High-precision meniscus lens center deviation testing device and testing method
Through the design of the high-precision meniscus center deviation testing device, the problem of central deviation measurement in optical processing is solved, the accurate measurement and process optimization of meniscus lenses are achieved, and the accuracy of optical installation calibration and imaging quality are improved.
Patent Information
- Application Number
- CN202411394010.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-10-08
- Publication Date
- 2024-12-27
AI Technical Summary
During optical processing, the central deviation measurement of meniscus lenses is difficult to accurately evaluate, resulting in the inaccurate process of determining which process benchmark is inaccurate, affecting the optical installation and imaging quality.
A high-precision meniscus lens central deviation testing device is designed, including a support platform, an optical path self-collimator and an adjustment device. The central deviation type is judged through the overlapping of the convex and convex images of the optical path and the outer circle jumping amount detection. And optimize and trim in combination with the processing process.
High-precision measurement and type judgment of the center deviation of meniscus lenses are realized, and the problems in specific process steps are clarified, so that process optimization and trimming are carried out, and the accuracy and imaging quality of optical installation are improved.
Smart Images
Figure CN119198018A_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to the technical field of ultra-precision optical testing, and in particular to a high-precision meniscus lens center deviation testing device and testing method. Background Art
[0002] In ultra-precision optical technology, center deviation is a technical indicator of optical lenses. This indicator directly affects optical calibration and is of great significance to the imaging quality of optical systems. The center deviation of a meniscus lens is the optical axis deviation between two optical surfaces. This indicator is used to minimize the optical axis deviation between the two optical surfaces during measurement and optical calibration.
[0003] During the optical processing of the lens, the two optical surfaces are processed separately in a certain order. This requires that the processing of the second optical surface must be based on the optical axis of the first optical surface. The processing technology will convert the optical axis into a measurable mechanical reference, that is, the optical axis will be converted into a process reference according to certain rules. This process is often the main cause of center deviation.
[0004] In the optical processing, this index is converted into a measurable process benchmark (generally composed of an outer circle and a positioning surface) for process assurance. Therefore, for a meniscus lens with an excessive center deviation index, the center deviation index measured by the instrument cannot be used to assess which process benchmark is inaccurate and causes the index.
[0005] In summary, in order to solve the above problems, the present invention proposes a high-precision meniscus lens center deviation testing device and testing method, which are used to guide the process optimization and trimming of the center deviation technical indicators in optical processing. Summary of the invention
[0006] In view of the above-mentioned defects or deficiencies in the prior art, it is desirable to provide a high-precision meniscus lens center deviation testing device and testing method.
[0007] In a first aspect, the present application provides a high-precision meniscus lens center deviation test device, comprising: A supporting platform, wherein the supporting platform has a working table parallel to the first direction; Two optical path autocollimators, the two optical path autocollimators are respectively arranged above and below the workbench, the optical path autocollimators have a light source, can generate the optical path, the optical path autocollimators have an emission end, and the two emission ends are both located at one end of the optical path autocollimator close to the workbench, the optical path is emitted from the emission end, and the light paths emitted by the two optical path autocollimators are collinear, and the optical path extends along a second direction; the second direction is perpendicular to the first direction; A tool, the tool is arranged on the top of the workbench through an adjustment device, the tool is used to clamp the meniscus lens, and can perform translation adjustment on the meniscus lens so that the optical axis of the meniscus lens and the optical path are collinear; the adjustment device can adjust the tool so that the top plane of the placement table of the tool is perpendicular to the second direction; The meniscus lens has a convex surface at the top and a concave surface at the bottom. A concave platform is provided at the outer peripheral edge of the concave surface, and the concave platform is perpendicular to the second direction.
[0008] According to the technical solution provided in the embodiment of the present application, the tooling is an annular structure, and a plurality of adjustment holes are evenly arranged along its radial direction on its circumferential side wall, the inner wall of the adjustment hole is provided with a thread, and the inner thread of the adjustment hole is connected with a top screw; the bottom of the circumferential inner wall of the tooling is fixedly connected to the placement table, and the placement table is an annular structure, which is used to place the meniscus lens and contact the concave platform (3) so that the concave platform (3) is perpendicular to the second direction.
[0009] According to the technical solution provided in the embodiment of the present application, the adjustment device is arranged on the top of the workbench, and the adjustment device has five degrees of freedom including three-dimensional translation and two-dimensional angular rotation. It can clamp the tooling and adjust the tooling so that the placement table is perpendicular to the second direction.
[0010] According to the technical solution provided in the embodiment of the present application, the two optical path autocollimators are connected to an external processing device, the optical path autocollimators have a light source, can generate the optical path, the optical path is emitted from the emission end, the upper light path is reflected by the convex surface to form a convex image, and the lower light path is reflected by the concave surface to form a concave image, and the external processing device is used to record the positions of the two light sources and the positions and moving distances of the convex image and the concave image.
[0011] According to the technical solution provided in the embodiment of the present application, a mounting portion is further provided on the top of the workbench for installing a detection device, wherein the detection device has a detection probe, and the tooling with the meniscus lens mounted thereon is driven by the adjustment device to rotate one circle, and the detection device can detect the outer circle runout of the meniscus lens.
[0012] In a second aspect, the present application provides a testing method, which is applied with the high-precision meniscus lens center deviation testing device, and the testing method comprises the following steps: S01, production of tooling; S02, clamp the tooling onto the adjustment device, and place the standard flat crystal on the top of the placement table. The adjusting device adjusts the fixture with the standard flat crystal clamped thereon so that the plane of the standard flat crystal is perpendicular to the light path emitted from the optical path autocollimator; S03, take out the standard flat crystal, and clamp the meniscus lens into the tooling so that the concave surface is close to the placement table; S04, adjusting the meniscus lens by adjusting the top screw to make the concave image coincide with the light source of the optical path autocollimator below; S05, installing a detection device, and detecting the outer circle runout of the outer circle of the meniscus lens by rotating the tooling, if the outer circle runout is less than the first set value, proceeding to step S06; if the outer circle runout is greater than the first set value, it means that the optical axis of the concave surface and the optical path emitted by the optical path autocollimator below do not coincide, and the center deviation is a displacement deviation; S06, observing the jitter between the convex image formed by the upper light path through the convex surface reflection and the light source of the upper light path autocollimator through the external processing device, if the jitter is less than the second set value, the meniscus lens is a qualified product; if the jitter is greater than the second set value, proceed to step S07; S07. Adjust the top screw to push the meniscus lens to translate, and observe whether the jump amount between the concave image and the light source of the optical path autocollimator below, as well as the jump amount between the convex image and the light source of the optical path autocollimator above, can be adjusted within the tolerance range. If so, the meniscus lens is qualified, and there is a displacement deviation between the optical axis of the concave surface and the optical axis of the convex surface; if not, the meniscus lens is unqualified, and there is an angular deviation between the optical axis of the concave surface and the optical axis of the convex surface.
[0013] According to the technical solution provided in the embodiment of the present application, the tooling with the standard flat crystal clamped thereon is adjusted by an adjustment device so that the plane of the standard flat crystal is perpendicular to the light path emitted by the optical path autocollimator, including: The tooling with the standard flat crystal clamped thereon is adjusted by translation and rotation through the adjustment device until the light paths emitted from the upper and lower optical path autocollimators are respectively reflected by the upper and lower planes of the standard flat crystal and are respectively coincident with the light sources of the upper and lower optical path autocollimators through the external processing device. At this time, the plane of the standard flat crystal is perpendicular to the light path emitted from the optical path autocollimator, and the top plane of the placement table is perpendicular to the light path emitted from the upper or lower optical path autocollimator.
[0014] According to the technical solution provided in the embodiment of the present application, the outer circle runout detection of the outer circle of the meniscus lens by rotating the tooling includes: The tooling with the meniscus lens installed is rotated by adjusting the device, and the detection probe is close to the outer circle of the meniscus lens. When the meniscus lens rotates one circle, the difference between the maximum reading and the minimum reading detected by the detection device is the outer circle runout.
[0015] According to the technical solution provided in the embodiment of the present application, the amount of jump between the convex image formed by the convex surface reflection of the upper light path and the light source of the upper light path autocollimator is the deviation between the convex image and the light source of the upper light path autocollimator; correspondingly, the amount of jump between the concave image and the light source of the lower light path autocollimator is the deviation between the concave image and the light source of the lower light path autocollimator.
[0016] According to the technical solution provided in the embodiment of the present application, the tolerance range includes: The deviation between the concave image and the light source of the optical path autocollimator below is less than the third set value, and the deviation between the convex image and the light source of the optical path autocollimator above is less than the second set value.
[0017] In summary, the technical solution specifically discloses a high-precision meniscus lens center deviation test device and test method, the test device includes a support platform, which has a workbench parallel to a first direction, two optical path autocollimators are respectively arranged above and below the workbench, the optical path autocollimator has an emission end at one end close to the workbench, the optical path autocollimator has a light source, which generates a light path and emits from the emission end, the light path is parallel to a second direction, the light paths of the two optical path autocollimators are collinear, and the second direction is perpendicular to the first direction; the tooling is arranged on the top of the workbench through an adjustment device, and is used to clamp and adjust the meniscus lens, and the top and bottom of the meniscus lens have a convex surface and a concave surface respectively; The testing method includes clamping a meniscus lens into a fixture and adjusting the meniscus lens, observing an external processing device until a concave image formed by a lower optical path reflected by a concave surface coincides with a light source of a lower optical path autocollimator, rotating the meniscus lens for one circle to measure an outer circle runout, and comparing the first set value to determine whether there is a center deviation and the type of the center deviation; then observing a distance between a convex image formed by an upper optical path reflected by a convex surface and the light source of the upper optical path autocollimator, and comparing the second set value to determine whether the meniscus lens is a qualified product and the type of the center deviation; by adjusting the meniscus lens, observing whether the distance between the concave image and the light source of the lower optical path autocollimator and the distance between the convex image and the light source of the upper optical path autocollimator can be adjusted within a tolerance range, and determining the type of the center deviation of the meniscus lens; Therefore, by using the device and applying the method, the optical axes of the concave and convex surfaces of the meniscus lens can be measured, and the type of the center deviation of the meniscus lens can be determined. Combined with the processing technology of the meniscus lens, it can be determined which specific step of the process has a problem, so that the processing technology of the meniscus lens can be optimized and adjusted. BRIEF DESCRIPTION OF THE DRAWINGS
[0018] Other features, objects and advantages of the present application will become more apparent by reading the detailed description of non-limiting embodiments made with reference to the following drawings: Figure 1Schematic diagram of a meniscus lens.
[0019] Figure 2 This is a schematic diagram of standard flat wafer installation.
[0020] Figure 3 This is a schematic diagram of the tooling.
[0021] Figure 4 Schematic diagram of the meniscus lens installation.
[0022] Figure 5 Specific steps for the test method.
[0023] Numbers in the figure: 1. Meniscus lens; 2. Outer circle; 3. Concave platform; 4. Support platform; 5. Workbench; 6. Support column; 7. Optical path autocollimator; 8. Linear guide; 9. Tooling; 10. Adjustment hole; 11. Placement table; 12. Adjustment device; 13. Installation part; 14. Detection device; 15. Standard flat crystal. DETAILED DESCRIPTION
[0024] The present application is further described in detail below in conjunction with the accompanying drawings and embodiments. It is to be understood that the specific embodiments described herein are only used to explain the relevant invention, rather than to limit the invention. It is also necessary to explain that, for ease of description, only the parts related to the invention are shown in the accompanying drawings.
[0025] It should be noted that, in the absence of conflict, the embodiments and features in the embodiments of the present application can be combined with each other. The present application will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.
[0026] Embodiment 1 like Figure 1 As shown, the meniscus lens 1 is a typical optical lens. The processing process of the meniscus lens 1 is as follows: using a blank to be processed, in the first step, the concave platform 3 and the concave surface of the meniscus lens 1 are turned based on the convex surface of the external mold and the outer circle 2 of the blank; in the second step, the convex surface of the meniscus lens 1 is turned based on the processed concave platform 3 and the outer circle 2 of the blank; during the processing of the meniscus lens, the concave platform 3 and the concave surface are turned in one loading process, and it can be considered that the concave optical axis is absolutely perpendicular to the concave platform 3; Furthermore, since the processing of the concave and convex surfaces is based on the outer circle 2, it is explained that the rotation center of the outer circle coincides with the optical axis of the concave and convex surfaces; The two sides of the meniscus lens 1 are respectively a concave surface and a convex surface, and a concave platform 3 is provided at the circumferential outer edge of the concave surface; the outer circle 2 is the circumferential side wall of the meniscus lens 1 .
[0027] Please refer to Figures 2 to 4 As shown, a high-precision meniscus lens center deviation testing device comprises: The support platform 4 has a workbench 5 parallel to the first direction, a support column 6 extending along the second direction is fixedly arranged at the bottom of the workbench 5, and the top of the workbench 5 is a working plane; the first direction is Figure 2 The middle horizontal direction, the second direction is Figure 2 In the vertical direction, the first direction is perpendicular to the second direction; Two optical path autocollimators 7, the two optical path autocollimators 7 are respectively arranged above and below the workbench 5 through a linear guide 8 extending along the second direction, the optical path autocollimator 7 has an emission end, and the emission end is located at one end of the optical path autocollimator 7 close to the workbench 5, the optical path autocollimator 7 generates a light path through a light source, the light path extends along the second direction, and the light paths emitted from the two emission ends are collinear; Furthermore, the linear guide rail 8 can drive the optical path autocollimator 7 to move closer to or away from the workbench 5 along the second direction, and can ensure that the upper and lower optical paths are always collinear; The tooling 9 is used to clamp the meniscus lens 1. The tooling 9 is an annular structure, and a plurality of adjustment holes 10 are evenly penetrated and opened along the radial direction on the circumferential side wall thereof. Optionally, the adjustment holes are threaded holes, and the adjustment holes are provided with threads connected with top screws. The bottom of the tooling 9 is fixedly connected with a placement table 11. The placement table 11 is an annular structure, and its circumferential side wall is fixedly connected with the bottom circumferential inner wall of the tooling 9, and is used to place the meniscus lens 1. The placement table 11 is perpendicular to the second direction; Optionally, the tooling 9 and the placement table 11 are integrally formed; Therefore, by placing the meniscus lens 1 inside the tooling 9, the concave platform 3 of the meniscus lens 1 is fitted to the placement table 11, and the meniscus lens 1 can be translated by adjusting the top screw. It can be considered that the horizontal plane of the concave platform 3 coincides with the horizontal plane of the top of the placement table 11.
[0028] The adjusting device 12 is arranged on the workbench 5 and is used to adjust the displacement and angle of the tooling 9. Optionally, the adjusting device 12 is a five-dimensional adjustment rotating table with five degrees of freedom including three-dimensional translation and two-dimensional angular rotation, and can clamp the tooling 9 and adjust the tooling 9.
[0029] A mounting portion 13 is also provided on the top of the workbench 5 for mounting a detection device 14, the detection device 14 having a detection probe, and the detection device 14 can detect the outer circle runout of the meniscus lens 1, and optionally, the detection device 14 is a micrometer; Furthermore, the outer circle runout detection method is to place the detection probe close to the outer circle of the meniscus lens 1, rotate the meniscus lens 1 for one circle, and the difference between the maximum reading and the minimum reading detected by the detection device 14 is the outer circle runout.
[0030] Both optical path autocollimators 7 are connected to an external processing device. The optical path autocollimator 7 has a light source and can generate a light path. The light path is emitted from the emission end. The upper light path is reflected from the convex surface to form a convex image, and the lower light path is reflected from the concave surface to form a concave image. The external processing device is used to record the positions of the two light sources and the positions and moving distances of the convex image and the concave image.
[0031] Embodiment 2 A testing method, which uses a high-precision meniscus lens center deviation testing device proposed in Example 1, and the specific steps are as follows: S01, production tooling 9; Specifically, the placement table 11 is machined by a single-point diamond lathe, which can ensure a flatness better than 1 μm; S02, clamping the tooling 9 onto the adjustment device 12, and placing the standard flat crystal 15 on the top of the placement table 11, and adjusting the tooling 9 with the standard flat crystal 15 clamped thereon by the adjustment device 12, so that the plane of the standard flat crystal 15 is perpendicular to the light path emitted by the optical path autocollimator 7; Among them, by clamping the tooling 9 onto the adjustment device 12, after placing the standard flat crystal 15 on the top of the placement table 11, the standard flat crystal 15 is clamped by adjusting the top screw to prevent the standard flat crystal 15 from shaking, and the standard flat crystal 15 is limited. Then, the tooling 9 clamped with the standard flat crystal 15 is translated and rotated by the adjustment device 12, so that the upper and lower planes of the standard flat crystal 15 are respectively perpendicular to the light paths emitted by the upper and lower optical path autocollimator 7. Specifically, the reflected images of the light path through the upper and lower planes of the standard flat crystal 15 are observed by an external processing device to see whether they coincide with the light source of the optical path autocollimator 7. If they coincide, it means that the upper and lower planes of the standard flat crystal 15 are respectively perpendicular to the light paths emitted by the upper and lower optical path autocollimator 7. This ensures that the horizontal plane on the top of the placement table 11 is perpendicular to the light path emitted from the collimator 7 above or below; It should be noted that the upper and lower planes of the standard flat crystal 15 can be considered to be absolutely parallel; S03, take out the standard flat crystal 15, and clamp the meniscus lens 1 into the tooling 9, so that the concave surface is close to the placement table 11; Specifically, through the adjustment of step S02, it is ensured that the horizontal plane of the top of the placement table 11 and the light path emitted from the collimator 7 above or below are perpendicular to each other. After the meniscus lens 1 is clamped into the tooling 9, the horizontal plane of the concave platform 3 and the horizontal plane of the top of the placement table 11 coincide with each other, thereby ensuring that the light path above or below the horizontal plane of the concave platform 3 is perpendicular to the light path emitted from the collimator 7; S04, adjusting the meniscus lens 1 by adjusting the top screw, so that the concave image and the light source of the optical path autocollimator 7 below coincide with each other; Specifically, by adjusting the top screw, the top screw pushes the meniscus lens 1 to achieve the purpose of translating the meniscus lens 1, and the light path emitted by the optical path autocollimator 7 below is reflected by the concave surface to form a concave image, and the position of the meniscus lens 1 is adjusted to move the concave surface, drive the optical axis of the concave surface to move, and at the same time, the concave image moves, and observe the external processing device until the concave image coincides with the light source of the optical path autocollimator 7 below. At this time, the optical axis of the concave surface coincides with the light path emitted by the optical path autocollimator 7 below, and the rotation center of the concave surface coincides with the light path emitted by the optical path autocollimator 7 below. Observe the external processing device to show that the jump amount between the concave image and the light source of the optical path autocollimator 7 below is 0, that is, the distance between the optical axis of the concave surface and the light path emitted by the optical path autocollimator 7 below is 0; S05, installing the detection device 14, and detecting the outer circle runout of the outer circle 2 of the meniscus lens 1 by rotating the tool 9. If the outer circle runout is less than the first set value, proceed to step S06; if the outer circle runout is greater than the first set value, it means that the optical axis of the concave surface and the optical path emitted by the optical path autocollimator 7 below do not coincide, and the center deviation is a displacement deviation; Specifically, the detection device 14 is installed on the mounting portion 13, and the tooling 9 clamped with the meniscus lens 1 is driven to rotate by the adjustment device 12, and the outer circle runout of the meniscus lens 1 after one rotation is measured by the detection probe of the detection device 14. If the outer circle runout is less than the first set value, step S06 is performed; If the outer circle runout is greater than the first set value, it means that the rotation center of the concave surface and the light path emitted from the optical path autocollimator 7 below do not coincide, that is, the optical axis of the concave surface and the light path emitted from the optical path autocollimator 7 below do not coincide, and there is a deviation between the optical axis of the concave surface and the light path emitted from the optical path autocollimator 7 below, which is a displacement deviation; Furthermore, when there is a displacement deviation, it is judged that the first step of the meniscus lens 1 processing process has a deviation, that is, when the convex surface of the external mold and the outer circle 2 of the blank are used as the reference, the blank is clamped to turn the concave platform 3 and the concave surface of the meniscus lens 1, and a clamping deviation occurs. There is a displacement deviation between the optical axis of the processed concave surface and the optical axis of the convex surface of the external mold, and the meniscus lens 1 is a defective product; S06, observing the jitter between the convex image formed by the upper light path through the convex surface reflection and the light source of the upper light path autocollimator 7 through the external processing device, if the jitter is less than the second set value, the meniscus lens 1 is a qualified product; if the jitter is greater than the second set value, proceed to step S07; Specifically, the convex image formed by the upper light path through the convex surface reflection is observed by the external processing device to see the jitter between the concave image and the light source of the upper light path autocollimator 7. If the jitter is less than the second set value, the distance between the concave image and the light source of the upper light path autocollimator 7 is less than the second set value, that is, the offset between the concave optical axis and the light path emitted by the upper light path autocollimator 7 is within the allowable error range, indicating that the meniscus lens 1 is a qualified product. If the jitter value is greater than the second set value, proceed to step S07; S07, adjust the top screw, push the meniscus lens 1 to translate, and observe whether the jump amount between the concave image and the light source of the optical path autocollimator 7 below and the jump amount between the convex image and the light source of the optical path autocollimator 7 above can be adjusted to within the tolerance range. If so, the meniscus lens 1 is a qualified product, and there is a displacement deviation between the optical axis of the concave surface and the optical axis of the convex surface; if not, the meniscus lens 1 is a defective product, and there is an angle deviation between the optical axis of the concave surface and the optical axis of the convex surface; Specifically, the top screw is adjusted so that the top screw pushes the meniscus lens 1 to translate. During this process, the external processing device is used to observe whether the jump amount between the concave image and the light source of the optical path autocollimator 7 below and the jump amount between the convex image and the light source of the optical path autocollimator 7 above can be adjusted to within the tolerance range, that is, whether the jump amount between the concave image and the light source of the optical path autocollimator 7 below is less than the third set value, and whether the jump amount between the convex image and the light source of the optical path autocollimator 7 above is less than the second set value. If both are less than, it means that the distance between the optical axis of the concave surface and the optical axis of the convex surface and the optical path emitted by the optical path autocollimator 7 above or below is within the allowable error range, the meniscus lens 1 is a qualified product, and there is a displacement deviation between the optical axis of the concave surface and the optical axis of the convex surface. It is judged that the second step of the reference of the processing process of the meniscus lens 1 has a deviation, that is, when the convex surface is processed based on the processed concave surface and the outer circle 2, the clamping of the meniscus lens 1 has a deviation, resulting in a displacement deviation between the optical axis of the concave surface and the optical axis of the convex surface. If the jitter between the concave image and the light source of the optical path autocollimator 7 below is greater than the third set value, or the jitter between the convex image and the light source of the optical path autocollimator 7 above is greater than the second set value, or the jitter between the concave image and the light source of the optical path autocollimator 7 below and the jitter between the convex image and the light source of the optical path autocollimator 7 above are respectively greater than the third set value and the second set value, then it means that the distances between the optical axes of the concave surface and the convex surface and the light paths emitted by the optical path autocollimator 7 above or below are respectively outside the allowable error range, the meniscus lens 1 is a defective product, and there is an angular deviation between the optical axes of the concave surface and the convex surface. It is judged that the second step benchmark of the processing process of the meniscus lens 1 has a deviation, that is, when the convex surface is processed based on the processed concave surface and the outer circle 2, there is a deviation in the clamping of the meniscus lens 1, resulting in an angular deviation between the optical axes of the concave surface and the convex surface.
[0032] The above description is only a preferred embodiment of the present application and an explanation of the technical principles used. Those skilled in the art should understand that the scope of the invention involved in the present application is not limited to the technical solution formed by a specific combination of the above technical features, but should also cover other technical solutions formed by any combination of the above technical features or their equivalent features without departing from the inventive concept. For example, the above features are replaced with (but not limited to) technical features with similar functions disclosed in the present application.
Claims
1. A high-precision meniscus lens center deviation test device, characterized in that: include: A supporting platform (4), the supporting platform (4) having a working table (5) parallel to the first direction; Two optical path autocollimators (7), the two optical path autocollimators (7) are respectively arranged above and below the workbench (5), the optical path autocollimators (7) have a light source capable of generating the optical path, the optical path autocollimator (7) has an emission end, and the two emission ends are both located at one end of the optical path autocollimator (7) close to the workbench (5), the optical path is emitted from the emission end, the optical paths emitted by the two optical path autocollimators (7) are collinear, and the optical paths extend along a second direction; the second direction is perpendicular to the first direction; A tool (9), the tool (9) being arranged on the top of the workbench (5) via an adjustment device (12), the tool (9) being used to clamp the meniscus lens (1) and capable of performing translation adjustment on the meniscus lens (1) so that the optical axis of the meniscus lens (1) and the optical path are collinear; The adjusting device (12) is capable of adjusting the tool (9) so that the top plane of the placement table (11) of the tool (9) is perpendicular to the second direction; The meniscus lens (1) has a convex surface at the top and a concave surface at the bottom, and a concave platform (3) is provided at the outer peripheral edge of the concave surface, and the concave platform (3) is perpendicular to the second direction.
2. A high-precision meniscus lens center deviation test device according to claim 1, characterized in that: The tooling (9) is an annular structure, and a plurality of adjustment holes (10) are evenly arranged along the radial direction on its circumferential side wall, the inner wall of the adjustment hole (10) is provided with a thread, and the inner thread of the adjustment hole (10) is connected to a top screw; the bottom of the circumferential inner wall of the tooling (9) is fixedly connected to the placement platform (11), and the placement platform (11) is an annular structure, and is used to place the meniscus lens (1) and contact the concave platform (3), so that the concave platform (3) is perpendicular to the second direction.
3. A high-precision meniscus lens center deviation test device according to claim 2, characterized in that: The adjustment device (12) is arranged on the top of the workbench (5), and the adjustment device (12) has five degrees of freedom, namely three-dimensional translation and two-dimensional angular rotation, and is capable of clamping the tooling (9) and adjusting the tooling (9) so that the placement table (11) is perpendicular to the second direction.
4. A high-precision meniscus lens center deviation test device according to claim 1, characterized in that: The two optical path autocollimators (7) are both connected to an external processing device, the upper optical path is reflected by the convex surface to form a convex image, and the lower optical path is reflected by the concave surface to form a concave image, and the external processing device is used to record the positions of the two light sources and the positions and moving distances of the convex image and the concave image.
5. The high-precision meniscus lens center deviation test device according to claim 1, characterized in that: The top of the workbench (5) is also provided with a mounting portion (13) for mounting a detection device (14). The detection device (14) has a detection probe. The adjustment device (12) drives the tooling (9) on which the meniscus lens (1) is mounted to rotate one circle. The detection device (14) is capable of detecting the outer circle runout of the meniscus lens (1).
6. A testing method, using a high-precision meniscus lens center deviation testing device as claimed in any one of claims 1 to 5, characterized in that: The test method comprises the following steps: S01, making tooling (9); S02, clamp the tooling (9) onto the adjustment device (12), and place the standard flat crystal (15) on On top of the placement table (11), the tooling (9) on which the standard flat crystal (15) is clamped is adjusted by means of an adjustment device (12) so that the plane of the standard flat crystal (15) is perpendicular to the light path emitted by the optical path autocollimator (7); S03, taking out the standard flat crystal (15), and clamping the meniscus lens (1) into the tooling (9), with the concave surface close to the placement table (11); S04, adjusting the meniscus lens (1) by adjusting the top screw, so that the concave image and the light source of the optical path autocollimator (7) below coincide with each other; S05, installing a detection device (14), and detecting the outer circle runout of the outer circle (2) of the meniscus lens (1) by rotating the tooling (9), and if the outer circle runout is less than a first set value, proceeding to step S06; if the outer circle runout is greater than the first set value, it means that the optical axis of the concave surface and the optical path emitted by the optical path autocollimator (7) below do not coincide, and the center deviation is a displacement deviation; S06, observing the jitter between the convex image formed by the upper light path through the convex surface reflection and the light source of the upper light path autocollimator (7) through an external processing device, if the jitter is less than a second set value, the meniscus lens (1) is a qualified product; if the jitter is greater than the second set value, proceed to step S07; S07, adjust the top screw, push the meniscus lens (1) to translate, and observe whether the jump amount between the concave image and the light source of the optical path autocollimator (7) below, and the jump amount between the convex image and the light source of the optical path autocollimator (7) above can be adjusted to within the tolerance range. If so, the meniscus lens (1) is a qualified product, and there is a displacement deviation between the optical axis of the concave surface and the optical axis of the convex surface; if not, the meniscus lens (1) is a defective product, and there is an angular deviation between the optical axis of the concave surface and the optical axis of the convex surface.
7. A testing method according to claim 6, characterized in that: The tooling (9) having the standard flat crystal (15) mounted thereon is adjusted by an adjustment device (12) so that the plane of the standard flat crystal (15) is perpendicular to the light path emitted by the light path autocollimator (7), including: The tooling (9) having the standard flat crystal (15) mounted thereon is adjusted in translation and rotation by means of an adjustment device (12) until the light paths emitted by the upper and lower optical path autocollimators (7) are respectively reflected by the upper and lower planes of the standard flat crystal (15) and are respectively overlapped with the light sources of the upper and lower optical path autocollimators (7) by observing through an external processing device. At this time, the plane of the standard flat crystal (15) is perpendicular to the light path emitted by the optical path autocollimator (7), and the top plane of the placement table (11) is perpendicular to the light path emitted by the upper or lower optical path autocollimator (7).
8. A testing method according to claim 7, characterized in that: The method of detecting the outer circle runout of the outer circle (2) of the meniscus lens (1) by rotating the tooling (9) comprises: The tooling (9) on which the meniscus lens (1) is mounted is rotated by means of an adjusting device (12), and the detection probe is brought close to the outer circle of the meniscus lens (1). When the meniscus lens (1) rotates one circle, the difference between the maximum reading and the minimum reading detected by the detection device (14) is the outer circle runout.
9. A testing method according to claim 8, characterized in that: The amount of jitter between the convex image formed by the upper light path through convex surface reflection and the light source of the upper light path autocollimator (7) is the deviation between the convex image and the light source of the upper light path autocollimator (7); correspondingly, the amount of jitter between the concave image and the light source of the lower light path autocollimator (7) is the deviation between the concave image and the light source of the lower light path autocollimator (7).
10. A testing method according to claim 9, characterized in that: The tolerance range includes: The deviation between the concave image and the light source of the optical path autocollimator (7) below is less than a third set value, and the deviation between the convex image and the light source of the optical path autocollimator (7) above is less than a second set value.