Automatic locking control system for wafer cutting engineering product loading jig

Abstract

The invention provides an automatic locking control system for a wafer cutting engineering product loading jig. The automatic locking control system comprises the following steps that S1, wafer loading waiting is carried out; s2, loading a wafer loading jig; s3, automatically locking the wafer loading jig; s4, loading wafer loading jig information; s5, a wafer loading jig identification unit; and S6, unlocking the equipment. The locking device is installed at the bottom of the wafer loading jig, the locking device is in signal connection with the master control module, and the locking device cooperates with uploading and checking of information of the wafer loading jig, so that the effect that the wafer loading jig is always locked on equipment before equipment operation is finished is achieved, the situation that the wafer loading jig falls off is effectively avoided, and the working efficiency is improved. And meanwhile, the problem of fragmentation defects of wafer products is solved.

Description

Technical Field

[0001] The present invention relates to the field of wafer cutting, in particular to the field of wafer loading fixture control, and specifically to an automatic locking control system for a wafer cutting engineering product loading fixture. Background Art

[0002] Currently, a wafer loading jig, or FOSB, is used in wafer cutting projects. It is usually placed in the equipment loading area. However, there is no structure to limit the stable installation of the wafer loading jig, so there is a risk of the wafer loading jig falling, resulting in quality accidents such as large-scale wafer breakage.

[0003] The main reasons for the current product problems are as follows:

[0004] 1. When the wafer loading jig is loaded onto the equipment, there is a risk of the jig falling off, causing hidden dangers of product defects;

[0005] 2. The product cannot be operated. The equipment malfunctions after incorrect loading. Summary of the invention

[0006] In view of the above-mentioned shortcomings of the prior art, an object of the present invention is to provide an automatic locking control system for a wafer cutting engineering product loading fixture, so as to solve the difficulties of the prior art.

[0007] To achieve the above-mentioned and other related purposes, the present invention provides a wafer cutting engineering product loading fixture automatic locking control system, comprising the following steps:

[0008] S1: Wafer loading: Load the wafers to be cut into the wafer loading fixture;

[0009] S2: Loading the wafer loading jig: The operator installs the wafer loading jig loaded with the wafer in step S1 on the corresponding position of the equipment;

[0010] S3: Automatic locking of wafer loading fixture: The wafer loading fixture installed on the equipment is judged by the automatic locking unit, and the wafer loading fixture is locked and connected with the equipment;

[0011] S4: Loading wafer loading fixture information: triggering a signal indicating that the wafer loading fixture has been installed to send to the equipment main control system;

[0012] S5: Wafer loading jig identification unit: the wafer loading jig identification unit is used to check the information of the loaded wafer loading jig;

[0013] S6: Equipment unlocking: When normal operation is completed, the equipment main control system signal triggers the automatic locking unit to open the bottom lock of the wafer loading fixture and unlock it.

[0014] According to a preferred embodiment, the automatic locking unit comprises the following steps:

[0015] S3.1 signal trigger: Send the signal trigger of loading the wafer loading fixture to the equipment;

[0016] S3.2 Locking module receives signal: The locking module receives a signal triggered by the device;

[0017] S3.3 Lock the wafer loading fixture: The locking device is activated to lock the wafer loading fixture on the equipment.

[0018] According to a preferred embodiment, the locking device is installed at the bottom of the wafer loading fixture.

[0019] According to a preferred embodiment, the bottom of the wafer loading fixture is locked on the device by means of an installed hook.

[0020] According to the preferred solution, in step S5, if the verification is passed, the equipment operates normally; if the verification is abnormal, the equipment shuts down and an alarm is triggered.

[0021] According to a preferred solution, an audible and visual alarm whose electrical signal is connected to the main control module is installed on the wafer cutting equipment.

[0022] According to a preferred embodiment, the wafer loading fixture identification unit includes the following steps:

[0023] S5.1 Information entry: Enter the information on the wafer loading fixture to be cut;

[0024] S5.2 Information judgment: The information entered through the above steps is uploaded to the EAP system to record the information, and the EIS system is used to determine whether it is consistent with the operation information.

[0025] According to the preferred solution, in step S5.1, information is input by scanning a barcode on the wafer loading fixture.

[0026] According to a preferred embodiment, the barcode is a QR code or a barcode.

[0027] The present invention installs a locking device at the bottom of the wafer loading jig, and the locking device realizes signal connection with the main control module, and cooperates with the uploading and verification of the wafer loading jig information, so that the wafer loading jig is always locked on the equipment before the equipment operation is completed, effectively avoiding the wafer loading jig from falling, and solving the problem of wafer product breakage defects.

[0028] The best embodiment for carrying out the present invention will be described in more detail below with reference to the accompanying drawings so that the features and advantages of the present invention can be easily understood. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Figure 1 Shown is a flow chart of the present invention; DETAILED DESCRIPTION

[0030] In order to make the purpose, technical solution and advantages of the technical solution of the present invention clearer, the technical solution of the embodiment of the present invention will be clearly and completely described in conjunction with the drawings of specific embodiments of the present invention. The same figure marks in the drawings represent the same parts. It should be noted that the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the described embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0031] Compared to the embodiments shown in the drawings, feasible embodiments within the scope of the present invention may have fewer components, other components not shown in the drawings, different components, differently arranged components, or differently connected components, etc. In addition, two or more components in the drawings may be implemented in a single component, or a single component shown in the drawings may be implemented as multiple separate components.

[0032] Unless otherwise defined, the technical terms or scientific terms used herein shall have the usual meanings understood by persons of ordinary skill in the field to which the present invention belongs. The words "first", "second" and similar words used in the patent application specification and claims of the present invention do not indicate any order, quantity or importance, but are only used to distinguish different components. Similarly, words such as "one" or "one" do not necessarily indicate a quantity limitation. Words such as "include" or "comprise" mean that the elements or objects appearing before the word include the elements or objects listed after the word and their equivalents, without excluding other elements or objects. Words such as "connect" or "connected" are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "Up", "down", "left", "right" and the like are only used to indicate relative positional relationships. When the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0033] The present invention proposes an automatic locking control system for a wafer cutting engineering product loading jig, which is used in a wafer cutting engineering. The present invention does not limit the type of wafer, but the automatic locking control system for a wafer cutting engineering product loading jig is particularly suitable for a wafer loading jig.

[0034] In general, the wafer cutting engineering product loading fixture automatic locking control system proposed in the present invention mainly includes S1: wafer loading, S2: loading wafer loading fixture, S3: wafer loading fixture automatic locking, S4: loading wafer loading fixture information, S5: wafer loading fixture identification unit and S6: equipment unlocking. Figure 1 , which shows the overall process.

[0035] In order to achieve the purpose of avoiding the risk of wafer loading jig falling, the problem in the background technology that a wafer loading jig, namely FOSB, is used in the wafer cutting project and is usually placed in the equipment loading area, but there is no structure to limit the stable installation of the wafer loading jig, which means there is a risk of the wafer loading jig falling, resulting in quality accidents such as large-scale wafer breakage, is solved. For this reason, in the technical solution provided in this embodiment, a locking device is installed at the bottom of the wafer loading jig, and the locking device is connected to the main control module by signal, and cooperates with the uploading and verification of the wafer loading jig information, so that the wafer loading jig is always locked on the equipment before the equipment operation is completed, thereby effectively avoiding the occurrence of the wafer loading jig falling and solving the problem of wafer product breakage defects.

[0036] like Figure 1 As shown, the wafer cutting engineering product loading fixture automatic locking control system provided in this embodiment includes the following steps when in use:

[0037] S1: Wafer loading: Load the wafers to be cut into the wafer loading fixture;

[0038] S2: Loading the wafer loading fixture: The operator installs the wafer loading fixture loaded with wafers in step S1 on the corresponding position of the equipment, the electrical signal is triggered, and the equipment EIS system judges and recognizes the signal. If the signal is correct, the automatic locking unit is triggered;

[0039] S3: Automatically lock the wafer loading jig: The automatic locking unit receives and determines whether the wafer loading jig installed on the device is correct, and activates the locking device between the wafer loading jig and the device to achieve the connection and fixation between the wafer loading jig and the device;

[0040] The automatic locking unit includes the following steps:

[0041] S3.1 signal trigger: Send the signal trigger of loading the wafer loading fixture to the equipment;

[0042] S3.2 Locking module receives signal: The locking module receives a signal triggered by the device;

[0043] S3.3 Locking the wafer loading fixture: The locking device is activated to lock the wafer loading fixture on the equipment;

[0044] S4: Loading wafer loading fixture information: After the wafer loading fixture is fixedly installed on the equipment, the electrical signal is triggered again, and the signal trigger that the wafer loading fixture has been installed is sent to the main control system of the equipment, and the relevant information of the wafer loading fixture is uploaded and loaded;

[0045] S5: Wafer loading jig identification unit: the wafer loading jig identification unit is used to check the information of the loaded wafer loading jig;

[0046] The wafer loading fixture identification unit includes the following steps:

[0047] S5.1 Information entry: Enter the information on the wafer loading fixture to be cut. Usually, the information is entered by scanning the ID on the wafer loading fixture. The ID uses a QR code or a bar code;

[0048] S5.2 Information judgment: upload the information entered in the above steps to the EAP system to record the information, and judge whether the ID information is consistent with the operation information in the EIS system;

[0049] S5.3: If the EIS passes the calibration and verification, the equipment operates normally. If the EIS passes the calibration and verification, the equipment stops and an alarm is triggered. An audible and visual alarm connected to the main control module is installed on the wafer cutting equipment.

[0050] S6: Equipment unlocking: When normal operation is completed, the electrical signal is triggered again, and the signal from the equipment main control system triggers the automatic locking unit to open the bottom lock of the wafer loading fixture and unlock it.

[0051] On this basis, preferably, the locking device is installed at the bottom of the wafer loading jig, and the bottom of the wafer loading jig is locked to the equipment by an installed hook. The locking device located at the bottom can ensure the stable position of the wafer in the loading jig to prevent displacement or shaking during processing, and the locking device at the bottom is easy to operate, and the loading jig can be conveniently locked and released, simplifying the process of loading and unloading the loading jig.

[0052] The above embodiments are merely illustrative of the principles and effects of the present invention, and are not intended to limit the present invention. Anyone familiar with the art may modify or alter the above embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or alterations made by a person of ordinary skill in the art without departing from the spirit and technical concept disclosed by the present invention shall still be covered by the claims of the present invention.

Claims

1. An automatic locking control system for wafer cutting engineering product loading fixtures. It is characterized in that The following steps are involved: S1: Wafer loading: Load the wafers to be cut into the wafer loading fixture; S2: Loading the wafer loading jig: The operator installs the wafer loading jig loaded with the wafer in step S1 on the corresponding position of the equipment; S3: Automatic locking of wafer loading fixture: The wafer loading fixture installed on the equipment is judged by the automatic locking unit, and the wafer loading fixture is locked and connected with the equipment; S4: Loading wafer loading fixture information: triggering a signal indicating that the wafer loading fixture has been installed to send to the equipment main control system; S5: Wafer loading jig identification unit: the wafer loading jig identification unit is used to check the information of the loaded wafer loading jig; S6: Equipment unlocking: When normal operation is completed, the equipment main control system signal triggers the automatic locking unit to open the bottom lock of the wafer loading fixture and unlock it.

2. The wafer cutting engineering product loading jig automatic locking control system according to claim 1, It is characterized in that The automatic locking unit comprises the following steps: S3.1 signal trigger: Send the signal trigger of loading the wafer loading fixture to the equipment; S3.2 Locking module receives signal: The locking module receives a signal triggered by the device; S3.3 Lock the wafer loading fixture: The locking device is activated to lock the wafer loading fixture on the equipment.

3. The wafer cutting engineering product loading jig automatic locking control system according to claim 2, It is characterized in that The locking device is installed at the bottom of the wafer loading fixture.

4. The wafer cutting process product loading jig automatic locking control system according to claim 3, It is characterized in that In step S5, if the verification is passed, the equipment operates normally; if the verification is abnormal, the equipment shuts down and an alarm is triggered.

5. The wafer cutting process product loading jig automatic locking control system according to claim 4, It is characterized in that The wafer loading fixture identification unit comprises the following steps: S5.1 Information entry: Enter the information on the wafer loading fixture to be cut; S5.2 Information judgment: The information entered through the above steps is uploaded to the EAP system to record the information, and the EIS system is used to determine whether it is consistent with the operation information.

6. The wafer cutting process product loading jig automatic locking control system according to claim 5, It is characterized in that In the step S5.1, information is input by scanning a barcode on the wafer loading fixture.

7. The wafer cutting process product loading jig automatic locking control system according to claim 6, It is characterized in that The barcode is a two-dimensional code or a barcode.

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