A thermocouple temperature measurement and displacement device for measuring the phase change temperature of a thin film material

Abstract

The present invention discloses a thermocouple temperature measurement displacement device for measuring the phase transition temperature of a thin film material, belonging to the field of thermal property detection of semiconductor thin films, and comprising a cavity, a temperature measurement device and a displacement device; the displacement device is arranged below the cavity, the temperature measurement device is arranged on the inner bottom side of the cavity, a sample stage is further arranged inside the chamber, a heating and cooling device is installed near the top end of the cavity by the displacement device, the temperature measurement device is composed of a thermocouple, a thermocouple fixed sleeve, a thermocouple clamp and a thermocouple vertical displacement platform, one end of the thermocouple is installed on the thermocouple fixed sleeve, and the side of the thermocouple fixed sleeve away from the thermocouple is fixed on the thermocouple vertical displacement platform through the thermocouple clamp; the present invention solves the problem of large errors in the existing temperature measurement methods by using the temperature measurement device.

Description

Technical Field

[0001] The present invention relates to the field of thermal property detection of semiconductor thin films, and more particularly to a thermocouple temperature measurement displacement device for measuring the phase transition temperature of thin film materials. Background Art

[0002] The phase transition temperature is a key parameter for predicting the microstructure and exerting the material properties of thin film materials; the existing optical power analysis method for measuring the phase transition temperature of thin film materials measures the phase transition temperature of thin films by measuring the change in reflected optical power during the phase transition of the thin films. The existing measuring instruments for the phase transition temperature of thin film materials measure the phase transition temperature of thin films in a vacuum environment, and the temperature measuring element is a thermocouple. Since heat is transferred only by contact and radiation under vacuum conditions, it is necessary for the thermocouple to be in full contact with the sample for temperature measurement. The contact methods between the thermocouple and the sample in the existing instruments mainly include two types: (1) the thermocouple probe is in direct non-pressure contact with the surface of the thin film sample; (2) the thermocouple probe is in direct pressure contact with the lower surface of the thin film substrate.

[0003] The measurements of these two types of measuring instruments are not accurate. Either the temperature of the surface of the sample thin film is not measured, or it is easy to loosen during the measurement process.

[0004] In view of the shortcomings of the existing technical solutions, the present application proposes a thermocouple temperature measurement displacement device for measuring the phase transition temperature of thin film materials. Summary of the Invention

[0005] The purpose of the present invention is to provide a thermocouple temperature measurement displacement device for measuring the phase transition temperature of thin film materials, which solves the problems of large errors in the existing temperature measurement methods and easy loosening during the measurement process.

[0006] To achieve the above object, the present invention provides a thermocouple temperature measurement displacement device for measuring the phase transition temperature of thin film materials, including a base, a cavity, a temperature measurement device and a displacement device; the cavity is installed on the upper surface of the base, the displacement device is arranged below the cavity, the temperature measurement device is arranged on the inner bottom side of the cavity, a sample stage is further arranged inside the cavity, a heating and cooling device is installed near the top end of the cavity by the displacement device, the temperature measurement device is composed of a thermocouple, a thermocouple fixing sleeve, a thermocouple clamp, a thermocouple vertical displacement platform and a vertical displacement controller, one end of the thermocouple is installed on the thermocouple fixing sleeve, and the side of the thermocouple fixing sleeve away from the thermocouple is fixed on the thermocouple vertical displacement platform through the thermocouple clamp, and the vertical displacement controller is connected to the thermocouple vertical displacement platform.

[0007] Preferably, a sealing interface is provided on the outside of the cavity, and the vertical displacement controller is installed on the sealing interface. The thermocouple vertical displacement platform controls the vertical movement of the thermocouple fixture through the vertical displacement controller, thereby driving the vertical movement of the thermocouple.

[0008] Preferably, the cavity includes a quick-closing door, a cavity housing, a main observation window, and a side observation window; the quick-closing door is provided on one side of the cavity housing, the main observation window is provided on the cavity housing and is perpendicular to the quick-closing door, and the side observation window is also provided on the cavity housing, at a 45° angle to the main observation window and at a 135° angle to the quick-closing door.

[0009] Preferably, an observation window is also provided at the center position of the quick-closing door.

[0010] Preferably, the sample stage is provided directly above the heating and cooling device.

[0011] Preferably, the end of the thermocouple away from the thermocouple fixed sleeve is provided at the exact center of the sample stage.

[0012] Preferably, the displacement device is provided inside the base.

[0013] Therefore, the thermocouple temperature measurement displacement device for measuring the phase change temperature of a thin film material with the above structure of the present invention has the following advantages:

[0014] 1. When measuring any sample, it can ensure that the upper surface of the sample to be measured is at the same horizontal height. The thermocouple vertical displacement platform can ensure the contact pressure and state between the thermocouple probe head and the surface of the thin film sample by precisely controlling the vertical movement distance of the thermocouple.

[0015] 2. The thermocouple temperature measurement displacement device for measuring the phase change temperature of a thin film material can precisely control the vertical up and down movement distance of the thermocouple to achieve automatic contact measurement.

[0016] 3. The sample stage fixes the thin film sample to be measured, ensuring that the sample will not shake during the measurement and achieving displacement-free fixation of the sample to be measured at the same height.

[0017] 4. The heating and cooling device for measuring the phase change temperature at high temperature can move up and down, keeping the sample position unchanged, ensuring the measurement accuracy of the sample, and reducing human error.

[0018] 5. By setting the heating and cooling device, the cooling time can be reduced, the experimental efficiency can be improved, and it also plays a role in providing a uniform temperature field.

[0019] 6. Ensure the repeatability and operation stability of measuring the surface temperature of the thin film sample by the thermocouple, and improve the measurement accuracy of the phase change temperature of the thin film material.

[0020] 7. The thermocouple can be quickly replaced, which is convenient and efficient.

[0021] 8. The design with multiple windows makes it more convenient to observe the sample and the device to be measured inside the cavity.

[0022] The technical solution of the present invention will be further described in detail below with reference to the accompanying drawings and embodiments. Description of the Drawings

[0023] Figure 1 It is a schematic internal structure diagram of a thermocouple temperature measurement displacement device for measuring the phase change temperature of a thin film material according to the present invention.

[0024] Figure 2 It is a schematic overall diagram of a thermocouple temperature measurement displacement device for measuring the phase change temperature of a thin film material according to the present invention.

[0025] Figure 3 It is a structural diagram of the temperature measurement device of a thermocouple temperature measurement displacement device for measuring the phase change temperature of a thin film material according to the present invention.

[0026] Reference Signs

[0027] 1. Temperature measurement device; 11. Thermocouple; 12. Thermocouple fixed sleeve; 13. Thermocouple clamp; 14. Thermocouple vertical displacement platform; 15. Vertical displacement controller; 2. Cavity; 21. Quick closing door; 22. Cavity housing; 23. Main observation window; 24. Side observation window; 3. Sample stage; 4. Heating and cooling device; 5. Displacement device; 6. Base; 7. Sealing interface. Detailed Description of the Embodiment

[0028] Embodiment

[0029] In the description of the present invention, it should be noted that the orientation or positional relationship indicated by the terms "upper", "lower", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship in which the product of the present invention is usually placed during use. It is only for the convenience of describing the present invention and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present invention.

[0030] In the description of the present invention, it should also be noted that unless otherwise clearly specified and defined, the terms "set", "installed", "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the internal communication of two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0031] The following will describe in detail some embodiments of the present invention with reference to the accompanying drawings. Without conflict, the following embodiments and the features in the embodiments can be combined with each other.

[0032] As Figures 1 - 3 shown, a thermocouple temperature measurement displacement device for measuring the phase change temperature of a thin film material of the present invention includes a base 6, a cavity 2, a temperature measurement device 1 and a displacement device 5; the cavity 2 is installed on the upper surface of the base 6, the displacement device 5 is arranged below the cavity 2, the temperature measurement device 1 is arranged at the inner bottom side of the cavity 2, a sample stage 3 is further arranged inside the cavity 2, a heating and cooling device 4 is installed near the top end of the cavity 2 by the displacement device 5, the temperature measurement device 1 is composed of a thermocouple 11, a thermocouple fixed sleeve 12, a thermocouple clamp 13 and a thermocouple vertical displacement platform 14, one end of the thermocouple 11 is installed on the thermocouple fixed sleeve 12, and the side of the thermocouple fixed sleeve 12 away from the thermocouple 11 is fixed on the thermocouple vertical displacement platform 14 through the thermocouple clamp 13, and a vertical displacement controller 15 is connected to the thermocouple vertical displacement platform 14. A sealing interface 7 is arranged on the outer side of the cavity 2, a vertical displacement controller 15 is installed on the sealing interface 7, and the thermocouple vertical displacement platform 14 controls the vertical movement of the thermocouple clamp 13 through the vertical displacement controller 15, so as to drive the vertical movement of the thermocouple 11. The cavity 2 includes a quick closing door 21, a cavity housing 22, a main observation window 23 and a side observation window 24; the quick closing door 21 is arranged on one side of the cavity housing 22, the main observation window 23 is arranged on the cavity housing 22 and is perpendicular to the quick closing door 21, the side observation window 24 is also arranged on the cavity housing 22, forms a 45° angle with the main observation window 23, and forms a 135° angle with the quick closing door 21. An observation window is also arranged at the central position of the quick closing door 21. The sample stage 3 is arranged directly above the heating and cooling device 4. The end of the thermocouple 11 away from the thermocouple fixed sleeve 12 is arranged at the center of the sample stage 3. The displacement device 5 is arranged inside the base 6.

[0033] In specific implementation, the thermocouple 11 is installed on the thermocouple fixed sleeve 12. The thermocouple fixed sleeve 12 is fixed on the thermocouple vertical displacement platform 14 through the thermocouple clamp 13 and can move up and down with the thermocouple vertical displacement platform 14. The sample stage 3 is connected to the cavity 2 through a support rod, and the sample stage 3 is located above the heating and cooling device 4. The probe head of the thermocouple 11 vertically contacts the surface of the thin film sample to be measured on the sample stage 3, and the thin film sample to be measured can be fixed by the sample stage 3 and maintain a constant vertical height position. Before the experiment starts, the required moving displacement distance is set to control the movement of the thermocouple vertical displacement platform 14, thereby driving the thermocouple 11 to move in the vertical direction. After each experiment ends, the thermocouple vertical displacement platform 14 will return to the initial position under the control of the program, facilitating the next experiment. During this process, the thermocouple 11 is controlled by the thermocouple vertical displacement platform 14 to move up and down in the Z-axis direction, precisely controlling the contact between the probe head of the thermocouple 11 and the surface of the thin film sample to be measured. During this process, the internal situation of the cavity 2 can be observed through the main observation window 23 and the side observation window 24 on the cavity 2.

[0034] Therefore, the thermocouple temperature measurement displacement device for measuring the phase change temperature of a thin film material with the above structure according to the present invention can ensure the contact pressure and state between the probe head of the thermocouple and the surface of the thin film sample by precisely controlling the vertical movement distance of the thermocouple, realizing automatic contact measurement; and realizing the displacement-free fixation of the sample to be measured at the same height ensures the measurement accuracy of the sample and reduces human error; at the same time, the structure integrating the heating and cooling device can reduce the cooling time and improve the experimental efficiency, and the multi-window design is more convenient for observing the sample to be measured and the device inside the cavity.

[0035] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention and are not intended to limit them. Although the present invention has been described in detail with reference to the preferred embodiments, those of ordinary skill in the art should understand that they can still modify or equivalently replace the technical solutions of the present invention, and these modifications or equivalent replacements cannot make the modified technical solutions deviate from the spirit and scope of the technical solutions of the present invention.

Claims

1. A thermocouple temperature measurement displacement device for measuring the phase change temperature of a thin film material, characterized in that: It comprises a base, a cavity, a temperature measuring device and a displacement device; the cavity is installed on the upper surface of the base, the displacement device is arranged below the cavity, the temperature measuring device is arranged on the inner bottom side of the cavity, a sample stage is also arranged inside the cavity, a heating and cooling device is installed near the top of the cavity, the temperature measuring device is composed of a thermocouple, a thermocouple fixing sleeve, a thermocouple clamp, a thermocouple vertical displacement platform and a vertical displacement controller, one end of the thermocouple is installed on the thermocouple fixing sleeve, a side of the thermocouple fixing sleeve away from the thermocouple is fixed on the thermocouple vertical displacement platform through the thermocouple clamp, and the vertical displacement controller is connected to the thermocouple vertical displacement platform; A sealing interface is provided on the outer side of the cavity, the vertical displacement controller is installed on the sealing interface, and the thermocouple vertical displacement platform controls the vertical movement of the thermocouple fixture through the vertical displacement controller, thereby driving the thermocouple to move vertically; The cavity comprises a quick-closing door, a cavity shell, a main observation window, and a side observation window; the quick-closing door is arranged on one side of the cavity shell, the main observation window is arranged on the cavity shell and is arranged perpendicular to the quick-closing door, and the side observation window is also arranged on the cavity shell, at an angle of 45° to the main observation window and 135° to the quick-closing door; An observation window is also provided at the center of the quick-closing door; The sample stage is arranged directly above the heating and cooling device; One end of the thermocouple away from the thermocouple fixing sleeve is arranged at the exact center of the sample stage.

2. The thermocouple temperature measurement displacement device for measuring the phase change temperature of a thin film material according to claim 1, characterized in that: The displacement device is arranged inside the base.

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