Quickly assembled and disassembled sealing port for quartz vacuum tube furnace

Abstract

The invention relates to a rapid disassembly and assembly sealing port for a quartz vacuum tube furnace. The rapid disassembly and assembly sealing port for the quartz vacuum tube furnace comprises a fixing ring, a fixing end cover, a buckle assembly and a port electrode. The fixing ring is arranged at the end part of the quartz tube. The fixing end cover is detachably arranged on the fixing ring, and a sealing ring is arranged between the fixing end cover and the fixing ring. The plurality of buckle assemblies are uniformly distributed along the edge of the fixed end cover, and each buckle assembly comprises a hook buckle and is used for quickly fixing the fixed end cover on the fixed ring so as to seal the quartz tube. And the port electrode is arranged in the fixed end cover and is used for particles generated by glow discharge to fly attached gas on the wall of the quartz tube, the fixed end cover and the surface of the material so as to reduce gas adsorption.

Description

Technical Field

[0001] The invention relates to the technical field of vacuum processing, and in particular to a quick-disassembly and assembly sealing port for a quartz vacuum tube furnace. Background Art

[0002] The quartz tube vacuum furnace is a commonly used vacuum processing equipment. Since the quartz tube can withstand high temperatures of thousands of degrees and maintain a certain rigidity, it can also maintain good air tightness and chemical stability under high temperature conditions without cooling, and maintain a high vacuum degree inside. Therefore, the quartz tube is suitable for processes such as annealing, sintering, crystal growth, and chemical vapor deposition of materials. It is widely used in the production of semiconductors, ceramics, and high-purity materials, and has precise temperature control and efficient vacuum processing capabilities.

[0003] The vacuum sealing mechanism of a quartz tube furnace is usually composed of two parts, including an end cap installed on the end face of the quartz tube for sealing, and a flange sleeved on the end of the quartz tube for fixing the end cap. A rubber sealing ring is placed between the two, and a balanced pressure is applied to the sealing ring using multiple bolts to ensure that there is no leakage gap between the end cap and the flange. However, in order to ensure the sealing performance of the quartz tube, 6-10 bolts are often required for fixing, and each bolt includes multiple parts such as screws, washers and nuts. Tools are required for installation and removal, which is time-consuming and labor-intensive. Daily operations are relatively complicated and cumbersome, and parts are easily lost or forgotten. At the same time, since high-purity semiconductor materials are extremely sensitive to impurities, gas molecules are one of the potential sources of impurities. In the vacuum tube, if gas molecules are adsorbed on the quartz tube wall, end cap or other surfaces, these gases may be released during the material purification process, contaminating the material surface or mixing into the material, resulting in unnecessary doping of the material, affecting the chemical purity and electrical properties of the material, and causing a decrease in the material processing qualification rate. Summary of the invention

[0004] The purpose of the present invention is to provide a quick-disassembly and assembly sealing port for a quartz vacuum tube furnace, which can achieve the sealing of the quartz tube by arranging multiple snap-fit ​​assemblies on the end cover to buckle the end cover on the fixed ring, without using other tools, and is convenient and quick to operate. It can be operated by one person and there will be no loss of parts. At the same time, by arranging a port electrode in the fixed end cover and applying a voltage to the port electrode, a glow discharge is generated between the surface of the port electrode and the fixed end cover. The glow discharge generates particles that knock off the quartz tube wall, the fixed end cover and the attached gas on the surface of the material to reduce gas adsorption, thereby improving the purity of the material and ensuring the qualified rate.

[0005] To achieve the above object, the present invention provides a quick disassembly and assembly sealing port for a quartz vacuum tube furnace, comprising:

[0006] A fixing ring is arranged at the end of the quartz tube;

[0007] A fixed end cover is detachably arranged on the fixed ring, and a sealing ring is arranged between the fixed end cover and the fixed ring;

[0008] A plurality of buckle assemblies are evenly distributed along the edge of the fixed end cover, and the buckle assemblies include hook buckles for quickly fixing the fixed end cover on the fixed ring to seal the quartz tube;

[0009] The port electrode is arranged in the fixed end cap and is used for generating particles by glow discharge to knock off the quartz tube wall, the fixed end cap and the attached gas on the surface of the material to reduce gas adsorption.

[0010] Optionally, two terminals for connecting to a power source are disposed on the outer side of the fixed end cover, and the terminals penetrate through the fixed end cover, extend into the fixed end cover, and are connected to the port electrodes.

[0011] Optionally, a fixing ring is provided at one end of the fixing ring away from the quartz tube, and a plurality of fixing grooves are evenly provided along the circumferential direction at the edge of the fixing end cover.

[0012] Optionally, the buckle assembly further includes:

[0013] A fixed rotating shaft is arranged in the corresponding fixed groove, and the hook buckle is rotatably arranged on the fixed rotating shaft;

[0014] A connecting spring is arranged between one end of the hook buckle and the bottom of the fixing groove;

[0015] A fastening nut, threadedly connected to one end of the hook buckle;

[0016] The buckle assembly is configured such that when the fastening nut is tightened, the other end of the hook buckle is clamped on the fixing ring to fix the fixed end cover.

[0017] Optionally, an insulating material is used to encapsulate the terminal post and the fixed end cover to ensure vacuum sealing and insulation of the quartz tube.

[0018] Optionally, the voltage applied to the port electrode ranges from 600V to 900V.

[0019] Optionally, when a voltage is applied to the port electrode, the pressure of the vacuum environment in the quartz tube is reduced to between 100Pa-10Pa.

[0020] Optionally, the port electrode is an aluminum ring electrode.

[0021] Optionally, the fastening nut is a butterfly nut.

[0022] The beneficial effects of the present invention are as follows: by arranging a plurality of snap-fit ​​assemblies on the end cover, the end cover is buckled on the fixed ring to achieve sealing of the quartz tube, no other tools are needed, the operation is convenient and quick, and can be operated by a single person, and there is no possibility of loss of parts; at the same time, by arranging a port electrode in the fixed end cover and applying a voltage to the port electrode, a glow discharge is generated between the surface of the port electrode and the fixed end cover, and the particles generated by the glow discharge knock off the quartz tube wall, the fixed end cover and the attached gas on the surface of the material to reduce gas adsorption, thereby improving the purity of the material and ensuring the qualified rate.

[0023] The above description is only an overview of the technical solution of the present invention. In order to more clearly understand the technical means of the present invention and implement it according to the contents of the specification, the following is a detailed description of the preferred embodiments of the present invention in conjunction with the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 This is a schematic top view of a quick disassembly and assembly sealing port for a quartz vacuum tube furnace according to an embodiment of the present invention;

[0025] Figure 2 A schematic bottom view of a quick disassembly and assembly sealing port for a quartz vacuum tube furnace according to an embodiment of the present invention;

[0026] Figure 3 This is a schematic structural diagram of a buckle assembly for a quick disassembly and assembly sealing port of a quartz vacuum tube furnace shown in one embodiment of the present invention when being fastened;

[0027] Figure 4 This is a schematic structural diagram of a buckle assembly for a quick disassembly and assembly sealing port of a quartz vacuum tube furnace shown in one embodiment of the present invention when it is released;

[0028] In the figure: 1. fixing ring; 11. fixing ring; 2. fixing end cover; 3. snap assembly; 31. hook snap; 32. fixing groove; 33. connecting spring; 34. fastening nut; 4. port electrode; 41. terminal. DETAILED DESCRIPTION

[0029] The technical solution of the present invention will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0030] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0031] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected" and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal connection of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances. In addition, the technical features involved in the different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0032] See also Figures 1 to 4 A quick disassembly and assembly sealing port for a quartz vacuum tube furnace shown in a preferred embodiment of the present application includes a fixed ring 1, a fixed end cover 2, a buckle assembly 3 and a port electrode 4. The fixed ring 1 is arranged at the end of the quartz tube. The fixed end cover 2 is detachably arranged on the fixed ring 1, and a sealing ring is arranged between the fixed end cover 2 and the fixed ring 1. The plurality of buckle assemblies 3 are evenly distributed along the edge of the fixed end cover 2, and the buckle assembly 3 includes a hook buckle 31, which is used to quickly fix the fixed end cover 2 on the fixed ring 1 to seal the quartz tube. The port electrode 4 is arranged in the fixed end cover 2, and is used for glow discharge to generate particles to knock off the quartz tube wall, the fixed end cover 2 and the attached gas on the surface of the material to reduce gas adsorption.

[0033] According to the scheme of the embodiment of the present invention, by arranging a plurality of buckle assemblies 3 on the end cap, the end cap is buckled on the fixed ring 1 to achieve the sealing of the quartz tube, without the use of other tools, the operation is convenient and quick, and can be operated by a single person, and there will be no loss of parts; at the same time, by arranging the port electrode 4 in the fixed end cap 2 and applying voltage to the port electrode 4, a glow discharge is generated between the surface of the port electrode 4 and the fixed end cap 2, and the glow discharge generates particles to fly the quartz tube wall, the fixed end cap 2 and the attached gas on the surface of the material to reduce gas adsorption, thereby improving the purity of the material and ensuring the qualified rate. It should be noted that some high-purity semiconductor materials (such as Te, Ge, Si, Bi, Sb) are very sensitive to trace impurities, and reducing gas adsorption in the quartz tube has a significant effect on improving product purity and improving the qualified rate of high-purity materials.

[0034] The following is a detailed description with specific embodiments:

[0035] See also Figure 1 , Figure 2 and Figure 4 The fixed end cap 2 is provided with two terminals 41 for connecting to a power source on its outer side, and the terminals 41 penetrate through the fixed end cap 2 and extend into the fixed end cap 2 to connect to the port electrode 4. Specifically, in this embodiment, the fixed end cap 2 is made of 304 stainless steel, which has a stable surface under vacuum conditions and is not easy to absorb gas, thereby reducing gas absorption during the vacuum processing of the material.

[0036] The terminal 41 and the fixed end cap 2 are encapsulated with insulating material to ensure the vacuum sealing and insulation of the quartz tube. The electrode interface (i.e., the terminal 41) is insulated and encapsulated to ensure electrical and vacuum sealing. Specifically, in the present embodiment, the port electrode 4 is an aluminum ring electrode. The voltage applied to the port electrode 4 ranges from 600V to 900V. When a voltage is applied to the port electrode 4, the air pressure of the vacuum environment in the quartz tube is reduced to between 100Pa and 10Pa. By applying a voltage to the port electrode 4, a glow discharge is generated between the surface of the port electrode 4 and the fixed end cap 2. The discharge particles bombard the quartz tube wall, the fixed end cap 2 and the surface of the material, thereby knocking off the attached gas in the quartz tube, thereby reducing the gas adsorption during the vacuum processing of the material.

[0037] See also Figure 2 and Figure 3 The end of the fixed ring 1 away from the quartz tube is provided with a fixed ring 11, and the edge of the fixed end cover 2 is evenly provided with a plurality of fixed grooves 32 along the circumferential direction. It should be noted that the fixed end cover 2 and the fixed ring 1 are made of high temperature resistant stainless steel, and cooling water is passed through the inside of both, so as to ensure that when the material is heated, the sealing ring between the fixed end cover 2 and the fixed ring 1 will not be overheated to affect the vacuum seal.

[0038] See also Figure 3 The buckle assembly 3 also includes a fixed shaft, a connecting spring 33 and a fastening nut 34. The fixed shaft is arranged in the corresponding fixing groove 32, and the hook buckle 31 is rotatably arranged on the fixed shaft. The connecting spring 33 is arranged between one end of the hook buckle 31 and the bottom of the fixing groove 32, and the fastening nut 34 is threadedly connected with one end of the hook buckle 31. The buckle assembly 3 is arranged so that when the fastening nut 34 is tightened, the other end of the hook buckle 31 is clamped on the fixing ring 11 to fix the fixed end cover 2. When the fastening bolt is in a loose state, one end of the hook buckle 31 is biased toward the center of the fixed end cover 2 under the tension of the connecting spring 33, and the other end of the corresponding hook buckle 31 is tilted away from the fixed end cover 2. At this time, the fixed end cover 2 is brought close to the fixing ring 11 of the fixing ring 1, and then the other end of the hook buckle 31 is clamped on the fixing ring 11, and the fastening bolt is tightened to lock the hook buckle 31, so that the fixed end cover 2 is fixed on the fixing ring 1 and the sealing ring is clamped to achieve vacuum sealing. Similarly, after unscrewing the fastening bolt, the hook buckle 31 will return to its original position under the action of the spring. At this time, if the vacuum inside the quartz tube leaks, the fixing ring 1 and the end cover will automatically slip off to complete the removal of the fixed end cover 2. Specifically, the fastening nut 34 is a butterfly nut, which is easy to manually screw, making the installation and removal of the fixed end cover 2 more convenient.

[0039] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0040] The above-mentioned embodiments only express several implementation methods of the present invention, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of the invention patent. It should be pointed out that, for ordinary technicians in this field, several variations and improvements can be made without departing from the concept of the present invention, and these all belong to the protection scope of the present invention. Therefore, the protection scope of the patent of the present invention shall be subject to the attached claims.

Claims

1. A quick disassembly and assembly sealing port for a quartz vacuum tube furnace, characterized in that: include: A fixing ring is arranged at the end of the quartz tube; A fixed end cover is detachably arranged on the fixed ring, and a sealing ring is arranged between the fixed end cover and the fixed ring; A plurality of buckle assemblies are evenly distributed along the edge of the fixed end cover, and the buckle assemblies include hook buckles for quickly fixing the fixed end cover on the fixed ring to seal the quartz tube; The port electrode is arranged in the fixed end cap and is used for generating particles by glow discharge to knock off the quartz tube wall, the fixed end cap and the attached gas on the surface of the material to reduce gas adsorption.

2. The quick disassembly and assembly sealing port for a quartz vacuum tube furnace according to claim 1, characterized in that: Two terminals for connecting to a power source are arranged on the outer side of the fixed end cover, and the terminals penetrate through the fixed end cover, extend into the fixed end cover and are connected to the port electrodes.

3. The quick disassembly and assembly sealing port for a quartz vacuum tube furnace according to claim 1, characterized in that: A fixing ring is arranged at one end of the fixing ring away from the quartz tube, and a plurality of fixing grooves are evenly arranged on the edge of the fixing end cover along the circumferential direction.

4. The quick disassembly and assembly sealing port for a quartz vacuum tube furnace according to claim 3, characterized in that: The buckle assembly also includes: A fixed rotating shaft is arranged in the corresponding fixed groove, and the hook buckle is rotatably arranged on the fixed rotating shaft; A connecting spring is arranged between one end of the hook buckle and the bottom of the fixing groove; A fastening nut, threadedly connected to one end of the hook buckle; The buckle assembly is configured such that when the fastening nut is tightened, the other end of the hook buckle is clamped on the fixing ring to fix the fixed end cover.

5. The quick disassembly and assembly sealing port for a quartz vacuum tube furnace according to claim 2, characterized in that: The terminal and the fixed end cover are packaged with insulating material to ensure vacuum sealing and insulation of the quartz tube.

6. The quick disassembly and assembly sealing port for a quartz vacuum tube furnace according to claim 5, characterized in that: The voltage applied to the port electrode ranges from 600V to 900V.

7. The quick disassembly and assembly sealing port for a quartz vacuum tube furnace according to claim 6, characterized in that: When a voltage is applied to the port electrode, the pressure of the vacuum environment in the quartz tube is reduced to between 100Pa and 10Pa.

8. The quick disassembly and assembly sealing port for a quartz vacuum tube furnace according to any one of claims 6 and 7, characterized in that: The port electrode is an aluminum ring electrode.

9. The quick disassembly and assembly sealing port for a quartz vacuum tube furnace according to claim 4, characterized in that: The fastening nut is a butterfly nut.

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