Integrated vacuum transmission device

Abstract

The invention relates to an integrated vacuum transmission device and relates to the technical field of vacuum transmission equipment, the integrated vacuum transmission device comprises a speed reducer and a motor, the speed reducer comprises a shell, an output shaft is rotatably arranged in the shell, one end of the output shaft extends to the outer side of the shell, and the other end of the output shaft is in transmission connection with the motor through a speed reduction transmission assembly; a magnetic sealing assembly is arranged between the end, away from the motor, of the output shaft and the shell, and the magnetic sealing assembly forms dynamic sealing between the output shaft and the shell. According to the device, the leakage problem of a traditional vacuum transmission device is effectively solved through the magnetic sealing assembly, and the operation reliability of the device is improved.

Description

Technical Field

[0001] The present application relates to the technical field of vacuum transmission equipment, and in particular to an integrated vacuum transmission device. Background Art

[0002] In the vacuum and semiconductor industries, in order to ensure the stability and efficiency of the process, it is necessary to achieve sealing and power transmission to the working machinery. In these industries, vacuum sealing technology is crucial, which can effectively isolate the contamination of the vacuum chamber by external impurities, reduce downtime, and improve production efficiency. Magnetic fluid sealing technology has been widely used in TFT-LCD, OLED, PVD, CVD and other processes due to its long life, high performance and high adaptability. The magnetic fluid sealing device can realize the transmission of rotational motion, and it uses the liquid sealing ring formed by the magnetic fluid under the action of the magnetic field to achieve a sealing effect. The ultimate vacuum degree can reach 10 -6 Pa, with extremely low leakage rate.

[0003] At present, there are many types of single magnetic fluid sealing devices on the market, such as solid shaft, hollow shaft, multi-axis sealing devices, etc. These devices usually require users to specially design and customize external drive devices, sensors, etc., but due to reasons such as manufacturing and assembly precision, the customized devices are often not compact enough and inconvenient to install, resulting in high device costs. In addition, in high-precision and heavy-load sealed transmission devices, complex design conditions can easily damage the installation of the magnetic fluid part, thereby affecting the use effect.

[0004] The existing single magnetic fluid sealing transmission device still has deficiencies in terms of integration and reliability. In particular, for application scenarios that require high-precision sealing transmission, a single magnetic fluid sealing device is difficult to meet actual needs. Summary of the invention

[0005] In order to solve the problems in the prior art that the existing vacuum transmission devices have poor sealing effects and are still insufficient in terms of integration and reliability, the present application provides an integrated vacuum transmission device.

[0006] An integrated vacuum transmission device provided in the present application adopts the following technical solution: an integrated vacuum transmission device, including a reducer and a motor, the reducer including a shell, an output shaft rotatably arranged inside the shell, one end of the output shaft extends to the outside of the shell, the other end of the output shaft is connected to the motor through a reduction transmission assembly, a magnetic sealing assembly is arranged between one end of the output shaft away from the motor and the shell, and the magnetic sealing assembly forms a dynamic seal between the output shaft and the shell.

[0007] By adopting the above technical solution, the integrated vacuum transmission device realizes the compact integration of the reducer and the motor. The magnetic sealing assembly ensures reliable sealing in a high vacuum environment. The dynamic sealing structure between the output shaft and the housing further improves the sealing performance and service life of the device.

[0008] Optionally, the magnetic sealing assembly includes a magnetic pole seat sleeved between the outer side of the output shaft and the shell, two magnetic pole seats are provided, the two magnetic pole seats are symmetrically arranged, a magnetic steel is arranged between the two magnetic pole seats, and a magnetic fluid is filled between the output shaft and the magnetic pole seats.

[0009] By adopting the above technical solution, the magnetic sealing assembly includes two symmetrically arranged pole seats mounted between the outer side of the output shaft and the housing, a magnetic steel is arranged between the two pole seats, and a magnetic fluid is filled between the output shaft and the pole seats, thereby forming a stable dynamic sealing structure, effectively isolating the influence of external impurities on the vacuum environment, and improving the overall sealing performance and service life of the device.

[0010] Optionally, a plurality of sealing rings are protruded and evenly spaced along the axial direction at the connection between the output shaft and the magnetic pole seat, and a groove is formed between two adjacent sealing rings and the magnetic pole seat, and the interior of the groove is filled with magnetic fluid.

[0011] By adopting the above technical solution, several sealing rings can significantly improve the sealing effect of the magnetic sealing assembly. The grooves formed between adjacent sealing rings and the magnetic pole seats are filled with magnetic fluid to form a multi-level seal, which further enhances the sealing performance and effectively reduces the leakage rate.

[0012] Optionally, a sealing ring is provided between the magnetic pole seat and the inner wall of the shell.

[0013] By adopting the above technical solution, a sealing ring is added between the magnetic pole seat and the inner wall of the shell, which improves the overall sealing performance of the device, ensures reliable operation in a high vacuum environment, and avoids the entry of external impurities that affect the magnetic fluid sealing effect.

[0014] Optionally, the reduction transmission assembly adopts a worm gear transmission assembly, and a worm wheel is connected to one end of the output shaft close to the motor, and a worm is matchedly provided on one side of the worm wheel, and the worm is transmission-connected to the motor.

[0015] By adopting the above technical solution, the integrated vacuum transmission device realizes the use of worm gear transmission in the reduction transmission component, ensures efficient transmission between the output shaft and the motor, improves the stability and accuracy of the transmission, and thus enhances the reliability and service life of the entire device.

[0016] Optionally, a sensor component for detecting the rotational speed of the output shaft is arranged inside the reducer.

[0017] By adopting the above technical solution, the magnetofluid vacuum transmission device with integrated motor reducer can realize power transmission in a high-demand vacuum environment, and the setting of the sensor component can accurately detect the rotation speed of the output shaft, thereby improving the control accuracy and reliability of the system.

[0018] Optionally, the sensor assembly includes a light blocking plate arranged at one end of the worm gear and fixedly connected to the worm gear, a sensor is fixedly arranged at a position corresponding to the light blocking plate on the shell, and the sensor is arranged through the shell and fixedly connected to the shell through a mounting frame.

[0019] By adopting the above technical solution, the sensor assembly includes a light blocking piece arranged at one end of the worm gear and fixedly connected to the worm gear, and a sensor is fixedly arranged on the shell corresponding to the position of the light blocking piece. The sensor is arranged through the shell and fixedly connected to the shell through a mounting frame, thereby realizing accurate detection of the output shaft rotation speed and improving the control accuracy of the transmission device.

[0020] Optionally, at least two sensors are provided, and the two sensors are arranged at a set angle along the circumference of the light blocking plate.

[0021] By adopting the above technical solution, setting up two sensors can realize the detection of the position, speed, and rotation direction of the output shaft, improving the accuracy and reliability of the sensor in detecting the output shaft speed, thereby improving the measurement accuracy and stability of the entire system.

[0022] Optionally, an output shaft pressure cover is sleeved on the outer side of one end of the output shaft connected to the magnetic seal, the output shaft pressure cover is fixedly connected to the housing, and the output shaft pressure cover is dynamically sealed to the output shaft.

[0023] By adopting the above technical solution, the output shaft cover sleeved on the outer side of one end of the output shaft connected to the magnetic sealing assembly is fixedly connected to the housing, and a dynamic sealing connection is achieved between the output shaft cover and the output shaft, which can further improve the sealing performance of the device, ensure stable operation in a high vacuum environment, and prevent external impurities from entering, thereby improving overall reliability.

[0024] Optionally, at least two bearings are provided between the output shaft and the housing.

[0025] By adopting the above technical solution, the integrated vacuum transmission device can set at least two bearings between the output shaft and the housing to effectively support the output shaft, improve the overall rigidity and stability of the device, reduce vibration, and ensure the accuracy and reliability of the rotation transmission.

[0026] In summary, the present application includes at least one of the following beneficial technical effects: 1. This application solves the problem of the custom device being compact and inconvenient to install in the prior art by integrating a high-precision motor, a worm reducer and a sensor into a compact system, thereby reducing the manufacturing cost; 2. The magnetic sealing assembly in the present application forms a liquid sealing ring formed by magnetic fluid under the action of the magnetic field, forming a multi-stage seal between the output shaft and the pole seat, thereby improving the sealing effect of high vacuum degree, with extremely low leakage rate, ensuring the cleanliness of the vacuum chamber; 3. The reduction transmission assembly in the present application adopts a worm gear transmission, and cooperates with the sensor assembly to monitor the output shaft speed in real time, thereby improving the transmission accuracy and reliability of the system, and is suitable for high-precision heavy-load sealing transmission devices. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 It is a schematic diagram of the overall structure of an integrated vacuum transmission device in an embodiment of the present application.

[0028] Figure 2 It is a schematic diagram of the internal structure of an integrated vacuum transmission device in an embodiment of the present application.

[0029] Figure 3 It is an integrated vacuum transmission device in the embodiment of the present application. Figure 2 A magnified schematic diagram of local A.

[0030] Figure 4 It is a schematic diagram of the connection structure between the motor and the worm of an integrated vacuum transmission device in an embodiment of the present application.

[0031] Figure 5 It is a stereoscopic isometric diagram of the installation of a sensor component of an integrated vacuum transmission device in an embodiment of the present application.

[0032] Explanation of the reference numerals in the accompanying drawings: 1. reducer; 11. housing; 12. end cover; 13. worm; 14. output shaft; 141. sealing ring; 15. worm wheel; 16. bearing; 17. output shaft gland; 18. magnetic sealing assembly; 181. pole seat; 182. magnet; 183. magnet bracket; 184. groove; 185. magnetic fluid; 19. sealing ring; 2. motor; 3. sensor assembly; 31. light shield; 32. sensor; 33. mounting bracket. DETAILED DESCRIPTION

[0033] The following is an explanation of the implementation of the present application by means of specific embodiments. People familiar with the art can easily understand other advantages and effects of the present application from the contents disclosed in this specification.

[0034] See also Figure 1-5. It should be noted that the structures, proportions, sizes, etc. illustrated in the drawings of this specification are only used to match the contents disclosed in the specification for people familiar with this technology to understand and read, and are not used to limit the restrictive conditions for the implementation of this application, so they have no substantial technical significance. Any modification of the structure, change in the proportional relationship, or adjustment of the size, without affecting the effects and purposes that can be achieved by this application, should still fall within the scope of the technical content disclosed in this application. At the same time, the terms such as "upper", "lower", "left", "right", "middle" and "one" cited in this specification are only for the convenience of description, and are not used to limit the scope of the implementation of this application. Changes or adjustments in their relative relationships should also be regarded as the scope of the implementation of this application without substantially changing the technical content.

[0035] The following is combined with Figure 1-5 This application is described in further detail.

[0036] This embodiment discloses an integrated vacuum transmission device.

[0037] Reference Figure 1 An integrated vacuum transmission device includes a reducer 1 and a motor 2. The motor 2 is a servo motor. The motor 2 is fixedly connected to the housing 11 of the reducer 1 by bolts. An output shaft is protruded from one end of the reducer 1 away from the motor 2.

[0038] Reference Figure 2 and Figure 4 An output shaft 14 is rotatably arranged inside the reducer 1, two bearings 16 are arranged between the output shaft 14 and the housing 11, end covers 12 and output shaft glands 17 are respectively arranged at both ends of the housing 11, the output shaft 14 passes through the output shaft gland 17 and protrudes from the side of the housing 11, the output shaft gland 17 is dynamically sealed with the output shaft 14, a worm wheel 15 is connected to one end of the output shaft 14 close to the end cover 12, a worm 13 is matched with one side of the worm wheel 15, the worm 13 is connected to the output shaft of the motor 2, and a magnetic seal assembly 18 is arranged between one end of the output shaft 14 close to the output shaft gland 17 and the housing 11.

[0039] Reference Figure 3The magnetic seal assembly 18 includes a magnetic pole seat 181 fixedly arranged between the output shaft 14 and the inner wall of the housing 11. Two magnetic pole seats 181 are provided and symmetrically sleeved on the outer side of the output shaft 14. A sealing ring 19 is provided between the two magnetic pole seats 181 and the inner wall of the housing 11. A magnetic steel 182 is provided between the two magnetic pole seats 181. The magnetic steel 182 is fixedly installed between the two magnetic pole seats 181 through a magnetic steel bracket 183. The inner wall of the magnetic pole seat 181 is concave inward to form a groove. The output shaft 14 corresponds to the magnetic pole seat 181 along the axis. Sealing rings 141 are evenly spaced apart, protruding from the surface of the output shaft 14, and are disposed inside a groove formed by an inward depression on the inner wall of the magnetic pole seat 181. A groove 184 is formed between two adjacent sealing rings 141 and the inner wall of the magnetic pole seat 181, and the groove 184 is filled with a magnetic fluid 185. The magnet 182 between the two magnetic pole seats 181 forms a magnetic field between the output shaft 14 and the housing 11, and the magnetic fluid 185 fills the groove 184 under the action of the magnetic field, thereby forming a multi-stage seal.

[0040] Reference Figure 2 and Figure 5 A sensor assembly 3 for detecting the rotational speed of the output shaft 14 is arranged inside the reducer 1. The sensor assembly 3 includes a light blocking piece 31 arranged at one end of the worm gear 15 and fixedly connected to the worm gear 15. A sensor 32 is fixedly arranged at a position corresponding to the light blocking piece 31 on the housing 11. The sensor 32 penetrates the housing 11 and is fixedly connected to the housing 11 through a mounting frame 33. Two sensors 32 are arranged, and the two sensors 32 are arranged at a set angle along the circumference of the light blocking piece 31. The sensor 32 adopts a photoelectric sensor. The light blocking piece 31 passes through the middle of the sensor 32. The light blocking piece 31 is circular, and two notches of inconsistent sizes are arranged on the edge, and an arc portion protrudes outward between the two notches.

[0041] The implementation principle of an integrated vacuum transmission device in this embodiment is: The magnetic fluid 185 is filled in the groove 184 formed between two adjacent sealing rings 141 and the inner wall of the magnetic pole seat 181. The magnetic steel 182 is arranged between the two magnetic pole seats 181. The magnetic steel 182 forms a magnetic field between the two magnetic pole seats 181 and the output shaft 14. The magnetic fluid 185 fills the gap between the sealing ring 141 and the inner wall of the magnetic pole seat 181 under the action of the magnetic field. Since multiple sealing rings 141 are arranged axially, the magnetic fluid 185 between the multiple sealing rings 141 forms a multi-stage seal, thereby improving the sealing effect. During the operation of the transmission device, the rotation of the worm gear 15 drives the light blocking plate 31 to rotate. When the gap in the light blocking plate 31 passes through the sensor 32, the sensor 32 detects the gap. The rotation speed of the worm gear 15 is calculated based on the detection of the sensor 32. At the same time, the two sensors 32 perform detection at the same time. According to the detection data of the two sensors 32, the position, rotation speed, and rotation direction of the output shaft 14 and the worm gear 15 are detected.

[0042] In summary, the present application solves the problem of the non-compact size and inconvenient installation of the custom device in the prior art by integrating the high-precision motor, worm reducer and sensor into a compact system, thereby reducing the manufacturing cost; the magnetic sealing component in the present application forms a multi-stage seal between the output shaft and the magnetic pole seat through a liquid sealing ring formed by the magnetic fluid under the action of the magnetic field, thereby improving the sealing effect of high vacuum degree, and the leakage rate is extremely low, ensuring the cleanliness of the vacuum chamber; the reduction transmission component in the present application adopts a worm gear transmission, and cooperates with the sensor component to monitor the output shaft speed in real time, thereby improving the transmission accuracy and reliability of the system, and is suitable for high-precision heavy-load sealing transmission devices. Therefore, the present application effectively overcomes the various shortcomings in the prior art and has a high industrial utilization value.

[0043] The above embodiments are merely illustrative of the principles and effects of the present application and are not intended to limit the present application. Anyone familiar with the technology may modify or change the above embodiments without violating the spirit and scope of the present application. Therefore, all equivalent modifications or changes made by those with ordinary knowledge in the technical field without departing from the spirit and technical ideas disclosed in the present application shall still be included in the protection scope of the present application.

Claims

1. An integrated vacuum transmission device, characterized in that: The invention comprises a reducer (1) and a motor (2), wherein the reducer (1) comprises a housing (11), an output shaft (14) being rotatably arranged inside the housing (11), one end of the output shaft (14) extending to the outside of the housing (11), the other end of the output shaft (14) being transmission-connected to the motor (2) via a reduction transmission assembly, a magnetic seal assembly (18) being arranged between an end of the output shaft (14) away from the motor (2) and the housing (11), the magnetic seal assembly (18) forming a dynamic seal between the output shaft (14) and the housing (11).

2. An integrated vacuum transmission device according to claim 1, characterized in that: The magnetic seal assembly (18) comprises a magnetic pole seat (181) sleeved between the outer side of the output shaft (14) and the housing (11), two magnetic pole seats (181) are provided, the two magnetic pole seats (181) are symmetrically arranged, a magnetic steel (182) is arranged between the two magnetic pole seats (181), and a magnetic fluid (185) is filled between the output shaft (14) and the magnetic pole seat (181).

3. An integrated vacuum transmission device according to claim 2, characterized in that: A plurality of sealing rings (14) are protruded and evenly spaced along the axial direction at the connection between the output shaft (14) and the magnetic pole seat (181), and a groove (184) is formed between two adjacent sealing rings (14) and the magnetic pole seat (181), and a magnetic fluid (185) is filled inside the groove (184).

4. The integrated vacuum transmission device according to claim 3, characterized in that: A sealing ring (19) is provided between the magnetic pole seat (181) and the inner wall of the housing (11).

5. The integrated vacuum transmission device according to claim 1, characterized in that: The reduction transmission assembly adopts a worm gear transmission assembly, wherein one end of the output shaft (14) close to the motor (2) is connected to a worm wheel (15), one side of the worm wheel (15) is matched with a worm (13), and the worm (13) is in transmission connection with the motor (2).

6. The integrated vacuum transmission device according to claim 1, characterized in that: A sensor assembly (3) for detecting the rotation speed of the output shaft (14) is arranged inside the reducer (1).

7. An integrated vacuum transmission device according to claim 6, characterized in that: The sensor assembly (3) comprises a light shielding sheet (31) arranged at one end of the worm gear (15) and fixedly connected to the worm gear (15); a sensor (32) is fixedly arranged on the housing (11) at a position corresponding to the light shielding sheet (31); the sensor (32) penetrates the housing (11) and is fixedly connected to the housing (11) via a mounting frame (33).

8. An integrated vacuum transmission device according to claim 7, characterized in that: At least two sensors (32) are provided, and the two sensors (32) are arranged at a set angle along the circumference of the light blocking sheet (31).

9. The integrated vacuum transmission device according to claim 1, characterized in that: An output shaft gland (17) is sleeved on the outer side of one end of the output shaft (14) connected to the magnetic seal (18); the output shaft gland (17) is fixedly connected to the housing (11); and the output shaft gland (17) is dynamically sealed to the output shaft (14).

10. The integrated vacuum transmission device according to claim 1, characterized in that: At least two bearings (16) are arranged between the output shaft (14) and the housing (11).

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