A clamping device for a mirror and a mirror adjustment device

Abstract

The present application relates to a kind of clamping devices for mirror, first top bead lever is rotatably mounted between first support and second support by first flexible hinge, second top bead lever is rotatably mounted on first support by second flexible hinge, third top bead lever is rotatably mounted on second support by third flexible hinge, first micrometer is flexibly connected first, second and third top bead lever respectively, first top bead lever includes first top bead mounted on first lever arm, second and third top bead lever includes second top bead mounted on second lever arm respectively, first top bead and second top bead cooperate with mirror.The present application also relates to mirror adjusting device comprising the above-mentioned clamping device.The present application is fixed by top bead up and down clamping mirror surface, the control of the movement direction of clamping point is realized by flexible hinge, the fine adjustment of the action on clamping point is realized by micrometer and lever arm, and the deformation of plane mirror is corrected in large-scale range.

Description

TECHNICAL FIELD

[0001] The present application relates to the clamping and face correction of a plane mirror, and more particularly to a clamping device for a mirror and a mirror adjusting device. BACKGROUND

[0002] In the light path processing of X-rays of the synchrotron radiation, mirrors are often used, which change the direction of the X-rays, correct the shape of the X-rays, or affect the phase of the X-rays. Mirrors vary in shape according to different functions and requirements. Among them, a kind of mirror adopts an ultra-thin thickness to achieve various processing of X-rays.

[0003] Because of the thin thickness, these mirrors often deform under the action of gravity and installation stress, affecting the imaging quality of the mirror.

[0004] Before online installation, the mirrors of the synchrotron radiation often need to be tested offline. Due to the thickness, thin plane mirrors often appear offline testing, and the face shape is corrected to perfect condition. However, during online installation, some unknown factors will have a great impact, thereby completely losing the effect of offline correction.

[0005] The thin mirrors of the synchrotron radiation are very valuable, but the thickness is very thin, and they are easily damaged during transportation and handling due to factors such as vibration. SUMMARY

[0006] In order to solve the problems of deformation of the thin plane mirror in the prior art, the present application provides a clamping device for a mirror and a mirror adjusting device.

[0007] The clamping device for a mirror according to the present application comprises a first top bead lever, a second top bead lever, a third top bead lever, a first support, a second support, a first clamping base and a first micrometer, wherein the first support and the second support are fixedly installed on the first clamping base at a distance from each other, the first top bead lever is rotatably installed between the first support and the second support through a first flexible hinge, the second top bead lever is rotatably installed on the first support through a second flexible hinge, the third top bead lever is rotatably installed on the second support through a third flexible hinge, the first micrometer is installed on the first clamping base and is flexibly connected to the first, second and third top bead levers respectively, the first top bead lever comprises a first top bead installed on a first lever arm, the second and third top bead levers respectively comprise a second top bead installed on a second lever arm, and the first top bead and the second top bead are oppositely arranged and cooperated with the mirror.

[0008] Preferably, the first clamping device further comprises a first limiting locking device, a first locking ring and a second locking ring, wherein the first limiting locking device connects the first top bead lever and the first clamping base to lock the first top bead lever on the first clamping base, the first locking ring connects the second top bead lever and the first clamping base to lock the second top bead lever on the first clamping base, and the second locking ring connects the third top bead lever and the first clamping base to lock the third top bead lever on the first clamping base.

[0009] Preferably, the top of the first lever arm has a first mounting hole for mounting the first flexible hinge, and the first limiting locking device has a circular arc shape with the center of the circle coinciding with the center of the first mounting hole.

[0010] Preferably, the first top bead is mounted on the lateral extension of the first lever arm, and the top end of the first lever arm has a lever top point, and the upper top point of the first top bead is on the same horizontal plane as the lever top point.

[0011] Preferably, the top of the second lever arm has a second mounting hole for mounting the second flexible hinge, and the second top bead is mounted on the lateral extension of the second lever arm, and the lower top point of the second top bead is on the same horizontal plane as the center of the second mounting hole.

[0012] Preferably, the first micrometer has a body and a telescopic head, wherein the body is mounted on the first clamping base, and the telescopic head is flexibly connected to the first, second and third top bead levers respectively.

[0013] Preferably, the first and second lever arms are respectively provided with symmetrical hemispherical recesses, and the two hemispherical recesses are connected by a through hole, and the telescopic head of the first micrometer has a hemispherical head with a threaded hole at the top end, when the hemispherical head is placed in one side of the hemispherical recess, the spherical ball with a threaded rod at the tail is installed from the other side of the hemispherical recess, and the threaded rod is installed in the threaded hole of the hemispherical head.

[0014] Preferably, the diameter of the threaded rod is smaller than the diameter of the through hole.

[0015] The mirror adjusting device according to the present application comprises a horizontal mirror and a vertical mirror respectively mounted on the same device base, the horizontal mirror and the vertical mirror respectively comprise a mirror and a clamping device according to any one of claims 1-5, and the mirrors are coupled to each other by the clamping devices in the optical path to act on the incident X-rays in all directions.

[0016] Preferably, the horizontal mirror is controlled by a first adjusting mechanism, the first adjusting mechanism comprising a first adapter plate, a rotation motor, a first roll motor and a first translation motor, wherein the first adapter plate is connected with the horizontal mirror, the rotation motor is connected with the first adapter plate to provide the horizontal mirror with a degree of freedom of rotation in a horizontal plane, the first roll motor is connected with the rotation motor to provide the horizontal mirror with a degree of freedom of rolling in a plane perpendicular to the optical path, and the first translation motor is connected with the first roll motor to provide the horizontal mirror with a degree of freedom of translation in the horizontal plane perpendicular to the optical path.

[0017] Preferably, the center of the reflecting surface of the horizontal mirror is located on the rotation axis of the rotation motor and also on the rotation center of the first roll motor.

[0018] Preferably, the vertical mirror is controlled by a second adjusting mechanism, the second adjusting mechanism comprising a second adapter plate, a pitch motor, a second roll motor and a second translation motor, wherein the second adapter plate is connected with the vertical mirror, the pitch motor is connected with the second adapter plate to provide the vertical mirror with a degree of freedom of pitch in a vertical plane, the second roll motor is connected with the pitch motor to provide the vertical mirror with a degree of freedom of rolling in a plane perpendicular to the optical path, and the second translation motor is connected with the second roll motor to provide the vertical mirror with a degree of freedom of movement in the vertical direction.

[0019] Preferably, the rotation axes of the pitch motor and the second roll motor coincide, and the center of the reflecting surface of the vertical mirror is located on the rotation axes of the pitch motor and the second roll motor.

[0020] Preferably, the horizontal mirror further comprises a second pad and a horizontal mirror base, the reflecting mirror of the horizontal mirror is supported and installed on the horizontal mirror base through the second pad, and the clamping device of the horizontal mirror is installed around the horizontal mirror base; the vertical mirror further comprises a third pad, a vertical mirror base and a back plate, the reflecting mirror of the vertical mirror is supported and installed on the vertical mirror base through the third pad, the back plate is assembled on the vertical mirror base, and the clamping device of the vertical mirror is installed around the back plate.

[0021] Preferably, the horizontal mirror and the vertical mirror further respectively comprise a fixing device for fixing the first and second pads to stabilize the reflecting mirror, the fixing device of the horizontal mirror is installed on the horizontal mirror base, and the fixing device of the vertical mirror is installed on the back plate.

[0022] The holding device for mirror according to the present application, by the up and down top beads holding the mirror up and down, realizes the fixation of the mirror surface, by the flexible hinge, realizes the control of the movement direction of the holding point, by the micrometer and the lever arm, realizes the fine adjustment of the action on the holding point, by the force on the holding point, realizes the correction of the mirror surface, not only can be used for the short distance carrying and the long distance transportation of the plane mirror, but also can be used for the correction of the deformation of the plane mirror caused by the gravity and the stress, and can ensure the stability of the mirror surface in the short distance carrying and the long distance transportation. BRIEF DESCRIPTION OF DRAWINGS

[0023] Figure 1 is the structure diagram of the mirror adjusting device according to a preferred embodiment of the present application.

[0024] Figure 2 is the exploded view of the mirror adjusting device of Figure 1

[0025] Figure 3 is the structure diagram of the horizontal mirror of Figure 2

[0026] Figure 4 is the exploded view of the horizontal mirror of Figure 3

[0027] Figure 5 is the exploded view of the first holding device of Figure 4

[0028] Figure 6 is the structure diagram of the first holding device of Figure 5

[0029] Figure 7 is the exploded view of the first holding device of Figure 6

[0030] Figure 8 is the another view diagram of the first holding device of Figure 6

[0031] Figure 9 is the side view of the first top bead lever of Figure 7

[0032] Figure 10 is the side view of the second / third top bead lever of Figure 7

[0033] Figure 11 shows the flexible fixation of the micrometer and the lever arm.

[0034] Figure 12 is​​​​​​​​​Figure 5 Structure diagram of the second clamping device of the application.

[0035] Figure 13 Figure 12 Exploded view of the second clamping device of the application.

[0036] Figure 14 Figure 12 Assembly diagram of the clamping block assembly of the second clamping device of the application.

[0037] Figure 15 Figure 13 Structure diagram of the first clamping block of the application.

[0038] Figure 16 Figure 13 Structure diagram of the second clamping block of the application.

[0039] Figure 17 Figure 5 Structure diagram of the fixing device of the application.

[0040] Figure 18 Figure 5 Side view of the first clamping device of the application.

[0041] Figure 19 Figure 5 Side view of the second clamping device of the application.

[0042] Figure 20 Figure 2 Structure diagram of the vertical mirror of the application.

[0043] Figure 21 Figure 20 Exploded view of the vertical mirror of the application.

[0044] Figure 22 Figure 21 Exploded view of the second clamping device of the application.

[0045] Figure 23 Figure 22 Structure diagram of the second clamping device of the application.

[0046] Figure 24 Figure 22 Structure diagram of the vertical mirror base of the application.

[0047] Figure 25 Show the initial assembly state of the vertical mirror of the application. Figure 20 DETAILED DESCRIPTION

[0048] The preferred embodiments of the present application are described below in conjunction with the accompanying drawings.

[0049] As Figure 1 ​​​​​​​​​​​​​As shown, a preferred embodiment of the reflector adjustment device according to the present invention includes a horizontal mirror 201 and a vertical mirror 207, both controlled by two sets of adjustment mechanisms, and both are mounted on the same device base 212. The horizontal mirror 201 is a vertically placed reflector mechanism, also known as an H-mirror, positioned in the optical path to modulate the horizontal properties of the incident X-rays. The vertical mirror 207 is a horizontally placed reflector mechanism, also known as a V-mirror, positioned in the optical path to modulate the vertical properties of the incident X-rays. The horizontal mirror 201 and the vertical mirror 207 are coupled together to act on the X-rays in all directions.

[0050] In this embodiment, the device base 212 serves as a base plate, providing a mounting platform for the horizontal mirror 201 and the vertical mirror 207, allowing the entire reflector adjustment device to be moved as a whole. Thus, the reflector, after offline testing and calibration, can be easily moved as a whole.

[0051] In this embodiment, the horizontal mirror 201 is controlled by a first adjustment mechanism, and the vertical mirror 207 is controlled by a second adjustment mechanism. The first and second adjustment mechanisms are evenly distributed to achieve stability and ease of use of the coupling between the horizontal mirror 201 and the vertical mirror 207.

[0052] like Figure 2 As shown, the first adjustment mechanism includes a first adapter plate 202 connected to the horizontal mirror 201, which has four positioning pins at its four corners. When the horizontal mirror 201 is installed on the first adapter plate 202, it can be firmly locked, so that the horizontal mirror 201 can be removed as a whole for offline calibration.

[0053] like Figure 2 As shown, the first adjustment mechanism also includes a rotary motor 203 connected to the first adapter plate 202 and a first roll angle motor 204 connected to the rotary motor 203. The rotary motor 203 provides the horizontal mirror 201 with the degree of freedom to rotate in the horizontal plane, and the first roll angle motor 204 provides the horizontal mirror 201 with the degree of freedom to roll in a plane perpendicular to the optical path. Specifically, the rotary motor 203 is a high-precision rotary motor with a minimum resolution of 0.001 degrees or higher, providing a slight angle of incidence for the reflector of the horizontal mirror 201. Specifically, when the horizontal mirror 201 is mounted on the first adapter plate 202, the center of the reflecting surface of the horizontal mirror 201 is exactly located on the rotation axis of the rotary motor 203, and also on the rotation center of the first roll angle motor 204. In this embodiment, the error is controlled within 1 millimeter.

[0054] like Figure 2As shown, the first adjusting mechanism further comprises a first translational motor 205 connected with the first roll motor 204, so as to provide a translational degree of freedom of the horizontal mirror 201 in the horizontal plane perpendicular to the light path through the first translational motor 205, so that the horizontal mirror 201 can cut into or out of the light path as needed. In the embodiment, the first translational motor 205 is a high-precision translational motor, and the motion accuracy is micron level.

[0055] As shown in FIG. 2, the first adjusting mechanism further comprises a first translational motor 205 connected with the first roll motor 204, so as to provide a translational degree of freedom of the horizontal mirror 201 in the horizontal plane perpendicular to the light path through the first translational motor 205, so that the horizontal mirror 201 can cut into or out of the light path as needed. In the embodiment, the first translational motor 205 is a high-precision translational motor, and the motion accuracy is micron level. Figure 2 As shown in FIG. 2, the first adjusting mechanism further comprises a first translational motor 205 connected with the first roll motor 204, so as to provide a translational degree of freedom of the horizontal mirror 201 in the horizontal plane perpendicular to the light path through the first translational motor 205, so that the horizontal mirror 201 can cut into or out of the light path as needed. In the embodiment, the first translational motor 205 is a high-precision translational motor, and the motion accuracy is micron level.

[0056] As shown in FIG. 2, the first adjusting mechanism further comprises a first translational motor 205 connected with the first roll motor 204, so as to provide a translational degree of freedom of the horizontal mirror 201 in the horizontal plane perpendicular to the light path through the first translational motor 205, so that the horizontal mirror 201 can cut into or out of the light path as needed. In the embodiment, the first translational motor 205 is a high-precision translational motor, and the motion accuracy is micron level.

[0057] Figure 2 As shown in FIG. 2, the first adjusting mechanism further comprises a first translational motor 205 connected with the first roll motor 204, so as to provide a translational degree of freedom of the horizontal mirror 201 in the horizontal plane perpendicular to the light path through the first translational motor 205, so that the horizontal mirror 201 can cut into or out of the light path as needed. In the embodiment, the first translational motor 205 is a high-precision translational motor, and the motion accuracy is micron level.

[0058] As shown in FIG. 2, the first adjusting mechanism further comprises a first translational motor 205 connected with the first roll motor 204, so as to provide a translational degree of freedom of the horizontal mirror 201 in the horizontal plane perpendicular to the light path through the first translational motor 205, so that the horizontal mirror 201 can cut into or out of the light path as needed. In the embodiment, the first translational motor 205 is a high-precision translational motor, and the motion accuracy is micron level. Figure 2 As shown in FIG. 2, the first adjusting mechanism further comprises a first translational motor 205 connected with the first roll motor 204, so as to provide a translational degree of freedom of the horizontal mirror 201 in the horizontal plane perpendicular to the light path through the first translational motor 205, so that the horizontal mirror 201 can cut into or out of the light path as needed. In the embodiment, the first translational motor 205 is a high-precision translational motor, and the motion accuracy is micron level.

[0059] Figure 2 As shown in FIG. 2, the first adjusting mechanism further comprises a first translational motor 205 connected with the first roll motor 204, so as to provide a translational degree of freedom of the horizontal mirror 201 in the horizontal plane perpendicular to the light path through the first translational motor 205, so that the horizontal mirror 201 can cut into or out of the light path as needed. In the embodiment, the first translational motor 205 is a high-precision translational motor, and the motion accuracy is micron level. ​​

[0060] It should be understood that the installation order of the vertical mirror 207 and the second adjusting mechanism is fixed and cannot be adjusted to ensure that the calibration is as a whole, according to the experimental requirements, easily moved in or out of the light path, and the calibrated posture is maintained.

[0061] Horizontal mirror 201

[0062] As shown in Figures 3-4 , the horizontal mirror 201 includes a first reflecting mirror 201a, a second cushion 201b, a horizontal mirror base 201c, and a first clamping device 201d, wherein the first reflecting mirror 201a is installed on the second cushion 201b, placed on the horizontal mirror base 201c, and finally fixed by the first clamping device 201d. In this way, the horizontally placed first reflecting mirror 201a is clamped and fixed. In this embodiment, the horizontal mirror base 201c has three-point support devices, and the first reflecting mirror 201a and the second cushion 201b can be positioned by the three-point support devices due to gravity.

[0063] As shown in Figure 5 , the first clamping device 201d includes a first clamping device 301, a second clamping device 302, 303, and a fixing device 304 installed around the horizontal mirror base 201c, wherein the first clamping device 301 is installed at both ends of the horizontal mirror base 201c, respectively, the second clamping device 302, 303 is installed symmetrically at the central position of the horizontal mirror base 201c, and the fixing device 304 is installed on the horizontal mirror base 201c at both sides of the second clamping device 302, 303, respectively, for firmly fixing the second cushion 201b on the horizontal mirror base 201c, thereby stabilizing the first reflecting mirror 201a. The first clamping device 301 and the second clamping device 302, 303 can effectively adjust the overall curvature of the first reflecting mirror 201a in a large range.

[0064] As shown in Figure 6 , the first clamping device 301 includes a first top bead lever 501, a second top bead lever 503, a third top bead lever 506, a first bracket 509, a second bracket 510, and a first clamping base 511, wherein the first clamping base 511 is fixedly installed at both ends of the horizontal mirror base 201c (see Figure 5 ), the first bracket 509 and the second bracket 510 are fixedly installed on the first clamping base 511 at a distance from each other, the first top bead lever 501 is rotatably installed between the first bracket 509 and the second bracket 510, the second top bead lever 503 is rotatably installed on the first bracket 509, and the third top bead lever 506 is rotatably installed on the second bracket 510.

[0065] As shown in Figures 7-8As shown, the first clamping device 301 further comprises a first flexible hinge 502, which adopts a three-segment design, with both ends fixedly connected to the first support 509 and the second support 510, and the middle part passing through the first mounting hole 603 (see Figure 9 ) of the first top bead lever 501. In this way, the first top bead lever 501 is allowed to rotate slightly along a predetermined trajectory through the first flexible hinge 502, and the trajectory of such rotation is very accurate, and the first top bead lever 501 is not easy to twist during the entire rotation process.

[0066] As shown in Figures 7-8 , the first clamping device 301 further comprises a second flexible hinge 504, which adopts a two-segment design, and the second top bead lever 503 is mounted on the first support 509 through the second flexible hinge 504. In addition, the first clamping device 301 further comprises a first locking ring 505, which tightly locks the second top bead lever 503 on the first clamping base 511 after adjusting the posture of the second top bead lever 503, ensuring its stability and accuracy.

[0067] As shown in Figures 7-8 , the first clamping device 301 further comprises a third flexible hinge 507, which adopts a two-segment design, and the third top bead lever 506 is mounted on the second support 510 through the third flexible hinge 507. In addition, the first clamping device 301 further comprises a second locking ring 508, which tightly locks the third top bead lever 506 on the first clamping base 511 after adjusting the posture of the third top bead lever 506.

[0068] As shown in Figures 7-8 , the first clamping device 301 further comprises a first micrometer 512, which has a body and a telescopic head as a precision tool, wherein the body is mounted on the first clamping base 511, and the telescopic head is flexibly connected to the first top bead lever 501, the second top bead lever 503 and the third top bead lever 506, respectively. By adjusting the first micrometer 512, the slight rotation of the first top bead lever 501, the second top bead lever 503 and the third top bead lever 506 along the flexible hinge shaft can be accurately controlled, thereby realizing high-precision adjustment and positioning.

[0069] As shown in Figure 9As shown, the first top bead lever 501 comprises a first top bead 601 and a first lever arm 604, wherein the first top bead 601 is mounted on a lateral extension of the first lever arm 604. The first top bead 601 is made of stainless steel, has a diameter no less than 5mm, and has a surface polished with a flatness between Ra0.1 and Ra0.4. The top end of the first lever arm 604 has a lever top point 602, and the upper top point of the first top bead 601 is at the same horizontal plane as the lever top point 602. The top of the first lever arm 604 has a first mounting hole 603 for mounting the first flexible hinge 502 (see Figure 7 ), and the bottom of the first lever arm 604 has a first mounting position 605 for coupling and mounting the telescopic head of the first micrometer 512 (see Figure 7 ). The first distance (i.e. the top bead action arm) 607 is between the upper top point of the first top bead 601 and the center of the first mounting hole 603, and the second distance (i.e. the lever action arm) 608 is between the first mounting position 605 and the center of the first mounting hole 603. The greater the ratio of the second distance 608 to the first distance 607, the more precise the control of the mirror surface of the first reflecting mirror 201a (see Figure 3 ). In the embodiment, the ratio of the second distance 608 to the first distance 607 is greater than 5.

[0070] As shown in Figure 9 , the first top bead lever 501 further comprises a first limit locking device 606 for locking the position of the first top bead lever 501. In the embodiment, the first limit locking device 606 is in the shape of a circular arc, and the center of the circular arc coincides with the center of the first mounting hole 603.

[0071] The second top bead lever 503 and the third top bead lever 506 have the same structure, and only the second top bead lever 503 will be described in detail below. As shown in Figure 10 , the second top bead lever 503 comprises a second top bead 701 and a second lever arm 703, wherein the second top bead 701 is mounted on a lateral extension of the second lever arm 703. The second top bead 701 is made of stainless steel, has a diameter no less than 5mm, and has a surface polished with a flatness between Ra0.1 and Ra0.4. The top of the second lever arm 703 has a second mounting hole 702 for mounting the second flexible hinge 504 (see Figure 7 ), and the bottom of the second lever arm 703 has a second mounting position 705 for coupling and mounting the telescopic head of the first micrometer 512 (see Figure 7The second top bead lever 503 is coupled to the telescopic head of the first micrometer 512. The lower vertex of the second top bead 701 is in the same horizontal plane as the center of the second mounting hole 702, and the center of the second mounting hole 702 is in the same vertical line as the second mounting position 705. The third distance (i.e., the top bead action arm) 706 is between the lower vertex of the second top bead 701 and the center of the second mounting hole 702, and the fourth distance (i.e., the lever action arm) 707 is between the second mounting position 705 and the center of the second mounting hole 702. The ratio of the fourth distance 707 to the third distance 706 is the magnification effect of the lever, which can make the first micrometer 512 more accurately adjust the mirror surface. In this embodiment, the ratio of the fourth distance 707 to the third distance 706 is greater than 5.

[0072] As shown in Figure 10 , the second top bead lever 503 further includes a second limit locking device 704 for locking the position of the second top bead lever 503, for locking the second lever arm 703.

[0073] As shown in Figures 11 , the telescopic head of the first micrometer 512 is flexibly fixed on the lever arms 604, 703 of the first top bead lever 501, the second top bead lever 503, and the third top bead lever 506, so that the telescopic head can push or pull back the lever arms, and can also rotate around the lever arms, but cannot be detached from the lever arms. The lever arms 604, 703 are provided with symmetrical semispherical recesses 801, and the two semispherical recesses 801 are connected by a through hole 802. The telescopic head of the first micrometer 512 has a semispherical head 806 with a threaded hole at the top. When the semispherical head 806 is placed in the semispherical recess 801, the ball 803 of the threaded rod 805 is inserted from the other side of the semispherical recess 801, and the threaded rod 805 is inserted into the threaded hole of the semispherical head 806. The diameter of the threaded rod 805 is smaller than the diameter of the through hole 802. After installation, the ball 803 and the semispherical head 806 are moderately fixed at both ends of the through hole 802, so that the telescopic head of the first micrometer 512 can move the lever arms 604, 703 forward and backward, and can also rotate around the lever arms 604, 703.

[0074] As shown in Figures 12-14 , the second clamping device 302, 303 respectively includes a clamping block assembly 1011, a third bracket 1009, a second clamping base 1006, and a second micrometer 1010. The second clamping base 1006 is fixedly installed on the horizontal mirror base 201c (see Figure 5The third bracket 1009 is fixedly installed on the second clamping base 1006 in the middle of the two sides of the second clamping device 302, 303, the clamping block assembly 1011 is installed on the third bracket 1009, and the second micrometer 1010 is installed on the second clamping base 1006 and is flexibly connected with the clamping block assembly 1011. The clamping block assembly 1011 comprises a first clamping block 1001, a second clamping block 1004, a fourth flexible hinge 1002 and a clamping block screw 1007, wherein the first clamping block 1001 is installed on the second clamping block 1004 via the fourth flexible hinge 1002, the clamping block screw 1007 is installed on the first clamping block 1001 and is pressed on the second clamping block 1004 through the first clamping block 1001, and the clamping block screw 1007 can adjust the opening and closing angle of the first clamping block 1001 and the second clamping block 1004. In the embodiment, the fourth flexible hinge 1002 adopts a three-section design, and two ends are installed on the first clamping block 1001 and the middle part is installed on the second clamping block 1004. In the embodiment, the top end of the clamping block screw 1007 is spherical. It should be understood that the second clamping device 302, 303 is mirror-symmetrically designed, the third bracket 1009 and the clamping block assembly 1011 are completely the same in structure, the second clamping base 1006 is mirror-symmetrically designed, and the clamping block assembly 1011 is designed in different assembly modes to realize the mirror symmetry of the second clamping device 302, 303.

[0075] As shown in Figures 12-14 , the second clamping device 302, 303 further comprises a fifth flexible hinge 1008, which adopts a two-section design, one end of which is installed on the third bracket 1009 and the other end of which is installed on the second clamping block 1004.

[0076] As shown in Figures 12-14 , the second clamping device 302, 303 further comprises a third locking ring 1003 and a fourth locking ring 1005, wherein the third locking ring 1003 connects the first clamping block 1001 and the second clamping block 1004 to lock the opening and closing angle of the first clamping block 1001 and the second clamping block 1004, and the fourth locking ring 1005 connects the second clamping block 1004 and the second clamping base 1006 to lock the second clamping block 1004 on the second clamping base 1006 after adjustment.

[0077] As shown in Figure 15 , the first clamping block 1001 comprises a third top bead 1101, which is made of stainless steel, has a diameter not less than 5 mm and a surface polished to a flatness of Ra0.1 to Ra0.4. The first clamping block 1001 has a third mounting hole 1102, and the clamping block screw 1007 (see Figure 14) through the third mounting hole 1102. The first clamping block 1001 has a first locking hole 1103, and the third locking ring 1003 cooperates with the first locking hole 1103 to lock the opening and closing angle of the first clamping block 1001 and the second clamping block 1004. The first clamping block 1001 has a fourth mounting hole 1104 for mounting the fourth flexible hinge 1002. When the first clamping block 1001 is placed horizontally, the center of the fourth mounting hole 1104 is on the same horizontal plane as the lower vertex of the third top bead 1101.

[0078] As shown in Figure 16 , the second clamping block 1004 includes a fourth top bead 1201 and a third lever arm 1202, wherein the fourth top bead 1201 is mounted on the lateral extension of the third lever arm 1202. The fourth top bead 1201 is made of stainless steel, with a diameter not less than 5 mm, and the surface is polished to a flatness of Ra0.1 to Ra0.4. The top of the third lever arm 1202 has a fifth mounting hole 1205 and a sixth mounting hole 1206, wherein the fifth flexible hinge 1008 is installed through the fifth mounting hole 1205 to mount the second clamping block 1004 on the third bracket 1009, and the fourth flexible hinge 1002 is installed through the sixth mounting hole 1206 to mount the second clamping block 1004 on the first clamping block 1001. The bottom of the third lever arm 1202 has a third mounting position 1204 for coupling and mounting the extension head of the second micrometer 1010, and the mounting method is as shown in Figure 11 . The third lever arm 1202 has a second locking hole 1203, and the fourth locking ring 1005 cooperates with the second locking hole 1203 to lock the swing arm angle of the second clamping block 1004. The upper vertex of the fourth top bead 1201, the center of the fifth mounting hole 1205 and the sixth mounting hole 1206 are on a horizontal line. Their front and back order cannot be changed. At the same time, the center of the fifth mounting hole 1205 and the third mounting position 1204 are on the same plumb line.

[0079] As shown in Figure 17 , the fixing device 304 includes a fixing base 1302, the lower part of which has a seventh mounting hole 1303, and the fixing base 1302 is fixed on the horizontal mirror base 201c (see Figure 5 ) through the seventh mounting hole 1303. The top of the fixing base 1302 has a completely threaded hole, and a locking bolt 1304 is assembled on the threaded hole. One end of the locking bolt 1304 is a hand wheel, and the other end is a locking sheet 1301. In this embodiment, the locking sheet 1301 is a high-density polytetrafluoroethylene sheet.

[0080] Horizontal mirror 201 assembly

[0081] The clamping devices 301, 302, 303 (see Figure 5During assembly, pay attention to the angles of flexible hinges 502, 504, 507, 1002, and 1008, ensuring that when each flexible hinge 502, 504, 507, 1002, and 1008 is in a balanced position, the clamps of clamping devices 301, 302, and 303 are fully open. Simultaneously, even when the clamps of clamping devices 301, 302, and 303 are fully closed, they should not exceed the travel range of each flexible hinge 502, 504, 507, 1002, and 1008.

[0082] like Figure 18 As shown, for the first clamping device 301, when assembling the flexible hinges 502, 504, and 507, the opening between the first top bead 601 and the second top bead 701 is made as large as possible. Then, the lever arms 604 and 703 and the telescopic head of the first micrometer 512 are assembled and coupled. The testing device ensures that within the stroke range of the first micrometer 512, the maximum swing angle of the lever arms 604 and 703 does not exceed the stroke of the flexible hinges 502, 504, and 507. At the maximum angle of the swing arm, the first limit locking device 606 and the locking rings 505 and 508 are locked.

[0083] like Figure 19 As shown, for the second clamping devices 302 and 303, first, the clamping block screw 1007 is completely loosened, and then the fourth flexible hinge 1002 is assembled. When the device is relaxed, the opening between the third top ball 1101 and the fourth top ball 1201 is maximized due to the elasticity of the fourth flexible hinge 1002. Simultaneously, when the third top ball 1101 and the fourth top ball 1201 are closed, they will not exceed the stroke of the fourth flexible hinge 1002. At the position where the opening between the third top ball 1101 and the fourth top ball 1201 is at its maximum, the third locking ring 1003 is locked. Then, the fifth flexible hinge 1008 is assembled. First, the third lever arm 1202 and the telescopic head of the second micrometer 1010 are coupled, and then the second micrometer 1010 is moved to the midpoint of its stroke. At this position, the fifth flexible hinge 1008 is assembled. The effect after assembly is that the balance position of the fifth flexible hinge 1008 is exactly at the midpoint of the stroke of the second micrometer 1010. At this point, lock the fourth locking ring 1005.

[0084] See Figure 4 The first reflector 201a and the second pad 201b are placed on the horizontal mirror base 201c. The horizontal mirror base 201c has a three-point support device, and the first reflector 201a and the second pad 201b can be positioned by the three-point support device due to gravity.

[0085] See Figure 5 Assemble the fixing device 304 onto the horizontal mirror base 201c. Slowly tighten the handwheels of the four fixing devices 304 in sequence. Tighten each locking bolt 1304 (see [link]) to the appropriate tightness. Figure 17) Tighten each 1 / 4 or 1 / 8 turn clockwise until all the locking bolts 1304 are tightened. The first mirror 201a and the second shim 201b are locked on the horizontal mirror mount 201c.

[0086] Referring to Figure 5 Install the first clamping device 301 on the horizontal mirror mount 201c. Note that the top beads 601, 701 will not touch the mirror surface of the first mirror 201a. If necessary, loosen the first limit lock 606 and the locking rings 505, 508, and adjust the first micrometer 512 to move the top beads 601, 701 away from the mirror surface.

[0087] Referring to Figure 5 Install the second clamping device 302, 303 on the horizontal mirror mount 201c. Note that the top beads 1101, 1201 will not touch the mirror surface of the first mirror 201a. If necessary, loosen the locking rings 1003, 1005, and adjust the second micrometer 1010 to move the top beads 1101, 1201 away from the mirror surface. The second clamping device 302, 303 is mirror-symmetrical, and when installed, the top beads 1101, 1201 are exactly acting on the middle of the first mirror 201a.

[0088] Place the device under a laser interferometer.

[0089] Loosen the first limit lock 606 and the locking rings 505, 508, 1003, 1005.

[0090] Fine-tune the micrometers 512, 1010 according to the surface profile results from the laser interferometer feedback to correct the surface profile of the first mirror 201a. For the second clamping device 302, 303, prefer to use the second micrometer 1010, and after the top bead 1201 slightly sticks to the first mirror 201a, rotate the clamping screw 1007 to make the top bead 1101 also slightly stick to the first mirror 201a. Then fine-tune the second micrometer 1010 to correct the surface profile of the first mirror 201a.

[0091] After getting the appropriate surface profile structure, lock the first limit lock 606 and the locking rings 505, 508, 1003, 1005.

[0092] Vertical mirror 207

[0093] As Figures 20-21As shown in FIG. 6, the vertical mirror 207 includes a second mirror 201e, a third cushion 201f, a vertical mirror base 306, and a second clamping device 201g. The second mirror 201e is installed on the third cushion 201f, which is placed on the vertical mirror base 306, and is finally fixed by the second clamping device 201g. In this way, the vertically placed second mirror 201e is clamped and fixed. In this embodiment, the vertical mirror base 306 has three-point support devices, and the second mirror 201e and the third cushion 201f can be positioned by the three-point support devices due to gravity.

[0094] As shown in FIG. 7, the vertical mirror 207 further includes a back plate 305, which is assembled on the vertical mirror base 306 and has a gap between the second mirror 201e and the third cushion 201f, without direct contact. Figures 20-21

[0095] As shown in FIG. 8, the second clamping device 201g includes a first clamping device 301, second clamping devices 302, 303, and a fixing device 304, which are installed around the back plate 305. The first clamping device 301 is installed at both ends of the back plate 305, respectively. The second clamping device 302 is installed on the back plate 305. The second clamping device 303 is installed on both the back plate 305 and the vertical mirror base 306. The fixing device 304 is installed on the back plate 305 at both sides of the second clamping device 302, respectively, for fixing the third cushion 201f, thereby stabilizing the second mirror 201e and effectively adjusting the overall curvature of the second mirror 201e in a large range. Figure 22 Figures 6-11 Figure 18 Figures 12-16 Figure 19 Figure 17

[0096] As shown in FIG. 9, the second clamping device 303 includes a third micrometer 401, whose telescopic head is fixed on a connecting rod 402. The tail of the connecting rod 402 is provided with a U-shaped groove 403 and a guide rail 404. One end of the U-shaped groove 403 is provided with a fifth jewel 405. The other end of the U-shaped groove 403 has a through threaded hole, in which a jewel screw 406 is assembled. One end of the jewel screw 406 is a hand wheel, and the other end is a sixth jewel 407. In this embodiment, the fifth jewel 405 and the sixth jewel 407 are made of stainless steel, with a diameter not less than 5 mm and a surface smoothness between Ra0.1 and Ra0.4. Figure 23

[0097] Figure 24 ​​​​​​​​​As shown, three positioning support balls 501 are arranged on the top surface of the vertical mirror base 306 in an isosceles triangle pattern. The vertical mirror base 306 has a track groove 502 for accommodating the connecting rod 402 (see Figure 23 ). Figure 23 ).

[0098] Vertical mirror 207 assembly

[0099] As shown in Figure 25 , the third micrometer 401 is assembled on the back plate 305 without being screwed.

[0100] The back plate 305 is assembled on the vertical mirror base 306. Note that the third micrometer 401 is to be placed into the track groove 502 (see Figure 24 ) of the vertical mirror base 306.

[0101] The connecting rod 402 is assembled from the front of the track groove 502 (see Figure 24 ) of the vertical mirror base 306 and coupled with the third micrometer 401.

[0102] The connecting rod 402 is lightly screwed on the vertical mirror base 306. Rotate the third micrometer 401 to move the connecting rod 402 and correct the posture of the connecting rod 402 and the third micrometer 401 in the movement. Until no resistance is felt, screw the screw on the connecting rod 402.

[0103] Tighten the fixing screw of the third micrometer 401 to tightly fix it on the back plate 305. At this point, the second clamping device 303 composed of the third micrometer 401 and the connecting rod 402 is assembled.

[0104] Referring to Figure 23 , the fifth top bead 405 and the sixth top bead 407 are completely loosened, and the opening is maximized.

[0105] Place the second reflecting mirror 201e and the third spacer 201f on the vertical mirror base 306 from top to bottom. The vertical mirror base 306 has three-point support devices, and the second reflecting mirror 201e and the third spacer 201f can be positioned by the three-point support devices due to gravity. During the placement process, pay attention to adjust the third micrometer 401 so that the fifth top bead 405 and the sixth top bead 407 do not touch the second reflecting mirror 201e.

[0106] Referring to Figure 25Assemble clamping devices 301 and 302 respectively. During assembly, pay attention to the angles of flexible hinges 502, 504, 507, 1002, and 1008, ensuring that when each flexible hinge 502, 504, 507, 1002, and 1008 is in a balanced position, the clamping jaws of clamping devices 301, 302, and 303 are fully open. Simultaneously, even when the clamping jaws of clamping devices 301, 302, and 303 are fully closed, they should not exceed the travel range of each flexible hinge 502, 504, 507, 1002, and 1008.

[0107] like Figure 18 As shown, for the first clamping device 301, when assembling the flexible hinges 502, 504, and 507, the opening between the first top bead 601 and the second top bead 701 is made as large as possible. Then, the lever arms 604 and 703 and the telescopic head of the first micrometer 512 are assembled and coupled. The testing device ensures that within the stroke range of the first micrometer 512, the maximum swing angle of the lever arms 604 and 703 does not exceed the stroke of the flexible hinges 502, 504, and 507. At the maximum angle of the swing arm, the first limit locking device 606 and the locking rings 505 and 508 are locked.

[0108] like Figure 19 As shown, for the second clamping device 302, first, the clamping block screw 1007 is completely loosened, and then the fourth flexible hinge 1002 is assembled. When the device is relaxed, the opening between the third top ball 1101 and the fourth top ball 1201 is maximized due to the elasticity of the fourth flexible hinge 1002. Simultaneously, when the third top ball 1101 and the fourth top ball 1201 are closed, they will not exceed the stroke of the fourth flexible hinge 1002. At the position where the opening between the third top ball 1101 and the fourth top ball 1201 is at its maximum, the third locking ring 1003 is locked. Then, the fifth flexible hinge 1008 is assembled. First, the third lever arm 1202 and the telescopic head of the second micrometer 1010 are coupled, and then the second micrometer 1010 is moved to the midpoint of its stroke. At this position, the fifth flexible hinge 1008 is assembled. The effect after assembly is that the balance position of the fifth flexible hinge 1008 is exactly at the midpoint of the stroke of the second micrometer 1010. At this point, lock the fourth locking ring 1005.

[0109] See Figure 25 Assemble the fixing device 304 onto the back plate 305. Slowly tighten the handwheels of both fixing devices 304 in sequence. Tighten each locking bolt 1304 (see [link]) to the appropriate tightness. Figure 17 Turn clockwise 1 / 4 or 1 / 8 turn each time until all locking bolts 1304 are tightened. The second reflector 201e and the third pad 201f are locked onto the back plate 305.

[0110] See Figure 25Two first clamping devices 301 are assembled on the back plate 305. Note that the top beads 601, 701 will not touch the mirror surface of the second mirror 201e. If necessary, loosen the first limit locking device 606 and the locking rings 505, 508, adjust the first micrometer 512 to make the top beads 601, 701 away from the mirror surface.

[0111] Referring to Figure 5 The second clamping device 302 is assembled on the back plate 305. Note that the top beads 1101, 1201 will not touch the mirror surface of the second mirror 201e. If necessary, loosen the locking rings 1003, 1005, adjust the second micrometer 1010 to make the top beads 1101, 1201 away from the mirror surface. When assembled, the top beads 1101, 1201 just act on the middle of the second mirror 201e.

[0112] Put the device under the laser interferometer.

[0113] Loosen the first limit locking device 606 and the locking rings 505, 508, 1003, 1005.

[0114] Fine tune the micrometers 512, 1010, 401 according to the surface profile result from the laser interferometer to correct the surface profile of the second mirror 201e. For the second clamping device 302, first use the second micrometer 1010 to make the top bead 1201 slightly touch the second mirror 201e, then rotate the clamping screw 1007 to make the top bead 1101 also slightly touch the second mirror 201e. Then fine tune the second micrometer 1010 to correct the surface profile of the first mirror 201a. For the second clamping device 303, first use the third micrometer 401 to make the fifth top bead 405 slightly touch the second mirror 201e, then rotate the top bead screw 406 to make the sixth top bead 407 slightly touch the second mirror 201e. According to the result from the laser interferometer, adjust the third micrometer 401 to correct the surface profile of the second mirror 201e.

[0115] After getting the proper surface profile structure, lock the first limit locking device 606 and the locking rings 505, 508, 1003, 1005.

[0116] The above description is only the preferred embodiment of the present application, and is not intended to limit the scope of the present application. The above embodiment of the present application can be changed in various ways. Any simple, equivalent changes and modifications made according to the content of the claims and the description of the present application fall within the scope of the present application. The present application is not described in detail, and is conventional technical content.

Claims

1. A clamping device for a reflector, characterized in that, The clamping device includes a first top ball lever, a second top ball lever, a third top ball lever, a first bracket, a second bracket, a first clamping base, and a first micrometer. The first bracket and the second bracket are fixedly mounted on the first clamping base at a distance from each other. The first top ball lever is rotatably mounted between the first bracket and the second bracket via a first flexible hinge. The second top ball lever is rotatably mounted on the first bracket via a second flexible hinge. The third top ball lever is rotatably mounted on the second bracket via a third flexible hinge. The first micrometer is mounted on the first clamping base and flexibly connects the first, second, and third top ball levers. The first top ball lever includes a first top ball mounted on a first lever arm. The second and third top ball levers have the same structure. The second and third top ball levers each include a second top ball mounted on a second lever arm. The first and second top balls are arranged opposite each other and cooperate with a reflector.

2. The clamping device according to claim 1, characterized in that, The first clamping device further includes a first limiting locking device, a first locking ring, and a second locking ring. The first limiting locking device connects the first top ball lever and the first clamping base to lock the first top ball lever on the first clamping base. The first locking ring connects the second top ball lever and the first clamping base to lock the second top ball lever on the first clamping base. The second locking ring connects the third top ball lever and the first clamping base to lock the third top ball lever on the first clamping base.

3. The clamping device according to claim 2, characterized in that, The top of the first lever arm has a first mounting hole for mounting the first flexible hinge, and the first limiting locking device is arc-shaped, with the center of the arc coinciding with the center of the first mounting hole.

4. The clamping device according to claim 1, characterized in that, The first top bead is installed on the lateral extension of the first lever arm, the top of the first lever arm has a lever apex, and the upper apex of the first top bead and the lever apex are located on the same horizontal plane.

5. The clamping device according to claim 1, characterized in that, The top of the second lever arm has a second mounting hole for mounting the second flexible hinge. The second top bead is mounted on the lateral extension of the second lever arm, and the lower apex of the second top bead is on the same horizontal plane as the center of the second mounting hole.

6. The clamping device according to claim 1, characterized in that, The first micrometer has a body and a telescopic head, wherein the body is mounted on a first clamping base, and the telescopic head is flexibly connected to the first, second and third top ball levers respectively.

7. The clamping device according to claim 6, characterized in that, The first and second lever arms each have symmetrical hemispherical recesses, and the two hemispherical recesses are connected by a through hole. The telescopic head of the first micrometer has a hemispherical head with a threaded hole at the top. When the hemispherical head is pressed against the hemispherical recess on one side, the ball with a threaded rod at the tail is inserted from the hemispherical recess on the other side, and the threaded rod is inserted into the threaded hole of the hemispherical head.

8. The clamping device according to claim 7, characterized in that, The diameter of the threaded rod is smaller than the diameter of the through hole.

9. A reflector adjustment device, characterized in that, The mirror adjustment device includes a horizontal mirror and a vertical mirror respectively mounted on the same device base. The horizontal mirror and the vertical mirror each include a mirror and a clamping device according to any one of claims 1-8. The mirrors are clamped to each other in the optical path by the clamping device to act on the incident X-rays from all directions.

10. The mirror adjustment device according to claim 9, characterized in that, The horizontal mirror is controlled by a first adjustment mechanism, which includes a first adapter plate, a rotary motor, a first roll angle motor, and a first translational motor. The first adapter plate is connected to the horizontal mirror, the rotary motor is connected to the first adapter plate to provide the horizontal mirror with the degree of freedom to rotate in the horizontal plane, the first roll angle motor is connected to the rotary motor to provide the horizontal mirror with the degree of freedom to roll in the plane perpendicular to the light path, and the first translational motor is connected to the first roll angle motor to provide the horizontal mirror with the degree of freedom to translate in the horizontal plane perpendicular to the light path.

11. The mirror adjustment device according to claim 10, characterized in that, The center of the reflecting surface of the horizontal mirror is located on the rotating shaft of the rotary motor, and also on the rotation center of the first rolling angle motor.

12. The mirror adjustment device according to claim 9, characterized in that, The vertical mirror is controlled by a second adjustment mechanism, which includes a second adapter plate, a pitch motor, a second roll motor, and a second translation motor. The second adapter plate is connected to the vertical mirror, the pitch motor is connected to the second adapter plate to provide the vertical mirror with the degree of freedom to pitch in the vertical plane, the second roll motor is connected to the pitch motor to provide the vertical mirror with the degree of freedom to roll in the plane perpendicular to the optical path, and the second translation motor is connected to the second roll motor to provide the vertical mirror with the degree of freedom to move in the vertical direction.

13. The mirror adjustment device according to claim 12, characterized in that, The rotation axes of the pitch motor and the second roll motor coincide, and the center of the reflecting surface of the vertical mirror is located on the rotation axes of the pitch motor and the second roll motor.

14. The mirror adjustment device according to claim 9, characterized in that, The horizontal mirror also includes a second pad and a horizontal mirror base. The reflector of the horizontal mirror is supported and mounted on the horizontal mirror base by the second pad. The clamping device of the horizontal mirror is mounted around the horizontal mirror base. The vertical mirror also includes a third pad, a vertical mirror base and a back plate. The reflector of the vertical mirror is supported and mounted on the vertical mirror base by the third pad. The back plate is assembled on the vertical mirror base. The clamping device of the vertical mirror is mounted around the back plate.

15. The mirror adjustment device according to claim 14, characterized in that, The horizontal mirror and the vertical mirror also include fixing devices for fixing the first and second pads to stabilize the mirrors. The fixing device for the horizontal mirror is mounted on the horizontal mirror base, and the fixing device for the vertical mirror is mounted on the back plate.

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