Reflector fine adjustment device

Abstract

The invention provides a micro-adjustment device for a reflector, and the device comprises a base which is internally provided with a light inlet channel and a light outlet channel; the reflector assembly is provided with three mounting holes, and the reflector assembly is mounted on the base and configured to reflect incident light of the light inlet channel to the light outlet channel; the mounting assembly is matched with the mounting hole and used for enabling the reflector assembly to be flexibly connected with the base, and the mounting assembly comprises a disc spring and is configured to adjust the position of the reflector assembly relative to the base. Flexible connection between the mounting seat and the base is realized through three belleville springs, and two-dimensional adjustment of the pointing direction of the reflector is realized by increasing or decreasing the pre-tightening force of the belleville springs under the condition of ensuring reliable sealing of an optical path; translation of the reflecting mirror is realized by simultaneously increasing or decreasing the number of discs in the disc springs at the three connecting points; and finally, correction of the angular difference and the position of the transmitted laser is completed.

Description

Technical Field

[0001] The present disclosure relates to the technical field of medical devices, and in particular to a reflector fine-adjustment device. Background Art

[0002] In the field of high-energy laser transmission, metal reflectors are usually used to realize the deflection of laser beams to quickly dissipate heat and prevent the reflectors from being damaged by strong lasers. However, if long-term stable operation is required, the metal reflectors and their supporting structures need to be further cooled by water. On the other hand, in order to ensure the accuracy of light beam transmission, it is necessary to make necessary adjustments to the position and posture of the plane reflector to correct the position difference and angular difference of the light beam. Traditional light-guiding devices usually use the method of grinding the mounting surface of the reflector to achieve micro-adjustment of the reflector. This method has a simple structure and strong stability, but the grinding workload of the mirror seat is large, and once the incident light beam changes, the mounting surface of the reflector has to be re-grinded, which is very unfavorable for mass production. Some reflector mechanisms with micro-adjustment functions in related technologies are not only complex in structure and cannot be cooled by water, but also difficult to achieve airtightness of the optical path. Summary of the invention

[0003] The purpose of the present disclosure is to provide a reflector micro-adjustment device to solve the technical problems in the related art. The specific solution is as follows: A first aspect of the disclosed embodiments provides a reflector fine-adjustment device, comprising: a base, in which a light inlet channel and a light outlet channel are provided; A reflector assembly is provided with three mounting holes, the reflector assembly is mounted on the base, and is configured to reflect incident light from the light inlet channel to the light outlet channel; A mounting assembly is used to cooperate with the mounting hole to enable the reflector assembly to be flexibly connected to the base, Each of the mounting components includes at least a disc spring, and the disc spring is configured to adjust the position and posture of the reflector assembly relative to the base.

[0004] In some embodiments, each of the disc springs includes a plurality of annular discs, and in response to an increase or decrease in the number of the annular discs of at least one of the disc springs, the reflection angle of the incident light is deflected.

[0005] In some embodiments, in response to the number of the annular discs of the three disc springs increasing or decreasing simultaneously, the reflected light in the light exit channel is translated.

[0006] In some embodiments, in response to an increase in compression of at least one of the disc springs, a reflection angle of the incident light is deflected.

[0007] In some embodiments, in the axial direction of the mounting hole, a projection line connecting the three disc springs forms a triangle.

[0008] In some embodiments, the reflector fine-adjustment device further includes: a first sealing ring, disposed between the base and the reflector assembly, and configured to provide a radially flexible seal between the reflector assembly and the base.

[0009] In some embodiments, the reflector assembly comprises: The reflector comprises a working mirror surface and a first cooling pipeline, wherein the first cooling pipeline is arranged on the back side of the working mirror surface and is configured to cool the working mirror surface.

[0010] In some embodiments, the reflector assembly further comprises: A mounting seat cooperates with the mounting assembly to connect the reflector to the base, Wherein, a peripheral side wall connecting the mounting seat and the base is provided with a mounting groove, and the first sealing ring is interference-fitted with the mounting groove.

[0011] In some embodiments, in the axial direction of the reflector, the projection of the first cooling pipeline coincides with the projection of the reflector.

[0012] In some embodiments, the mount comprises: A second cooling pipeline is disposed inside the mounting base and is independent of the first cooling pipeline, and is configured to reduce the temperature of the reflector.

[0013] Compared with the related art, the above solution of the embodiment of the present disclosure has at least the following beneficial effects: The reflector fine-tuning device provided by the present disclosure realizes the flexible connection between the reflector assembly and the base through three disc springs. Under the condition of ensuring the reliable sealing of the optical path, the two-dimensional adjustment of the direction of the reflector assembly is realized by increasing or decreasing the preload force of the disc spring or the number of discs; the translation of the reflector is realized by simultaneously increasing or decreasing the number of discs in the disc springs at the three connection points; and finally the correction of the angle deviation and position deviation of the transmitted laser is completed. By circulating water through the reflector and the mounting seat, the heat dissipation efficiency is improved, and the stability of the reflector and the transmission quality of the high-energy laser are ensured.

[0014] It is to be understood that the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the present disclosure. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] The drawings herein are incorporated into the specification and constitute a part of the specification, showing embodiments consistent with the present disclosure, and together with the specification, are used to explain the principles of the present disclosure. Obviously, the drawings described below are only some embodiments of the present disclosure, and for ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work. In the drawings: Reference numerals: Figure 1 It is a schematic structural diagram of a water-cooled airtight reflector fine-adjustment device according to an exemplary embodiment.

[0016] Figure 2 yes Figure 1 Sectional view along AA direction.

[0017] Figure 3 yes Figure 1 Cross-sectional view along the BB axis.

[0018] Figure 4 is a cross-sectional view of a mounting base according to an exemplary embodiment.

[0019] Figure 5 is a water channel cross-sectional view of a reflector according to an exemplary embodiment.

[0020] Figure 6 yes Figure 5 Cross-sectional view along the DD direction.

[0021] Figure 7 is a water channel cross-sectional view of a mounting base according to an exemplary embodiment.

[0022] Figure 8 is a structural diagram of a disc spring according to an exemplary embodiment.

[0023] Fig. 9 It is a cross-sectional view of a reflector micro-adjustment device after angular difference adjustment according to an exemplary embodiment.

[0024] Fig.10 It is a cross-sectional view of a reflector micro-adjustment device after position difference adjustment according to an exemplary embodiment.

[0025] Reference numerals: Base 1000, installation area 1001, light inlet channel 1100, light outlet channel 1200; Reflector assembly 2000, first sealing ring 2010, second sealing ring 2020, third sealing ring 2030; Reflecting mirror 2100, working mirror surface 2101, water inlet channel 2110, first water inlet 2111, water outlet channel 2120, first water outlet 2121, first channel 2131, second channel 2132, and third channel 2133; Mounting seat 2200, accommodating space 2201, mounting hole 2202, second water inlet 2211, second water outlet 2212, second water inlet nozzle 2221, second water outlet nozzle 2222, annular water channel 2223, mounting groove 2230; Gland 2300; Stud 3100 , locking nut 3200 , steel bushing 3300 , disc spring 3400 , annular disc 3410 . DETAILED DESCRIPTION

[0026] In order to make the purpose, technical solutions and advantages of the present disclosure clearer, the present disclosure will be further described in detail below in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present disclosure, rather than all of the embodiments. Based on the embodiments in the present disclosure, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present disclosure.

[0027] The terms used in the embodiments of the present disclosure are only for the purpose of describing specific embodiments, and are not intended to limit the present disclosure. The singular forms "a", "said" and "the" used in the embodiments of the present disclosure and the appended claims are also intended to include plural forms, unless the context clearly indicates other meanings, and "multiple" generally includes at least two, and other quantifiers are similar.

[0028] It should be understood that, although the terms first, second, third, etc. may be used to describe in the disclosed embodiments, these descriptions should not be limited to these terms. These terms are only used to distinguish the described objects. For example, without departing from the scope of the disclosed embodiments, the first may also be referred to as the second, and similarly, the second may also be referred to as the first. In addition, the terms "first", "second", "third", etc. are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0029] It should be understood that the term "and / or" used in this article is only a description of the association relationship of associated objects, indicating that three relationships may exist. For example, A and / or B can represent: A exists alone, A and B exist at the same time, and B exists alone. In addition, the character " / " in this article generally indicates that the associated objects before and after are in an "or" relationship. The singular forms "a", "the" and "the" are also intended to include the plural forms, unless the context clearly indicates other meanings.

[0030] It should be further understood that the terms "center", "longitudinal", "lateral", "front", "back", "up", "down", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship are based on the orientation or position relationship shown in the accompanying drawings, and are only for the convenience of describing the present embodiment and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0031] In the description of the present disclosure, it should be noted that, unless otherwise clearly specified and limited, the terms "connected" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0032] As used herein, the words "if" and "if" may be interpreted as "at the time of" or "when" or "in response to determining" or "in response to detecting", depending on the context. Similarly, the phrases "if it is determined" or "if (stated condition or event) is detected" may be interpreted as "when it is determined" or "in response to determining" or "when detecting (stated condition or event)" or "in response to detecting (stated condition or event)", depending on the context.

[0033] It should also be noted that the term "includes", "comprising" or any other variation thereof is intended to cover non-exclusive inclusion, so that a commodity or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such commodity or device. In the absence of more restrictions, the elements defined by the sentence "comprising a ..." do not exclude the existence of other identical elements in the commodity or device including the elements.

[0034] In order to ensure the accuracy of light beam transmission, it is necessary to adjust the position and posture of the reflector to correct the position difference and angle difference of the light beam. Once the reflector is set in the gas chamber, its position and angle are difficult to adjust, so it is difficult to achieve an ideal light path. Therefore, it is necessary to provide an adjustment device that can ensure airtightness and achieve rapid adjustment of the reflector. In the related art, the reflector that can achieve airtight fixed mirror seat cannot achieve rapid adjustment, while the reflector that can achieve rapid adjustment is difficult to achieve airtightness.

[0035] The purpose of the present invention is to overcome the shortcomings of the prior art and provide a reflector fine-adjustment device, comprising: a base, which is provided with a light inlet channel and a light outlet channel; a reflector assembly, which is provided with at least three mounting holes at the bottom for mounting the reflector assembly on the base; a first sealing ring, which is provided between the base and the reflector assembly and is configured to enable radial flexible sealing between the reflector assembly and the base; and a mounting assembly, which cooperates with the mounting hole and is used to flexibly connect the reflector assembly to the base, wherein the mounting assembly includes at least three disc springs, which are configured to adjust the position of the reflector assembly relative to the base.

[0036] The reflector micro-adjustment device provided by the present disclosure can realize the flexible connection between the reflector seat and the base through three disc springs. Under the condition of ensuring the reliable sealing of the optical path, the two-dimensional adjustment of the reflector direction can be realized by increasing or decreasing the preload force of the disc spring; the translation of the reflector can be realized by simultaneously increasing or decreasing the number of discs in the disc springs at the three connection points; and finally the correction of the angle difference and position of the transmitted laser can be completed. By circulating water through the reflector and the reflector seat, the heat dissipation efficiency is improved, and the stability of the reflector and the transmission quality of the high-energy laser are ensured.

[0037] The optional embodiments of the present disclosure are described in detail below with reference to the accompanying drawings.

[0038] The present disclosure provides a reflector fine-adjustment device, comprising: a base 1000, a reflector assembly, a first sealing ring 2010, and a mounting assembly. Figure 1 , Figure 2 As shown, the base 1000 is provided with a light inlet channel 1100 and a light outlet channel 1200. An incident light beam can enter the base 1000 through the light inlet channel 1100. There is an angle between the light inlet channel 1100 and the light outlet channel 1200, and the angle can be a right angle. The reflector assembly is mounted on the base 1000 and is configured to reflect the incident light beam of the light inlet channel 1100 to the light outlet channel 1200. The reflector assembly is provided with three mounting holes, such as Figure 1 , Figure 3 As shown, the mounting assembly cooperates with the mounting hole to mount the reflector assembly on the base 1000, so that the reflector assembly is flexibly connected to the base 1000. Specifically, as Figure 2 As shown, a mounting area 1001 is provided on the surface of the base 1000 , and the mounting area 1001 is used to mount the reflector assembly, and a part of the reflector assembly is mounted in the mounting area 1001 .

[0039] In the radial direction of the reflector assembly, a first sealing ring 2010 is arranged around the portion of the reflector assembly that contacts the mounting area 1001. Figure 3, Figure 4 As shown, a mounting groove 2230 is provided on the peripheral side wall of the connecting portion between the mounting seat 2200 and the mounting space, and the reflector assembly also includes a first sealing ring 2010, which is a radial sealing ring installed in the mounting groove 2230, and is used to achieve radial sealing between the mounting seat 2200 and the base 1000, and to achieve micro-adjustment of the relative position between the mounting seat 2200 and the base 1000.

[0040] In some embodiments, the reflector assembly includes a reflector 2100 and a mounting base 2200. Figure 2 , Figure 3 , Figure 4 , Figure 5 As shown, the mounting seat 2200 is roughly a rectangular structural member, and a cylindrical accommodating space 2201 is provided in the middle of the mounting seat 2200. The accommodating space 2201 is configured to accommodate the reflector 2100, that is, the reflector 2100 is installed in the mounting area 1001 of the base 1000 through the mounting seat 2200, and is configured to change the optical path of the incident light beam. In response to the reflector 2100 being installed on the base 1000, the incident light beam can enter from the light inlet channel 1100 and irradiate the working mirror surface 2101 of the reflector 2100. Further, the incident light beam is reflected by the working mirror surface 2101 to the light outlet channel 1200.

[0041] In some embodiments, such as Figure 5 As shown, when the incident light beam is projected onto the reflector 2100, the working mirror surface 2101 of the reflector 2100 will generate a certain amount of heat. Therefore, the reflector assembly further includes a first water inlet 2111, a first water outlet 2121, and a first cooling pipeline, which are configured to allow external cold water to flow into the first cooling pipeline to cool down the reflector 2100 and prevent the reflector 2100 from being overheated. The first water inlet 2111 and the first water outlet 2121 are disposed on the reflector 2100, and are respectively connected to the water inlet and water outlet of the cooling pipeline. The cooling pipeline is disposed on the side of the working mirror surface 2101 of the reflector 2100 away from the light source, so as to achieve rapid cooling of the working mirror surface 2101 of the reflector 2100. In the axial direction of the reflector 2100, the projection of the first cooling pipeline coincides with the projection of the reflector 2100, thereby limiting the position of the first cooling pipeline so that the first cooling pipeline can accurately control the temperature of the reflector 2100. In response to the surface temperature of the reflector 2100 being too high, the flow rate and velocity of cold water in the first cooling pipeline are increased so that the surface temperature of the reflector 2100 is quickly brought up; in response to the surface temperature of the reflector 2100 becoming stable, the flow rate and velocity of cold water in the first cooling pipeline no longer change.

[0042] Specifically, Figure 5 , Figure 6 As shown, the first cooling pipeline includes a first channel 2131, a second channel 2132 and a third channel 2133, wherein the second channel 2132 is a fine radial pipeline, and multiple second channels 2132 are arranged in parallel, configured to increase the coverage of the first cooling pipeline on the working mirror surface 2101, the first channel 2131 and the third channel 2133 are arranged around the second channel 2132, and the first channel 2131 and the third channel 2133 are connected, the first channel 2131 and the third channel 2133 can be arc channels, configured to correspond to the edge shape of the reflecting mirror surface, so as to evenly dissipate heat to the working mirror surface 2101.

[0043] In some embodiments, to ensure that the first cooling pipeline can effectively reduce the surface temperature of the working mirror 2101, the distance between the second channel 2132 and the working mirror 2101 is 2mm-4mm. If the distance between the second channel 2132 and the working mirror 2101 is less than 2mm, it is easy to cause the surface accuracy of the working mirror 2101 to change and the light guiding quality to decrease; if the distance between the second channel 2132 and the working mirror 2101 is greater than 4mm, the cooling effect of the second channel 2132 on the working mirror 2101 will be reduced.

[0044] In some embodiments, Figure 5 As shown, in the reflector assembly 2100, the thickness of the second channel 2132 is 3mm-6mm. If the thickness of the second channel 2132 is less than 3mm, the cold water flow in the second channel 2132 is too small, and it is difficult to meet the cooling standard of the working mirror 2101 by the first cooling pipeline; if the thickness of the second channel 2132 is greater than 6mm, the cold water flow in the second channel 2132 is too large, which may cause the cooling rate to be too fast or excessive cooling, resulting in changes in the surface accuracy of the working mirror 2101 and reduced light guiding quality. In addition to the insignificant cooling effect, if the thickness of the second channel 2132 is too large, it is easy to increase the processing difficulty. Therefore, the preferred thickness of the second channel 2132 is 3mm-6mm.

[0045] In some embodiments, Figure 6As shown in the figure, in the top view, the width of the second channel 2132 is 5mm-10mm. If the width of the second channel 2132 is greater than 10mm, it is easy to cause the surface accuracy of the working mirror 2101 to change and the light guiding quality to decrease; if the width of the second channel 2132 is less than 5mm, the cooling effect of the second channel 2132 on the working mirror 2101 will be greatly reduced. Furthermore, second channels 2132 of different widths can be selected to control the flow rate of cold water when passing through the second channel 2132. If the width of the second channel 2132 is too large, the flow rate of water through the second channel 2132 is too fast, and the back side of the working mirror 2101 can be brought out more heat by the cold water, which is beneficial to heat dissipation; if the width of the second channel 2132 is too small, the flow rate of water through the second channel 2132 is too slow, and when the cold water passes through the second channel 2132, the back side of the working mirror 2101 can be brought out less heat by the cold water, and the pressure borne by the inner wall of the second channel 2132 is too large, which is not only not conducive to the heat dissipation of the working mirror 2101, but also not conducive to production safety.

[0046] It should be separately explained that, in the present embodiment, the cross-section of the second channel 2132 is discussed as a rectangle, but the present disclosure is not limited to this. The present disclosure does not specifically limit the shape of the second channel 2132. The cross-section of the second channel 2132 can be circular, rectangular, or other polygons, or any other shape that can achieve cooling of the working mirror 2101.

[0047] In some embodiments, Figure 5 , Figure 6 As shown, the reflector 2100 further includes a water inlet channel 2110 and a water outlet channel 2120, and the water inlet channel 2110 and the water outlet channel 2120 are respectively connected with the first water inlet 2111 and the first water outlet 2121 to deliver cold water to the first cooling pipeline, so as to achieve water cooling of the reflector 2100. The cold water enters the first channel 2131 through the first water inlet 2111 and the water inlet channel 2110 in sequence, and then flows into the third channel 2133 synchronously through the multi-path parallel second channels 2132, so as to take away the heat generated on the working surface of the reflector 2100 as much as possible. Finally, the cooling water flowing into the third channel 2133 flows out of the reflector 2100 through the water outlet channel 2120 and the first water outlet 2121, so as to achieve cooling of the reflector 2100, improve the surface stability of the reflector 2100, and ensure the light guiding quality.

[0048] In some embodiments, the reflector assembly further includes a second cooling circuit, such as Figure 1 , Figure 7As shown, the second cooling pipeline is arranged on the mounting seat 2200 and includes: a second water inlet 2211, a second water outlet 2212, a second water inlet nozzle 2221, a second water outlet nozzle 2222 and an annular waterway 2223. The second water inlet 2211, the second water outlet 2212 and the annular waterway 2223 are connected to achieve water cooling of the mounting seat 2200. The second water inlet nozzle 2221 and the second water outlet nozzle 2222 are connected through the second water inlet 2211 and the second water outlet 2212 respectively to achieve a quick connection between the mounting seat 2200 and the second cooling pipeline. The second cooling pipeline is configured to reduce the temperature inside the mounting seat 2200 by flowing cold water, further ensuring that the operating temperature of the reflector does not rise excessively.

[0049] In some embodiments, Figure 1 , Figure 3 As shown, the mounting base 2200 has three mounting holes 2202 in the thickness direction, and the mounting holes are configured to accommodate the mounting assembly so that the mounting base 2200 is mounted on the base 1000. The three mounting holes 2202 provide three connection points for connecting the reflector assembly and the base 1000. By adjusting the connection tightness of the three connection points, the position and posture of the reflector assembly relative to the base 1000 can be changed.

[0050] In some embodiments, the three connection points are respectively a first adjustment point near the light inlet channel 1100, a second adjustment point near the light outlet channel 1200, and a third adjustment point to ensure stable connection between the reflector assembly and the base 1000. When the incident light beam remains unchanged and the angle between the reflected light beam and the incident light beam is higher than a normal angle, the mounting base 2200 at the second connection point can be moved away from the base 1000 to adjust the reflected light beam counterclockwise, thereby reducing the angle between the reflected light beam and the incident light beam and restoring the reflected light beam to a normal optical path position.

[0051] In some embodiments, Figure 3As shown, the mounting assembly includes a stud 3100, a disc spring 3400, a steel bushing 3300 and a locking nut 3200, wherein the disc spring 3400 is configured to adjust the position of the reflector assembly relative to the base 1000, thereby realizing a flexible connection between the mounting seat 2200 and the base 1000. The steel bushing 3300 is sleeved on the side of the stud mounting seat 2200 away from the base 1000, and the locking nut 3200 is located on the side of the steel bushing 3300 away from the mounting seat 2200. When the locking nut 3200 is rotated to adjust the posture or position of the plane reflector 2100, the lower surface of the locking nut 3200 directly contacts and rubs with the upper surface of the steel bushing 3300, thereby avoiding direct friction between the locking nut 3200 and the reflector 2100 seat and causing surface damage to the reflector 2100 seat.

[0052] In some embodiments, the disc spring 3400 is a special spring that bears load in the axial direction. After being deformed under load, it stores a certain amount of potential energy. When the bolt becomes loose, the disc spring 3400 releases part of the potential energy to maintain the pressure between the flange connections to ensure that the reflector posture is stable and reliable. The stress distribution of the disc spring 3400 decreases evenly from the inside to the outside, which can achieve the effect of low stroke and high compensation force.

[0053] In some embodiments, the reflector assembly also includes a pressure cover 2300, a second sealing ring 2020 and a third sealing ring 2030, wherein the pressure cover 2300 is arranged on a side of the reflector 2100 away from the base 1000, and is configured to fix the reflector 2100 in the reflector 2100 installation area 1001 of the mounting seat 2200, wherein the pressure cover 2300 simultaneously covers at least a portion of the reflector 2100 and the mounting seat 2200, the second sealing ring 2020 is arranged between the pressure cover 2300 and the mounting seat 2200 to ensure that the pressure cover 2300 and the mounting seat 2200 are flexibly connected in the axial direction; the third sealing ring 2030 is arranged between the pressure cover 2300 and the reflector 2100 to ensure that the pressure cover 2300 and the reflector 2100 are connected in the axial direction.

[0054] In some embodiments, Figure 1 , Figure 8 As shown, the disc spring 3400 includes a plurality of annular discs 3410. Further, since the mounting assembly is provided with three groups corresponding to the mounting holes 2202, in practical applications, the compression amount of the disc spring 3400 of one or two groups of the mounting assembly can be changed to adjust the direction of the plane reflector 2100.

[0055] For example, Fig. 9As shown, at this time, the compression amount of one or two sets of disc springs 3400 is adjusted to tilt the reflector assembly in the installation area 1001. Furthermore, due to the angle deviation of the plane reflector 2100, the angle of the reflected light beam reflected by the incident light beam after projecting to the plane reflector 2100 will also be offset. In this way, the two-dimensional adjustment of the direction of the plane reflector 2100 can be achieved, thereby achieving the adjustment of the angle deviation of the reflected light beam.

[0056] In other embodiments, by increasing or decreasing the number of annular discs in the disc spring, the angle deviation of the reflected light beam can also be adjusted. Specifically, when the number of annular discs 3410 in one or two sets of disc springs 3400 in the three sets of the mounting components increases or decreases, the posture of the reflector assembly can be changed. In response to the change in the posture of the reflector assembly, the angle of the reflected light beam is adjusted in two dimensions.

[0057] In some embodiments, in response to a simultaneous increase in the number of the annular discs 3410 of the three disc springs 3400, the reflector 2100 moves away from the base 1000. Furthermore, the position of the plane reflector 2100 relative to the base 1000 can be adjusted by simultaneously increasing or decreasing the number of the annular discs 3410 in the disc springs 3400 at the three connection points. Ultimately, while keeping the incident light beam unchanged, a slight adjustment of the angular difference and the position difference of the reflected light beam can be achieved.

[0058] In some embodiments, Fig. 9 As shown, after the reflector assembly is mounted on the base 1000, in the thickness direction of the reflector assembly, the distance between the mounting seat 2200 and the base 1000 is M, and M can be 2mm-5mm. When the position of the incident light beam remains unchanged, if the angle of the reflected light beam needs to be adjusted, it is only necessary to adjust the preload force of one or two disc springs 3400, that is, to change the compression amount of one or two disc springs 3400, so that the mounting seat 2200 is deflected by an angle α relative to the base 1000. At this time, the deflection angle of the adjusted reflected light beam relative to the original light reflected light beam is β, and finally the correction of the reflected light beam angle difference is achieved.

[0059] In some embodiments, when the preload force of the disc spring 3400 is adjusted, the angle α at which the mounting base 2200 can be deflected relative to the base 1000 is calculated based on the distance between the mounting base 2200 and the base 1000. In response to the angle α at which the mounting base 2200 is deflected relative to the base 1000, the deflection angle of the reflected light beam relative to the original light reflected light beam is β, wherein β≈2α. In actual applications, the mounting base 2200 can be adjusted according to the preset position of the reflected light beam to adjust the angle deviation of the reflected light beam.

[0060] In some embodiments, Figure 8 , Fig.10 As shown, when the position of the reflected light beam needs to be adjusted while the incident light beam remains unchanged, it is only necessary to increase the number of annular discs 3410 in the three disc springs 3400 at the same time, that is, to make the spacing between the mounting seat 2200 and the base 1000 M+δ, and the reflected light beam is translated by a distance N relative to the original light beam, and finally the position difference of the reflected light beam is corrected. When the angle between the incident light beam and the working mirror surface is 45 degrees, in response to the spacing between the mounting seat 2200 and the base 1000 increasing the distance δ on the basis of the original distance M, the translation distance N of the reflected light beam relative to the original light beam increases with the increase of the spacing between the mounting seat 2200 and the base 1000, where N=δ. In practical applications, the mounting seat 2200 can be adjusted according to the preset position of the reflected light beam to adjust the position deviation of the reflected light beam.

[0061] The reflector micro-adjustment device provided by the present disclosure can realize the flexible sealing between the mounting seat 2200 and the base 1000 in the SS direction through the sealing ring, and realize the flexible connection between the mounting seat 2200 and the base 1000 through three disc springs 3400. Then, under the condition of ensuring the reliable sealing of the optical path, the two-dimensional adjustment of the direction of the reflector 2100 is realized by increasing or decreasing the pre-tightening force of the disc spring 3400; the translation of the reflector 2100 is realized by simultaneously increasing or decreasing the number of discs in the disc spring 3400 at the three connection points; and finally the correction of the angle difference and position of the transmitted laser is completed. By circulating water through the reflector 2100 and the mounting seat 2200, the heat dissipation efficiency is improved, and the stability of the surface shape of the reflector 2100 and the transmission quality of the high-energy laser are ensured.

[0062] In some embodiments, in the axial direction of the mounting hole, the projection lines of the three disc springs 3400 are connected to form an equilateral triangle. Since the distance between every two disc springs 3400 is the same, the three disc springs 3400 have the same characteristics, and the deflection or offset changes of the reflector assembly 2000 are predictable regardless of adjusting any of the disc springs 3400, which is more conducive to the staff in the field to adjust the reflector in actual applications to control the reflected light beam posture in the light outlet channel.

[0063] The specific structure, working principle and beneficial effects of the reflector fine-adjustment device provided in the embodiments of the present disclosure may refer to the reflector fine-adjustment device described in any of the above embodiments, and will not be elaborated here.

[0064] Finally, it should be noted that the various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the various embodiments can be referred to each other. For the system or device disclosed in the embodiment, since it corresponds to the method disclosed in the embodiment, the description is relatively simple, and the relevant parts can be referred to the method part description.

[0065] The above embodiments are only used to illustrate the technical solutions of the present disclosure, rather than to limit them. Although the present disclosure has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present disclosure.

Claims

1. A reflector fine-adjustment device, characterized in that: include: A base, with a light inlet channel and a light outlet channel provided inside; A reflector assembly is provided with three mounting holes, the reflector assembly is mounted on the base, and is configured to reflect incident light from the light inlet channel to the light outlet channel; A mounting assembly is used to cooperate with the mounting hole to enable the reflector assembly to be flexibly connected to the base, Each of the mounting components includes at least a disc spring, and the disc spring is configured to adjust the position and posture of the reflector assembly relative to the base.

2. The reflector fine-adjustment device according to claim 1, characterized in that: Each of the disc springs includes a plurality of annular discs, and in response to an increase or decrease in the number of the annular discs of at least one of the disc springs, the reflection angle of the incident light is deflected.

3. The reflector fine-adjustment device according to claim 2, characterized in that: In response to the simultaneous increase or decrease in the number of the annular discs of the three disc springs, the reflected light in the light exit channel is translated.

4. The reflector fine-adjustment device according to claim 1, characterized in that: In response to an increase in the compression amount of at least one of the disc springs, the reflection angle of the incident light is deflected.

5. The reflector fine-adjustment device according to claim 1, characterized in that: In the axial direction of the mounting hole, the projection connecting line of the three disc springs forms a triangle.

6. The reflector fine-adjustment device according to claim 1, characterized in that: Also includes: The first sealing ring is disposed between the base and the reflector assembly and is configured to achieve radially flexible sealing between the reflector assembly and the base.

7. The reflector fine-adjustment device according to claim 6, characterized in that: The reflector assembly comprises: The reflector comprises a working mirror surface and a first cooling pipeline, wherein the first cooling pipeline is arranged on the back side of the working mirror surface and is configured to cool the working mirror surface.

8. The reflector fine-adjustment device according to claim 7, characterized in that: The reflector assembly also includes: A mounting seat cooperates with the mounting assembly to connect the reflector to the base, Wherein, a peripheral side wall connecting the mounting seat and the base is provided with a mounting groove, and the first sealing ring is interference-fitted with the mounting groove.

9. The reflector fine-adjustment device according to claim 7, characterized in that: In the axial direction of the reflector, the projection of the first cooling pipeline coincides with the projection of the reflector.

10. The reflector fine-adjustment device according to claim 8, characterized in that: The mounting base comprises: A second cooling pipeline is disposed inside the mounting base and is independent of the first cooling pipeline, and is configured to reduce the temperature of the reflector.

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