Iron-cobalt alloy target material and preparation method and application thereof

Abstract

The invention discloses an iron-cobalt alloy target material and a preparation method and application thereof, and belongs to the technical field of material processing. The invention provides a preparation method of an iron-cobalt alloy target material. The preparation method comprises the following steps: preheating an iron-cobalt alloy ingot, forging, preheating after forging, rolling, annealing, rolling and annealing in sequence, and finally flattening and machining. Meanwhile, the deformation rate of forging and rolling and the temperature and time of annealing treatment are controlled, and therefore the iron-cobalt alloy target material which is fine and uniform in crystal grain, high in purity and high in magnetic permeability can be effectively obtained. In addition, the preparation method of the iron-cobalt alloy target material is simple in process, short in flow, easy to operate, high in operability and repeatability and high in yield.

Description

Technical Field

[0001] The invention belongs to the technical field of material processing, and in particular relates to an iron-cobalt alloy target material and a preparation method and application thereof. Background Art

[0002] Iron-cobalt alloy is a material with good mechanical properties, good ductility, and good air permeability. It is widely used in high-speed motors, parts, and magnetic storage industries. Magnetic capacitors in magnetic storage use various sputtering targets, of which iron-cobalt alloy is one of them and is often used as a magnetic conductive layer.

[0003] There are many methods for preparing iron-cobalt alloy targets in the prior art, but there are few disclosures on how to prepare targets with fine and uniform grains and high magnetic permeability. For example, the prior art CN109887902A discloses a cobalt-iron alloy target for magnetron sputtering, which is an alloy made of cobalt and iron mixed in an atomic ratio of 6.5 to 8.5:3.5 to 1.5. However, the prior art focuses on making the cobalt-iron alloy target into a magnetic conductive layer, a magnetic capacitor unit, and a magnetic capacitor device, and does not mention how to prepare a target with fine and uniform grains and high magnetic permeability. The prior art CN201511022003.6 discloses a method for preparing an iron-cobalt alloy, but the prior art mainly prepares iron-cobalt alloy cold-rolled plates, which is not a target industry, and does not pay attention to the magnetic permeability or the grains.

[0004] Therefore, how to provide an iron-cobalt alloy target material that can be used in the target material field and has fine and uniform iron-cobalt target grains and high magnetic permeability has become a research hotspot. Summary of the invention

[0005] The object of the present invention is to overcome the shortcomings of the above-mentioned prior art and to provide an iron-cobalt alloy target material with a simple preparation process, high purity, fine and uniform grain size and high magnetic permeability, as well as a preparation method and application thereof.

[0006] To achieve the above object, in a first aspect of the present invention, the present invention provides a method for preparing an iron-cobalt alloy target, the preparation method comprising the following steps:

[0007] (1) preheating the iron-cobalt alloy ingot to 900-1200° C. and then forging it by upsetting and drawing, with the deformation rate of each upsetting and drawing being 50-70%, and water cooling after forging;

[0008] (2) preheating the workpiece after water cooling in step (1) for a second time, rolling it once after the second preheating, with a deformation rate of 80-90% in the first rolling, and air cooling it after the first rolling;

[0009] (3) performing an annealing treatment on the workpiece after air cooling in step (2), wherein the annealing temperature is 700-800° C. and the time is 60-120 min, and then cooling to 450-500° C.;

[0010] (4) performing secondary rolling on the workpiece after cooling to 450-500° C. in step (3), wherein the secondary rolling deformation rate is 20-30%, and air cooling is performed after the secondary rolling is completed;

[0011] (5) subjecting the workpiece after air cooling in step (4) to secondary annealing, wherein the secondary annealing temperature is 500-600° C., the time is 60-120 min, and air cooling is performed after the secondary annealing is completed;

[0012] (6) Leveling and machining the workpiece after air cooling in step (5) to obtain an iron-cobalt alloy target.

[0013] In a preparation method of an iron-cobalt alloy target material provided by the present invention, an iron-cobalt alloy ingot is preheated and then forged, preheated and rolled after forging, then annealed, then rolled and annealed in sequence, and finally leveled and machined; at the same time, the present invention also controls the deformation rate of forging and rolling, as well as the temperature and time of annealing, so that an iron-cobalt alloy target material with fine and uniform grains, high purity and high magnetic permeability can be effectively obtained; and the material preparation method of the iron-cobalt alloy target material provided by the present invention has a simple process, a short flow, simple operation, strong operability and repeatability, and a high yield rate.

[0014] Exemplarily, the temperature of the preheating may be any point value or any two points in the range between 900-1200°C, such as 900°C, 920°C, 940°C, 960°C, 980°C, 1000°C, 1020°C, 1040°C, 1060°C, 1080°C, 1100°C, 1120°C, 1140°C, 1160°C, 1180°C, 1200°C, etc.

[0015] Exemplarily, the deformation rate of each pier roughing and drawing may be any point value of 50-70% or any two point range value, such as 50%, 52%, 55%, 58%, 60%, 62%, 65%, 68%, 70%, etc.

[0016] Exemplarily, the single rolling deformation rate may be any point value or any two point range value of 80-90%, for example, it may be 80%, 81%, 82%, 83%, 84%, 85%, 86%, 87%, 88%, 89%, 90%, etc.

[0017] Exemplarily, the secondary rolling deformation rate may be any point value or any two point range value between 20-30%, for example, it may be 20%, 21%, 22%, 23%, 24%, 25%, 26%, 27%, 28%, 29%, 30%, etc.

[0018] Exemplarily, the primary annealing temperature may be any point value or any two point range values ​​between 700-800°C, for example, 700°C, 710°C, 720°C, 730°C, 740°C, 750°C, 760°C, 770°C, 780°C, 790°C, 800°C, etc.; the primary annealing time may be any point value or any two point range values ​​between 60-120min, for example, 60min, 70min, 80min, 90min, 100min, 110min, 120min, etc.

[0019] Exemplarily, the temperature of the secondary annealing may be any point value or any range value between 500-600°C, for example, 500°C, 510°C, 520°C, 530°C, 540°C, 550°C, 560°C, 570°C, 580°C, 590°C, 600°C, etc.; the secondary annealing time may be any point value or any range value between 60-120min, for example, 60min, 70min, 80min, 90min, 100min, 110min, 120min, etc.

[0020] As a preferred embodiment of the preparation method of the present invention, the iron-cobalt alloy ingot is a high-purity iron-cobalt alloy ingot obtained by vacuum induction melting or magnetic levitation melting, which is obtained by cutting the ingot using a horizontal sawing machine after reversing the cutting size according to the finished product size.

[0021] As a preferred embodiment of the preparation method of the present invention, in the step (1), the preheating time is 30-60 minutes.

[0022] Exemplarily, the preheating time may be any point value or any two point range values ​​between 30-60 minutes, such as 30 minutes, 35 minutes, 40 minutes, 45 minutes, 50 minutes, 55 minutes, 60 minutes, etc.

[0023] The present invention has been found that the subsequent roughening and drawing forging can be more effectively carried out within the above-mentioned preheating time range, which is conducive to further maintaining the corresponding deformation rate within the given temperature range in a shorter time, avoiding the problem of forging cracking due to insufficient temperature after a long time.

[0024] As a preferred embodiment of the preparation method of the present invention, in the step (1), the number of times of roughening and stretching is 2-3 times.

[0025] The present invention has found that when the number of roughening and drawing is 2-3 times and the deformation rate is 50-70% each time, the grains can be effectively refined to obtain products with fine and uniform grains.

[0026] As a preferred embodiment of the preparation method of the present invention, in the step (2), the secondary preheating temperature is 1000-1100° C. and the time is 50-70 min.

[0027] Exemplarily, the temperature of the secondary preheating may be any point value or any two point range value between 1000-1100°C, for example, 1000°C, 1020°C, 1040°C, 1060°C, 1080°C, 1100°C, etc.; the heating time may be any point value or any two point range value between 50-70min, for example, 50min, 55min, 60min, 65min, 70min, etc.

[0028] The present invention has found that preheating within the above temperature and time range before a rolling operation is beneficial to material deformation and can prevent rolling cracking.

[0029] As a preferred embodiment of the preparation method of the present invention, in the step (2), each pass in one rolling is 0.5-1.5 mm.

[0030] The present invention has found that by controlling each rolling pass to 0.5-1.5 mm, grain refinement can be achieved in a shorter time, material cracking can be avoided, and a target material with uniform internal grain distribution can be obtained.

[0031] Preferably, the steel is melted down after 6-10 rolling passes, the melting temperature is 1000-1100° C., and the melting time is 30-40 min.

[0032] As a preferred embodiment of the preparation method of the present invention, in the step (4), each pass in the secondary rolling is 0.1-0.3 mm.

[0033] As a preferred embodiment of the preparation method of the present invention, in the step (4), after every 8-10 passes in the secondary rolling, the steel is returned to the furnace and heated to 450-500° C. and kept at this temperature for 30-60 minutes before continuing to roll until the deformation rate is 20-30%.

[0034] The present invention has found that by controlling the furnace heating to a specific temperature and keeping the temperature for a certain period of time after every 8-10 passes during the secondary rolling, the material can be more easily deformed in a hot state and will not crack during rolling.

[0035] As a preferred embodiment of the preparation method of the present invention, in the step (6), the flatness after leveling is less than 0.5 mm.

[0036] As a preferred embodiment of the preparation method of the present invention, in the step (6), the thickness of the workpiece after machining is 2-3 mm.

[0037] In a second aspect of the present invention, the present invention provides an iron-cobalt alloy target material, wherein the iron-cobalt alloy target material is prepared by the preparation method of the present invention.

[0038] As a preferred embodiment of the iron-cobalt alloy target material of the present invention, the iron-cobalt alloy target material has a grain size of ≤100 μm, a purity of ≥99.95%, and a magnetic permeability of ≥10%.

[0039] As a preferred embodiment of the iron-cobalt alloy target material of the present invention, in the iron-cobalt alloy target material, the atomic mass percentage of cobalt is 10-50%.

[0040] The iron-cobalt alloy target material provided by the invention has excellent distribution uniformity and smaller grain size, and has high purity and magnetic permeability.

[0041] In a third aspect of the present invention, the present invention provides use of the iron-cobalt alloy target in preparing thin film deposition materials.

[0042] Compared with the prior art, the present invention has the following beneficial effects:

[0043] In a preparation method of an iron-cobalt alloy target material provided by the present invention, an iron-cobalt alloy ingot is preheated and then forged, preheated and rolled after forging, then annealed, then rolled and annealed in sequence, and finally leveled and machined; at the same time, the present invention also controls the deformation rate of forging and rolling, as well as the temperature and time of annealing, so that an iron-cobalt alloy target material with fine and uniform grains, high purity and high magnetic permeability can be effectively obtained; and the material preparation method of the iron-cobalt alloy target material provided by the present invention has a simple process, a short flow, simple operation, strong operability and repeatability, and a high yield rate. DETAILED DESCRIPTION

[0044] In order to better illustrate the purpose, technical solutions and advantages of the present invention, the present invention will be further described below in conjunction with specific embodiments.

[0045] Unless otherwise specified, the reagents, methods and equipment used in the present invention are conventional reagents, methods and equipment in the art.

[0046] Example 1

[0047] An embodiment of the present invention provides an iron-cobalt alloy target material, and a method for preparing the iron-cobalt alloy target material comprises the following steps:

[0048] (1) selecting a high-purity iron-cobalt alloy ingot melted by vacuum induction, reversing the blanking size according to the finished product size, and cutting the ingot using a horizontal sawing machine to obtain an iron-cobalt alloy ingot;

[0049] (2) preheating the iron-cobalt alloy ingot of step (1) in a box-type annealing furnace at a temperature of 1000° C. for 45 min, and performing roughing and drawing free forging by using an air hammer after the preheating for 3 times, with a deformation rate of 60% for each roughing and drawing, and water cooling after forging;

[0050] (3) The workpiece after water cooling in step (2) is subjected to secondary preheating in a box-type annealing furnace, the secondary preheating temperature is 1050° C., the time is 60 min, and a rolling is performed after the secondary preheating, the single rolling pass is 1 mm, and after every 7 passes in the rolling, the workpiece is returned to the furnace for insulation and then rolled again, the return furnace temperature is 1050° C., the time is 30 min, and the workpiece is rolled once until the deformation rate is 85% and then air-cooled;

[0051] (4) subjecting the workpiece after air cooling in step (3) to a primary annealing treatment at 750° C. for 90 min, and then cooling it to 500° C. in the furnace;

[0052] (5) The workpiece after furnace cooling in step (4) is subjected to secondary rolling, with a single pass of 0.2 mm. After every 9 passes in the secondary rolling process, the workpiece is returned to the furnace for heating and then rolled again. The return furnace temperature is 500° C. and the time is 45 min. The workpiece is air-cooled after the secondary rolling until the deformation rate is 25%;

[0053] (6) subjecting the workpiece after air cooling in step (5) to a secondary annealing treatment at 550° C. for 90 min, followed by air cooling;

[0054] (7) leveling the workpiece after air cooling in step (6) to a flatness of 0.3 mm, and then machining to a thickness of 2.5 mm to obtain an iron-cobalt alloy target;

[0055] The atomic mass percentage of cobalt in the iron-cobalt alloy target is 25%.

[0056] Example 2

[0057] An embodiment of the present invention provides an iron-cobalt alloy target material, and a method for preparing the iron-cobalt alloy target material comprises the following steps:

[0058] (1) selecting a high-purity iron-cobalt alloy ingot melted by vacuum induction, reversing the blanking size according to the finished product size, and cutting the ingot using a horizontal sawing machine to obtain an iron-cobalt alloy ingot;

[0059] (2) preheating the iron-cobalt alloy ingot of step (1) in a box-type annealing furnace at a temperature of 900° C. for 60 min, and performing roughing and drawing free forging by using an air hammer after the preheating is completed. The process is repeated twice, with a deformation rate of 70% for each roughing and drawing. After forging, water cooling is performed;

[0060] (3) The workpiece after water cooling in step (2) is subjected to secondary preheating in a box-type annealing furnace, the secondary preheating temperature is 1000° C., the time is 70 min, and after the secondary preheating, a rolling is performed, the single rolling pass is 1.5 mm, and after every 10 passes in the rolling, the workpiece is returned to the furnace for heating and rolled again, the return furnace temperature is 1000° C., the time is 30 min, and the workpiece is rolled once until the deformation rate is 90% and then air-cooled;

[0061] (4) subjecting the workpiece after air cooling in step (3) to a primary annealing treatment at 800° C. for 60 min, and then cooling it to 450° C. in the furnace;

[0062] (5) The workpiece after furnace cooling in step (4) is subjected to secondary rolling, with a single pass of 0.3 mm. After every 8 passes in the secondary rolling process, the workpiece is returned to the furnace for heating and then rolled again. The return furnace temperature is 450° C. and the time is 60 min. The workpiece is air-cooled after the secondary rolling until the deformation rate is 30%;

[0063] (6) subjecting the workpiece after air cooling in step (5) to a secondary annealing treatment at 600° C. for 60 min, followed by air cooling;

[0064] (7) leveling the workpiece after air cooling in step (6) to a flatness of 0.3 mm, and then machining to a thickness of 2.5 mm to obtain an iron-cobalt alloy target;

[0065] The atomic mass percentage of cobalt in the iron-cobalt alloy target is 10%.

[0066] Example 3

[0067] An embodiment of the present invention provides an iron-cobalt alloy target material, and a method for preparing the iron-cobalt alloy target material comprises the following steps:

[0068] (1) selecting a high-purity iron-cobalt alloy ingot melted by vacuum induction, reversing the blanking size according to the finished product size, and cutting the ingot using a horizontal sawing machine to obtain an iron-cobalt alloy ingot;

[0069] (2) preheating the iron-cobalt alloy ingot of step (1) in a box-type annealing furnace at a temperature of 1100° C. for 30 min, and performing roughing and drawing free forging by using an air hammer after the preheating for 3 times, with a deformation rate of 50% for each roughing and drawing, and water cooling after forging;

[0070] (3) The workpiece after water cooling in step (2) is subjected to secondary preheating in a box-type annealing furnace, the secondary preheating temperature is 1100° C., the time is 50 min, and after the secondary preheating, rolling is performed once, the single rolling pass is 0.5 mm, and after each 6 passes of the rolling, the workpiece is returned to the furnace for insulation and then rolled again, the return furnace temperature is 1100° C., the time is 30 min, and the workpiece is rolled once until the deformation rate is 80% and then air-cooled;

[0071] (4) subjecting the workpiece after air cooling in step (3) to a primary annealing treatment at 700° C. for 90 min, and then cooling it to 500° C. in the furnace;

[0072] (5) The workpiece after furnace cooling in step (4) is subjected to secondary rolling, with a single pass of 0.1 mm. After every 10 passes of the secondary rolling, the workpiece is returned to the furnace for heating and then rolled again. The return temperature is 500° C. and the time is 45 min. The workpiece is air-cooled after the secondary rolling until the deformation rate is 20%;

[0073] (6) subjecting the workpiece after air cooling in step (5) to a secondary annealing treatment at 500° C. for 120 min, followed by air cooling;

[0074] (7) leveling the workpiece after air cooling in step (6) to a flatness of 0.3 mm, and then machining to a thickness of 2.5 mm to obtain an iron-cobalt alloy target;

[0075] The atomic mass percentage of cobalt in the iron-cobalt alloy target is 50%.

[0076] Example 4

[0077] The embodiment of the present invention provides an iron-cobalt alloy target material. The only difference between the preparation method of the iron-cobalt alloy target material and that of embodiment 1 is that in step (2), the preheating temperature is 1200° C. and the time is 45 min.

[0078] Comparative Example 1

[0079] The comparative example of the present invention provides an iron-cobalt alloy target material. The preparation method of the iron-cobalt alloy target material is different from that of Example 1 in that there is no primary annealing, secondary rolling and secondary annealing, specifically:

[0080] (1) selecting a high-purity iron-cobalt alloy ingot melted by vacuum induction, reversing the blanking size according to the finished product size, and cutting the ingot using a horizontal sawing machine to obtain an iron-cobalt alloy ingot;

[0081] (2) preheating the iron-cobalt alloy ingot of step (1) in a box-type annealing furnace at a temperature of 1000° C. for 45 min, and performing roughing and drawing free forging by using an air hammer after the preheating for 3 times, with a deformation rate of 60% for each roughing and drawing, and water cooling after forging;

[0082] (3) The workpiece after water cooling in step (2) is subjected to secondary preheating in a box-type annealing furnace, the secondary preheating temperature is 1050° C., the time is 60 min, and a rolling is performed after the secondary preheating, the single rolling pass is 1 mm, and after every 7 passes in the rolling, the workpiece is returned to the furnace for insulation and then rolled again, the return furnace temperature is 1050° C., the time is 30 min, and the workpiece is rolled once until the deformation rate is 85% and then air-cooled;

[0083] (4) leveling the workpiece after air cooling in step (3) to a flatness of 0.3 mm, and then machining to a thickness of 2.5 mm to obtain an iron-cobalt alloy target;

[0084] The atomic mass percentage of cobalt in the iron-cobalt alloy target is 25%.

[0085] Comparative Example 2

[0086] The comparative example of the present invention provides an iron-cobalt alloy target material. The preparation method of the iron-cobalt alloy target material is different from that of Example 1 in that there is no secondary preheating and primary rolling, specifically:

[0087] (1) selecting a high-purity iron-cobalt alloy ingot melted by vacuum induction, reversing the blanking size according to the finished product size, and cutting the ingot using a horizontal sawing machine to obtain an iron-cobalt alloy ingot;

[0088] (2) preheating the iron-cobalt alloy ingot of step (1) in a box-type annealing furnace at a temperature of 1000° C. for 45 min, and performing roughing and drawing free forging by using an air hammer after the preheating for 3 times, with a deformation rate of 60% for each roughing and drawing, and water cooling after forging;

[0089] (3) subjecting the workpiece after water cooling in step (2) to a primary annealing treatment at 750° C. for 90 min, and then cooling it to 500° C. in the furnace;

[0090] (4) The workpiece after furnace cooling in step (3) is subjected to secondary rolling, with a single pass of 0.2 mm. After every 9 passes in the secondary rolling process, the workpiece is returned to the furnace for heating and then rolled again. The return temperature is 500° C. and the time is 45 min. The workpiece is air-cooled after the secondary rolling until the deformation rate is 25%;

[0091] (5) subjecting the workpiece after air cooling in step (4) to a secondary annealing treatment at 550° C. for 90 min, followed by air cooling;

[0092] (6) leveling the workpiece after air cooling in step (5) to a flatness of 0.3 mm, and then machining to a thickness of 2.5 mm to obtain an iron-cobalt alloy target;

[0093] The atomic mass percentage of cobalt in the iron-cobalt alloy target is 25%.

[0094] Comparative Example 3

[0095] The comparative example of the present invention provides an iron-cobalt alloy target material. The preparation method of the iron-cobalt alloy target material is different from that of Example 1 in that there is no secondary annealing, specifically:

[0096] (1) selecting a high-purity iron-cobalt alloy ingot melted by vacuum induction, reversing the blanking size according to the finished product size, and cutting the ingot using a horizontal sawing machine to obtain an iron-cobalt alloy ingot;

[0097] (2) preheating the iron-cobalt alloy ingot of step (1) in a box-type annealing furnace at a temperature of 1000° C. for 45 min, and performing roughing and drawing free forging by using an air hammer after the preheating for 3 times, with a deformation rate of 60% for each roughing and drawing, and water cooling after forging;

[0098] (3) The workpiece after water cooling in step (2) is subjected to secondary preheating in a box-type annealing furnace, the secondary preheating temperature is 1050° C., the time is 60 min, and a rolling is performed after the secondary preheating, the single rolling pass is 1 mm, and after every 7 passes in the rolling, the workpiece is returned to the furnace for insulation and then rolled again, the return furnace temperature is 1050° C., the time is 30 min, and the workpiece is rolled once until the deformation rate is 85% and then air-cooled;

[0099] (4) subjecting the workpiece after air cooling in step (3) to a primary annealing treatment at 750° C. for 90 min, and then cooling it to 500° C. in the furnace;

[0100] (5) The workpiece after furnace cooling in step (4) is subjected to secondary rolling, with a single pass of 0.2 mm. After every 9 passes in the secondary rolling process, the workpiece is returned to the furnace for heating and then rolled again. The return furnace temperature is 500° C. and the time is 45 min. The workpiece is air-cooled after the secondary rolling until the deformation rate is 25%;

[0101] (6) leveling the workpiece after air cooling in step (5) to a flatness of 0.3 mm, and then machining to a thickness of 2.5 mm to obtain an iron-cobalt alloy target;

[0102] The atomic mass percentage of cobalt in the iron-cobalt alloy target is 25%.

[0103] Comparative Example 4

[0104] The comparative example of the present invention provides an iron-cobalt alloy target material. The only difference between the preparation method of the iron-cobalt alloy target material and that of Example 1 is that in step (2), the preheating temperature is 800° C. and the time is 45 min.

[0105] Comparative Example 5

[0106] The comparative example of the present invention provides an iron-cobalt alloy target material. The only difference between the preparation method of the iron-cobalt alloy target material and that of Example 1 is that the temperature of the primary annealing in step (4) is 500°C.

[0107] Comparative Example 6

[0108] The comparative example of the present invention provides an iron-cobalt alloy target material. The only difference between the preparation method of the iron-cobalt alloy target material and that of Example 1 is that the temperature of the primary annealing in step (4) is 1000°C.

[0109] Comparative Example 7

[0110] The comparative example of the present invention provides an iron-cobalt alloy target material. The only difference between the preparation method of the iron-cobalt alloy target material and that of Example 1 is that the secondary rolling deformation rate in step (5) is 10%.

[0111] Comparative Example 8

[0112] The comparative example of the present invention provides an iron-cobalt alloy target material. The only difference between the preparation method of the iron-cobalt alloy target material and that of Example 1 is that the secondary rolling deformation rate in step (5) is 35%.

[0113] Comparative Example 9

[0114] The comparative example of the present invention provides an iron-cobalt alloy target material. The only difference between the preparation method of the iron-cobalt alloy target material and that of Example 1 is that the secondary annealing temperature in step (6) is 400°C.

[0115] Effect example

[0116] The effect examples of the present invention verify the performance of the iron-cobalt alloy targets prepared in Examples 1-4 and Comparative Examples 1-9, including the following aspects:

[0117] 1) Grain size: tested by crystal phase microscope using the straight line intercept method;

[0118] 3) Magnetic permeability: Gauss meter, tested in accordance with "YS / T 1124-2016 Magnetic Sputtering Target Permeability Test Method";

[0119] 3) Purity: tested by ICP-MS;

[0120] The obtained results are shown in Table 1;

[0121] Table 1

[0122]

[0123] It can be seen from Table 1 that the iron-cobalt alloy target material prepared by the preparation method provided by the present invention has fine grains within 60 μm, and has excellent grain uniformity in macroscopic observation, high magnetic permeability, and above 11.0%. At the same time, the purity of the product is also high, at more than 99.95%;

[0124] It can be seen from Example 1 and Comparative Examples 1-3 that when the steps of primary rolling, secondary rolling or annealing after rolling are missing, the comprehensive performance of the obtained iron-cobalt alloy target material is significantly reduced; it can be seen from Example 1 and Comparative Examples 4-9 that products with excellent comprehensive performance can only be obtained within the parameter range of forging, rolling and annealing treatment given in the present invention.

[0125] Finally, it should be noted that the above embodiments are intended to illustrate the technical solution of the present invention rather than to limit the scope of protection of the present invention. Although the present invention has been described in detail with reference to the preferred embodiments, those skilled in the art should understand that the technical solution of the present invention may be modified or replaced by equivalents without departing from the essence and scope of the technical solution of the present invention.

Claims

1. A method for preparing an iron-cobalt alloy target, characterized in that: The preparation method comprises the following steps: (1) preheating the iron-cobalt alloy ingot to 900-1200° C. and then forging it by upsetting and drawing, with the deformation rate of each upsetting and drawing being 50-70%, and water cooling after forging; (2) preheating the workpiece after water cooling in step (1) for a second time, rolling it once after the second preheating, with a deformation rate of 80-90% in the first rolling, and air cooling it after the first rolling; (3) performing an annealing treatment on the workpiece after air cooling in step (2), wherein the annealing temperature is 700-800° C. and the time is 60-120 min, and then cooling to 450-500° C.; (4) performing secondary rolling on the workpiece after cooling to 450-500° C. in step (3), wherein the secondary rolling deformation rate is 20-30%, and air cooling is performed after the secondary rolling is completed; (5) subjecting the workpiece after air cooling in step (4) to secondary annealing, wherein the secondary annealing temperature is 500-600° C., the time is 60-120 min, and air cooling is performed after the secondary annealing is completed; (6) Leveling and machining the workpiece after air cooling in step (5) to obtain an iron-cobalt alloy target.

2. The preparation method according to claim 1, characterized in that: In the step (1), the preheating time is 30-60 minutes.

3. The preparation method according to claim 1, characterized in that: In the step (1), the number of times of roughing and stretching is 2-3 times.

4. The preparation method according to claim 1, characterized in that: In the step (2), the secondary preheating temperature is 1000-1100° C. and the time is 50-70 min.

5. The preparation method according to claim 1, characterized in that: In the step (2), each pass in one rolling is 0.5-1.5 mm; And / or, in the step (4), each pass in the secondary rolling is 0.1-0.3 mm.

6. The preparation method according to claim 1, characterized in that: In the step (4), after every 8-10 passes in the secondary rolling, the steel is returned to the furnace and heated to 450-500° C. and kept at this temperature for 30-60 minutes before continuing to roll until the deformation rate reaches 20-30%.

7. The preparation method according to claim 1, characterized in that: In the step (6), the flatness after leveling is less than 0.5 mm; And / or, the workpiece thickness after machining is 2-3 mm.

8. An iron-cobalt alloy target, characterized in that: The iron-cobalt alloy target is prepared by the preparation method according to any one of claims 1 to 7.

9. Use of the iron-cobalt alloy target material as claimed in claim 8 in preparing thin film deposition materials.

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