Valve for vacuum coating machine

Abstract

The valve for the vacuum coating machine comprises a valve body, supporting plates are arranged on the two sides of the top of the valve body correspondingly, limiting rods are arranged on the surfaces of the opposite sides of the supporting plates correspondingly, a linear air cylinder is arranged between the limiting rods, and a transmission rack is arranged at the telescopic end of the linear air cylinder; a transmission gear is arranged on one side of the transmission rack in an engaged mode. According to the valve for the vacuum coating machine, the arranged linear air cylinder is externally connected into an intelligent control system, an instruction is set through a program to control the linear air cylinder to operate, and the linear air cylinder drives a transmission rack to reciprocate, so that a transmission gear is driven to rotate in a reciprocating mode through meshing; the transmission gear drives the transmission rod to reciprocate at a certain angle, so that force is applied to the connecting seat to pull the connecting seat, finally, the valve element is driven to move to open and close the valve body, traditional manual operation is replaced, and efficiency and automation degree are effectively improved.

Description

Technical Field

[0001] The present invention relates to the technical field of vacuum coating machines, and in particular to a valve used in vacuum coating machines. Background Art

[0002] Vacuum coating machine mainly refers to a type of coating that needs to be carried out under a higher vacuum degree. There are many specific types, including vacuum resistance heating evaporation, electron gun heating evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition, ion beam sputtering and many other types. The main idea is to divide it into evaporation and sputtering. The substrate to be coated is called the substrate, and the material to be plated is called the target material. The substrate and the target material are in the same vacuum chamber. The valve is the control component in the fluid delivery system, which has the functions of cut-off, regulation, diversion, prevention of backflow, voltage stabilization, diversion or overflow pressure relief. The valve is an indispensable and important component in the vacuum coating machine.

[0003] The existing vacuum coating machine valves are generally opened and closed manually, resulting in a heavy workload for staff and a low degree of automation. At the same time, the opening and closing operations are time-consuming and labor-intensive, greatly reducing the efficiency of production and processing. At the same time, it is impossible to control the opening and closing degree according to the actual needs of production and processing, and the control accuracy of the fluid volume is poor, which greatly affects the overall quality of production and processing. Summary of the invention

[0004] The object of the present invention is to provide a valve for a vacuum coating machine to solve the problem mentioned in the above background technology that the valves of the existing vacuum coating machines are generally opened and closed manually, resulting in a large workload for the staff and a low degree of automation. At the same time, the opening and closing operations are also time-consuming and labor-intensive, which greatly reduces the efficiency of production and processing. At the same time, it is impossible to control the opening and closing degree according to the actual needs of production and processing, and the control accuracy of the fluid volume is poor, which greatly affects the overall quality of production and processing.

[0005] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: a valve for a vacuum coating machine, comprising a valve body, support plates are provided on both sides of the top of the valve body, limit rods are provided on the surfaces of the opposite sides of the support plates, a linear cylinder is provided between the limit rods, a transmission rack is provided at the telescopic end of the linear cylinder, a transmission gear is meshed with one side of the transmission rack, a transmission rod is provided at the shaft of the transmission gear near the bottom, a valve cavity is provided on the inner side of the valve body, a valve core is movably provided on the inner side of the valve cavity, and a connecting seat is provided on one side of the valve core.

[0006] Preferably, a connecting slot is provided on the top of the connecting seat, and the inner side of the connecting slot is slidably engaged with the bottom of one end of the transmission rod.

[0007] Preferably, rollers are arranged at the four corners of the valve core near the bottom, and guide pulleys are symmetrically arranged on both side surfaces of the top of the valve core, and the number of guide pulleys is respectively set in two groups.

[0008] Preferably, the outer surface of the transmission gear is covered with a protective shell, and the surface of one side of the protective shell is arranged as an open structure at the meshing position between the transmission gear and the transmission rack.

[0009] Preferably, both side surfaces of the valve body are provided with valve ports which are arranged through the valve body, the shape of the valve ports is circular, and the valve ports are symmetrically arranged along the two side surfaces of the valve body.

[0010] Preferably, one side surface of the valve body is arranged as an opening structure, and a sealing plate is arranged on the outer side surface of the opening structure of the valve body.

[0011] Preferably, the surface of the sealing plate and the outer edge surface of the valve body opening structure are both surrounded by positioning screw holes, and positioning screws are penetrated through the inner sides of the positioning screw holes.

[0012] Compared with the prior art, the present invention has the following beneficial effects:

[0013] This valve for a vacuum coating machine, during daily use, the present invention connects the set linear cylinder to an intelligent control system, controls the linear cylinder to operate through program setting instructions, drives the transmission rack to move back and forth through the linear cylinder, thereby driving the transmission gear to rotate back and forth through meshing, and drives the transmission rod to move back and forth at a certain angle through the transmission gear, thereby applying a pulling force to the connecting seat, and finally driving the valve core to move to open and close the valve body, replacing traditional manual operation, effectively improving efficiency and automation, and reducing work intensity and time cost.

[0014] This valve for a vacuum coating machine can set the telescopic stroke of the linear cylinder in real time according to the actual needs of production and processing during daily use, and can control the opening and closing degree of the valve body in real time, thereby achieving real-time adjustment and control of the flow rate and flow volume of the fluid, thereby making the overall production and processing more accurate and effectively improving the overall quality of production and processing. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a front view of the present invention;

[0016] Figure 2 It is a schematic diagram of the internal structure of the present invention;

[0017] Figure 3 It is a schematic structural diagram of the sealing plate part of the present invention.

[0018] In the figure: 1. Protective shell; 2. Linear cylinder; 3. Sealing plate; 4. Support plate; 5. Valve body; 6. Limit rod; 7. Valve port; 8. Transmission rack; 9. Transmission gear; 10. Transmission rod; 11. Connecting slide groove; 12. Guide pulley; 13. Valve core; 14. Roller; 15. Positioning screw; 16. Positioning screw hole; 17. Connecting seat; 18. Valve chamber. DETAILED DESCRIPTION

[0019] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0020] like Figure 1-Figure 3As shown, the present invention provides a technical solution: a valve for a vacuum coating machine, including a valve body 5, which is a main component of the valve; there are different mechanical manufacturing methods according to the pressure level, such as casting, forging, etc., the valve body of medium and low pressure specifications is usually produced by casting technology, and the valve body of medium and high pressure specifications is produced by forging technology, which can effectively withstand the medium pressure after forming a seal with the valve core and the valve seat sealing ring, and the telescopic stroke of the linear cylinder 2 can be set in real time according to the actual production and processing needs, and the opening and closing degree of the valve body 5 can be controlled in real time. The control can realize the real-time adjustment and control of the flow rate and flow amount of the fluid, so that the overall production and processing accuracy is higher. Support plates 4 are arranged on both sides of the top of the valve body 5, and limit rods 6 are arranged on the surface of the opposite side of the support plate 4, which can support and limit the linear cylinder 2 to avoid shaking and dislocation of the linear cylinder 2 during the transmission process, and effectively improve the overall stability of the linear cylinder 2. The linear cylinder 2 is arranged between the limit rods 6. The model of this linear cylinder can be HFD25X80, which is a cylindrical metal part that guides the piston to perform linear reciprocating motion in the cylinder.Air converts heat energy into mechanical energy by expanding in the engine cylinder, and the gas is compressed by the piston in the compressor cylinder to increase the pressure. The shell of a turbine, a rotary piston engine, etc. is also usually called a "cylinder". The application areas of the cylinder: printing tension control, semiconductors, spot welding machines, chip grinding, automatic control, robots, etc. A transmission rack 8 is provided at the telescopic end of the linear cylinder 2, and a transmission gear 9 is provided on one side of the transmission rack 8. The gear rack will have its own unique movement characteristics during the transmission process. The gear transmission is used to transmit the motion and power between any two axes. Its circumferential speed can reach 300m / s, the transmission power can reach 105KW, and the gear diameter can range from less than 1mm to more than 150m. It is the most widely used mechanical transmission in modern machinery. The gear rack transmission and belt transmission have the characteristics of large power transmission and high efficiency. The gear transmission has the characteristics of long life, stable operation, high reliability, constant transmission ratio, and can transmit the motion between any two axes at any angle. A transmission rod 10 is provided near the bottom of the shaft of the moving gear 9. The linear cylinder 2 is connected to the intelligent control system through a signal line, and the control system is used to set program instructions to control the linear cylinder 2 to operate. The linear cylinder 2 drives the transmission rack 8 to move back and forth, so that the transmission rack 8 is engaged and drives the transmission gear 9 to rotate back and forth. The transmission gear 9 drives the transmission rod 10 to move back and forth at a certain angle, so that a force is applied to the connecting seat 17 to pull, and finally the valve core 13 is driven to move to open and close the valve body 5, replacing the traditional manual operation, effectively improving the efficiency and automation level. A valve cavity 18 is provided on the inner side of the valve body 5, so that the valve core 13 can have a movable space for movement, so as to realize the opening and closing of the valve body 5. The inner side of the valve cavity 18 is movably provided with a valve core 13. The valve core 13 is a device for controlling the direction, pressure and flow of the fluid in the fluid system. A valve is a device that allows the medium (liquid, gas, powder) in pipes and equipment to flow or stop and control its flow rate. It can seal the valve body 5, thereby effectively controlling the flow amount and flow rate of the fluid. A connecting seat 17 is provided on one side of the valve core 13, and the valve core 13 and the transmission rod 10 can be connected and transmitted, so that the valve core 13 can be pulled and moved by applying force. A connecting groove 11 is provided on the top of the connecting seat 17, and the inner side of the connecting groove 11 is slidably engaged with the bottom of one end of the transmission rod 10, so that there is a movable space between the transmission rod 10 and the connecting seat 17, avoiding the problem of rigid blocking and breakage during the force application process.

[0021] Rollers 14 are provided at the four corners of the valve core 13 near the bottom, which can make the valve core 13 move more smoothly, change the sliding contact to rolling to reduce friction, effectively reduce the loss between components, and greatly extend the service life of the components. Guide pulleys 12 are symmetrically provided on the two side surfaces of the top of the valve core 13, and the number of guide pulleys 12 is respectively provided in two groups, which can play a limiting and guiding role for the valve core 13 to avoid the displacement and misalignment of the valve core 13 during the movement process, and at the same time reduce the contact friction between the valve core 13 and the inner wall of the valve body 5 during the movement process, and avoid the problem of jamming between the valve core 13 and the valve body 5. The outer surface of the transmission gear 9 is covered with a protective shell 1, which can cover and protect the transmission gear 9 to avoid the transmission gear 9 being completely exposed to the outside world and being eroded and damaged, and the surface of one side of the protective shell 1 and the meshing position of the transmission gear 9 and the transmission rack 8 are set to an open structure, so that the transmission gear 9 and the transmission rack 8 can move forward. The valve body 5 is in a contact and meshing state, and is prevented from being completely blocked and cut off by obstruction, so as to prevent effective transmission. Both side surfaces of the valve body 5 are provided with valve openings 7 which are through-set. The shape of the valve openings 7 is set to be circular, and the valve openings 7 are symmetrically arranged along the two side surfaces of the valve body 5, so that the valve body 5 can maintain a through state, thereby ensuring that the fluid can flow smoothly and normally. One side surface of the valve body 5 is set to an opening structure, and the outer surface of the opening structure of the valve body 5 is provided with a sealing plate 3, which can seal the valve body 5 and facilitate opening and disassembly at a later time, making the inspection and maintenance faster and more efficient. The surface of the sealing plate 3 and the outer edge surface of the opening structure of the valve body 5 are surrounded by positioning screw holes 16, and the inner side of the positioning screw holes 16 are penetrated by positioning screws 15, so that the sealing plate 3 and the valve body 5 can be plugged in and fixed together in real time, so as to avoid the sealing plate 3 automatically falling off and separating during long-term use, which may cause leakage of the valve body 5 as a whole.

[0022] Working principle: When it is necessary to operate the vacuum coating machine for production and processing, the valve can be first installed as a whole at the corresponding fluid flow control position of the vacuum coating machine, and fixed and limited by bolts, and then the linear cylinder 2 is connected to the intelligent control system through a signal line, and the program is set through the control system to control the linear cylinder 2 to operate, and the linear cylinder 2 drives the transmission rack 8 to move back and forth, thereby driving the transmission gear 9 to rotate back and forth through the meshing of the transmission rack 8, and the transmission rod 10 is driven by the transmission gear 9 to reciprocate at a certain angle, so as to apply force to the connecting seat 17, and finally drive the valve core 13 to move to realize the opening and closing of the valve body 5, replacing the traditional manual operation, effectively improving the efficiency and automation level, and at the same time, the telescopic stroke of the linear cylinder 2 can be set in real time according to the actual production and processing needs, and the opening and closing degree of the valve body 5 can be controlled in real time, so as to realize real-time adjustment and control of the flow rate and flow amount of the fluid, so that the overall production and processing accuracy is higher.

[0023] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A valve for a vacuum coating machine, comprising a valve body (5), characterized in that: Support plates (4) are provided on both sides of the top of the valve body (5), and limit rods (6) are provided on the surfaces of the opposite sides of the support plates (4). A linear cylinder (2) is provided between the limit rods (6), and a transmission rack (8) is provided at the telescopic end of the linear cylinder (2). A transmission gear (9) is meshed with one side of the transmission rack (8), and a transmission rod (10) is provided near the bottom of the shaft of the transmission gear (9). A valve cavity (18) is provided on the inner side of the valve body (5), and a valve core (13) is movably provided on the inner side of the valve cavity (18), and a connecting seat (17) is provided on one side of the valve core (13).

2. A valve for a vacuum coating machine according to claim 1, characterized in that: A connecting slide groove (11) is provided on the top of the connecting seat (17), and the inner side of the connecting slide groove (11) is slidably engaged with the bottom of one end of the transmission rod (10).

3. The valve for a vacuum coating machine according to claim 1, characterized in that: Rollers (14) are arranged at the four corners of the valve core (13) near the bottom, and guide pulleys (12) are symmetrically arranged on both side surfaces of the top of the valve core (13), and the number of guide pulleys (12) is respectively arranged in two groups.

4. The valve for a vacuum coating machine according to claim 1, characterized in that: The outer surface of the transmission gear (9) is covered with a protective shell (1), and the surface of one side of the protective shell (1) is arranged as an open structure at the meshing position between the transmission gear (9) and the transmission rack (8).

5. The valve for a vacuum coating machine according to claim 1, characterized in that: Both side surfaces of the valve body (5) are provided with valve ports (7) extending therethrough. The shape of the valve ports (7) is circular, and the valve ports (7) are symmetrically arranged along the two side surfaces of the valve body (5).

6. The valve for a vacuum coating machine according to claim 1, characterized in that: One side surface of the valve body (5) is arranged as an opening structure, and a sealing plate (3) is arranged on the outer side surface of the opening structure of the valve body (5).

7. The valve for a vacuum coating machine according to claim 6, characterized in that: The surface of the sealing plate (3) and the outer edge surface of the opening structure of the valve body (5) are both surrounded by positioning screw holes (16), and positioning screws (15) are penetrated through the inner sides of the positioning screw holes (16).

Images