Automated material handling control system and method based on overhead crane path planning algorithm

Abstract

The present invention discloses an automated material handling control system and method based on an overhead crane path planning algorithm, and belongs to the technical field of workshop overhead crane scheduling. The system includes a monitoring module, a workshop management module, a model analysis module, a path confirmation module, an overhead crane intelligent control module, a database and an overhead crane; the monitoring module is used to monitor the overhead crane in the track; the workshop management module is used to establish a weighted directed graph about the wafer workshop track, and determine the constant motion duration of each connecting edge path in the weighted directed graph; the model analysis module is used to analyze the influence of different overhead crane congestion degrees on the wafer transport time deviation; the path confirmation module is used to determine the best idle overhead crane and the best path for wafer transport tasks; the overhead crane intelligent control module is used to control the determined best idle overhead crane to perform the wafer transport task according to the planned best path; the database is used to store historical monitoring data and historical traffic congestion data.

Description

Technical Field

[0001] The present invention relates to the technical field of workshop crane scheduling, and in particular to an automated material handling control system and method based on a crane path planning algorithm. Background Art

[0002] Overhead crane management in wafer workshop is an automated material handling system, which includes an aerial transportation system for transporting wafers within the factory. These systems usually include tracks, overhead cranes and related control and scheduling software, and play a critical role in wafer fabs. Among them, overhead cranes are automated carts for transporting materials, running on fixed tracks with a fixed direction. Transportation by overhead cranes not only improves production efficiency, but also reduces the risk of contamination by reducing manual handling, thereby ensuring the continuity and stability of the production process.

[0003] In the management of overhead cranes in wafer workshops, overhead cranes are used to transport materials, and the movement path of the overhead cranes in the wafer workshop is optimized through advanced algorithms to reduce waiting time. However, it is limited to the laying of tracks. In fact, in the factory material transportation process, there is only a clear task end point, and the starting point of the overhead crane movement needs to be calculated by the overhead crane that can currently execute the task; and in the actual calculation process, there are multiple overhead cranes participating in the task calculation, and the system cannot determine which overhead crane is the most suitable one at the moment; the existing technology performs path planning through track weights, but does not take into account the impact of track section congestion on the movement of the overhead crane when there are multiple overhead cranes, resulting in an increase in the actual material transportation time, affecting the transportation efficiency. Summary of the invention

[0004] The object of the present invention is to provide an automated material handling control system and method based on an overhead crane path planning algorithm to solve the problems raised in the above background technology.

[0005] In order to solve the above technical problems, the present invention provides the following technical solutions: an automated material handling control method based on an overhead crane path planning algorithm, the method comprising the following steps:

[0006] S10, monitoring the overhead cranes in the track, collecting the motion change data of each task overhead crane in the track; the overhead cranes include each task overhead crane and each idle overhead crane; the task overhead crane refers to the overhead crane that is performing a wafer transport task; the idle overhead crane refers to the overhead crane without a wafer transport task; wherein, when a task overhead crane completes the wafer transport task, the collected motion change data of the task overhead crane in the track is stored in the database as historical monitoring data; the motion change data includes the motion duration of the overhead crane at each track side;

[0007] S20, respectively record the number of times the anti-collision device of each task crane is triggered during each wafer transport task and the number of traffic jams of other task cranes when the anti-collision device is triggered, and store them in the database as historical traffic jam data;

[0008] S30, establishing a weighted directed graph about the wafer workshop track, and determining the constant motion duration of each connecting edge path in the weighted directed graph according to the historical monitoring data;

[0009] S40. Based on historical monitoring data and historical traffic congestion data, a traffic congestion impact analysis model is established to fit a regression curve of the impact of overhead crane congestion on wafer transport time deviation, and analyze the impact of different overhead crane congestion levels on wafer transport time deviation;

[0010] S50, when there is a wafer transport task, determining the end point of the wafer transport task and the position point of the weighted directed graph plane where each idle overhead crane is located; determining the best idle overhead crane and the best path for performing the wafer transport task according to the weighted directed graph plane nodes where each idle overhead crane is located and the end point of the wafer transport task;

[0011] S60, controlling the determined optimal idle overhead crane to perform the wafer transport task according to the planned optimal path; wherein the idle overhead crane performing the wafer transport task is changed to a task overhead crane until the task overhead crane completes the wafer transport task and then changes its state to an idle overhead crane again.

[0012] An automated material handling control system based on an overhead crane path planning algorithm, the system includes a monitoring module, a workshop management module, a model analysis module, a path confirmation module, an overhead crane intelligent control module, a database and an overhead crane;

[0013] The monitoring module is used to monitor the overhead crane in the track, collect the movement change data of each task overhead crane in the track, and respectively record the number of times the anti-collision device of each task overhead crane is triggered during each wafer transport task and the number of traffic jams of other task overhead cranes when the anti-collision device is triggered each time; the workshop management module is used to establish a weighted directed graph about the wafer workshop track, and determine the constant motion duration of each connecting edge path in the weighted directed graph; the model analysis module is used to establish a traffic jam impact analysis model, fit the regression relationship curve of the impact of the overhead crane congestion degree on the wafer transport time deviation, and analyze the impact of different overhead crane congestion degrees on wafer transport. The influence of time deviation; the path confirmation module is used to determine the end point of the wafer transport task and the position point of the weighted directed graph plane where each idle overhead crane is located, and determine the best idle overhead crane and the best path for the wafer transport task; the overhead crane intelligent control module is used to control the determined best idle overhead crane to perform the wafer transport task according to the planned best path; the database is used to store historical monitoring data and historical traffic congestion data; an anti-collision device is installed in the overhead crane; the anti-collision device is used to monitor whether the task overhead crane will collide with other task overhead cranes, and when the task overhead crane will collide with other task overhead cranes, the task overhead crane is controlled to slow down or stop.

[0014] Compared with the prior art, the beneficial effects achieved by the present invention are as follows: by establishing a traffic congestion impact analysis model, fitting a regression relationship curve of the influence of overhead crane congestion degree on material transportation time deviation, analyzing the influence of different overhead crane congestion degrees on material transportation time deviation, thereby improving the accuracy of overhead crane path planning and the adaptability to different path planning scenarios; by calculating different paths from each idle overhead crane to the task end point, and based on the movement changes of each current task overhead crane in the track, predicting the total task duration, determining the optimal path, reducing the waiting time during the material transportation task, and improving the material transportation efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a schematic diagram of the steps of the automatic material handling control method based on the overhead crane path planning algorithm of the present invention;

[0016] Figure 2 It is a structural schematic diagram of an automated material handling control system based on an overhead crane path planning algorithm of the present invention. DETAILED DESCRIPTION

[0017] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0018] See also Figure 1-2 , the present invention provides a technical solution:

[0019] See also Figure 1 In the first embodiment, an automated material handling control method based on an overhead crane path planning algorithm is provided, the method comprising the following steps:

[0020] S10. Monitor the overhead cranes in the track and collect the motion change data of each task overhead crane in the track; the overhead cranes include each task overhead crane and each idle overhead crane; the task overhead crane refers to an overhead crane that is performing a wafer transport task; the idle overhead crane refers to an overhead crane that has no wafer transport task; wherein, when a task overhead crane completes a wafer transport task, the collected motion change data of the task overhead crane in the track are stored in the database as historical monitoring data; the motion change data includes the motion duration of the overhead crane at each track side.

[0021] Furthermore, the track includes track edges and track nodes; the track nodes include track path bifurcation points; and the track edges are used to connect the track nodes.

[0022] It should be noted that the overhead crane refers to an automated vehicle for transporting wafers, which moves unidirectionally on a fixed track; when the overhead crane moves along the track and a track intersection appears, the straight movement and turning of the overhead crane are controlled by controlling the guide wheels of the overhead crane; wherein the number of each track edge is not less than 2, and the number of each track node is not less than 1.

[0023] S20, respectively record the number of times the anti-collision device of each task crane is triggered during each wafer transport task and the number of traffic jams of other task cranes when the anti-collision device is triggered, and store them in the database as historical traffic jam data.

[0024] Furthermore, an anti-collision device is installed in the overhead crane; the anti-collision device is used to monitor whether the task overhead crane will collide with other task overhead cranes, and when the task overhead crane will collide with other task overhead cranes, the task overhead crane is controlled to slow down or stop;

[0025] The movement of the mission overhead crane in the track is divided into normal traffic and traffic congestion; the normal traffic means that the anti-collision device of the mission overhead crane is not triggered during the movement of the track; the traffic congestion means that the anti-collision device of the mission overhead crane is triggered during the movement of the track;

[0026] When the anti-collision device is triggered and controls the task overhead crane to slow down or stop, the next track node to which the corresponding task overhead crane is headed by the anti-collision device is determined, and the number of other task overhead cranes triggered by the anti-collision device at the track node is determined;

[0027] The number of times the anti-collision device of each task crane is triggered during each wafer transport task and the number of traffic jams of other task cranes when the anti-collision device is triggered are recorded respectively, and stored in the database as historical traffic jam data;

[0028] It should be noted that the anti-collision device is triggered when the task crane performs the wafer transport task only when there are other task cranes around. Therefore, each time the anti-collision device is triggered, the number of traffic jams of other task cranes is not less than 1.

[0029] S30. Establish a weighted directed graph about the wafer workshop track, and determine the constant motion duration of each connecting edge path in the weighted directed graph based on historical monitoring data.

[0030] Specifically, the method steps are:

[0031] A weighted directed graph about the wafer workshop track is established, the track nodes are used as plane nodes of the weighted directed graph, the number of plane nodes is determined, the track edges are used as connecting edges between plane nodes, and the number of connecting edges n is determined;

[0032] The time when the head of the task crane enters the track side is taken as the start time, and the time when the head of the task crane exits the track side is taken as the end time. The duration from the start time to the end time is taken as the movement duration of the task crane passing through the track side. The movement changes of each task crane when the track side is normal are selected from the historical monitoring data, and the movement duration sets A1, A2, ..., A2 of each task crane passing through the track side when the track side is normal are obtained. n ; According to the set A1, A2, ..., A n , respectively determine the constant motion duration w1, w2, ..., w of each track side path n ; Among them, the constant motion duration of each track side path satisfies the conditional formula:

[0033]

[0034] Among them, A i It represents the set of movement durations of each task crane passing through the track side when the traffic on the i-th track side is normal; Respectively represent the set A i The duration of the overhead travelling vehicle passing through the track side when the traffic on the ith track side is normal; r i Represents the set A i The number of data in; i = 1, 2, ..., n; s = 1, 2, ..., r i ;w i represents the constant motion duration of the ith track edge path; ais Represents the set A i The duration of the sth movement in Z i It represents the index value reflecting the accuracy of the constant motion duration of the i-th track side path.

[0035] It should be noted that the crane moves in one direction on a fixed track, so the crane head is the front part of the crane in the direction of the crane's movement; due to the influence of other environmental factors, the movement time of the crane passing the track side for each task analyzed will generally be different. By calculating the square difference between the constant movement time of the track side path and the analysis data, Z i The smaller it is, the more accurate the determined constant motion duration of the track side path is; wherein, the constant motion duration of the track side path can be used as the path weight of the track side.

[0036] S40. Based on historical monitoring data and historical traffic congestion data, a traffic congestion impact analysis model is established, a regression relationship curve of the impact of overhead crane congestion degree on wafer transport time deviation is fitted, and the impact of different overhead crane congestion degrees on wafer transport time deviation is analyzed.

[0037] Specifically, the method steps are:

[0038] The historical monitoring data and historical traffic jam data are analyzed to obtain the total task duration of each task crane when performing the wafer transport task, the number of times the anti-collision device is triggered, and the number of traffic jams of other task cranes when the anti-collision device is triggered each time. The theoretical task duration of each wafer transport task is determined according to the moving path of each task crane during the task process, and the set B is obtained; wherein B={B1, ​​B2, ..., B x};

[0039] Among them, B1, B2, ..., B x Including the theoretical total task duration of different task cranes when performing wafer transport tasks, the total task duration and the number of other task crane traffic jams under the corresponding number of anti-collision device triggering times; T represents the theoretical task duration corresponding to the kth execution of the wafer transfer task; k represents the total task duration of the kth wafer transfer task; They respectively represent the number of traffic jams of other task cranes when the kth wafer transport task is executed under the corresponding number of times the anti-collision device is triggered; x represents the number of times the task crane performs the wafer transport task based on the analysis of historical monitoring data and historical traffic jam data; y k represents the number of times the anti-collision device is triggered when the wafer transfer task is performed for the kth time; k = 1, 2, ..., x;

[0040] It should be noted that each overhead crane mission has its corresponding moving path.

[0041] in, ∑w k It represents the sum of the constant motion duration of the task crane passing through each track edge in the moving path when performing the wafer transfer task for the kth time;

[0042] A traffic jam impact analysis model is established. According to the set B, the number of traffic jams of other task cranes when the anti-collision device is triggered during the task crane's execution is taken as the independent variable, and the wafer transfer time deviation TT is calculated. 0 As the dependent variable, the regression relationship curve of the effect of overhead crane congestion degree on wafer transport time deviation is fitted:

[0043] TT 0 =β1c1+β2c2+...+β q c q +∈;

[0044] Among them, β1, β2, ..., β q They represent the influence weights of different overhead crane congestion levels on the wafer transfer time deviation; ∈ represents the error term; c1, c2, ..., c q They represent the frequency of occurrence of different overhead crane blockage levels during wafer transfer; q represents the overhead crane blockage level;

[0045] The number of overhead cranes blocked by other tasks when the anti-collision device is triggered during the task crane's task execution is used as different overhead crane blocking degrees, and the number of overhead crane blocking degrees is the same as the number of overhead cranes blocked by other tasks when the anti-collision device is triggered;

[0046] According to B k In Determine the occurrence frequency c of different overhead crane blockage levels when performing the k-th wafer transfer task k1 、c k2 , ..., c kq ,Will and c k1 、c k2 , ..., c kq Substitute them into the regression relationship curve for training until all the data in set B are substituted, and obtain β1, β2, ..., β q and the numerical value of ∈.

[0047] It can be understood that by fitting the regression relationship curve of the influence of the overhead crane congestion degree on the wafer transfer time deviation, the corresponding wafer transfer time deviation after completing the transfer task at different overhead crane congestion frequency during the overhead crane execution process is calculated respectively, and the influence weight of each overhead crane congestion degree is obtained, so as to predict the subsequent total task duration and improve the accuracy of data analysis.

[0048] S50. When there is a wafer transport task, determine the end point of the wafer transport task and the position point of the weighted directed graph plane where each idle overhead crane is located; determine the best idle overhead crane and the best path for performing the wafer transport task according to the weighted directed graph plane nodes where each idle overhead crane is located and the end point of the wafer transport task.

[0049] Specifically, the method steps are:

[0050] According to the wafer transport task, determine the weighted directed graph plane position point P0 where the wafer transport task end point is located, and determine the weighted directed graph plane position points P1, P2, ..., P u ; Where u represents the current number of idle overhead cranes;

[0051] According to the plane position points in the weighted directed graph, based on the path planning algorithm, different path sets D1, D2, ..., D3 from each idle overhead crane to P0 are determined respectively. u ;

[0052] Among them, D v Represents the plane position point P v A set of different paths from the idle overhead travelling vehicle to P0; v = 1, 2, ..., u; Respectively represent the set D v Different paths in F u Denotes the set D v The number of path types in ;

[0053] Determine the initial time for executing the wafer transport task, and determine the plane position point of the weighted directed graph corresponding to the initial time of each task crane performing the wafer transport task based on the collected motion change data of each task crane in the track. According to the optimal path planned by each task crane, predict the change of the plane position point of each task crane in the weighted directed graph with the motion duration; according to the set D1, D2, ..., D u The constant motion duration of different paths and each track side path in the weighted directed graph is used to predict the change of the position points of the idle overhead crane corresponding to each path in the weighted directed graph plane with the motion duration when performing the wafer transfer task;

[0054] According to the obtained β1, β2, ..., β qand∈ values, combined with the above analysis, determine the frequencies of different overhead crane congestion levels when the idle overhead cranes corresponding to the wafer transport task and the overhead cranes of each task in the current track are blocked under different paths, and obtain the optimal path d0 for the current wafer transport task; make d0 satisfy the conditional formula:

[0055]

[0056] where d0∈D1,D2,...,D u ; They represent the frequency of occurrence of different overhead crane congestion levels when the corresponding path is d0; ΔT represents the wafer transfer time deviation corresponding to the path d0; T 总 Indicates the predicted total task duration when reflecting path d0; The path d0 represents the sum of the constant motion time of the idle crane passing through each track side;

[0057] It should be noted that each task crane is controlled to move according to its own best path planned in advance. According to the change of the plane position point of each task crane in the weighted directed graph with the movement time and the change of the plane position point of the weighted directed graph of the corresponding idle crane under each path with the movement time, a time window is allocated on each plane node and connecting edge in the weighted directed graph, and the best paths of all cranes are analyzed. Based on the conflict detection algorithm, their overlapping areas in space are determined. For each overlapping area in space, it is checked whether the time windows of the cranes overlap, and it is judged whether the triggering condition of the anti-collision device is met. If the triggering condition is met, the number of cranes that meet the triggering condition is determined respectively as the number of traffic congestion of other task cranes, and finally the frequency of occurrence of different crane congestion degrees under each path is determined; wherein, when determining the frequency of occurrence of different crane congestion degrees, the path corresponding to the idle crane and the path of each task crane only triggers the collision device once, and the condition for triggering the collision device once is the first plane node corresponding to the possible spatial and temporal overlap.

[0058] Understandable, through The theoretical task duration under different paths is calculated, and the wafer transport duration deviation ΔT under the corresponding path is calculated to predict the total task duration under the corresponding path. Taking into account the impact of overhead crane congestion on the total task duration during the wafer transport task, the planned path is more reasonable and the material transport efficiency is improved.

[0059] It should be noted that the calculation and ∑w k When the corresponding overhead crane and the task end point are not at the track node, the corresponding overhead crane and the task end point should be considered. and ∑w kIt is necessary to calculate the sum of the time from the corresponding overhead crane plane position point to the first track node and the time from the last track node to the mission end point, plus the movement time of each track edge passed; at this time, according to the ratio of the movement path length to the total path length on its corresponding track, determine the sum of the time from the corresponding overhead crane plane position point to the first track node and the time from the last track node to the mission end point.

[0060] According to the optimal path d0, the optimal idle overhead crane for the wafer transfer task is determined.

[0061] S60, controlling the determined optimal idle overhead crane to perform the wafer transport task according to the planned optimal path; wherein the idle overhead crane performing the wafer transport task is changed to a task overhead crane until the task overhead crane completes the wafer transport task and then changes its state to an idle overhead crane again.

[0062] In this embodiment:

[0063] Monitor the overhead crane in the track and collect the movement change data of each task overhead crane in the track; when a task overhead crane completes the wafer transfer task, the collected movement change data of the task overhead crane in the track is stored in the database as historical monitoring data;

[0064] The number of times the anti-collision device of each task crane is triggered during each wafer transport task and the number of traffic jams of other task cranes when the anti-collision device is triggered are recorded respectively, and stored in the database as historical traffic jam data; wherein, when a task crane completes the wafer transport task, the collected movement change data of the task crane in the track is stored in the database as historical monitoring data;

[0065] Establish a weighted directed graph about the wafer workshop track; use the track nodes as the plane nodes of the weighted directed graph, determine the number of plane nodes m=15, use the track edges as the connecting edges between the plane nodes, and determine the number of connecting edges n=50;

[0066] The movement changes of each task crane when passing through different track sides normally are screened out from the historical monitoring data, and the movement time sets A1, A2, ..., A2 of each task crane when passing through different track sides normally are obtained. 50 ; According to the set A1, A2, ..., A 50 , respectively determine the constant motion duration w1, w2, ..., w of each track side path 50 ; Among them, the constant motion duration of each track side path satisfies the conditional formula:

[0067]

[0068] The historical monitoring data and historical traffic jam data are analyzed, and the number of wafer transfer tasks analyzed is x=2000, and a set B is obtained; where B={B1, B2, ..., B 2000};

[0069] A traffic congestion impact analysis model is established. Based on set B, a regression curve of the impact of overhead crane congestion on wafer transport time deviation is fitted:

[0070] TT 0 =β1c1+β2c2+...+β q c q +∈;

[0071] The number of other task cranes blocked when the anti-collision device is triggered during the task crane's mission is used as different crane blockage levels; k In Get the number of occurrences of different overhead crane congestion levels, and determine the occurrence frequency c of different overhead crane congestion levels when performing the k-th wafer transfer task. k1 、c k2 , ..., c kq ,Will and c k1 、c k2 , ..., c kq Substitute them into the regression relationship curve for training respectively; substitute the data in set B into the regression relationship curve in turn to determine β1, β2, ..., β q and the numerical values ​​of ∈;

[0072] At a certain moment, when there is a wafer transport task, determine the weighted directed graph plane position point P0 where the wafer transport task end point is located, the current idle crane number value u=10, and determine the weighted directed graph plane position points P1, P2, ..., P 10 ; Based on the path planning algorithm, determine the different path sets D1, D2, ..., D of each idle crane from the corresponding plane position point to P0 10 ;

[0073] Determine the initial time for executing the wafer transport task, and determine the plane position point of the weighted directed graph corresponding to the initial time of each task crane performing the wafer transport task based on the collected motion change data of each task crane in the track. According to the optimal path planned by each task crane, predict the change of the plane position point of each task crane in the weighted directed graph with the motion duration; according to the set D1, D2, ..., D 10The constant motion duration of different paths in the track and each track side path is used to predict the change of the position points of the idle cranes corresponding to each path in the weighted directed graph plane with the motion duration when performing the wafer transport task; the frequency of different crane congestion degrees when the idle cranes corresponding to the wafer transport task and the cranes of each task in the current track are determined respectively under different paths, and the optimal path d0 of the current wafer transport task is obtained; d0 satisfies the conditional formula:

[0074]

[0075] According to d0, the corresponding optimal idle overhead crane is determined, and the determined optimal idle overhead crane is controlled to perform the wafer transport task according to the planned optimal path; wherein, the state of the idle overhead crane performing the wafer transport task is changed to the task overhead crane, until the task overhead crane completes the wafer transport task, and the state is changed back to the idle overhead crane.

[0076] See also Figure 2 , in this implementation 2: an automated material handling control system based on an overhead crane path planning algorithm is provided, the system comprising a monitoring module, a workshop management module, a model analysis module, a path confirmation module, an overhead crane intelligent control module, a database and an overhead crane;

[0077] The monitoring module is used to monitor the overhead crane in the track, collect the movement change data of each task overhead crane in the track, and respectively record the number of times the anti-collision device of each task overhead crane is triggered during each wafer transport task and the number of traffic jams of other task overhead cranes when the anti-collision device is triggered each time; the workshop management module is used to establish a weighted directed graph about the wafer workshop track, and determine the constant motion duration of each connecting edge path in the weighted directed graph; the model analysis module is used to establish a traffic jam impact analysis model, fit the regression relationship curve of the impact of the overhead crane congestion degree on the wafer transport time deviation, and analyze the impact of different overhead crane congestion degrees on wafer transport. The influence of time deviation; the path confirmation module is used to determine the end point of the wafer transport task and the position point of the weighted directed graph plane where each idle overhead crane is located, and determine the best idle overhead crane and the best path for the wafer transport task; the overhead crane intelligent control module is used to control the determined best idle overhead crane to perform the wafer transport task according to the planned best path; the database is used to store historical monitoring data and historical traffic congestion data; an anti-collision device is installed in the overhead crane; the anti-collision device is used to monitor whether the task overhead crane will collide with other task overhead cranes, and when the task overhead crane will collide with other task overhead cranes, the task overhead crane is controlled to slow down or stop.

[0078] In this embodiment: the monitoring module is interconnected with the database; the database is interconnected with the workshop management module; the database is interconnected with the model analysis module; the workshop management module is interconnected with the path confirmation module; the model analysis module is interconnected with the path confirmation module; the path confirmation module is interconnected with the overhead crane intelligent control module.

[0079] Finally, it should be noted that the above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or replace some of the technical features therein by equivalents. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. An automated material handling control method based on an overhead crane path planning algorithm, characterized in that: The method comprises the following steps: S10, monitoring the overhead cranes in the track, collecting the motion change data of each task overhead crane in the track; the overhead cranes include each task overhead crane and each idle overhead crane; the task overhead crane refers to the overhead crane that is performing a wafer transport task; the idle overhead crane refers to the overhead crane without a wafer transport task; wherein, when a task overhead crane completes the wafer transport task, the collected motion change data of the task overhead crane in the track is stored in the database as historical monitoring data; the motion change data includes the motion duration of the overhead crane at each track side; S20, respectively record the number of times the anti-collision device of each task crane is triggered during each wafer transport task and the number of traffic jams of other task cranes when the anti-collision device is triggered, and store them in the database as historical traffic jam data; S30, establishing a weighted directed graph about the wafer workshop track, and determining the constant motion duration of each connecting edge path in the weighted directed graph according to the historical monitoring data; S40. Based on historical monitoring data and historical traffic congestion data, a traffic congestion impact analysis model is established to fit a regression curve of the impact of overhead crane congestion on wafer transport time deviation, and analyze the impact of different overhead crane congestion levels on wafer transport time deviation; Specifically, the method steps are: S401. Analyze historical monitoring data and historical traffic jam data to obtain the total task duration of each task crane when performing wafer transport tasks, the number of times the anti-collision device is triggered, and the number of traffic jams of other task cranes when the anti-collision device is triggered each time. Determine the theoretical task duration of each wafer transport task according to the moving path of each task crane during the task process to obtain a set B; wherein B={B1, ​​B2, ..., B x }; Among them, B1, B2, ..., B x Including the theoretical total task duration of different task cranes when performing wafer transport tasks, the total task duration and the number of other task crane traffic jams under the corresponding number of anti-collision device triggering times; T represents the theoretical task duration corresponding to the kth execution of the wafer transfer task; k represents the total task duration of the kth wafer transfer task; They respectively represent the number of traffic jams of other task cranes when the kth wafer transport task is executed under the corresponding number of times the anti-collision device is triggered; x represents the number of times the task crane performs the wafer transport task based on the analysis of historical monitoring data and historical traffic jam data; y k represents the number of times the anti-collision device is triggered when the wafer transfer task is performed for the kth time; k = 1, 2, ..., x; in, ∑w k It represents the sum of the constant motion duration of the task crane passing through each track edge in the moving path when performing the wafer transfer task for the kth time; S402, establish a traffic jam impact analysis model, based on set B, take the number b of traffic jams of other task cranes when the anti-collision device is triggered during the task crane's task execution as the independent variable, and the wafer transfer time deviation TT 0 As the dependent variable, the regression relationship curve of the effect of overhead crane congestion degree on wafer transport time deviation is fitted: TT 0 =β1c1+β2c2+...+β q c q +∈; Among them, β1, β2, ..., β q They represent the influence weights of different overhead crane congestion levels on the wafer transfer time deviation; ∈ represents the error term; c1, c2, ..., c q They represent the frequency of occurrence of different overhead crane blockage levels during wafer transfer; q represents the overhead crane blockage level; The number of overhead cranes blocked by other tasks when the anti-collision device is triggered during the task crane's task execution is used as different overhead crane blocking degrees, and the number of overhead crane blocking degrees is the same as the number of overhead cranes blocked by other tasks when the anti-collision device is triggered; S403, according to B k In Determine the occurrence frequency c of different overhead crane blockage levels when performing the k-th wafer transfer task k1 、c k2 , ..., c kq ,Will and c k1 、c k2 , ..., c kq Substitute them into the regression relationship curve of step S402 for training until all the data in set B are substituted to obtain β1, β2, ..., β q and the numerical values ​​of ∈; S50, when there is a wafer transport task, determining the end point of the wafer transport task and the position point of the weighted directed graph plane where each idle overhead crane is located; determining the best idle overhead crane and the best path for performing the wafer transport task according to the weighted directed graph plane nodes where each idle overhead crane is located and the end point of the wafer transport task; S60, controlling the determined optimal idle overhead crane to perform the wafer transport task according to the planned optimal path; wherein the idle overhead crane performing the wafer transport task is changed to a task overhead crane until the task overhead crane completes the wafer transport task and then changes its state to an idle overhead crane again.

2. The automated material handling control method based on overhead crane path planning algorithm according to claim 1 is characterized in that: The track includes track edges and track nodes; the track nodes include track path bifurcations; and the track edges are used to connect the track nodes.

3. The automated material handling control method based on overhead crane path planning algorithm according to claim 2 is characterized in that: An anti-collision device is installed in the overhead crane; the anti-collision device is used to monitor whether the task overhead crane will collide with other task overhead cranes, and when the task overhead crane will collide with other task overhead cranes, the task overhead crane is controlled to slow down or stop; The movement of the mission overhead crane in the track is divided into normal traffic and traffic congestion; the normal traffic means that the anti-collision device of the mission overhead crane is not triggered during the movement of the track; the traffic congestion means that the anti-collision device of the mission overhead crane is triggered during the movement of the track; Among them, when the anti-collision device is triggered and controls the task overhead crane to slow down or stop, the next track node to which the corresponding task overhead crane is triggered by the anti-collision device is determined, and the number of other task overhead cranes triggered by the anti-collision device at this track node is determined.

4. The automated material handling control method based on overhead crane path planning algorithm according to claim 3 is characterized in that: The method steps of step S30 are: S301, establishing a weighted directed graph about the wafer workshop track, taking the track nodes as plane nodes of the weighted directed graph, determining the number of plane nodes, taking the track edges as connecting edges between plane nodes, and determining the number n of connecting edges; S302, the time when the head of the task crane enters the track side is taken as the start time, the time when the head of the task crane exits the track side is taken as the end time, and the duration from the start time to the end time is taken as the movement duration of the task crane passing through the track side; the movement changes of each task crane when the track side is normal are selected from the historical monitoring data, and the movement duration sets A1, A2, ..., A2 of each task crane passing through the track side when the track side is normal are obtained. n ; According to the set A1, A2, ..., A n , respectively determine the constant motion duration w1, w2, ..., w of each track side path n ; Among them, the constant motion duration of each track side path satisfies the conditional formula: Among them, A i It represents the set of movement durations of each task crane passing through the track side when the traffic on the i-th track side is normal; Respectively represent the set A i The duration of the overhead travelling vehicle passing through the track side when the traffic on the ith track side is normal; r i Represents the set A i The number of data in; i = 1, 2, ..., n; s = 1, 2, ..., r i ;w i represents the constant motion duration of the ith track edge path; a is Represents the set A i The duration of the sth movement in Z i It represents the index value reflecting the accuracy of the constant motion duration of the i-th track side path.

5. The automatic material handling control method based on overhead crane path planning algorithm according to claim 4 is characterized in that: The method steps of step S50 are: S501, according to the wafer transport task, determine the weighted directed graph plane position point P0 where the wafer transport task end point is located, and respectively determine the weighted directed graph plane position points P1, P2, ..., P u ; Where u represents the current number of idle overhead cranes; S502, according to the plane position points in the weighted directed graph, based on the path planning algorithm, determine different path sets D1, D2, ..., D3 for each idle overhead crane to go down to P0 from the corresponding plane position point. u ; Among them, D v Represents the plane position point P v A set of different paths from the idle overhead travelling vehicle to P0; v = 1, 2, ..., u; Denote the set D v Different paths in F u Denotes the set D v The number of path types in ; S503, determining the initial time of performing the wafer transport task, determining the plane position point of the weighted directed graph corresponding to the initial time of performing the wafer transport task of each task crane based on the collected motion change data of each task crane in the track, and predicting the change of the plane position point of each task crane in the weighted directed graph with the motion duration according to the optimal path planned by each task crane; according to the set D1, D2, ..., D u The constant motion duration of different paths and each track side path in the weighted directed graph is used to predict the change of the position points of the idle overhead crane corresponding to each path in the weighted directed graph plane with the motion duration when performing the wafer transfer task; S504, according to the analysis in step S503, determine the frequencies of different overhead crane blockages when the idle overhead cranes corresponding to the wafer transport task and the overhead cranes of each task in the current track are blocked under different paths, and obtain the optimal path d0 for the current wafer transport task; make d0 satisfy the conditional formula: in, They represent the frequency of occurrence of different overhead crane congestion levels when the corresponding path is d0; ΔT represents the wafer transfer time deviation corresponding to the path d0; T 总 It represents the predicted total task duration when reflecting the path d0; The path d0 represents the sum of the constant motion time of the idle overhead travelling vehicle passing through each track side; S505 . Determine the best idle overhead crane for wafer transporting task according to the best path d0 .

6. An automated material handling control system based on an overhead crane path planning algorithm, applying the automated material handling control method based on an overhead crane path planning algorithm as described in any one of claims 1 to 5, characterized in that: The system includes a monitoring module, a workshop management module, a model analysis module, a path confirmation module, an overhead crane intelligent control module, a database and an overhead crane; The monitoring module is used to monitor the overhead crane in the track, collect the movement change data of each task overhead crane in the track, and respectively record the number of times the anti-collision device of each task overhead crane is triggered during each wafer transport task and the number of traffic blockages of other task overhead cranes when the anti-collision device is triggered each time; the workshop management module is used to establish a weighted directed graph about the wafer workshop track and determine the constant movement duration of each connecting edge path in the weighted directed graph; The model analysis module is used to establish a traffic congestion impact analysis model, fit the regression relationship curve of the impact of overhead crane congestion degree on wafer transport time deviation, and analyze the impact of different overhead crane congestion degrees on wafer transport time deviation; the path confirmation module is used to determine the end point of the wafer transport task and the position point of the weighted directed graph plane where each idle overhead crane is located, and determine the best idle overhead crane and the best path for performing the wafer transport task; the overhead crane intelligent control module is used to control the determined best idle overhead crane to perform the wafer transport task according to the planned best path; the database is used to store historical monitoring data and historical traffic congestion data; an anti-collision device is installed in the overhead crane; the anti-collision device is used to monitor whether the task overhead crane will collide with other task overhead cranes, and when the task overhead crane will collide with other task overhead cranes, the task overhead crane is controlled to slow down or stop.

Images