A kind of gas path transmission device and method for adsorbing and clamping thin-wall spherical shell type complex micro-component

Abstract

The application relates to a gas path transmission device and method for adsorbing and clamping a complex micro component of a thin-wall spherical shell type, and relates to a gas path transmission device and method. The application aims to solve the problems that the clamping force of a conventional negative pressure adsorption means cannot be controlled, the clamping precision is poor, the negative pressure cannot be transmitted to a rotary motion component, and the complex micro component of the thin-wall spherical shell type cannot be clamped. The device comprises a vacuum suction head and a vacuum cavity, and further comprises a negative pressure communication pipe, a workpiece shaft, a transition element, a zero-point quick change system, a gas path guide pipe, a quick change connecting piece and a clamp base; the negative pressure communication pipe, the workpiece shaft, the transition element, the zero-point quick change system, the quick change connecting piece, the clamp base, the vacuum cavity and the vacuum suction head are sequentially connected in a head-tail mode, and the transition element is connected with the clamp base through the gas path guide pipe. The application is used for stable adsorption when a complex micro component of a thin-wall spherical shell type is processed.

Description

TECHNICAL FIELD

[0001] The present application relates to a kind of complex micro-component adsorption clamping gas path transmission technology of thin-walled spherical shell, belong to the technical field of thin-walled spherical shell micro-component clamping. BACKGROUND

[0002] With the rapid development of science and technology, various high-precision, high-surface quality thin-walled spherical shell complex micro-component has been widely used in aerospace, biomedical, electronic information and other fields. The diameter of this kind of component is usually 1-5mm, the shell thickness is 20-120μm, the material is soft, and it is required to process tens of characteristic microstructures with transverse size of 50-200μm and longitudinal size of 0.5-20μm on its full surface, and it is required to achieve nanometer-level surface roughness, sub-micron-level profile accuracy and micron-level microstructure distribution pitch error. Ultra-precision milling is required to realize the processing of characteristic structure on the full surface and meet the requirements of precision and surface quality. Under the constraint of micro-space scale, the low density and soft material characteristics of complex micro-component put forward higher requirements for its clamping process and device.

[0003] The traditional chuck, spring chuck and other mechanical clamping methods for clamping macro-scale parts cannot be applied to the clamping of thin-walled spherical shell micro components due to the uncontrollable clamping force and poor clamping precision. For the clamping requirements of such components, such as high precision, small deformation and stable adsorption, a special adsorption clamp, gas transmission device and method need to be designed to meet the relationship between the clamping force and the deformation of the micro component during the milling process. When the thin-walled spherical shell micro component is adsorbed and clamped in the multi-axis linkage ultra-precision controlled shape machining system, the negative pressure needs to be dynamically adjusted according to the diameter of the thin-walled spherical shell to adjust the adsorption force, and the clamp and the thin-walled spherical shell need to maintain good contact and adsorption clamping during the rotation of the workpiece shaft and the head switching clamping process. Due to the small diameter of the thin-walled spherical shell and the large difference in diameter between the thin-walled spherical shells in the same batch, the performance of the gas transmission device and the adjustable range of the negative pressure are required to be higher and higher. In the prior art, the vacuum negative pressure adsorption is mainly used for the fixation and adjustment of the vacuum chuck of the ultra-precision machine tool, and is used for the clamping of the subsequent mechanical clamp. However, there are problems such as large clamping force, inability to dynamically adjust, and inability to transmit negative pressure to the end of the rotary motion part, which cannot be applied to the adsorption and clamping of thin-walled spherical shell micro components. How to develop an adsorption and clamping clamp for thin-walled spherical shell micro components based on a multi-axis linkage ultra-precision controlled shape machining system, and design a gas transmission system to realize stable adsorption of thin-walled spherical shell micro components during workpiece shaft rotation and head switching clamping process, is the key to thin-walled spherical shell surface feature machining, and is an important guarantee for high precision and surface quality requirements. Therefore, it is urgent to propose a gas transmission device and method for adsorption and clamping of thin-walled spherical shell complex micro components to realize stable clamping and stable and controllable removal of characteristic micro structures of thin-walled spherical shells in order to meet the clamping requirements of thin-walled spherical shells with high precision and small deformation.

[0004] The invention patent with publication number CN113695937A and filing date of September 10, 2021 discloses a vacuum adsorption clamp for clamping thin-walled spherical shell micro components, which specifically discloses a vacuum adsorption clamp body and a vacuum suction head. The vacuum adsorption clamp body is in the shape of a variable cross-section conical cylinder. The vacuum suction head is detachably connected to the adsorption end of the vacuum adsorption clamp body. The connection end of the vacuum adsorption clamp body is used to connect with the reference sheet of the zero positioning quick change device. The end of the vacuum suction head is used to adsorb the micro thin-walled spherical shell. The vacuum cavity on the vacuum adsorption clamp body along its axial direction becomes smaller in diameter from the connection end to the adsorption end. The vacuum cavity serves as the main gas source channel. The vacuum adsorption clamp body has a secondary gas source interface on the corresponding side wall near the adsorption end, which is in communication with the vacuum cavity. The vacuum channel on the vacuum suction head is coaxial and in communication with the vacuum cavity on the vacuum adsorption clamp body. However, the clamp does not have a special transition element and an inner sealing column. The negative pressure adjustment range is small. The negative pressure transmission is not stable during the rotation of the workpiece shaft. SUMMARY

[0005] To address the problems of conventional negative pressure adsorption methods, such as uncontrollable clamping force, poor clamping progress, and inability to transmit negative pressure to rotating parts, which prevent the clamping of complex and small thin-walled spherical shell components, this invention proposes a gas transmission device and method for adsorption and clamping of complex and small thin-walled spherical shell components.

[0006] The technical solution adopted by the present invention to solve the above problems is as follows: The gas transmission device for adsorption and clamping of complex and small components of squash shells of the present invention includes a vacuum suction head and a vacuum cavity, and also includes a negative pressure connecting pipe, a workpiece shaft, a transition element, a zero-point quick-change system, a gas passage pipe, a quick-change connector and a fixture base.

[0007] The negative pressure connecting pipe, workpiece shaft, transition element, zero-point quick-change system, quick-change connector, fixture base, vacuum chamber and vacuum suction head are connected end to end in sequence, and the transition element is connected to the fixture base through the air passage connecting pipe.

[0008] Furthermore, the transition element consists of a mounting plate and a cylinder;

[0009] The outer wall of the middle part of the cylinder is provided with a positioning surface, and the cylinder is provided with an air passage connection hole, which penetrates the mounting plate and the cylinder.

[0010] The upper end face of the cylinder is provided with an axial first sealing groove, and the outer side wall of the upper part of the cylinder is provided with a circumferential first sealing groove and a circumferential second sealing groove from top to bottom.

[0011] Furthermore, the upper surface of the mounting plate is provided with multiple mounting holes evenly distributed along the circumference.

[0012] Furthermore, it also includes sealing columns;

[0013] The sealing column is positioned between the vacuum chamber and the fixture base. The end face of the fixture base facing the vacuum chamber is provided with an axial second sealing groove. The outer wall of the sealing column is provided with a circumferential third sealing groove, a circumferential fourth sealing groove, and a circumferential fifth sealing groove from top to bottom.

[0014] Furthermore, the fixture base has multiple base mounting holes on the side facing away from the vacuum chamber; the fixture base has a groove on the side facing the vacuum chamber, and a gas path switching interface is provided in the groove.

[0015] The specific steps of the gas path transport method for adsorption and clamping of complex micro-components of thin-walled spherical shells described in this invention include:

[0016] Step 1: Based on the multi-axis linkage ultra-precision shape control machining system, first turn on the air compressor to generate compressed air, which is then dried and filtered by the refrigerated dryer. The compressed air is then transmitted to the vacuum generator, where it is processed to generate a vacuum negative pressure.

[0017] Step 2: Connect the negative pressure generated by the vacuum generator to the inlet end of the first negative pressure regulating valve, and lead the negative pressure from the outlet end of the first negative pressure regulating valve to the negative pressure connecting pipe;

[0018] Step 3: The vacuum negative pressure is transmitted to the top of the workpiece shaft through the internal transmission channel of the workpiece shaft, and then through the internal transmission channel of the special transition element and the air passage pipe to the vacuum adsorption fixture, forming the first negative pressure air source, which can realize the stable transmission of vacuum negative pressure during the rotation of the workpiece shaft.

[0019] Step 4: Connect the negative pressure generated by the vacuum generator to the inlet of the second negative pressure regulating valve, and directly draw the negative pressure from the outlet of the second negative pressure regulating valve. The on and off control is achieved by a knob switch to form a second negative pressure gas source for subsequent thin-walled spherical shell turning and clamping adsorption.

[0020] Step 5: The vacuum adsorption fixture base is provided with a first gas path switching interface and a second gas path switching interface. When the microstructure is initially clamped and adsorbed, the gas path guide tube is connected to the first gas path switching interface, and the negative pressure is transmitted to the vacuum suction head through the internal transmission channel of the fixture.

[0021] Step 6: After the microstructure of the hemispherical features of the complex micro-components in the thin-walled spherical shell is processed, perform the thin-walled spherical shell turning and clamping operation. Connect the second negative pressure gas source to the second gas path switching interface, open the second gas path switching interface, close the first gas path switching interface, and the second negative pressure gas source provides vacuum negative pressure for adsorption and clamping. At the same time, the first negative pressure gas source is removed by the quick-change connector of the first gas path switching interface.

[0022] Step 7: Use quick-change connectors to remove the vacuum adsorption fixture from the zero-point quick-change system and turn it around to achieve stable adsorption and clamping of complex and small thin-walled spherical shell components.

[0023] Step 8: The vacuum adsorption fixture has its vacuum suction head connected to the vacuum chamber via a sealed pipe thread, allowing for quick replacement of the vacuum suction head according to the size of complex and small components such as thin-walled spherical shells.

[0024] Furthermore, in step 2, the first negative pressure regulating valve can dynamically adjust the magnitude of the negative pressure adsorption pressure, and its adjustment range is 0 to -100 kPa; the negative pressure connecting pipe is connected to the end of the workpiece shaft through a quick-connect coupling.

[0025] Furthermore, in step 3, the special transition element achieves complete sealing with the workpiece shaft through the axial first sealing groove, the circumferential first sealing groove, and the circumferential second sealing groove; the air passage pipe is connected to the quick-change connector, and the quick-change connector is connected to the air passage connection hole of the special transition element through the sealing pipe thread; the air passage pipe is led out from the side through hole of the transition element and connected to the vacuum adsorption fixture.

[0026] Furthermore, in step 5, the gas path switching interface is located on the fixture base, and the interface can be switched on or off via a rotary switch.

[0027] The first gas path switching interface is used for initial clamping and adsorption; the second gas path switching interface is used for secondary clamping and adsorption to achieve stable adsorption and clamping when the microstructure is turned around.

[0028] During the initial clamping and adsorption, the gas path conduit is connected to the first gas path switching interface. The first gas path switching interface is opened, and the second gas path switching interface is closed. The negative pressure is connected from the first gas path switching interface to the vacuum chamber and the vacuum suction head, realizing the initial clamping and adsorption of the thin-walled spherical shell.

[0029] Furthermore, after opening the second air path switching interface and closing the first air path switching interface in step 6, the negative pressure transmission channel is switched from the first negative pressure air source passing through the internal transmission channel of the workpiece shaft to the second negative pressure air source, which facilitates the disassembly of the vacuum adsorption fixture.

[0030] The beneficial effects of this invention are:

[0031] 1. This invention addresses the problem that existing mechanical clamping methods and conventional negative pressure adsorption techniques for clamping macroscopic parts cannot meet the high-precision, low-deformation, and stable adsorption requirements of complex micro-components such as thin-walled spherical shells. It innovatively proposes a gas transmission device and method for adsorption clamping of complex micro-components such as thin-walled spherical shells. With two negative pressure gas sources and two gas path switching interfaces on the surface of the vacuum adsorption fixture, it can realize adsorption clamping during workpiece rotation and reversal clamping, meeting the high-precision, low-deformation, and stable adsorption clamping requirements of dozens of characteristic micro-structures with transverse dimensions of 50-200μm and longitudinal dimensions of 0.5-20μm on the surface of complex micro-components with diameters of 1-5mm and thin-walled spherical shells.

[0032] 2. This invention uses a high-performance Atlas Copco SF2 air compressor with a maximum working pressure of 10 bar and a discharge capacity of 0.20 m³ / s. 3 The compressed air pressure is sufficient to meet the requirements for generating negative pressure. The ZL112A vacuum generator can reach a vacuum pressure of -84 kPa, with a maximum operating pressure of 0.7 MPa and a supply pressure range of 0.2 to 0.5 MPa. It can dynamically adjust the negative pressure range from 0 to -84 kPa to meet the adsorption requirements of complex and small components such as thin-walled spherical shells.

[0033] 3. The present invention uses a special stable and sealed vacuum adsorption fixture. The vacuum suction head has an internal air transmission channel and is available in various specifications to freely match the diameter of the thin-walled spherical shell, which can realize high-precision, small-deformation, and stable adsorption and clamping of the thin-walled spherical shell.

[0034] 4. This invention has a certain degree of universality. It is not only suitable for stable adsorption during the processing of complex micro-components with thin-walled spherical shells, but can also be extended to vacuum negative pressure adsorption of other multi-configuration micro-components made of different materials, ensuring adsorption stability and thus improving processing accuracy. Attached Figure Description

[0035] Figure 1 This is a schematic diagram of a gas transmission device for adsorption and clamping of complex micro-components such as thin-walled spherical shells.

[0036] Figure 2 This is a structural schematic diagram of a dedicated transition element (the left image is a 3D view, and the right image is a cross-sectional view);

[0037] Figure 3 This is a schematic diagram of the internal air transmission path of a vacuum adsorption fixture (the left image is a 3D view, and the right image is a cross-sectional view). Detailed Implementation

[0038] Specific implementation method one: as follows Figure 1 As shown, the air transmission device for adsorption and clamping of complex micro-components such as thin-walled spherical shells includes a vacuum suction head 8 and a vacuum chamber 9, as well as a negative pressure connecting pipe 1, a workpiece shaft 2, a transition element 3, a zero-point quick-change system 4, an air passage pipe 5, a quick-change connector 6, and a fixture base 10.

[0039] The negative pressure connecting pipe 1, workpiece shaft 2, transition element 3, zero-point quick-change system 4, quick-change connector 6, fixture base 10, vacuum chamber 9 and vacuum suction head 8 are connected end to end in sequence. The transition element 3 is connected to the fixture base 10 through the air passage pipe 5.

[0040] The air compressor generates compressed air, which passes through a refrigerated dryer and a vacuum generator to generate negative pressure. The negative pressure is dynamically adjusted by a negative pressure regulating valve and transmitted to the negative pressure connecting pipe 1.

[0041] The negative pressure connecting pipe 1 is connected to the end of the workpiece shaft 2 via a quick-connect coupling, and is transmitted to the top of the workpiece shaft 2 through the internal air transmission channel of the workpiece shaft 2; the negative pressure is further led out by a special transition element, and connected to the air switching interface through the air transmission pipe 5, and the negative pressure is transmitted to the fixture base 10; it is transmitted to the vacuum suction head 8 through the vacuum chamber 9, so as to achieve stable adsorption of the workpiece 7.

[0042] The special transition element is connected to the flange mating hole at the end of the workpiece shaft 2 by an interference fit through a sealing ring, which can realize air circuit sealing and negative pressure conduction;

[0043] The transition element 3 is connected to the flange at the end of the workpiece shaft 2 by screws; the zero-point quick-change system 4 is connected to the end of the transition element 3 by screws; the vacuum suction head 8 is connected to the vacuum chamber 9 by a sealing pipe thread, and can be quickly replaced with a suction head of the appropriate size according to the diameter of the thin-walled spherical shell; the vacuum chamber 9 is connected to the fixture base 10 by threads, and the air passage is sealed by an interference fit between the sealing column and the sealing ring inside; the fixture base 10 is connected to the quick-change connector 6 by screws, and is pneumatically clamped to the zero-point quick-change system 4 by the pull stud at the end of the quick-change connector 6; the high repeatability of the pull stud and the zero-point quick-change system can ensure the high-precision secondary turning and clamping of the thin-walled spherical shell; the vacuum adsorption force is dynamically adjusted by the negative pressure regulating valve, and the negative pressure air passage transmission device can realize high-precision, small-deformation stable adsorption and clamping when processing the surface feature structure of complex micro-components such as thin-walled spherical shells with diameters of 1 to 5 mm.

[0044] Specific implementation method two: such as Figure 2 As shown, transition element 3 consists of a mounting plate and a cylinder;

[0045] The outer wall of the middle part of the cylinder is provided with a positioning surface 11, and the cylinder is provided with an air passage connection hole 16, which penetrates the mounting plate and the cylinder.

[0046] The upper end face of the cylinder is provided with an axial first sealing groove 12, and the outer side wall of the upper part of the cylinder is provided with a circumferential first sealing groove 13 and a circumferential second sealing groove 14 from top to bottom.

[0047] The transition element 3 is connected to the flange on the top of the workpiece shaft 2 by bolts through the mounting hole 15, and is axially positioned by the positioning surface 11; an O-ring is placed in the first axial sealing groove to achieve axial sealing between the transition element and the workpiece shaft.

[0048] The first circumferential sealing groove 13 and the second circumferential sealing groove 14 are filled with O-rings to achieve circumferential sealing between the special transition element and the workpiece; the air passage pipe is connected to the air passage connection hole 16 by the sealing pipe thread through the quick-change connector to conduct negative pressure.

[0049] Specific implementation method three: such as Figure 2 As shown, the upper surface of the mounting plate is provided with multiple mounting holes 15 evenly distributed along the circumference.

[0050] Specific implementation method four: such as Figure 3 As shown, it also includes a sealing column 19;

[0051] The sealing column 19 is disposed between the vacuum chamber 9 and the fixture base 10. The end face of the fixture base 10 facing the vacuum chamber 9 is provided with an axial second sealing groove 18. The outer wall of the sealing column 19 is provided with a circumferential third sealing groove 20, a circumferential fourth sealing groove 21 and a circumferential fifth sealing groove 22 from top to bottom.

[0052] Specific implementation method five: such as Figure 3 As shown, the fixture base 10 has multiple base mounting holes 23 on the side facing away from the vacuum chamber 9; the fixture base 10 has a groove on the side facing the vacuum chamber 9, and a gas path switching interface 24 is provided in the groove.

[0053] The internal gas transmission path of the vacuum adsorption fixture is shown in the diagram below. Figure 3 As shown. The fixture base 10 is connected to the quick-change connector by bolts through the base mounting holes;

[0054] The vacuum chamber 9 is connected to the fixture base 10 by bolts through the chamber mounting hole 17, and the axial sealing between the vacuum chamber and the fixture base is achieved by the axial second sealing groove 18 with an O-ring.

[0055] O-rings are placed inside the third circumferential sealing groove 20, the fourth circumferential sealing groove 21 and the fifth circumferential sealing groove 22 on the surface of the sealing column 19 to achieve circumferential sealing between the vacuum chamber and the fixture base;

[0056] The clamp base 10 is connected to the quick-change connector 6 by bolts through the base mounting hole 23. Its surface is provided with an air path switching interface 24 for stable adsorption of the thin-walled spherical shell during initial clamping and reversal clamping.

[0057] The vacuum nozzle 8 is connected to the vacuum chamber 9 via a sealing pipe thread to ensure the airtightness of the gas transmission process;

[0058] Workpiece 7 is adsorbed onto vacuum suction head 8 by negative pressure, realizing high-precision, small-deformation, and stable adsorption and clamping during the processing of surface features of complex micro-components with thin-walled spherical shells.

[0059] Specific implementation method six: such as Figures 1 to 3 As shown, the gas transmission method for adsorption and clamping of complex micro-components such as thin-walled spherical shells specifically includes:

[0060] Step 1: Based on the multi-axis linkage ultra-precision shape control machining system, first turn on the air compressor to generate compressed air, which is then dried and filtered by the refrigerated dryer. The compressed air is then transmitted to the vacuum generator, where it is processed to generate a vacuum negative pressure.

[0061] Step 2: Connect the negative pressure generated by the vacuum generator to the inlet end of the first negative pressure regulating valve, and lead the negative pressure from the outlet end of the first negative pressure regulating valve to the negative pressure connecting pipe;

[0062] Step 3: The vacuum negative pressure is transmitted to the top of the workpiece shaft through the internal transmission channel of the workpiece shaft, and then through the internal transmission channel of the special transition element and the air passage pipe to the vacuum adsorption fixture, forming the first negative pressure air source, which can realize the stable transmission of vacuum negative pressure during the rotation of the workpiece shaft.

[0063] Step 4: Connect the negative pressure generated by the vacuum generator to the inlet of the second negative pressure regulating valve, and directly draw the negative pressure from the outlet of the second negative pressure regulating valve. The on and off control is achieved by a knob switch to form a second negative pressure gas source for subsequent thin-walled spherical shell turning and clamping adsorption.

[0064] Step 5: The vacuum adsorption fixture base is provided with a first gas path switching interface and a second gas path switching interface. When the microstructure is initially clamped and adsorbed, the gas path guide tube is connected to the first gas path switching interface, and the negative pressure is transmitted to the vacuum suction head through the internal transmission channel of the fixture.

[0065] Step 6: After the microstructure of the hemispherical features of the complex micro-components in the thin-walled spherical shell is processed, perform the thin-walled spherical shell turning and clamping operation. Connect the second negative pressure gas source to the second gas path switching interface, open the second gas path switching interface, close the first gas path switching interface, and the second negative pressure gas source provides vacuum negative pressure for adsorption and clamping. At the same time, the first negative pressure gas source is removed by the quick-change connector of the first gas path switching interface.

[0066] Step 7: Use quick-change connectors to remove the vacuum adsorption fixture from the zero-point quick-change system and turn it around to achieve stable adsorption and clamping of complex and small thin-walled spherical shell components.

[0067] Step 8: The vacuum adsorption fixture, with the vacuum suction head 8 connected to the vacuum chamber 9 via a sealed pipe thread, allows for quick replacement of the vacuum suction head according to the size of complex and small components such as thin-walled spherical shells.

[0068] In step 1, the air compressor is an Atlas Copco SF2, with a maximum operating pressure of 10 bar and a discharge capacity of 0.20 m³ / s. 3 / min, which can well meet the compressed air conditions required for negative pressure generation;

[0069] In step 1, the refrigerated air dryer is model IDFA3E-23-G manufactured by SMC Corporation. This refrigerated air dryer has a rated inlet air temperature and pressure of 35℃ and 0.7Mpa, respectively, and can achieve cooling and drying of compressed air.

[0070] In step 1, the vacuum generator is model SMC ZL112A, with a maximum vacuum pressure of -84kPa, a maximum operating pressure of 0.7MPa, and a supply pressure range of 0.2 to 0.5MPa. It can achieve dynamic adjustment within the negative pressure range of 0 to -84kPa, meeting the adsorption requirements of complex micro-components such as thin-walled spherical shells.

[0071] In step 7, the vacuum adsorption fixture is disassembled from the zero-point quick-change system and then installed on the hydraulic shaft matching quick-change system of the multi-axis linkage ultra-precision shape control machining system. The program further controls the multi-axis linkage to achieve high-precision machining of the remaining feature structure after the complex micro-components of thin-walled spherical shells are turned around and clamped.

[0072] In step 8, the vacuum suction head has an internal air transmission channel and comes in various specifications to freely match the diameter of the thin-walled spherical shell, so as to achieve high-precision, small-deformation, and stable adsorption and clamping of the thin-walled spherical shell.

[0073] Specific implementation method seven: such as Figures 1 to 3 As shown, in step 2, the first negative pressure regulating valve can dynamically adjust the magnitude of the negative pressure adsorption pressure, and its adjustment range is 0 to -100 kPa; the negative pressure connecting pipe is connected to the end of the workpiece shaft through a quick-connect coupling.

[0074] Specific implementation method eight: such as Figures 1 to 3 As shown, in step 3, the special transition element 3 achieves complete sealing with the workpiece shaft 2 through the axial first sealing groove 12, the circumferential first sealing groove 13, and the circumferential second sealing groove 14; the air passage pipe 5 is connected to the quick-change connector 6, and the quick-change connector 6 is connected to the air passage connection hole of the special transition element 3 through the sealing pipe thread; the air passage pipe 5 is led out from the side through hole of the transition element 3 and connected to the vacuum adsorption fixture.

[0075] Specific implementation method nine: as follows Figures 1 to 3 As shown, in step 5, the gas path switching interface 24 is located on the fixture base and the interface can be switched on and off via a rotary switch.

[0076] The first gas path switching interface is used for initial clamping and adsorption; the second gas path switching interface is used for secondary clamping and adsorption to achieve stable adsorption and clamping when the microstructure is turned around.

[0077] During the initial clamping and adsorption, the gas path guide tube 5 is connected to the first gas path switching interface. The first gas path switching interface is opened and the second gas path switching interface is closed. The negative pressure is connected from the first gas path switching interface to the vacuum chamber 9 and the vacuum suction head 8 to achieve the initial clamping and adsorption of the thin-walled spherical shell.

[0078] Specific implementation method ten: such as Figures 1 to 3 As shown, after opening the second air path switching interface and closing the first air path switching interface in step 6, the negative pressure transmission channel is switched from the first negative pressure air source passing through the internal transmission channel of the workpiece shaft to the second negative pressure air source, which facilitates the disassembly of the vacuum adsorption fixture.

[0079] Working principle

[0080] The aforementioned air transmission device and method for adsorption and clamping of complex micro-components such as thin-walled spherical shells is based on a multi-axis linkage ultra-precision shape control machining system. Compressed air is generated by an air compressor, and an adjustable negative pressure is produced by a refrigerated dryer and a vacuum generator. This negative pressure is then transmitted to the vacuum suction head of the vacuum adsorption fixture via an air transmission channel and an air switching interface. This ensures stable transmission of vacuum negative pressure during the workpiece's axial rotation, achieving high-precision, low-deformation, and stable adsorption and clamping of dozens of characteristic microstructures with transverse dimensions of 50-200 μm and longitudinal dimensions of 0.5-20 μm on the surface of complex micro-components such as thin-walled spherical shells with diameters of 1-5 mm.

[0081] When vacuum adsorption fixtures adsorb complex and minute components such as thin-walled spherical shells, they mainly achieve this by forming a circumferential contact between the vacuum suction head and the thin-walled spherical shell, creating a sealed space within the vacuum cavity. A negative pressure P is generated by a negative pressure gas source, which in turn generates an equivalent adsorption force F. a :

[0082]

[0083] In the above formula, k is the effective adsorption coefficient, the value of which depends on the type of materials in contact, and is generally taken as 0.9; C is the unit conversion factor, where the units of the parameters in the above formula are taken as MPa, mm, etc. 2 When N is used, C takes the value of 1; N is the adsorption clamping safety factor. When clamped horizontally, N≥4; when clamped vertically, N≥8; S is the effective adsorption area. When a thin-walled spherical shell with a diameter of D is adsorbed onto a vacuum adsorption fixture, the diameter of its limited adsorption area is 0.8D; the vacuum adsorption force required for stable adsorption clamping of complex micro-components such as thin-walled spherical shells by a vacuum adsorption fixture is:

[0084]

[0085] Furthermore, the vacuum negative pressure required for stable adsorption of complex micro-components such as thin-walled spherical shells can be obtained:

[0086]

[0087] Example

[0088] Step 1: Obtain the equivalent adsorption force F through finite element simulation. a =88mN. For a thin-walled spherical shell with a diameter D = 1mm, its effective adsorption area S is 0.16π. Further, the required vacuum negative pressure of 77.81kPa can be obtained from formula ③.

[0089] Step 2: Turn on the air compressor and refrigerated dryer, connect the first negative pressure air source to the first air path switching interface of the vacuum adsorption fixture, adjust the negative pressure regulating valve to -77.81kPa, install the workpiece, achieve stable adsorption, and the program-controlled processing system completes the processing of the thin-walled spherical shell weak hemispherical crown feature structure.

[0090] Step 3: Connect the second negative pressure gas source to the second gas path switching interface of the vacuum adsorption fixture and open it, close the first gas path switching interface, and the second negative pressure gas source provides vacuum negative pressure to maintain stable adsorption of the thin-walled spherical shell;

[0091] Step 4: After disassembling the vacuum adsorption fixture from the zero-point quick-change system, install it onto the hydraulic shaft matching quick-change system to achieve stable adsorption of the thin-walled spherical shell. The program-controlled machining system completes the machining of the remaining feature structures on the surface of the complex micro-component of the thin-walled spherical shell.

[0092] The above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention in any way. Although the present invention has been disclosed above with reference to preferred embodiments, it is not intended to limit the present invention. Any person skilled in the art can make some modifications or alterations to the above-disclosed technical content to create equivalent embodiments without departing from the scope of the present invention. Any simple modifications, equivalent substitutions, and improvements made to the above embodiments without departing from the scope of the present invention, based on the technical essence of the present invention and within the spirit and principles of the present invention, shall still fall within the protection scope of the present invention.

Claims

1. A gas transmission device for adsorption and clamping of complex micro-components such as thin-walled spherical shells, comprising a vacuum suction head (8) and a vacuum chamber (9), characterized in that, It also includes a negative pressure connecting pipe (1), a workpiece shaft (2), a transition element (3), a zero-point quick-change system (4), an air passage connecting pipe (5), a quick-change connector (6), and a fixture base (10). The negative pressure connecting pipe (1), workpiece shaft (2), transition element (3), zero point quick change system (4), quick change connector (6), fixture base (10), vacuum chamber (9) and vacuum suction head (8) are connected in sequence. The transition element (3) is connected to the fixture base (10) through the air passage connecting pipe (5). The transition element (3) consists of a mounting plate and a cylinder; The outer wall of the middle part of the cylinder is provided with a positioning surface (11), and the cylinder is provided with an air passage connection hole (16), which penetrates the mounting plate and the cylinder; The upper end face of the cylinder is provided with an axial first sealing groove (12), and the outer side wall of the upper part of the cylinder is provided with a circumferential first sealing groove (13) and a circumferential second sealing groove (14) from top to bottom. Multiple mounting holes (15) are evenly distributed along the circumference on the upper surface of the mounting plate. It also includes a sealing column (19); the sealing column (19) is disposed between the vacuum chamber (9) and the fixture base (10), and the end face of the fixture base (10) facing the vacuum chamber (9) is provided with an axial second sealing groove (18), and the outer wall of the sealing column (19) is provided with a circumferential third sealing groove (20), a circumferential fourth sealing groove (21) and a circumferential fifth sealing groove (22) from top to bottom. The fixture base (10) has multiple base mounting holes (23) on the side facing away from the vacuum chamber (9); the fixture base (10) has a groove on the side facing the vacuum chamber (9), and a gas path switching interface (24) is provided in the groove.

2. A gas transmission method for adsorption and clamping of complex micro-components such as thin-walled spherical shells, characterized in that, The method is based on the gas transmission device for adsorption and clamping of complex micro-components such as thin-walled spherical shells as described in claim 1, and specifically includes: Step 1: Based on the multi-axis linkage ultra-precision shape control machining system, first turn on the air compressor to generate compressed air, which is then dried and filtered by the refrigerated dryer. The compressed air is then transmitted to the vacuum generator, where it is processed to generate a vacuum negative pressure. Step 2: Connect the negative pressure generated by the vacuum generator to the inlet end of the first negative pressure regulating valve, and lead the negative pressure from the outlet end of the first negative pressure regulating valve to the negative pressure connecting pipe; Step 3: The vacuum negative pressure is transmitted to the top of the workpiece shaft through the internal transmission channel of the workpiece shaft, and then through the internal transmission channel of the special transition element and the air passage pipe to the vacuum adsorption fixture, forming the first negative pressure air source, which can realize the stable transmission of vacuum negative pressure during the rotation of the workpiece shaft. Step 4: Connect the negative pressure generated by the vacuum generator to the inlet of the second negative pressure regulating valve, and directly draw the negative pressure from the outlet of the second negative pressure regulating valve. The on and off control is achieved by a knob switch to form a second negative pressure gas source for subsequent thin-walled spherical shell turning and clamping adsorption. Step 5: The vacuum adsorption fixture base is provided with a first gas path switching interface and a second gas path switching interface. When the microstructure is initially clamped and adsorbed, the gas path guide tube is connected to the first gas path switching interface, and the negative pressure is transmitted to the vacuum suction head through the internal transmission channel of the fixture. Step 6: After the microstructure of the hemispherical features of the complex micro-components in the thin-walled spherical shell is processed, perform the thin-walled spherical shell turning and clamping operation. Connect the second negative pressure gas source to the second gas path switching interface, open the second gas path switching interface, close the first gas path switching interface, and the second negative pressure gas source provides vacuum negative pressure for adsorption and clamping. At the same time, the first negative pressure gas source is removed by the quick-change connector of the first gas path switching interface. Step 7: Use quick-change connectors to remove the vacuum adsorption fixture from the zero-point quick-change system and turn it around to achieve stable adsorption and clamping of complex and small thin-walled spherical shell components. Step 8: The vacuum adsorption fixture, the vacuum suction head (8) is connected to the vacuum cavity (9) through a sealed pipe thread, and the vacuum suction head can be quickly replaced according to the size of the complex and small components of the thin-walled spherical shell; In step 2, the first negative pressure regulating valve can dynamically adjust the magnitude of the negative pressure adsorption pressure, and its adjustment range is 0~-100kPa; the negative pressure connecting pipe is connected to the end of the workpiece shaft through a quick-connect coupling; In step 3, the special transition element (3) achieves complete sealing with the workpiece shaft (2) through the axial first sealing groove (12), the circumferential first sealing groove (13), and the circumferential second sealing groove (14); the air passage pipe (5) is connected to the quick-change connector (6), and the quick-change connector (6) is connected to the air passage connection hole of the special transition element (3) through the sealing pipe thread; the air passage pipe (5) is led out from the side through hole of the transition element (3) and connected to the vacuum adsorption fixture; In step 5, the gas path switching interface (24) is located on the fixture base and can be controlled by a rotary switch to open or close the interface. The first gas path switching interface is used for initial clamping and adsorption; the second gas path switching interface is used for secondary clamping and adsorption to achieve stable adsorption and clamping when the microstructure is turned around. During the initial clamping and adsorption, the gas path connecting pipe (5) is connected to the first gas path switching interface. The first gas path switching interface is opened and the second gas path switching interface is closed. The negative pressure is connected from the first gas path switching interface to the vacuum chamber (9) and the vacuum suction head (8) to realize the initial clamping and adsorption of the thin-walled spherical shell. After opening the second air path switching interface and closing the first air path switching interface in step 6, the negative pressure transmission channel is switched from the first negative pressure air source passing through the internal transmission channel of the workpiece shaft to the second negative pressure air source, which facilitates the disassembly of the vacuum adsorption fixture.

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