Beam regulation and control structure and device and electronic equipment

Abstract

The invention provides a beam regulation and control structure and device and electronic equipment, and belongs to the technical field of optical waveguide integration. The beam regulation and control structure disclosed by the invention comprises a waveguide layer and a grating layer arranged on the waveguide layer, the grating layer comprises a plurality of functional structures and connecting parts arranged among the functional structures; the functional structure is provided with a slit opening penetrating in the thickness direction of the functional structure; wherein the wave beam regulation and control structure further comprises a plurality of regulation and control units, and one side, deviating from the waveguide layer, of one functional structure is provided with one regulation and control unit; the regulation and control unit comprises a first regulation and control assembly and a second regulation and control assembly which are sequentially arranged in the direction away from the functional structure. The first regulation and control assembly is configured to transmit or scatter electromagnetic waves fed in by the waveguide layer through the slit opening; the second regulation and control assembly is configured to adjust the phase of the electromagnetic waves transmitted by the first regulation and control assembly.

Description

Beam control structures and devices, electronic equipment Technical Field

[0001] The present disclosure belongs to the field of optical waveguide integration technology, and particularly relates to a beam steering structure and device, and electronic equipment. Background Art

[0002] The holographic principle is that the target wave and the reference wave interfere to form an interference surface. The reference wave is then illuminated by the interference surface to invert the target wave. The advent of metamaterials has made it possible to realize holographic antennas in the microwave band. A holographic antenna system consists solely of a holographic surface and a feed source, resulting in a very simple structure. The feed source is typically a horn antenna, monopole antenna, or slot antenna, eliminating the need for a complex feed network. However, to reduce the profile, monopole or slot antennas are often used as feed sources. The holographic surface primarily consists of a dielectric substrate and a periodically distributed array of metal patches, making it easy to fabricate and inexpensive. The design process for the holographic surface is straightforward: simply calculate the interference field expression formed by the interference of the target and reference fields and design the metal patch distribution based on this interference field expression to obtain the desired holographic surface. If a different target wave is obtained, simply resubstitute the target field expression into the above process. This simplicity and flexibility in design are another major advantage of holographic antennas. Furthermore, holographic antennas are easily conformal, meaning they can be attached to curved surfaces such as spheres and cylinders without significantly affecting their performance.

[0003] Waveguide-fed metasurface antennas and apertures have garnered considerable attention in various fields, including computational imaging, communications, radar and synthetic aperture radar imaging, and wireless power transfer. Energy is fed through a waveguide array of metamaterial elements distributed on a surface, each element being significantly smaller than the operating wavelength. Each subwavelength metamaterial element scatters the incident field, which is primarily equivalent to a polarized electric or magnetic dipole, while introducing a phase shift and energy attenuation into the excitation field. The amount of phase shift and attenuation of the incident wave injected by scattering depends on the structure of the metamaterial element. The phase and amplitude variations are not independent but rather correlated, and the relationship is related to the inherent characteristics of Lorentz resonance. Metasurface antennas can be excited by tilted incident plane waves or guided wave feeding. The lack of independent control over phase and amplitude is compensated by phase focusing of the incident wave—similar to the operating mechanisms of leaky-wave and transmitted-wave antennas. When the spacing between metamaterial elements is deep subwavelength, the incident wave can be sampled by simple on / off switches to transmit and block energy. For such extreme, subwavelength sampling, high-fidelity beamforming and other radiation patterns can be achieved using numerical optimization techniques.

[0004] Summary of the Invention

[0005] The present invention aims to solve at least one of the technical problems existing in the prior art and provide a beam steering structure and device, and an electronic device.

[0006] In a first aspect, an embodiment of the present disclosure provides a beam steering structure comprising a waveguide layer, a grating layer disposed on the waveguide layer; the grating layer comprising a plurality of functional structures, and a connection portion disposed between the functional structures; the functional structures having a slit opening extending through the functional structures along their thickness direction; wherein,

[0007] The beam steering structure further includes a plurality of steering units, one of which is provided on a side of the functional structure away from the waveguide layer; the steering unit includes a first steering component and a second steering component sequentially provided in a direction away from the functional structure;

[0008] The first regulating component is configured to transmit or scatter the electromagnetic wave fed into the waveguide layer through the slit opening;

[0009] The second regulating component is configured to adjust the phase of the electromagnetic wave transmitted by the first regulating component.

[0010] Among them, the first regulating component includes a first electrode and a second electrode arranged opposite to each other, and a first adjustable dielectric layer located between the first electrode and the second electrode; the first adjustable dielectric layer is configured to transmit or scatter the electromagnetic waves fed into the slit opening according to the voltage loaded by the first electrode and the second electrode.

[0011] Wherein, the first tunable dielectric layer includes polymer network stabilized liquid crystal.

[0012] The functional structure is used as a first electrode of a first regulating component arranged thereon.

[0013] The second regulating component includes a third electrode and a fourth electrode arranged opposite to each other, and a second adjustable dielectric layer located between the third electrode and the fourth electrode; the second adjustable dielectric layer is configured to adjust the phase of the electromagnetic wave transmitted by the first regulating component according to the voltage loaded by the third electrode and the fourth electrode.

[0014] The second electrode of the first regulating component is reused as the third electrode of the second regulating component located thereon.

[0015] The first electrode is electrically connected to a first driver via a first bias voltage line, the second electrode is electrically connected to a second driver via a second bias voltage line, and the fourth electrode is electrically connected to a third driver via a third bias voltage line.

[0016] Wherein, the material of the second tunable dielectric includes liquid crystal molecules.

[0017] in,

[0018] Wherein, the functional structure and the connecting portion are an integrally formed structure.

[0019] Wherein, the material of the grating layer is selected from any one of silver, aluminum, copper and gold.

[0020] Wherein, the waveguide layer is a silicon-based waveguide.

[0021] In a second aspect, an embodiment of the present disclosure provides a beam steering device, which includes multiple beam steering structures, and the beam steering structure is any one of the beam steering structures described above.

[0022] The functional structures in each beam steering structure are arranged side by side along a first direction; and a plurality of beam steering structures are arranged side by side along a second direction.

[0023] In which, the beam control device also includes switching transistors arranged in a one-to-one correspondence with the control units; wherein, the second pole of each of the switching transistors is electrically connected to the first control component; the gates of the switching transistors arranged side by side along the first direction are electrically connected to the same scan line, and the first poles of the switching transistors arranged side by side along the second direction are connected to the same data line.

[0024] In a third aspect, an embodiment of the present disclosure provides an electronic device, which includes any of the above-mentioned beam steering structures or any of the above-mentioned beam steering devices. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] FIG1 is a schematic diagram of a beam steering structure according to an embodiment of the present disclosure.

[0026] FIG2 is a partially enlarged view of the beam steering structure of an embodiment of the present disclosure.

[0027] FIG3 is a top view of the grating layer of the beam steering structure according to an embodiment of the present disclosure.

[0028] FIG4 is a schematic diagram of a transmitted electromagnetic wave of a beam steering structure according to an embodiment of the present disclosure.

[0029] FIG5 is a schematic diagram of scattered electromagnetic waves of the beam steering structure according to an embodiment of the present disclosure.

[0030] FIG6 is a diagram showing the result of reconfigurable beam pointing of forward incident electromagnetic waves of the beam steering structure according to an embodiment of the present disclosure.

[0031] FIG7 is a diagram showing the result of reconfigurable beam pointing of reverse incident electromagnetic waves in the beam steering structure according to an embodiment of the present disclosure.

[0032] FIG8 is a schematic diagram of the connection of the beam steering structure according to an embodiment of the present disclosure.

[0033] FIG9 is a schematic diagram of a beam steering device according to an embodiment of the present disclosure.

[0034] FIG10 is another schematic diagram of the beam steering device according to an embodiment of the present disclosure. DETAILED DESCRIPTION

[0035] In order to enable those skilled in the art to better understand the technical solution of the present invention, the present invention is further described in detail below with reference to the accompanying drawings and specific implementation methods.

[0036] Unless otherwise defined, the technical or scientific terms used in this disclosure should have the usual meanings understood by people with ordinary skills in the field to which this disclosure belongs. The words "first", "second" and similar words used in this disclosure do not indicate any order, quantity or importance, but are only used to distinguish different components. Similarly, words such as "one", "an" or "the" do not indicate a quantity limitation, but rather indicate the existence of at least one. Words such as "include" or "comprise" mean that the elements or objects appearing before the word include the elements or objects listed after the word and their equivalents, without excluding other elements or objects. Words such as "connect" or "connected" are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "Up", "down", "left", "right" and the like are only used to indicate relative positional relationships. When the absolute position of the object being described changes, the relative positional relationship may also change accordingly.

[0037] Before describing the embodiments of the present disclosure, it should be noted that the embodiments of the present disclosure are described by taking the functional structure as an example of a super-structure unit.

[0038] In a first aspect, FIG1 is a schematic diagram of a beam steering structure according to an embodiment of the present disclosure; FIG2 is a partially enlarged view of a beam steering structure according to an embodiment of the present disclosure; and FIG3 is a top view of a grating layer according to an embodiment of the present disclosure. As shown in FIG1-32 , an embodiment of the present disclosure provides a beam steering structure comprising a waveguide layer 1, a grating layer 2, and a plurality of steering units 3. The grating layer 2 is disposed on the waveguide layer 1 and comprises a plurality of superstructure units 21 and connecting portions 22 disposed between the superstructure units 21. The superstructure units 21 have slit openings 201 extending through their thickness. Each superstructure unit 21 is provided with a steering unit 3 on a side facing away from the waveguide layer 1. In this embodiment, a one-to-one correspondence between superstructure units 21 and steering units 3 is employed as an example. Each steering unit 3 according to this embodiment comprises a first steering component 31 and a second steering component 32 disposed sequentially in a direction away from the superstructure unit 21. The first steering component 31 is configured to transmit or scatter electromagnetic waves fed into the waveguide layer 1 through the slit openings 201. That is, the first regulating component 31 has at least two operating states: a transmission state, in which electromagnetic waves are emitted in the direction of the second regulating component 32, and a scattering state, in which electromagnetic waves are scattered in the direction of the waveguide layer 1. The second regulating component 32 is configured to adjust the phase of the electromagnetic waves transmitted by the first regulating component 31.

[0039] The beam steering structure in the disclosed embodiment, by disposing a first steering component 31 on the superstructure unit 21, controls the electromagnetic waves passing through the slot openings of the superstructure unit 21, achieving dynamic switching between the unit's transmission and scattering states, thereby achieving dynamic beam steering of the electromagnetic waves. Furthermore, a second steering component 32 can be used to control the phase of the transmitted electromagnetic wave. Phase control does not affect the amplitude, and this phase can be used to compensate for the beam, further improving beam pointing. It can also be used to generate random phases, thereby reducing sidelobes, ultimately improving radiation performance.

[0040] In some examples, Figure 4 is a schematic diagram of the transmitted electromagnetic waves of the beam steering structure of an embodiment of the present disclosure; Figure 5 is a schematic diagram of the scattered electromagnetic waves of the beam steering structure of an embodiment of the present disclosure; as shown in Figures 4 and 5, the first steering component 31 may include a first electrode 311 and a second electrode 312 arranged opposite to each other, and a first adjustable dielectric layer 313 located between the first electrode 311 and the second electrode 312, and the first adjustable dielectric layer 313 is configured to achieve transmission or scattering of electromagnetic waves fed into the slit opening 201 according to the voltage loaded by the first electrode 311 and the second electrode 312. For example, the first adjustable dielectric layer 313 may be a polymer network stabilized liquid crystal (PSLC). Since the polymer network stabilized liquid crystal molecules have two states, a scattering state and a transparent state, the deflection of the polymer network stabilized liquid crystal molecules can be changed by applying a voltage to the first electrode 311 layer and the second electrode 312 layer. Since the polymer network stabilized liquid crystal molecules contain domains composed of polymers, and the refractive index of the domains is substantially the same as the refractive index of one state of the anisotropic liquid crystal molecules, and differs most from the equivalent refractive index of the liquid crystal molecules perpendicular to the first state, in this case, the polymer domains will divide the liquid crystal molecules into intervals exceeding the micron level. Due to the existence of intervals exceeding the micron level, the scattering characteristics of electromagnetic waves are dramatically enhanced, changing from a completely transparent state to a strongly scattering state. This characteristic can be used to regulate the electromagnetic waves passing through the gap, achieve the effect of dynamic switching of the unit state, and further be used for dynamic beam control of the electromagnetic wave.

[0041] It should be noted that the first electrode 311 of the first control component 31 is closer to the waveguide layer 1 than the second electrode 312. The second electrode 312 can be formed on the first dielectric substrate and then placed opposite the waveguide layer 1 formed with the first electrode 311. Both the first electrode 311 and the second electrode 312 can be plate-shaped electrodes or electrode layers with conductive patterns. The disclosed embodiments do not limit the design of the first electrode 311 and the second electrode 312, as long as they can generate an electric field to adjust the state of the first adjustable dielectric layer 313.

[0042] In some examples, each superstructure unit 21 can be reused as the first electrode 311 of the first control component 31 located thereon. This can omit the provision of one electrode, thereby simplifying the beam steering structure and facilitating a thinner and lighter structure. Furthermore, in the disclosed embodiments, each superstructure unit 21 is used as the first electrode 311 of the first control component 31 located thereon as an example for explanation.

[0043] In some examples, continuing with reference to FIG2 , the second control component 32 includes a third electrode 321 and a fourth electrode 322 disposed opposite each other, and a second tunable dielectric layer 323 located between the third electrode 321 and the fourth electrode 322. The second tunable dielectric layer 323 is configured to adjust the phase of the electromagnetic wave transmitted by the first control component 31 based on the voltage applied to the third electrode 321 and the fourth electrode 322. For example, the second tunable dielectric layer 323 may be a liquid crystal layer. In this case, by applying a voltage to the third electrode 321 and the fourth electrode 322, the deflection of the liquid crystal molecules is altered, thereby changing the phase of the electromagnetic wave passing through the first control component 31. In this case, the phase of the electromagnetic wave can be compensated by the phase of the first control component 31 and the beam, or the phase of all waves passing through the superstructure unit 21 can be randomly set, thereby achieving a high-performance far-field radiation pattern.

[0044] Furthermore, for each dimming unit 3, the third electrode 321 in the second regulating component 32 can be reused with the second electrode 312 in the first regulating component 31 located thereon. In this way, the setting of one electrode can be omitted, thereby making the beam control structure simple and easy to achieve a lightweight and thin structure. In the embodiment of the present disclosure, the reuse of the third electrode 321 in the second regulating component 32 and the second electrode 312 in the first regulating component 31 located thereon is taken as an example.

[0045] It should be noted that the fourth electrode 322 can be disposed on a second dielectric substrate and then positioned opposite the first dielectric substrate formed by the second electrode 312 / third electrode 321. The third electrode 321 and the fourth electrode 322 can be plate-shaped electrodes or electrode layers with conductive patterns. The disclosed embodiments are not limited to the specific design of the third electrode 321 and the fourth electrode 322; any design is acceptable as long as they can generate an electric field when a voltage is applied to change the dielectric constant of the second adjustable dielectric layer.

[0046] In some examples, the superstructure unit 21 and the connecting portion 22 in the disclosed embodiments are integrally formed. Specifically, a conductive film layer is formed on the waveguide layer 1, and then the slit opening 201 is provided to form the grating layer. The grating layer in the disclosed embodiments is made of a metal, specifically silver (Ag), aluminum (Al), copper (Cu), or gold (Au). Of course, the grating layer in the disclosed embodiments is not limited to these materials and can be selected based on specific circumstances.

[0047] In some examples, the second electrode and the fourth electrode in the embodiments of the present disclosure may be made of indium tin oxide (ITO), or any other transparent conductive material.

[0048] In some examples, FIG6 is a diagram showing the reconfigurable beam pointing of a forward incident electromagnetic wave in the beam steering structure of the present disclosure embodiment; FIG7 is a diagram showing the reconfigurable beam pointing of a reverse incident electromagnetic wave in the beam steering structure of the present disclosure embodiment. As shown in FIG6 and FIG7, compared to holographic control, for forward incident electromagnetic waves, directly using the grating period control method cannot achieve a negative electromagnetic scanning effect. Therefore, a negative electromagnetic scanning effect can be achieved by changing the feeding direction of the electromagnetic wave, or by rotating the device 180°. The dynamic change of the direction of the electromagnetic wave coupled from the waveguide layer 1 to the free space is achieved by selecting the number of different superstructure units 21 to be continuously turned on or off.

[0049] In some examples, FIG8 is a schematic diagram of the wiring of the beam steering structure of an embodiment of the present disclosure. As shown in FIG8, the first electrode 311 in the first steering component 31 is electrically connected to the first driver 41 via the first bias voltage line 51, the second electrode 312 is electrically connected to the second driver 42 via the second bias voltage line 52, and the fourth electrode 322 in the second steering component 32 is electrically connected to the third driver 43 via the third bias voltage line 53. In this case, a plurality of drivers are used to provide a corresponding driving voltage to each bias voltage line, thereby achieving scanning control of the beam pointing of the free-space electromagnetic wave fed out.

[0050] In order to make the beam control structure of the embodiment of the present disclosure clearer, the superstructure unit 21 and the connecting part 22 in the grating layer 2 in the beam adjustment structure are taken as an integrated structure; the first control component 31 includes a first electrode 311 and a second electrode 312 arranged opposite to each other, and a first adjustable dielectric layer 313 located between the first electrode 311 and the second electrode 312, wherein each superstructure unit 21 can be reused as the first electrode 311 of the first control component 31 located thereon, and the material of the first adjustable dielectric layer 313 is a polymer network stabilized liquid crystal; the second control component 32 includes a third electrode 321 and a fourth electrode 322 arranged opposite to each other, and a second adjustable dielectric layer 323 located between the third electrode 321 and the fourth electrode 322, the third electrode 321 in the second control component 32 is reused with the second electrode 312 in the first control component 31 located thereon, and the second adjustable dielectric layer 323 can be a liquid crystal layer as an example.

[0051] Different beam directions are designed using the holographic principle. The principle analysis is as follows:

[0052] The above are the target wave and reference wave functions respectively. The interference pattern of the array surface obtained by using the holographic principle is as follows:

[0053] For the one-dimensional periodic superstructure unit 21, based on the above interference function, the wave vector can be obtained as: m =k g -k0sinθ

[0054] Design the periodic subwavelength grating layer 2 as a one-dimensional interference array:

[0055] By designing the subwavelength grating layer 2, Λ can be combined with different numbers of subwavelength superstructure units 21 to achieve periodic reconfiguration, design the forward beam pointing to be reconfigurable, and design m = 1. The above formulas are combined as follows:

[0056] Therefore, by switching different sub-wavelength super unit structures, the beam direction can be dynamically scanned:

[0057] Based on the above sub-wavelength beam control principle, as shown in Figures 1-4, electromagnetic waves are fed through the waveguide layer, and each superstructure unit 21 can only allow electromagnetic waves to couple from the gaps between the metals to the superstructure unit 21 above. The polymer network stabilized liquid crystal in the first control component 31 can control the electromagnetic wave to transmit upward or scatter downward. By applying voltage to the first electrode 311 and the second electrode 312, the refractive index difference between the polymer network stabilized liquid crystal molecule domain and the surrounding polymer network stabilized liquid crystal molecules is changed, and the refractive index difference is obtained to achieve strong scattering of electromagnetic waves. For the electromagnetic wave passing through the first control component 31, by applying voltage to the third electrode 321 and the fourth electrode 322, the deflection of the liquid crystal molecules is changed to achieve the phase change of the electromagnetic wave passing through the first control component 31. At this time, a high-performance radiation far-field pattern can be obtained by phase compensation or random phase setting of all passing superunits. Combined with the following formula:

[0058] When the period of superstructure unit 21 becomes smaller, becomes larger, so the scanning angle will be smaller; if the period of super structure unit 21 becomes larger, As the period becomes smaller, the scanning angle will gradually increase, thereby realizing the scanning of electromagnetic waves by simply changing the period.

[0059] The first tunable dielectric layer 313 in the first control component 31 of the disclosed embodiment can be a polymer network stabilized liquid crystal (PSLC). Because the PNSLC molecules have two states, a scattering state and a transparent state, the deflection of the PNSLC molecules can be altered by applying voltage to the first electrode 311 and the second electrode 312. Since the PNSLC molecules contain domains composed of polymers, the refractive index of these domains is substantially the same as that of the anisotropic liquid crystal molecules in one state, but differs most significantly from the equivalent refractive index of the liquid crystal molecules perpendicular to the first state. In this case, the polymer domains divide the liquid crystal molecules into intervals exceeding the micron scale. The presence of these intervals dramatically enhances the scattering properties of electromagnetic waves, shifting from a completely transparent state to a strongly scattering state. This property can be exploited to control electromagnetic waves passing through the gap, achieving dynamic switching of cell states and, consequently, dynamic beam manipulation of electromagnetic waves. The second tunable dielectric layer 323 in the second control component 32 can be a liquid crystal layer. In this case, by applying voltage to the third electrode 321 and the fourth electrode 322, the deflection of the liquid crystal molecules is changed, thereby achieving a phase change of the electromagnetic wave passing through the first regulating component 31. At this time, a high-performance radiation far-field pattern can be obtained through phase compensation or random phase setting of all passing super units.

[0060] In a second aspect, an embodiment of the present disclosure provides a beam steering device, which includes multiple beam steering structures, and the beam steering structure is any one of the beam steering structures described above.

[0061] In some embodiments, Figure 9 is a schematic diagram of a beam steering device according to an embodiment of the present disclosure. As shown in Figure 9 , the superstructure units 21 in each beam steering structure 100 are arranged side by side along a first direction X; multiple beam steering structures 100 are arranged side by side along a second direction Y. In this case, each waveguide layer 1 can be fed via a power splitter network. In this case, multiple one-dimensional periodic arrays can be controlled to construct a two-dimensional periodic subwavelength grating layer 2, enabling beam steering across the entire space.

[0062] In some examples, FIG10 is another schematic diagram of a beam steering device according to an embodiment of the present disclosure. As shown in FIG10 , the beam steering device further includes switching transistors (TFTs) arranged in a one-to-one correspondence with the steering units 3. The second electrode of each switching transistor (TFT) is electrically connected to the first steering component 31, specifically to the first electrode 311 in the first steering component 31, and thus electrically connected to the superstructure unit 21. The gates of the switching transistors (TFTs) arranged side by side along the first direction (X) are electrically connected to the same scan line (Gate), and the first electrodes of the switching transistors (TFTs) arranged side by side along the second direction (Y) are connected to the same data line (Data). In this case, by providing the switching transistors (TFTs), the two-dimensional periodic array can be more easily controlled, enabling beam steering throughout the entire space.

[0063] In a third aspect, an embodiment of the present disclosure provides an electronic device, which may include the above-mentioned beam steering structure or the above-mentioned beam steering device.

[0064] It will be understood that the above embodiments are merely exemplary embodiments for illustrating the principles of the present invention, and the present invention is not limited thereto. Those skilled in the art will appreciate that various modifications and improvements can be made without departing from the spirit and substance of the present invention, and such modifications and improvements are also considered to be within the scope of protection of the present invention.

Claims

1. A beam steering structure, comprising a waveguide layer, a grating layer arranged on the waveguide layer; the grating layer comprises a plurality of functional structures, and a connecting portion arranged between the functional structures; the functional structure has a slit opening penetrating along the thickness direction thereof; wherein, The beam control structure further comprises a plurality of control units, wherein one control unit is arranged on a side of the functional structure away from the waveguide layer; the control unit comprises a first control component and a second control component which are arranged in sequence along a direction away from the functional structure; The first regulating component is configured to transmit or scatter the electromagnetic wave fed into the waveguide layer through the slit opening; The second regulating component is configured to adjust the phase of the electromagnetic wave transmitted by the first regulating component.

2. The beam steering structure according to claim 1, wherein: The first regulating component includes a first electrode and a second electrode disposed opposite to each other, and a first adjustable dielectric layer located between the first electrode and the second electrode; The first adjustable dielectric layer is configured to transmit or scatter electromagnetic waves fed into the slit opening according to voltages applied to the first electrode and the second electrode.

3. The beam steering structure according to claim 2, wherein: The first tunable dielectric layer includes a polymer network stabilized liquid crystal.

4. The beam steering structure according to claim 2, wherein: The functional structure serves as a first electrode of a first regulating component disposed thereon.

5. The beam steering structure according to claim 2, wherein: The second regulating component includes a third electrode and a fourth electrode disposed opposite to each other, and a second adjustable dielectric layer located between the third electrode and the fourth electrode; The second adjustable dielectric layer is configured to adjust the phase of the electromagnetic wave transmitted by the first regulating component according to the voltage loaded by the third electrode and the fourth electrode.

6. The beam steering structure according to claim 5, wherein: The second electrode of the first regulating component is reused as the third electrode of the second regulating component located thereon.

7. The beam steering structure according to claim 6, wherein: The first electrode is electrically connected to a first driver via a first bias voltage line, the second electrode is electrically connected to a second driver via a second bias voltage line, and the fourth electrode is electrically connected to a third driver via the third bias voltage line.

8. The beam steering structure according to claim 5, wherein: The material of the second tunable dielectric includes liquid crystal molecules.

9. The beam steering structure according to claim 1, wherein: The functional structure and the connecting portion are an integrally formed structure.

10. The beam steering structure according to claim 1, wherein: The material of the grating layer is selected from any one of silver, aluminum, copper and gold.

11. The beam steering structure according to claim 1, wherein: The waveguide layer is a silicon-based waveguide.

12. A beam steering device, comprising a plurality of beam steering structures, wherein the beam steering structure is the beam steering structure according to any one of claims 1 to 11.

13. The beam steering device according to claim 12, wherein: The functional structures in each of the beam steering structures are arranged side by side along a first direction; and a plurality of the beam steering structures are arranged side by side along a second direction.

14. The beam steering device according to claim 13, wherein: It also includes switching transistors arranged one by one in correspondence with the control units; wherein the second pole of each of the switching transistors is electrically connected to the first control component; the gates of the switching transistors arranged side by side along the first direction are electrically connected to the same scan line, and the first poles of the switching transistors arranged side by side along the second direction are connected to the same data line.

15. An electronic device comprising the beam steering structure according to any one of claims 1 to 11 or the beam steering device according to any one of claims 12 to 14.

Images