Material taking and adsorbing equipment for Chiplet process

Abstract

The invention relates to Chiplet process material taking and adsorbing equipment, and relates to the technical field of process equipment, the material taking and adsorbing equipment comprises a frame body, a jig for adsorbing and positioning a product, a second vacuum cavity formed between the jig and the product and used for directly adsorbing the product, and a transverse moving assembly for carrying the product into the jig, and the edge pressing assembly is used for pressing the side edge of the product placed in the jig, and is used for pressing the warped side edge of the product into the jig and forming a sealed second vacuum cavity between the edge pressing assembly and the jig. The product is clamped through the transverse moving assembly, then the product is placed in the jig, then the warped side edge of the product is pressed into the jig through the edge pressing assembly, the side wall of the product and the jig are sealed, a second vacuum cavity is formed between the product and the jig, the adsorption force on the product is improved through the second vacuum cavity, and the product quality is improved. And therefore, the product is kept horizontal, and the product can be conveniently put into the jig and effectively adsorbed on the jig.

Description

Technical Field

[0001] The present application relates to the technical field of process equipment, and in particular to a chiplet process material taking adsorption equipment. Background Art

[0002] In the chiplet process, the product needs to be taken out from the discharge area, then placed in the fixture and adsorbed and positioned to facilitate subsequent processing of the product.

[0003] The traditional material picking process is to install multiple sets of suction cups on the manipulator, which drives the suction cups to the product position, adsorbs the product through the suction cups, and then moves the product into the fixture under the action of the manipulator. The suction cups release the product and place the product completely into the fixture, and adsorb the bottom of the product through the suction nozzle in the fixture, so that the product is flat and close to the fixture, which is convenient for subsequent processing of the product.

[0004] However, when the product is hard and has a large warpage, the warpage amplitude of different products varies, making the upper surfaces of the products not on the same level. The traditional method of adding a robot arm and a suction cup can easily cause uneven force on multiple suction cups, causing the product to fall off during transportation. At the same time, the robot arm requires a large range of motion, which is not convenient for use in a narrow environment. At the same time, the suction nozzle in the fixture has a small adsorption surface, resulting in insufficient adsorption force. At the same time, the product is hard and has a large warpage, so it is easy for the product to fail to be effectively adsorbed on the fixture. Summary of the invention

[0005] In order to facilitate the placement of the product into the jig and effectively adsorb it on the jig, the present application provides a chiplet process material removal and adsorption device.

[0006] The present application provides a chiplet process material taking and adsorption equipment, which adopts the following technical solution: A chiplet process material taking and adsorption equipment comprises a frame, a jig for adsorbing and positioning a product is arranged on the frame, a second vacuum chamber for directly adsorbing the product is formed between the jig and the product, a transverse movement component for transporting the product into the jig is arranged on the frame, the transverse movement component is used to clamp the product and place it into the jig, a side pressing component for pressing the side edge of the product placed in the jig is arranged on the frame, the side pressing component is used to press the warped side edge of the product into the jig and form a sealed second vacuum chamber with the jig.

[0007] By adopting the above technical solution, the transverse movement component clamps the product and then places the product into the jig. Then the edge pressing component presses the warped side of the product into the jig, so that the side wall of the product is sealed with the jig, and a second vacuum chamber is formed between the product and the jig. The adsorption force on the product is improved by the second vacuum chamber, so that the product remains horizontal, thereby facilitating the placement of the product into the jig and effectively adsorbing it on the jig.

[0008] Further, the traverse assembly comprises: A transverse plate, the transverse plate being slidably arranged on the frame; A transverse driving member, which is arranged on the frame and is used to drive the transverse plate to slide; Clamping blocks, two groups of the clamping blocks are slidably arranged on the transverse plate in a direction of approaching or moving away from each other and are used to clamp the side of the product. After the two groups of the clamping blocks clamp the product, the product is driven to move through the transverse plate; A clamping drive member is arranged on the transverse plate and is used to drive the two groups of clamping blocks to slide.

[0009] By adopting the above technical solution, when the transverse driving member drives the transverse plate to move to the specified position, the clamping driving member drives the two groups of clamping blocks to approach each other to clamp the product, and then the transverse driving member drives the transverse plate to slide, and finally drives the product to move, so as to clamp the product and place it in the fixture.

[0010] Furthermore, the edge pressing assembly comprises: A sliding plate, the sliding plate is slidably arranged on the frame along a direction approaching or moving away from the upper surface of the jig; A sliding driving member, which is arranged on the frame and is used to drive the sliding plate to slide; Connecting blocks, a plurality of groups of connecting blocks are arranged on the sliding plate; The edge pressing blocks, two groups of the edge pressing blocks are arranged on the sliding plate through the connecting blocks and press the two edges of the end faces parallel to the sliding direction of the product and the transverse plate into the fixture. When the edge pressing blocks and the sliding plate slide, there is no interference with the transverse assembly.

[0011] By adopting the above technical solution, when the transverse movement assembly places the product on the jig, the sliding drive member drives the sliding plate to slide toward the jig, so that the edge pressing block presses the warped side of the product into the jig. At the same time, the edge pressing block is connected to the sliding plate through the connecting block, thereby avoiding interference with the transverse movement assembly.

[0012] Furthermore, the edge pressing block is provided with a plurality of auxiliary pressing components for pressing both sides of the end surface of the product perpendicular to the direction of the transverse plate, and the auxiliary pressing components include: An auxiliary pressure block, the auxiliary pressure block is rotatably arranged on the edge pressure block; The telescopic driving member is hingedly arranged on the side wall of the connecting block and is rotatably connected to the auxiliary pressure block. The telescopic driving member is used to drive the auxiliary pressure block to rotate on the edge pressing block and press the end face edge of the product perpendicular to the sliding direction of the transverse plate.

[0013] By adopting the above technical solution, the telescopic driving member is shortened so that the auxiliary pressure block is in a vertical state, avoiding interference with the movement of the transverse plate. When the transverse plate moves the product into the fixture and the transverse plate moves to a safe area, the telescopic driving member is extended to make the auxiliary pressure block flush with the edge pressure block, so as to jointly press the four sides of the product into the positioning groove, thereby facilitating the formation of the second vacuum cavity, thereby improving the adsorption effect of the fixture on the product.

[0014] Furthermore, the frame is provided with a loading assembly for loading the product, and the loading assembly includes: A mounting seat, the mounting seat is slidably arranged on the frame along a vertical direction; A material loading drive, which is arranged on the frame and used to drive the mounting seat to slide; A placing rack, wherein a plurality of groups of the placing racks are arranged at intervals on the mounting seat and are used to place the products to be processed; The detector is arranged on the rack and is used to detect whether the product on the rack has moved to a designated position.

[0015] By adopting the above technical solution, when there are products on the placement rack and when the detector has not detected that the product on the placement rack has reached the specified position, the loading drive is started to drive the mounting base to slide upward until the detector detects that the product on the placement rack has reached the specified position, so that the transverse movement component can clamp the product.

[0016] Furthermore, the placement rack has multiple sets of fixing grooves spaced apart on the two opposite side walls, and two sets of the fixing grooves at the same height respectively fix the two ends of the product. After the two sets of clamping blocks clamp the product, the product can be pulled to slide out of the placement rack along the length direction of the fixing groove.

[0017] By adopting the above technical solution, two groups of fixing grooves at the same height are used to fix the two sides of the product, which is convenient for fixing the position of the product. When the transverse moving component clamps the product, the product slides out of the placement rack along the length direction of the fixing groove as the transverse moving component moves horizontally.

[0018] Furthermore, the fixture is provided with a positioning groove for placing the product, and a plurality of groups of support columns for supporting the product are arranged at intervals on the bottom of the positioning groove. The plurality of support columns ensure a certain distance between the product and the bottom of the positioning groove. The edge pressing assembly presses the end face of the product and seals the product tightly on the positioning groove. The second vacuum chamber is a sealed chamber formed by the positioning groove and the product, and the height of the second vacuum chamber is equal to the height of the support column.

[0019] By adopting the above technical solution, after the product is placed on the jig, the position of the product is positioned through the positioning groove, and multiple groups of support columns support the lower surface of the product so that there is a certain distance between the product and the bottom of the positioning groove. When the edge pressing assembly presses the warped edge of the product into the positioning groove, a sealed second vacuum chamber is formed between the product and the positioning groove. By extracting the gas in the second vacuum chamber, the adsorption force on the product is increased, which facilitates the stable adsorption of the product on the jig.

[0020] Furthermore, a first vacuum chamber is provided inside the fixture, the first vacuum chamber is connected to a vacuum negative pressure device, a plurality of groups of vacuum holes are provided on the positioning groove at intervals, the plurality of groups of vacuum holes and the plurality of support columns are arranged alternately, and the vacuum holes are used to connect the first vacuum chamber and the second vacuum chamber.

[0021] By adopting the above technical solution, the first vacuum chamber is connected to the vacuum negative pressure equipment. When the gas in the second vacuum chamber needs to be extracted, the gas in the first vacuum chamber is extracted by the vacuum negative pressure equipment, and the gas in the second vacuum chamber is extracted into the first vacuum chamber through multiple groups of vacuum holes, thereby reducing the probability of product deformation due to excessive suction in some places in the second vacuum chamber.

[0022] Furthermore, the fixture is provided with a plurality of groups of lifting holes at intervals, and the fixture is provided with a lifting assembly for lifting the product, and the lifting assembly includes: A lifting plate, wherein the lifting plate is slidably disposed on the fixture in a direction close to or away from the positioning groove; Lifting rods, multiple groups of which are arranged at intervals on the lifting plate, and the lifting rods slide in the lifting holes to lift the bottom of the product; A lifting drive component is arranged on the frame and is used to push the lifting plate to slide.

[0023] By adopting the above technical solution, before the transverse movement component clamps the product onto the fixture, the jacking plate is first driven by the jacking drive component to slide toward the positioning groove, so that multiple groups of jacking rods extend out of the fixture, and then the product is placed on the multiple groups of jacking rods, so as to facilitate the sliding of the clamping block and release the product. When the transverse movement component enters the safe area, the jacking drive component drives the jacking plate to move downward, so that the product enters the fixture; when the product processing is completed, the jacking drive component drives the jacking plate to rise and pushes the product out of the positioning groove, so as to facilitate the placement or removal of the product.

[0024] Furthermore, the fixture is provided with a positioning block, which is flush with the support column. The edge pressing block presses the product against the positioning block and seals the positioning holes on the product. The positioning block is provided with positioning grooves that cooperate with the positioning holes at intervals.

[0025] By adopting the above technical solution, when the product is placed on the jig and pressed by the edge clamping assembly, the positioning hole on the product is pressed and sealed by the positioning block, and at the same time, the coaxiality of the positioning hole on the product and the positioning groove is detected to detect the installation accuracy of the product on the jig.

[0026] In summary, the present application includes at least one of the following beneficial technical effects: 1. The loading drive drives the product on the placement rack to the specified position, and then the transverse drive drives the transverse plate to the specified position. After the product is clamped by two sets of clamping blocks, the transverse drive drives the product to move transversely to the fixture, and the product is supported by multiple sets of lifting rods. Then the two sets of clamping blocks release the product and move away from the fixture under the action of the transverse drive, and the lifting rod retracts the fixture and allows the product to enter the positioning groove. Then the sliding drive drives the two sets of edge pressing blocks to press on both sides of the product end surface through the sliding plate, and press the raised two ends of the product into the positioning groove, so that the product and the positioning groove are sealed and connected, and the negative pressure device is started to extract the gas in the first vacuum chamber and the second vacuum chamber, so that the product is pressed against the multiple sets of support columns under the suction force in the second vacuum chamber, so that the product remains horizontal, so as to facilitate the placement of the product in the fixture and effectively adsorb it on the fixture.

[0027] 2. The auxiliary pressure block is in a vertical state by shortening the telescopic driving member to avoid interference with the movement of the transverse plate. When the transverse plate moves the product into the fixture and the transverse plate moves to a safe area, the telescopic driving member is extended to make the auxiliary pressure block flush with the edge pressure block, so as to jointly press the four sides of the product into the positioning groove, thereby facilitating the formation of the second vacuum cavity, thereby improving the adsorption effect of the fixture on the product. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 is a schematic structural diagram of the material taking and adsorption equipment of Example 1 of the present application; Figure 2 yes Figure 1 The enlarged schematic diagram of the middle A part; Figure 3 It is a schematic diagram of the structure of the feeding assembly of Example 1 of the present application; Figure 4 is a schematic diagram of the structure of the material taking and adsorption device of Example 1 of the present application, wherein the material loading component is not shown; Figure 5 is a schematic diagram of the fixture structure of Example 1 of the present application; Figure 6 yes Figure 5 Schematic cross-section of the middle BB; Figure 7 yes Figure 5 Schematic cross-section of the CC; Figure 8 yes Figure 5 The enlarged schematic diagram of the middle D part; Fig. 9 is a schematic structural diagram of a material taking and adsorption device according to Example 2 of the present application, wherein the material loading assembly is not shown and the telescopic driving member is in an extended state; Fig.10 It is a schematic diagram of the structure of the auxiliary pressure assembly of Example 2 of the present application.

[0029] Figure numerals: 1. frame; 2. fixture; 21. lower plate; 22. upper plate; 23. first vacuum chamber; 24. positioning groove; 25. support column; 26. vacuum hole; 3. transverse movement assembly; 31. transverse movement plate; 32. transverse movement driving member; 33. clamping block; 34. clamping driving member; 4. loading assembly; 41. mounting seat; 42. loading driving member; 43. placement rack; 431. fixing groove; 44. detector; 5. edge pressing assembly; 51. sliding plate; 52. connecting block; 53. edge pressing block; 6. positioning block; 61. positioning sink groove; 7. lifting assembly; 71. lifting plate; 72. lifting rod; 73. lifting driving member; 8. auxiliary pressure assembly; 81. auxiliary pressure block; 82. telescopic driving member. DETAILED DESCRIPTION

[0030] The following is combined with Figure 1-10 This application is described in further detail.

[0031] The embodiment of the present application discloses a chiplet process material taking and adsorption equipment.

[0032] Example 1 Reference Figure 1 A chiplet process material taking and adsorption equipment comprises a frame 1, a jig 2 for adsorbing and positioning a product is arranged on the frame 1, a second vacuum chamber for directly adsorbing the product is formed between the jig 2 and the product, a transverse moving component 3 for transporting the product to the jig 2 is arranged on the frame 1, the transverse moving component 3 is used to clamp the product and put it into the jig 2, a side pressing component 5 for pressing the side of the product placed in the jig 2 is arranged on the frame 1, and the side pressing component 5 is used to press the warped side of the product into the jig 2 and form a sealed second vacuum chamber with the jig 2.

[0033] Reference Figure 1 and Figure 2The transverse moving assembly 3 includes a transverse moving plate 31, a transverse moving driving member 32, a clamping block 33 and a clamping driving member 34. The transverse moving plate 31 is slidably mounted on the frame 1 in the horizontal direction; the transverse moving driving member 32 is arranged on the frame 1, and the transverse moving driving member 32 is used to drive the transverse moving plate 31 to slide. The transverse moving driving member 32 includes a transverse moving screw and a transverse moving motor. The transverse moving screw is rotatably mounted on the frame 1 and is threadedly connected to the transverse moving plate 31. The transverse moving motor is fixedly mounted on the frame 1 and is used to drive the transverse moving screw to rotate, thereby driving The transverse plate 31 slides on the frame 1; two groups of clamping blocks 33 are provided, and the two groups of clamping blocks 33 are installed on the transverse plate 31 to slide in the direction of approaching or moving away from each other. The two groups of clamping blocks 33 are used to clamp the side edges of the product. After the two groups of clamping blocks 33 clamp the side edges of the product, the product is driven to move by the sliding of the transverse plate 31; the clamping drive 34 is fixedly installed on the transverse plate 31, and the clamping drive 34 is used to drive the two groups of clamping blocks 33 to slide; the clamping drive 34 of this embodiment is a clamping cylinder.

[0034] Reference Figure 1 and 3 A loading component 4 for loading products is provided on the frame 1, and the loading component 4 includes a mounting seat 41, a loading drive 42, a placement rack 43 and a detector 44. The mounting seat 41 is slidably mounted on the frame 1 along the vertical direction; the loading drive 42 is arranged on the frame 1 and is used to drive the mounting seat 41 to slide, and the loading drive 42 includes a loading screw and a loading motor. The loading screw is rotatably mounted on the frame 1 and is threadedly connected to the mounting seat 41. The loading motor is fixedly mounted on the frame 1 and is used to drive the loading screw to rotate, thereby driving the mounting seat 41 to slide in the vertical direction; a plurality of placement racks 43 are provided, and a plurality of groups of placement racks 43 are installed on the mounting seat 41 at intervals, and the placement racks 43 are used to place products to be processed.

[0035] Reference Figure 1 and Figure 3 The placement rack 43 includes a base and two groups of fixing plates, the two groups of fixing plates are fixedly mounted on the upper surface of the base, the two groups of fixing plates are mounted parallel to each other, and multiple groups of fixing grooves 431 are arranged on opposite sides of the two groups of fixing plates at intervals, and the two groups of fixing grooves 431 on the two groups of fixing plates at the same height respectively fix the two ends of the product; the detector 44 is fixedly mounted on the frame body 1, and the detector 44 is used to detect whether the product on the placement rack 43 is moved to the specified position; when there are products on the placement rack 43 and when the detector 44 does not detect that the product on the placement rack 43 has reached the specified position, the loading drive 42 is started to drive the mounting seat 41 to slide upward until the detector 44 detects that the product on the placement rack 43 has reached the specified position; when there are no products on one group of placement racks 43, the loading drive 42 drives the mounting seat 41 to slide upward and allows the next group of placement racks 43 to enter the detection area, and the product position on the placement rack 43 is detected by the detector 44.

[0036] Reference Figure 1 , Figure 2 and Figure 3 When the product on the placement rack 43 enters the specified position, the transverse driving member 32 drives the transverse plate 31 to reach the specified position, and then the clamping driving member 34 drives the two sets of clamping blocks 33 to approach each other and clamp the product, and then the transverse driving member 32 drives the transverse plate 31 to slide, pulling the product to slide out of the placement rack 43 along the length direction of the fixed groove 431, so as to realize the material removal of the product.

[0037] Reference Figure 4 , Figure 5 and Figure 6 The fixture 2 includes a lower plate 21, an upper plate 22, a fixing bolt and a sealing strip. The lower plate 21 is a rectangular plate-shaped structure. A circular groove is provided on one end of the upper plate 22 close to the lower plate 21. When the upper plate 22 is pressed against the lower plate 21, a first vacuum chamber 23 is formed between the lower plate 21 and the circular groove; the first vacuum chamber 23 is connected to the inside of the vacuum negative pressure device, and the negative pressure value in the first vacuum chamber 23 is controlled by the vacuum negative pressure device; a sealing strip is fixedly installed on one end of the upper plate 22 pressed against the lower plate 21, and the upper plate 22 is pressed against the lower plate 21 through the sealing strip, thereby improving the sealing effect between the upper plate 22 and the lower plate 21; the fixing bolt passes through the lower plate 21 and is threadedly installed on the upper plate 22, and a sealing ring for sealing the first vacuum chamber 23 is sleeved on the fixing bolt, and the fixing bolt and the sealing ring cooperate with each other, so that the lower plate 21 is sealed and installed on the upper plate 22.

[0038] Reference Figure 5 and Figure 6 A positioning groove 24 is provided on one end of the upper plate 22 away from the lower plate 21, and a plurality of groups of support columns 25 for supporting the product are installed at intervals on the bottom of the positioning groove 24, and the plurality of support columns 25 jointly support the lower surface of the product, so that a certain distance is provided between the product and the positioning groove 24, and a second vacuum cavity for adsorbing the product is formed between the product and the positioning groove 24, and the adsorption surface of the product is increased by the second vacuum cavity, and finally the adsorption force on the product is increased; at the same time, a plurality of groups of vacuum holes 26 are provided at intervals on the bottom of the positioning groove 24, and the plurality of vacuum holes 26 make the second vacuum cavity communicate with the inside of the first vacuum cavity 23, so that the negative pressure value in the second vacuum cavity is controlled by the vacuum negative pressure device; by staggering the plurality of vacuum holes 26 and the plurality of support columns 25, the adsorption force of the second vacuum cavity on the product is more uniform, and finally the adsorption effect on the product is guaranteed.

[0039] Reference Figure 5 and Figure 7, the jig 2 is provided with multiple groups of locking components for locking the jig 2 on the frame 1, the locking components include a locking bolt, a sealing ring and a locking column, the locking bolt passes through the bottom of the first vacuum chamber 23 and is threadedly installed on the frame 1; the sealing ring is sleeved on the locking bolt and pressed against the bottom of the first vacuum chamber 23, so that the jig 2 is fixedly installed on the frame 1; the locking column is fixedly installed on the bottom of the positioning groove 24, the locking column is at the same height as the supporting column 25, and a mounting hole is opened on the locking column for facilitating the passing of the locking bolt, and the mounting hole is connected to the inside of the first vacuum chamber 23; specifically, the sealing ring is sleeved on the locking bolt, and then the locking bolt and the sealing ring are passed through the mounting hole and threadedly installed on the frame 1, the locking bolt is turned, and the sealing ring is pressed against the bottom of the first vacuum chamber 23, so that the jig 2 is fixedly installed on the frame 1.

[0040] Reference Figure 1 and Figure 4 The edge pressing assembly 5 includes a sliding plate 51, a sliding driving member, a connecting block 52 and a pressing block 53. The sliding plate 51 is slidably installed on the frame 1 along the direction close to or away from the upper surface of the fixture 2; the sliding driving member is fixedly installed on the frame 1, and the sliding driving member is used to drive the sliding plate 51 to slide; the sliding driving member of this embodiment is a telescopic cylinder fixedly installed on the frame 1; a plurality of connecting blocks 52 are provided, and a plurality of groups of connecting blocks 52 are fixedly installed on the sliding plate 51. In this embodiment, four groups of connecting blocks 52 are provided, and the four groups of connecting blocks 52 are all located on the sliding plate 51 and directly above the four corners of the fixture 2.

[0041] Reference Figure 1 and Figure 4 There are two groups of edge clamping blocks 53, in which the edge clamping blocks 53 are long strip structures. The length direction of the edge clamping blocks 53 is parallel to the sliding direction of the transverse plate 31. The two groups of connecting blocks 52 on the same side fix the two ends of the edge clamping blocks 53 respectively. The two groups of edge clamping blocks 53 respectively press the two edges of the end faces parallel to the sliding directions of the product and the transverse plate 31, so as to press the two ends of the product in the fixture 2. At the same time, since the two groups of edge clamping blocks 53 are parallel to the sliding directions of the transverse plate 31, the sliding plate 51 drives the two groups of edge clamping blocks 53 to press the product through the connecting blocks 52 without interfering with the transverse assembly 3, so as to facilitate the use of the equipment in a narrow environment.

[0042] Reference Figure 5 and Figure 8In order to facilitate the adjustment of the distance the device drives the product to move, a positioning block 6 is fixedly installed on the fixture 2. The positioning block 6 is flush with the upper surface of the support column 25. The edge pressing block 53 presses the product against the upper surface of the positioning block 6, and the positioning hole on the product is pressed and sealed by the positioning block 6 to ensure the sealing of the second vacuum chamber; at the same time, a plurality of positioning grooves 61 are arranged on the positioning block 6 to cooperate with the positioning block 6 for positioning. When the positioning hole and the positioning groove 61 are coaxial, it indicates that the product position is accurate.

[0043] Reference Figure 5 and Figure 6 A plurality of groups of lifting holes are arranged at intervals on the jig 2, and a lifting assembly 7 for lifting the product is arranged on the jig 2. The lifting assembly 7 includes a lifting plate 71, a lifting rod 72 and a lifting driving member 73. The lifting plate 71 is slidably mounted on the jig 2 in a direction close to or away from the positioning groove 24; a plurality of groups of lifting rods 72 are arranged, and a plurality of groups of lifting rods 72 are installed at intervals on one end of the lifting plate 71 close to the positioning groove 24, and the lifting rods 72 slide in the lifting holes, and the plurality of groups of lifting rods 72 jointly lift the bottom of the product; the lifting driving member 73 is fixedly mounted on the frame 1, and the lifting driving member 73 is used to drive the lifting plate 71 to slide; the lifting driving member 73 of this embodiment is a telescopic cylinder, and the stroke of the lifting driving member 73 is smaller than the stroke of the sliding driving member.

[0044] Reference Figure 2 , Figure 4 and Figure 6 When the product is not placed in the fixture 2, the lifting drive 73 drives the lifting plate 71 to be located on the end close to the positioning groove 24, and multiple sets of lifting rods 72 extend out of the lifting hole. The transverse plate 31 drives the product to reach above the positioning groove 24, and places the product on the multiple sets of lifting rods 72. Then the clamping drive 34 drives the two sets of clamping blocks 33 away from each other, and the transverse drive 32 drives the transverse plate 31 to continue to slide into the safe area. Then the lifting drive 73 is started, so that the lifting rod 72 is lowered into the lifting hole, so as to place the product on the multiple sets of support columns 25 on the positioning groove 24.

[0045] Reference Figure 1-6The loading drive 42 drives the mounting seat 41 to move upward, so that the product on the placement rack 43 moves to the specified position under the detection of the detector 44, and then the transverse driving member 32 drives the transverse plate 31 to move transversely to the placement rack 43, and the clamping driving member 34 drives the two groups of clamping blocks 33 to approach each other to clamp the product, and then the transverse driving member 32 drives the transverse plate 31 to slide, and drives the product to slide in the fixed groove 431, and finally slides out of the placement rack 43. As the transverse plate 31 continues to slide, the product is driven to the top of the fixture 2, and the bottom of the product is supported by multiple groups of lifting rods 72. Then the clamping driving member 34 drives the two groups of clamping blocks 33 to move away from each other. As the transverse plate 31 continues to slide, the product is finally completely placed on the multiple groups of lifting rods 72, and then the lifting driving member 73 drives the multiple groups of lifting rods 72 to move downward through the lifting plate 71, so as to place the product in the positioning groove 24 of the fixture 2.

[0046] Reference Figure 4 , Figure 5 and Figure 6 When the product enters the positioning groove 24 of the fixture 2, the sliding drive member drives the sliding plate 51 to slide toward the upper surface of the fixture 2, and finally the edge pressing block 53 is pressed on both ends of the product, and the raised ends of the product are pressed into the positioning groove 24, so that the product and the positioning groove 24 are sealed and connected, and the negative pressure device is started to extract the gas in the first vacuum chamber 23, and then the gas in the second vacuum chamber is evenly extracted through the multiple groups of vacuum holes 26, so that the product is pressed against the multiple groups of support columns 25 under the suction force in the second vacuum chamber, so that the product remains horizontal; when the product is processed, gas is introduced into the second vacuum chamber, and then the lifting drive member 73 drives the lifting plate 71 to slide toward the positioning groove 24, and finally the product is lifted out of the positioning groove 24, so that the product can be taken out easily.

[0047] The working principle of Example 1 of the present application is: The loading drive 42 drives the product on the placement rack 43 to move to the specified position through the mounting seat 41, and then the transverse driving member 32 drives the transverse plate 31 to the specified position. After the product is clamped by the two sets of clamping blocks 33, the transverse driving member 32 drives the product to move transversely to the fixture 2, and the product is supported by multiple sets of lifting rods 72. Then, the two sets of clamping blocks 33 release the product and move it away from the fixture 2 under the action of the transverse driving member 32, and the lifting rod 72 retracts the fixture 2 and allows the product to enter the positioning groove 24. Then, the sliding drive member drives the two groups of edge pressing blocks 53 to press on both sides of the end surface of the product through the sliding plate 51, and presses the raised two ends of the product into the positioning groove 24, so that the product and the positioning groove 24 are sealed and connected, and the negative pressure device is started to extract the gas in the first vacuum chamber 23 and the second vacuum chamber, so that the product is pressed against the multiple groups of support columns 25 under the suction force in the second vacuum chamber, so that the product remains horizontal, so as to facilitate the placement of the product into the jig 2 and effectively adsorb it on the jig 2.

[0048] Example 2 Reference Fig. 9 and Fig.10 The difference between this embodiment and embodiment 1 is that a plurality of auxiliary pressure components 8 are provided on the edge pressing block 53 to press the two sides of the end surface of the product perpendicular to the sliding direction of the transverse plate 31. The auxiliary pressure components 8 include an auxiliary pressure block 81 and a telescopic driving member 82. The auxiliary pressure block 81 is rotatably mounted on the end of the edge pressing block 53 away from the connecting block 52; the fixed end of the telescopic driving member 82 is hingedly mounted on the side wall of the connecting block 52, and the movable end of the telescopic driving member 82 is hingedly mounted on the upper surface of the auxiliary pressure block 81. The telescopic driving member 82 is used to drive the auxiliary pressure block 81 to rotate on the edge pressing block 53. When the telescopic driving member 82 is extended, the auxiliary pressure block 81 is pressed against the edge of the end surface of the product perpendicular to the sliding direction of the transverse plate 31 for pressing; the auxiliary pressure components 8 of this embodiment are provided with four groups, and the four groups of auxiliary pressure components 8 are respectively arranged on the two ends of the opposite side of the two groups of edge pressing blocks 53, and the four side walls of the product are pressed against the fixture 2 through the two groups of pressure plates and the four groups of auxiliary pressure blocks 81 male heads.

[0049] Reference Figure 6 , Fig. 9 and Fig.10When the transverse plate 31 slides, in order to prevent the auxiliary pressure block 81 from interfering with the transverse plate 31, the telescopic driving member 82 is shortened, so that the auxiliary pressure block 81 rotates on the edge pressing block 53, so that the auxiliary pressure block 81 remains in a vertical state, so as to facilitate the free movement of the transverse plate 31. When the transverse plate 31 puts the product into the fixture 2, the transverse driving member 32 drives the transverse plate 31 to move to a safe area, and then the lifting driving member 73 drives the lifting rod 72 to retract into the fixture 2, and the telescopic driving member 82 drives the auxiliary pressure block 81 to rotate and finally makes the bottom of the auxiliary pressure block 81 and the bottom of the edge pressing block 53 maintain the same level, and then the sliding driving member drives the sliding plate 51 to move downward, so that the edge pressing block 53 and the auxiliary pressure block 81 jointly press the four sides of the product, so that the product is pressed tightly in the positioning groove 24 and a sealed second vacuum chamber is formed between the positioning groove 24, which is convenient for the fixture 2 to adsorb the product, thereby improving the adsorption effect of the fixture 2 on the product.

[0050] The working principle of Example 2 of the present application is: The auxiliary pressure block 81 is in a vertical state by shortening the telescopic driving member 82 to avoid interference with the movement of the transverse plate 31. When the transverse plate 31 moves the product into the fixture 2 and the transverse plate 31 moves to a safe area, the telescopic driving member 82 is extended to make the auxiliary pressure block 81 flush with the edge pressing block 53, so as to jointly press the four sides of the product into the positioning groove 24, thereby facilitating the formation of the second vacuum chamber, thereby improving the adsorption effect of the fixture 2 on the product.

[0051] The above are all preferred embodiments of the present application, and the protection scope of the present application is not limited thereto. Therefore, any equivalent changes made according to the structure, shape, and principle of the present application should be included in the protection scope of the present application.

Claims

1. A chiplet process reclaiming and adsorption device, characterized by: The invention comprises a frame (1), wherein a jig (2) for adsorbing and positioning a product is provided on the frame (1), a second vacuum chamber for directly adsorbing the product is formed between the jig (2) and the product, a transverse movement component (3) for transporting the product into the jig (2) is provided on the frame (1), the transverse movement component (3) is used to clamp the product and place it into the jig (2), and a pressing component (5) for pressing the side edge of the product placed in the jig (2) is provided on the frame (1), the pressing component (5) is used to press the warped side edge of the product into the jig (2) and form a sealed second vacuum chamber between the jig (2).

2. The chiplet process material reclaiming and adsorption equipment according to claim 1, characterized in that: The transverse movement component (3) comprises: A transverse plate (31), wherein the transverse plate (31) is slidably arranged on the frame (1); A transverse driving member (32), the transverse driving member (32) being arranged on the frame (1) and used for driving the transverse plate (31) to slide; Clamping blocks (33), two groups of the clamping blocks (33) are slidably arranged on the transverse plate (31) in a direction of approaching or moving away from each other and are used to clamp the side of the product. After the two groups of the clamping blocks (33) clamp the product, they drive the product to move through the transverse plate (31); A clamping drive member (34) is provided on the transverse plate (31) and is used to drive the two groups of clamping blocks (33) to slide.

3. The chiplet process material reclaiming and adsorption equipment according to claim 2, characterized in that: The edge pressing assembly (5) comprises: A sliding plate (51), the sliding plate (51) being slidably arranged on the frame (1) in a direction approaching or moving away from the upper surface of the jig (2); A sliding drive member, the sliding drive member being arranged on the frame (1) and used for driving the sliding plate (51) to slide; Connecting blocks (52), with multiple groups of connecting blocks (52) being arranged on the sliding plate (51); The edge pressing blocks (53) are arranged on the sliding plate (51) by the connecting block (52) and press the two edges of the end faces of the product and the transverse plate (31) which are parallel to each other in the sliding direction into the jig (2). The edge pressing blocks (53) and the sliding plate (51) do not interfere with the transverse assembly (3) when sliding.

4. The chiplet process material reclaiming and adsorption equipment according to claim 3, characterized in that: The edge pressing block (53) is provided with a plurality of auxiliary pressure components (8) for pressing both sides of the end surface of the product perpendicular to the direction of the transverse plate (31), and the auxiliary pressure components (8) include: An auxiliary pressure block (81), wherein the auxiliary pressure block (81) is rotatably disposed on the edge pressure block (53); A telescopic driving member (82) is hingedly arranged on the side wall of the connecting block (52) and is rotatably connected to the auxiliary pressure block (81). The telescopic driving member (82) is used to drive the auxiliary pressure block (81) to rotate on the edge pressing block (53) and press the end face edge of the product perpendicular to the sliding direction of the transverse plate (31).

5. The chiplet process material reclaiming and adsorption equipment according to claim 2, characterized in that: The frame (1) is provided with a loading assembly (4) for loading products, and the loading assembly (4) comprises: A mounting seat (41), wherein the mounting seat (41) is slidably arranged on the frame (1) in a vertical direction; A loading drive member (42), the loading drive member (42) being arranged on the frame (1) and used for driving the mounting seat (41) to slide; Placement racks (43), multiple groups of the placement racks (43) are spaced apart and arranged on the mounting seat (41) and are used to place products to be processed; A detector (44) is provided on the rack (1) and is used to detect whether the product on the placement rack (43) has moved to a designated position.

6. The chiplet process material reclaiming and adsorption equipment according to claim 5, characterized in that: The placement rack (43) has multiple groups of fixing grooves (431) spaced apart on opposite side walls. Two groups of the fixing grooves (431) at the same height fix the two ends of the product respectively. After the two groups of clamping blocks (33) clamp the product, the product can be pulled to slide out of the placement rack (43) along the length direction of the fixing grooves (431).

7. The chiplet process material reclaiming and adsorption equipment according to claim 3, characterized in that: The fixture (2) is provided with a positioning groove (24) for facilitating the placement of the product. A plurality of groups of support columns (25) for supporting the product are arranged at intervals on the bottom of the positioning groove (24). The plurality of groups of support columns (25) ensure a certain distance between the product and the bottom of the positioning groove (24). The edge pressing assembly (5) presses the end surface of the product and seals the product tightly on the positioning groove (24). The second vacuum chamber is a sealed chamber formed by the positioning groove (24) and the product. The height of the second vacuum chamber is equal to the height of the support columns (25).

8. The chiplet process material reclaiming and adsorption equipment according to claim 7, characterized in that: A first vacuum chamber (23) is provided inside the fixture (2), and the first vacuum chamber (23) is connected to a vacuum negative pressure device. A plurality of groups of vacuum holes (26) are provided on the positioning groove (24) at intervals, and the plurality of groups of vacuum holes (26) and the plurality of groups of support columns (25) are arranged in an interlaced manner. The vacuum holes (26) are used to connect the first vacuum chamber (23) and the second vacuum chamber.

9. The chiplet process material reclaiming and adsorption equipment according to claim 7, characterized in that: The jig (2) is provided with a plurality of groups of lifting holes at intervals. The jig (2) is provided with a lifting assembly (7) for lifting the product. The lifting assembly (7) includes: A lifting plate (71), wherein the lifting plate (71) is slidably disposed on the jig (2) in a direction approaching or moving away from the positioning groove (24); Lifting rods (72), multiple groups of the lifting rods (72) are spaced apart on the lifting plate (71), and the lifting rods (72) slide in the lifting holes and lift the bottom of the product; A lifting drive member (73) is provided on the frame (1) and is used to push the lifting plate (71) to slide.

10. The chiplet process material reclaiming and adsorption equipment according to claim 7, characterized in that: The jig (2) is provided with a positioning block (6), the positioning block (6) is flush with the support column (25), the edge pressing block (53) presses the product against the positioning block (6) and seals the positioning hole on the product, and the positioning block (6) is provided with positioning grooves (61) that cooperate with the positioning holes at intervals.

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