is driven to rise into the working room 2 by the second air cylinder 312. When the four groups of second sealing plates 262 are aligned with the sealing grooves outside the bearing seat 32, the piston 2651 is driven to move upward by the first air cylinder 266, so that the four groups of second sealing plates 262 enter the sealing grooves outside the bearing seat 32, and the two groups of first sealing plates 261 are retracted into the first grooves 263. The gas in the working room 2 is sucked away by the external vacuum system, and argon gas is delivered to the working room 2 by the external argon gas supply system. The target atoms are sputtered onto the glass to be coated through the sputtering assembly 24. When the glass coating is completed, the piston 2651 is driven downward by the first cylinder 266. At this time, the four groups of second sealing plates 262 will first shrink into the second groove 264. Then the staff drives the supporting seat 32 downward through the second cylinder 312 until the upper surface of the supporting seat 32 is located below the two groups of first sealing plates 261, but does not move out of the feed port 27. Then the staff continues to drive the piston 2651 downward through the first cylinder 266 until the two groups of first sealing plates 261 are closed again. Finally, the supporting seat 32 is completely driven out of the working room 2 by the second cylinder 312, and the supporting assembly 3 is driven to move to the next process through the conveying mechanism 11.

[0036] It will be apparent to those skilled in the art that the invention is not limited to the details of the exemplary embodiments described above and that the invention can be implemented in other specific forms without departing from the spirit or essential features of the invention. The embodiments should therefore be considered exemplary and non-limiting, and the scope of the invention is defined by the appended claims rather than the foregoing description, and it is intended that all variations falling within the meaning and scope of the equivalent elements of the claims be included in the invention. Any reference numeral in a claim should not be considered as limiting the claim to which it relates.

Claims

1. A magnetron coating device for producing coated glass, characterized in that: The magnetron coating device comprises a transmission platform (1), a working room (2) and a bearing assembly (3); a transmission mechanism (11) is arranged at the upper end of the transmission platform (1); the working room (2) is arranged at the middle position above the transmission platform (1); the bearing assembly (3) is arranged on the transmission mechanism (11); a feed port (27) is arranged at the lower end of the working room (2); a sealing assembly (26) is arranged at the side end of the feed port (27); an air inlet pipe (21) is arranged at the outer side of the working room (2); an air outlet pipe (22) is arranged above the working room (2); the air inlet pipe (21) is connected to an external argon gas supply system; the air outlet pipe (22) is connected to an external vacuum system; a mounting frame (23) is arranged at the upper end of the working room (2); a sputtering assembly (24) is arranged below the mounting frame (23); the mounting frame (23) and the sputtering assembly (24) are connected via a linear motor; The bearing assembly (3) comprises a fixed seat (31) and a bearing seat (32); a second cylinder (312) is arranged inside the fixed seat (31); a working end of the second cylinder (312) is connected to the bearing seat (32); a sealing groove is arranged on the outer side of the bearing seat (32); the sealing groove cooperates with the sealing assembly (26); and the bearing seat (32) cooperates with the feed port (27); A cavity (323) is provided inside the bearing seat (32), a first through hole (321) is provided above the cavity (323), a second through hole (324) is provided below the cavity (323), an air pump (311) is further provided inside the fixing seat (31), the air pump (311) is connected to the cavity (323) via a telescopic tube (322), a sensing block (325) is provided inside the second through hole (324), the sensing block (325) is movably mounted in the second through hole (324) via a sensing spring rod, a sensing spring is wound around the sensing spring rod, a piezoelectric sheet is provided at one end of the sensing block (325) close to the sensing spring, compressed gas is provided at one end of the sensing block (325) away from the cavity (323), and the piezoelectric sheet is electrically connected to the transmission mechanism (11).

2. The magnetron coating device for producing coated glass according to claim 1, characterized in that: The sealing assembly (26) comprises a first sealing plate (261), a first groove (263), a liquid storage box (265) and a first cylinder (266). The first groove (263) is provided with two groups. The two groups of the first grooves (263) are arranged on both sides of the feed port (27) in a relative manner. A group of first sealing plates (261) is arranged in each group of the first grooves (263). The ends of the two groups of the first grooves (263) that are away from each other are connected by a first connecting groove. The ends of the two groups of the first grooves (263) that are close to each other are connected by a first connecting groove. The liquid storage tank (265) is connected to the working room (2) through the second connecting groove, the liquid storage tank (265) is arranged below the working room (2), a piston (2651) is arranged at a middle position inside the liquid storage tank (265), the piston (2651) is connected to the working end of the first cylinder (266), the upper end of the liquid storage tank (265) is connected to an end of the first groove (263) close to the feed inlet (27) through the first conduit, and the lower end of the liquid storage tank (265) is connected to an end of the first groove (263) away from the feed inlet (27) through the second conduit.

3. The magnetron coating device for producing coated glass according to claim 2, characterized in that: The sealing assembly (26) further comprises a second sealing plate (262) and a second groove (264). The second groove (264) is provided in four groups. The four groups of the second grooves (264) are respectively arranged around the feed port (27). A group of second sealing plates (262) is arranged in each group of the second grooves (264). Each group of the second sealing plates (262) is movably installed in the second groove (264) through a sealing spring. The ends of the four groups of the second grooves (264) away from the feed port (27) are connected through a third connecting groove. One end of one group of the second grooves (264) away from the feed port (27) is connected to the first conduit. The second sealing plate (262) cooperates with the sealing groove.

4. The magnetron coating device for producing coated glass according to claim 1, characterized in that: A separation frame (25) is also provided in the working room (2), a filtering mechanism is provided in the separation frame (25), and the air outlet pipe (22) is connected to the working room (2) via the filtering mechanism.

5. The magnetron coating device for producing coated glass according to claim 4, characterized in that: The filtering mechanism comprises a first separation chamber (252), a fixing frame (257), a motor (258) and a baffle (259); the fixing frame (257) is arranged in the first separation chamber (252); the upper end of the fixing frame (257) is connected to the air outlet pipe (22) via an air outlet channel (253); the lower end of the fixing frame (257) is connected to the motor (258); the side end of the first separation chamber (252) is connected to the second separation chamber (259); 55) is connected to the working chamber (2), four groups of filter screens (2571) are arranged on the fixing frame (257), two groups of baffles (259) are arranged, the two groups of baffles (259) are arranged opposite to each other at the two ends inside the fixing frame (257), the two groups of baffles (259) and the second separation chamber (255) are not on the same side of the fixing frame (257), and each group of baffles (259) is fixedly connected to the upper end of the inner wall of the first separation chamber (252).

6. The magnetron coating device for producing coated glass according to claim 5, characterized in that: An adjusting block (251) is arranged inside the second separation chamber (255), a distance measuring mechanism (256) is arranged at a side end of the second separation chamber (255), an electromagnet (254) is arranged at one end of the second separation chamber (255) away from the distance measuring mechanism (256), and a magnetic block is embedded at one end of the adjusting block (251) close to the electromagnet (254).

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