A dynamic tilt compensation biaxial air floating platform, control method and exposure machine

Abstract

The present application relates to air floating structure manufacturing technical field, especially a kind of dynamic tilt compensation's double-shaft air floating platform, including the substrate platform for placing positioning glass substrate, micro-actuator is arranged in the bottom end of substrate platform, and X axis dynamic compensation adjusting device and Y axis dynamic compensation adjusting device for adjusting the flatness of air floating mechanism, Y axis dynamic compensation adjusting device respectively with the contact surface between micro-actuator and X axis dynamic compensation adjusting device are densely covered with multiple air floating pads, multiple air floating pads are mutually spliced by fixed screw and form air floating guide rail;The top of each air floating pad is provided with equalizing groove, and air pressure sensor for detecting air film pressure change is arranged in equalizing groove, and air pressure sensor is equidistantly distributed at four corners and center of air floating pad.The double-shaft air floating platform of the present application can automatically carry out dynamic tilt compensation, reduce the pitch tilt and roll tilt of air floating platform, improve the motion accuracy of air floating platform, thereby improve the machining precision of exposure machine.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of air floating structure manufacturing, in particular to a dual-axis air floating platform with dynamic tilt compensation, a control method and an exposure machine. BACKGROUND

[0002] In high-end manufacturing equipment such as semiconductor exposure machines and precision laser cutting machines, dual-axis air floating platforms have become key components for achieving high-precision positioning and motion control due to their excellent stability, smoothness, and load capacity. However, due to the inherent characteristics of air floating pads, i.e., the existence of air films and limited stiffness, when the platform is subjected to external forces or its own motion, it is easy to exhibit pitch or roll tilt phenomena. Especially at the start-stop moment or when moving to the limit of travel, changes in air film thickness can cause destructive scratching between air floating plates, severely affecting the processing precision and equipment life of the exposure machine.

[0003] Chinese invention patent CN117406561A discloses a unloading device for a PCB exposure machine air floating mechanism. The air floating mechanism is used to support a horizontal workbench, and the unloading device provides support force to the horizontal workbench to unload. The unloading device is symmetrically arranged at both ends of the horizontal workbench and includes a support beam fixed horizontally on an exposure machine support and a mounting box slidingly connected to the support beam. A vertical elastic space is formed in the mounting box, and the horizontal workbench is connected to the upper surface of the mounting box. The mounting box continuously provides a support force to the horizontal workbench on both sides, reducing the load of the horizontal workbench acting on the air floating plate, achieving unloading effect, and increasing the air film thickness and load capacity between the air floating plate and the air floating shaft.

[0004] However, the air floating platform of this scheme lacks effective dynamic tilt compensation mechanism, and the unloading device relies on static balance or simple passive reaction to deal with the tilt problem. When the air film thickness changes, causing a pitch angle and a roll angle to exist on the air film, the air film cannot adaptively adjust the distribution of air pressure, thereby the air floating platform cannot effectively adjust its flatness, affecting the processing precision of the exposure machine. SUMMARY

[0005] To solve the technical defects proposed in the background art, the purpose of the present application is to provide a dual-axis air floating platform that can automatically perform dynamic tilt compensation, a control method, and an exposure machine with the same, thereby achieving adjustment of the flatness of the workpiece table of the exposure machine, reducing mechanical friction, reducing noise and vibration, effectively improving the problem of pitch and roll tilt of the air film during the exposure process, and thereby improving the processing precision and exposure quality of the exposure machine.

[0006] To achieve the above purpose, the present application adopts the following technical solutions:

[0007] The application discloses a dynamic tilt compensation biaxial air floating platform, which comprises a substrate platform for placing a positioning glass substrate, a micro-motion device arranged at the bottom end of the substrate platform, and X-axis dynamic compensation adjusting devices and Y-axis dynamic compensation adjusting devices for adjusting the flatness of the micro-motion device, wherein a plurality of air floating pads are densely arranged between the contact surfaces of the micro-motion device and the X-axis dynamic compensation adjusting devices and the Y-axis dynamic compensation adjusting devices respectively, and the air floating pads are spliced into air floating rails through fixing screws; a uniform pressure groove is formed at the top end of each air floating pad, and an air pressure sensor for detecting the air film pressure change is arranged in the air floating pad; the air pressure sensors are equidistantly distributed at the four corners and the center of the air floating pad; a gas pipe joint is further arranged at one end of the air floating pad, and the gas pipe joint is connected with the air source through an air pipe to form a gas supply pipeline; the air pressure sensor detects the pressure distribution of each air floating pad, obtains the air film thickness according to the pressure distribution, dynamically adjusts the air film thickness of the corresponding air floating pad by adjusting the air supply pressure of the corresponding air floating pad, and reduces the pitch tilt and roll tilt of the air film.

[0008] Preferably, the micro-motion device comprises gravity compensators, a micro-motion base, air floating pad mounting pieces and driving connecting pieces, the gravity compensators are arranged in plurality, one end of the gravity compensators is fixedly connected with the substrate platform, and the other end is connected with the micro-motion base; the air floating pad mounting pieces are symmetrically arranged between the micro-motion base and the X-axis dynamic compensation adjusting devices, and a plurality of through holes are formed in the air floating pad mounting pieces; the driving connecting pieces are arranged on the two sides of the air floating pad mounting pieces, and one end of the driving connecting pieces is electromagnetically connected with the Y-axis dynamic compensation adjusting devices.

[0009] Preferably, the X-axis dynamic compensation adjusting device comprises a base, support frames arranged on the two sides of the base, and X-direction linear motors arranged at the top ends of the support frames, X-direction bearing guide rails are parallelly arranged on the top end of the base, X-direction guide rails are arranged between the X-direction bearing guide rails, the X-direction bearing guide rails and the X-direction guide rails are arranged along the length direction of the base, and the X-direction bearing guide rails and the X-direction guide rails are connected with the Y-axis dynamic compensation adjusting devices through air floating pads; the X-direction linear motors are in transmission connection with the Y-axis dynamic compensation adjusting devices, so as to drive the Y-axis dynamic compensation adjusting devices to move along the direction of the X-direction guide rails.

[0010] Preferably, the Y-axis dynamic compensation adjusting device comprises a Y-direction moving table, Y-direction bearing guide rails arranged on the Y-direction moving table, Y-direction guide rails arranged between the Y-direction bearing guide rails and Y-direction linear motors for driving the Y-direction air floating rails to slide, the Y-direction moving table is arranged transversely and perpendicularly to the X-direction bearing guide rails, and the Y-direction bearing guide rails and the Y-direction guide rails are connected with the micro-motion device through air floating pads; the Y-direction linear motors are in transmission connection with the driving connecting pieces, so as to drive the micro-motion device to move along the direction of the Y-direction guide rails.

[0011] Preferably, the X-direction linear motor and the Y-direction linear motor are driven by a magnetic guide rail structure, and the inner wall of the magnetic guide rail is densely covered with electromagnetic blocks, and the magnetic guide rail is connected with the Y-direction bearing guide rail and the driving connecting piece through a magnetic driver.

[0012] Preferably, the air cushion pad includes a bearing air cushion pad and a guiding air cushion pad, the bearing air cushion pad is arranged on the X-direction bearing guide rail and the Y-direction bearing guide rail, and the guiding air cushion pad is arranged on the two side walls of the X-direction guiding guide rail and the Y-direction guiding guide rail.

[0013] A control method of dynamic tilt compensation, comprising the following steps:

[0014] a. When the X-direction linear motor accelerates or decelerates, considering that the gas delivery needs a certain time, the air supply pressure of the bearing air cushion pad is adjusted in advance by a preset time, the real-time pressure data of the bearing air cushion pad is obtained through the air pressure sensor, the air supply amount of each bearing air cushion pad is dynamically calculated and adjusted, so as to compensate the pitch tilt caused by the acceleration or deceleration of the X-direction linear motor;

[0015] b. When the Y-direction linear motor moves to the two ends of the stroke range, the pressure distribution of each bearing air cushion pad and guiding air cushion pad is detected, the air film thickness change is calculated in real time, the air supply pressure of the guiding air cushion pad on the side with thinner air film is automatically increased, and the thickness difference of the air film on both sides is reduced.

[0016] Preferably, in the step a, a mathematical model of the relationship between the air film thickness and the pressure distribution is established, the air supply pressure of the air cushion pad on the tilt side is calculated and adjusted in combination with the acceleration / deceleration curve of the X-direction linear motor, and the air film thickness change is ensured to be less than a preset threshold.

[0017] Preferably, in the step b, a pressure distribution detection system is integrated, the air film thicknesses of the left and right air cushion pads are monitored and compared in real time, and the air supply pressure is adjusted by using a PID control algorithm, so as to realize rapid response and accurate compensation.

[0018] An exposure machine comprising the above-mentioned dynamic tilt compensation biaxial air cushion platform.

[0019] In summary, the beneficial effects of the present application are as follows:

[0020] The present application detects and judges the pressure distribution of each air cushion pad by using a plurality of air pressure sensors, so as to more accurately judge the air film thickness of each air cushion pad, and then dynamically adjusts the air film thickness of the corresponding air cushion pad by adjusting the air supply pressure of the corresponding air cushion pad, so as to reduce the tilt of the part above the air film, improve the movement precision of the air cushion platform, and then realize the adjustment of the flatness of the workpiece table of the exposure machine, reduce mechanical friction, reduce noise and vibration, effectively improve the problem of pitch and roll tilt of the air film in the exposure process, and improve the machining precision and exposure quality of the exposure machine.BRIEF DESCRIPTION OF DRAWINGS BRIEF DESCRIPTION OF DRAWINGS

[0021] Figure 1 is a structural schematic diagram of a double-axis air-floating platform of the present application which automatically performs dynamic tilt compensation;

[0022] Figure 2 is a structural schematic diagram of the internal structure of a double-axis air-floating platform of the present application which automatically performs dynamic tilt compensation;

[0023] Figure 3 is a top view of a double-axis air-floating platform of the present application which automatically performs dynamic tilt compensation;

[0024] Figure 4 is a sectional view of the A-A plane in Figure 3

[0025] Figure 5 is a sectional view of the B-B plane in Figure 3

[0026] Figure 6 is a structural schematic diagram of an X-axis dynamic compensation adjustment device in the present application;

[0027] Figure 7 is an enlarged view of the structure at a in Figure 6

[0028] Figure 8 is a structural schematic diagram of a Y-axis dynamic compensation adjustment device in the present application;

[0029] Figure 9 is a structural schematic diagram of a single air-floating pad in the present application;

[0030] Figure 10 is a schematic diagram of automatic dynamic compensation adjustment of the X-direction tilt or roll tilt of the air film in the present application.

[0031] 1, base plate platform; 2, micro-motion device; 21, gravity compensator; 22, micro-motion base; 23, air-floating pad mounting member; 24, driving connecting member; 3, X-axis dynamic compensation adjustment device; 31, base; 32, support frame; 33, X-direction linear motor; 34, X-direction load-bearing guide rail; 35, X-direction guide rail; 4, Y-axis dynamic compensation adjustment device; 41, Y-direction moving table; 42, Y-direction load-bearing guide rail; 43, Y-direction guide rail; 44, Y-direction linear motor; 5, air-floating pad; 51, load-bearing air-floating pad; 52, guide air-floating pad; 53, pressure equalization groove; 6, air pressure sensor; 7, gas supply pipe joint; 8, electromagnetic block; 9, magnetic drive; 10, air film. DETAILED DESCRIPTION

[0032] ​​With reference to the accompanying drawings, the technical solutions in the embodiments of the present application will be described clearly and completely. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments of the present application. Based on the embodiments of the present application, all the other embodiments obtained by a person of ordinary skill in the art belong to the scope of protection of the present application.

[0033] Those skilled in the art should understand that, in the disclosure of the present application, the orientations or positional relationships indicated by the terms "longitudinal", "transverse", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer" and the like are based on the orientations or positional relationships shown in the drawings, which are only for the purpose of facilitating the description of the present application and simplifying the description, and do not indicate or imply that the devices or elements indicated thereby must have a particular orientation, be constructed and operated in a particular orientation, therefore the above terms cannot be understood as a limitation on the present application.

[0034] In addition, the terms "mount", "set", "provided with", "connected", "linked" should be understood broadly. For example, it can be fixed connection, detachable connection, or integral structure; it can be mechanical connection, or electrical connection; it can be direct connection, or indirect connection through an intermediate medium, or internal communication between two devices, elements or components. For a person of ordinary skill in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0035] In the description of the present application, if the word "several" or the like is described, the meaning is one or more, the meaning of more is two or more, greater than, less than, more than, etc. are not included in the number, above, below, within, etc. are understood to include the number. If the first, second, third is described, it is only for the purpose of distinguishing technical features, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of indicated technical features or the sequence of indicated technical features.

[0036] The following will be described in detail with reference to the accompanying drawings. Figures 1-10 The embodiments of the dynamic tilt compensation biaxial air floating platform, the control method and the exposure machine of the present application will be described in further detail.

[0037] Embodiment one

[0038] A dynamic tilt compensation biaxial air floating platform, such as Figure 1 and Figure 9As shown, the system includes a substrate platform 1 for placing and positioning the glass substrate, a micro-motion device 2 located at the bottom of the substrate platform 1, and an X-axis dynamic compensation adjustment device 3 and a Y-axis dynamic compensation adjustment device 4 for adjusting the flatness of the air bearing mechanism. Multiple air bearing pads 5 are densely arranged between the contact surfaces of the Y-axis dynamic compensation adjustment device 4 and the micro-motion device 2 and the X-axis dynamic compensation adjustment device 3, respectively. These multiple air bearing pads 5 are spliced ​​together by fixing screws to form an air bearing guide rail. Each air bearing pad 5 has a pressure equalization groove 53 at its top, and a pressure sensor 6 for detecting pressure changes in the air film 10 is installed inside the air bearing pad 5. The pressure sensors 6 are equidistantly distributed at the four corners and the center of the air bearing pad 5. A throttling orifice is provided inside the gas bearing 5. The throttling orifice can be a small orifice throttling, porous medium throttling, or micro-orifice throttling. One end of the gas bearing 5 is also provided with a gas supply pipe connector 7 that connects to the throttling orifice. The gas supply pipe connector connects to the gas source through the gas pipe to form a gas supply pipeline. High-pressure gas is injected into the gas bearing 5 through the gas supply pipeline, thereby forming a bearing gas film between the outlet surface of the throttling orifice of the gas bearing 5 and the bearing surface of the guide rail. There is a corresponding relationship between the pressure distribution of the gas film and the thickness of the gas film. After the pressure sensor 6 detects the pressure distribution of each gas bearing 5 and obtains the thickness of the gas film 10 through the pressure distribution, the thickness of the gas film 10 of the corresponding gas bearing 5 is dynamically adjusted by adjusting the gas supply pressure of the corresponding gas bearing 5, so as to reduce the pitch and roll tilt of the gas film 10.

[0039] Specifically, preloaded magnets are spliced ​​between adjacent rows of air-float pads 5. These preloaded magnets respond quickly to the inflation speed of the air-float pads 5, allowing them to rapidly adjust the pressure distribution within the air-float pads 5 when the air film 10 tilts or rolls, thereby changing the thickness of the air film 10 and ensuring it remains flat. The air-float pads 5 include load-bearing air-float pads 51 and guide air-float pads 52. The load-bearing air-float pads 51 are laid flat on the X-direction load-bearing guide rail 34 and the Y-direction load-bearing guide rail 42; the guide air-float pads 52 are distributed on the side walls of the X-direction guide rail 35 and the Y-direction guide rail 43.

[0040] like Figure 10 As shown, by using multiple air pressure sensors 6 to detect and determine the pressure distribution of each air float 5, the thickness of the air film 10 of each air float 5 can be determined more accurately. Then, by adjusting the air supply pressure of the corresponding air float 5, the thickness of the air film 10 of the corresponding air float 5 can be dynamically adjusted, thereby reducing the tilt of the upper part of the air film 10, improving the motion accuracy of the air float platform, and effectively improving the positioning accuracy of the glass substrate and the processing accuracy of the exposure machine.

[0041] It is worth noting that in addition to the use of multiple air pressure sensors 6 to detect the thickness of the air film in real time, two non-contact displacement sensors can also be added at the two ends of the Y-direction platform 41 to measure the distance between the Y-direction load-bearing guide rail 42 and the X-direction load-bearing guide rail 34, thereby determining the inclination of the biaxial air floating platform, and then adjusting the air supply pressure of the gas bearing in the corresponding area according to the inclination, so as to ensure that the biaxial air floating platform does not tilt, effectively improving the motion accuracy, positioning accuracy, and machining accuracy.

[0042] In this embodiment, as shown in Figure 2 The micro-motion device 2 includes a gravity compensator 21, a micro-motion base 22, an air floating pad mounting member 23, and a driving connecting member 24. The gravity compensator 21 is provided in multiple numbers, one end of the multiple gravity compensators 21 is fixedly connected with the substrate platform 1, and the other end is connected with the micro-motion base 22. The air floating pad mounting member 23 is symmetrically arranged between the micro-motion base 22 and the X-axis dynamic compensation adjustment device 3, and a plurality of through holes are formed in the air floating pad mounting member 23. The driving connecting member 24 is arranged on both sides of the air floating pad mounting member 23, and one end of the driving connecting member 24 is electromagnetically connected with the Y-axis dynamic compensation adjustment device 4.

[0043] Specifically, the gravity compensator 21 can compensate for the gravity of the glass substrate on the substrate platform 1, so that the substrate platform 1 remains stable. The micro-motion base 22 connected at the bottom end of the gravity compensator 21 can adjust the position in real time according to the gravity change to avoid tilting and affecting the flatness of the substrate platform 1. The air floating pad mounting member 23 connected at the bottom end of the micro-motion base 22 can install a plurality of air floating pads 5, so that the friction between the micro-motion device 2 and the substrate platform 1 is reduced under the action of the air floating pads 5, and the transmission speed is faster and more accurate. In order to drive the micro-motion device 2 to slide along the Y-axis dynamic compensation adjustment device 4, driving connecting members 24 are arranged on both sides of the air floating pad mounting member 23. The bottom end of the driving connecting member 24 is electromagnetically connected with the Y-direction linear motor 44. The transmission principle is similar to magnetic suspension technology, so it is not described here.

[0044] In this embodiment, as shown in Figures 3-6 The X-axis dynamic compensation adjustment device 3 includes a base 31, support frames 32 arranged on both sides of the base 31, and an X-direction linear motor 33 arranged at the top end of the support frames 32. X-direction load-bearing guide rails 34 are arranged in parallel at the top end of the base 31. X-direction guide rails 35 are arranged between the X-direction load-bearing guide rails 34. The X-direction load-bearing guide rails 34 and the X-direction guide rails 35 are arranged along the length direction of the base 31, and are connected with the Y-axis dynamic compensation adjustment device 4 through the air floating pads 5. The X-direction linear motor 33 is drivingly connected with the Y-axis dynamic compensation adjustment device 4 to drive the Y-axis dynamic compensation adjustment device 4 to move along the X-direction guide rails 35.

[0045] Specifically, in the process of X-axis dynamic compensation adjustment, focusing on the acceleration or deceleration process of the X-direction linear motor 33, a thrust will be generated on the part above the air cushion pad 5 on the X-direction load bearing rail 34, which will cause the part above the air cushion pad 5 to be subjected to a moment, thereby causing a pitch tilt; and in the stage before the X-direction linear motor 33 is about to start or change speed, the system actively increases or decreases the air supply pressure of the load bearing air cushion pad 51 in the corresponding area, the pressure distribution is monitored in real time through the built-in air pressure sensor 6, a feedback loop is formed, and the air supply pressure is finely adjusted to offset the moment effect caused by the acceleration or deceleration of the X-direction linear motor 33, thereby preventing unnecessary pitch tilt of the air floating platform. This method can ensure the balanced distribution of the air film 10 thickness through predictive pressure adjustment and immediate feedback control, and can avoid the risk of scratching caused by excessive deviation of the air film 10.

[0046] In the embodiment, as shown in Figure 7 , 8 , the Y-axis dynamic compensation adjustment device 4 includes a Y-direction moving table 41, a Y-direction load bearing rail 42 arranged on the Y-direction moving table 41, a Y-direction guide rail 43 between the Y-direction load bearing rails 42, and a Y-direction linear motor 44 for driving the Y-direction air floating rail to slide, the Y-direction moving table 41 is arranged transversely and perpendicularly to the X-direction load bearing rail 34, and the Y-direction load bearing rail 42 and the Y-direction guide rail 43 are connected with the micro-motion device 2 through the air cushion pad 5; the Y-direction linear motor 44 is in transmission connection with the driving connection piece 24 to drive the micro-motion device 2 to move along the direction of the Y-direction guide rail 43.

[0047] Specifically, when the air cushion pad 5 on the Y-direction load bearing rail 42 moves to the two ends of the stroke, the effective load borne by the left and right load bearing air cushion pads 51 and the guide air cushion pads 52 will change asymmetrically, thereby causing the difference in the thickness of the air film 10 and inducing the problem of roll tilt. Therefore, in the process of Y-axis transmission, the system collects the pressure information of the left and right load bearing air cushion pads 51 and the guide air cushion pads 52 in real time through the air pressure sensor 6, and constructs a data map reflecting the change in the thickness of the air film 10. Then, according to the information base, the system intelligently judges which side of the air film 10 is relatively weak, and increases the air supply pressure of the air cushion pad 5 on the side accordingly until the thickness of the air film 10 on both sides tends to be consistent, thereby eliminating the roll tilt. This series of compensation measures are automatically completed under the guidance of the closed-loop control logic, ensuring the accuracy and timeliness of the compensation process.

[0048] In the embodiment, the X-direction linear motor 33 and the Y-direction linear motor 44 both adopt the structure of magnetic force guide rail for transmission, and the inner side wall of the magnetic force guide rail is densely covered with electromagnetic blocks 8, and the magnetic force guide rail is connected with the Y-direction load bearing rail 42 and the driving connection piece 24 through the magnetic force driver 9.

[0049] Specifically, the X-direction linear motor 33 and the Y-direction linear motor 44 are both magnetic guide rails, which can be driven by the electromagnetic induction principle in cooperation with the magnetic driver 9, so as to quickly drive the X-direction guide rail 35 and the Y-direction guide rail 43 to move, thereby improving the conveying efficiency of the dual-axis air floating platform.

[0050] Embodiment two

[0051] A control method of dynamic tilt compensation, comprising the following steps:

[0052] a) When the X-direction linear motor 33 accelerates or decelerates, considering that the gas conveying needs a certain time, the gas supply pressure of the load air floating pad 51 is adjusted in advance by a preset time, the real-time pressure data is obtained by the air pressure sensor 6 in the load air floating pad 51, the gas supply amount of each load air floating pad 51 is dynamically calculated and adjusted, so as to compensate the pitch tilt caused by the acceleration or deceleration of the X-direction linear motor 33;

[0053] b) When the Y-direction linear motor 44 moves to both ends of its stroke range, the thickness change of the air film 10 is calculated in real time by detecting the pressure distribution of each load air floating pad 51 and the guide air floating pad 52, the gas supply pressure of the guide air floating pad 52 on the thinner side of the air film 10 is automatically increased, the thickness difference of the air film 10 on both sides is reduced, and the roll tilt is reduced or eliminated.

[0054] In this embodiment, in step a), the gas supply pressure of the air floating pad 5 on the tilt side is calculated and adjusted by establishing a mathematical model of the relationship between the thickness of the air film 10 and the pressure distribution, combined with the acceleration / deceleration curve of the linear motor, to ensure that the thickness change of the air film 10 does not exceed the preset threshold.

[0055] In this embodiment, the step b) is specifically integrated with a pressure distribution detection system, which monitors and compares the thickness of the air film 10 on both sides of the air floating pad 5 in real time, and adjusts the gas supply pressure by using a PID control algorithm to achieve rapid response and accurate compensation.

[0056] Specifically, in addition to the above two key technical points, the method of the present application also integrates a series of auxiliary mechanisms to form a complete and efficient dynamic tilt compensation system: including

[0057] Real-time monitoring system: continuously tracks the running state of the air floating pad 5, including but not limited to important indicators such as the thickness of the air film 10, the pressure distribution, temperature fluctuations, etc., to ensure that any abnormal situation can be detected and handled in the first time, and the probability of sudden failure is minimized.

[0058] Adaptive correction mechanism: based on machine learning algorithm, the optimal compensation strategy is refined from the long-term accumulated actual operation data, which is iteratively updated, so that the compensation effect is closer to the ideal target, and the stability and robustness of the system are further enhanced.

[0059] Embodiment three

[0060] An exposure machine adopts the dynamic tilt compensation biaxial air floating platform as a workpiece table, so that the workpiece can be quickly and smoothly transported when the exposure machine is working, and the positioning accuracy of the glass substrate to be processed and the processing accuracy of the exposure machine are effectively improved.

[0061] Working principle of the present application:

[0062] During the conveying of the workpiece by the biaxial air floating platform, the X-axis dynamic compensation adjusting device 3 and the Y-axis dynamic compensation adjusting device 4 can perform synchronous dynamic compensation according to the processing requirements, the pressure distribution of each air floating pad 5 is detected and judged by using multiple air pressure sensors 6, so that the thickness of the air film 10 of each air floating pad 5 is more accurately judged, and then the thickness of the air film 10 of the corresponding air floating pad 5 is dynamically adjusted by adjusting the air supply pressure of the corresponding air floating pad 5, so that the tilt of the part above the air film 10 is reduced, and the movement accuracy of the air floating platform is improved.

[0063] The embodiments of the present embodiment are the preferred embodiments of the present application, and are not intended to limit the protection scope of the present application, wherein the same parts are denoted by the same reference numerals. Therefore: any equivalent changes made according to the structure, shape, principle of the present application should be covered within the protection scope of the present application.

Claims

1. A dual-axis air-floating platform with dynamic tilt compensation, comprising a substrate platform for placing a positioning glass substrate, a micro-motion device arranged at the bottom end of the substrate platform, and an X-axis dynamic compensation adjusting device and a Y-axis dynamic compensation adjusting device for adjusting the flatness of the micro-motion device, characterized in that, The Y-axis dynamic compensation adjusting device is densely provided with a plurality of air floating pads between the contact surfaces of the micro-motion device and the X-axis dynamic compensation adjusting device, the plurality of air floating pads are spliced together by fixing screws to form an air floating guide rail; a preloaded magnetic steel is spliced between two adjacent rows of air floating pads, and the preloaded magnetic steel can instantaneously adjust the pressure distribution in the air floating pad when the air film is tilted in pitch or roll; A uniform pressure groove is formed at the top end of each air floating pad, and an air pressure sensor for detecting the pressure change of the air film is arranged in the air floating pad, the air pressure sensor is equidistantly distributed at the four corners and the center of the air floating pad; one end of the air floating pad is also provided with a gas supply pipe joint, the gas supply pipe joint is connected to the gas source through an air pipe to form a gas supply pipeline; the air pressure sensor detects the pressure distribution of each air floating pad, obtains the air film thickness according to the pressure distribution, dynamically adjusts the air film thickness of the corresponding air floating pad by adjusting the gas supply pressure of the corresponding air floating pad, so that the pitch tilt and roll tilt of the air film are reduced; The micro-motion device comprises gravity compensators, a micro-motion base, an air floating pad mounting piece, and a driving connecting piece, the gravity compensators are provided in plurality, one end of the plurality of gravity compensators is fixedly connected with the base plate platform, and the other end is connected with the micro-motion base; the air floating pad mounting piece is symmetrically arranged between the micro-motion base and the X-axis dynamic compensation adjusting device, and a plurality of through holes are formed in the air floating pad mounting piece; the driving connecting piece is arranged on both sides of the air floating pad mounting piece, and one end of the driving connecting piece is electromagnetically connected with the Y-axis dynamic compensation adjusting device; The air floating pad comprises a load-bearing air floating pad and a guide air floating pad, the load-bearing air floating pad is arranged on the X-direction load-bearing guide rail and the Y-direction load-bearing guide rail; the guide air floating pad is distributed on the two side walls of the X-direction guide rail and the Y-direction guide rail; When the X-direction linear motor accelerates or decelerates, considering that it takes a certain time to transport gas, the gas supply pressure of the load-bearing air floating pad is adjusted in advance by a preset time, the real-time pressure data is obtained by the air pressure sensor in the load-bearing air floating pad, the gas supply amount of each load-bearing air floating pad is dynamically calculated and adjusted, so as to compensate for the pitch tilt caused by the acceleration or deceleration of the X-direction linear motor; When the Y-direction linear motor moves to the two ends of its stroke range, the pressure distribution of each load-bearing air floating pad and guide air floating pad is detected, the air film thickness change is calculated in real time, the gas supply pressure of the guide air floating pad on the side with thinner air film is automatically increased, and the thickness difference of the air film on both sides is reduced.

2. The dual-axis air-bearing stage with dynamic tilt compensation according to claim 1, wherein, The X-axis dynamic compensation adjusting device comprises a base, support frames arranged on both sides of the base, and an X-direction linear motor arranged at the top end of the support frame, X-direction load-bearing guide rails are parallelly arranged on the top end of the base, X-direction guide rails are arranged between the X-direction load-bearing guide rails, the X-direction load-bearing guide rails and the X-direction guide rails are arranged along the length direction of the base, and the X-direction load-bearing guide rails and the X-direction guide rails are connected with the Y-axis dynamic compensation adjusting device through air floating pads; the X-direction linear motor is in transmission connection with the Y-axis dynamic compensation adjusting device, so as to drive the Y-axis dynamic compensation adjusting device to move along the direction of the X-direction guide rail.

3. The dual-axis air-bearing stage with dynamic tilt compensation according to claim 1, wherein, The Y-axis dynamic compensation adjusting device comprises a Y-direction moving table, Y-direction bearing guide rails arranged on the Y-direction moving table, Y-direction guiding guide rails between the Y-direction bearing guide rails, and Y-direction linear motors for driving the Y-direction air floating guide rails to slide, the Y-direction moving table is arranged transversely and perpendicularly to the X-direction bearing guide rails, and the Y-direction bearing guide rails and the Y-direction guiding guide rails are respectively connected with the micro-motion device through air floating pads.

4. The dual-axis air-bearing platform with dynamic tilt compensation of claim 1, wherein, The X-direction linear motor and the Y-direction linear motor are both driven by the structure of magnetic guide rails, and the inner side walls of the magnetic guide rails are densely covered with electromagnetic blocks, and the magnetic guide rails are connected with the Y-direction bearing guide rails and the driving connecting piece through magnetic drivers.

5. The dynamically tilt-compensated two-axis airfloated platform according to claim 1, characterized in that, By establishing a mathematical model of the relationship between the air film thickness and the pressure distribution, combining the acceleration / deceleration curve of the X-direction linear motor, the air supply pressure of the air floating pad on the inclined side is calculated and adjusted to ensure that the change of the air film thickness does not exceed the preset threshold.

6. The dual-axis air-bearing platform with dynamic tilt compensation of claim 1, wherein, It also comprises a pressure distribution detection system, which monitors and compares the air film thickness of the air floating pads on the left and right sides in real time, and adjusts the air supply pressure by using the PID control algorithm to realize rapid response and accurate compensation. 7.An exposure machine comprising the dynamic tilt compensation biaxial air floating platform according to any one of claims 1-6.

Images