Photomask container with rotary connector equipped with spring force latch

Abstract

A photomask container includes a rotary latch including a spring. The spring provides a force to bring segments of the reticle container toward each other such that a reticle in the container is clamped between the container segments. The rotary latch may include a head on one of a lid or a base plate of the reticle container as part of an assembly, with a slot configured to receive the head disposed on the other of the lid or the base plate. The head may be disposed at an end of a shaft, where the shaft is connected to a base contacted by a spring that provides a force such that contact of the head with the other of the cover or the base plate provides a clamping force to a reticle stored between the cover and the base plate.

Description

Technical Field

[0001] The present disclosure relates to a container for storing and / or transporting photoreticles, and in particular, a container including a swivel connector that uses spring force to maintain the closure of the connector. Background Art

[0002] Reticles are transported, processed, and stored in a reticle container that includes an inner box and an outer box. The inner box is configured so that it can be used during processing of the reticle, such as in photolithography, such as an extreme ultraviolet (EUV) process. Features that make the inner box suitable for use in reticle processing, such as the formation of filters, seals, and / or other features of the inner box, can make the inner box more complex and expensive, and less suitable for storing reticles. Summary of the invention

[0003] The present disclosure relates to a container for storing and / or transporting photoreticles, and in particular, a container including a swivel connector that uses spring force to maintain the closure of the connector.

[0004] The reticle container can be secured by a rotary latch. The rotary latch can be driven by a spring force to pull the segments of the reticle container toward each other to clamp the reticle positioned within the container. By using a spring force at the latch of the container to provide a force to clamp the reticle within the container, reticles of different thicknesses can be secured within the container. The rotary latch can secure the reticle container with reduced particle generation or keep any generated particles away from the reticle stored therein. In addition, the rotary latch can be automatically actuated, allowing the reticle to be secured within the reticle or the reticle container to be opened without human interaction.

[0005] In an embodiment, a photomask container includes a first container segment and a second container segment. The first container segment and the second container segment define an interior space configured to accommodate a photomask. The first container segment includes an aperture extending through the first container segment and a retaining groove on a side of the first container segment configured to intersect the aperture on a side of the first container segment that is configured to face away from the second container segment when the photomask container is assembled. The second container segment includes a rotatable latch, the rotatable latch including a latch base, a shaft, and a head. The head is configured to travel through the aperture when in a first orientation and engage with the retaining groove when in a second orientation. The rotatable latch is configured to rotate between the first orientation and the second orientation.

[0006] In an embodiment, the reticle container further includes a spring configured to contact the second container fragment and the rotatable latch, wherein the spring drives the rotatable latch such that the head is driven toward the second container fragment.

[0007] In an embodiment, the latch base includes an actuation feature.

[0008] In an embodiment, the retaining groove comprises an inclined surface.

[0009] In an embodiment, the shaft member includes a retaining ring groove and the rotatable latch includes a retaining ring, a portion of which is received in the retaining ring groove. In an embodiment, one or more retaining protrusions extend outwardly from the shaft member. In an embodiment, the one or more retaining protrusions are part of a retaining pin, which is retained in a channel formed in a slot.

[0010] In an embodiment, the aperture is a slot. In an embodiment, the head comprises two opposing protrusions.

[0011] In an embodiment, a method of closing a reticle container includes advancing a head of a rotatable latch through an aperture disposed on a first container segment; and rotating the rotatable latch such that the head engages a retaining groove intersecting the aperture.

[0012] In an embodiment, rotating the rotatable latch includes engaging an actuation feature disposed on a base of the rotatable latch with an actuator, and the actuator rotates the rotatable latch through the engagement with the actuation feature.

[0013] In an embodiment, the rotatable latch is included in a second container fragment, and a photomask is positioned between the first container fragment and the second container fragment.

[0014] In an embodiment, a spring contacting the rotatable latch applies a force that drives the head into engagement with the retaining recess.

[0015] In an embodiment, a retaining ring is disposed in a retaining ring groove formed in a shaft of the rotatable latch.

[0016] In an embodiment, the aperture is a slot.

[0017] In an embodiment, the head comprises two opposing protrusions. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 An exploded view of a reticle container and a reticle according to an embodiment is shown.

[0019] Figure 2 A perspective view of a reticle container in closure is shown according to an embodiment.

[0020] Figure 3 A cross-sectional view of a reticle container in closure is shown in accordance with an embodiment. DETAILED DESCRIPTION

[0021] The present disclosure relates to a container for storing and / or transporting photoreticles, and in particular, a container including a swivel connector that uses spring force to maintain the closure of the connector.

[0022] Figure 1 An exploded view of a reticle container and a reticle is shown according to an embodiment. The reticle container 100 includes a lid 102 and a bottom plate 104. The lid 102 includes a lid latch feature 106. The bottom plate 104 includes a bottom plate latch feature 108. A reticle 110 can be received within the reticle container 100 between the lid 102 and the bottom plate 104.

[0023] The reticle container 100 is a container configured to contain a reticle 110, such as a reticle used for a process such as photolithography, such as an extreme ultraviolet (EUV) process. The reticle container 100 may be used to transport and / or store the reticle 110. In an embodiment, the reticle container 100 is an EUV reticle container. In an embodiment, the reticle container 100 is a stocker box for storing the reticle 110 before, during, or after processing. In an embodiment, the reticle container 100 may be received at a load port of an EUV processing device to be opened and used to add or remove the reticle 110 from the reticle container 100. The reticle container 100 contains the reticle 110 in an internal space within the reticle container 100. In an embodiment, the reticle container 100 clamps the reticle 110 to fix the reticle 110 in a specific position. In an embodiment, the reticle container 100 forms a seal around its perimeter when the reticle 110 is contained within the reticle container 100. In an embodiment, the reticle container 100 does not form a seal and includes gaps in at least some areas of the perimeter when the reticle 110 is contained within the reticle container 100.

[0024] The lid 102 forms a first container segment of the reticle container 100. The lid 102 forms a portion of an interior space configured to accommodate the reticle 110. The lid 102 includes one or more of the lid latch features 106. The lid latch features 106 form a portion of a latch configured to secure the lid 102 to the bottom plate 104. In an embodiment, the lid latch features 106 may include a slot and a retention area, such as Figure 2 The slot 206 and the retention area 208 shown in FIG. 1 and discussed below. In an embodiment, the cover latch feature 106 may include a latch mechanism having a protruding shaft and a head, such as Figure 2 1 and discussed below. The latch mechanism 210, shaft 212, and head 214 shown in FIG. 1 and discussed below. The latch that secures the cover 102 to the base plate 104 can clamp the reticle 110 between the cover 102 and the base plate 104. In an embodiment, the latch can cause the cover 102 and the base plate 104 to not form a seal with each other, wherein the perimeters of the cover 102 and the base plate 104 are spaced apart from each other.

[0025] The bottom plate 104 forms a second container segment of the reticle container 100. The bottom plate 104, when combined with the lid 102, forms an interior space capable of accommodating the reticle 110. The bottom plate 104 includes one or more of the bottom plate latching features 108. The bottom plate latching features 108 are configured to interface with the lid latching features 106 to form a latch configured to at least partially secure the lid 102 to the bottom plate 104. In an embodiment, the bottom plate latching features 108 may include a slot and a retention area, such as Figure 2 The slot 206 and the holding area 208 shown in FIG. 1 and discussed below. In an embodiment, the bottom plate latch feature 108 may include a latch mechanism having a protruding shaft and a head, such as Figure 2 2 and discussed below.

[0026] Figure 2 A perspective view of a reticle container in closure according to an embodiment is shown. The reticle container 200 includes a cover 202 and a bottom plate 204. The cover 202 includes a slot 206 and a holding area 208 intersecting or surrounding the slot 206. The bottom plate 204 includes a latch mechanism 210 including a shaft 212 and a head 214 protruding from the bottom plate 204 toward the cover 202.

[0027] The cover 202 forms part of the reticle container 200. When combined with the base plate 204, the cover 202 defines a housing configured to receive a reticle (e.g., as discussed above and in Figure 1204). The cover 202 includes a slot 206 and a holding area 208. The slot 206 is an opening through the thickness of the cover 202. The slot 206 is configured to allow the head 214 to travel through the slot when the head 214 is aligned with the slot 206, and prevent the head 214 from traveling through the slot 206 when the head 214 is not aligned with the slot 206. The slot 206 may have any suitable shape for selectively allowing the passage of the head 214 based on alignment, such as an oblong shape, a cross shape, a rectangular shape, or the like. The slot 206 may be disposed so that it is opposite to the latch mechanism 210 when the cover 202 is combined with the base plate 204. The slot 206 may be disposed in a peripheral region of the cover 202 so that the interface of the slot 206 and the latch mechanism 210 is outside a region of the reticle container 200 configured to accommodate the reticle. The cover 202 may include additional slots 206, such as slots 206 for each of the latch mechanisms disposed on the base plate 204. The retention area 208 may intersect with or surround the slots 206. When the reticle container 200 is assembled, the retention area 208 is on the side of the cover 202 facing away from the base plate 204. The retention area 208 may include a recess configured to receive the head 214 when the head 214 and a portion of the shaft 212 have traveled through the slots 206 and have been rotated so that the head 214 is not aligned with the slots 206. The retention area 208 may include an inclined portion configured to limit the rotation of the head 214 so that the head 214 cannot be aligned with the slots 206 in a manner that is not otherwise manipulated to produce such alignment.

[0028] The bottom plate 204 forms another portion of the photomask container 200. The bottom plate 204 is configured to define an interior space capable of accommodating a photomask when combined with the cover 202. Figure 2 206. In the embodiment shown in FIG. 20, the bottom plate 204 includes a latch mechanism 210. The latch mechanism 210 provides a shaft 212 extending outwardly from the bottom plate 204 on a side of the bottom plate 204 that is configured to face the cover 202 when the reticle container 200 is assembled. A head 214 is disposed at the end of the shaft 212. The head 214 is configured to be able to travel through the slot 206 when in a first orientation and unable to travel through the slot 206 when in other orientations. The head 214 may be configured so that it can be held by contact with the holding area 208 so that the head 214 is in a position in which it cannot travel through the slot 206. Depending on the shape of the slot 206, the head 214 may have any suitable shape, such as an oblong shape, a cross shape, a rectangular shape, or the like.

[0029] Although Figure 22 provides a slot 206 and a retaining area 208 on the cover 202, and a latch mechanism 210 on the bottom plate 204, but in an embodiment, the slot 206 and the retaining area 208 may be disposed on the bottom plate 204 instead, and the latch mechanism 210 may be disposed on the cover 202. In this embodiment, the slot 206 extends through the bottom plate 204, and the retaining area is on the side of the bottom plate 204 opposite to the side that faces the cover 202 when the reticle container 200 is assembled. In this embodiment as well, the shaft 212 and the head 214 extend outwardly from the cover 202 on the side of the cover 202 that faces the bottom plate 204 when the reticle container 200 is assembled.

[0030] Figure 3 Display basis Figure 2 A cross-sectional view of a closed photomask container of the embodiment shown in FIG. Figure 3 As can be seen in FIG. 2 , the latch mechanism 210 includes a base 216. The base 216 includes an actuation feature 218. The latch mechanism 210 includes a latch retention body 220. A spring 222 is positioned within the latch retention body 220 and contacts the base 216.

[0031] The base 216 is coupled to the shaft 212. The base 216 includes an actuation feature 218. The actuation feature 218 may be any suitable feature that allows the base 216 to be engaged with and rotated by a user or an automated system. Figure 3 , the actuation feature is a groove formed in the side of the base 216 facing outward from the latch mechanism 216. In an embodiment, the actuation feature 218 may be a protrusion. The actuation feature 218 may have any suitable shape capable of allowing the base 216 to rotate about the axis of the shaft 212 by engaging with the actuation feature. Non-limiting examples of the shape of the actuation feature may be a protrusion or groove having a cross-sectional profile that is an oblong, star-shaped, square, or the like.

[0032] The latch holder body 220 is a portion of the lid or bottom plate of the reticle container that is configured to house the base 216 and portions of the shaft 212 so that the base 216 can rotate about the axis of the shaft 212. The latch holder body 220 includes an aperture 224 and a hole 226. The base 216 can move in the axial direction within the hole 226. The aperture 224 allows the shaft 212 to extend from the latch holder body 220. A spring 222 can be housed within the hole 226. The spring 222 is configured to contact the base 216 on the side opposite to the actuation feature 218. The spring can also contact the latch holder body 220 at a region where the latch holder body 220 surrounds the aperture 224. The spring provides a spring force that drives the base 216 away from the aperture 224. The force applied by the spring 220 may drive the base 216 such that when the head 214 engages the holding area 208 , the cover 202 and the bottom plate 204 are driven toward each other and may thus clamp the reticle within the reticle container 200 .

[0033] In an embodiment, the base 216 is coupled to the shaft 212 by a mechanical connection (e.g., threading the shaft 212 into an opening provided in the base 216 or any other suitable mechanical connection, such as interfacing of connection features, snap fit using suitable features, press fit, or the like). In an embodiment, the shaft 212 is integrally formed with the base 216. In an embodiment where the shaft is integrally formed with the base 216, the shaft 212 may be mechanically coupled to the head 214, for example, after the shaft 212 is advanced through the aperture 224 of the latch retaining body 220. In an embodiment, the base 216, the shaft 212, and the head 214 may all be formed as one part. In this embodiment, the aperture 224 may be shaped so that the head 214 may advance through the aperture 224 when in a particular orientation. The aperture 224 may be positioned so that it is not aligned with the slot 206.

[0034] In an embodiment, retention may be provided along the shaft 212 so that it cannot travel through the aperture 224 beyond a certain point. In an embodiment, the retention feature 228 may include a retention ring 230 and a retention groove 232 configured to accommodate the retention ring 230. In other embodiments, the retention feature 228 may alternatively include a pin that travels through the aperture, or any other suitable feature that provides mechanical interference between the shaft 212 and the aperture 224. In an embodiment, the retention feature 228 may be integrally formed in the shaft 212. In an embodiment, the retention feature 228 may include one or more additional parts, such as the retention ring 230, the pin discussed above, or any other suitable additional parts. The additional parts may be coupled to the shaft 212, for example, by a mechanical connection such as a snap fit or a press fit or the like.

[0035] aspect:

[0036] It should be understood that any of aspects 1-9 may be combined with any of aspects 10-16.

[0037] Aspect 1. A photomask container comprising

[0038] a first container fragment; and

[0039] a second container fragment;

[0040] wherein the first container segment and the second container segment define an interior space configured to accommodate a photomask,

[0041] The first container segment includes an aperture extending through the first container segment and a retaining groove intersecting the aperture on a side of the first container segment configured to face away from the second container segment when the photomask container is assembled,

[0042] The second container segment includes a rotatable latch, which includes a latch base, a shaft and a head, wherein the head is configured to travel through the aperture when in a first orientation and engage with the retaining groove when in a second orientation, and the rotatable latch is configured to rotate between the first orientation and the second orientation.

[0043] Aspect 2. The reticle container according to aspect 1, further comprising a spring configured to contact the second container segment and the rotatable latch, wherein the spring drives the rotatable latch such that the head is driven toward the second container segment.

[0044] Aspect 3. The reticle container of any of aspects 1-2, wherein the latch base includes an actuation feature.

[0045] Aspect 4. The photomask container according to any one of aspects 1 to 2, wherein the holding groove includes an inclined surface.

[0046] Aspect 5. The reticle container according to any one of aspects 1 to 4, wherein the shaft member includes a retaining ring groove and the rotatable latch includes a retaining ring, a portion of the retaining ring being received in the retaining ring groove.

[0047] Aspect 6. The reticle container according to any one of aspects 1 to 5, wherein one or more retaining protrusions extend outwardly from the shaft member.

[0048] Aspect 7. The reticle container of aspect 6, wherein the one or more retaining tabs are part of a retaining pin that is retained within a channel formed in the slot.

[0049] Aspect 8. The reticle container according to any one of aspects 1 to 7, wherein the aperture is a slot.

[0050] Aspect 9. The reticle container according to aspect 8, wherein the head comprises two opposing protrusions.

[0051] Aspect 10. A method of closing a reticle container, comprising: advancing a head of a rotatable latch through an aperture disposed on a first container segment; and rotating the rotatable latch such that the head engages a retaining groove intersecting the aperture.

[0052] Aspect 11. The method according to aspect 10, wherein rotating the rotatable latch includes engaging an actuation feature disposed on a base of the rotatable latch with an actuator, and the actuator rotates the rotatable latch through the engagement with the actuation feature.

[0053] Aspect 12. The method according to any one of aspects 10 to 11, wherein the rotatable latch is included in a second container fragment, and a photomask is positioned between the first container fragment and the second container fragment.

[0054] Aspect 13. The method of any one of aspects 10 to 12, wherein a spring contacting the rotatable latch applies a force that drives the head into engagement with the retaining groove.

[0055] Aspect 14. The method according to any one of aspects 10 to 13, wherein a retaining ring is disposed in a retaining ring groove formed in a shaft of the rotatable latch.

[0056] Aspect 15. The method according to any one of aspects 10 to 14, wherein the aperture is a slot.

[0057] Aspect 16. The method according to any one of aspects 10 to 15, wherein the head comprises two opposing protrusions.

[0058] The examples disclosed in this application should be considered in all respects as illustrative and non-restrictive. The scope of the invention is indicated by the appended claims rather than by the foregoing description; and all changes that fall within the meaning and range of equivalency of the appended claims are intended to be embraced therein.

Claims

1. A photomask container, comprising a first container fragment; and a second container fragment; wherein the first container segment and the second container segment define an interior space configured to accommodate a photomask, The first container segment includes an aperture extending through the first container segment and a retaining groove intersecting the aperture on a side of the first container segment configured to face away from the second container segment when the photomask container is assembled, The second container segment includes a rotatable latch, which includes a latch base, a shaft and a head, wherein the head is configured to travel through the aperture when in a first orientation and engage with the retaining groove when in a second orientation, and the rotatable latch is configured to rotate between the first orientation and the second orientation. 2 . The reticle container of claim 1 , further comprising a spring configured to contact the second container segment and the rotatable latch, wherein the spring drives the rotatable latch such that the head is driven toward the second container segment. The reticle container of claim 1 , wherein the latch base includes an actuation feature. The reticle container of claim 1 , wherein the holding groove comprises an inclined surface.

5. The reticle container of claim 1, wherein the shaft comprises a retaining ring groove and the rotatable latch comprises a retaining ring, a portion of the retaining ring being received in the retaining ring groove.

6. The reticle container of claim 1, wherein one or more retaining tabs extend outwardly from the shaft member.

7. The reticle container of claim 6, wherein the one or more retaining tabs are part of retaining pins that are retained within channels formed in the slots. The reticle container of claim 1 , wherein the apertures are slots.

9. The photomask container of claim 8, wherein the head portion comprises two opposing protrusions.

10. A method for sealing a photomask container, comprising: Advancing a head of a rotatable latch through an aperture disposed on a first container segment; and rotating the rotatable latch so that the head engages a retaining groove intersecting the aperture.

11. The method of claim 10, wherein rotating the rotatable latch comprises engaging an actuation feature disposed on a base of the rotatable latch with an actuator, and the actuator rotates the rotatable latch through the engagement with the actuation feature. 12 . The method of claim 10 , wherein the rotatable latch is included in a second container fragment, and a photomask is positioned between the first container fragment and the second container fragment.

13. The method of claim 10, wherein a spring contacting the rotatable latch applies a force that drives the head into engagement with the retaining recess.

14. The method of claim 10, wherein a retaining ring is disposed in a retaining ring groove formed in a shaft of the rotatable latch.

15. The method of claim 10, wherein the aperture is a slot.

16. The method of claim 10, wherein the head comprises two opposing protrusions.

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