Detection device based on XRay and process method thereof

Abstract

The invention relates to the technical field of XRay detection, and discloses an XRay-based detection device and a process method thereof.The XRay-based detection device comprises a gate, a rack, a case, a feeding transmission mechanism, a discharging transmission mechanism, a displacement carrying mechanism, an X-ray emitting mechanism, an X-ray receiving mechanism, a controller and a positioning detection mechanism; a gate, a machine box, a feeding conveying mechanism, a discharging conveying mechanism, a displacement carrying mechanism, an X-ray emitting mechanism, an X-ray receiving mechanism, a controller and a positioning detection mechanism are installed on the machine frame. According to the XRay detection device, the whole detection process of automatic feeding, detection and discharging is achieved, mass production detection can be conveniently and rapidly carried out, a multi-point X-ray source can correspond to a plurality of X-ray receivers, when X-rays irradiate a detected object, the corresponding receivers receive the X-rays penetrating through the detected object, image signals are generated, and the X-rays are transmitted to the X-ray receivers. The signal is collected by the image collector and then is transmitted to the computer for data collection and imaging.

Description

Technical Field

[0001] The present invention relates to the technical field of detectors, and in particular to an X-Ray-based detection device and a process method thereof. Background Art

[0002] X-rays are particle streams generated by the transition of electrons in atoms between two energy levels with a large difference in energy. They have a very short wavelength of about 0.01-100 angstroms, and are electromagnetic radiation between violet and gamma rays. X-rays are widely used in production, life and scientific research activities such as medical testing and industrial non-destructive testing. In the process of electronic manufacturing, X-ray detection technology is widely used, which can be used for semiconductor front-end processing detection, chip packaging detection, circuit board line detection, electronic device welding detection, battery detection, etc. At the same time, the application of welding quality detection after reflow soldering in SMT is also becoming more and more widespread. The welding quality detection of hidden solder joints of electronic components cannot be achieved by visible light, so non-destructive testing by X-ray penetration is required.

[0003] At present, the X-ray generation technology used in SMT production lines is the micro-focus X-ray source solution. The micro-focus X-ray sources on the market all adopt the single-tube single-emitter solution. In 3D detection applications, the X-ray source with a single tube and a single emitter corresponds to a single X-ray receiving plate. Multiple displacements and multiple image acquisitions are required between the X-ray source and the receiving plate, which is slow, inefficient, and difficult to control the position accuracy of the movement; there is also the position offset of the detection object, and there is no correction function, etc. The stage will also interfere with the X-rays, etc.

[0004] Therefore, in view of the above problems, the existing detector technology needs to be further improved. Summary of the invention

[0005] The purpose of the present invention is to solve the problems of detection error, low efficiency, slow speed and lack of correction function brought about by the existing detection technology; to provide a multi-point X-ray transmitting and receiving device, wherein the multi-point X-ray source corresponds to a plurality of X-ray receiving plates, wherein the central X-ray irradiation of the object to be measured corresponds to the central receiving plate receiving the X-ray intensity after penetrating the object to be measured, generating an image signal, which is collected by the image collector and transmitted to the computer; the surrounding X-ray irradiation of the object to be measured corresponds to the surrounding receiving plate receiving the X-ray intensity after penetrating the object to be measured, generating an image signal, which is collected by the image collector and transmitted to the computer; other multi-point surrounding irradiation methods are the same.

[0006] The technical solution of the present invention is as follows:

[0007] A detection device based on XRay, the detection device comprises: a gate, a frame, a chassis, a loading and conveying mechanism, a unloading and conveying mechanism, a displacement carrier mechanism, an X-ray emitting mechanism, an X-ray receiving mechanism, a controller and a positioning detection mechanism, the gate, the chassis, the loading and conveying mechanism, the unloading and conveying mechanism, the displacement carrier mechanism, the X-ray emitting mechanism, the X-ray receiving mechanism, the controller and the positioning detection mechanism are installed on the frame, the displacement carrier mechanism is arranged between the loading and conveying mechanism and the unloading and conveying mechanism, the loading and conveying mechanism is used to transfer the detection object to the displacement carrier mechanism and carry it to the unloading and conveying mechanism, the displacement carrier mechanism is used to shift the detection object to the detection position, and the unloading mechanism is used to move the detection object to Unloading, the X-ray emitting mechanism is arranged above the displacement loading mechanism, the X-ray receiving mechanism is arranged on the displacement loading mechanism, the chassis cover is on the loading and unloading transmission mechanism, the displacement loading mechanism, the X-ray emitting mechanism, the X-ray receiving mechanism and the positioning detection mechanism, the gates are respectively arranged at the feeding end of the loading and unloading transmission mechanism and the discharging end of the unloading transmission mechanism, the gates are used to form a closed whole with the chassis during X-ray detection and prevent X-rays from entering the outside, the control end of the loading and unloading transmission mechanism, the control end of the displacement loading mechanism, the control end of the X-ray emitting mechanism, the control end of the X-ray receiving mechanism and the control end of the positioning detection mechanism are respectively electrically connected to the control end of the controller.

[0008] Furthermore, the feeding and conveying mechanism includes a feeding bracket, a feeding conveyor belt, a feeding motor, a feeding main wheel and a feeding auxiliary wheel. The feeding bracket and the feeding motor are both installed on the frame. The feeding main wheel and the feeding auxiliary wheel are both rotatably installed on the feeding bracket. The feeding conveyor belt is installed on the feeding main wheel and the feeding auxiliary wheel. The control end of the feeding motor is electrically connected to the control end of the controller, and the driving end of the feeding motor is connected to the driven end of the feeding main wheel.

[0009] Furthermore, the unloading transmission mechanism includes an unloading bracket, an unloading conveyor belt, an unloading motor, an unloading main wheel and an unloading auxiliary wheel. The unloading bracket and the unloading motor are both installed on the frame, the unloading main wheel and the unloading auxiliary wheel are both rotatably installed on the unloading bracket, the unloading conveyor belt is installed on the unloading main wheel and the unloading auxiliary wheel, the control end of the unloading motor is electrically connected to the control end of the controller, and the driving end of the unloading motor is connected to the driven end of the unloading main wheel.

[0010] Furthermore, the chassis is selected to be a chassis made of a metal plate with a lead layer on the inner side; such as a chassis made of a metal iron plate with a lead layer on the inner side.

[0011] Furthermore, the displacement loading mechanism includes a displacement slide rail, a displacement slide seat, a displacement cylinder and a transparent loading plate, the displacement slide rail and the displacement cylinder are both installed on the frame, the displacement slide seat is slidably installed on the displacement slide rail, the X-ray receiving mechanism is installed on the displacement slide seat, the transparent loading plate is installed on the X-ray receiving mechanism, the X-ray transmitting mechanism transmits X-rays to the detection object on the transparent loading plate, and is received by the X-ray receiving mechanism, the control end of the displacement cylinder is electrically connected to the control end of the controller, and the driving end of the displacement cylinder is connected to the displacement slide seat.

[0012] Furthermore, the positioning detection mechanism includes a visual detection sensor and an adjustment bracket, the adjustment bracket is installed on the frame, the visual detection sensor is installed on the adjustment bracket, the adjustment bracket is used to adjust the position of the visual detection sensor, and the control end of the visual detection sensor is electrically connected to the control end of the controller.

[0013] Furthermore, the visual detection sensor is a CCD camera.

[0014] Furthermore, the adjustment bracket is selected as a two-dimensional displacement platform or a one-dimensional displacement platform.

[0015] Furthermore, the X-ray emitting mechanism and the X-ray receiving mechanism are arranged in one-to-one correspondence and cooperate with each other, and the X-ray emitting mechanism is used to emit X-rays and transmit them to the X-ray receiving mechanism for reception through the displacement carrier mechanism.

[0016] Furthermore, the X-ray emitting mechanism includes an X-ray emitter, an X-ray bracket and an X-ray motor, the X-ray motor is mounted on the frame, the X-ray bracket is mounted on the driving end of the X-ray motor, the X-ray emitter is mounted on the X-ray bracket, and the control end of the X-ray motor is electrically connected to the control end of the controller.

[0017] Furthermore, the X-ray emitter includes an X-ray source and an X-ray adjuster, the X-ray source is installed on the X-ray bracket, the X-ray adjuster is installed at the output end of the X-ray source, and the X-ray adjuster is used to adjust the size of the output beam of the X-ray source.

[0018] Furthermore, the X-ray adjuster selects a cover plate with a through hole, the cover plate with the through hole is installed at the output end of the X-ray source, the through hole corresponds to the output end, and the through hole is used to adjust the size of the output beam of the X-ray source.

[0019] Furthermore, the through hole is a circular through hole or a square through hole.

[0020] Furthermore, the cover plate is made of metal lead.

[0021] Furthermore, the X-ray emitter includes a central X-ray source, a central X-ray adjuster, a peripheral X-ray source and a peripheral X-ray adjuster, the central X-ray source and the peripheral X-ray source are both installed on the X-ray bracket, and the central X-ray source is arranged at the center of the X-ray bracket, the peripheral X-ray sources are arranged at the periphery of the X-ray bracket, the central X-ray adjuster is provided on the central X-ray source, and the peripheral X-ray adjuster is provided on the peripheral X-ray source.

[0022] Furthermore, at least one of the peripheral X-ray source and the peripheral X-ray adjuster is selected; if more than two are selected, they are evenly arranged, such as: more than two of the peripheral X-ray source and the peripheral X-ray adjuster are selected, then the peripheral X-ray source and the peripheral X-ray adjuster are evenly arranged around the central X-ray source.

[0023] Furthermore, the peripheral X-ray source and the peripheral X-ray adjuster are both at an angle between 0° and 90° with respect to the vertical.

[0024] Furthermore, the X-ray receiving mechanism includes a receiving bracket, a receiving motor, a central receiver and peripheral receivers, the receiving motor is installed on the displacement slide, the receiving bracket is installed on the driving end of the receiving motor, the central receiver and the peripheral receivers are both installed on the receiving bracket, the central receiver corresponds to the central X-ray source, the peripheral X-ray source corresponds to the peripheral receivers, and the control end of the receiving motor is electrically connected to the control end of the controller.

[0025] Furthermore, the control end of the controller is electrically connected to the control ends of the X-ray emitting mechanism and the X-ray receiving mechanism respectively.

[0026] Furthermore, the controller includes a high-voltage power supply module, a grid power supply module, a focusing electrode power supply module, a power management system and a communication module, the high-voltage power supply module is electrically connected to the power management system, the power management system is electrically connected to the grid power supply module, the focusing electrode power supply module and the communication module, respectively, and the grid power supply module and the focusing electrode power supply module are electrically connected to the X-ray emitting mechanism respectively.

[0027] Furthermore, the detection device also includes a computer, a communication end of the computer is electrically connected to the communication module of the controller and the communication end of the X-ray receiving mechanism, and a collection end of the computer is electrically connected to the collection end of the X-ray receiving mechanism.

[0028] Furthermore, the X-ray emitter includes an X-ray exit window, a vacuum chamber, a focusing electrode, a gate, a gate electrode, a cathode electrode, a focusing electrode electrode, a cathode, a target material, an anode and an anode electrode. The target material is placed in the vacuum chamber, the anode of the target material is electrically connected to the anode electrode, the output end of the target material is provided with an X-ray exit window, a cover plate with a through hole is covered on the X-ray exit window, a focusing electrode, a gate and a cathode are provided in the vacuum chamber corresponding to the output end of the target material, the focusing electrode, the gate and the cathode are electrically connected to the focusing electrode, the gate electrode and the cathode electrode respectively, and the anode electrode, the focusing electrode, the gate electrode and the cathode electrode are electrically connected to the control end of the controller respectively.

[0029] Furthermore, a process method of a detection device based on XRay is provided, wherein the process method comprises the following steps:

[0030] Step 1: Preparation of transparent carrier plate

[0031] An optical quartz glass plate of a certain thickness is selected, cut into a circular quartz substrate, then placed in anhydrous ethanol and allowed to stand for 1 hour, and the anhydrous ethanol is rinsed off with deionized water, and finally dried to prepare a circular quartz plate;

[0032] The circular quartz plate is placed on an electrolytic polishing machine, the circular quartz plate is connected to the positive terminal, and a stainless steel plate is used to connect the negative terminal, a sulfuric acid solution is selected as the electrolyte in the electrolytic polishing machine, the electrolytic polishing machine is started, and the circular quartz plate is polished to prepare a polished quartz plate;

[0033] The polished quartz plate is placed in a polishing machine with a diamond having a diameter of 5 nm for polishing to prepare a finely polished quartz plate;

[0034] The polished quartz plate was placed in a microwave CVD reactor, and the temperature in the reactor was raised to 1000°C. 4 / N 2 / H 2 The mixed plasma deposits a nano-diamond layer on the surface of the finely polished quartz plate to prepare a transparent carrier plate.

[0035] Step 2: Making the X-ray Emitter

[0036] An X-ray exit window, a vacuum chamber, a focusing electrode, a grid, a grid electrode, a cathode electrode, a focusing electrode electrode, a cathode, a target material, an anode and an anode electrode are selected, a target material is placed in the vacuum chamber, an anode of the target material is electrically connected to the anode electrode, an X-ray exit window is provided at the outlet end of the target material, a cover plate with a through hole is covered on the X-ray exit window, a focusing electrode, a grid and a cathode are provided in the vacuum chamber corresponding to the outlet end of the target material, the focusing electrode, the grid and the cathode are electrically connected to the focusing electrode, the grid electrode and the cathode electrode respectively, and the anode electrode, the focusing electrode, the grid electrode and the cathode electrode are electrically connected to the control end of the controller respectively, to manufacture an X-ray emitter;

[0037] Step 3: Assembly of the detection device

[0038] Select gates, racks, chassis, loading brackets, loading conveyor belts, loading motors, loading main wheels, loading auxiliary wheels, unloading brackets, unloading conveyor belts, unloading motors, unloading main wheels, unloading auxiliary wheels, displacement slide rails, displacement slide seats, displacement cylinders, transparent carrier plates, central X-ray sources, central X-ray adjusters, peripheral X-ray sources, peripheral X-ray adjusters, X-ray brackets, X-ray motors, receiving brackets, receiving motors, central receivers, peripheral receivers, controllers, visual detection sensors and adjustment brackets, wherein the transparent carrier plate is the transparent carrier plate of step one, and the X-ray source is the X-ray emitter of step two. ; The loading bracket and the loading motor are both installed on the frame, the loading main wheel and the loading auxiliary wheel are both rotatably installed on the loading bracket, the loading conveyor belt is installed on the loading main wheel and the loading auxiliary wheel, the control end of the loading motor is electrically connected to the control end of the controller, and the driving end of the loading motor is connected to the driven end of the loading main wheel; the unloading bracket and the unloading motor are both installed on the frame, the unloading main wheel and the unloading auxiliary wheel are both rotatably installed on the unloading bracket, the unloading conveyor belt is installed on the unloading main wheel and the unloading auxiliary wheel, the control end of the unloading motor is electrically connected to the control end of the controller, and the driving end of the unloading motor is connected to the driven end of the unloading main wheel; the displacement slide rail and the displacement The cylinders are all installed on the frame, and the displacement slide rail and the displacement cylinder are set on the gap between the loading conveyor belt and the unloading conveyor belt. The displacement slide seat is slidably installed on the displacement slide rail. The driving end of the displacement cylinder is connected to the displacement slide seat. The receiving motor is installed on the displacement slide seat. The receiving bracket is installed on the driving end of the receiving motor. The central receiver and the peripheral receiver are both installed on the receiving bracket. The control end of the receiving motor is electrically connected to the control end of the controller. The displacement carrier is installed on the receiving bracket. The displacement carrier is on the same plane as the loading conveyor belt and the unloading conveyor belt; the adjustment bracket is installed on the frame and is set above the displacement carrier plate. The visual detection sensor is installed on an adjustment bracket, the adjustment bracket is used to adjust the position of the visual detection sensor, and the control end of the visual detection sensor is electrically connected to the control end of the controller; the X-ray motor is installed on the frame, the X-ray bracket is installed on the X-ray motor, the control end of the X-ray motor is electrically connected to the control end of the controller, the central X-ray source and the peripheral X-ray source are both installed on the X-ray bracket, and the central X-ray source is arranged at the center of the X-ray bracket, and the peripheral X-ray source is arranged at the periphery of the X-ray bracket, the central X-ray source is provided with a central X-ray adjuster, and the peripheral X-ray source is provided with a peripheral X-ray adjuster;The chassis is covered on a loading bracket, a loading conveyor belt, a loading motor, a loading main wheel, a loading auxiliary wheel, a discharging bracket, a discharging conveyor belt, a discharging motor, a discharging main wheel, a discharging auxiliary wheel, a displacement slide rail, a displacement slide seat, a displacement cylinder, a transparent carrier plate, a central X-ray source, a central X-ray adjuster, a peripheral X-ray source, a peripheral X-ray adjuster, an X-ray bracket, an X-ray motor, a receiving bracket, a receiving motor, a central receiver, a peripheral receiver, a visual detection sensor and an adjustment bracket, and gates are respectively arranged at the feeding end of the loading bracket and the discharging end of the discharging bracket, and the gates are used to form a closed whole with the chassis during X-ray detection and prevent X-rays from entering the outside;

[0039] Step 4: Control setup

[0040] Select the detection device of step three, and combine a controller including a high-voltage power supply module, a gate power supply module, a collecting electrode power supply module, a power management system and a communication module, wherein the high-voltage power supply module is electrically connected to the power management system, and the power management system is electrically connected to the gate power supply module, the collecting electrode power supply module and the communication module respectively, and the gate power supply module and the collecting electrode power supply module are electrically connected to the X-ray emitting mechanism respectively, wherein there is also a computer, and the communication end of the computer is electrically connected to the communication module of the controller and the communication end of the X-ray receiving mechanism respectively, and the collection end of the computer is electrically connected to the collection end of the X-ray receiving mechanism, so as to produce an XRay detection device.

[0041] Beneficial Effects

[0042] The present invention provides a multi-point X-ray emitting and receiving device by rationalizing the design of the detector. The multi-point X-ray source corresponds to multiple X-ray receiving plates, wherein the central X-ray irradiation of the object to be tested corresponds to the central receiving plate receiving the X-ray intensity after penetrating the object to be tested, generating an image signal, which is collected by the image collector and transmitted to the computer; the surrounding X-ray irradiation of the object to be tested corresponds to the surrounding receiving plate receiving the X-ray intensity after penetrating the object to be tested, generating an image signal, which is collected by the image collector and transmitted to the computer; other multi-point surrounding irradiation methods are the same. The XRay detection device realizes the overall detection process of automated loading-detection-unloading, and can quickly and conveniently carry out mass production detection. It can also correct the deviation of the detected object and reduce the influence of the stage, etc., and can realize fast, convenient and automated detection. BRIEF DESCRIPTION OF THE DRAWINGS

[0043] Figure 1 The figure is a schematic diagram of the structure of an XRay-based detection device of the present invention.

[0044] Figure 2 The figure is a schematic diagram of the internal structure of an XRay-based detection device of the present invention.

[0045] Figure 3It is a schematic diagram of a partially enlarged structure of an XRay-based detection device of the present invention.

[0046] Figure 4 The present invention is a schematic diagram of the structure of an X-ray emission mechanism of an XRay-based detection device.

[0047] Figure 5 The present invention is a schematic diagram of the structure of an X-ray receiving mechanism of an XRay-based detection device.

[0048] Figure 6 The figure is a schematic diagram of the system structure of an XRay-based detection device of the present invention.

[0049] Figure 7 The present invention is a schematic diagram of the cross-sectional structure of an X-ray emitting mechanism of an XRay-based detection device.

[0050] Figure 8 The present invention is a schematic cross-sectional structure diagram of an X-ray emitting mechanism and an X-ray receiving mechanism of an XRay-based detection device.

[0051] Fig. 9 These are comparative photographs of a transparent carrier plate of an XRay-based detection device of the present invention.

[0052] Fig.10 This is a SEM image of a transparent carrier plate of an XRay-based detection device of the present invention.

[0053] Figure numbers: 01, rack; 02, unloading transmission mechanism; 03, unloading motor; 04, chassis; 05, loading motor; 06, loading transmission mechanism; 07, X-ray emitting mechanism; 08, positioning detection mechanism; 09, displacement loading mechanism; 10, gate; 71, peripheral X-ray source; 72, central X-ray source; 73, X-ray motor; 74, X-ray bracket; 91, X-ray receiving mechanism; 92, transparent loading plate; 9 3. Receiving motor; 052. Receiver; 040. X-ray transmitter; 041. Through hole; 042. X-ray exit window; 043. Vacuum chamber; 044. Focusing electrode; 045. Gate; 046. Gate electrode; 047. Cathode electrode; 048. Focusing electrode; 049. Cathode; 0410. Target; 0411. Anode; 0412. Anode electrode; 0413. Cover plate; 1. Detection object; 94. Receiving bracket. DETAILED DESCRIPTION

[0054] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0055] See also Figure 1-Figure 8 As shown, the present invention provides an XRay-based detection device, which includes: a gate 10, a frame 01, a chassis 04, a loading and conveying mechanism 06, a unloading and conveying mechanism 02, a displacement loading mechanism 09, an X-ray emitting mechanism 07, an X-ray receiving mechanism 91, a controller and a positioning detection mechanism 08; the chassis 04 is a metal plate material with a lead layer on the inner side; the gate is a metal plate door coated with a lead layer, and the gate is an automatic lifting gate, and its control end is electrically connected to the control end of the controller;

[0056] The frame 01 is equipped with a gate, a chassis 04, a loading and conveying mechanism 06, a unloading and conveying mechanism 02, a displacement loading mechanism 09, an X-ray emitting mechanism 07, an X-ray receiving mechanism 91, a controller and a positioning detection mechanism 08. The displacement loading mechanism 09 is arranged between the loading and conveying mechanism 06 and the unloading and conveying mechanism 02. The loading and conveying mechanism 06 is used to transfer the detection object 1 to the displacement loading mechanism 09 and carry it to the unloading and conveying mechanism 02. The displacement loading mechanism 09 is used to shift the detection object 1 to the detection position. The unloading mechanism is used to move the detection object 1 to the unloading position. The X-ray emitting mechanism 07 is arranged above the displacement loading mechanism 09. The X-ray receiving mechanism 91 is arranged On the displacement carrier mechanism 09, the chassis 04 covers the loading and conveying mechanism 06, the unloading and conveying mechanism 02, the displacement carrier mechanism 09, the X-ray emitting mechanism 07, the X-ray receiving mechanism 91 and the positioning detection mechanism 08, and the gates are respectively arranged at the feeding end of the loading and conveying mechanism 06 and the discharging end of the unloading and conveying mechanism 02, and the gates are used to form a closed whole with the chassis during X-ray detection and prevent X-rays from entering the outside, and the control ends of the loading and conveying mechanism 06, the unloading and conveying mechanism 02, the displacement carrier mechanism 09, the X-ray emitting mechanism 07, the X-ray receiving mechanism 91 and the positioning detection mechanism 08 are respectively electrically connected to the control end of the controller;

[0057] The feeding transmission mechanism 06 includes a feeding bracket, a feeding conveyor belt, a feeding motor 05, a feeding main wheel and a feeding auxiliary wheel. The feeding bracket and the feeding motor 05 are both mounted on the frame 01. The feeding main wheel and the feeding auxiliary wheel are both rotatably mounted on the feeding bracket. The feeding conveyor belt is mounted on the feeding main wheel and the feeding auxiliary wheel. The control end of the feeding motor 05 is electrically connected to the control end of the controller, and the driving end of the feeding motor 05 is connected to the driven end of the feeding main wheel. The feeding conveyor belt is provided with a plurality of convex points, which are used to push the detection object 1 onto the displacement carrier mechanism 09.

[0058] Among them, the unloading transmission mechanism 02 includes an unloading bracket, an unloading conveyor belt, an unloading motor 03, an unloading main wheel and an unloading auxiliary wheel. The unloading bracket and the unloading motor 03 are both installed on the frame 01, the unloading main wheel and the unloading auxiliary wheel are both rotatably installed on the unloading bracket, the unloading conveyor belt is installed on the unloading main wheel and the unloading auxiliary wheel, the control end of the unloading motor 03 is electrically connected to the control end of the controller, and the driving end of the unloading motor 03 is connected to the driven end of the unloading main wheel; a plurality of convex points are provided on the unloading conveyor belt, and the convex points are used to scrape the detection object 1 to the unloading area;

[0059] The displacement loading mechanism 09 includes a displacement slide, a displacement slide, a displacement cylinder and a transparent loading plate 92. The displacement slide and the displacement cylinder are both mounted on the frame 01. The displacement slide is slidably mounted on the displacement slide. The X-ray receiving mechanism 91 is mounted on the displacement slide. The transparent loading plate 92 is mounted on the X-ray receiving mechanism 91. The X-ray emitting mechanism 07 emits X-rays to the detection object 1 on the transparent loading plate 92, and the X-rays are received by the X-ray receiving mechanism 91. The control end of the displacement cylinder is electrically connected to the control end of the controller, and the driving end of the displacement cylinder is connected to the displacement slide.

[0060] The positioning detection mechanism 08 includes a visual detection sensor and an adjustment bracket, the adjustment bracket is mounted on the frame 01, the visual detection sensor is mounted on the adjustment bracket, the adjustment bracket is used to adjust the position of the visual detection sensor, and the control end of the visual detection sensor is electrically connected to the control end of the controller; the visual detection sensor selects a CCD camera; the adjustment bracket selects a two-dimensional displacement platform or a one-dimensional displacement platform;

[0061] The X-ray emitting mechanism 07 and the X-ray receiving mechanism 91 are arranged in a one-to-one correspondence and cooperate with each other. The X-ray emitting mechanism 07 is used to emit X-rays and transmit them to the X-ray receiving mechanism 91 through the displacement carrier mechanism 09 for reception.

[0062] The X-ray emitting mechanism 07 includes an X-ray emitter 040, an X-ray bracket 74 and an X-ray motor 73. The X-ray motor 73 is mounted on the frame 01. The X-ray bracket 74 is mounted on the driving end of the X-ray motor 73. The X-ray motor 73 drives the X-ray bracket 74 to rotate. The X-ray emitter 040 is mounted on the X-ray bracket 74. The control end of the X-ray motor 73 is electrically connected to the control end of the controller. The X-ray emitter 040 includes an X-ray source and an X-ray adjuster. The X-ray source is mounted on the X-ray bracket 74. On the ray bracket 74, an X-ray adjuster is installed at the exit end of the X-ray source, and the X-ray adjuster is used to adjust the size of the exit beam of the X-ray source; the X-ray adjuster selects a cover plate 0413 with a through hole 041, and the cover plate 0413 with a through hole 041 is installed at the exit end of the X-ray source, the through hole 041 and the exit end correspond to each other, and the through hole 041 is used to adjust the size of the exit beam of the X-ray source; the through hole 041 selects a circular through hole or a square through hole; the cover plate 0413 selects a cover plate made of metal lead;

[0063] The X-ray emitter 040 includes a central X-ray source 72, a central X-ray adjuster, a peripheral X-ray source 71 and a peripheral X-ray adjuster. The central X-ray source 72 and the peripheral X-ray source 71 are both mounted on an X-ray bracket 74, and the central X-ray source 72 is arranged at the center of the X-ray bracket 74, and the peripheral X-ray source 71 is arranged at the periphery of the X-ray bracket 74. The central X-ray source 72 is provided with a central X-ray adjuster, and the peripheral X-ray source 71 is provided with a peripheral X-ray adjuster. At least one of the peripheral X-ray source 71 and the peripheral X-ray adjuster is selected. If more than two are selected, they are evenly arranged, such as: more than two of the peripheral X-ray source 71 and the peripheral X-ray adjuster are selected, and the peripheral X-ray source 71 and the peripheral X-ray adjuster are evenly arranged around the central X-ray source 72. The peripheral X-ray source 71 and the peripheral X-ray adjuster are both at an angle of 0°-90° to the vertical. The X-ray emitter 040 includes The invention comprises an X-ray exit window 042, a vacuum chamber 043, a focusing electrode 044, a gate 045, a gate electrode 046, a cathode electrode 047, a focusing electrode 048, a cathode 049, a target material 0410, an anode 0411 and an anode electrode 0412. The target material 0410 is placed in the vacuum chamber 043. The anode 0411 of the target material 0410 is electrically connected to the anode electrode 0412. The X-ray exit window 042 is provided at the outlet end of the target material 0410. 042 is covered with a cover plate 0413 with a through hole 041, and a focusing electrode 044, a grid electrode 045 and a cathode 049 are arranged in a vacuum chamber 043 corresponding to the outlet end of the target material 0410, and the focusing electrode 044, the grid electrode 045 and the cathode 049 are electrically connected to the focusing electrode electrode 048, the grid electrode 046 and the cathode electrode 047 respectively, and the anode electrode 0412, the focusing electrode electrode 048, the grid electrode 046 and the cathode electrode 047 are electrically connected to the control end of the controller respectively;

[0064] The X-ray receiving mechanism 91 includes a receiving bracket 94, a receiving motor 93, a central receiver 052 and a peripheral receiver 052. The receiving motor 93 is mounted on a displacement slide. The receiving bracket 94 is mounted on the driving end of the receiving motor 93. The central receiver 052 and the peripheral receiver 052 are both mounted on the receiving bracket 94. The central receiver 052 corresponds to the central X-ray source 72, and the peripheral X-ray source 71 corresponds to the peripheral receiver 052. The control end of the receiving motor 93 is electrically connected to the control end of the controller. A transparent carrier plate 92 is also mounted on the receiving bracket 94. The receiving motor 93 drives the receiving bracket 94 to rotate, and the receiving motor 93 and the X-ray motor 73 are synchronous rotating motors.

[0065] Among them, the control end of the controller is electrically connected to the control end of the X-ray emitting mechanism 07 and the X-ray receiving mechanism 91 respectively; the controller includes a high-voltage power supply module, a grid power supply module, a focusing electrode power supply module, a power management system and a communication module, the high-voltage power supply module is electrically connected to the power management system, the power management system is electrically connected to the grid power supply module, the focusing electrode power supply module and the communication module respectively, the grid power supply module and the focusing electrode power supply module are electrically connected to the X-ray emitting mechanism respectively; the detection device also includes a computer, the communication end of the computer is electrically connected to the communication module of the controller and the communication end of the X-ray receiving mechanism respectively, and the collection end of the computer is electrically connected to the collection end of the X-ray receiving mechanism.

[0066] Among them, a process method of a detection device based on XRay, the process method steps are as follows:

[0067] Step 1: Preparation of transparent carrier plate 92

[0068] An optical quartz glass plate of a certain thickness is selected, cut into a circular quartz substrate, then placed in anhydrous ethanol and allowed to stand for 1 hour, and the anhydrous ethanol is rinsed off with deionized water, and finally dried to prepare a circular quartz plate;

[0069] The circular quartz plate is placed on an electrolytic polishing machine, the circular quartz plate is connected to the positive terminal, and a stainless steel plate is used to connect the negative terminal, a sulfuric acid solution is selected as the electrolyte in the electrolytic polishing machine, the electrolytic polishing machine is started, and the circular quartz plate is polished to prepare a polished quartz plate;

[0070] The polished quartz plate is placed in a polishing machine with a diamond having a diameter of 5 nm for polishing to prepare a finely polished quartz plate;

[0071] The polished quartz plate was placed in a microwave CVD reactor, and the temperature in the reactor was raised to 1000°C. 4 / N 2 / H 2 The mixed plasma deposits a nano-diamond layer on the surface of the finely polished quartz plate to prepare a transparent carrier plate 92 .

[0072] Step 2: Production of X-ray emitter 040

[0073] Select an X-ray exit window 042, a vacuum chamber 043, a focusing electrode 044, a gate 045, a gate electrode 046, a cathode electrode 049 047, a focusing electrode electrode 048, a cathode 049, a target 0410, an anode 0411 and an anode electrode 0412, place the target 0410 in the vacuum chamber 043, the anode 0411 of the target 0410 is electrically connected to the anode electrode 0412, an X-ray exit window 042 is provided at the outlet end of the target 0410, and a strip is covered on the X-ray exit window 042. A cover plate 0413 with a through hole 041 is provided, and a focusing electrode 044, a grid electrode 045 and a cathode 049 are arranged in a vacuum chamber 043 corresponding to the outlet end of the target material 0410. The focusing electrode 044, the grid electrode 045 and the cathode 049 are electrically connected to the focusing electrode electrode 048, the grid electrode 046 and the cathode 049 electrode 047 respectively, and the anode electrode 0412, the focusing electrode electrode 048, the grid electrode 046 and the cathode 049 electrode 047 are electrically connected to the control end of the controller respectively, so as to manufacture an X-ray emitter 040;

[0074] Step 3: Assembly of the detection device

[0075] Select the gate, rack 01, chassis 04, loading bracket, loading conveyor belt, loading motor 05, loading main wheel, loading auxiliary wheel, unloading bracket, unloading conveyor belt, unloading motor 03, unloading main wheel, unloading auxiliary wheel, displacement slide rail, displacement slide seat, displacement cylinder, transparent carrier plate 92, central X-ray source 72, central X-ray adjuster, peripheral X-ray source 71, peripheral X-ray adjuster, X-ray bracket 74, X-ray motor 73, receiving bracket 94, receiving motor 93, central receiver 052, peripheral receiver 052, controller, visual detection sensor and adjustment bracket, among which, the transparent carrier plate 92 is selected from step one, and the X-ray emitter 040 is selected from step one. Second X-ray emitter 040; the loading bracket and the loading motor 05 are both installed on the frame 01, the loading main wheel and the loading auxiliary wheel are both rotatably installed on the loading bracket, the loading conveyor belt is installed on the loading main wheel and the loading auxiliary wheel, the control end of the loading motor 05 is electrically connected to the control end of the controller, and the driving end of the loading motor 05 is connected to the driven end of the loading main wheel; the unloading bracket and the unloading motor 03 are both installed on the frame 01, the unloading main wheel and the unloading auxiliary wheel are both rotatably installed on the unloading bracket, the unloading conveyor belt is installed on the unloading main wheel and the unloading auxiliary wheel, the control end of the unloading motor 03 is electrically connected to the control end of the controller, and the driving end of the unloading motor 03 is connected to the driven end of the unloading main wheel; the displacement slide rail and the displacement cylinder are both installed It is installed on the frame 01, and the displacement slide and the displacement cylinder are arranged on the gap between the loading conveyor belt and the unloading conveyor belt, the displacement slide is slidably installed on the displacement slide, the driving end of the displacement cylinder is connected to the displacement slide, the receiving bracket 94 is installed on the displacement slide, and the receiving bracket 94 is installed with a receiving motor 93, the central receiver 052 and the peripheral receiver 052 are both installed on the driving end of the receiving motor 93, the control end of the receiving motor 93 is electrically connected to the control end of the controller, the displacement carrier is installed on the driving end of the receiving motor 93, and the displacement carrier is on the same plane as the loading conveyor belt and the unloading conveyor belt; the adjustment bracket is installed on the frame 01 and is arranged above the displacement carrier, and the visual detection sensor is installed Installed on an adjustment bracket, the adjustment bracket is used to adjust the position of the visual detection sensor, and the control end of the visual detection sensor is electrically connected to the control end of the controller; the X-ray bracket 74 is installed on the frame 01, and an X-ray motor 73 is installed on the X-ray bracket 74, and the control end of the X-ray motor 73 is electrically connected to the control end of the controller, the central X-ray source 72 and the peripheral X-ray source 71 are both installed on the driving end of the X-ray motor 73, and the central X-ray source 72 is arranged at the center of the driving end of the X-ray motor 73, and the peripheral X-ray source 71 is arranged at the periphery of the driving end of the X-ray motor 73, and the central X-ray source 72 is provided with a central X-ray adjuster, and the peripheral X-ray source 71 is provided with a peripheral X-ray adjuster;The chassis is covered on a loading bracket, a loading conveyor belt, a loading motor, a loading main wheel, a loading auxiliary wheel, a discharging bracket, a discharging conveyor belt, a discharging motor, a discharging main wheel, a discharging auxiliary wheel, a displacement slide rail, a displacement slide seat, a displacement cylinder, a transparent carrier plate, a central X-ray source, a central X-ray adjuster, a peripheral X-ray source, a peripheral X-ray adjuster, an X-ray bracket, an X-ray motor, a receiving bracket, a receiving motor, a central receiver, a peripheral receiver, a visual detection sensor and an adjustment bracket, and gates are respectively arranged at the feeding end of the loading bracket and the discharging end of the discharging bracket, and the gates are used to form a closed whole with the chassis during X-ray detection and prevent X-rays from entering the outside;

[0076] Step 4: Control setup

[0077] Select the detection device of step three, and combine the controller including the high-voltage power supply module, the gate 045 power supply module, the focusing pole 044 power supply module, the power management system and the communication module, the high-voltage power supply module is electrically connected to the power management system, the power management system is electrically connected to the gate 045 power supply module, the focusing pole 044 power supply module and the communication module respectively, the gate 045 power supply module and the focusing pole 044 power supply module are electrically connected to the X-ray emitting mechanism 07 respectively, wherein there is also a computer, the communication end of the computer is electrically connected to the communication module of the controller and the communication end of the X-ray receiving mechanism 91 respectively, and the collection end of the computer is electrically connected to the collection end of the X-ray receiving mechanism 91, so as to produce an XRay detection device.

[0078] Specific implementation mode of the present invention: After assembling the detector, the detector can place the X-ray emitting device at the bottom and the X-ray receiving device at the top, or the opposite setting can be performed, that is, the detector can place the X-ray emitting device at the top and the X-ray receiving device at the bottom; the operation of the detector is controlled by a computer-controlled controller, and the X-ray emitting device emits XRay to the through hole to adjust the beam size, and then irradiates the object to be detected 1, and then the signal is collected on the X-ray receiving device; in addition, the X-ray emitting device and the X-ray receiving device are respectively installed on the rotating mechanism, and through the synchronous rotation up and down, they can turn and stop N times (N≥1) and irradiate the object to be detected multiple times.

[0079] Reference Fig. 9 As shown, a smooth and transparent transparent carrier plate can be prepared by this process method, that is, Fig. 9 C in; see Fig.10 As shown, its microscopic morphology is uniform and free of impurities.

[0080] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A detection device based on XRay, characterized in that: The detection device includes: a gate, a frame, a chassis, a loading and conveying mechanism, a unloading and conveying mechanism, a displacement loading mechanism, an X-ray emitting mechanism, an X-ray receiving mechanism, a controller and a positioning detection mechanism. The gate, the chassis, the loading and conveying mechanism, the unloading and conveying mechanism, the displacement loading mechanism, the X-ray emitting mechanism, the X-ray receiving mechanism, the controller and the positioning detection mechanism are installed on the frame. The displacement loading mechanism is arranged between the loading and conveying mechanism and the unloading and conveying mechanism. The loading and conveying mechanism is used to transfer the detection object to the displacement loading mechanism and carry it to the unloading and conveying mechanism. The displacement loading mechanism is used to shift the detection object to the detection position. The unloading mechanism is used to move the detection object to the unloading position. The X-ray receiving mechanism is used to control the detection object to the detection position. The line emitting mechanism is arranged above the displacement carrier mechanism, the X-ray receiving mechanism is arranged on the displacement carrier mechanism, the chassis cover is on the loading and conveying mechanism, the unloading and conveying mechanism, the displacement carrier mechanism, the X-ray emitting mechanism, the X-ray receiving mechanism and the positioning detection mechanism, the gates are respectively arranged at the feeding end of the loading and conveying mechanism and the discharging end of the unloading and conveying mechanism, the gates are used to form a closed whole with the chassis during X-ray detection and prevent X-rays from entering the outside, and the control ends of the loading and conveying mechanism, the unloading and conveying mechanism, the displacement carrier mechanism, the X-ray emitting mechanism, the X-ray receiving mechanism and the positioning detection mechanism are respectively electrically connected to the control end of the controller.

2. The XRay-based detection device according to claim 1, characterized in that: The feeding and conveying mechanism includes a feeding bracket, a feeding conveyor belt, a feeding motor, a feeding main wheel and a feeding auxiliary wheel. The feeding bracket and the feeding motor are both installed on the frame. The feeding main wheel and the feeding auxiliary wheel are both rotatably installed on the feeding bracket. The feeding conveyor belt is installed on the feeding main wheel and the feeding auxiliary wheel. The control end of the feeding motor is electrically connected to the control end of the controller, and the driving end of the feeding motor is connected to the driven end of the feeding main wheel.

3. The XRay-based detection device according to claim 1, characterized in that: The unloading transmission mechanism includes an unloading bracket, an unloading conveyor belt, an unloading motor, an unloading main wheel and an unloading auxiliary wheel. The unloading bracket and the unloading motor are both installed on the frame. The unloading main wheel and the unloading auxiliary wheel are both rotatably installed on the unloading bracket. The unloading conveyor belt is installed on the unloading main wheel and the unloading auxiliary wheel. The control end of the unloading motor is electrically connected to the control end of the controller, and the driving end of the unloading motor is connected to the driven end of the unloading main wheel.

4. The XRay-based detection device according to claim 1, characterized in that: The displacement loading mechanism includes a displacement slide rail, a displacement slide seat, a displacement cylinder and a transparent loading plate. The displacement slide rail and the displacement cylinder are both installed on the frame. The displacement slide seat is slidably installed on the displacement slide rail. The X-ray receiving mechanism is installed on the displacement slide seat. The transparent loading plate is installed on the X-ray receiving mechanism. The X-ray transmitting mechanism transmits X-rays to the detection object on the transparent loading plate, and the X-rays are received by the X-ray receiving mechanism. The control end of the displacement cylinder is electrically connected to the control end of the controller, and the driving end of the displacement cylinder is connected to the displacement slide seat.

5. The XRay-based detection device according to claim 1, characterized in that: The positioning detection mechanism includes a visual detection sensor and an adjustment bracket, the adjustment bracket is installed on the frame, the visual detection sensor is installed on the adjustment bracket, the adjustment bracket is used to adjust the position of the visual detection sensor, and the control end of the visual detection sensor is electrically connected to the control end of the controller.

6. The XRay-based detection device according to claim 1, characterized in that: The X-ray emitting mechanism and the X-ray receiving mechanism are arranged in one-to-one correspondence and cooperate with each other. The X-ray emitting mechanism is used to emit X-rays and transmit them to the X-ray receiving mechanism for reception through the displacement carrier mechanism.

7. The XRay-based detection device according to claim 6, characterized in that: The X-ray emitting mechanism comprises an X-ray emitter, an X-ray bracket and an X-ray motor, wherein the X-ray motor is mounted on the frame, the X-ray bracket is mounted on the driving end of the X-ray motor, the X-ray emitter is mounted on the X-ray bracket, and the control end of the X-ray motor is electrically connected to the control end of the controller.

8. The XRay-based detection device according to claim 7, characterized in that: The X-ray emitter includes an X-ray source and an X-ray adjuster. The X-ray source is installed on the X-ray bracket. The X-ray adjuster is installed at the output end of the X-ray source, and the X-ray adjuster is used to adjust the size of the output beam of the X-ray source.

9. The XRay-based detection device according to claim 8, characterized in that: The X-ray adjuster selects a cover plate with a through hole, which is installed at the output end of the X-ray source. The through hole corresponds to the output end, and the through hole is used to adjust the size of the output beam of the X-ray source.

10. A process method for an X-Ray-based detection device, characterized in that: The process steps are as follows: Step 1: Preparation of transparent carrier plate An optical quartz glass plate of a certain thickness is selected, cut into a circular quartz substrate, then placed in anhydrous ethanol and allowed to stand for 1 hour, and the anhydrous ethanol is rinsed off with deionized water, and finally dried to prepare a circular quartz plate; The circular quartz plate is placed on an electrolytic polishing machine, the circular quartz plate is connected to the positive terminal, and a stainless steel plate is used to connect the negative terminal, a sulfuric acid solution is selected as the electrolyte in the electrolytic polishing machine, the electrolytic polishing machine is started, and the circular quartz plate is polished to prepare a polished quartz plate; The polished quartz plate is placed in a polishing machine with a diamond having a diameter of 5 nm for polishing to prepare a finely polished quartz plate; The polished quartz plate is placed in a microwave CVD reactor, and then the temperature in the reactor is raised to 1000°C, and a nano-diamond layer is deposited on the surface of the polished quartz plate using a CH4 / N2 / H2 mixed plasma to prepare a transparent carrier plate; Step 2: Making the X-ray Emitter An X-ray exit window, a vacuum chamber, a focusing electrode, a grid, a grid electrode, a cathode electrode, a focusing electrode electrode, a cathode, a target material, an anode and an anode electrode are selected, a target material is placed in the vacuum chamber, an anode of the target material is electrically connected to the anode electrode, an X-ray exit window is provided at the outlet end of the target material, a cover plate with a through hole is covered on the X-ray exit window, a focusing electrode, a grid and a cathode are provided in the vacuum chamber corresponding to the outlet end of the target material, the focusing electrode, the grid and the cathode are electrically connected to the focusing electrode, the grid electrode and the cathode electrode respectively, and the anode electrode, the focusing electrode, the grid electrode and the cathode electrode are electrically connected to the control end of the controller respectively, to manufacture an X-ray emitter; Step 3: Assembly of the detection device Select gates, racks, chassis, loading brackets, loading conveyor belts, loading motors, loading main wheels, loading auxiliary wheels, unloading brackets, unloading conveyor belts, unloading motors, unloading main wheels, unloading auxiliary wheels, displacement slide rails, displacement slide seats, displacement cylinders, transparent carrier plates, central X-ray sources, central X-ray adjusters, peripheral X-ray sources, peripheral X-ray adjusters, X-ray brackets, X-ray motors, receiving brackets, receiving motors, central receivers, peripheral receivers, controllers, visual detection sensors and adjustment brackets, wherein the transparent carrier plate is the transparent carrier plate of step one, and the X-ray source is the X-ray emitter of step two. ; The loading bracket and the loading motor are both installed on the frame, the loading main wheel and the loading auxiliary wheel are both rotatably installed on the loading bracket, the loading conveyor belt is installed on the loading main wheel and the loading auxiliary wheel, the control end of the loading motor is electrically connected to the control end of the controller, and the driving end of the loading motor is connected to the driven end of the loading main wheel; the unloading bracket and the unloading motor are both installed on the frame, the unloading main wheel and the unloading auxiliary wheel are both rotatably installed on the unloading bracket, the unloading conveyor belt is installed on the unloading main wheel and the unloading auxiliary wheel, the control end of the unloading motor is electrically connected to the control end of the controller, and the driving end of the unloading motor is connected to the driven end of the unloading main wheel; the displacement slide rail and the displacement The cylinders are all installed on the frame, and the displacement slide rail and the displacement cylinder are set on the gap between the loading conveyor belt and the unloading conveyor belt. The displacement slide seat is slidably installed on the displacement slide rail. The driving end of the displacement cylinder is connected to the displacement slide seat. The receiving motor is installed on the displacement slide seat. The receiving bracket is installed on the driving end of the receiving motor. The central receiver and the peripheral receiver are both installed on the receiving bracket. The control end of the receiving motor is electrically connected to the control end of the controller. The displacement carrier is installed on the receiving bracket. The displacement carrier is on the same plane as the loading conveyor belt and the unloading conveyor belt; the adjustment bracket is installed on the frame and is set above the displacement carrier plate. The visual detection sensor is installed on an adjustment bracket, the adjustment bracket is used to adjust the position of the visual detection sensor, and the control end of the visual detection sensor is electrically connected to the control end of the controller; the X-ray motor is installed on the frame, the X-ray bracket is installed on the X-ray motor, the control end of the X-ray motor is electrically connected to the control end of the controller, the central X-ray source and the peripheral X-ray source are both installed on the X-ray bracket, and the central X-ray source is arranged at the center of the X-ray bracket, and the peripheral X-ray source is arranged at the periphery of the X-ray bracket, the central X-ray source is provided with a central X-ray adjuster, and the peripheral X-ray source is provided with a peripheral X-ray adjuster;The chassis is covered on a loading bracket, a loading conveyor belt, a loading motor, a loading main wheel, a loading auxiliary wheel, a discharging bracket, a discharging conveyor belt, a discharging motor, a discharging main wheel, a discharging auxiliary wheel, a displacement slide rail, a displacement slide seat, a displacement cylinder, a transparent carrier plate, a central X-ray source, a central X-ray adjuster, a peripheral X-ray source, a peripheral X-ray adjuster, an X-ray bracket, an X-ray motor, a receiving bracket, a receiving motor, a central receiver, a peripheral receiver, a visual detection sensor and an adjustment bracket, and gates are respectively arranged at the feeding end of the loading bracket and the discharging end of the discharging bracket, and the gates are used to form a closed whole with the chassis during X-ray detection and prevent X-rays from entering the outside; Step 4: Control setup Select the detection device of step three, and combine a controller including a high-voltage power supply module, a gate power supply module, a collecting electrode power supply module, a power management system and a communication module, wherein the high-voltage power supply module is electrically connected to the power management system, and the power management system is electrically connected to the gate power supply module, the collecting electrode power supply module and the communication module respectively, and the gate power supply module and the collecting electrode power supply module are electrically connected to the X-ray emitting mechanism respectively, wherein there is also a computer, and the communication end of the computer is electrically connected to the communication module of the controller and the communication end of the X-ray receiving mechanism respectively, and the collection end of the computer is electrically connected to the collection end of the X-ray receiving mechanism, so as to produce an XRay detection device.

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