Split type heat shielding plate for melting quartz crucible

Abstract

The split type heat shielding plate comprises a heat shielding plate body and a heat insulation ring which are arranged in parallel, a mounting hole for an electrode to penetrate through is formed in the center of the heat shielding plate body, the heat insulation ring is arranged in the mounting hole in a sleeved mode, and a limiting step is arranged on the lower edge of the inner side wall of the periphery of the mounting hole of the heat shielding plate body. A boss is arranged on the upper edge of the outer side wall of the periphery of the heat insulation ring, the boss is matched with the installation hole and the limiting step, the heat insulation ring is detachably connected to the limiting step in a lap joint mode through the boss, and the electrode penetrates through the center of the heat insulation ring so that the heat insulation ring can be used for isolating the electrode from the heat shielding plate. When the heat insulation ring is damaged, only the heat insulation ring needs to be replaced, the heat insulation plate body does not need to be integrally disassembled and replaced, the equipment maintenance cost is reduced, the heat insulation ring is in lap joint with the heat insulation plate body under the action of the gravity of the heat insulation ring, limiting is conducted through the limiting step, fixing is not needed, disassembly is more convenient, time and labor are saved, and the heat insulation plate is convenient to use. And the replacement time is greatly shortened.

Description

Technical Field

[0001] The invention relates to the technical field of heat shielding plates for melting quartz crucibles, and in particular to a split heat shielding plate for melting quartz crucibles. Background Art

[0002] Quartz crucible is an important auxiliary part for drawing solar energy and semiconductor single crystal silicon rods. At present, quartz crucible is mainly made by arc melting method combined with rotary molding method. During the melting process, the centrifugal force of the mold rotation makes the quartz sand accumulate on the inner surface of the mold, and then the high-temperature arc generated by electrode discharge melts the quartz sand accumulated on the inner surface of the mold, and finally forms a quartz crucible.

[0003] During the melting process, in order to ensure the temperature in the mold and prevent foreign matter from entering, as well as to prevent the arc flame from causing photo-erosion to other parts of the quartz crucible melting equipment, a heat shield needs to be installed above the mold. In the prior art, the heat shield is generally an integrated structure made of stainless steel plates welded together. The heat shield has a good effect in blocking high-temperature arc light. However, during the melting process, since the inner edge of the heat shield is close to the electrode, the inner edge is easily damaged by photo-erosion under the action of electrode discharge and high-temperature arc light. After damage, the heat shield needs to be replaced as a whole, which is inconvenient, time-consuming and labor-intensive, and affects production efficiency. Summary of the invention

[0004] In view of this, it is necessary to provide a split heat shield for melting a quartz crucible to solve the technical problem in the prior art that after the heat shield is damaged by photo-erosion, it is inconvenient, time-consuming and labor-intensive to replace.

[0005] The technical solution adopted by the present invention to solve its technical problem is: A split heat shield for melting a quartz crucible, the split heat shield for melting a quartz crucible being installed above a mold of a quartz crucible melting furnace and being used for shielding an arc flame generated by electrode discharge during the melting of the quartz crucible, the split heat shield for melting a quartz crucible comprising a heat shield body and a heat insulation ring arranged in parallel, a mounting hole for the electrode to pass through being arranged at the center of the heat shield body, the heat insulation ring being sleeved in the mounting hole, a limiting step protruding toward the center direction of the mounting hole being arranged at the lower edge of the inner side wall around the mounting hole of the heat shield body, a boss protruding outward being arranged at the upper edge of the outer side wall around the heat insulation ring, the boss matching the mounting hole and the limiting step, the heat insulation ring being detachably overlapped on the limiting step through the boss, the electrode passing through the center of the heat insulation ring so as to utilize the heat insulation ring to isolate the electrode from the heat shield body.

[0006] Preferably, an insulating coating is provided on the end surface of the heat insulation ring that contacts or is adjacent to the limiting step of the heat shield body, and on the end surface of the boss of the heat insulation ring that contacts or is adjacent to the heat shield body.

[0007] Preferably, the insulating coating is a silicon dioxide or silicon carbide coating.

[0008] Preferably, the mounting hole is a circular hole, the limiting step is arranged along the circumference of the circular hole, and the thermal insulation ring matches the mounting hole.

[0009] Preferably, a first water-cooling chamber is arranged inside the insulation ring along its circumferential direction, a first water inlet pipe and a first water return pipe connected to the first water-cooling chamber are arranged at the upper end of the insulation ring, and a first water circulation device is arranged on the outside of the quartz crucible melting furnace, and a water outlet and a water return port of the first water circulation device are respectively connected to the first water inlet pipe and the first water return pipe to circulate water to the first water-cooling chamber of the insulation ring for temperature reduction protection.

[0010] Preferably, the first water-cooling chamber includes an inner circulating water chamber and an outer circulating water chamber arranged in a ring shape, the inner circulating water chamber and the outer circulating water chamber are connected to each other, and the inner circulating water chamber is close to the inner side of the insulation ring, the first water inlet pipe is connected to the inner circulating water chamber, and the first water return pipe is connected to the outer circulating water chamber.

[0011] Preferably, the water introduced into the first water cooling chamber and the first water circulation device of the insulation ring is pure water.

[0012] Preferably, the first water circulation device includes a first radiator and a first circulating water pump, the water outlet and water return port of the first radiator are respectively connected to the first water inlet pipe and the first water return pipe on the insulation ring, and the first circulating water pump is arranged on the water outlet or water return port of the first radiator to circulate water to the first water cooling chamber of the insulation ring for temperature reduction protection.

[0013] Preferably, a second water-cooling chamber is provided inside the heat shield body along the circumferential direction of the mounting hole, a second water inlet pipe and a second water return pipe are provided on the second water-cooling chamber, a second water circulation device is also provided on the outside of the quartz crucible melting furnace, the second water circulation device includes a second radiator and a second circulating water pump, the water outlet and the water return port of the second radiator are respectively connected with the second water inlet pipe and the second water return pipe on the second water-cooling chamber, and the second circulating water pump is provided on the water outlet or the water return port of the second radiator to circulate water to the second water-cooling chamber of the heat shield body for temperature reduction protection.

[0014] Preferably, the lower surface of the thermal insulation ring is integrally stamped.

[0015] It can be known from the above technical scheme that the split heat shield for melting quartz crucible provided in the present application comprises a heat shield body and a heat insulation ring arranged in parallel, a mounting hole for the electrode to pass through is arranged at the center of the heat shield body, the heat insulation ring is sleeved in the mounting hole, a limiting step protruding toward the center of the mounting hole is arranged at the lower edge of the inner side wall around the mounting hole of the heat shield body, and a boss protruding outward is arranged at the upper edge of the outer side wall around the heat insulation ring, the boss matches the mounting hole and the limiting step, the heat insulation ring is detachably overlapped on the limiting step through the boss, and the electrode passes through the center of the heat insulation ring so as to utilize the heat insulation ring to isolate the electrode and the heat shield body. During use, since the mounting hole of the heat shield body is close to the electrode, it is easy to be damaged by arc erosion. Therefore, a heat insulation ring is provided at the mounting hole of the heat shield body. The heat insulation ring and the heat shield body are designed to be split, and the heat insulation ring is used to protect the heat shield body. When the heat insulation ring is damaged, only the heat insulation ring needs to be replaced. There is no need to dismantle and replace the heat shield body as a whole, which reduces the cost of equipment maintenance. Moreover, the heat insulation ring is overlapped on the heat shield body under the action of its own gravity and is limited by a limiting step. It does not need to be fixed, which makes disassembly more convenient, saves time and effort, greatly shortens the replacement time, and significantly improves working efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 This is a schematic diagram of the structure of a quartz crucible melting furnace.

[0017] Figure 2 It is a schematic diagram of the top view of the structure of the split heat shield plate used for melting quartz crucible.

[0018] Figure 3 for Figure 2 Schematic diagram of the cross-sectional structure along the middle edge AA.

[0019] Figure 4 It is a schematic diagram of the three-dimensional structure of the heat shield body.

[0020] Figure 5 It is a schematic cross-sectional view of the thermal insulation ring.

[0021] Figure 6 It is a schematic diagram of the flow direction of water in the first water-cooling cavity of the insulation ring.

[0022] In the figure: quartz crucible melting furnace 10, electrode 20, heat shield body 30, insulation ring 40, mounting hole 301, limiting step 302, boss 401, insulating coating 402, first water cooling chamber 403, inner circulating water chamber 4031, outer circulating water chamber 4032, first water inlet pipe 404, first water return pipe 405, first water circulation device 50, first radiator 501, first circulating water pump 502, second water cooling chamber 303, second water inlet pipe 304, second water return pipe 305, second water circulation device 60, second radiator 601, second circulating water pump 602. DETAILED DESCRIPTION

[0023] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following briefly introduces the drawings required for use in the embodiments. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0024] Please see Figures 1 to 4The embodiment of the present invention provides a split heat shield for melting a quartz crucible. The split heat shield for melting a quartz crucible is installed above the mold of a quartz crucible melting furnace 10 to shield the arc flame generated by the discharge of an electrode 20 during the quartz crucible melting process. The split heat shield for melting quartz crucible comprises a heat shield body 30 and a heat insulation ring 40 which are arranged in parallel. The heat shield body 30 is installed above the mold of the quartz crucible melting furnace 10. A mounting hole 301 for the electrode 20 to pass through is arranged at the center of the heat shield body 30. The mounting hole 301 is preferably a circular hole. The heat insulation ring 40 is sleeved in the mounting hole 301. The structure of the heat insulation ring 40 matches that of the mounting hole 301. A limiting step 302 which protrudes laterally toward the center direction of the mounting hole 301 is arranged at the lower edge of the inner side wall around the mounting hole 301 of the heat shield body 30. The limiting step 302 is arranged along the circumference of the mounting hole 301. The inner diameter of the limiting step 302 matches the outer diameter of the heat insulation ring 40. A boss 401 which protrudes outward is arranged at the upper edge of the outer side wall around the heat insulation ring 40. The boss 401 is arranged along the circumference of the heat insulation ring 40. The outer diameter of the boss 401 matches the outer diameter of the mounting hole 301. The aperture of the mounting hole 301 matches that of the mounting hole 301. During installation, the heat insulation ring 40 is detachably overlapped on the limiting step 302 of the heat shield body 30 through the boss 401. The lower surface of the heat insulation ring 40 is flush with the lower surface of the heat shield body 30. The electrode 20 passes through the center of the heat insulation ring 40, so that the heat insulation ring 40 is used to isolate the electrode 20 and the heat shield body 30. The heat insulation ring 40 forms protection around the mounting hole 301 of the heat shield body 30. During use, when the heat insulation ring 40 is damaged, only the heat insulation ring 40 needs to be replaced, and there is no need to dismantle and replace the heat shield body 30 as a whole, thereby reducing the cost of equipment maintenance. Moreover, the heat insulation ring 40 is pressed down on the heat shield body 30 by its own gravity, and is limited and supported by the limiting step 302, and does not need to be fixed, making disassembly more convenient, saving time and effort, greatly shortening the replacement time, and significantly improving the working efficiency.

[0025] Please see Figure 3 and Figure 5Furthermore, during the melting process, since the heat insulation ring 40 is close to the electrode 20 and the heat insulation ring 40 is in contact with the heat shield body 30, when the electrode 20 discharges, a discharge spark phenomenon will be formed on the heat insulation ring 40, and the discharge spark will cause metal pollution to the inner surface of the quartz crucible during the melting process. In order to reduce the occurrence of the spark phenomenon, the heat insulation ring 40 is contacted or adjacent to the limiting step 302 of the heat shield body 30, and the boss 401 of the heat insulation ring 40 is in contact or adjacent to the heat shield body 30. An insulating coating 402 is provided on the end surface, and the thickness of the insulating coating 402 is a preset thickness. The insulating coating 402 is a silicon dioxide coating or a silicon carbide coating. The silicon dioxide coating or the silicon carbide coating is resistant to high temperature and has an insulating effect. The insulating coating 402 is used to isolate the insulation ring 40 from the heat shield body 30, which can reduce the occurrence of sparks between the electrode 20 and the inner edge of the insulation ring 40, thereby reducing the photo-erosion of the insulation ring 40 by the arc light of the electrode 20, and increasing the service life of the insulation ring 40.

[0026] Please see Figure 1 and Figure 5 Furthermore, a first water cooling chamber 403 is arranged inside the insulation ring 40 along its circumferential direction, a first water inlet pipe 404 and a first water return pipe 405 connected to the first water cooling chamber 403 are arranged at the upper end of the insulation ring 40, and a first water circulation device 50 is arranged on the outside of the quartz crucible melting furnace 10, and a water outlet and a water return port of the first water circulation device 50 are respectively connected to the first water inlet pipe 404 and the first water return pipe 405 by setting a connecting water pipe, and the first water circulation device 50 circulates water to the first water cooling chamber 403 of the insulation ring 40 for temperature reduction protection, and the water introduced into the first water cooling chamber 403 of the insulation ring 40 and the first water circulation device 50 is non-conductive pure water, and the connecting water pipe adopts a water pipe with insulating material to insulate the insulation ring 40 from the first water circulation device 50.

[0027] Please see Figure 5 and Figure 6The first water-cooling chamber 403 adopts a double water chamber structure, including an inner circulating water chamber 4031 and an outer circulating water chamber 4032 arranged in a ring shape, the inner circulating water chamber 4031 is close to the inner side of the insulation ring 40, that is, close to the side of the electrode 20, the outer circulating water chamber 4032 is adjacent to the inner circulating water chamber 4031 and is connected to each other, the first water inlet pipe 404 is connected to the inner circulating water chamber 4031, and the first water return pipe 405 is connected to the outer circulating water chamber 4032. The first water circulation device 50 includes a first radiator 501 and a first circulating water pump 502. The first radiator 501 is an air-cooled radiator. The water outlet and the water return port of the first radiator 501 are respectively connected with the first water inlet pipe 404 and the first water return pipe 405 on the insulation ring 40 through connecting water pipes. The first circulating water pump 502 is arranged on the water outlet or the water return port of the first radiator 501. The first circulating water pump 502 circulates the water added to the first water cooling chamber 403 and the first radiator 501. The water at the water outlet of the first radiator 501 is first input into the inner circulating water chamber 4031 through the first circulating water pump 502 for one cycle, and then enters the outer circulating water chamber 4032 from the inner circulating water chamber 4031. The water continues to circulate through the outer circulating water chamber 4032 for one cycle and then returns to the first radiator 501. The first radiator 501 is used to cool the circulating water to perform cooling protection on the insulation ring 40. The inner side of the insulation ring 40 is close to the electrode 20, so the temperature is relatively high. The insulation ring 40 adopts a double water chamber structure, which can accelerate the flow rate of water in the inner circulation water chamber 4031 and the outer circulation water chamber 4032, thereby accelerating the cooling of the inner side of the insulation ring 40 and providing cooling protection for the insulation ring 40.

[0028] Please see Figure 1 and Figure 3 Furthermore, a second water cooling chamber 303 is provided inside the heat shield body 30 along the circumferential direction of the mounting hole 301, and a second water inlet pipe 304 and a second water return pipe 305 are provided on the second water cooling chamber 303. A second water circulation device 60 is also provided on the outside of the quartz crucible melting furnace 10, and the second water circulation device 60 includes a second radiator 601 and a second circulating water pump 602. The water outlet and the water return port of the second radiator 601 are respectively connected with the second water inlet pipe 304 and the second water return pipe 305 on the second water cooling chamber 303 by setting a connecting water pipe. The second circulating water pump 602 is arranged on the water outlet or the water return port of the second radiator 601 to circulate water to the second water cooling chamber 303 of the heat shield body 30 for temperature reduction protection. Furthermore, the water flowing into the second water cooling chamber 303 of the heat shield body 30 and the second water circulation device 60 is also non-conductive pure water, and the connecting water pipes are also made of insulating materials to insulate the heat shield body 30 from the second water circulation device 60 .

[0029] In the above embodiment, the heat insulation ring 40 and the heat shield body 30 are both made of stainless steel by welding, wherein the lower surface of the heat insulation ring 40 is integrally stamped, has no weld seam, and has an inner edge with a rounded corner, which can increase the service life.

[0030] What is disclosed above is only a preferred embodiment of the present invention, which certainly cannot be used to limit the scope of rights of the present invention. A person skilled in the art can understand that all or part of the processes of the above embodiments and equivalent changes made according to the claims of the present invention still fall within the scope of the invention.

Claims

1. A split heat shield for melting a quartz crucible, which is installed above the mold of a quartz crucible melting furnace and is used to shield the arc flame generated by electrode discharge during the quartz crucible melting process, and is characterized by: The split heat shield for melting quartz crucible comprises a heat shield body and a heat insulation ring arranged in parallel, a mounting hole for the electrode to pass through is arranged at the center of the heat shield body, the heat insulation ring is sleeved in the mounting hole, a limiting step protruding toward the center of the mounting hole is arranged at the lower edge of the inner side wall around the mounting hole of the heat shield body, and a boss protruding outward is arranged at the upper edge of the outer side wall around the heat insulation ring, the boss matches the mounting hole and the limiting step, the heat insulation ring is detachably overlapped on the limiting step through the boss, and the electrode passes through the center of the heat insulation ring, so that the electrode and the heat shield body are isolated by the heat insulation ring.

2. The split heat shield for melting a quartz crucible according to claim 1, characterized in that: The end surface of the heat insulation ring that contacts or is adjacent to the limiting step of the heat shield body and the end surface of the heat insulation ring that contacts or is adjacent to the heat shield body are both provided with an insulating coating.

3. The split heat shield for melting a quartz crucible according to claim 2, characterized in that: The insulating coating is a silicon dioxide or silicon carbide coating.

4. The split heat shield for melting a quartz crucible according to claim 1 or 3, characterized in that: The mounting hole is a circular hole, the limiting step is arranged along the circumference of the circular hole, and the heat insulation ring matches the mounting hole.

5. The split heat shield for melting a quartz crucible according to claim 4, characterized in that: A first water cooling chamber is arranged inside the insulation ring along its circumferential direction, a first water inlet pipe and a first water return pipe connected to the first water cooling chamber are arranged at the upper end of the insulation ring, and a first water circulation device is arranged on the outside of the quartz crucible melting furnace, and a water outlet and a water return port of the first water circulation device are respectively connected to the first water inlet pipe and the first water return pipe to circulate water to the first water cooling chamber of the insulation ring for temperature reduction protection.

6. The split heat shield for melting a quartz crucible according to claim 5, characterized in that: The first water-cooling chamber includes an inner circulating water chamber and an outer circulating water chamber arranged in an annular shape. The inner circulating water chamber and the outer circulating water chamber are connected to each other, and the inner circulating water chamber is close to the inner side of the insulation ring. The first water inlet pipe is connected to the inner circulating water chamber, and the first water return pipe is connected to the outer circulating water chamber.

7. The split heat shield for melting a quartz crucible according to claim 6, characterized in that: The water introduced into the first water cooling chamber and the first water circulation device of the heat insulation ring is pure water.

8. The split heat shield for melting a quartz crucible according to claim 7, characterized in that: The first water circulation device includes a first radiator and a first circulating water pump. The water outlet and water return port of the first radiator are respectively connected to the first water inlet pipe and the first water return pipe on the insulation ring. The first circulating water pump is arranged on the water outlet or water return port of the first radiator to circulate water to the first water cooling chamber of the insulation ring for temperature reduction protection.

9. The split heat shield for melting a quartz crucible according to claim 8, characterized in that: A second water cooling chamber is arranged inside the heat shield body along the circumferential direction of the mounting hole, a second water inlet pipe and a second water return pipe are arranged on the second water cooling chamber, a second water circulation device is also arranged on the outside of the quartz crucible melting furnace, the second water circulation device comprises a second radiator and a second circulating water pump, a water outlet and a water return port of the second radiator are respectively connected with the second water inlet pipe and the second water return pipe on the second water cooling chamber, and the second circulating water pump is arranged on the water outlet or the water return port of the second radiator to circulate water to the second water cooling chamber of the heat shield body for temperature reduction protection.

10. The split heat shield for melting a quartz crucible according to claim 9, characterized in that: The lower surface of the heat insulation ring is integrally stamped.

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