Data testing system and method

By designing a stage and clamping assembly equipped with shock absorbers in a terahertz time domain spectroscopy system, combined with an automated control unit and data processing software, the system's shortcomings in sample adaptability, integration and environmental stability are solved. It realizes flexible testing and efficient data acquisition for different samples, improving the testing accuracy and system adaptability.

CN119164881APending Publication Date: 2024-12-20STATE GRID SHANGHAI MUNICIPAL ELECTRIC POWER CO +1
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Patent Information

Application Number
CN202411308925.2
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2024-09-19
Publication Date
2024-12-20

AI Technical Summary

Technical Problem

The existing terahertz time domain spectroscopy systems have shortcomings in sample adaptability, system integration and automation, and environmental stability, making it difficult to effectively adapt to different types of samples to be tested and provide accurate and stable test results.

Method used

A stage equipped with shock absorbers is designed with height and left and right position adjustment functions, combined with clamping components and shock absorbers for placing and fixing samples to be tested, and integrated with the terahertz time domain spectroscopy system through The control unit and data processing software realize automated measurement and data processing.

Benefits of technology

Effectively reduce the impact of external vibration on test results, improve test accuracy and data reliability, enhance the adaptability and compatibility of the system, reduce operational complexity and maintenance costs, support a variety of test requirements, and ensure long-term stability of the equipment run.

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Abstract

The invention relates to the technical field of optoelectronics, in particular to a data testing system and method, and the system comprises an objective table and a terahertz time-domain spectroscopy system. The objective table is used for placing a sample to be tested, the terahertz time-domain spectroscopy system is used for transmitting terahertz waves to the sample on the objective table for testing, the advantage that the objective table is provided with the shock absorber is obvious, the test precision and the data reliability are improved, precision equipment is protected, the operation experience is optimized, the maintenance cost is reduced, and the test efficiency is improved. The objective table provided with the shock absorber becomes an indispensable part in a terahertz time-domain spectroscopy system due to the advantages, the overall performance of the system can be further improved by continuously optimizing the design of the objective table and the shock absorption system of the objective table, and a more stable and accurate test solution is provided for a user.
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Description

Technical Field

[0001] The present invention relates to the technical field of optoelectronics, and in particular to a data testing system and method. Background Art

[0002] In modern scientific research and industrial applications, terahertz time-domain spectroscopy (THz-TDS) systems are becoming increasingly important because they can provide unique spectral information of substances in the THz band. Terahertz waves refer to electromagnetic waves with frequencies ranging from 0.1 to 10 THz, which is between microwaves and infrared light. They have many unique physical properties and application potentials, such as non-ionization and good penetration into certain materials. However, existing THz time-domain spectroscopy systems have some limitations in terms of operability and adaptability.

[0003] First, traditional stage designs are usually optimized for specific types of samples, which limits the flexibility and versatility of the system. For samples of different shapes, sizes or materials, different clamping components are required to adapt to their specific testing needs, which increases operational complexity and possible sources of error.

[0004] Secondly, the key components of the terahertz time-domain spectroscopy system include femtosecond lasers, optical delay lines, THz emission and detection antennas, as well as control units and data processing software. The collaborative work of these components determines the test accuracy and efficiency of the system. However, there is still room for improvement in the integration and automation level of existing systems, especially in terms of quickly and accurately adjusting and synchronizing the operations of various components.

[0005] In addition, since the generation and detection of terahertz waves are extremely sensitive to environmental conditions, any slight vibration or temperature change may affect the accuracy of the measurement results. Therefore, improving the environmental stability of the system is the key to improving the accuracy of the test. Although some existing systems have adopted vibration-proof measures, these measures are often not sufficient to deal with all potential interference sources.

[0006] In summary, the terahertz time-domain spectroscopy system in the prior art has deficiencies in sample adaptability, system integration and automation, and environmental stability, which has prompted the demand for an improved data testing system and method in order to more effectively adapt to different types of samples to be tested and provide more accurate and stable test results. Summary of the invention

[0007] In view of this, the present invention aims at the deficiencies of the prior art and proposes a data testing system and method, aiming to solve at least one of the problems raised in the above background technology.

[0008] In a first aspect, the present invention provides a data testing system, comprising: a stage, the stage being used to place a sample to be tested;

[0009] A terahertz time-domain spectroscopy system is used to emit terahertz waves to test the sample on the stage.

[0010] In some embodiments, the stage can be adjusted in height and left and right.

[0011] In some embodiments, the stage can drive the sample to be tested to rotate.

[0012] In some embodiments, a clamping assembly is disposed at the top placement end of the stage, and the clamping assembly can clamp samples to be tested of different shapes.

[0013] In some embodiments, a shock absorber is provided at the bottom of the loading platform, the top of the shock absorber is fixedly connected to the bottom of the storage platform, and the bottom of the shock absorber is used to connect to the ground.

[0014] In some embodiments, the terahertz time-domain spectroscopy system includes: a femtosecond laser, an optical delay line, a THz emission and detection antenna, a control unit, and data processing software, and the femtosecond laser, optical delay line, THz emission and detection antenna, control unit, and data processing software are electrically connected.

[0015] In a second aspect, the present application also discloses a data testing method, comprising the following steps:

[0016] 1) Start the terahertz time-domain spectroscopy system to collect a reference signal of the terahertz wave of the stage without a sample;

[0017] 2) placing the sample to be tested on the stage, and fixing the sample to be tested by a clamping assembly on the stage;

[0018] 3) Setting experimental parameters through the control unit;

[0019] 4) Adjust the position of the sample to be tested to ensure that the terahertz wave can irradiate the surface of the sample to be tested;

[0020] 5) Collecting terahertz wave signals again;

[0021] 6) The collected time domain signal is converted into the frequency domain using Fourier transform, and the complex refractive index and absorption coefficient of the sample are calculated by transfer function.

[0022] In some embodiments, the control unit sets experimental parameters including scanning range, time delay and sampling interval.

[0023] In some embodiments, the re-collected terahertz wave signal contains the absorption and phase change information of the terahertz wave by the sample to be tested.

[0024] In some embodiments, the measured parameters are processed by data processing software to remove noise and undesired signal components.

[0025] Compared with the prior art, the beneficial effects of the present invention are as follows: the shock absorber can effectively reduce the influence of the external environment (such as ground vibration, air flow, etc.) on the stability of the stage, thereby reducing the interference to the sample to be tested and ensuring the accuracy of the test results. By reducing the vibration, the shock absorber helps to maintain the purity of the terahertz wave signal and avoid signal distortion, thereby improving the reliability of the spectral data. The shock absorber can reduce the wear of the equipment caused by vibration, especially for the precision optical components and micro-motion mechanisms, and protect the equipment from long-term vibration damage. The stable stage helps to maintain the performance of the entire spectral system, avoid optical alignment deviation caused by vibration, and ensure long-term stable operation; the height position adjustment and left and right position adjustment functions of the stage, Combined with the stability of the shock absorber, it can flexibly cope with samples of different shapes and sizes to be tested, and improve the test efficiency; the stable stage system can support more types of test requirements, such as dynamic testing, long-term monitoring, etc., expanding the application field of the system; when using a stage equipped with a shock absorber, the operator can focus more on the test itself, rather than frequently adjusting the sample position, reducing errors introduced by improper operation; a stable test environment can reduce repeated tests caused by vibration problems, save time and cost, and improve overall work efficiency; a stable stage system is easy to integrate with other test accessories, such as microscopes, cameras, etc., to maintain the flexibility and scalability of the system; in summary, the benefits of equipping the stage with a shock absorber are obvious. It not only improves the accuracy of the test and the reliability of the data, but also protects the precision equipment, optimizes the operating experience, reduces maintenance costs, and improves the adaptability and compatibility of the system. These advantages make the stage equipped with a shock absorber an indispensable part of the terahertz time-domain spectroscopy system. By continuously optimizing the design of the stage and its shock-absorbing system, the overall performance of the system can be further improved, providing users with a more stable and accurate test solution.

[0026] The foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the present disclosure.

[0027] Other features and aspects of the present disclosure will become more apparent from the following detailed description of exemplary embodiments with reference to the attached drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] In order to more clearly illustrate the specific implementation methods of the present invention or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0029] Figure 1 A flow chart of a data testing system and method provided in an embodiment of the present invention. DETAILED DESCRIPTION

[0030] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0031] In the description of the present application, it should be understood that the terms "center", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0032] The terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of this application, unless otherwise specified, "plurality" means two or more.

[0033] In the description of this application, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0034] As mentioned in the background, firstly, the traditional stage design is usually optimized for a specific type of sample, which limits the flexibility and versatility of the system. For samples of different shapes, sizes or materials, different clamping components are required to adapt to their specific testing requirements, which increases the complexity of operation and possible sources of error.

[0035] Secondly, the key components of the terahertz time-domain spectroscopy system include femtosecond lasers, optical delay lines, THz emission and detection antennas, as well as control units and data processing software. The collaborative work of these components determines the test accuracy and efficiency of the system. However, there is still room for improvement in the integration and automation level of existing systems, especially in terms of quickly and accurately adjusting and synchronizing the operations of various components.

[0036] In addition, since the generation and detection of terahertz waves are extremely sensitive to environmental conditions, any slight vibration or temperature change may affect the accuracy of the measurement results. Therefore, improving the environmental stability of the system is the key to improving the accuracy of the test. Although some existing systems have adopted vibration-proof measures, these measures are often not sufficient to deal with all potential interference sources.

[0037] In summary, the terahertz time-domain spectroscopy system in the prior art has deficiencies in sample adaptability, system integration and automation, and environmental stability, which has prompted the demand for an improved data testing system and method in order to more effectively adapt to different types of samples to be tested and provide more accurate and stable test results.

[0038] In order to improve the above-mentioned problems, the present application proposes a data testing system and method, in which the shock absorber can effectively reduce the influence of the external environment (such as ground vibration, air flow, etc.) on the stability of the stage, thereby reducing the interference to the sample to be tested and ensuring the accuracy of the test results. By reducing the vibration, the shock absorber helps to maintain the purity of the terahertz wave signal and avoid signal distortion, thereby improving the reliability of the spectral data. The shock absorber can reduce the equipment wear caused by vibration, especially for precision optical components and micro-motion mechanisms, and protect the equipment from long-term vibration damage. The stable stage helps to maintain the performance of the entire spectral system, avoid optical alignment deviation caused by vibration, and ensure long-term stable operation; the height position adjustment and left and right position adjustment of the stage The vibration control function, combined with the stability of the shock absorber, can flexibly respond to samples of different shapes and sizes to be tested, and improve the test efficiency; the stable stage system can support more types of test requirements, such as dynamic testing, long-term monitoring, etc., expanding the application field of the system; when using a stage equipped with a shock absorber, the operator can focus more on the test itself, rather than frequently adjusting the sample position, reducing errors introduced by improper operation; a stable test environment can reduce repeated tests caused by vibration problems, save time and cost, and improve overall work efficiency; a stable stage system is easy to integrate with other test accessories, such as microscopes, cameras, etc., to maintain the flexibility and scalability of the system; in summary, the benefits of equipping the stage with a shock absorber are obvious. It not only improves the accuracy of the test and the reliability of the data, but also protects the precision equipment, optimizes the operating experience, reduces maintenance costs, and improves the adaptability and compatibility of the system. These advantages make the stage equipped with a shock absorber an indispensable part of the terahertz time-domain spectroscopy system. By continuously optimizing the design of the stage and its shock-absorbing system, the overall performance of the system can be further improved, providing users with a more stable and accurate test solution.

[0039] See also Figure 1 As shown, a data testing system according to an embodiment of the present application includes:

[0040] The stage is used to place the sample to be tested;

[0041] Terahertz time-domain spectroscopy system,The terahertz time-domain spectroscopy system is used to test the samples on the stage by emitting terahertz waves.

[0042] Specifically, the stage can precisely control the position of the sample, which is crucial for repeated and accurate measurements. The stage makes sample replacement quick and convenient, improving experimental efficiency. By using the stage, multiple samples can be placed at one time to achieve batch testing, saving time and human resources. The stage can be linked with the terahertz time-domain spectroscopy system to achieve automated measurement and reduce human errors. The design of the stage can optimize the interaction between the sample and the terahertz wave and enhance signal acquisition. Terahertz waves can penetrate a variety of materials, perform non-destructive testing of samples, and maintain sample integrity. Terahertz time-domain spectroscopy technology can reveal detailed information on the internal structure of the sample, providing important data for fields such as materials science and biomedicine. Compared with other radiation such as X-rays, terahertz waves have lower energy, reducing potential damage to operators and samples.

[0043] In some specific embodiments, the stage can be adjusted in height and left and right directions.

[0044] Specifically, the height and left-right position adjustment capabilities allow the stage to accommodate samples of different sizes and shapes, increasing the applicability of the experiment; different experiments may require different sample placement positions, and the adjustment function allows one stage to meet a variety of testing needs. Height adjustment helps to accurately position the sample at the focus of the terahertz wave to ensure the accuracy of the measurement data, and left-right position adjustment can accurately control the position of the sample in the beam path and reduce measurement errors caused by position deviations; the height and left-right adjustment of the stage are usually designed to be easy to operate and can be quickly adjusted to the desired position to improve work efficiency. This adjustment function reduces the skill requirements for the operator and makes the experiment more user-friendly; the position adjustment of the stage can be linked with equipment such as the terahertz time-domain spectroscopy system to realize an automated measurement process. Modern laboratory equipment is often equipped with control software, which can accurately control the position of the stage through software to achieve highly automated experimental operations. operation; through precise height and left and right position adjustment, the measurement conditions of each experiment can be ensured to be consistent, and the repeatability of the experimental results can be improved. The position adjustment function helps to achieve the standardization of experimental operations, which is particularly important for experiments that need to be repeated many times; the position adjustment function of the stage supports multi-angle measurement of samples, which is crucial for some experiments that require multi-dimensional analysis. For samples with complex structures, position adjustment can help experimenters better handle and measure these samples; the adjustable stage can adapt to terahertz time-domain spectroscopy systems of different models and specifications, which improves the versatility of the equipment. With the development of technology, the adjustable stage can more easily adapt to the requirements of new instruments or new technologies; the rapid adjustment of height and left and right positions saves experimental preparation time, allowing experimenters to start actual measurement work faster. In summary, the stage can perform height position adjustment and left and right position adjustment functions, which provides great convenience and accuracy for the experiment. These adjustment functions not only improve the flexibility and accuracy of the experiment, but also enhance the convenience of operation and the repeatability of experimental results. By continuously optimizing the design and technology of the stage, the efficiency and quality of the experiment can be further improved.

[0045] In some specific embodiments, the stage can drive the sample to be tested to rotate.

[0046] Specifically, the rotation function of the stage allows the sample to be measured at multiple angles, which is crucial for certain experiments that require comprehensive analysis. By rotating the sample, blind spots that may occur during the measurement process can be reduced, ensuring that every part can be detected. The rotation function allows the stage to accommodate samples of different shapes and sizes, increasing the applicability of the experiment. Different experiments may require samples to be tested at different angles. The rotation function allows one stage to meet a variety of testing needs. The rotation of the stage is usually designed to be easy to operate and can be quickly adjusted to the desired angle to improve work efficiency. This adjustment function reduces the skill requirements for the operator and makes the experiment more user-friendly. The rotation of the stage can be linked with equipment such as the terahertz time-domain spectroscopy system to achieve an automated measurement process. Modern laboratory equipment is often equipped with control software, which can accurately control the rotation of the stage through software to achieve highly automated experiments. operation; through precise rotation control, the measurement conditions of each experiment can be ensured to be consistent, and the repeatability of the experimental results can be improved; the rotation function helps to achieve the standardization of experimental operations, which is particularly important for experiments that need to be repeated many times. For samples with complex structures, rotation can help experimenters better handle and measure these samples. The adjustable stage can adapt to terahertz time-domain spectroscopy systems of different models and specifications, which improves the versatility of the equipment. The rapid adjustment of the rotation function saves experimental preparation time and enables experimenters to start actual measurement work faster; during the measurement process, the rotation function can maintain the stability of the sample and reduce the risks that may be caused by manual adjustment. The automated rotation reduces the direct contact between the experimenter and the sample, especially when dealing with harmful or sensitive samples, which increases the safety of the experiment. In summary, the stage can drive the sample to be tested to rotate, which provides great convenience and accuracy for the experiment. These rotation functions not only improve the comprehensiveness and flexibility of the experiment, but also enhance the convenience of operation and the repeatability of the experimental results. By continuously optimizing the design and technology of the stage, the efficiency and quality of the experiment can be further improved.

[0047] In some specific embodiments, a clamping assembly is disposed at the top placement end of the stage, and the clamping assembly can clamp samples to be tested of different shapes.

[0048] In some specific embodiments, a shock absorber is provided at the bottom of the loading platform, the top of the shock absorber is fixedly connected to the bottom of the storage platform, and the bottom of the shock absorber is used to connect to the ground.

[0049] Specifically, the clamping component can clamp samples of different shapes to be tested, which allows the stage to accommodate samples of various sizes and shapes, increasing the applicability of the experiment. The clamping component can ensure the stability of the sample during the test and avoid affecting the accuracy of the measurement results due to sample movement or flipping. The clamping component is usually designed to be easy to operate, and can quickly replace and fix samples to improve work efficiency. The design of the clamping component can be compatible with equipment such as terahertz time-domain spectroscopy systems to ensure the smooth progress of the measurement process.

[0050] Shock absorbers can reduce the impact of external vibration on the experiment and ensure the accuracy of the measurement data; in long-term or continuous measurements, shock absorbers help maintain data stability and reduce errors. Shock absorbers can reduce the loss of equipment due to vibration and extend the service life of the equipment; in complex laboratory environments, shock absorbers can improve the reliability of experimental equipment and ensure the smooth progress of experiments. Shock absorbers allow the stage to be used in a variety of environments, including those with vibrations; shock absorbers also help reduce the noise generated when the equipment is running, creating a more comfortable working environment; shock absorbers can reduce unexpected situations that may be caused by equipment vibration and improve the safety of the experiment; the top of the stage is equipped with a clamping component that can clamp samples of different shapes to be tested, and the bottom is equipped with a shock absorber design, which provides convenience, precision and stability for experimental operations. These design details not only improve the efficiency and accuracy of the experiment, but also enhance the performance and reliability of the equipment, providing strong support for scientific research and industrial applications.

[0051] In some specific embodiments, the terahertz time-domain spectroscopy system includes: a femtosecond laser, an optical delay line, a THz emission and detection antenna, a control unit, and data processing software, and the femtosecond laser, the optical delay line, the THz emission and detection antenna, the control unit, and the data processing software are electrically connected.

[0052] Specifically, the integrated system simplifies the experimental setup and operation process. Users only need to use the control unit to deploy the entire system, reducing the complexity of operation. When all components are integrated through electrical connections, data collection, processing and analysis are more consistent, reducing errors in data conversion and transmission. The data processing software can quickly receive data from THz transmission and detection antennas, and use its powerful analytical capabilities to provide more in-depth data analysis.

[0053] The present application also discloses a data testing method, comprising the following steps:

[0054] 1) Start the terahertz time-domain spectroscopy system to collect a reference signal of the terahertz wave of the stage without a sample;

[0055] 2) Place the sample to be tested on the stage and fix the sample to be tested by the clamping assembly on the stage;

[0056] 3) Setting experimental parameters through the control unit;

[0057] 4) Adjust the position of the sample to be tested to ensure that the terahertz wave can irradiate the surface of the sample to be tested;

[0058] 5) Collecting terahertz wave signals again;

[0059] 6) The collected time domain signal is converted into the frequency domain using Fourier transform, and the complex refractive index and absorption coefficient of the sample are calculated by transfer function.

[0060] Specifically, the sample is placed on the stage and adjusted to the appropriate position to ensure that the terahertz wave can pass through or reflect the sample surface. The stage should be able to accurately control the position and angle of the sample. In the absence of a sample, the reference signal of the terahertz wave (blank control) is first collected as a comparison benchmark. After placing the sample, the terahertz wave signal is collected again. The signal at this time contains the sample's absorption and phase change information of the terahertz wave. The collected time domain signal is converted to the frequency domain using Fourier transform, and the sample's complex refractive index, absorption coefficient and other photoelectric parameters are calculated through transfer function. Based on the processed data, the physical and chemical properties of the sample, such as molecular vibration mode, material composition, etc., can be further analyzed.

[0061] In some specific embodiments, the control unit sets the experimental parameters including the scanning range, time delay and sampling interval.

[0062] In some specific embodiments, the recollected terahertz wave signal contains the absorption and phase change information of the terahertz wave by the sample to be tested.

[0063] In some specific embodiments, the measured parameters are processed by data processing software to remove noise and undesired signal components.

[0064] Specifically, advanced data processing techniques, such as wavelet transforms, are used to remove noise and undesired signal components, enhancing the interpretability and accuracy of the data.

[0065] Obviously, those skilled in the art can make various changes and modifications to the present invention without departing from the spirit and scope of the present invention. Thus, if these modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalents, the present invention is also intended to include these modifications and variations.

Claims

1. A data testing system, characterized in that: include: A stage, the stage is used to place the sample to be tested; A terahertz time-domain spectroscopy system is used to emit terahertz waves to test the sample on the stage.

2. A data testing system according to claim 1, characterized in that: The loading platform can be adjusted in height and left and right.

3. A data testing system according to claim 2, characterized in that: The stage can drive the sample to be tested to rotate.

4. A data testing system according to claim 3, characterized in that: A clamping assembly is disposed at the top placement end of the stage, and the clamping assembly can clamp samples to be tested of different shapes.

5. A data testing system according to claim 4, characterized in that: A shock absorber is arranged at the bottom of the loading platform, the top of the shock absorber is fixedly connected to the bottom of the sundries platform, and the bottom of the shock absorber is used to be connected to the ground.

6. A data testing system according to claim 1, characterized in that: The terahertz time-domain spectroscopy system comprises: a femtosecond laser, an optical delay line, a THz emission and detection antenna, a control unit and data processing software, wherein the femtosecond laser, the optical delay line, the THz emission and detection antenna, the control unit and the data processing software are electrically connected.

7. A data testing method, applied to any one of the data testing systems in claims 1-6, characterized in that: The following steps are involved: 1) Start the terahertz time-domain spectroscopy system to collect a reference signal of the terahertz wave of the stage without a sample; 2) placing the sample to be tested on the stage, and fixing the sample to be tested by a clamping assembly on the stage; 3) Setting experimental parameters through the control unit; 4) Adjust the position of the sample to be tested to ensure that the terahertz wave can irradiate the surface of the sample to be tested; 5) Collecting terahertz wave signals again; 6) The collected time domain signal is converted into the frequency domain using Fourier transform, and the complex refractive index and absorption coefficient of the sample are calculated by transfer function.

8. A data testing method according to claim 7, characterized in that: The control unit sets experimental parameters including scanning range, time delay and sampling interval.

9. A data testing method according to claim 7, characterized in that: The recollected terahertz wave signal contains the absorption and phase change information of the terahertz wave by the sample to be tested.

10. A data testing method according to claim 7, characterized in that: The measured parameters are processed by data processing software to remove noise and unwanted signal components.