Drive unit and drive device

Abstract

The invention discloses a driving unit and a driving device, and relates to the technical field of intelligent drivers, the driving unit comprises a plurality of electrostatic diaphragms, the plurality of electrostatic diaphragms are oppositely arranged in a first direction, and can be elastically and movably arranged in the first direction; the plurality of electrostatic diaphragms comprise first electrostatic diaphragms and second electrostatic diaphragms which are alternately arranged in a first direction in an insulating manner; wherein one of the first electrostatic diaphragm and the second electrostatic diaphragm is used for being connected with a positive electrode of a power supply, and the other is connected with a negative electrode of the power supply. According to the technical scheme, the driving unit is low in cost, high in response speed and easy to regulate and control.

Description

Technical Field

[0001] The present invention relates to the technical field of intelligent drivers, and in particular to a driving unit and a driving device. Background Art

[0002] With the continuous advancement of science and technology, intelligent drives are increasingly used in high-end equipment. Although traditional drives such as piezoelectric, shape memory alloy, and magnetostrictive material drives have excellent performance in some aspects, they also have some inherent defects. For example, although piezoelectric drives have fast response and high precision, their drive displacement is small, they are sensitive to external vibrations, and are difficult to adjust. Shape memory alloy drives have strong driving force, but slow recovery speed, are difficult to control, and have high costs. Although magnetostrictive material actuators have fast response and high precision, they are expensive and susceptible to external interference. Summary of the invention

[0003] The main purpose of the present invention is to provide a driving unit and a driving device, aiming to provide a driving unit with low cost, fast response speed and easy control.

[0004] To achieve the above object, the present invention provides a driving unit, comprising a plurality of electrostatic diaphragms, the plurality of electrostatic diaphragms are arranged relatively to each other in a first direction and can be elastically movable in the first direction, the plurality of electrostatic diaphragms include a first electrostatic diaphragm and a second electrostatic diaphragm which are alternately and insulatedly arranged in the first direction;

[0005] Wherein, one of the first electrostatic diaphragm and the second electrostatic diaphragm is used to connect to the positive electrode of the power supply, and the other is connected to the negative electrode of the power supply.

[0006] In one embodiment, the first electrostatic diaphragms are provided in plurality, and the plurality of the first electrostatic diaphragms are elastically connected at the side ends, so that the plurality of the first electrostatic diaphragms are elastically telescopically provided in the first direction;

[0007] The second electrostatic diaphragms are provided in plurality, and the plurality of second electrostatic diaphragms are elastically connected at side ends, so that the plurality of second electrostatic diaphragms are elastically telescopically arranged in the first direction.

[0008] In one embodiment, the plurality of first electrostatic diaphragms are electrically connected in sequence; and / or,

[0009] The plurality of second electrostatic diaphragms are electrically connected in sequence.

[0010] In one embodiment, each of the first electrostatic diaphragms is integrally formed; and / or,

[0011] The plurality of second electrostatic diaphragms are integrally formed.

[0012] In one embodiment, the driving unit includes at least two electrostatic strips, the at least two electrostatic strips include a first electrostatic strip and a second electrostatic strip, the first electrostatic strip and the second electrostatic strip are alternately interwoven in a first direction to form a plurality of first electrostatic diaphragms and a plurality of second electrostatic diaphragms respectively;

[0013] Wherein, one of the first electrostatic strip and the second electrostatic strip is used to connect to the positive pole of the power supply, and the other is connected to the negative pole of the power supply.

[0014] In one embodiment, the electrostatic strip includes two insulating film layers disposed opposite to each other and a conductive layer disposed between the two insulating film layers, wherein the conductive layer is used to be connected to an electrode of a power source.

[0015] In one embodiment, the electrostatic diaphragm includes a carrier sheet and a conductive portion arranged on the carrier sheet, the carrier sheet of the multiple electrostatic diaphragms has a first area and a second area relative to each other in a second direction, and the conductive portion is arranged in the first area so that when the multiple electrostatic diaphragms are energized, the positions corresponding to the first areas can expand and contract.

[0016] The present invention also provides a driving device, comprising:

[0017] Base;

[0018] At least one driving unit, the driving unit is arranged on the base, the driving unit includes a plurality of electrostatic diaphragms, the plurality of electrostatic diaphragms are arranged opposite to each other in a first direction, and can be elastically movable in the first direction, and the plurality of electrostatic diaphragms include a first electrostatic diaphragm and a second electrostatic diaphragm which are alternately and insulatedly arranged in the first direction;

[0019] Wherein, one of the first electrostatic diaphragm and the second electrostatic diaphragm is used to connect to the positive electrode of the power supply, and the other is connected to the negative electrode of the power supply.

[0020] In one embodiment, the driving units are provided in at least two configurations;

[0021] The two driving units are stacked in the first direction; and / or,

[0022] The two driving units are spaced apart in a second direction, wherein the second direction intersects with the first direction.

[0023] In one embodiment, the driving device further comprises a spring and a fixing seat, one end of the spring is connected to an end of the driving unit away from the base, and the other end of the spring is connected to the fixing seat.

[0024] In the technical solution of the present invention, the driving unit includes a plurality of electrostatic diaphragms, which are relatively arranged in a first direction and can be elastically arranged in the first direction. The plurality of electrostatic diaphragms include a first electrostatic diaphragm and a second electrostatic diaphragm which are alternately and insulated in the first direction, wherein one of the first electrostatic diaphragm and the second electrostatic diaphragm is used to connect the positive pole of the power supply, and the other is connected to the negative pole of the power supply; in this way, when the first electrostatic diaphragm and the second electrostatic diaphragm are energized, an electrostatic field will be generated to cause each of the first electrostatic diaphragms and the second electrostatic diaphragms to contract, and the plurality of electrostatic diaphragms are elastic as a whole, can quickly recover and release after power failure, have a fast response speed, and the cost of the electrostatic diaphragm itself is low, and by changing the voltage, the adsorption force generated by the driving unit can be accurately controlled, and the controllability is good; with such a configuration, the driving unit can be low in cost, fast in response speed, and easy to regulate. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying creative work.

[0026] Figure 1 A schematic structural diagram of an embodiment of a driving unit provided by the present invention;

[0027] Figure 2 for Figure 1 Schematic diagram of the structure of the electrostatic strip of the middle drive unit;

[0028] Figure 3 for Figure 1 Schematic diagram of the weaving of the electrostatic strips;

[0029] Figure 4 A schematic structural diagram of another embodiment of a drive unit provided by the present invention;

[0030] Figure 5 for Figure 4 Schematic diagram of the structure of the electrostatic strip of the middle drive unit;

[0031] Figure 6 A schematic structural diagram of an embodiment of a driving device provided by the present invention;

[0032] Figure 7 A schematic structural diagram of another embodiment of the driving device provided by the present invention;

[0033] Figure 8 A schematic structural diagram of another embodiment of the driving device provided by the present invention;

[0034] Fig. 9 A schematic structural diagram of another embodiment of the driving device provided by the present invention.

[0035] Description of Figure Numbers:

[0036] 1000, driving device; 100, driving unit; 1, electrostatic diaphragm; 11, first electrostatic diaphragm; 12, second electrostatic diaphragm; 101, electrostatic strip; 1011, insulating film layer; 1012, conductive layer; 102, carrier sheet; 1021, first area; 1022, second area; 103, conductive part; 2, base; 3, spring; 4, fixing seat.

[0037] The realization of the purpose, functional features and advantages of the present invention will be further explained in conjunction with embodiments and with reference to the accompanying drawings. DETAILED DESCRIPTION

[0038] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0039] It should be noted that if the embodiments of the present invention involve directional indications (such as up, down, left, right, front, back, etc.), the directional indications are only used to explain the relative position relationship, movement status, etc. between the components in a certain specific posture. If the specific posture changes, the directional indication will also change accordingly.

[0040] In addition, if there are descriptions involving "first", "second", etc. in the embodiments of the present invention, the descriptions of "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of technical features indicated. Therefore, the features limited to "first" and "second" may explicitly or implicitly include at least one of the features. In addition, if "and / or" or "and / or" appears in the full text, its meaning includes three parallel solutions. Taking "A and / or B" as an example, it includes solution A, solution B, or solutions that satisfy both A and B. In addition, the technical solutions between the various embodiments can be combined with each other, but it must be based on the ability of ordinary technicians in this field to implement. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such combination of technical solutions does not exist and is not within the scope of protection required by the present invention.

[0041] With the continuous advancement of science and technology, intelligent drives are increasingly used in high-end equipment. Although traditional drives such as piezoelectric, shape memory alloy, and magnetostrictive material drives have excellent performance in some aspects, they also have some inherent defects. For example, although piezoelectric drives have fast response and high precision, their drive displacement is small, they are sensitive to external vibrations, and are difficult to adjust. Shape memory alloy drives have strong driving force, but slow recovery speed, are difficult to control, and have high costs. Although magnetostrictive material actuators have fast response and high precision, they are expensive and susceptible to external interference.

[0042] The main purpose of the present invention is to provide a driving unit and a driving device, aiming to provide a driving unit with low cost, fast response speed and easy control.

[0043] See also Figure 1 , Figure 2 and Figure 3 In one embodiment of the present invention, the driving unit 100 includes a plurality of electrostatic diaphragms 1, which are relatively arranged in a first direction and can be elastically arranged in the first direction. The plurality of electrostatic diaphragms 1 include a first electrostatic diaphragm 11 and a second electrostatic diaphragm 12 which are alternately and insulated in the first direction; wherein one of the first electrostatic diaphragm 11 and the second electrostatic diaphragm 12 is used to connect the positive pole of the power supply, and the other is connected to the negative pole of the power supply.

[0044] In the technical solution of the present invention, the driving unit 100 includes a plurality of electrostatic diaphragms 1, which are relatively arranged in a first direction and can be elastically arranged in the first direction. The plurality of electrostatic diaphragms 1 include a first electrostatic diaphragm 11 and a second electrostatic diaphragm 12 which are alternately and insulated in the first direction, wherein one of the first electrostatic diaphragm 11 and the second electrostatic diaphragm 12 is used to connect the positive pole of the power supply, and the other is connected to the negative pole of the power supply; in this way, when the first electrostatic diaphragm 11 and the second electrostatic diaphragm 12 are energized, an electrostatic field will be generated to cause the first electrostatic diaphragm 11 and the second electrostatic diaphragm 12 to contract, and the plurality of electrostatic diaphragms 1 are elastic as a whole, can quickly recover and release after power failure, have a fast response speed, and the cost of the electrostatic diaphragm 1 itself is low, and by changing the voltage, the adsorption force generated by the driving unit 100 can be accurately controlled, and the controllability is good; with such a configuration, the driving unit 100 has low cost, fast response speed, and is easy to control.

[0045] In order to enable the multiple electrostatic diaphragms 1 to be able to move elastically in the first direction, in an embodiment of the present invention, the first electrostatic diaphragm 11 is set to be multiple, and the multiple first electrostatic diaphragms 11 are elastically connected at the side end position, so that the multiple first electrostatic diaphragms 11 are elastically telescopically set in the first direction; the second electrostatic diaphragm 12 is set to be multiple, and the multiple second electrostatic diaphragms 12 are elastically connected at the side end position, so that the multiple second electrostatic diaphragms 12 are elastically telescopically set in the first direction. In this way, the first electrostatic diaphragm 11 is set to be multiple, the second electrostatic diaphragm 12 is also set to be multiple, and the multiple first electrostatic diaphragms 11 and the multiple second electrostatic diaphragms 12 are elastically connected respectively, so that the multiple electrostatic diaphragms 1 can be elastically set, and the position of the elastic connection is located at the side end, which can make the elasticity and telescopic performance of the multiple electrostatic diaphragms 1 better. In another embodiment, the adjacent first electrostatic diaphragms 11 and the second electrostatic diaphragms 12 can also be elastically connected to achieve the elastic connection of the multiple electrostatic diaphragms 1.

[0046] Each of the first electrostatic diaphragms 11 can be connected to the positive or negative pole of the power supply separately, as long as the adjacent first electrostatic diaphragms 11 and the second electrostatic diaphragms 12 are connected to the positive and negative poles of the power supply respectively, so as to realize electrostatic adsorption through the electrostatic field. However, when the number of the first electrostatic diaphragms 11 is large, the individual connection requires more power supplies and more connecting wires, which is more troublesome to use. Therefore, in the embodiment of the present invention, the multiple first electrostatic diaphragms 11 are electrically connected in sequence; in this way, the multiple first electrostatic diaphragms 11 are electrically connected in sequence, and the multiple electrostatic diaphragms 1 can be charged by only connecting one of the first electrostatic diaphragms 11 to the electrode of the power supply.

[0047] Similarly, each second electrostatic diaphragm 12 can be connected to the positive or negative pole of the power supply separately, as long as the adjacent second electrostatic diaphragms 12 and the first electrostatic diaphragms 11 are connected to the positive and negative poles of the power supply respectively, so as to achieve electrostatic adsorption through the electrostatic field. However, when the number of the second electrostatic diaphragms 12 is large, the separate connection requires more power supplies and more connecting wires, which is more troublesome to use. Therefore, in the embodiment of the present invention, the plurality of second electrostatic diaphragms 12 are electrically connected in sequence; in this way, the plurality of second electrostatic diaphragms 12 are electrically connected in sequence, and the plurality of electrostatic diaphragms 1 can be charged by only connecting one of the second electrostatic diaphragms 12 to the electrode of the power supply.

[0048] The two means of electrically connecting the multiple first electrostatic diaphragms 11 in sequence and electrically connecting the multiple second electrostatic diaphragms 12 in sequence may exist separately or together; preferably, the multiple first electrostatic diaphragms 11 are electrically connected in sequence while the multiple second electrostatic diaphragms 12 are electrically connected in sequence, so that it will be more convenient to connect the power supply and easier to use and regulate.

[0049] The multiple first electrostatic diaphragms 11 can be individually molded or integrally molded. However, when the individually molded mode is adopted, when the number of the first electrostatic diaphragms 11 is large, elastic connectors are required to connect each of the first electrostatic diaphragms 11 individually, which is more troublesome to produce. Of course, when the individually molded setting is used, when the drive unit 100 is actually formed, the number of the first electrostatic diaphragms 11 can be more conveniently changed, thereby changing the size of the drive unit 100 to adapt to different working environments. In one embodiment of the present application, the multiple first electrostatic diaphragms 11 are integrally molded, such as injection molding. As for the elastic connection of the multiple first electrostatic diaphragms 11, the first electrostatic diaphragm 11 itself can be made of elastic material, or when the first electrostatic diaphragm 11 itself does not have elasticity, double injection molding is used for molding, which is more convenient.

[0050] Similarly, the multiple second electrostatic diaphragms 12 can be individually molded or integrally molded. However, when the individually molded mode is adopted, when the number of the second electrostatic diaphragms 12 is large, elastic connectors are required to connect each of the second electrostatic diaphragms 12 individually, which is more troublesome to produce. Of course, when the individually molded setting is used, when the drive unit 100 is actually formed, the number of the second electrostatic diaphragms 12 can be more conveniently changed, thereby changing the size of the drive unit 100 to adapt it to different working environments. In one embodiment of the present application, the multiple second electrostatic diaphragms 12 are integrally molded, such as injection molding. As for the elastic connection of the multiple second electrostatic diaphragms 12, the second electrostatic diaphragm 12 itself can be made of elastic material, or when the second electrostatic diaphragm 12 itself does not have elasticity, double injection molding is used for molding, which is more convenient.

[0051] Specifically, in the embodiments of the present invention, please refer to Figure 2 and Figure 3The driving unit 100 includes at least two electrostatic strips 101, and the at least two electrostatic strips 101 include a first electrostatic strip 101 and a second electrostatic strip 101. The first electrostatic strips 101 and the second electrostatic strips 101 are alternately interwoven in a first direction to form a plurality of first electrostatic diaphragms 11 and a plurality of second electrostatic diaphragms 12 correspondingly; wherein one of the first electrostatic strip 101 and the second electrostatic strip 101 is used to connect the positive pole of the power supply, and the other is connected to the negative pole of the power supply. With such an arrangement, the driving unit 100 can realize the sequential electrical connection of the multiple first electrostatic diaphragms 11 and the sequential electrical connection of the multiple second electrostatic diaphragms 12 through the alternating interweaving of the first electrostatic strips 101 and the second electrostatic strips 101, and can also realize the integrated molding arrangement of the multiple first electrostatic diaphragms 11 and the integrated molding arrangement of the multiple second electrostatic diaphragms 12, which is convenient for molding and use; and the size, length, and shape of the driving unit 100 can be changed by changing the length and width of the electrostatic strips 101, which has higher design flexibility and makes it adaptable to different application scenarios.

[0052] Of course, the number of the electrostatic strips 101 required for forming the driving unit 100 is not limited to two, and may be three, four or more.

[0053] In an embodiment of the present invention, the electrostatic strip 101 includes two insulating film layers 1011 arranged opposite to each other and a conductive layer 1012 arranged between the two insulating film layers 1011, and the conductive layer 1012 is used to connect to the electrode of the power supply. In this way, after the electrostatic strips 101 are alternately interwoven to form the driving unit 100, the conductive layer 1012 is connected to the power supply to achieve the connection between the electrostatic film and the power supply, and the two conductive layers 1012 respectively connected to the positive and negative electrodes of the power supply are separated by the insulating film layer 1011 to avoid short circuit. In another embodiment, the electrostatic strip 101 can also be three layers of insulating film layers 1011 with two layers of conductive layers 1012 that are not connected to each other, and the two conductive layers 1012 of one electrostatic strip 101 are respectively connected to the positive or negative electrode of the power supply.

[0054] The present design does not limit the specific material of the insulating film layer 1011 , for example, it can be a polyimide film, a TPE film, a polyethylene film, etc., as long as it has insulating properties.

[0055] The present design does not limit the specific material of the conductive layer 1012, and it can be made of conductive electrodes such as carbon, copper, silver, and gold.

[0056] After the electrostatic diaphragm 1 is energized, the multiple electrostatic diaphragms 1 may be partially contracted, fully extended, or partially extended. Figure 1 and Figure 2 As shown; when partially extended, Figure 4 and Figure 5 As shown, the electrostatic diaphragm 1 includes a carrier sheet 102 and a conductive portion 103 arranged on the carrier sheet 102, the carrier sheet 102 of the multiple electrostatic diaphragms 1 has a first area 1021 and a second area 1022 relative to each other in the second direction, the conductive portion 103 is arranged in the first area 1021, so that the multiple electrostatic diaphragms 1 can expand and contract at positions corresponding to the first area 1021 when power is turned on; in this way, the carrier sheet 102 of the electrostatic diaphragm 1 is divided into a first area 1021 and a second area 1022, and the conductive portion 103 is only arranged in the first area 1021 or the second area 1022. After power is turned on, only the first area 1021 or the second area 1022 can be expanded and contracted. With this arrangement, the entire drive unit 100 can be bent and expanded, and has a wider range of uses.

[0057] Specifically, when the driving unit 100 is formed by alternately interweaving two or more electrostatic strips 101, the carrier sheet 102 is the insulating film layer 1011 of the electrostatic strips 101, and the conductive portion 103 is the conductive layer 1012. When all the electrostatic strips 101 need to be stretched, Figure 2 As shown, the conductive layer 1012 can be spread completely between the two insulating film layers 1011. When partial expansion and contraction is required, as shown in FIG. Figure 5 As shown, the conductive layer 1012 is partially disposed between the two insulating film layers 1011 .

[0058] The present invention further provides a driving device 1000, which includes a base 2 and at least one driving unit 100. The specific structure of the driving unit 100 is referred to the above embodiment. Since the driving device 1000 adopts all the technical solutions of all the above embodiments, it at least has all the beneficial effects brought by the technical solutions of the above embodiments, which will not be described one by one here. The driving unit 100 is arranged on the base 2.

[0059] In the technical solution of the present invention, the driving device 1000 includes a base 2 and at least one driving unit 100, the driving unit 100 includes a plurality of electrostatic diaphragms 1, the plurality of electrostatic diaphragms 1 are arranged relatively to each other in a first direction, and can be elastically movable in the first direction, the plurality of electrostatic diaphragms 1 include a first electrostatic diaphragm 11 and a second electrostatic diaphragm 12 which are alternately and insulated in the first direction, wherein one of the first electrostatic diaphragm 11 and the second electrostatic diaphragm 12 is used to connect the positive pole of the power supply, and the other is connected to the negative pole of the power supply; in this way, when the first electrostatic diaphragm 11 and the second electrostatic diaphragm 12 are connected to each other, the first electrostatic diaphragm 11 and the second electrostatic diaphragm 12 are connected to the positive pole of the power supply, and the other is connected to the negative pole of the power supply; in this way, when the first electrostatic diaphragm 11 and the second electrostatic diaphragm 12 are connected to each other, the first electrostatic diaphragm 11 and the second electrostatic diaphragm 12 are connected to the positive pole of the power supply, and the second electrostatic diaphragm 12 ... positive pole of the power supply; in this way, when the first electrostatic diaphragm 11 and the second electrostatic diaphragm 12 are connected to each other, the first electrostatic When the second electrostatic diaphragm 12 is energized, an electrostatic field is generated to cause the first electrostatic diaphragms 11 and the second electrostatic diaphragms 12 to contract, thereby driving the driven parts to move. The multiple electrostatic diaphragms 1 are elastic as a whole and can quickly recover and release after power failure. The response speed is fast, and the cost of the electrostatic diaphragm 1 itself is low. By changing the voltage, the adsorption force generated by the drive unit 100 can be accurately controlled, and the controllability is good. At the same time, the drive unit 100 can be set in multiples according to needs. With this setting, the drive device 1000 has low cost, fast response speed, easy regulation, and combinability.

[0060] When the driving device 1000 has at least two driving units 100, the two driving units 100 can be connected in series. Figure 7 As shown, the two drive units 100 are stacked in the first direction, and the sizes of the two drive units 100 may be different. The two drive units 100 may also be connected in parallel, such as Figure 8 As shown, two driving units 100 are spaced apart in the second direction, wherein the second direction intersects the first direction. When connected in parallel, in addition to enabling the driven member to move along the first direction, the angle of the driven member can also be driven to be adjusted. Of course, when the number of the driving units 100 is greater, they can also coexist in series and in parallel, which has a wide range of applications.

[0061] In one embodiment, if Fig. 9 As shown, the driving device 1000 further includes a spring 3 and a fixing seat 4, one end of the spring 3 is connected to the end of the driving unit 100 away from the base 2, and the other end is connected to the fixing seat 4. In this way, an antagonistic driver can be formed, and when the driving unit 100 is powered on and then powered off, the elastic force of the spring 3 can drive the driven member to achieve reciprocating motion.

[0062] The above description is only an exemplary embodiment of the present invention, and does not limit the patent scope of the present invention. All equivalent structural changes made by using the contents of the present invention specification and drawings under the technical concept of the present invention, or directly / indirectly applied in other related technical fields are included in the patent protection scope of the present invention.

Claims

1. A drive unit, characterized in that: The invention comprises a plurality of electrostatic diaphragms, wherein the plurality of electrostatic diaphragms are arranged opposite to each other in a first direction and can be elastically movable in the first direction, and the plurality of electrostatic diaphragms include a first electrostatic diaphragm and a second electrostatic diaphragm which are alternately and insulatedly arranged in the first direction; Wherein, one of the first electrostatic diaphragm and the second electrostatic diaphragm is used to connect to the positive electrode of the power supply, and the other is connected to the negative electrode of the power supply.

2. The drive unit according to claim 1, characterized in that The first electrostatic diaphragms are provided in plurality, and the plurality of the first electrostatic diaphragms are elastically connected at the side ends, so that the plurality of the first electrostatic diaphragms are elastically telescopically arranged in the first direction; The second electrostatic diaphragms are provided in plurality, and the plurality of second electrostatic diaphragms are elastically connected at side ends, so that the plurality of second electrostatic diaphragms are elastically telescopically arranged in the first direction.

3. The drive unit according to claim 2, characterized in that: The plurality of first electrostatic diaphragms are electrically connected in sequence; and / or, The plurality of second electrostatic diaphragms are electrically connected in sequence.

4. The drive unit according to claim 2, characterized in that: The plurality of first electrostatic diaphragms are integrally formed; and / or, The plurality of second electrostatic diaphragms are integrally formed.

5. The drive unit according to claim 3 or 4, characterized in that: The driving unit includes at least two electrostatic strips, the at least two electrostatic strips include a first electrostatic strip and a second electrostatic strip, the first electrostatic strip and the second electrostatic strip are alternately interwoven in a first direction to form a plurality of the first electrostatic diaphragms and a plurality of the second electrostatic diaphragms correspondingly; Wherein, one of the first electrostatic strip and the second electrostatic strip is used to connect to the positive pole of the power supply, and the other is connected to the negative pole of the power supply.

6. The drive unit according to claim 5, characterized in that The electrostatic strip comprises two insulating film layers arranged opposite to each other and a conductive layer arranged between the two insulating film layers, wherein the conductive layer is used to be connected to an electrode of a power source.

7. The drive unit according to claim 1, characterized in that: The electrostatic diaphragm includes a carrier sheet and a conductive portion arranged on the carrier sheet. The carrier sheet of the multiple electrostatic diaphragms has a first area and a second area opposite to each other in a second direction. The conductive portion is arranged in the first area so that the multiple electrostatic diaphragms can expand and contract at positions corresponding to the first area when power is supplied.

8. A driving device, characterized in that: include: Base; At least one driving unit, wherein the driving unit is arranged on the base, and the driving unit is the driving unit according to any one of claims 1 to 7.

9. The driving device according to claim 8, characterized in that The driving units are provided with at least two; The two driving units are stacked in the first direction; and / or, The two driving units are spaced apart in a second direction, wherein the second direction intersects with the first direction.

10. The driving device according to claim 8, characterized in that The driving device further comprises a spring and a fixing seat, one end of the spring is connected to an end of the driving unit away from the base, and the other end of the spring is connected to the fixing seat.

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