A protective sleeve device for silicon wafer flower basket supporting steel pipe

Abstract

The present invention discloses a protective sleeve installation device for a silicon wafer flower basket supporting steel pipe, which relates to the technical field of semiconductor equipment, and includes a frame and a control device, and also includes a sleeve pulling mechanism arranged on the frame, a sleeve mechanism arranged on the frame, and a cutting mechanism arranged on the frame. The device is provided with a guide part, so that the area where the silicon wafer flower basket supporting steel pipe contacts the guide wheel during the process of the silicon wafer flower basket supporting steel pipe passing through the guide groove and extending into the protective sleeve can be subjected to the force exerted by the guide wheel on it, and the axial component of the force on the silicon wafer flower basket supporting steel pipe can assist the silicon wafer flower basket supporting steel pipe to extend into the protective sleeve, and at the same time, the force enables the silicon wafer flower basket supporting steel pipe to rotate while extending into the protective sleeve, which greatly improves the smoothness of the silicon wafer flower basket supporting steel pipe entering the protective sleeve, as well as the installation efficiency and automation degree of the silicon wafer flower basket supporting steel pipe installing the protective sleeve.

Description

Technical Field

[0001] The invention relates to the field of semiconductor technology, and in particular to a protective sleeve assembly device for a silicon wafer flower basket supporting steel pipe. Background Art

[0002] Silicon wafers are key raw materials in semiconductor manufacturing, and their surface quality directly affects the performance and reliability of the chip. Traditional silicon wafer baskets are easily contaminated by the external environment during transportation and storage, especially the supporting steel pipes. Once contaminated or damaged, it will directly affect the quality of the silicon wafers.

[0003] At present, the installation of protective covers for the steel pipes supporting the silicon wafer basket is completed by manual operation, and the degree of automation is low, which makes the current installation of protective covers for the steel pipes supporting the silicon wafer basket inefficient. Long-time installation operation will cause hand fatigue of the staff, thereby further reducing the installation efficiency of the protective covers for the steel pipes supporting the silicon wafer basket, and therefore improvement is urgently needed. Summary of the invention

[0004] In view of the deficiencies in the prior art, the purpose of the present invention is to provide a protective sleeve assembly device for a silicon wafer flower basket supporting steel pipe, aiming to solve the above-mentioned technical problems.

[0005] In order to achieve the above object, the present invention adopts the following technical solutions:

[0006] A protective cover assembly device for a silicon wafer flower basket supporting steel pipe comprises a frame and a control device, wherein the control device is fixedly connected to the frame, and a winding portion for placing a protective cover roll is provided on the frame. The protective cover assembly device for a silicon wafer flower basket supporting steel pipe further comprises:

[0007] A sleeve pulling mechanism is arranged on the frame and electrically connected to the control device, and the sleeve pulling mechanism is used to pull the protective sleeve;

[0008] A sleeve mechanism is arranged on the frame and is electrically connected to the control device, and is used to push the supporting steel pipe to move in the direction of the sleeve pulling mechanism to complete the sleeve installation of the protective sleeve;

[0009] The cutting mechanism is arranged on the frame and is electrically connected to the control device. The cutting mechanism is used to cut off the protective cover after the cover is installed.

[0010] Preferably, the winding section comprises:

[0011] There are two connecting plates, and the two connecting plates are symmetrically arranged on the frame, the connecting plates are fixedly connected to the frame, and a U-shaped groove is opened on the connecting plates;

[0012] A rotating rod, rotatably disposed on the U-shaped groove, and the rotating rod is used to place the protective cover roll;

[0013] There are two knobs, and the two knobs are respectively arranged at the two ends of the rotating rod. The knobs are threadedly connected to the rotating rod, and the knobs are used to prevent the rotating rod from moving in the axial direction.

[0014] Preferably, the sleeve pulling mechanism comprises:

[0015] There are two fixing plates, and the two fixing plates are symmetrically arranged on the frame, and the fixing plates are fixedly connected to the frame;

[0016] A limit block is located between the two fixed plates, and the limit block is fixedly connected to the fixed plates on both sides, a limit groove is provided in the middle of the limit block, two groups of symmetrically distributed first roller grooves are provided on the inner surface of the limit groove, a second roller groove is provided between the two groups of first roller grooves, and a surface of the first roller groove close to the axis of the limit block is perpendicular to a surface of the second roller groove close to the axis of the limit block;

[0017] The electric rollers include three groups, the electric rollers are electrically connected to the control device, and the three groups of electric rollers are rotatably disposed in the first roller groove and the second roller groove respectively, and the electric rollers in the first roller groove and the electric rollers in the second roller groove cooperate to achieve the limiting and conveying of the protective cover;

[0018] A driving unit, comprising two groups, and the two groups of driving units are symmetrically arranged on the frame, and the driving unit is electrically connected to the control device;

[0019] The jacket part is arranged on the driving part and is electrically connected to the control device. The jacket part is used for clamping the protective cover.

[0020] Preferably, the driving unit comprises:

[0021] A driving motor is disposed on the frame and is detachably fixedly connected to the frame, and the driving motor is electrically connected to the control device;

[0022] A transverse groove is provided on the inner surface of the frame;

[0023] A driving screw rod is located in the transverse groove and is rotatably connected to the frame body, and one end of the driving screw rod close to the driving motor is fixedly connected to the output end of the driving motor;

[0024] A sliding plate is slidably arranged on the frame, and the sliding plate is threadedly connected with the driving screw.

[0025] Preferably, the jacket portion comprises:

[0026] A jacket push rod, fixedly disposed on the sliding plate and electrically connected to the control device;

[0027] The jacket block is fixedly arranged on the jacket push rod, and the jacket block is provided with an arc groove adapted to the protective sleeve.

[0028] Preferably, the sleeve mechanism comprises:

[0029] There are two push grooves, and the two push grooves are symmetrically opened on the inner surface of the frame;

[0030] A first hydraulic push rod is located in the propulsion groove and is detachably fixedly connected to the frame, and the first hydraulic push rod is electrically connected to the control device;

[0031] A sliding block is slidably disposed in the propulsion groove, and the sliding block is fixedly connected to the first hydraulic push rod;

[0032] A pushing block is located between the two pushing grooves and is fixedly connected to the sliding block. A through groove is formed on the pushing block;

[0033] A guide portion, disposed on the frame, for providing a guide function when the supporting steel pipe moves toward the protective sleeve;

[0034] The adjusting part is arranged on the pushing block and is electrically connected to the control device.

[0035] Preferably, the guide portion comprises:

[0036] There are two fixing blocks, and the two fixing blocks are symmetrically arranged on the frame, and the fixing blocks are fixedly connected to the frame;

[0037] A guide block is located between the two fixed blocks and fixedly connected to the two fixed blocks. A guide groove is provided in the middle of the guide block, and the axis of the guide groove coincides with the axis of the limiting groove.

[0038] A wheel groove is provided in the guide groove, and the wheel groove has multiple groups, and the multiple groups of wheel grooves are evenly distributed in the guide groove, and the wheel groove is inclined;

[0039] A guide wheel is rotatably disposed in the wheel groove, and the angle between the axis of the guide wheel and the axis of the guide block is 45 degrees;

[0040] A bearing block is fixedly arranged on the surface of the guide block away from the sleeve pulling mechanism, the bearing block is provided with two symmetrically distributed side plates, and a placement groove is opened on the bearing block;

[0041] The baffle is fixedly arranged on the surface of the bearing block away from the pulling sleeve mechanism.

[0042] Preferably, the adjustment unit comprises:

[0043] A built-in groove is provided on the pushing block;

[0044] A first electric push rod is located in the built-in groove and fixedly connected to the push block, and the first electric push rod is electrically connected to the control device;

[0045] An adjustment plate is slidably disposed on the side plate, and the adjustment plate is fixedly connected to the first electric push rod;

[0046] The push rod is fixedly arranged on the surface of the adjustment plate close to the guide block. The push rod is slidably connected to the placement groove. The length of the push rod is equal to the thickness of the guide block.

[0047] Preferably, the cutting mechanism comprises:

[0048] There are two cutting grooves, and the two cutting grooves are symmetrically opened on the frame;

[0049] A second hydraulic push rod is disposed in the cutting groove and is detachably fixedly connected to the frame, and the second hydraulic push rod is electrically connected to the control device;

[0050] A support block is slidably connected to the cutting groove, and the support block is fixedly connected to the second hydraulic push rod;

[0051] A second electric push rod is fixedly disposed on the support block and electrically connected to the control device;

[0052] A cutter, fixedly connected to the second electric push rod, used for cutting off the protective cover after it is put on;

[0053] The output part is arranged on the frame and is used to transport the assembled supporting steel pipe away from the frame.

[0054] Preferably, the output unit comprises:

[0055] A trapezoidal platform, arranged on the frame;

[0056] The output port is arranged on the frame and is used to transport the assembled supporting steel pipe away from the frame.

[0057] In summary, due to the adoption of the above technical solution, the beneficial effects of the present invention are:

[0058] The device is provided with a guide part, so that the silicon wafer flower basket supporting steel pipe can continuously contact the guide wheel in the wheel groove during the process of passing through the guide groove to extend into the protective sleeve, and the guide wheel is arranged at an angle, so that the area where the silicon wafer flower basket supporting steel pipe contacts the guide wheel during the process of passing through the guide groove to extend into the protective sleeve can be subjected to the force exerted by the guide wheel. On the one hand, the axial component of the force on the silicon wafer flower basket supporting steel pipe can assist the silicon wafer flower basket supporting steel pipe to extend into the protective sleeve, and on the other hand, the force enables the silicon wafer flower basket supporting steel pipe to rotate while extending into the protective sleeve, thereby greatly improving the smoothness of the silicon wafer flower basket supporting steel pipe entering the protective sleeve, thereby improving the efficiency of the device in fitting the silicon wafer flower basket supporting steel pipe into the protective sleeve and the degree of automation of the fitting. BRIEF DESCRIPTION OF THE DRAWINGS

[0059] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other accompanying drawings can be obtained based on these accompanying drawings without paying creative work.

[0060] Figure 1 A three-dimensional structural schematic diagram of a protective sleeve mounting device for a silicon wafer flower basket supporting steel pipe is shown.

[0061] Figure 2 A front view of a protective sleeve assembly device for a silicon wafer flower basket supporting steel pipe is shown.

[0062] Figure 3 Shows Figure 2 Sectional view of AA.

[0063] Figure 4 Shows Figure 2 Cross-sectional view of BB.

[0064] Figure 5 A side view of a protective sleeve mounting device for a silicon wafer flower basket supporting steel pipe is shown.

[0065] Figure 6 Shows Figure 5 Cross-sectional view of CC.

[0066] Figure 7 A top view of a protective sleeve assembly device for a silicon wafer flower basket supporting steel pipe is shown.

[0067] Figure 8 An exploded view of part of the structure of a protective sleeve assembly device for a silicon wafer flower basket supporting steel pipe is shown.

[0068] Fig. 9 Shows Figure 8 A schematic diagram of the enlarged local structure at point A in the middle.

[0069] Fig.10 A cross-sectional view of a portion of the structure in the guide portion is shown.

[0070] Fig.11 An exploded view of part of the structure of the cutting mechanism and the sleeve pulling mechanism is shown.

[0071] Fig.12 A cross-sectional view of part of the structure in the sleeve pulling mechanism is shown.

[0072] Legend:

[0073] 1. Frame; 2. Control device; 3. Connecting plate; 4. U-shaped groove; 5. Rotating rod; 6. Knob; 7. Fixed plate; 8. Limit block; 9. Limit groove; 10. First roller groove; 11. Second roller groove; 12. Electric roller; 13. Driving motor; 14. Horizontal groove; 15. Driving screw; 16. Sliding plate; 17. Jacket push rod; 18. Jacket block; 19. Arc groove; 20. Pushing groove; 21. First hydraulic push rod; 22. Sliding block; 23. Pushing block; 24. Pass slot; 25, fixed block; 26, guide block; 27, guide slot; 28, wheel slot; 29, guide wheel; 30, bearing block; 31, side plate; 32, placement slot; 33, baffle; 34, built-in slot; 35, first electric push rod; 36, adjustment plate; 37, push rod; 38, cutting slot; 39, second hydraulic push rod; 40, support block; 41, second electric push rod; 42, cutter; 43, trapezoidal table; 44, output port; 45, auxiliary slot; 46, auxiliary roller. DETAILED DESCRIPTION

[0074] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0075] In the description of the present invention, it should be understood that the terms "length", "width", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside" and "outside" etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0076] It should be noted that when a component is referred to as being "fixed to" another component, it may be directly on the other component or there may also be a component centered. When a component is considered to be "connected to" another component, it may be directly connected to the other component or there may also be a component centered. When a component is considered to be "set on" another component, it may be directly set on the other component or there may also be a component centered. The terms "vertical", "horizontal", "left", "right" and similar expressions used herein are for illustrative purposes only.

[0077] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0078] Reference Figures 1 to 12 The present invention further describes an embodiment of a protective sleeve assembly device for a silicon wafer flower basket supporting steel pipe.

[0079] A protective cover assembly device for a silicon wafer basket supporting steel pipe comprises a frame 1 and a control device 2, wherein the control device 2 is fixedly connected to the frame 1, and a winding portion for placing a protective cover roll is provided on the frame 1, wherein the winding portion comprises:

[0080] There are two connecting plates 3, and the two connecting plates 3 are symmetrically arranged on the frame 1, the connecting plates 3 are fixedly connected to the frame 1, and a U-shaped groove 4 is opened on the connecting plates 3;

[0081] A rotating rod 5 is rotatably disposed on the U-shaped groove 4, and the rotating rod 5 is used for placing the protective cover roll;

[0082] There are two knobs 6, and the two knobs 6 are respectively arranged at the two ends of the rotating rod 5. The knob 6 is threadedly connected to the rotating rod 5. The knob 6 is used to prevent the rotating rod 5 from moving in the axial direction. It should be noted that by providing the knob 6, the axial deviation of the rotating rod 5 is avoided.

[0083] During work, the staff manually removes the rotating rod 5 from the U-shaped groove 4, and then unscrews the side knob 6 on the rotating rod 5, rolls the protective cover on the rotating rod 5, and then puts the rotating rod 5 back into the U-shaped groove 4 and screws the knob 6 back onto the rotating rod 5, and then the staff holds one end of the protective cover and inserts it into the limiting groove 9 of the limiting block 8 until the protective cover contacts the electric roller 12 in the second roller groove 11 in the limiting block 8.

[0084] It should be noted that the device is provided with a winding part, so that the device can provide support for the protective sleeve roll. The protective sleeve set device for supporting the steel pipe of the silicon wafer flower basket also includes:

[0085] Reference Figures 1 to 12 , a sleeve pulling mechanism is arranged on the frame 1 and is electrically connected to the control device 2, the sleeve pulling mechanism is used to pull the protective cover, and the sleeve pulling mechanism includes:

[0086] There are two fixing plates 7, and the two fixing plates 7 are symmetrically arranged on the frame 1, and the fixing plates 7 are fixedly connected to the frame 1;

[0087] The limit block 8 is located between the two fixed plates 7, and the limit block 8 is fixedly connected to the fixed plates 7 on both sides. A limit groove 9 is provided in the middle of the limit block 8, and two groups of symmetrically distributed first roller grooves 10 are provided on the inner surface of the limit groove 9. A second roller groove 11 is provided between the two groups of first roller grooves 10, and the surface of the first roller groove 10 close to the axis of the limit block 8 is perpendicular to the surface of the second roller groove 11 close to the axis of the limit block 8;

[0088] The electric rollers 12 have three groups, the electric rollers 12 are electrically connected to the control device 2, and the three groups of electric rollers 12 are rotatably arranged in the first roller groove 10 and the second roller groove 11 respectively, and the electric rollers 12 in the first roller groove 10 and the electric rollers 12 in the second roller groove 11 cooperate to achieve the limiting and conveying of the protective cover;

[0089] The driving unit has two groups, and the two groups of driving units are symmetrically arranged on the frame 1. The driving unit is electrically connected to the control device 2, and the driving unit includes:

[0090] A driving motor 13 is disposed on the frame 1 and is detachably fixedly connected to the frame 1. The driving motor 13 is electrically connected to the control device 2.

[0091] A transverse groove 14 is provided on the inner surface of the frame 1;

[0092] A driving screw 15 is located in the transverse groove 14 and is rotatably connected to the frame 1. One end of the driving screw 15 close to the driving motor 13 is fixedly connected to the output end of the driving motor 13.

[0093] The sliding plate 16 is slidably disposed on the frame 1 , and the sliding plate 16 is threadedly connected to the driving screw 15 .

[0094] The jacket part is arranged on the driving part and is electrically connected to the control device 2. The jacket part is used to clamp the protective cover. The jacket part includes:

[0095] A jacket push rod 17 is fixedly disposed on the sliding plate 16 and electrically connected to the control device 2;

[0096] The jacket block 18 is fixedly disposed on the jacket push rod 17 , and an arc groove 19 adapted to the protective sleeve is opened on the jacket block 18 . It should be noted that when the two jacket blocks 18 are in contact with each other, the axis of the arc groove 19 coincides with the axis of the limiting groove 9 .

[0097] Reference Figures 1 to 12 When working, the staff controls the driving motor 13 to start through the control device 2, so that the driving screw 15 fixedly connected to the output end of the driving motor 13 rotates, and then the sliding plate 16 threadedly connected to the driving screw 15 slides in the transverse groove 14, and then the sliding plate 16 slides in the direction of the fixed plate 7, and then the jacket push rod 17 fixedly connected to the sliding plate 16 slides in the direction of the fixed plate 7, so that the jacket block 18 fixedly connected to the jacket push rod 17 slides in the direction of the fixed plate 7, until the jacket block 18 fits on the surface of the limit block 8;

[0098] After the jacket block 18 is attached to the surface of the limit block 8, the staff controls the motorized roller 12 to start through the control device 2, so that the motorized roller 12 rotates, so that the protective sleeve in contact with the motorized roller 12 moves toward the jacket block 18, until the end surface of the protective sleeve and the surface of the jacket block 18 away from the limit block 8 are in the same plane, and then the staff controls the jacket push rod 17 to start through the control device 2, so that the jacket push rod 17 is extended, so that the two jacket blocks 18 respectively fixedly connected to the two jacket push rods 17 approach each other, until the two jacket blocks 18 clamp and fix the protective sleeve in the arc groove 19;

[0099] After the jacket block 18 clamps and fixes the protective sleeve, the control device 2 controls the drive motor 13 to start, so that the output end of the drive motor 13 is reversed, and then the drive screw 15 fixedly connected to the output end of the drive motor 13 is reversed, and then the sliding plate 16 threadedly connected to the drive screw 15 slides in the direction away from the limit block 8, and then the jacket push rod 17 fixedly connected to the sliding plate 16 drives the jacket block 18 to slide in the direction away from the limit block 8, and drives the protective sleeve clamped and fixed by the jacket block 18 to move in the direction of the guide block 26 until the jacket block 18 contacts the guide block 26.

[0100] Reference Figures 1 to 12 , a sleeve mechanism is arranged on the frame 1 and is electrically connected to the control device 2, the sleeve mechanism is used to push the supporting steel pipe to move in the direction of the sleeve pulling mechanism to complete the installation of the protective sleeve, and the sleeve mechanism includes:

[0101] There are two push grooves 20, and the two push grooves 20 are symmetrically opened on the inner surface of the frame 1;

[0102] A first hydraulic push rod 21 is located in the pushing groove 20 and is detachably fixedly connected to the frame 1. The first hydraulic push rod 21 is electrically connected to the control device 2;

[0103] A sliding block 22 is slidably disposed in the pushing groove 20, and the sliding block 22 is fixedly connected to the first hydraulic push rod 21;

[0104] It should be noted that an auxiliary groove 45 is provided on the sliding block 22, and an auxiliary roller 46 is rotatably arranged in the auxiliary groove 45. The auxiliary roller 46 is used to roll in the propulsion groove 20 when the sliding block 22 slides in the propulsion groove 20, so as to reduce the friction force encountered by the sliding block 22 when it moves, thereby improving the smoothness of the sliding block 22 when moving to a certain extent.

[0105] A pushing block 23 is located between the two pushing grooves 20, and the pushing block 23 is fixedly connected to the sliding block 22, and a through groove 24 is formed on the pushing block 23;

[0106] The guide part is arranged on the frame 1 and is used to provide a guide when the supporting steel pipe moves in the direction of the protective sleeve. The guide part includes:

[0107] There are two fixing blocks 25, and the two fixing blocks 25 are symmetrically arranged on the frame 1, and the fixing blocks 25 are fixedly connected to the frame 1;

[0108] The guide block 26 is located between the two fixed blocks 25 and is fixedly connected to the two fixed blocks 25. A guide groove 27 is provided in the middle of the guide block 26. The axis of the guide groove 27 coincides with the axis of the limiting groove 9.

[0109] A wheel groove 28 is provided in the guide groove 27, and the wheel groove 28 has multiple groups, and the multiple groups of the wheel grooves 28 are evenly distributed in the guide groove 27, and the wheel grooves 28 are inclined;

[0110] The guide wheel 29 is rotatably disposed in the wheel groove 28, and the angle between the axis of the guide wheel 29 and the axis of the guide block 26 is 45 degrees;

[0111] It should be noted that the device is provided with a guide part, so that the silicon wafer basket supporting steel pipe can continuously contact the guide wheel 29 in the wheel groove 28 during the process of passing through the guide groove 27 to extend into the protective cover, and the guide wheel 29 is set at an angle, so that the area where the silicon wafer basket supporting steel pipe contacts the guide wheel 29 during the process of passing through the guide groove 27 to extend into the protective cover can be subjected to the force exerted by the guide wheel 29. On the one hand, the axial component of the force on the silicon wafer basket supporting steel pipe can assist the silicon wafer basket supporting steel pipe to extend into the protective cover, and on the other hand, the force enables the silicon wafer basket supporting steel pipe to rotate while extending into the protective cover, thereby greatly improving the smoothness of the silicon wafer basket supporting steel pipe entering the protective cover, thereby improving the efficiency of the device in fitting the silicon wafer basket supporting steel pipe into the protective cover and the degree of automation of the fitting.

[0112] The bearing block 30 is fixedly arranged on the surface of the guide block 26 away from the pull sleeve mechanism, and two symmetrically distributed side plates 31 are arranged on the bearing block 30, and a placement groove 32 is opened on the bearing block 30;

[0113] The baffle plate 33 is fixedly disposed on the surface of the bearing block 30 away from the sleeve pulling mechanism.

[0114] The adjusting part is arranged on the pushing block 23 and is electrically connected to the control device 2. The adjusting part includes:

[0115] A built-in groove 34 is provided on the pushing block 23;

[0116] A first electric push rod 35 is located in the built-in groove 34 and is fixedly connected to the push block 23. The first electric push rod 35 is electrically connected to the control device 2;

[0117] An adjustment plate 36 is slidably disposed on the side plate 31 , and the adjustment plate 36 is fixedly connected to the first electric push rod 35 ;

[0118] The push rod 37 is fixedly disposed on the surface of the adjustment plate 36 close to the guide block 26 . The push rod 37 is slidably connected to the placement groove 32 . The length of the push rod 37 is equal to the thickness of the guide block 26 .

[0119] Reference Figures 1 to 12 When working, the distance between the push rod 37 and the guide block 26 is adjusted according to the length of the silicon wafer basket supporting steel pipe. Specifically, the control device 2 controls the first electric push rod 35 to start, so that the adjustment plate 36 fixedly connected to the first electric push rod 35 slides in the direction of the guide block 26, and then the push rod 37 fixedly connected to the adjustment plate 36 moves in the direction of the guide block 26 until the distance between the push rod 37 and the guide block 26 matches the length of the silicon wafer basket supporting steel pipe;

[0120] It should be noted that the device is provided with an adjustment part, so that the device can be applicable to supporting steel pipes of silicon wafer flower baskets of different lengths, thereby expanding the application scope of the device to a certain extent.

[0121] After the distance between the push rod 37 and the guide block 26 is adjusted, the silicon wafer basket supporting steel pipe to be covered with the protective cover is placed in the placement groove 32 on the bearing block 30, and then the first hydraulic push rod 21 is controlled to start by the control device 2, so that the first hydraulic push rod 21 extends, and pushes the sliding block 22 fixedly connected to the first hydraulic push rod 21 to slide in the direction of the guide block 26, thereby making the push block 23 fixedly connected to the sliding block 22 move in the direction of the guide block 26, and then making the first electric push rod 35 fixedly connected to the push block 23 drive the adjustment plate 36 to move in the direction of the guide block 26, so that the push rod 37 fixedly connected to the adjustment plate 36 pushes the silicon wafer basket supporting steel pipe to be covered with the protective cover to move in the direction of the guide block 26, so that the silicon wafer basket supporting steel pipe is inserted into the protective cover clamped and fixed by the clamping block 18 until the silicon wafer basket supporting steel pipe is completely inserted into the protective cover.

[0122] Reference Figures 1 to 12 , a cutting mechanism is arranged on the frame 1 and is electrically connected to the control device 2, and the cutting mechanism is used to cut off the protective cover after the cover is installed, and the cutting mechanism includes:

[0123] There are two cutting grooves 38, and the two cutting grooves 38 are symmetrically opened on the frame 1;

[0124] A second hydraulic push rod 39 is disposed in the cutting groove 38 and is detachably fixedly connected to the frame 1. The second hydraulic push rod 39 is electrically connected to the control device 2.

[0125] It should be noted that the device is provided with a second hydraulic push rod 39, so that the device can adjust the position of the support block 40, thereby adjusting the position of the cutter 42 fixedly connected to the second electric push rod 41, so that the cutter 42 can be suitable for silicon wafer basket supporting steel pipes of different lengths, thereby improving the application scope of the device to a certain extent.

[0126] A support block 40 is slidably connected to the cutting groove 38, and the support block 40 is fixedly connected to the second hydraulic push rod 39;

[0127] A second electric push rod 41 is fixedly disposed on the support block 40 and electrically connected to the control device 2;

[0128] A cutter 42 is fixedly connected to the second electric push rod 41 and is used to cut off the protective sleeve after the sleeve is installed;

[0129] The output part is arranged on the frame 1 and is used to transport the assembled supporting steel pipe away from the frame 1. The output part includes:

[0130] A trapezoidal platform 43 is provided on the frame 1;

[0131] The output port 44 is provided on the frame 1 and is used to transport the assembled supporting steel pipe away from the frame 1 .

[0132] Reference Figures 1 to 12 After the silicon wafer basket supporting steel pipe is completely inserted into the protective sleeve, the cutter 42 is adjusted to be directly below the end of the silicon wafer basket supporting steel pipe that has been installed close to the limit block 8. Specifically, the control device 2 controls the second hydraulic push rod 39 to start, so that the support block 40 fixedly connected to the second hydraulic push rod 39 slides in the cutting groove 38, and then the second electric push rod 41 disposed on the support block 40 moves, so that the cutter 42 fixedly connected to the second electric push rod 41 moves, until the cutter 42 is moved to the end of the silicon wafer basket supporting steel pipe that has been installed close to the limit block 8.

[0133] After the position of the cutter 42 is adjusted, the second electric push rod 41 is started by controlling the control device 2 to extend the second electric push rod 41, thereby causing the cutter 42 fixedly connected to the second electric push rod 41 to move toward the direction of the protective cover until the protective cover is cut off. After cutting, the second electric push rod 41 is shortened by controlling the control device 2 to reset the cutter 42 fixedly connected to the second electric push rod 41, and then the jacket push rod 17 is shortened by controlling the control device 2 to move the jacket block 18 fixedly connected to the jacket push rod 17 away from the axis of the limit block 8. At this time, the silicon wafer basket supporting steel pipe that has been fitted loses its clamping and falls on the trapezoidal platform 43 below, and is finally transported through the output port 44 on the frame 1, thereby completing the fitting of the protective cover of the silicon wafer basket supporting steel pipe.

[0134] Working principle: Refer to Figures 1 to 12 During operation, the staff manually removes the rotating rod 5 from the U-shaped groove 4, and then unscrews the knob 6 on one side of the rotating rod 5, rolls the protective cover onto the rotating rod 5, and then puts the rotating rod 5 back into the U-shaped groove 4 and screws the knob 6 onto the rotating rod 5 again, and then the staff holds one end of the protective cover and inserts it into the limiting groove 9 of the limiting block 8 until the protective cover contacts the electric roller 12 in the second roller groove 11 in the limiting block 8;

[0135] Then the staff controls the driving motor 13 to start through the control device 2, so that the driving screw 15 fixedly connected to the output end of the driving motor 13 rotates, and then the sliding plate 16 threadedly connected to the driving screw 15 slides in the transverse groove 14, and then the sliding plate 16 slides in the direction of the fixed plate 7, and then the jacket push rod 17 fixedly connected to the sliding plate 16 slides in the direction of the fixed plate 7, so that the jacket block 18 fixedly connected to the jacket push rod 17 slides in the direction of the fixed plate 7, until the jacket block 18 fits on the surface of the limit block 8;

[0136] After the jacket block 18 is attached to the surface of the limit block 8, the staff controls the motorized roller 12 to start through the control device 2, so that the motorized roller 12 rotates, so that the protective sleeve in contact with the motorized roller 12 moves toward the jacket block 18, until the end surface of the protective sleeve and the surface of the jacket block 18 away from the limit block 8 are in the same plane, and then the staff controls the jacket push rod 17 to start through the control device 2, so that the jacket push rod 17 is extended, so that the two jacket blocks 18 respectively fixedly connected to the two jacket push rods 17 approach each other, until the two jacket blocks 18 clamp and fix the protective sleeve in the arc groove 19;

[0137] After the jacket block 18 clamps and fixes the protective sleeve, the control device 2 controls the drive motor 13 to start, so that the output end of the drive motor 13 is reversed, and then the drive screw 15 fixedly connected to the output end of the drive motor 13 is reversed, so that the sliding plate 16 threadedly connected to the drive screw 15 slides in the direction away from the limit block 8, and then the jacket push rod 17 fixedly connected to the sliding plate 16 drives the jacket block 18 to slide in the direction away from the limit block 8, and drives the protective sleeve clamped and fixed by the jacket block 18 to move in the direction of the guide block 26 until the jacket block 18 contacts the guide block 26;

[0138] The distance between the push rod 37 and the guide block 26 is adjusted according to the length of the silicon wafer flower basket supporting steel pipe. Specifically, the control device 2 controls the first electric push rod 35 to start, so that the adjustment plate 36 fixedly connected to the first electric push rod 35 slides in the direction of the guide block 26, and then the push rod 37 fixedly connected to the adjustment plate 36 moves in the direction of the guide block 26 until the distance between the push rod 37 and the guide block 26 matches the length of the silicon wafer flower basket supporting steel pipe. The device is provided with an adjustment part, so that the device can be applied to the supporting steel pipes of the silicon wafer flower baskets of different lengths, thereby expanding the application range of the device to a certain extent;

[0139] After the distance between the push rod 37 and the guide block 26 is adjusted, the silicon wafer basket support steel pipe to be covered with the protective sleeve is placed in the placement groove 32 on the bearing block 30, and then the first hydraulic push rod 21 is controlled by the control device 2 to start, so that the first hydraulic push rod 21 is extended, and the sliding block 22 fixedly connected to the first hydraulic push rod 21 is pushed to slide in the direction of the guide block 26, so that the push block 23 fixedly connected to the sliding block 22 moves in the direction of the guide block 26, and then the first electric push rod 35 fixedly connected to the push block 23 drives the adjustment plate 36 to move in the direction of the guide block 26, so that the push rod 37 fixedly connected to the adjustment plate 36 pushes the silicon wafer basket support steel pipe to be covered with the protective sleeve to move in the direction of the guide block 26, so that the silicon wafer basket support steel pipe is inserted into the protective sleeve clamped and fixed by the clamping block 18 until the silicon wafer basket support steel pipe is completely inserted into the protective sleeve;

[0140] After the silicon wafer basket supporting steel pipe is completely inserted into the protective sleeve, the cutter 42 is adjusted to be directly below the end of the silicon wafer basket supporting steel pipe that has been installed close to the limit block 8. Specifically, the control device 2 controls the second hydraulic push rod 39 to start, so that the support block 40 fixedly connected to the second hydraulic push rod 39 slides in the cutting groove 38, and then the second electric push rod 41 disposed on the support block 40 moves, so that the cutter 42 fixedly connected to the second electric push rod 41 moves, until the cutter 42 is moved to the end of the silicon wafer basket supporting steel pipe that has been installed close to the limit block 8.

[0141] After the position of the cutter 42 is adjusted, the second electric push rod 41 is started by controlling the control device 2 to extend the second electric push rod 41, thereby causing the cutter 42 fixedly connected to the second electric push rod 41 to move toward the direction of the protective cover until the protective cover is cut off. After cutting, the second electric push rod 41 is shortened by controlling the control device 2 to reset the cutter 42 fixedly connected to the second electric push rod 41, and then the jacket push rod 17 is shortened by controlling the control device 2 to move the jacket block 18 fixedly connected to the jacket push rod 17 away from the axis of the limit block 8. At this time, the silicon wafer basket supporting steel pipe that has been fitted loses its clamping and falls on the trapezoidal platform 43 below, and is finally transported through the output port 44 on the frame 1, thereby completing the fitting of the protective cover of the silicon wafer basket supporting steel pipe.

[0142] The above description of the embodiments enables those skilled in the art to implement or use the present invention. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to the embodiments shown herein, but will conform to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A protective sleeve device for a silicon wafer basket supporting steel pipe, comprising a frame (1) and a control device (2), wherein the control device (2) is fixedly connected to the frame (1), and is characterized in that: The frame (1) is provided with a reel for placing the protective sleeve roll, and the protective sleeve mounting device for the silicon wafer basket supporting steel pipe also includes: A sleeve pulling mechanism, arranged on the frame (1) and electrically connected to the control device (2), the sleeve pulling mechanism being used to pull the protective sleeve; A sleeve mechanism is arranged on the frame (1) and is electrically connected to the control device (2), the sleeve mechanism being used to push the supporting steel pipe to move in the direction of the sleeve pulling mechanism to complete the sleeve installation of the protective sleeve; A cutting mechanism is arranged on the frame (1) and is electrically connected to the control device (2), the cutting mechanism being used to cut off the protective cover after it has been fitted; The winding section comprises: There are two connecting plates (3), and the two connecting plates (3) are symmetrically arranged on the frame (1), the connecting plates (3) are fixedly connected to the frame (1), and a U-shaped groove (4) is opened on the connecting plates (3); A rotating rod (5) rotatably disposed on the U-shaped groove (4), the rotating rod (5) being used to place the protective cover roll; There are two knobs (6), and the two knobs (6) are respectively arranged at two ends of the rotating rod (5), the knobs (6) are threadedly connected to the rotating rod (5), and the knobs (6) are used to prevent the rotating rod (5) from moving in the axial direction; The sleeve pulling mechanism comprises: There are two fixing plates (7), and the two fixing plates (7) are symmetrically arranged on the frame (1), and the fixing plates (7) are fixedly connected to the frame (1); A limit block (8) is located between the two fixed plates (7), and the limit block (8) is fixedly connected to the fixed plates (7) on both sides; a limit groove (9) is provided in the middle of the limit block (8) and is arranged through the limit groove; two groups of symmetrically distributed first roller grooves (10) are arranged on the inner surface of the limit groove (9); a second roller groove (11) is arranged between the two groups of first roller grooves (10); and a surface of the first roller groove (10) close to the axis of the limit block (8) is perpendicular to a surface of the second roller groove (11) close to the axis of the limit block (8); The electric rollers (12) have three groups, the electric rollers (12) are electrically connected to the control device (2), and the three groups of electric rollers (12) are rotatably disposed in the first roller groove (10) and the second roller groove (11), respectively, and the electric rollers (12) in the first roller groove (10) and the electric rollers (12) in the second roller groove (11) cooperate to achieve the limiting and conveying of the protective cover; A driving unit, comprising two groups, and the two groups of driving units are symmetrically arranged on the frame (1), and the driving unit is electrically connected to the control device (2); A jacket portion is arranged on the driving portion and is electrically connected to the control device (2), and the jacket portion is used to clamp the protective sleeve.

2. The protective sleeve assembly device for a silicon wafer basket supporting steel pipe according to claim 1, characterized in that: The driving unit comprises: A drive motor (13) is disposed on the frame (1) and is detachably fixedly connected to the frame (1); the drive motor (13) is electrically connected to the control device (2); A transverse groove (14) is formed on the inner surface of the frame (1); A driving screw rod (15) is located in the transverse groove (14) and is rotatably connected to the frame (1); one end of the driving screw rod (15) close to the driving motor (13) is fixedly connected to the output end of the driving motor (13); A sliding plate (16) is slidably disposed on the frame (1), and the sliding plate (16) is threadedly connected to the driving screw (15).

3. The protective sleeve assembly device for a silicon wafer basket supporting steel pipe according to claim 2, characterized in that: The jacket portion comprises: A jacket push rod (17) is fixedly mounted on the sliding plate (16) and is electrically connected to the control device (2); The jacket block (18) is fixedly mounted on the jacket push rod (17), and the jacket block (18) is provided with an arc-shaped groove (19) adapted to fit the protective sleeve.

4. The protective sleeve assembly device for a silicon wafer basket supporting steel pipe according to claim 3, characterized in that: The sleeve mechanism comprises: There are two propulsion grooves (20), and the two propulsion grooves (20) are symmetrically arranged on the inner surface of the frame (1); A first hydraulic push rod (21) is located in the propulsion groove (20) and is detachably fixedly connected to the frame (1); the first hydraulic push rod (21) is electrically connected to the control device (2); a sliding block (22) slidably disposed in the propulsion groove (20), and the sliding block (22) is fixedly connected to the first hydraulic push rod (21); A pushing block (23) is located between the two pushing grooves (20), and the pushing block (23) is fixedly connected to the sliding block (22), and a through groove (24) is formed on the pushing block (23); A guide portion, arranged on the frame (1), for providing a guide function when the supporting steel pipe moves in the direction of the protective sleeve; The adjustment part is arranged on the pushing block (23) and is electrically connected to the control device (2).

5. The protective sleeve assembly device for a silicon wafer basket supporting steel pipe according to claim 4, characterized in that: The guide portion comprises: There are two fixed blocks (25), and the two fixed blocks (25) are symmetrically arranged on the frame (1), and the fixed blocks (25) are fixedly connected to the frame (1); A guide block (26) is located between the two fixed blocks (25) and is fixedly connected to the two fixed blocks (25); a guide groove (27) is provided in the middle of the guide block (26) and extends through the guide groove (27); the axis of the guide groove (27) coincides with the axis of the limiting groove (9); A wheel groove (28) is provided in the guide groove (27), and the wheel groove (28) has a plurality of groups, and the plurality of groups of the wheel grooves (28) are evenly distributed in the guide groove (27), and the wheel grooves (28) are arranged obliquely; A guide wheel (29) is rotatably disposed in the wheel groove (28), and the angle between the axis of the guide wheel (29) and the axis of the guide block (26) is 45 degrees; A bearing block (30) is fixedly arranged on a surface of the guide block (26) away from the sleeve pulling mechanism, the bearing block (30) is provided with two symmetrically distributed side plates (31), and the bearing block (30) is provided with a placement groove (32); The baffle plate (33) is fixedly arranged on a surface of the bearing block (30) away from the sleeve pulling mechanism.

6. The protective sleeve assembly device for a silicon wafer basket supporting steel pipe according to claim 5, characterized in that: The adjustment unit comprises: A built-in groove (34) is formed on the pushing block (23); A first electric push rod (35) is located in the built-in groove (34) and is fixedly connected to the push block (23); the first electric push rod (35) is electrically connected to the control device (2); An adjustment plate (36) is slidably disposed on the side plate (31), and the adjustment plate (36) is fixedly connected to the first electric push rod (35); A push rod (37) is fixedly arranged on a surface of the adjustment plate (36) close to the guide block (26), the push rod (37) is slidably connected to the placement groove (32), and the length of the push rod (37) is equal to the thickness of the guide block (26).

7. The protective sleeve assembly device for a silicon wafer basket supporting steel pipe according to claim 6, characterized in that: The cutting mechanism comprises: There are two cutting grooves (38), and the two cutting grooves (38) are symmetrically opened on the frame (1); A second hydraulic push rod (39) is disposed in the cutting groove (38) and is detachably fixedly connected to the frame (1); the second hydraulic push rod (39) is electrically connected to the control device (2); A support block (40) is slidably connected to the cutting groove (38), and the support block (40) is fixedly connected to the second hydraulic push rod (39); A second electric push rod (41) is fixedly mounted on the support block (40) and is electrically connected to the control device (2); A cutter (42) is fixedly connected to the second electric push rod (41) and is used to cut off the protective sleeve after it has been installed; The output part is arranged on the frame (1) and is used to transport the assembled supporting steel pipe away from the frame (1).

8. The protective sleeve assembly device for a silicon wafer basket supporting steel pipe according to claim 7, characterized in that: The output unit comprises: A trapezoidal platform (43) is arranged on the frame (1); The output port (44) is provided on the frame (1) and is used to transport the assembled supporting steel pipe away from the frame (1).

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