Mask plate, mask plate assembly and evaporation equipment

Abstract

The invention provides a mask plate, a mask plate assembly and evaporation equipment, the mask plate comprises a shielding part and a plurality of effective opening parts, the shielding part comprises a mask pattern area and a welding area, the welding area comprises a plurality of lap joint units which are sequentially arranged at intervals in the extension direction of at least one side edge of the mask pattern area, each lap joint unit comprises at least one lap joint part; the lap joint part has an extension length in the direction from the mask pattern area to the welding area, the lap joint part has a connecting end and a welding end which are opposite in the length extension direction, the welding end is located on the side, away from the mask pattern area, of the connecting end, and the welding end has a first width in the direction perpendicular to the length extension direction of the lap joint part; the first width is the minimum limit value of the clamping width of the net stretching equipment, and the distance between every two adjacent effective opening parts is larger than the first width; and / or a plurality of virtual opening parts are also arranged on the shielding part. According to the mask plate, the mask plate assembly and the evaporation equipment provided by the invention, the yield of evaporation products can be improved.

Description

Technical Field

[0001] The present invention relates to the field of display technology, and in particular to a mask plate, a mask plate assembly, and an evaporation device. Background Art

[0002] Organic Light-Emitting Diode (OLED) display is a display with self-luminous function. OLED display is widely used in the display industry for its advantages such as thin thickness, light weight, active light emission, fast response speed, wide viewing angle, rich colors, high brightness, low power consumption and high and low temperature resistance.

[0003] In the manufacturing process of OLED displays, an evaporation machine is used in conjunction with a mask plate assembly to evaporate OLED materials onto a substrate to form an organic light-emitting pattern on the substrate to obtain an array substrate. The mask plate assembly mainly includes a frame and a mask plate, and the mask plate is welded to the frame around the edges. However, there are defects such as color mixing at the edges or corners of the mask plate, resulting in a reduced product yield. Summary of the invention

[0004] The embodiments of the present disclosure provide a mask plate, a mask plate assembly, and an evaporation device, which can improve the yield rate of evaporation products.

[0005] The technical solutions provided by the embodiments of the present disclosure are as follows:

[0006] In a first aspect, an embodiment of the present disclosure provides a mask plate, comprising a shielding portion and a plurality of effective opening portions for defining the shape of a display area, wherein the shielding portion comprises a mask pattern area and a welding area connected to at least one side of the periphery of the mask pattern area, wherein the welding area comprises a plurality of overlapping units arranged in sequence and spaced apart along an extension direction of at least one side edge of the mask pattern area, wherein each overlapping unit comprises at least one overlapping portion; wherein:

[0007] The overlap portion has an extended length in a direction from the mask pattern area to the welding area, and the overlap portion has a connecting end and a welding end opposite to each other in the direction of its length extension, the welding end is located on a side of the connecting end away from the mask pattern area, and the welding end has a first width in a direction perpendicular to the length extension direction of the overlap portion, the first width is the minimum limit value of the clamping width of the net stretching device, and the spacing between two adjacent effective openings is greater than the first width;

[0008] And / or, a plurality of virtual openings are further provided on the shielding portion.

[0009] Exemplarily, the first width is 2 mm.

[0010] Exemplarily, at least a portion of the overlapping portion has a width at any position from the connecting end to the welding end that is the first width.

[0011] Exemplarily, the width of the connecting end of at least part of the overlapping portion is a second width, and the second width is greater than the first width.

[0012] Exemplarily, a width of at least a portion of the overlapping portion gradually decreases from the connecting end to the welding end.

[0013] Exemplarily, at least part of the overlapping portion includes a first side edge and a second side edge that are relatively arranged, and both the first side edge and the second side edge extend from the connecting end to the welding end, and either the first side edge and the second side edge is constructed as a straight line edge, an arc-shaped curve edge or a broken line edge that gradually reduces the width of the overlapping portion from the connecting end to the welding end.

[0014] Exemplarily, each of the overlapping units includes at least two overlapping portions that are spaced apart from each other.

[0015] Exemplarily, in the mask pattern area, the shielding portion includes a plurality of first shielding parts extending along the first direction, and a plurality of second shielding parts extending along the second direction, and the first shielding parts and the second shielding parts cross-define a plurality of effective openings distributed in an array; wherein, one of the first shielding parts is at least corresponding to one overlapping unit, and the overlapping unit has a first center line in the width direction thereof, the first shielding part has a second center line in the width direction of the corresponding overlapping unit, and the first center line of the overlapping unit is located on an extension line of the second center line of the corresponding first shielding part.

[0016] Exemplarily, a plurality of virtual openings are arranged at intervals at least on the second shielding portion.

[0017] Exemplarily, the first direction is the row direction of the multiple effective opening portions distributed in an array, and the second direction is the column direction of the multiple effective opening portions distributed in an array; the multiple virtual opening portions include multiple first virtual openings, wherein at least one first virtual opening is arranged between any two adjacent effective opening portions in each row of the effective opening portions.

[0018] Exemplarily, the centers of the first virtual opening and the effective opening portion in the same row are on the same straight line extending along the row direction, and the extension width of the first virtual opening along the second direction is greater than or equal to the extension width of the effective opening portion in the same row as the first virtual opening along the second direction.

[0019] Exemplarily, the plurality of virtual openings further include a plurality of second virtual openings; wherein,

[0020] At least one second virtual opening is provided at opposite ends of a plurality of first virtual openings arranged along the column direction, and the second virtual opening is spaced from the first virtual opening adjacent thereto in the column direction; and / or,

[0021] At least one of the second virtual openings is located between two of the first virtual openings that are adjacent to each other in the column direction, and each of the second virtual openings is spaced apart from the first virtual opening adjacent to it in the column direction.

[0022] Exemplarily, a spacing distance between any one of the first virtual opening, the second virtual opening, and the effective opening and another adjacent one thereof is greater than or equal to 2 mm.

[0023] In a second aspect, the present disclosure also provides a mask assembly, which includes:

[0024] A first mask, wherein the first mask is the mask as described above;

[0025] a second mask plate stacked on the first mask plate, wherein the second mask plate is a fine metal mask plate; and

[0026] A frame, on which the four edges of the first mask plate and the second mask plate are welded.

[0027] In a third aspect, an embodiment of the present disclosure further provides an evaporation device, which includes the evaporation mask assembly as described above.

[0028] The beneficial effects brought by the embodiments of the present disclosure are as follows:

[0029] In the above scheme, on the one hand, the welding area in the mask plate can be optimized and designed, and the welding area includes a plurality of overlapping units, each of which includes at least one overlapping portion, wherein the welding end of the overlapping portion is designed to be a first width, that is, the minimum limit value of the clamping width of the net stretching device, so that the distance between two adjacent effective openings is greater than the width of the welding end of the overlapping portion. In this way, by narrowing the welding end of the overlapping portion and reducing the welding area between the overlapping portion and the frame, the problem that the edge or corner of the mask plate is difficult to be adsorbed and fitted flat can be improved, and the problem that the edge or corner of the mask plate is prone to color mixing and other defects can be improved, thereby improving the product yield; on the other hand, or, it is also possible to provide a plurality of virtual openings on the shielding portion to improve the problem that the edge or corner of the mask plate is difficult to be adsorbed and fitted flat, and the problem that the edge or corner of the mask plate is prone to color mixing and other defects can be improved, thereby improving the product yield. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 One of the structural schematic diagrams of a mask provided in some embodiments of the present disclosure is shown;

[0031] Figure 2 A second structural schematic diagram showing a mask provided in some embodiments of the present disclosure;

[0032] Figure 3 A third structural schematic diagram showing a mask provided in some embodiments of the present disclosure;

[0033] Figure 4 A fourth structural schematic diagram showing a mask provided in some embodiments of the present disclosure;

[0034] Figure 5 A fifth structural schematic diagram showing a mask provided in some embodiments of the present disclosure;

[0035] Figure 6 A sixth structural schematic diagram showing a mask provided in some embodiments of the present disclosure;

[0036] Figure 7 A seventh structural schematic diagram showing a mask provided in some embodiments of the present disclosure;

[0037] Figure 8 FIG. 8 is a schematic diagram showing the structure of a mask provided in some embodiments of the present disclosure. DETAILED DESCRIPTION

[0038] In order to make the purpose, technical solution and advantages of the embodiments of the present disclosure clearer, the technical solution of the embodiments of the present disclosure will be clearly and completely described below in conjunction with the drawings of the embodiments of the present disclosure. Obviously, the described embodiments are part of the embodiments of the present disclosure, not all of the embodiments. Based on the described embodiments of the present disclosure, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present disclosure.

[0039] Unless otherwise defined, the technical terms or scientific terms used in the present disclosure should be understood by people with ordinary skills in the field to which the present disclosure belongs. The "first", "second" and similar words used in the present disclosure do not indicate any order, quantity or importance, but are only used to distinguish different components. Similarly, similar words such as "one", "one" or "the" do not indicate quantity restrictions, but indicate that there is at least one. Similar words such as "include" or "comprise" mean that the elements or objects appearing before the word cover the elements or objects listed after the word and their equivalents, without excluding other elements or objects. Similar words such as "connect" or "connected" are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect. "Up", "down", "left", "right" and the like are only used to indicate relative positional relationships. When the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0040] The features such as "parallel", "perpendicular", and "same" used in the embodiments of the present disclosure include the features such as "parallel", "perpendicular", and "same" in a strict sense, as well as the cases where "approximately parallel", "approximately perpendicular", "approximately the same", etc. include certain tolerances, taking into account the tolerances associated with the measurement of specific quantities (e.g., the limitations of the measurement system), and represent the acceptable deviation range for a specific value determined by ordinary technicians in the field. For example, "approximately" can mean within one or more standard deviations, or within 3% or 5% of the value.

[0041] In addition, in this document, unless otherwise defined, the terms "substantially", "substantially", "approximately" and "about" are used to describe and explain small changes. When used with an event or situation, these terms can cover situations where the event or situation occurs exactly, and can also cover situations where the event or situation occurs approximately. For example, when used with a numerical value, these terms can include a range of variation of less than or equal to 10% of the numerical value, such as less than or equal to ±5%, less than or equal to ±4%, less than or equal to ±3%, less than or equal to ±2%, less than or equal to ±1%, less than or equal to ±0.5%, less than or equal to ±0.1%, less than or equal to ±0.05%. The term "substantially coplanar" can refer to two surfaces being arranged along the same plane in the micrometer range, for example, arranged along the same plane within 40μm, 30μm, 20μm, 10μm or 1μm.

[0042] Before describing in detail the mask plate, mask plate assembly, and evaporation equipment provided by the embodiments of the present disclosure, the following description is given of the related technologies:

[0043] In the manufacturing process of OLED (Organic Light-Emitting Diode, OLED for short), an evaporation machine is used in conjunction with a mask assembly to evaporate OLED materials on a substrate to form an organic light-emitting pattern on the substrate to obtain an array substrate. However, in the production process of organic light-emitting diodes, color defects such as edge color mixing or corner color mixing often occur in the evaporation stage.

[0044] The inventor of the present application has found through research that one of the reasons for the above disadvantages is:

[0045] The OLED display substrate includes a plurality of sub-pixel units distributed in an array, each of which includes an anode, a light-emitting layer and a cathode, wherein the light-emitting layer is formed of an organic light-emitting material. At present, the light-emitting layer is mainly made in each sub-pixel unit through a mask assembly by an evaporation process. The mask assembly mainly includes a frame and a mask, and the mask is welded on the frame around the edges. The mask mainly includes a fine metal mask (Fine Metal Mask, FMM), an auxiliary support mask (FullSheet) and a frame (Frame). Among them, the fine metal mask has an opening pattern with the same shape as the display pixel on the display substrate, and an auxiliary support mask is arranged below the fine metal mask. The auxiliary support mask is provided with a criss-cross shielding portion, which defines a plurality of effective openings (AA Cell), and the shape of the effective opening is used to define the display area shape of each display screen. The edges of the auxiliary support mask and the fine metal mask are fixed to the frame by a netting device.

[0046] When the auxiliary support mask is not flat, it will cause problems such as inaccurate alignment, large shadows, color mixing, poor uniformity, etc. In order to improve the above problems, the auxiliary support mask is magnetically attached to the fine metal mask by magnetic attraction, which can improve the local unevenness of the auxiliary support mask.

[0047] However, since the auxiliary support mask is welded to the frame on all sides, the magnetic attraction at the edges or corners is weak, which will lead to poor fitting at these positions, and then color defects such as color mixing at the edges or corners will occur.

[0048] The inventor of the present application has found through research that the auxiliary support mask is provided with a welding area, and the welding area is provided with a plurality of overlapping areas, and the overlapping areas are arranged to match the size of the effective openings inside the auxiliary support mask, for example, the spacing distance between the overlapping areas and the effective openings adjacent thereto is substantially equal. The larger the welding fixing area of ​​the overlapping areas, the more difficult it is for the edges or corners of the auxiliary support mask to be adsorbed and attached during the evaporation process, and the more likely it is that poor color mixing will occur at the edges or corners, thereby affecting the product yield.

[0049] In order to improve the above-mentioned problems, the embodiments of the present disclosure provide a mask plate, a mask plate assembly, and an evaporation device, which can improve the poor color mixing at edges or corners and improve the product yield.

[0050] An embodiment of the present disclosure provides a mask plate, which can be fixed on a frame by stretching a net with a net stretching device.

[0051] like Figure 1 or Figure 4 As shown, the mask plate includes a shielding portion 100 and a plurality of effective opening portions 200 for limiting the shape of the display area, the shielding portion 100 includes a mask pattern area A and a welding area B connected to at least one side of the periphery of the mask pattern area A, the welding area B is used to be welded to the frame; the welding area B includes a plurality of overlapping units 110 arranged in sequence and spaced apart along the extension direction of at least one side edge of the mask pattern area A, each of the overlapping units 110 includes at least one overlapping portion 111.

[0052] Among them, Figure 1 As shown, the overlap portion 111 has an extended length in the direction from the mask pattern area A to the welding area B, and the overlap portion 111 has a connecting end 111A and a welding end 111B opposite to each other in the length extension direction thereof, and the welding end 111B is located on a side of the connecting end 111A away from the mask pattern area A, and the welding end 111B has a first width D1 in a direction perpendicular to the length extension direction of the overlap portion 111, and the first width D1 is the minimum limit value of the clamping width of the net stretching device, and the spacing d between two adjacent effective openings 200 is greater than the first width D1;

[0053] and / or, if Figure 4 As shown, a plurality of virtual openings 300 are provided on the shielding portion 100 .

[0054] In the above scheme, the welding area B in the mask plate can be optimized and designed, the welding area B includes a plurality of overlapping units 110, each of the overlapping units 110 includes at least one overlapping portion 111, and the welding end 111B of the overlapping portion 111 is designed to have a first width D1, which is the minimum limit value of the clamping width of the net stretching device, and the spacing between two adjacent effective openings 200 is greater than the width of the welding end 111B of the overlapping portion 111. In this way, by narrowing the welding end 111 of the overlapping portion 111 111B, reducing the welding area between the overlapped portion 111 and the frame can improve the problem that the edge or corner of the mask plate is difficult to be adsorbed and flattened, thereby improving the defect that the edge or corner of the mask plate is prone to color mixing, thereby improving the product yield; and the width of the welding end 111B of the overlapped portion 111 is the first width D1, and the first width D1 is configured as the minimum limit width value that the overlapped portion 111 can be clamped by the net stretching device, which can ensure that the mask plate can be stably stressed during the four-side net stretching process combined with the frame;

[0055] Alternatively, multiple virtual openings 300 may be provided on the shielding portion to improve the problem that the edges or corners of the mask are difficult to be adsorbed and flattened, improve the problem that the edges or corners of the mask are prone to color mixing, and improve product yield.

[0056] Alternatively, the overlapping portion 111 may be narrowed and a virtual opening 300 may be added to improve the adsorption and bonding effect at the edge or corner of the mask.

[0057] It should be noted that the first width D1 of the welding end 111B of the overlap portion 111 can be determined based on the minimum limit width of the overlap portion 111 that can be clamped by the net stretching device. For example, the first width D1 can be 2 mm. It should be understood that the value of the first width D1 is not limited thereto.

[0058] As an exemplary embodiment, Figure 1 As shown, at least part of the overlapped portion 111 has a width of the first width D1 at any position from the connecting end 111A to the welding end 111B. For example, the overlapped portion 111 may be configured as a rectangular shape having the same width from the connecting end 111A to the welding end 111B.

[0059] As an exemplary embodiment, Figure 2 and Figure 3 As shown, the width of the connection end 111A of at least part of the overlapped portion 111 is a second width D2, and the second width D2 is greater than the first width D1. In other words, at least part of the overlapped portion 111 is configured such that the connection end 111A is wide and the welding end 111B is narrow.

[0060] Specifically, see Figure 2 and Figure 3 As shown, in some exemplary embodiments, the width of at least a portion of the overlapping portion 111 gradually decreases from the connecting end 111A to the welding end 111B.

[0061] As an exemplary embodiment, Figure 2 As shown, at least part of the overlapping portion 111 includes a first side edge 1111 and a second side edge 1112 that are oppositely disposed, and the first side edge 1111 and the second side edge 1112 both extend from the connecting end 111A to the welding end 111B.

[0062] like Figure 2 As shown, in some embodiments, any one of the first side 1111 and the second side 1112 is configured as a straight line side for gradually reducing the width of the overlap portion 111 from the connection end 111A to the welding end 111B. In other words, the overlap portion 111 is configured to be substantially trapezoidal in shape, and the width gradually decreases from the connection end 111A to the welding end 111B.

[0063] like Figure 3 As shown, in other embodiments, any one of the first side 1111 and the second side 1112 is configured as an arc-shaped curved edge for gradually reducing the width of the overlap portion 111 from the connection end 111A to the welding end 111B. In other words, the overlap portion 111 is configured to be generally in a trumpet shape with a width gradually decreasing from the connection end 111A to the welding end 111B.

[0064] In addition, in other embodiments not shown in the present disclosure, either the first side 1111 or the second side 1112 may also be constructed as a fold line edge for gradually reducing the width of the overlapping portion 111 from the connecting end 111A to the welding end 111B.

[0065] It should be noted that the above are only several exemplary descriptions of the overlapping portion 111 . In other embodiments not shown, the shape of the overlapping portion 111 is not limited thereto.

[0066] For example, Figure 8 As shown, in some embodiments, in the direction from the connecting end 111A to the welding end 111B, the overlapping portion 111 may further include an extension area S1 and an effective overlapping area S2, and the effective overlapping area S2 is used to overlap with the frame for welding and fixing.

[0067] Among them, the length of the effective overlap area S2 in the length extension direction of the overlap portion 111 can be greater than or equal to 2 mm, and since the effective overlap area S2 is the main area used for welding and fixing with the frame, it is sufficient to ensure that the width of the effective overlap area S2 is the first width D1, and the width of the extension area S1 can be greater than or equal to the width of the effective overlap area S2.

[0068] For example, see Figure 8 As shown, the width of the extension area S1 may be greater than the width of the effective overlap area S2, and the extension area S1 may also be a trapezoidal shape that gradually converges from the connection end 111A to the welding end 111B. In other embodiments not shown, the extension area S1 may be constructed as a rectangle, in which case the transition boundary between the extension area S1 and the effective overlap area S2 forms a step difference; or, the extension area S1 may also be a trumpet shape that gradually converges from the connection end 111A to the welding end 111B. The specific shape of the extension area S1 is not limited thereto.

[0069] In addition, as an exemplary embodiment, see Figure 1 As shown, each of the overlapping units 110 may include only one overlapping portion 111 .

[0070] In some other embodiments, each of the overlapping units 110 may further include at least two overlapping portions 111 arranged at intervals. Figure 7 As shown, each of the overlapping units 110 may include two overlapping portions 111. Each of the overlapping portions 111 may be configured in a rectangular, trapezoidal or trumpet shape.

[0071] In addition, as an exemplary embodiment, Figures 1 to 8 As shown, in the mask pattern area A, the blocking portion 100 includes a plurality of first blocking portions 101 extending along a first direction X, and a plurality of second blocking portions 102 extending along a second direction Y, and the first blocking portions 101 and the second blocking portions 102 cross-define a plurality of effective opening portions 200 distributed in an array.

[0072] For example, the first direction X is the row direction of the plurality of effective openings 200 distributed in an array, and the second direction Y is the column direction of the plurality of effective openings 200 distributed in an array.

[0073] Among them, at least one of the first shielding parts 101 corresponds to one of the overlapping units 110, for example, Figure 1As shown, one overlapping unit 110 is correspondingly provided for each first shielding portion 101. Furthermore, the overlapping unit 110 has a first center line a in the width direction thereof, and the first shielding portion 101 has a second center line b in the width direction of the corresponding overlapping unit 110, and the first center line a of the overlapping unit 110 is located on the extension line of the second center line b of the corresponding first shielding portion 101. By adopting the above solution, it can be further ensured that the mask template is subjected to stable force during the net stretching process.

[0074] Also, see Figure 1 As shown, one of the first shielding portions 101 is provided corresponding to at least one of the overlapping units 110. In other embodiments not shown, one of the second shielding portions 102 may also be provided corresponding to at least one of the overlapping units 110. In practical applications, the positions of the overlapping units 110 may be reasonably arranged according to the requirements of the mask.

[0075] It should be noted that, in the actual evaporation process, the second direction Y may be the scanning direction of the line source evaporation source. The inventor of the present application has found through research that, in the actual evaporation process in the related art, in the scanning direction of the line source evaporation source, the opposite sides of the mask are more likely to have corner color mixing problems due to reasons such as the evaporation angle.

[0076] Therefore, in some exemplary embodiments, Figure 3 As shown, a plurality of virtual openings 300 are arranged at intervals on at least the second shielding portion 102 extending along the second direction Y. In this way, by adding the virtual openings 300 in the scanning direction of the line source evaporation source, the self-weight of the shielding portion 100 can be reduced, which is more conducive to the magnetic attachment of the mask plate, so as to improve the problem of poor color mixing at the corners on both sides relative to each other in the scanning direction of the line source evaporation source.

[0077] As an exemplary embodiment, Figure 3 As shown, the first direction X is the row direction of the plurality of effective openings 200 distributed in an array, and the second direction Y is the column direction of the plurality of effective openings 200 distributed in an array; wherein the plurality of virtual openings 300 include a plurality of first virtual openings 310, and at least one first virtual opening 310 is arranged between any two adjacent effective openings 200 in each row of the effective openings 200. In this way, the first virtual opening 310 is arranged between two adjacent effective openings 200 in the first direction X, so as to further ensure that the mask is subjected to stable force when the mask is stretched on four sides.

[0078] As an exemplary embodiment, Figure 4As shown, the center of the first virtual opening 310 and the effective opening portion 200 in the same row are on the same straight line extending along the row direction, and the extension width of the first virtual opening 310 along the second direction Y is greater than or equal to the extension width of the effective opening portion 200 in the same row as the first virtual opening 310 along the second direction Y.

[0079] By adopting the above scheme, the center of the first virtual opening 310 is aligned with the center of the effective opening portion 200, which is beneficial to the stability of the force during the stretching process of the mask plate, and the extension length of the first virtual opening 310 in the column direction is designed to be greater than the extension length of the effective opening portion 200 in the same row in the column direction. In this way, the area ratio of the first virtual opening 310 on the shielding portion can be increased as much as possible while ensuring the stability of the force on the mask plate stretching network, which is more conducive to the magnetic adhesion of the mask plate, so as to further improve the problem of poor color mixing at the corners on both sides relative to each other in the scanning direction of the line source evaporation source.

[0080] In order to further increase the area ratio of the virtual opening 300, as an exemplary embodiment, Figure 4 As shown, the multiple virtual opening portions 300 also include multiple second virtual openings 320; wherein, at least one second virtual opening 320 is respectively arranged at the opposite ends of several first virtual openings 310 arranged along the column direction, and the second virtual opening 320 and the first virtual opening 310 adjacent to it are spaced apart in the column direction.

[0081] By adopting the above scheme, at least one second virtual opening 320 is respectively arranged at the opposite ends of each column of the first virtual openings 310, and the opening area of ​​the second virtual opening 320 can be smaller than the opening area of ​​the first virtual opening 310. In this way, by setting the second virtual opening 320, the opening area of ​​the virtual opening portion 300 in the second direction Y is further increased.

[0082] In addition, in order to further increase the area ratio of the virtual opening 300, as another exemplary embodiment, Figure 5 As shown, at least one of the second virtual openings 320 is located between two adjacent first virtual openings 310 arranged along the column direction, and each of the second virtual openings 320 is spaced apart from the adjacent first virtual opening 310 in the column direction.

[0083] By adopting the above scheme, at least one second virtual opening 320 can be set between two adjacent first virtual openings 310 in each column of the first virtual openings 310, and the opening area of ​​the second virtual opening 320 can be smaller than the opening area of ​​the first virtual opening 310. In this way, by setting the second virtual opening 320, the opening area of ​​the virtual opening portion 300 in the second direction Y is further increased.

[0084] It should be noted that, when the second virtual opening 320 is provided on the mask, the first virtual opening 310 may have a width in the column direction greater than the width of the effective opening 200 (see Figure 4 Alternatively, the first virtual opening 310 may have a width in the column direction equal to the width of the effective opening 200 (see Figure 5 shown).

[0085] In addition, in order to ensure that the mask plate is clamped by the net stretching device to ensure the stability of the net stretching process, as an exemplary embodiment, the spacing distance between any one of the first virtual opening 310, the second virtual opening 320, and the effective opening portion 200 and another adjacent one is greater than or equal to the minimum limit value of the clamping width of the net stretching device, for example, 2 mm.

[0086] That is to say, whether between the effective opening portion 200 and the virtual opening portion 300, or between the first virtual opening 310 and the second virtual opening 320, the size of the shielding portion should be greater than or equal to the minimum limit value of the clamping width of the net stretching device to ensure stable force during the mask template stretching process.

[0087] In addition, the present disclosure also provides a mask assembly, which includes:

[0088] A first mask plate, wherein the first mask plate is the mask plate provided by an embodiment of the present disclosure;

[0089] a second mask plate stacked on the first mask plate, wherein the second mask plate is a fine metal mask plate; and

[0090] A frame, on which the four edges of the first mask plate and the second mask plate are welded.

[0091] In addition, an embodiment of the present disclosure further provides an evaporation device, which includes the evaporation mask assembly provided by the embodiment of the present disclosure.

[0092] The other essential components of the mask plate assembly and the evaporation equipment except the mask plate provided in the embodiment of the present disclosure should be understood by ordinary technicians in the field, and will not be elaborated here, nor should they be used as a limitation to the present disclosure.

[0093] Since the principle of solving the problem by the mask plate assembly and the evaporation equipment is similar to the principle of solving the problem by the above-mentioned mask plate, the embodiments of the mask plate assembly and the evaporation equipment provided in the embodiments of the present disclosure can refer to the embodiments of the above-mentioned mask plate provided in the embodiments of the present disclosure, and will not be repeated here.

[0094] There are a few points to note:

[0095] (1) The drawings of the embodiments of the present disclosure only relate to the structures related to the embodiments of the present disclosure, and other structures may refer to the general design.

[0096] (2) For the sake of clarity, in the drawings used to describe the embodiments of the present disclosure, the thickness of layers or regions is exaggerated or reduced, that is, these drawings are not drawn according to the actual scale. It is understood that when an element such as a layer, film, region or substrate is referred to as being "on" or "under" another element, the element may be "directly" "on" or "under" the other element or there may be intermediate elements.

[0097] (3) In the absence of conflict, the embodiments of the present disclosure and the features therein may be combined with each other to obtain new embodiments.

[0098] The above are only specific implementations of the present disclosure, but the protection scope of the present disclosure is not limited thereto, and the protection scope of the present disclosure shall be based on the protection scope of the claims.

Claims

1. A mask, characterized in that: The device comprises a shielding portion and a plurality of effective opening portions for defining the shape of a display area, wherein the shielding portion comprises a mask pattern area and a welding area connected to at least one side of the periphery of the mask pattern area, wherein the welding area comprises a plurality of overlapping units arranged in sequence and at intervals along the extending direction of at least one side edge of the mask pattern area, and each of the overlapping units comprises at least one overlapping portion; wherein, The overlapping portion has an extended length in the direction from the mask pattern area to the welding area, and the overlapping portion has a connecting end and a welding end opposite to each other in the direction of its length extension, the welding end is located on a side of the connecting end away from the mask pattern area, and the welding end has a first width in a direction perpendicular to the length extension direction of the overlapping portion, the first width is the minimum limit value of the clamping width of the net stretching device, and the spacing between two adjacent effective openings is greater than the first width; and / or, A plurality of virtual openings are also provided on the shielding portion.

2. The mask according to claim 1, characterized in that: The first width is 2 mm.

3. The mask according to claim 1, characterized in that: At least a portion of the overlapping portion has a width at any position from the connecting end to the welding end that is the first width.

4. The mask according to claim 1, characterized in that: The width of the connecting end of at least part of the overlapping portion is a second width, and the second width is greater than the first width.

5. The mask according to claim 4, characterized in that: The width of at least a portion of the overlapped portion gradually decreases from the connecting end to the welding end.

6. The mask according to claim 5, characterized in that: At least part of the overlapping portion includes a first side edge and a second side edge that are arranged opposite to each other, wherein the first side edge and the second side edge both extend from the connecting end to the welding end, and either the first side edge or the second side edge is constructed as a straight side, an arc-shaped curve side or a broken line side that gradually reduces the width of the overlapping portion from the connecting end to the welding end.

7. The mask according to claim 1, characterized in that: Each of the overlapping units includes at least two overlapping portions that are spaced apart from each other.

8. The mask according to claim 1, characterized in that: In the mask pattern area, the shielding portion includes a plurality of first shielding parts extending along the first direction, and a plurality of second shielding parts extending along the second direction, and the first shielding parts and the second shielding parts cross-define a plurality of effective openings distributed in an array; wherein, one of the first shielding parts is at least corresponding to one overlapping unit, and the overlapping unit has a first center line in the width direction thereof, the first shielding part has a second center line in the width direction of the corresponding overlapping unit, and the first center line of the overlapping unit is located on an extension line of the second center line of the corresponding first shielding part.

9. The mask according to claim 8, characterized in that: A plurality of the virtual openings are arranged at intervals at least on the second shielding portion.

10. The mask according to claim 9, characterized in that: The first direction is the row direction of the multiple effective opening portions distributed in an array, and the second direction is the column direction of the multiple effective opening portions distributed in an array; the multiple virtual opening portions include multiple first virtual openings, wherein at least one first virtual opening is arranged between any two adjacent effective opening portions in each row of the effective opening portions.

11. The mask according to claim 10, characterized in that: The centers of the first virtual opening and the effective opening portion in the same row are on the same straight line extending along the row direction, and the extension width of the first virtual opening along the second direction is greater than or equal to the extension width of the effective opening portion in the same row as the first virtual opening along the second direction.

12. The mask according to claim 11, characterized in that: The plurality of virtual openings further include a plurality of second virtual openings; wherein, At least one second virtual opening is provided at opposite ends of a plurality of first virtual openings arranged along the column direction, and the second virtual opening is spaced from the first virtual opening adjacent thereto in the column direction; and / or, At least one of the second virtual openings is located between two of the first virtual openings that are adjacent to each other in the column direction, and each of the second virtual openings is spaced apart from the first virtual opening adjacent to it in the column direction.

13. The mask according to claim 12, characterized in that: A spacing distance between any one of the first virtual opening, the second virtual opening, and the effective opening and another adjacent one thereof is greater than or equal to 2 mm.

14. A mask assembly, characterized in that: include: A first mask plate, wherein the first mask plate is the mask plate according to any one of claims 1 to 13; a second mask plate stacked on the first mask plate, wherein the second mask plate is a fine metal mask plate; and A frame, on which the four edges of the first mask plate and the second mask plate are welded.

15. A vapor deposition device, characterized in that: It comprises the evaporation mask assembly as claimed in claim 14.

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