Auxiliary dismounting device for particle linear accelerator

Abstract

The invention relates to the technical field of semiconductor equipment, in particular to a particle linear accelerator auxiliary dismounting device which comprises a rack, a lifting frame, a driving device and a rotating support, the lifting frame is arranged on the rack, the driving device is arranged at the movable end of the lifting frame, the rotating support comprises a supporting seat, a roller shaft and a roller wheel, the roller shaft is arranged on the supporting seat in a V shape, and the roller wheel is arranged on the supporting seat. The roller is slidably connected to the roller shaft in a sleeving mode and used for containing the particle linear accelerating tube, the driving device drives the rotating support to swing, and the lifting frame drives the supporting base to move up and down. The auxiliary disassembling and assembling device integrates the lifting function and the inclining function and can cope with the situation that mounting hole positions at the two ends are not located on the same horizontal line. Through cooperation of the roller shaft and the roller wheel, the particle accelerating tube can move on the supporting base in the axial direction and can also rotate around the roller shaft, and therefore various installation requirements can be met.

Description

Technical Field

[0001] The invention relates to the technical field of semiconductor equipment, in particular to an auxiliary disassembly and assembly device for a particle linear accelerator. Background Art

[0002] Semiconductor equipment plays an important role in many high-tech products such as personal computers, smart phones, and the Internet. Among the key components of semiconductor equipment, particle accelerators are an important component. They are widely used in many core semiconductor equipment, such as ion implanters and electron beam lithography machines. Particle accelerators play an important role in the manufacture, material modification, and material analysis of semiconductor devices. They can provide high-energy particle beams to achieve precise processing and analysis of semiconductor materials, greatly improving the performance and reliability of semiconductor devices.

[0003] However, particle accelerators are usually relatively large and bulky tubular components. Even small particle accelerator tubes often weigh more than 100 kilograms. In the actual loading and unloading process, due to space limitations, the installation and removal of these large components become extremely difficult. Usually, workers can only rely on some simple auxiliary tools, such as hand winches and flatbed lifts, to manually lift and align the mounting holes at both ends of the accelerator tube for installation or removal. However, since the mounting holes at both ends are often not absolutely horizontal, it is difficult to maintain the accuracy of alignment using these tools. This not only increases the difficulty of installation and disassembly, but also easily causes the sealing surface of the particle accelerator tube to be scratched, and may even damage the equipment or accidentally injure the staff, thereby greatly increasing the difficulty of maintenance and safety risks of the accelerator tube. Summary of the invention

[0004] The technical problem to be solved by the present invention is to solve one or more technical problems existing in the prior art and at least provide a beneficial choice or create conditions.

[0005] The solution of the present invention to solve its technical problems is: a particle linear accelerator auxiliary disassembly and assembly device, which includes a frame, a lifting frame, a driving device and a rotating bracket, the lifting frame is arranged on the frame, the driving device is arranged on the movable end of the lifting frame, the rotating bracket includes a support seat, a roller shaft and a roller wheel, a plurality of roller shafts are provided, a plurality of roller wheels are provided, the roller shafts correspond to the roller wheels one by one, the roller shafts are arranged in a V shape on the support seat, the roller wheels can be slidably sleeved on the roller shafts, the roller wheels are used to place a particle linear accelerator tube, one end of the support seat is hinged on the lifting frame, and the other end of the support seat is connected to the lifting frame through the driving device, the driving device drives the rotating bracket to swing around the hinge of the lifting frame and the rotating bracket, and the lifting frame drives the support seat to move up and down.

[0006] The beneficial effects of the present invention are as follows: by combining the lifting frame and the rotating support, the particle accelerator tube can be accurately installed and disassembled in a limited space, the introduction of the driving device further simplifies the operation process, reduces the burden of manual lifting and alignment, and thus improves the overall work efficiency, the driving device can drive the rotating support to perform tilting movement, flexibly adjust the angle of the particle accelerator tube, ensure that it is accurately aligned with the installation hole, reduce the difficulty of alignment, and avoid installation problems caused by inaccurate alignment, through mechanized operation mode, reduce manual intervention, reduce the safety risks caused by human error, and the roller shaft is sleeved with a slidable roller to provide flexible support for the particle linear accelerator tube placed thereon. The particle accelerator tube can not only move in the axial direction on the support seat, but also rotate around the roller shaft; the axial movement function of the particle accelerator tube can make the installation, maintenance and adjustment process more convenient, and greatly improve the work efficiency. The rotation function of the roller wheel enables the particle accelerator tube to be accurately adjusted at different angles and positions, thereby meeting various complex experimental and application requirements.

[0007] As a further improvement of the above technical solution, the frame includes a base, wheels and a handle, the lifting frame is arranged on the base, the wheels are arranged on the bottom surface of the base, and the handle is arranged on the base.

[0008] As a further improved beneficial effect of the above technical solution, in order to improve the mobility of the rack, wheels are installed on the bottom surface of the base, so that the rack can be easily moved in different working environments, and handles are also provided on the base, so that the user can easily push and pull the rack, thereby enhancing its flexibility and convenience in practical applications.

[0009] As a further improvement of the above technical solution, the lifting frame includes a cross bar, a flat plate, a hydraulic cylinder and two connecting rod mechanisms. The flat plate is arranged above the base, and the two connecting rod mechanisms are installed between the base and the flat plate. The cross bar connects the two connecting rod mechanisms, and each connecting rod mechanism includes a first connecting rod and a second connecting rod. The lower end of the first connecting rod is hinged on the base, and the upper end of the first connecting rod is slidably connected to the flat plate through a roller. The upper end of the second connecting rod is hinged on the bottom surface of the flat plate, and the lower end of the second connecting rod is slidably connected to the base through a roller. The first connecting rod and the second connecting rod are centrally hinged, and one end of the cross bar passes through the center point of the first connecting rod and the center point of the second connecting rod. The hydraulic cylinder is installed on the base, and the push rod of the hydraulic cylinder is connected to the cross bar. The hydraulic cylinder is used to push or pull the cross bar to achieve lifting and lowering of the flat plate.

[0010] As a further improvement of the above technical solution, the lifting process becomes smoother and more reliable through the precise control of the hydraulic cylinder, reducing vibration and noise during operation. The connecting rod mechanism, crossbar and hydraulic cylinder make the lifting of the flat plate more flexible and rapid, improving work efficiency.

[0011] As a further improvement of the above technical solution, the fixed end of the driving device is hinged to the flat plate through a pin.

[0012] As a further improvement of the above technical solution, it is ensured that the driving device can stably transmit force during operation, effectively reducing vibration and noise caused by loose connection. The articulation method gives the driving device a certain displacement space when subjected to external force, so that it can effectively absorb and disperse the impact force and extend the service life of the device. In addition, the design of the articulated structure is relatively simple, which is convenient for quick and convenient disassembly and installation when the driving device needs to be repaired or replaced.

[0013] As a further improvement of the above technical solution, the support seat includes a base frame and two support frames, the two support frames are symmetrically arranged on the base frame, the sides of the two support frames opposite to each other are called inclined surfaces, the two inclined surfaces form a V-shaped structure, and multiple rollers are arranged in parallel on the inclined surfaces, and the rollers are rotationally fixed to the support seat by retaining springs.

[0014] As a further improved beneficial effect of the above technical solution, the two support frames are symmetrically arranged on both sides of the base frame, ensuring the stability and symmetry of the overall structure. One side of each support frame that is arranged opposite to each other is designed to be an inclined surface, so that the two inclined surfaces together constitute a V-shaped structure. This design not only increases the strength of the support seat, but also can better adapt to items of different shapes and sizes. On the two inclined surfaces of the V-shaped structure, multiple rollers are arranged in parallel. These rollers are evenly distributed, can effectively support and transfer weight, and reduce local stress concentration. Each roller is rotatably fixed to the support frame by a retaining spring, ensuring the stability and reliability of the roller during use.

[0015] As a further improvement of the above technical solution, the angle formed by the two inclined surfaces is 120°~150°.

[0016] As a further improvement of the above technical solution, by setting the angle within the range of 120° to 150°, the stress distribution inside the structure can be effectively dispersed, thereby enhancing its bearing capacity. This design not only improves the reliability of the structure, but also extends its service life. In addition, the 120° to 150° angle design also has good adaptability and can adapt to more specifications of particle accelerator tubes to meet the needs of different application scenarios. Whether it is the existing particle accelerator tube specifications or new specifications that may appear in the future, it can provide stable and reliable support.

[0017] As a further improvement of the above technical solution, three splines are evenly distributed on the circumference of the outer side surface of the roller shaft, and three key grooves are evenly distributed on the circumference of the inner side surface of the roller wheel. The key grooves are adapted to the splines and are slidably connected to the splines.

[0018] As a further improvement of the above technical solution, the spline has a limiting function, which effectively prevents the roller from unnecessary displacement during rotation, thereby ensuring the stability and reliability of the equipment operation. The spline also has a guiding function, allowing the roller to slide along the axial direction of the roller shaft during movement. This guiding effect not only improves the accuracy of the roller movement, but also reduces wear and failure caused by poor movement, thereby extending the service life of the equipment.

[0019] As a further improvement of the above technical solution, the roller includes a cylinder and two discs, the two discs are fixedly connected to the two ends of the cylinder respectively, the inner diameter of the cylinder is adapted to the outer diameter of the roller shaft, and the outer diameter of the cylinder is smaller than the outer diameter of the discs.

[0020] As a further improvement of the above technical solution, the disc can effectively prevent the particle accelerator tube on the roller from unnecessary displacement or offset, ensuring that the particle accelerator tube can stably follow the roller for axial movement. This limiting function not only improves the operating accuracy of the equipment, but also effectively avoids safety hazards caused by abnormal movement of the particle accelerator tube, thereby ensuring the stability and reliability of the entire system.

[0021] As a further improvement of the above technical solution, the roller is made of PVC material.

[0022] As a further improvement of the above technical solution, the PVC material can maintain a good surface condition during long-term use due to its excellent wear resistance, and the roller does not need to be replaced frequently, thereby reducing maintenance costs; the PVC roller has high strength and rigidity and can withstand large loads, further improving the stability and reliability of the equipment; the PVC roller can also effectively prevent the sealing surface of the particle accelerator tube placed on the roller from being scratched. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 It is a schematic diagram of the structure of the present invention; Figure 2 is a side view of the present invention; Figure 3 is a front view of the present invention; Figure 4 is a schematic diagram of the structure of the rotating bracket; Figure 5 is a side view of the rotating bracket.

[0024] In the accompanying drawings: 1-frame, 2-lifting frame, 3-driving device, 4-rotating bracket, 101-base, 102-wheel, 103-handle, 201-connecting rod mechanism, 202-plate, 203-hydraulic cylinder, 204-first connecting rod, 205-second connecting rod, 206-cross bar, 301-connecting part, 401-support seat, 402-roller, 403-roller, 501-base, 502-support frame, 503-spline, 504-keyway, 505-disc, 506-cylinder. DETAILED DESCRIPTION

[0025] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the above briefly describes the drawings required for use in the description of the embodiments. Obviously, the drawings described are only part of the embodiments of the present invention, not all of the embodiments, and those skilled in the art can also obtain other design solutions and drawings based on these drawings without creative work.

[0026] The following will clearly and completely describe the concept, specific structure and technical effects of the present invention in combination with the embodiments and drawings, so as to fully understand the purpose, characteristics and effects of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, other embodiments obtained by technicians in this field without creative work are all within the scope of protection of the present invention. In addition, all the connection / connection relationships mentioned in the text do not refer to the direct connection of components, but refer to the formation of a better connection structure by adding or reducing connection accessories according to the specific implementation situation. The various technical features in the present invention can be combined interchangeably without conflicting with each other.

[0027] Semiconductor equipment plays an important role in many high-tech products such as personal computers, smart phones, and the Internet. Among the key components of semiconductor equipment, particle accelerators are an important component. They are widely used in many core semiconductor equipment, such as ion implanters and electron beam lithography machines. Particle accelerators play an important role in the manufacture, material modification, and material analysis of semiconductor devices. They can provide high-energy particle beams to achieve precise processing and analysis of semiconductor materials, greatly improving the performance and reliability of semiconductor devices.

[0028] However, particle accelerators are usually relatively large and bulky tubular components. Even small particle accelerator tubes often weigh more than 100 kilograms. In the actual loading and unloading process, due to space limitations, the installation and removal of these large components become extremely difficult. Usually, workers can only rely on some simple auxiliary tools, such as hand winches and flat 202 lifts, to manually lift and align the mounting holes at both ends of the accelerator tube for installation or removal. However, since the mounting holes at both ends are often not absolutely horizontal, it is difficult to maintain the accuracy of alignment using these tools. This not only increases the difficulty of installation and disassembly, but also easily causes the sealing surface of the particle accelerator tube to be scratched, and may even damage the equipment or accidentally injure the staff, thereby greatly increasing the difficulty of maintenance and safety risks of the accelerator tube.

[0029] To this end, a particle linear accelerator auxiliary disassembly and assembly device, referring to Figure 1 to Figure 5 , which includes a frame 1, a lifting frame 2, a driving device 3 and a rotating support 4, the lifting frame 2 is arranged on the frame 1, the driving device 3 is arranged on the movable end of the lifting frame 2, the rotating support 4 includes a support seat 401, a roller shaft 402 and a roller wheel 403, a plurality of roller shafts 402 are provided, a plurality of roller wheels 403 are provided, the roller shafts 402 correspond to the roller wheels 403 one by one, the roller shafts 402 are arranged on the supporting seat 401 in a V shape, the roller wheels 403 are slidably sleeved on the roller shafts 402, and the roller wheels 403 are used to place a particle linear acceleration tube, one end of the supporting seat 401 is hinged on the lifting frame 2, and the other end of the supporting seat 401 is connected to the lifting frame 2 through the driving device 3, the driving device 3 drives the rotating support 4 to swing around the hinge of the lifting frame 2 and the rotating support 4, and the lifting frame 2 drives the supporting seat 401 to move up and down.

[0030] By combining the lifting frame 2 and the rotating bracket 4, the particle accelerator tube can be accurately installed and disassembled in a limited space. The introduction of the driving device 3 further simplifies the operation process, reduces the burden of manual lifting and alignment, and thus improves the overall work efficiency. The driving device 3 can drive the rotating bracket 4 to tilt and flexibly adjust the angle of the particle accelerator tube to ensure that it is accurately aligned with the installation hole, reducing the difficulty of alignment and avoiding installation problems caused by inaccurate alignment. Through the mechanized operation mode, manual intervention is reduced and the safety risks caused by human errors are reduced. The roller 402 is sleeved with a slidable roller 403, which provides flexible support for the particle linear accelerator tube placed thereon. The particle accelerator tube can not only move in the axial direction on the support seat 401, but also rotate around the roller 402; the axial movement function of the particle accelerator tube can make the installation, maintenance and adjustment process more convenient, greatly improving the work efficiency. The rotation function of the roller 403 allows the particle accelerator tube to be accurately adjusted at different angles and positions, thereby meeting various complex experimental and application requirements.

[0031] When in use, the particle linear accelerator tube is placed on the rotating bracket 4, and then the installation position is adjusted by moving the frame 1; the lifting frame 2 is used to adjust the installation height to ensure that the particle linear accelerator tube is in a suitable working position; the inclination angle of the rotating bracket 4 is adjusted by the driving device 3 to align the heights of the two ends, and finally the particle linear accelerator tube is rotated by rotating the bracket 4 to align the end surface mounting hole with the corresponding mounting hole position, thereby completing precise installation.

[0032] Preferably, the rollers 402 can be connected in series through transmission gears or transmission chains. The rollers 402 are driven by a motor to realize the rotation of the rollers 403. When the rollers 403 rotate, they drive the particle accelerator tube to rotate and align, thereby achieving accurate positioning. This can effectively improve work efficiency and reduce labor intensity during operation.

[0033] During the installation of the particle linear accelerator tube, it is often necessary to adjust the placement of the accelerator tube. Therefore, in one embodiment, the frame 1 includes a base 101, wheels 102 and a handle 103, the lifting frame 2 is arranged on the base 101, the wheels 102 are arranged on the bottom surface of the base 101, and the handle 103 is arranged on the base 101. In order to improve the mobility of the frame 1, the wheels 102 are installed on the bottom surface of the base 101, so that the frame 1 can be easily moved in different working environments, and the handle 103 is also arranged on the base 101, so that the user can easily push and pull the frame 1, thereby enhancing its flexibility and convenience in practical applications.

[0034] During the installation of the particle linear accelerator tube, the height of the accelerator tube needs to be adjusted smoothly. Therefore, in one embodiment, the lifting frame 2 includes a crossbar 206, a flat plate 202, a hydraulic cylinder 203 and two connecting rod mechanisms 201. The flat plate 202 is arranged above the base 101. The two connecting rod mechanisms 201 are installed between the base 101 and the flat plate 202. The crossbar 206 connects the two connecting rod mechanisms 201. Each connecting rod mechanism 201 includes a first connecting rod 204 and a second connecting rod 205. The lower end of the first connecting rod 204 is hinged to the base 101. The upper end of the first connecting rod 204 is connected to the flat plate through a roller. The first connecting rod 204 and the second connecting rod 205 are slidably connected to each other, the upper end of the second connecting rod 205 is hinged on the bottom surface of the flat plate 202, the lower end of the second connecting rod 205 is slidably connected to the base 101 through a roller, the first connecting rod 204 and the second connecting rod 205 are centrally hinged, one end of the cross bar 206 passes through the center point of the first connecting rod 204 and the center point of the second connecting rod 205, the hydraulic cylinder 203 is installed on the base 101, the push rod of the hydraulic cylinder 203 is connected to the cross bar 206, and the hydraulic cylinder 203 is used to push or pull the cross bar 206 to achieve the lifting of the flat plate 202. Through the precise control of the hydraulic cylinder 203, the lifting process becomes more stable and reliable, and the vibration and noise during the operation are reduced. The connecting rod mechanism 201, the cross bar 206 and the hydraulic cylinder 203 make the lifting of the flat plate 202 more flexible and rapid, and improve the work efficiency.

[0035] Preferably, the hydraulic cylinder 203 can be replaced by a gas cylinder or an electric cylinder, which is used to push or pull the cross bar 206 to achieve the lifting and lowering of the flat plate 202.

[0036] During the installation of the particle linear accelerator tube, the inclination angle of the accelerator tube needs to be accurately adjusted. Therefore, in one embodiment, the fixed end of the drive device 3 is hinged to the flat plate 202 through a pin. This ensures that the drive device 3 can stably transmit force during operation, effectively reducing the vibration and noise caused by loose connection. The articulated method gives the drive device 3 a certain displacement space when it is subjected to external force, so that it can effectively absorb and disperse the impact force and extend the service life of the device. In addition, the design of the articulated structure is relatively simple, which is convenient for quick and convenient disassembly and installation when the drive device 3 needs to be repaired or replaced.

[0037] The sizes of the accelerating tubes are different, and there are many specifications and models. Therefore, in one embodiment, the support seat 401 includes a base frame 501 and two support frames 502, and the two support frames 502 are symmetrically arranged on the base frame 501. The side of the two support frames 502 arranged opposite to each other is called an inclined surface, and the two inclined surfaces form a V-shaped structure. A plurality of rollers 402 are arranged in parallel on the inclined surface, and the rollers 402 are rotatably fixed to the support seat 401 by a retaining spring. The two support frames 502 are symmetrically arranged on both sides of the base frame 501, ensuring the stability and symmetry of the overall structure. The side of each support frame 502 arranged opposite to each other is designed as an inclined surface, so that the two inclined surfaces together form a V-shaped structure. This design not only increases the strength of the support seat 401, but also can better adapt to objects of different shapes and sizes. On the two inclined surfaces of the V-shaped structure, a plurality of rollers 402 are arranged in parallel. These rollers 402 are evenly distributed, can effectively support and transfer weight, and reduce local stress concentration. Each roller shaft 402 is rotatably fixed on the support frame 502 by a retaining spring, thereby ensuring the stability and reliability of the roller shaft 402 during use.

[0038] The angle of the inclined surface has a direct impact on the overall stability and strength of the structure. Therefore, in one embodiment, the angle formed by the two inclined surfaces is 120°~150°. By setting the angle within the range of 120° to 150°, the stress distribution inside the structure can be effectively dispersed, thereby enhancing its bearing capacity. This design not only improves the reliability of the structure, but also extends its service life. In addition, the 120° to 150° angle design also has good adaptability and can adapt to more specifications of particle accelerators to meet the needs of different application scenarios. Whether it is the existing particle accelerator specifications or new specifications that may appear in the future, stable and reliable support can be provided.

[0039] During the disassembly and assembly process, it is necessary to fine-tune the axial position of the accelerating tube on the roller 403. Therefore, in one embodiment, three splines 503 are evenly distributed on the circumference of the outer side surface of the roller shaft 402, and three key grooves 504 are evenly distributed on the circumference of the inner side surface of the roller 403. The key grooves 504 are adapted to the splines 503, and the key grooves 504 are slidably connected to the splines 503. The splines 503 have a limiting function, which effectively prevents the roller 403 from unnecessary displacement during the rotation process, thereby ensuring the stability and reliability of the operation of the equipment. The splines 503 also have a guiding function, so that the roller 403 can slide along the axial direction of the roller shaft 402 during the movement. This guiding effect not only improves the accuracy of the movement of the roller 403, but also reduces the wear and failure caused by poor movement, thereby extending the service life of the equipment.

[0040] During the disassembly and assembly process, the accelerating tube needs to maintain a relatively stable state. Therefore, in one embodiment, the roller 403 includes a cylinder 506 and two discs 505, and the two discs 505 are fixedly connected to the two ends of the cylinder 506, respectively, and the inner diameter of the cylinder 506 is adapted to the outer diameter of the roller shaft 402, and the outer diameter of the cylinder 506 is smaller than the outer diameter of the disc 505. The disc 505 can effectively prevent the particle accelerating tube on the roller 403 from unnecessary displacement or offset, ensuring that the particle accelerating tube can stably follow the roller 403 for axial movement. This limiting function not only improves the operating accuracy of the equipment, but also effectively avoids the safety hazards caused by the abnormal movement of the particle accelerating tube, thereby ensuring the stability and reliability of the entire system.

[0041] During the disassembly and assembly process, the surface of the accelerating tube on the roller 403 may be scratched. Therefore, in one embodiment, the roller 403 is made of PVC material. Due to its excellent wear resistance, the PVC material can maintain a good surface condition during long-term use, and the roller 403 does not need to be replaced frequently, thereby reducing maintenance costs; the roller 403 made of PVC material has high strength and rigidity, can withstand a large load, and further improves the stability and reliability of the device; the roller 403 made of PVC material can also effectively prevent the sealing surface of the particle accelerating tube placed on the roller 403 from being scratched.

[0042] The preferred embodiments of the present invention are described in detail above, but the present invention is not limited to the embodiments. Those skilled in the art may make various equivalent modifications or substitutions without violating the spirit of the present invention. These equivalent modifications or substitutions are all included in the scope defined by the claims of this application.

Claims

1. A particle linear accelerator auxiliary disassembly and assembly device, characterized in that: include: Rack(1); A lifting frame (2), the lifting frame (2) being arranged on the frame (1); A driving device (3), the driving device (3) being arranged on a movable end of the lifting frame (2); A rotating bracket (4), the rotating bracket (4) comprising a supporting seat (401), a roller shaft (402) and a roller wheel (403), wherein a plurality of the roller shafts (402) and a plurality of the roller wheels (403) are provided, the roller shafts (402) and the roller wheels (403) corresponding to each other one by one, the roller shafts (402) being arranged on the supporting seat (401) in a V-shape, the roller wheels (403) being slidably sleeved on the roller shafts (402), the roller wheels (403) being used to place a particle linear acceleration tube, one end of the supporting seat (401) being hinged on the lifting frame (2), the other end of the supporting seat (401) being connected to the lifting frame (2) via the driving device (3), the driving device (3) driving the rotating bracket (4) to swing around a hinge between the lifting frame (2) and the rotating bracket (4), and the lifting frame (2) driving the supporting seat (401) to move up and down.

2. The particle linear accelerator auxiliary disassembly and assembly device according to claim 1, characterized in that: The frame (1) comprises a base (101), wheels (102) and a handle (103); the lifting frame (2) is arranged on the base (101); the wheels (102) are arranged on the bottom surface of the base (101); and the handle (103) is arranged on the base (101).

3. The particle linear accelerator auxiliary disassembly and assembly device according to claim 2, characterized in that: The lifting frame (2) comprises a cross bar (206), a flat plate (202), a hydraulic cylinder (203) and two connecting rod mechanisms (201); the flat plate (202) is arranged above the base (101); the two connecting rod mechanisms (201) are installed between the base (101) and the flat plate (202); the cross bar (206) connects the two connecting rod mechanisms (201); each connecting rod mechanism (201) comprises a first connecting rod (204) and a second connecting rod (205); the lower end of the first connecting rod (204) is hinged to the base (101); the upper end of the first connecting rod (204) is connected to the flat plate (202) via a roller. The upper end of the second connecting rod (205) is hinged on the bottom surface of the flat plate (202), the lower end of the second connecting rod (205) is slidably connected to the base (101) via a roller, the first connecting rod (204) and the second connecting rod (205) are centrally hinged, one end of the cross bar (206) passes through the center point of the first connecting rod (204) and the center point of the second connecting rod (205), the hydraulic cylinder (203) is installed on the base (101), the push rod of the hydraulic cylinder (203) is connected to the cross bar (206), and the hydraulic cylinder (203) is used to push or pull the cross bar (206) to achieve the lifting and lowering of the flat plate (202).

4. The particle linear accelerator auxiliary disassembly and assembly device according to claim 3, characterized in that: The fixed end of the driving device (3) is hinged to the flat plate (202) via a pin shaft.

5. The particle linear accelerator auxiliary disassembly and assembly device according to claim 1, characterized in that: The support seat (401) comprises a base frame (501) and two support frames (502), wherein the two support frames (502) are symmetrically arranged on the base frame (501), and a side on which the two support frames (502) are arranged opposite to each other is called an inclined surface, and the two inclined surfaces form a V-shaped structure, and a plurality of rollers (402) are arranged in parallel on the inclined surfaces, and the rollers (402) are rotationally fixed to the support seat (401) via a retaining spring.

6. The particle linear accelerator auxiliary disassembly and assembly device according to claim 5, characterized in that: The included angle formed by the two inclined surfaces is 120°~150°.

7. The particle linear accelerator auxiliary disassembly and assembly device according to claim 1, characterized in that: Three splines (503) are evenly distributed on the circumference of the outer side surface of the roller shaft (402), and three key grooves (504) are evenly distributed on the circumference of the inner side surface of the roller wheel (403). The key grooves (504) are matched with the splines (503), and the key grooves (504) are slidably connected to the splines (503).

8. The particle linear accelerator auxiliary disassembly and assembly device according to claim 7, characterized in that: The roller (403) comprises a cylinder (506) and two discs (505), the two discs (505) being fixedly connected to two ends of the cylinder (506) respectively, the inner diameter of the cylinder (506) being matched to the outer diameter of the roller shaft (402), and the outer diameter of the cylinder (506) being smaller than the outer diameter of the discs (505).

9. The particle linear accelerator auxiliary disassembly and assembly device according to claim 8, characterized in that: The roller (403) is made of PVC material.

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