A temperature measuring crucible assembly and a temperature measuring method

Abstract

The present invention provides a temperature measuring crucible assembly and a temperature measuring method, which include: a crucible, which includes a furnace bottom, a furnace body and a furnace neck; a temperature measuring assembly, which includes a first temperature measuring line and a connecting mechanism, the first temperature measuring line includes a first positive electrode and a first negative electrode, the first positive electrode and the first negative electrode are respectively passed through the furnace neck to the inside of the crucible, and are electrically connected after being extended to the furnace bottom in accordance with the inner wall of the crucible to form an evaporation source temperature measuring part inside the crucible, and the free ends of the first positive electrode and the first negative electrode are respectively connected to the electrode feed-through through the connecting mechanism to perform electrothermal signal conversion. In the present invention, the crucible and the temperature measuring assembly are highly matched in structure, and the structures of the two are relatively stable, thereby avoiding the problem of poor contact caused by environmental factors during the experiment. Compared with conventional detection technology, the present application has significant advantages such as simple operation, high repeatability, strong controllability, high detection accuracy and strong detection stability, and provides another new idea for crucible temperature measurement technology.

Description

Technical Field

[0001] The invention relates to the technical field of temperature measuring equipment, and specifically refers to a temperature measuring crucible assembly and a temperature measuring method. Background Art

[0002] In the fields of materials science, chemistry and related research, the Knudsen evaporation source is a key experimental device for exploring physical and chemical processes such as evaporation and sublimation of substances. Its importance is self-evident. The study of these processes is extremely important for the development of new materials, performance optimization and in-depth understanding of basic scientific theories. In this process, accurate measurement of temperature is particularly critical because it is directly related to the reliability and accuracy of the experimental results.

[0003] However, the existing Knudsen evaporation source crucible temperature measurement technology has many shortcomings, which seriously affect the accuracy of experimental data. At present, the common temperature measurement method mainly relies on setting thermocouples and other temperature measuring elements on the outside of the crucible, but this approach has exposed many problems in practical applications. First of all, since the internal environment of the crucible and the evaporation source may be in different states, there is a problem of uneven temperature distribution inside the crucible. It is difficult for the external temperature measuring element to accurately capture the real-time temperature inside the crucible, especially it is difficult to carry out targeted measurement of liquid test substances, which leads to a large deviation between the measurement results and the actual temperature. In addition, the external temperature measuring element is easily affected by environmental factors such as vibration and poor contact during the experiment, which makes the temperature measurement data fluctuate greatly, further reducing the accuracy of the temperature measurement. Summary of the invention

[0004] Therefore, the technical problem to be solved by the present invention is to overcome the problems of unstable connection and inaccurate temperature measurement of the Knudsen evaporation source crucible temperature measuring element in the prior art, and to provide a temperature measuring crucible assembly and a temperature measuring method.

[0005] To solve the above technical problems, the present invention provides a temperature measuring crucible assembly, which includes: a crucible, the crucible includes a furnace bottom, a furnace body and a furnace neck which are connected in sequence; a temperature measuring assembly, the temperature measuring assembly includes a first temperature measuring line and a connecting mechanism, the first temperature measuring line includes a first positive electrode and a first negative electrode, the first positive electrode and the first negative electrode are respectively passed through the furnace neck to the inside of the crucible, and are attached to the inner wall of the crucible and extend to the furnace bottom and then electrically connected to form an evaporation source temperature measuring part inside the crucible, and the free ends of the first positive electrode and the first negative electrode are respectively connected to the electrode feedthrough through the connecting mechanism to perform electrothermal signal conversion.

[0006] In one embodiment of the present invention, it also includes a second temperature measuring line, which includes a second positive electrode and a second negative electrode. The second positive electrode and the second negative electrode are respectively passed through the furnace neck to the inside of the crucible, and are connected inside the furnace neck to form a reference temperature measuring part inside the furnace neck. The free ends of the second positive electrode and the second negative electrode are respectively connected to the electrode feedthrough through a connecting mechanism to perform electrothermal signal conversion.

[0007] In one embodiment of the present invention, the reference temperature measuring portion is configured as a bending limiting structure, and the bending limiting structure abuts against the inner wall of the furnace neck.

[0008] In one embodiment of the present invention, the temperature measuring assembly further includes an insulating member, which is disposed between the crucible and the connecting mechanism and wraps the first temperature measuring wire.

[0009] In one embodiment of the present invention, in a direction away from the furnace body, the side wall of the furnace neck gradually shrinks inward, and the furnace bottom is configured as an arc-shaped structure.

[0010] In one embodiment of the present invention, the furnace neck is provided with a connecting hole, and the first temperature measuring line is passed through the connecting hole to the inside of the crucible. The side wall of the crucible is also provided with an embedding groove, and the embedding groove is configured as a blind groove recessed inward from the outer wall of the crucible, which extends from the furnace bottom to the connecting hole, and the first temperature measuring line is embedded in the embedding groove.

[0011] In one embodiment of the present invention, the connecting mechanism includes a main body and a cover body, the main body and the cover body are detachably connected, and both the main body and the cover body are provided with threaded grooves. When the main body and the cover body are connected, the threaded grooves surround a temperature measuring wire connecting hole, and the first temperature measuring wire or the second temperature measuring wire is interference-pierced through the temperature measuring wire connecting hole.

[0012] In one embodiment of the present invention, the connecting mechanism includes two cover bodies, which are arranged in sequence along the length direction of the main body, one of the cover bodies cooperates with the main body to connect the first temperature measuring line or the second temperature measuring line, and the other cover body cooperates with the main body to connect the electrode feedthrough.

[0013] The present invention also provides a temperature measurement method, which uses the above-mentioned temperature measuring crucible assembly to measure the actual temperature of the evaporation source inside the crucible, and comprises the following steps: step S1, respectively passing the first positive electrode and the first negative electrode of the first temperature measuring line from the furnace neck to the inside of the crucible, and extending them to the furnace bottom, spot welding the first positive electrode and the first negative electrode at the furnace bottom to form an evaporation source temperature measuring part inside the crucible; step S2, respectively connecting the free ends of the first positive electrode and the first negative electrode to the electrode feedthrough; step S3, placing the evaporation source to be detected inside the crucible, so that it contacts the evaporation source temperature measuring part, and at this time measuring the calibrated potential difference V0 between the first positive electrode and the first negative electrode at the calibration temperature; step S4, after heating the crucible to a preset temperature, measuring the contact potential difference V between the first positive electrode and the first negative electrode at this time; step S5, calculating the actual temperature of the evaporation source to be detected T = (V-V0) / S, wherein S is the thermoelectric coefficient of the corresponding evaporation source to be detected.

[0014] In one embodiment of the present invention, step S1 also includes: respectively passing the second positive electrode and the second negative electrode of the second temperature measuring line through the furnace neck to the inside of the crucible, and spot welding the second positive electrode and the second negative electrode at the furnace neck to form a reference temperature measuring part inside the furnace neck; step S2 also includes: respectively connecting the free ends of the second positive electrode and the second negative electrode to electrode feedthroughs; step S3 also includes: after placing the evaporation source to be detected inside the crucible, it is spaced apart from the reference temperature measuring part, and at this time, measuring the calibrated potential difference V0' between the second positive electrode and the second negative electrode at the calibration temperature; step S4 also includes: after heating the crucible to a preset temperature, measuring the contact potential difference V' between the second positive electrode and the second negative electrode at this time; step S5 also includes: calculating the actual temperature of the crucible internal environment T'=(V'-V0') / S', so as to monitor the degree of temperature change and stability inside the crucible, wherein S' is the thermoelectric coefficient of the medium inside the crucible.

[0015] In one embodiment of the present invention, in steps S3 to S5, when the evaporation source to be detected is solid, at least a portion of the evaporation source to be detected contacts the evaporation source temperature measuring portion, and detection is performed at the contact point between the evaporation source temperature measuring portion and the evaporation source to be detected to avoid the influence of the solid-state gap on the measurement result; when the evaporation source to be detected is liquid, the detection result of the evaporation source temperature measuring portion is the same as the value of the liquid surface potential difference, and the actual temperature T of the evaporation source is the liquid surface temperature.

[0016] The above technical solution of the present invention has the following advantages compared with the prior art:

[0017] The temperature measuring crucible assembly and temperature measuring method of the present invention directly contact the evaporation source inside the crucible furnace body through the temperature measuring assembly, and realize accurate detection of the temperature of the evaporation source to be detected based on the conversion of the electrothermal signal. In the actual detection process, the crucible and the temperature measuring assembly are highly matched in structure, which not only does not increase the occupied space, but also can improve the connection stability between the two, fundamentally avoiding the problem of poor contact caused by environmental factors during the experiment. Compared with conventional detection technology, this application has significant advantages such as simple operation, high repeatability, strong controllability, high detection accuracy and strong detection stability, providing another new idea for crucible temperature measurement technology. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to make the contents of the present invention more clearly understood, the present invention is further described in detail below based on specific embodiments of the present invention in conjunction with the accompanying drawings.

[0019] Figure 1 It is a schematic diagram of the three-dimensional structure of the temperature measuring crucible assembly in a preferred embodiment of the present invention;

[0020] Figure 2 yes Figure 1 A schematic diagram of the cross-sectional structure of the temperature measuring crucible assembly at AA;

[0021] Figure 3 yes Figure 1 A schematic diagram of the three-dimensional structure of the first temperature measuring line and the second temperature measuring line in the temperature measuring crucible assembly shown;

[0022] Figure 4 yes Figure 2 Enlarged view of point A in the middle;

[0023] Figure 5 yes Figure 3 Enlarged view of point B in the middle;

[0024] Figure 6 yes Figure 2 Enlarged view of point C in the middle;

[0025] Figure 7 yes Figure 2 Enlarged view of point D in the middle;

[0026] Figure 8 yes Figure 1 A schematic diagram of the three-dimensional structure of the connecting mechanism in the temperature measuring crucible assembly shown;

[0027] Fig. 9 yes Figure 8 A schematic structural diagram of the main body of the connecting mechanism shown;

[0028] Fig.10 yes Figure 8 A schematic diagram of the structure of the cover body in the connecting mechanism shown.

[0029] Explanation of the reference numerals in the specification: 100, crucible; 110, furnace neck; 120, furnace body; 130, furnace bottom; 200, temperature measuring assembly; 210, first temperature measuring line; 211, first positive electrode; 212, first negative electrode; 220, second temperature measuring line; 221, second positive electrode; 222, second negative electrode; 223, reference temperature measuring part; 230, insulating member; 240, connecting mechanism; 241, main body; 242, cover; 243, connecting pin; 244, temperature measuring line connecting hole; 245, connector. DETAILED DESCRIPTION

[0030] The present invention is further described below in conjunction with the accompanying drawings and specific embodiments so that those skilled in the art can better understand the present invention and implement it, but the embodiments are not intended to limit the present invention.

[0031] Embodiment 1

[0032] See also Figure 1 and Figure 2 As shown, this embodiment provides a temperature measuring crucible assembly, which includes: a crucible 100, the crucible 100 includes a furnace bottom 130, a furnace body 120 and a furnace neck 110 that are connected in sequence; a temperature measuring assembly 200, the temperature measuring assembly 200 includes a first temperature measuring line 210 and a connecting mechanism 240, the first temperature measuring line 210 includes a first positive electrode 211 and a first negative electrode 212, the first positive electrode 211 and the first negative electrode 212 are respectively passed through the furnace neck 110 to the inside of the crucible 100, and are attached to the inner wall of the crucible 100 and extended to the furnace bottom 130 and then connected to form an evaporation source temperature measuring part inside the crucible 100, and the free ends of the first positive electrode 211 and the first negative electrode 212 are respectively connected to the electrode feedthrough through the connecting mechanism 240 to perform electrothermal signal conversion.

[0033] The temperature measuring crucible assembly described in this embodiment directly contacts the evaporation source inside the furnace body of the crucible 100 through the temperature measuring assembly 200, and realizes accurate detection of the temperature of the evaporation source to be detected based on the conversion of the electrothermal signal. In the actual detection process, the crucible 100 and the temperature measuring assembly 200 are highly matched in structure, which not only does not increase the occupied space, but also can improve the connection stability between the two, fundamentally avoiding the problem of poor contact caused by environmental factors during the experiment. Compared with conventional detection technology, this application has significant advantages such as simple operation, high repeatability, strong controllability, high detection accuracy and strong detection stability, providing another new idea for crucible temperature measurement technology.

[0034] See also Figure 1 and Figure 2As shown, the crucible 100 in this embodiment is made of pyrolytic boron nitride, which makes it have good thermal conductivity and insulation performance. From top to bottom, it is a furnace neck 110, a furnace body 120 and a furnace bottom 130 that are interconnected. In the actual heat treatment process, the upper limit of the capacity of the evaporation source to be processed is usually set to two-thirds of the furnace body 120 to ensure the heat treatment effect and protect the crucible 100. Therefore, the furnace neck 110 in this embodiment usually does not contact the evaporation source to be processed. In this embodiment, in the direction away from the furnace body 120, the side wall of the furnace neck 110 gradually shrinks inward, and the furnace bottom 130 is set to an arc structure. Specifically, the structure of the side wall of the furnace neck 110 gradually shrinking inward can increase its structural stability and better withstand the internal high temperature and pressure; correspondingly, the arc furnace bottom 130 in this embodiment helps to evenly distribute heat in the furnace, reduce the generation of hot spots and cold spots, and improve heating efficiency and energy utilization efficiency.

[0035] Furthermore, in order to optimize the structural coordination between the crucible 100 and the temperature measuring assembly 200, so as to improve the connection stability between the two, a connecting hole is provided at the furnace neck 110 in this embodiment, and the first temperature measuring line 210 is passed through the connecting hole to the inside of the crucible 100, and an embedding groove is also provided on the side wall of the crucible 100, and the embedding groove is configured as a blind groove that is recessed inward from the outer wall of the crucible 100, and extends from the furnace bottom 130 to the connecting hole, and the first temperature measuring line 210 is embedded in the embedding groove. Specifically, the first positive electrode 211 and the first negative electrode 212 in this embodiment are passed from the furnace neck 110 to the inside of the crucible 100, and extend to the furnace bottom 130 in accordance with the inner wall of the crucible 100, wherein the part located inside the crucible 100 constitutes the evaporation source temperature measuring part, which is used to directly contact the evaporation source to be measured to realize the conversion of electric heat signals. Correspondingly, the first temperature measuring wire 210 located outside the crucible 100 can be embedded in the embedding groove, thereby limiting, fixing and protecting the first temperature measuring wire 210 through the embedding groove. Furthermore, the first positive electrode 211 and the first negative electrode 212 in this embodiment are electrically connected by spot welding after extending to the furnace bottom 130. In different embodiments, the electrical connection method can be adjusted according to actual use requirements, and the present invention does not impose specific restrictions on this.

[0036] See also Figures 3 to 6As shown, the first positive electrode 211 and the first negative electrode 212 in this embodiment have the same structure. The first positive electrode 211 is taken as an example for introduction. The free end of the first positive electrode 211 in this embodiment is connected to the connecting mechanism 240 at the furnace bottom 130, and the other end extends from the outer wall of the furnace bottom 130 to the outer wall of the furnace neck 110 along the embedding groove, and enters the inner wall of the furnace neck 110 through the connecting hole on the furnace neck 110. Next, it adheres to the inner wall of the crucible 100 and extends from the furnace neck 110 to the inner wall of the furnace bottom 130, and is electrically connected to the first negative electrode 212 with the same structure in the furnace bottom 130, thereby forming a complete closed loop with the external power supply equipment to detect the actual temperature of the evaporation source inside the crucible 100 by direct contact.

[0037] See also Figure 3 and Figure 7 As shown, the present embodiment also includes a second temperature measuring line 220, which includes a second positive electrode 221 and a second negative electrode 222. The second positive electrode 221 and the second negative electrode 222 are respectively passed through the furnace neck 110 to the inside of the crucible 100, and are connected inside the furnace neck 110 to form a reference temperature measuring part 223 inside the furnace neck 110. The free ends of the second positive electrode 221 and the second negative electrode 222 are respectively connected to the electrode feedthrough through a connecting mechanism 240 to perform electrothermal signal conversion. The second temperature measuring line 220 in this embodiment is used to form a reference value for the control temperature. It is also passed through the furnace neck 110 to the inside of the crucible 100. However, in order to avoid contact with the evaporation source, the second positive electrode 221 and the second negative electrode 222 in this application are electrically connected by spot welding at the furnace neck 110, and the remaining parts are located outside the furnace body, thereby forming a reference temperature measuring part 223 for detecting the internal environment of the furnace body. Specifically, it also completes the heat detection calculation process based on the conversion of electrothermal signals.

[0038] In this embodiment, in order to improve the connection stability between the second temperature measuring line 220 and the crucible 100, the reference temperature measuring portion 223 is configured as a bending limit structure, and the bending limit structure abuts against the inner wall of the furnace neck 110. Figure 3 In the actual operation process, the second temperature measuring line 220 is spaced apart from the evaporation source to be detected, and the operator can judge the temperature range and stability of the working environment inside the furnace body by the temperature change amplitude and temperature fluctuation degree of the second temperature measuring line 220, that is, when the feedback result of the second temperature measuring line 220 has a large deviation from the preset temperature or has frequent and / or large fluctuations per unit time, it indicates that shutdown detection is required, thereby further improving the accuracy of the evaporation source processing of the present application.

[0039] See also Figure 1As shown, the first temperature measuring line 210 and the second temperature measuring line 220 are connected to the electrode feed-through through the connecting mechanism 240. The four connecting mechanisms in the present application have the same structure and are respectively connected to the first positive electrode 211, the first negative electrode 212, the second positive electrode 221 and the second negative electrode 222. Here, one of the connecting mechanisms 240 is taken as an example for a specific introduction of the structure: see Figures 8 to 10 As shown, the connecting mechanism 240 includes a main body 241 and a cover 242, the main body 241 and the cover 242 are detachably connected, and the main body 241 and the cover 242 are both provided with a threaded groove. When the main body 241 and the cover 242 are connected, the threaded groove surrounds a temperature measuring wire connection hole 244, and the first temperature measuring wire 210 or the second temperature measuring wire 220 is interference-pierced in the temperature measuring wire connection hole 244. Further, the main body 241 and the cover 242 are detachably connected, and the diameter of the temperature measuring wire connection hole 244 after the two are connected is slightly smaller than the first temperature measuring wire 210 or the second temperature measuring wire 220, so as to realize the extrusion fixing structure of the corresponding temperature measuring wire, wherein the threaded groove can also increase the friction strength between it and the corresponding temperature measuring wire, and at the same time make it have the function of anti-slip and anti-vibration. Specifically, a plug connector 245 is provided in the middle section of the main body 241 , on which a connecting hole is provided, and a corresponding connecting hole is provided on the cover 242 . A connecting pin 243 passes through the connecting hole to realize the connection structure between the main body 241 and the cover 242 .

[0040] In this embodiment, the connection mechanism 240 includes two covers 242, which are sequentially arranged along the length direction of the main body 241, wherein one of the covers 242 cooperates with the main body 241 to connect the first temperature measuring line 210 or the second temperature measuring line 220, and the other of the covers 242 cooperates with the main body 241 to connect the electrode feedthrough, thereby further improving the assembly flexibility of the present application.

[0041] Furthermore, the present embodiment also includes a plurality of insulating members 230, which are used to protect the first temperature measuring line 210 and / or the second temperature measuring line 220. The insulating members 230 are arranged between the crucible 100 and the connecting mechanism 240, and wrap the first temperature measuring line 210 and / or the second temperature measuring line 220. In the present embodiment, the insulating members 230 are preferably ceramics, and the present invention does not limit the specific material thereof.

[0042] It is worth noting that the first temperature measuring line 210, the second temperature measuring line 220 and the corresponding electrode feedthrough in this embodiment are made of the same material, preferably tungsten-rhenium alloy. On the one hand, tungsten-rhenium alloy has a high melting point, high oxidation resistance, excellent mechanical properties, good corrosion resistance and excellent electrical conductivity. On the other hand, the same material can minimize heat transfer losses, thereby effectively reducing the potential difference error generated when different metals contact each other. In addition, the melting point of tungsten-rhenium alloy is above 1400°C, thereby avoiding its influence on the evaporation source.

[0043] Embodiment 2

[0044] This embodiment provides a temperature measurement method, which uses the temperature measurement crucible assembly described in Embodiment 1 to measure the actual heat treatment temperature of metal aluminum, and includes the following steps:

[0045] Step S1, respectively pass the first positive electrode 211 and the first negative electrode 212 of the first temperature measuring line 210 from the furnace neck 110 to the inside of the crucible 100, and extend them to the furnace bottom 130, and then spot weld the first positive electrode 211 and the first negative electrode 212 at the furnace bottom 130 to form an evaporation source temperature measuring part inside the crucible 100; in this embodiment, step S1 also includes: respectively pass the second positive electrode 221 and the second negative electrode 222 of the second temperature measuring line 220 from the furnace neck 110 to the inside of the crucible 100, and spot weld the second positive electrode 221 and the second negative electrode 222 at the furnace neck 110 to form a reference temperature measuring part 223 inside the furnace neck 110.

[0046] Step S2, connecting the free ends of the first positive electrode 211 and the first negative electrode 212 to electrode feedthroughs respectively; in this embodiment, step S2 also includes: connecting the free ends of the second positive electrode 221 and the second negative electrode 222 to electrode feedthroughs respectively.

[0047] Step S3, after placing the evaporation source to be detected in the crucible 100, make it contact with the evaporation source temperature measuring part, and measure the calibrated potential difference V0 between the first positive electrode 211 and the first negative electrode 212 at the calibration temperature; In this embodiment, step S3 also includes: after placing the evaporation source to be detected in the crucible 100, make it spaced from the reference temperature measuring part 223, and measure the calibrated potential difference V0' between the second positive electrode 221 and the second negative electrode 222 at the calibration temperature.

[0048] Step S4, after heating the crucible 100 to a preset temperature, measuring the contact potential difference V between the first positive electrode 211 and the first negative electrode 212 at this time; in this embodiment, step S4 also includes: after heating the crucible 100 to a preset temperature, measuring the contact potential difference V' between the second positive electrode 211 and the second negative electrode 212 at this time.

[0049] Step S5, calculating the actual temperature of the evaporation source to be detected T = (V-V0) / S, where S is the thermoelectric coefficient of the corresponding evaporation source to be detected. In this embodiment, the actual temperature of the internal environment of the crucible 100 is calculated as T' = (V'-V0') / S' to monitor the degree of temperature change and stability of the crucible 100, where S' is the thermoelectric coefficient of the medium inside the crucible 100.

[0050] Furthermore, in actual use, the evaporation source to be detected includes a solid evaporation source and a liquid evaporation source, wherein the gap between the solid evaporation sources is the most important factor affecting the detection temperature thereof. Based on this, when the evaporation source to be detected is solid, at least part of the evaporation source to be detected contacts the evaporation source temperature measuring part. At this time, detection is performed through the contact point between the evaporation source temperature measuring part and the evaporation source to be detected, so as to avoid the influence of the solid gap on the measurement result;

[0051] Correspondingly, the internal temperature of the liquid evaporation source is uniform, and its surface temperature is the average temperature of the actual evaporation source. Based on this, when the evaporation source to be detected is a liquid, the detection result of the evaporation source temperature measuring part is the same as the value of the liquid surface potential difference, and the actual temperature T of the evaporation source is the liquid surface temperature.

[0052] In summary, the temperature measuring crucible assembly and temperature measuring method of the present invention directly contact the evaporation source inside the furnace body of the crucible 100 through the temperature measuring assembly 200, and realize accurate detection of the temperature of the evaporation source to be detected based on the conversion of the electrothermal signal. In the actual detection process, the crucible 100 and the temperature measuring assembly 200 are highly matched in structure, which not only does not increase the occupied space, but also can improve the connection stability between the two, fundamentally avoiding the problem of poor contact caused by environmental factors during the experiment. Compared with conventional detection technology, this application has significant advantages such as simple operation, high repeatability, strong controllability, high detection accuracy and strong detection stability, providing another new idea for the temperature measurement technology of the crucible 100.

[0053] Obviously, the above embodiments are merely examples for the purpose of clear explanation and are not intended to limit the implementation methods. For those skilled in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to list all the implementation methods here. The obvious changes or modifications derived from these are still within the scope of protection of the invention.

Claims

1. A temperature measuring crucible assembly, characterized in that: include: A crucible, the crucible comprising a furnace bottom, a furnace body and a furnace neck which are connected in sequence; A temperature measuring component, the temperature measuring component includes a first temperature measuring line and a connecting mechanism, the first temperature measuring line includes a first positive electrode and a first negative electrode, the first positive electrode and the first negative electrode are respectively passed through the furnace neck to the inside of the crucible, and are electrically connected to the furnace bottom after being extended to fit the inner wall of the crucible to form an evaporation source temperature measuring part inside the crucible, the free ends of the first positive electrode and the first negative electrode are respectively connected to the electrode feed-through through the connecting mechanism to perform electrothermal signal conversion; it also includes a second temperature measuring line, the second temperature measuring line is spaced apart from the evaporation source to be detected, the second temperature measuring line includes a second positive electrode and a second negative electrode, the second positive electrode and the second negative electrode are respectively passed through the furnace neck to the inside of the crucible, and are connected inside the furnace neck to form a reference temperature measuring part for detecting the internal environment of the furnace body inside the furnace neck, the free ends of the second positive electrode and the second negative electrode are respectively connected to the electrode feed-through through the connecting mechanism to perform electrothermal signal conversion.

2. The temperature measuring crucible assembly according to claim 1, characterized in that: The reference temperature measuring part is configured as a bending limit structure, and the bending limit structure abuts against the inner wall of the furnace neck.

3. The temperature measuring crucible assembly according to claim 1, characterized in that: The temperature measuring assembly further includes an insulating member, which is disposed between the crucible and the connecting mechanism and wraps the first temperature measuring wire.

4. The temperature measuring crucible assembly according to claim 1, characterized in that: The side wall of the furnace neck gradually shrinks inward in a direction away from the furnace body, and the furnace bottom is configured as an arc-shaped structure.

5. The temperature measuring crucible assembly according to claim 1, characterized in that: The furnace neck is provided with a connecting hole, and the first temperature measuring line is passed through the connecting hole to the inside of the crucible. The side wall of the crucible is also provided with an embedding groove, which is configured as a blind groove recessed inward from the outer wall of the crucible, extending from the furnace bottom to the connecting hole, and the first temperature measuring line is embedded in the embedding groove.

6. The temperature measuring crucible assembly according to claim 1, characterized in that: The connecting mechanism includes a main body and a cover body, and the main body and the cover body are detachably connected. The main body and the cover body are both provided with threaded grooves. When the main body and the cover body are connected, the threaded grooves surround a temperature measuring wire connecting hole, and the first temperature measuring wire or the second temperature measuring wire is interference-pierced through the temperature measuring wire connecting hole.

7. The temperature measuring crucible assembly according to claim 6, characterized in that: The connecting mechanism includes two cover bodies, which are arranged in sequence along the length direction of the main body, one of which cooperates with the main body to connect the first temperature measuring line or the second temperature measuring line, and the other cover cooperates with the main body to connect the electrode feedthrough.

8. A temperature measurement method, characterized in that: The actual temperature of the evaporation source inside the crucible is measured by using the temperature measuring crucible assembly according to any one of claims 1 to 7, which comprises the following steps: Step S1, respectively passing a first positive electrode and a first negative electrode of a first temperature measuring line through a furnace neck into the crucible, and extending the first positive electrode and the first negative electrode to the bottom of the furnace, spot welding the first positive electrode and the first negative electrode at the bottom of the furnace to form an evaporation source temperature measuring portion inside the crucible; respectively passing a second positive electrode and a second negative electrode of a second temperature measuring line through a furnace neck into the crucible, and spot welding the second positive electrode and the second negative electrode at the furnace neck to form a reference temperature measuring portion inside the furnace neck; Step S2, connecting the free ends of the first positive electrode and the first negative electrode to electrode feedthroughs respectively; connecting the free ends of the second positive electrode and the second negative electrode to electrode feedthroughs respectively; Step S3, after placing the evaporation source to be detected in the crucible, make it contact with the evaporation source temperature measuring part, and measure the calibration potential difference V0 between the first positive electrode and the first negative electrode at the calibration temperature; after placing the evaporation source to be detected in the crucible, make it spaced from the reference temperature measuring part, and measure the calibration potential difference V0' between the second positive electrode and the second negative electrode at the calibration temperature; Step S4, after heating the crucible to a preset temperature, measuring the contact potential difference V between the first positive electrode and the first negative electrode at this time; after heating the crucible to a preset temperature, measuring the contact potential difference V' between the second positive electrode and the second negative electrode at this time; Step S5, calculating the actual temperature of the evaporation source to be detected T = (V-V0) / S, where S is the thermoelectric coefficient of the corresponding evaporation source to be detected; calculating the actual temperature of the internal environment of the crucible T' = (V'-V0') / S', so as to monitor the degree of temperature change and stability inside the crucible, where S' is the thermoelectric coefficient of the medium inside the crucible.

9. The temperature measurement method according to claim 8, characterized in that: In step S3 to step S5, when the evaporation source to be detected is solid, at least a part of the evaporation source to be detected contacts the evaporation source temperature measuring part, and detection is performed through the contact point between the evaporation source temperature measuring part and the evaporation source to be detected to avoid the influence of the solid gap on the measurement result; when the evaporation source to be detected is liquid, the detection result of the evaporation source temperature measuring part is the same as the value of the liquid surface potential difference, and the actual temperature T of the evaporation source is the liquid surface temperature.

Images