Microporous optical element with double-layer structure and preparation method thereof

Abstract

The invention provides a microporous optical element with a double-layer structure. The microporous optical element comprises an outer-layer microporous optical element and an inner-layer microporous optical element, the outer-layer microporous optical element and the inner-layer microporous optical element are spherical sheets, and the inner surface of the outer-layer microporous optical element is attached to the outer surface of the inner-layer microporous optical element; the thickness of the outer-layer microporous optical element is greater than that of the inner-layer microporous optical element; the number of the micropores of the outer-layer micropore optical element is smaller than that of the micropores of the inner-layer micropore optical element, and the side length of the cross section of the micropores of the outer-layer micropore optical element is larger than that of the cross section of the micropores of the inner-layer micropore optical element; and the micropores of the outer-layer micropore optical element and the micropores of the inner-layer micropore optical element point to the same sphere center position.

Description

Technical Field

[0001] The invention relates to the field of optical technology, and in particular to a double-layer microporous optical element and a preparation method thereof. Background Art

[0002] Micro Pore Optics (MPO) is an X-ray grazing incidence focusing optical element designed based on the bionics of lobster eyes. It is usually a spherical sheet made of lead glass, with millions of micron-sized square through holes (i.e. micropores) neatly arranged inside. It has the characteristics of large field of view and light weight. It is currently the core element that can effectively achieve uniform and large field of view X-ray focusing in engineering.

[0003] The X-ray imaging principle of microporous optical elements requires that all microporous holes on the element point to the same center point. At the same time, considering the performance indicators such as the effective area of ​​the optical element, the thickness of the lens is restricted. In actual application, thin microporous optical elements are easily deformed by external forces, which causes the microporous points to change, and then the point spread function (PSF) of the element is deformed, which reduces the imaging quality of X-rays.

[0004] There is still a lack of methods for solving the problem of overall deformation of microporous optical elements in the prior art. Summary of the invention

[0005] In view of the above problems, the purpose of the present invention is to overcome the problem in the prior art that microporous optical elements are easily deformed by external forces, thereby providing a microporous optical element with a double-layer structure and a preparation method thereof.

[0006] To achieve the above object, the present invention adopts the following technical solutions:

[0007] The present invention provides a double-layer microporous optical element, comprising an outer microporous optical element 1 and an inner microporous optical element 2; the outer microporous optical element 1 and the inner microporous optical element 2 are both spherical thin slices, and the inner surface of the outer microporous optical element 1 is attached to the outer surface of the inner microporous optical element 2;

[0008] The thickness of the outer microporous optical element 1 is greater than the thickness of the inner microporous optical element 2;

[0009] The number of micropores of the outer micropore optical element 1 is less than the number of micropores of the inner micropore optical element 2, and the side length of the cross section of the micropores of the outer micropore optical element 1 is greater than the side length of the cross section of the micropores of the inner micropore optical element 2;

[0010] The micropores of the outer micropore optical element 1 and the micropores of the inner micropore optical element 2 are directed to the same spherical center position.

[0011] In the above technical solution, the thickness of the outer microporous optical element 1 is greater than or equal to 1 mm and less than or equal to 5 mm; the thickness of the inner microporous optical element 2 is greater than or equal to 0.1 mm and less than or equal to 2 mm.

[0012] In the above technical solution, the inner wall of the micropores of the outer micropore optical element 1 includes a film for reflecting X-rays; the inner wall of the micropores of the inner micropore optical element 2 includes a film for reflecting X-rays.

[0013] In the above technical solution, the outer surface of the outer microporous optical element 1 includes a film for shielding light of other wavelength bands except X-rays.

[0014] The present invention also provides a method for preparing a double-layer microporous optical element, which is used to prepare the double-layer microporous optical element, and the method comprises:

[0015] A planar first microporous optical element 101 is prepared; wherein the thickness of the first microporous optical element 101 is greater than or equal to 1 mm and less than or equal to 5 mm; and the side length of the cross section of the micropores in the first microporous optical element 101 is greater than or equal to 80 μm and less than or equal to 500 μm;

[0016] A planar second microporous optical element 102 is prepared; wherein the thickness of the second microporous optical element 102 is greater than or equal to 0.1 mm and less than or equal to 2 mm; and the side length of the cross section of the micropores in the second microporous optical element 102 is greater than or equal to 10 μm and less than or equal to 30 μm;

[0017] The first microporous optical element 101 is subjected to spherical thermoforming, and then the inner surface of the thermoformed spherical surface is ground so that the inner surface of the spherical surface meets the design curvature requirements, thereby obtaining a spherical thin sheet outer layer microporous optical element 1;

[0018] Using the inner surface of the outer microporous optical element 1 as a substrate, the second microporous optical element 102 is spherically thermoformed to obtain an inner microporous optical element 2 that is in contact with the inner surface of the outer microporous optical element 1;

[0019] The combination of the outer microporous optical element 1 and the inner microporous optical element 2 is subjected to deposition coating to obtain a microporous optical element with a double-layer structure.

[0020] In the above technical solution, the deposition coating of the combination of the outer microporous optical element 1 and the inner microporous optical element 2 comprises:

[0021] Plating a film for reflecting X-rays on the inner wall of the micropores of the outer micropore optical element 1;

[0022] The inner wall of the micropores of the inner-layer micropore optical element 2 is plated with a film for reflecting X-rays.

[0023] In the above technical solution, the deposition coating of the combination of the outer microporous optical element 1 and the inner microporous optical element 2 further includes:

[0024] The outer surface of the outer microporous optical element 1 is coated with a film for shielding light in other wavelength bands except X-rays.

[0025] The present invention further provides a method for preparing a microporous optical element with a double-layer structure, which is used to prepare the microporous optical element with a double-layer structure, and the method comprises:

[0026] A planar first microporous optical element 101 is prepared; wherein the thickness of the first microporous optical element 101 is greater than or equal to 1 mm and less than or equal to 5 mm; and the side length of the cross section of the micropores in the first microporous optical element 101 is greater than or equal to 80 μm and less than or equal to 500 μm;

[0027] A planar second microporous optical element 102 is prepared; wherein the thickness of the second microporous optical element 102 is greater than or equal to 0.1 mm and less than or equal to 2 mm; and the side length of the cross section of the micropores in the second microporous optical element 102 is greater than or equal to 10 μm and less than or equal to 30 μm;

[0028] Bonding the first microporous optical element 101 and the second microporous optical element 102 together to obtain a first combined body;

[0029] The first combined body is subjected to spherical thermoforming to obtain a second combined body; wherein the second combined body comprises an outer microporous optical element 1 and an inner microporous optical element 2, the outer microporous optical element 1 and the inner microporous optical element 2 are both spherical thin sheets, and the inner surface of the outer microporous optical element 1 is attached to the outer surface of the inner microporous optical element 2; the outer microporous optical element 1 is obtained by thermoforming the first microporous optical element 101, and the inner microporous optical element 2 is obtained by thermoforming the second microporous optical element 102;

[0030] The second combined body is subjected to deposition coating to obtain a microporous optical element with a double-layer structure.

[0031] In the above technical solution, depositing a film on the second combination includes:

[0032] Plating a film for reflecting X-rays on the inner wall of the micropores of the outer micropore optical element 1;

[0033] The inner wall of the micropores of the inner-layer micropore optical element 2 is plated with a film for reflecting X-rays.

[0034] In the above technical solution, the step of depositing a film on the second combined body further comprises:

[0035] The outer surface of the outer microporous optical element 1 is coated with a film for shielding light in other wavelength bands except X-rays.

[0036] The present invention adopts the above technical solution, which has the following advantages:

[0037] The double-layer microporous optical element of the present invention can increase the thickness of the element while ensuring X-ray optical performance such as the effective area, thereby effectively reducing the overall deformation of the microporous optical element, further optimizing the point spread function of the microporous optical element, and improving the angular resolution of X-ray imaging. BRIEF DESCRIPTION OF THE DRAWINGS

[0038] In order to more clearly illustrate the technical solutions in the present invention or the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0039] Figure 1 is a schematic cross-sectional view of a micro-hole optical element;

[0040] Figure 2 is a three-dimensional schematic diagram of a double-layer microporous optical element of the present invention;

[0041] Figure 3 is a schematic cross-sectional view of a double-layer microporous optical element of the present invention;

[0042] Figure 4 It is a flow chart of a method for preparing a double-layer microporous optical element provided by the present invention;

[0043] Figure 5 is a schematic diagram of a first microporous optical element and a second microporous optical element;

[0044] Figure 6 is a schematic diagram of the outer microporous optical element;

[0045] Figure 7 It is a flow chart of another method for preparing a double-layer microporous optical element provided by the present invention. DETAILED DESCRIPTION

[0046] In order to make the purpose, technical solution and advantages of the present invention clearer, the technical solution of the present invention will be clearly and completely described below in conjunction with the drawings of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0047] Before describing the present invention in detail, the relevant concepts involved in the present invention are first described in a unified manner.

[0048] Thickness of microporous optical element: The distance between the upper surface and the lower surface of the microporous optical element. Figure 1 is a cross-sectional schematic diagram of a microporous optical element. Figure 1 The h in represents the thickness of the microporous optical element.

[0049] Micropore cross-section side length: A micropore is a square through hole with a square cross section. The micropore cross-section side length is the side length of the square cross section of the micropore. Figure 1 The d in the figure represents the side length of the micropore cross section.

[0050] Figure 2 is a three-dimensional schematic diagram of a double-layer microporous optical element of the present invention, Figure 3 FIG. 4 is a schematic cross-sectional view of a double-layer microporous optical element of the present invention. Figure 2 and Figure 3 As shown, the double-layer microporous optical element of the present invention comprises an outer microporous optical element 1 and an inner microporous optical element 2 .

[0051] In order to overcome the defects of the existing microporous optical elements that the thickness is small and the micropores therein are easily deformed, the microporous optical element of the present invention is provided with an inner and outer layer, both of which are in the shape of spherical thin sheets, and the inner surface of the outer microporous optical element 1 is closely attached to the outer surface of the inner microporous optical element 2. The microporous optical element with a double-layer structure has a significantly increased thickness compared to the microporous optical element with a single-layer structure, and can effectively reduce the deformation caused by the influence of external forces.

[0052] The microporous optical element of the present invention can increase its thickness without affecting the optical performance of the element itself. Therefore, the micropores of the outer microporous optical element 1 and the micropores of the inner microporous optical element 2 are both directed to the same spherical center position, thereby ensuring the focusing effect of X-rays.

[0053] Similarly, in order to ensure the optical performance of the double-layer microporous optical element of the present invention, the thickness of the outer microporous optical element 1 needs to be greater than the thickness of the inner microporous optical element 2. For example, the thickness of the outer microporous optical element 1 is greater than or equal to 1 mm and less than or equal to 5 mm, and the thickness of the inner microporous optical element 2 is greater than or equal to 0.1 mm and less than or equal to 2 mm. In one embodiment, the thickness of the outer microporous optical element 1 is 2 mm, and the thickness of the inner microporous optical element 2 is 0.5 mm; in another embodiment, the thickness of the outer microporous optical element 1 is 1 mm, and the thickness of the inner microporous optical element 2 is 0.1 mm; in yet another embodiment, the thickness of the outer microporous optical element 1 is 5 mm, and the thickness of the inner microporous optical element 2 is 2 mm.

[0054] In order to ensure the optical performance of the double-layer microporous optical element of the present invention, the side length of the cross section of the micropores of the outer microporous optical element 1 is greater than the side length of the cross section of the micropores of the inner microporous optical element 2, and accordingly, the number of micropores of the outer microporous optical element 1 is less than the number of micropores of the inner microporous optical element 2. For example, the side length of the cross section of the micropores of the outer microporous optical element 1 is greater than or equal to 80 micrometers and less than or equal to 500 micrometers; the side length of the cross section of the micropores of the inner microporous optical element 2 is greater than or equal to 10 micrometers and less than or equal to 30 micrometers. In one embodiment, the side length of the cross section of the micropores of the outer microporous optical element 1 is 100 microns, and the side length of the cross section of the micropores of the inner microporous optical element 2 is 20 microns; in another embodiment, the side length of the cross section of the micropores of the outer microporous optical element 1 is 80 microns, and the side length of the cross section of the micropores of the inner microporous optical element 2 is 10 microns; in yet another embodiment, the side length of the cross section of the micropores of the outer microporous optical element 1 is 500 microns, and the side length of the cross section of the micropores of the inner microporous optical element 2 is 30 microns.

[0055] In order to improve the focusing effect of the micropores on X-rays, the inner wall of the micropores of the outer micropore optical element 1 includes a film for reflecting X-rays; correspondingly, the inner wall of the micropores of the inner micropore optical element 2 includes a film for reflecting X-rays.

[0056] In a preferred embodiment, a film for shielding light of other wavelengths except X-rays is included on the outer surface of the outer microporous optical element 1. Such a film can shield light of other wavelengths except X-rays, prevent light of other wavelengths from interfering with X-rays, and improve the focusing effect of the micropores on X-rays.

[0057] The double-layer microporous optical element of the present invention can increase the thickness of the element while ensuring X-ray optical performance such as the effective area, thereby effectively reducing the overall deformation of the microporous optical element, further optimizing the point spread function of the microporous optical element, and improving the angular resolution of X-ray imaging.

[0058] The present invention also provides a method for preparing a double-layer microporous optical element, which is used to prepare the double-layer microporous optical element in the above-mentioned embodiment. Figure 4 A flow chart of a method for preparing a double-layer microporous optical element provided by the present invention, such as Figure 4 As shown, the preparation method comprises:

[0059] Step 401, preparing a planar first microporous optical element 101; wherein the thickness of the first microporous optical element 101 is greater than or equal to 1 mm and less than or equal to 5 mm; and the side length of the cross section of the micropores in the first microporous optical element 101 is greater than or equal to 80 μm and less than or equal to 500 μm.

[0060] The preparation of the planar first microporous optical element 101 can be achieved by using existing technologies, such as through production processes such as wire drawing, multi-filament, screen arrangement, screen pressing, slicing, polishing and etching to obtain the planar first microporous optical element 101. Figure 5 is a schematic diagram of a first microporous optical element and a second microporous optical element. The prepared first microporous optical element 101 is as shown in FIG. Figure 5 shown.

[0061] The first microporous optical element 101 may be made of other materials, such as quartz, in addition to being made of common lead glass.

[0062] Step 402, preparing a planar second microporous optical element 102; wherein the thickness of the second microporous optical element 102 is greater than or equal to 0.1 mm and less than or equal to 2 mm; and the cross-sectional side length of the micropores in the second microporous optical element 102 is greater than or equal to 10 μm and less than or equal to 30 μm.

[0063] The preparation of the planar first microporous optical element 101 can also be achieved by using existing technologies such as wire drawing, multi-filament, screen arrangement, screen pressing, slicing, polishing and etching. Figure 5 The second microporous optical element 102 can be made of common lead glass material.

[0064] from Figure 5 It can be seen that the first microporous optical element 101 is greater in thickness and cross-sectional side length of micropores contained therein than the second microporous optical element 102. Accordingly, the number of micropores contained in the first microporous optical element 101 is less than that in the second microporous optical element 102.

[0065] Step 403 , perform spherical thermoforming on the first microporous optical element 101 , and then grind the inner surface of the thermoformed spherical surface to make the inner surface meet the design curvature requirements, thereby obtaining a spherical thin sheet outer layer microporous optical element 1 .

[0066] The first microporous optical element 101 is planar, and in this step, the first microporous optical element 101 is subjected to spherical surface thermoforming, so that the shape of the microporous structure inside the first microporous optical element 101 is transformed from a planar shape to a spherical surface sheet without being destroyed. The spherical surface thermoforming process is common knowledge to those skilled in the art, and its implementation process is not described in detail here.

[0067] Microporous optical components require very high precision, and the spherical surface thermoforming process often cannot ensure that the inner surface of the spherical surface of the microporous optical component after spherical surface thermoforming meets the design curvature requirements. Therefore, in this step, the inner surface of the spherical surface after thermoforming is also ground according to the design curvature requirements. The result after grinding is the outer layer microporous optical component 1. Figure 6 Schematic diagram of the outer microporous optical element.

[0068] Step 404 , using the inner surface of the outer microporous optical element 1 as a substrate, spherical surface thermoforming is performed on the second microporous optical element 102 to obtain an inner microporous optical element 2 that is in contact with the inner surface of the outer microporous optical element 1 .

[0069] The second microporous optical element 102 is in a planar shape. In this step, the second microporous optical element 102 is subjected to spherical surface thermoforming so that the shape of the internal microporous structure is transformed from a planar shape to a spherical thin sheet without being destroyed. In order to ensure that the spherical inner surface of the microporous optical element 102 after spherical surface thermoforming meets the design curvature requirements, in this step, the inner surface of the outer microporous optical element 1 obtained in the previous step is used as a substrate, and the second microporous optical element 102 is subjected to spherical surface thermoforming, and finally the inner microporous optical element 2 that fits the inner surface of the outer microporous optical element 1 is obtained. The inner microporous optical element 2 and the outer microporous optical element 1 are tightly attached together to form a combined body.

[0070] Step 405 , depositing and coating the combination of the outer microporous optical element 1 and the inner microporous optical element 2 to obtain a double-layer microporous optical element.

[0071] In the previous step, the outer microporous optical element 1 and the inner microporous optical element 2 are bonded together to obtain a combination of the two. In this step, the combination needs to be deposited and coated to ensure the X-ray focusing effect. The product after deposition and coating is the optical device of the present invention. Figure 2 and Figure 3 The double-layer structure of the microporous optical element is shown.

[0072] In one embodiment, the deposition coating is performed on the combination of the outer microporous optical element 1 and the inner microporous optical element 2 in the following manner: a film for reflecting X-rays is coated on the inner wall of the micropores of the outer microporous optical element 1; similarly, a film for reflecting X-rays is coated on the inner wall of the micropores of the inner microporous optical element 2. After the film for reflecting X-rays is coated inside each micropore of the double-layer microporous optical element, the focusing effect of X-rays can be enhanced and the imaging quality of X-rays can be improved.

[0073] In another embodiment, a deposition coating is performed on the combination of the outer microporous optical element 1 and the inner microporous optical element 2. In addition to coating the inner walls of each micropore of the outer microporous optical element 1 and the inner microporous optical element 2 with a film for reflecting X-rays, a film for shielding light of other wavelengths except X-rays is also coated on the outer surface of the outer microporous optical element 1.

[0074] The function of the microporous optical element is to focus the X-rays, and the light of other wavelengths is an interference to the X-rays. Therefore, in this embodiment, a film for shielding the light of other wavelengths except the X-rays needs to be plated on the outer surface of the outer microporous optical element 1, so as to shield the light of other wavelengths, reduce the interference to the X-rays, and improve the imaging quality of the X-rays.

[0075] The preparation method of the double-layer microporous optical element of the present invention obtains a double-layer microporous optical element by bonding an outer microporous optical element and an inner microporous optical element together. Such microporous optical element can increase the thickness of the element while ensuring X-ray optical properties such as effective area, thereby effectively reducing the overall deformation of the microporous optical element, further optimizing the point spread function of the microporous optical element, and improving the angular resolution of X-ray imaging.

[0076] The present invention further provides a method for preparing a double-layer microporous optical element, which is used to prepare the double-layer microporous optical element in the above-mentioned embodiment. Figure 7 A flow chart of another method for preparing a double-layer microporous optical element provided by the present invention, as shown in FIG. Figure 7 As shown, the preparation method comprises:

[0077] Step 701, preparing a planar first microporous optical element 101; wherein the thickness of the first microporous optical element 101 is greater than or equal to 1 mm and less than or equal to 5 mm; and the cross-sectional side length of the micropores in the first microporous optical element 101 is greater than or equal to 80 μm and less than or equal to 500 μm.

[0078] In the previous embodiment, the implementation process of preparing the planar first microporous optical element 101 has been described, and thus will not be repeated here.

[0079] Step 702, preparing a planar second microporous optical element 102; wherein the thickness of the second microporous optical element 102 is greater than or equal to 0.1 mm and less than or equal to 2 mm; and the cross-sectional side length of the micropores in the second microporous optical element 102 is greater than or equal to 10 μm and less than or equal to 30 μm.

[0080] In the previous embodiment, the implementation process of preparing the planar second microporous optical element 102 has been described, and thus will not be repeated here.

[0081] Step 703: Bond the first microporous optical element 101 and the second microporous optical element 102 together to obtain a first combined body.

[0082] In this embodiment, before the first microporous optical element 101 and the second microporous optical element 102 are spherically thermoformed, the first microporous optical element 101 and the second microporous optical element 102 are bonded together, and the resulting combination is recorded as a first combination. The first combination is also planar.

[0083] How to bond the first microporous optical element 101 and the second microporous optical element 102 together is common knowledge to those skilled in the art, and therefore will not be repeated here.

[0084] Step 704: perform spherical thermoforming on the first combined body to obtain a second combined body.

[0085] In this step, the shape of the first combined body is changed from a plane shape to a spherical sheet shape by performing spherical thermoforming on the first combined body. The combined body after spherical thermoforming is recorded as a second combined body. The spherical thermoforming process should be implemented according to the pre-set design curvature. The spherical thermoforming process is common knowledge to those skilled in the art and will not be described in detail here.

[0086] The second combination includes an outer microporous optical element 1 and an inner microporous optical element 2, wherein the inner surface of the outer microporous optical element 1 is bonded to the outer surface of the inner microporous optical element 2; the outer microporous optical element 1 is obtained by thermoforming the first microporous optical element 101, and the inner microporous optical element 2 is obtained by thermoforming the second microporous optical element 102.

[0087] Step 705: deposit and coat the second combined body to obtain a microporous optical element with a double-layer structure.

[0088] In this step, the second combined body is deposited and coated to ensure the X-ray focusing effect. The product after the deposition and coating is the microporous optical element of the double-layer structure of the present invention.

[0089] In one embodiment, the second combination is deposited and coated by coating the inner wall of the micropores of the outer micropore optical element 1 with a film for reflecting X-rays; similarly, the inner wall of the micropores of the inner micropore optical element 2 is coated with a film for reflecting X-rays. After the inner part of each micropore of the double-layer micropore optical element is coated with a film for reflecting X-rays, the focusing effect of X-rays can be enhanced and the imaging quality of X-rays can be improved.

[0090] In another embodiment, the second combination is deposited and coated. In addition to coating the inner walls of each micropore of the outer microporous optical element 1 and the inner microporous optical element 2 with a film for reflecting X-rays, the outer surface of the outer microporous optical element 1 is also coated with a film for blocking light of other bands except X-rays, thereby blocking light of other bands, reducing interference with X-rays, and improving X-ray imaging quality.

[0091] The preparation method of the double-layer microporous optical element of the present invention obtains a double-layer microporous optical element by bonding an outer microporous optical element and an inner microporous optical element together. Such microporous optical element can increase the thickness of the element while ensuring X-ray optical properties such as effective area, thereby effectively reducing the overall deformation of the microporous optical element, further optimizing the point spread function of the microporous optical element, and improving the angular resolution of X-ray imaging.

[0092] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A double-layer microporous optical element, characterized in that: It comprises an outer microporous optical element (1) and an inner microporous optical element (2); the outer microporous optical element (1) and the inner microporous optical element (2) are both spherical thin sheets, and the inner surface of the outer microporous optical element (1) is bonded to the outer surface of the inner microporous optical element (2); The thickness of the outer microporous optical element (1) is greater than the thickness of the inner microporous optical element (2); The number of micropores in the outer micropore optical element (1) is less than the number of micropores in the inner micropore optical element (2), and the side length of the cross section of the micropores in the outer micropore optical element (1) is greater than the side length of the cross section of the micropores in the inner micropore optical element (2); The micropores of the outer micropore optical element (1) and the micropores of the inner micropore optical element (2) both point to the same spherical center position.

2. The double-layer microporous optical element according to claim 1, characterized in that: The thickness of the outer microporous optical element (1) is greater than or equal to 1 mm and less than or equal to 5 mm; the thickness of the inner microporous optical element (2) is greater than or equal to 0.1 mm and less than or equal to 2 mm.

3. The double-layer microporous optical element according to claim 1, characterized in that: The inner wall of the micropores of the outer micropore optical element (1) contains a film for reflecting X-rays; the inner wall of the micropores of the inner micropore optical element (2) contains a film for reflecting X-rays.

4. The double-layer microporous optical element according to claim 3, characterized in that: The outer surface of the outer microporous optical element (1) comprises a film for shielding light of other wavelength bands except X-rays.

5. A method for preparing a double-layer microporous optical element, used for preparing the double-layer microporous optical element according to any one of claims 1 to 4, characterized in that: Methods include: A planar first microporous optical element (101) is prepared; wherein the thickness of the first microporous optical element (101) is greater than or equal to 1 mm and less than or equal to 5 mm; and the side length of the cross section of the micropores in the first microporous optical element (101) is greater than or equal to 80 micrometers and less than or equal to 500 micrometers; A planar second microporous optical element (102) is prepared; wherein the thickness of the second microporous optical element (102) is greater than or equal to 0.1 mm and less than or equal to 2 mm; and the side length of the cross section of the micropores in the second microporous optical element (102) is greater than or equal to 10 micrometers and less than or equal to 30 micrometers; The first microporous optical element (101) is subjected to spherical thermoforming, and then the inner surface of the thermoformed spherical surface is subjected to grinding processing so that the inner surface of the spherical surface meets the design curvature requirements, thereby obtaining a spherical thin sheet outer layer microporous optical element (1); Using the inner surface of the outer microporous optical element (1) as a substrate, the second microporous optical element (102) is subjected to spherical thermoforming to obtain an inner microporous optical element (2) that is bonded to the inner surface of the outer microporous optical element (1); The combination of the outer microporous optical element (1) and the inner microporous optical element (2) is subjected to deposition coating to obtain a microporous optical element with a double-layer structure.

6. The method for preparing a double-layer microporous optical element according to claim 5, characterized in that: The depositing and coating of the combination of the outer microporous optical element (1) and the inner microporous optical element (2) comprises: Plating a film for reflecting X-rays on the inner wall of the micropores of the outer micropore optical element (1); The inner wall of the micropores of the inner-layer micropore optical element (2) is plated with a film for reflecting X-rays.

7. The method for preparing a double-layer microporous optical element according to claim 6, characterized in that: The depositing and coating of the combination of the outer microporous optical element (1) and the inner microporous optical element (2) further comprises: The outer surface of the outer microporous optical element (1) is coated with a film for shielding light in other wavelength bands except X-rays.

8. A method for preparing a double-layer microporous optical element, used for preparing the double-layer microporous optical element according to any one of claims 1 to 4, characterized in that: Methods include: A planar first microporous optical element (101) is prepared; wherein the thickness of the first microporous optical element (101) is greater than or equal to 1 mm and less than or equal to 5 mm; and the side length of the cross section of the micropores in the first microporous optical element (101) is greater than or equal to 80 micrometers and less than or equal to 500 micrometers; A planar second microporous optical element (102) is prepared; wherein the thickness of the second microporous optical element (102) is greater than or equal to 0.1 mm and less than or equal to 2 mm; and the side length of the cross section of the micropores in the second microporous optical element (102) is greater than or equal to 10 micrometers and less than or equal to 30 micrometers; Bonding the first microporous optical element (101) and the second microporous optical element (102) together to obtain a first combined body; The first combined body is subjected to spherical thermoforming to obtain a second combined body; wherein the second combined body comprises an outer microporous optical element (1) and an inner microporous optical element (2); the outer microporous optical element (1) and the inner microporous optical element (2) are both spherical thin sheets, and the inner surface of the outer microporous optical element (1) is bonded to the outer surface of the inner microporous optical element (2); the outer microporous optical element (1) is obtained by thermoforming the first microporous optical element (101), and the inner microporous optical element (2) is obtained by thermoforming the second microporous optical element (102); The second combined body is subjected to deposition coating to obtain a microporous optical element with a double-layer structure.

9. The method for preparing a double-layer microporous optical element according to claim 8, characterized in that: The depositing coating on the second combined body comprises: Plating a film for reflecting X-rays on the inner wall of the micropores of the outer micropore optical element (1); The inner wall of the micropores of the inner-layer micropore optical element (2) is plated with a film for reflecting X-rays.

10. The method for preparing a double-layer microporous optical element according to claim 9, characterized in that: The depositing coating on the second combined body also includes: The outer surface of the outer microporous optical element (1) is coated with a film for shielding light in other wavelength bands except X-rays.

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