Modular heating jacket with remoldable insulator

Abstract

Embodiments of the present disclosure relate to a heating jacket including a reformable insulator. The insulator may be shaped to conform to a vapor deposition precursor delivery system or portion thereof, and thereafter may be reshaped for different vapor deposition precursor delivery systems or portions thereof. Some embodiments of the present disclosure combine a plurality of heating modules to form a heating jacket. The heating module comprises a flexible heating element and an insulating protective cover.

Description

Technical Field

[0001] Embodiments of the present disclosure generally relate to modular heating jackets, methods of forming, and methods of using. In particular, embodiments of the present disclosure relate to modular heating jackets including re-moldable insulation. Background Art

[0002] Chemical delivery systems for semiconductor manufacturing may utilize solid or liquid precursor ampoules that are heated during precursor delivery to help volatilize the precursor for delivery to a process chamber. It is also desirable to heat the delivery lines that provide the precursor from the ampoule to the process chamber.

[0003] Precursors can be supplied from ampoules of various sizes, connected to a series of delivery lines including various valves and fittings, depending on the shape of the ampoule, the input / output location of the ampoule, the size of the orifice, etc. Given these variations, it is often necessary to reconfigure the lines, valves, fittings, etc. when switching precursor ampoules or chambers.

[0004] Therefore, it is difficult to heat the precursor delivery lines because these lines are often oddly shaped and / or arranged, and the arrangement changes frequently. In addition, while there are some standardized heaters for common ampoule shapes, not all of these heaters work with additional heaters to provide uniform temperature within the delivery system.

[0005] Therefore, there is a need for a heater module that can be shaped and reshaped to uniformly heat a vapor deposition precursor delivery system, including ampoules, tubing, valves, and fittings. Summary of the invention

[0006] One or more embodiments of the present disclosure are directed to a heater jacket module comprising: a first layer comprising a moldable insulator material configured to conform to the shape of a plurality of lines, valves and / or fittings connected to a vapor deposition precursor delivery system; a second layer over the first layer and comprising a flexible heating element configured to conform to the shape of the plurality of lines, valves and / or fittings; and a third layer over the second layer and comprising an electrically insulating and flame retardant cover surrounding the flexible heating element and the moldable insulator.

[0007] Another embodiment is directed to a method of forming a heating jacket insulation, the method comprising: activating a moldable insulation material; conforming the moldable insulation material to a first plurality of pipelines, valves and / or fittings comprising a first shape to form an insulation conforming to the first shape; and curing the insulation conforming to the first shape into the first shape. BRIEF DESCRIPTION OF THE DRAWINGS

[0008] In order to be able to understand in detail the manner in which the above-mentioned features of the present disclosure are achieved, the present disclosure briefly summarized above may be described in more detail by reference to embodiments, some of which are shown in the accompanying drawings. However, it should be noted that the accompanying drawings depict only typical embodiments of the present disclosure and therefore should not be considered as limiting the scope thereof, as the present disclosure may allow for other equally effective embodiments.

[0009] Figure 1 shows a cross-sectional view of an exemplary vapor deposition precursor delivery system;

[0010] Figure 2 A method for using a computer program product according to one or more embodiments of the present disclosure is shown. Figure 1 Modular heating jackets for vapor deposition precursor delivery systems; and

[0011] Figure 3 A process flow diagram for forming a modular heating jacket having formable insulation according to one or more embodiments of the present disclosure is shown.

[0012] To facilitate understanding, identical reference numerals have been used, where possible, to designate identical elements that are common to the figures. It is contemplated that elements and features of one embodiment may be beneficially incorporated in other embodiments without further recitation. DETAILED DESCRIPTION

[0013] Before describing several exemplary embodiments of the present disclosure, it should be understood that the present disclosure is not limited to the details of construction or processing steps set forth in the following description. The present disclosure is capable of other embodiments and can be practiced or carried out in various ways.

[0014] Figure 1 A vapor deposition precursor delivery system 100 is shown in accordance with one or more embodiments of the present disclosure. Precursors are stored in ampoule 110. A carrier gas or diluent gas is provided through input 120, flows through the system, entrains the precursors as it passes through ampoule 110, and exits the system through output 130 into a vapor deposition process chamber 135. As used herein, "vapor deposition process chamber" and "vapor deposition" refer to processes involving the delivery of precursor vapors to form films on substrates (e.g., semiconductor wafers). Vapor deposition can include chemical vapor deposition, cyclic vapor deposition, and atomic layer deposition.

[0015] As used herein, "atomic layer deposition" or "cyclic deposition" refers to sequential exposure to two or more reactive compounds to deposit a layer of material on a substrate surface. The substrate or portion of the substrate is individually exposed to two or more reactive compounds introduced into a reaction zone of a processing chamber. In a time-domain ALD process, exposure to each reactive compound is separated by a time delay to allow each compound to adhere and / or react on the substrate surface, and each compound is then purged from the processing chamber. The reactive compounds are said to be exposed to the substrate in sequence. In a spatial ALD process, different portions of the substrate surface or materials on the substrate surface are simultaneously exposed to two or more reactive compounds so that any given point on the substrate is not substantially exposed to more than one reactive compound at the same time. As used in this specification and the appended claims, as will be understood by those skilled in the art, the term "substantially" used in this regard means that it is possible that a small portion of the substrate may be exposed to multiple reactive gases simultaneously due to diffusion, and the simultaneous exposure is unplanned.

[0016] In one aspect of the time-domain ALD process, a first reactive gas (i.e., a first precursor or compound A) is pulsed into the reaction region, followed by a first time delay. Then, a second precursor or compound B is pulsed into the reaction region, followed by a second delay. During each time delay, a purge gas (e.g., argon) is introduced into the processing chamber to purge the reaction region or otherwise remove any residual reactive compounds or reaction byproducts from the reaction region. Alternatively, the purge gas may flow continuously throughout the deposition process so that only the purge gas flows during the time delay between pulses of the reactive compound. The reactive compounds are pulsed alternately until a desired film or film thickness is formed on the substrate surface. In either case, the ALD process of pulsing compound A, purge gas, compound B, and purge gas is a cycle. The cycle may start with compound A or compound B and continue in the corresponding order of the cycle until a film having a predetermined thickness is obtained.

[0017] In an embodiment of a spatial ALD process, a first reactive gas and a second reactive gas (e.g., nitrogen) are delivered to the reaction region simultaneously, but separated by an inert gas curtain and / or a vacuum curtain. The substrate moves relative to the gas delivery device so that any given point on the substrate is exposed to the first reactive gas and the second reactive gas.

[0018] As used herein, "chemical vapor deposition" refers to a process in which a substrate surface is exposed to a precursor and / or a co-reagent simultaneously or substantially simultaneously. As used herein, "substantially simultaneously" refers to co-flow or where there is overlap in the exposure of most of the precursors. Plasma enhanced chemical vapor deposition (PECVD) is widely used to deposit thin films due to cost-effectiveness and the diversity of film properties. In the PECVD process, for example, a hydrocarbon source (e.g., a vapor of a gaseous hydrocarbon or a liquid hydrocarbon entrained in a carrier gas) is introduced into a PECVD chamber. A plasma-initiating gas, typically helium, is also introduced into the chamber. A plasma is then initiated in the chamber to produce excited CH radicals. The excited CH radicals chemically bond to the substrate surface located in the chamber, thereby forming a desired film on the substrate surface. Any suitable thin film deposition system can be used to perform the embodiments described herein regarding the PECVD process. Any device description described herein is illustrative and should not be interpreted or understood as limiting the scope of the embodiments described herein.

[0019] Figure 1 The exemplary system shown also includes one or more pneumatic valves 140, one or more manual valves 150, a plurality of gas lines 160, and a connector 170. In some embodiments, the connector includes a vacuum coupling radius (VCR) fitting 162. The diameter of the VCR fitting 162 and the gas line 160 connected thereto is generally very small, typically with an inner diameter in the range of 1.8 mm to 15 mm, and the smaller diameter VCR fitting 162 and gas line 160 are difficult to insulate with conventional heating jackets. Therefore, existing heating jackets are unable to heat and contact the gas line 162. The heater jacket module 210 including the insulator 320 conforming to the first shape described in accordance with one or more embodiments enables the heater jacket module 210 to properly heat and contact small diameter gas lines with diameters between 1.8 mm and 15 mm.

[0020] Although not wishing to be limited to any particular arrangement, in accordance with one or more embodiments, in order to minimize the internal volume and space requirements of the vapor deposition precursor delivery system 100, the plurality of gas lines 160 are typically formed at odd angles to form a vapor deposition precursor delivery system 100 having an overall odd shape. "Odd angles" refers to various angles that may include acute angles, obtuse angles, and right angles. In general, "odd shapes" refer to complex shapes, rather than simple geometric shapes such as cylindrical, spherical, square, or rectangular cross-sections. The vapor deposition delivery system including a complex shape according to one or more embodiments includes more than two angled features (including connectors, pipelines, ampoules, etc.), such as three, four, five, six, seven, eight, nine, ten, or more than ten angled features.

[0021] One or more embodiments of the present disclosure relate to a heater jacket module that can be advantageously adapted to the complex shape of any vapor deposition precursor delivery system. Some embodiments further advantageously provide a modular heater jacket that can be re-molded to fit different and / or uniquely shaped vapor deposition precursor delivery systems.

[0022] refer to Figure 2 , showing a modular heater jacket having an application according to one or more embodiments Figure 1 A vapor deposition precursor delivery system 100 is provided. Figure 2 It is shown that the vapor deposition precursor delivery system can be heated by more than one heater jacket module 210. Figure 2 , the disclosed heater jacket may cover only one side of the vapor deposition precursor delivery system 100 (as shown), or may cover both sides of the vapor deposition precursor delivery system 100. In those embodiments where the disclosed heater jacket covers only one side of the vapor deposition precursor delivery system, the other side may be covered by an insulating material or left exposed for better temperature control and / or operation.

[0023] Although not in Figure 2 , but the disclosed modular heating jacket may include an opening on the edge of the heater jacket to insert and accommodate a valve handle or other accessories of the vapor deposition precursor delivery system 100. In these embodiments, two modules can be connected together to enclose a handle extension or other accessories.

[0024] Figure 2 Also shown is an ampoule heater 220. The ampoule heater 220 may include a heater jacket module as disclosed herein. Alternatively, the ampoule heater may include a dedicated ampoule heater as is known and used in the art.

[0025] In one or more embodiments, the heater jacket module includes: a first layer, the first layer comprising a moldable insulator material; a second layer, the second layer is above the first layer and includes a flexible heating element; and a third layer, the third layer is above the second layer and includes a cover. As used in the present disclosure and the appended claims, the term "above..." with respect to a layer includes the layer being directly in contact with another layer, and the presence of one or more intermediate layers between the layer (the layer being above the other layer). Therefore, in some embodiments, the phrase "above the layer" is intended to include one or more underlying layers. In other embodiments, the phrase "directly above..." refers to a layer or film that is in direct contact with another layer without intermediate layers. Therefore, the phrase "a first layer directly above the second layer" refers to the first layer that is in direct contact with the second layer, with no layers in between.

[0026] The moldable insulator material is configured to conform to the shape of multiple pipelines, valves and / or accessories of a vapor deposition precursor delivery system with a complex shape. Therefore, in some embodiments, "moldable" refers to the ability of the material to conform to or present the shape of part or all of the vapor deposition precursor delivery system. "Remoldable" refers to the ability to reshape the moldable insulator material into different shapes, such as vapor deposition precursor delivery systems of different shapes. The flexible heating element is adapted to the shape of the moldable insulator material (i.e., the shape of multiple pipelines, valves and / or accessories). The cover surrounds the moldable insulator material and the flexible heating element. In some embodiments, the cover is electrically insulating. In some embodiments, the cover is flame retardant. In some embodiments, the cover is electrically insulating and flame retardant.

[0027] In some embodiments, the moldable insulator material comprises a reformable ceramic. Thus, in some embodiments, the reformable ceramic material can be conformed to one shape and then reshaped to conform to another shape. In some embodiments, the reformable ceramic comprises a ceramic material that can be activated, formed, cured, reactivated, and reshaped. In some embodiments, the ceramic material is activated / reactivated by wetting the ceramic material with water. As used herein, "activated" and "activation" refer to making a sheet of insulator material moldable and / or remoldable, for example, by contacting the reformable material with water. In some embodiments, the ceramic material is cured by heating the formed ceramic material. Non-limiting examples of remoldable ceramic materials are available from McMaster-Carr of Robbinsville, New Jersey. Available from The moldable ceramic sheets available are rigid when dry, and when wetted with water, these sheets can be formed into any shape, including complex shapes. The re-moldable materials can be molded multiple times until exposed to heat, which makes them rigid again. The working and stable temperature range of this moldable ceramic sheet is -120 ° F to 2730 ° F, the heat flow rate is 1.2 Btu @ 1200 ° F, and the density is 75 lbs. / cu.ft. As used herein, "re-moldable" and "re-formable" refer to a block of material such as a moldable ceramic insulating sheet that is configured to be molded or formed into various shapes more than once. Another example of a re-moldable or re-formable material includes a shape memory polymer, which has the ability to adjust its stiffness, form a temporary shape, and restore a permanent shape when an appropriate stimulus is imposed.

[0028] In some embodiments, the flexible heating element comprises a resistant heating element, which comprises a metal wire, a braid, a woven fabric, a non-oriented fabric or a woven fabric configured to generate heat by applying electrical power. In some embodiments, the flexible heating element comprises a sheet of material or a mat of material, such as a carbon fiber mat. In some embodiments, the flexible heating element further comprises an electrode for transferring current from a power source to the flexible heating element. In some embodiments, the flexible heating element further comprises a controller, which is connected to the electrode and the power source and is configured to regulate the temperature of the flexible heating element, and the flexible heating element in turn regulates the temperature of the components (such as ampoules and pipelines) of the vapor deposition precursor delivery system. In some embodiments, the controller is also connected to the vapor deposition precursor delivery system, and is further configured to control the temperature of the flexible heating element in response to the temperature of the vapor deposition precursor delivery system, and the temperature of the vapor deposition precursor delivery system can be monitored by a thermometer, a thermocouple, etc.

[0029] In some embodiments, the cover is electrically insulating and / or flame retardant. In some embodiments, the cover comprises a durable material, such as an aramid fabric such as an aramid fabric, for example Kevlar. In some embodiments, the cover comprises a heating cover and an insulating cover. The heating cover covers the outer surface of the flexible heating element, and the insulating cover covers the outer surface of the moldable insulator. In some embodiments, the heating cover and the insulating cover are connected by fasteners. In some embodiments, the fasteners are hook and loop fasteners. In some embodiments, the fasteners are steel-aramid hook and loop fasteners.

[0030] As mentioned above about Figure 2As described, several modules may be required to effectively heat the entire vapor deposition precursor delivery system. Therefore, in some embodiments, a heater jacket for a vapor deposition precursor delivery system includes more than one heater jacket module, and more than one heater jacket module is connected together to provide a plurality of physically interconnected heater jacket modules. In addition, in some embodiments where there are more than one heater jacket module, each heater jacket module can be connected to another heater jacket module by a fastener. In some embodiments, the fastener is a hook and loop fastener. In some embodiments, the fastener is a steel-aramid hook and loop fastener.

[0031] Additional embodiments of the present disclosure are directed to a method 300 of forming a heating jacket insulation. Figure 3 The method begins by activating a moldable insulator material 310. In some embodiments, the moldable insulator is in the form of a sheet of material, such as a flat sheet of material. As further described above, the activated moldable insulator material 310 can conform to a first shape 350, which includes a plurality of tubes and / or ampoules, such as Figure 1 and Figure 2 As shown, it is different from the shape of the moldable insulator material 310. Still referring to Figure 3 , the activated moldable insulator material 310 is conformed to a first shape 350 corresponding to a first vapor deposition precursor delivery system or a portion thereof (e.g., a first plurality of pipelines, valves, and / or connectors). The resulting insulator is referred to as an insulator conforming to the first shape 320. The insulator conforming to the first shape 320 is then cured and locked into the first shape. The curing process eliminates the ability of the insulator to be further formed or shaped without reactivation so that the insulator conforming to the first shape 320 can be reshaped into a different second shape.

[0032] In some embodiments, the method further includes forming a heating jacket module 345, the heating jacket module 345 including the flexible heating element 330 and a cover, as shown, the cover includes a first insulator cover 341 and a second heater cover 342. It should be understood that the first insulator cover 341 and the second heater cover 342 can include a single piece or a single section of covering material. The size and shape of the flexible heating element 330 are set and thus adapted to the insulator 320 that conforms to the first shape. In this way, the flexible heating element 330 conforms to the shape of the insulator 320 that conforms to the first shape. Then, the insulator that conforms to the first shape and the flexible heating element are surrounded by a cover (e.g., the first insulator cover 341 and the second heater cover 342).

[0033] As described above, the cover may include a first insulator cover and a second heater cover. The two parts of the cover may be fastened together. Thus, in some embodiments, enclosing the insulator conforming to the first shape and the flexible heating element comprises: covering the insulator conforming to the first shape with the first cover; covering the flexible heating element with the second cover; and fastening the first cover and the second cover to enclose the insulator and the heating element.

[0034] As described above, the first cover and the second cover can be fastened by hook and loop fasteners. In addition, in some embodiments, the first cover and the second cover can be fastened by steel-aramid hook and loop fasteners.

[0035] Finally, the method can be repeated to reshape the insulator into a different shape. In these embodiments, the insulator conforming to the first shape is reactivated. The insulator is reshaped for a second vapor deposition precursor delivery system or a portion thereof (e.g., a second plurality of pipelines, valves and / or connectors) to form an insulator conforming to a second shape. The insulator conforming to the second shape is cured. Those skilled in the art will recognize that the insulator conforming to the second shape can be further processed to form a second heating module as described above.

[0036] One or more embodiments described herein advantageously provide a heater jacket module and method that is configured to conform to a wide variety of specific complex shapes. In addition, regardless of the shape of the vapor deposition precursor delivery system, the disclosed method advantageously allows for the reuse of insulator materials in a variety of different shapes, as well as the reuse of flexible heating elements and covers. In one or more embodiments, the heater jacket module is configured to withstand temperatures up to 300°C. Advantageously, the heater jacket module and method described herein meet a long-standing and urgent need, avoiding the requirement to manufacture custom heating jackets for different vapor deposition precursor delivery systems including complex shapes, which is lengthy and expensive. The heater jacket module and method described herein provide efficient heating of vapor deposition precursor delivery systems including complex shapes, which can be reused and reshaped multiple times, avoiding the current practice of using expensive custom heating jackets or combinations of heating tapes and insulation packaging materials. The embodiments described herein avoid the tedious and time-consuming unwrapping / wrapping of insulation and heating, which tends to increase the wear and separation of thermocouples and accessories.

[0037] In addition, the heater jacket module described herein meets the urgent need to be able to heat and insulate small diameter fittings and gas lines, such as VCR fittings 162 and gas lines 160. The heater jacket module 210 described according to one or more embodiments including the insulator 320 conforming to the first shape enables the heater jacket module 210 to properly heat and contact small diameter gas lines between 1.8 mm and 15 mm in diameter.

[0038] References to "one embodiment", "certain embodiments", "one or more embodiments" or "an embodiment" throughout the specification mean that the specific features, structures, materials or characteristics described in connection with the embodiment are included in at least one embodiment of the present disclosure. Therefore, phrases such as "in one or more embodiments", "in certain embodiments", "in an embodiment" or "in an embodiment" appearing in various places throughout the specification do not necessarily refer to the same embodiment of the present disclosure. In addition, specific features, structures, materials or characteristics may be combined in any suitable manner in one or more embodiments.

[0039] Although the disclosure herein has been described with reference to specific embodiments, it will be appreciated by those skilled in the art that the described embodiments are merely illustrative of the principles and applications of the disclosure. It will be apparent to those skilled in the art that various modifications and variations may be made to the methods and apparatus of the disclosure without departing from the spirit and scope of the disclosure. Therefore, the disclosure may include modifications and variations within the scope of the appended claims and their equivalents.

Claims

1. A heater jacket module, comprising: a first layer comprising a moldable insulator material configured to conform to a shape of a plurality of lines, valves, and / or fittings connected to a vapor deposition precursor delivery system; a second layer overlying the first layer and comprising a flexible heating element configured to conform to the shape of the plurality of lines, valves, and / or fittings; as well as A third layer is over the second layer and includes an electrically insulating and flame retardant cover surrounding the flexible heating element and the moldable insulator.

2. The heater jacket module of claim 1, wherein the moldable insulator material comprises a reformable ceramic.

3. The heater jacket module of claim 2, wherein the reformable ceramic comprises a ceramic material capable of being activated, formed, cured, reactivated, and reformed.

4. The heater jacket module of claim 1, wherein the flexible heating element comprises carbon fiber cloth.

5. The heater jacket module of claim 4, wherein the flexible heating element further comprises an electrode and a controller connected to the electrode and configured to control a temperature of the flexible heating element.

6. The heater jacket module of claim 5, wherein the controller is further connected to the plurality of lines, valves and / or fittings and is further configured to control the temperature of the flexible heating element in response to the temperature of the plurality of lines, valves and / or fittings.

7. The heater jacket module of claim 1, wherein the electrically insulating and flame retardant cover comprises aramid.

8. The heater jacket module of claim 1, wherein the electrically insulating and flame retardant cover comprises a heating cover and an insulating cover, the heating cover covering an outer surface of the flexible heating element and the insulating cover covering an outer surface of the moldable insulator.

9. The heating jacket module of claim 8, wherein the heating cover and the insulating cover are coupled by fasteners.

10. The heating jacket module of claim 9, wherein the fastener is a steel-aramid hook and loop fastener.

11. A heater jacket comprising more than one heater jacket module according to claim 1.

12. The heater jacket of claim 11, wherein the more than one heater jacket modules are joined by steel-aramid hook and loop fasteners.

13. A method of forming a heating jacket insulator, the method comprising: activating the moldable insulator material; conforming the moldable insulator material to a first plurality of lines, valves, and / or fittings comprising a first shape to form an insulator conforming to the first shape; as well as The insulator conforming to the first shape is cured into the first shape.

14. The method of claim 13, further comprising: conforming the flexible heating element to the insulator conforming to the first shape; as well as The insulator conforming to the first shape and the flexible heating element are surrounded by an electrically insulating and flame retardant cover to form a heating jacket module.

15. The method of claim 14, wherein the flexible heating element comprises carbon fiber cloth.

16. The method of claim 14, wherein the electrically insulating and flame retardant cover comprises aramid.

17. The method of claim 14, wherein surrounding the conformable insulator and the flexible heating element with an electrically insulating and flame retardant cover comprises: covering the conformable insulator with a first cover; covering the flexible heating element with a second cover; as well as The first cover and the second cover are secured to surround the conformable insulator and the flexible heating element.

18. The method of claim 17, wherein the first cover and the second cover are fastened by hook and loop fasteners.

19. The method of claim 18, wherein a plurality of heating jacket modules are joined to form the heating jacket, each heating jacket module being joined by hook and loop fasteners.

20. The method of claim 13, further comprising: reactivating the insulator conformed to the first shape; reshaping the conformable insulator for a second plurality of lines, valves, and / or fittings having a second shape to form a conformable insulator to the second shape; as well as The insulator conforming to the second shape is cured.

Images