Double-washing and double-heating type tail gas treatment system

Abstract

The invention provides a double-washing and double-heating type tail gas treatment system which is provided with a first washing device, a first heating device, a second heating device and a second washing device, so that multi-stage treatment of tail gas generated in the production process is realized; water-soluble harmful gas and solid particles in the tail gas can be preliminarily removed by washing for the first time; in the first heating, the tail gas after the first water washing can be preheated; through secondary heating, combustible components in the tail gas can be converted into harmless and soluble components through high-temperature combustion; and through secondary water washing, the tail gas after combustion can be cooled, particle impurities and soluble components in the tail gas can be removed, and purification of the tail gas is ensured. Meanwhile, the system adopts an integrated design, all devices are compactly connected, the loss of intermediate links is reduced, and the occupied area of the system is effectively saved while the throughput is improved.

Description

Technical Field

[0001] The present application relates to the technical field of semiconductor production tail gas treatment equipment, and in particular to a double-water-washing and double-heating tail gas treatment system. Background Art

[0002] In the field of semiconductor production, the chip manufacturing process involves a variety of complex process steps, each of which produces specific by-products and tail gas. With the continuous upgrading of technology and materials, the tail gas components produced by different processes are also different. In the epitaxial growth process of silicon carbide chips, chemical vapor deposition technology is usually used, and hydrogen and other gases are used as precursor gases. Therefore, during the epitaxial growth process, the precursor gas will react with the gas in the reaction chamber to generate silicon carbide film. At the same time, tail gas containing components such as hydrogen, hydrogen chloride, and solid particles will be produced. In order to ensure safe production and environmental protection, the tail gas generated by the silicon carbide epitaxial process needs to be effectively treated. Summary of the invention

[0003] In order to solve the above technical problems, the present application provides a double water washing and double heating exhaust gas treatment system, comprising a first water washing device, a first water tank, a first heating device, a second heating device, a second water tank, and a second water washing device connected in sequence; the first water washing device is used to perform the first water washing on the exhaust gas entering the system to remove water-soluble impurities in the exhaust gas; the first heating device is used to preheat the exhaust gas after the first water washing; the second heating device is used to heat the exhaust gas again to burn the combustible substances in the exhaust gas; the second water washing device is used to cool the exhaust gas after combustion and remove particulate impurities and soluble components in the exhaust gas.

[0004] In some embodiments of the present application, the first water washing device includes a first gas mixing chamber, a first water washing chamber and a second water washing chamber are arranged in parallel at the lower part of the first gas mixing chamber, and the bottoms of the first water washing chamber and the second water washing chamber are both connected to the first water tank.

[0005] In some embodiments of the present application, a filter plate is disposed on the upper portion of each of the first water washing chamber and the second water washing chamber, a filter body is disposed on the upper portion of the filter plate, and a multi-layer spray assembly is disposed on the lower portion of the filter plate.

[0006] In some embodiments of the present application, the second water washing device includes a second gas mixing chamber, a third water washing chamber and a fourth water washing chamber are arranged in parallel at the lower part of the second gas mixing chamber, and the bottoms of the third water washing chamber and the fourth water washing chamber are both connected to the second water tank.

[0007] In some embodiments of the present application, the first heating device includes a first heating chamber arranged on the first water tank, and a first heating component is arranged in the first heating chamber; the second heating device includes a second heating chamber arranged on the second water tank, and a second heating component is arranged in the second heating chamber; the upper parts of the first heating chamber and the second heating chamber are connected to a connecting chamber.

[0008] In some embodiments of the present application, an exhaust chamber is provided at the upper portion of the second mixing chamber, and the exhaust chamber includes a first exhaust chamber, a second exhaust chamber and a third exhaust chamber connected in sequence from bottom to top, and the diameter of the second exhaust chamber gradually decreases from bottom to top.

[0009] In some embodiments of the present application, an air intake cavity is disposed outside the first exhaust cavity, and a plurality of connecting holes are disposed between the air intake cavity and the second exhaust cavity.

[0010] In some embodiments of the present application, the plurality of connecting holes are arranged at equal intervals along the circumferential direction, and the extending direction of the connecting holes converges from bottom to top toward the center of the second exhaust cavity.

[0011] In some embodiments of the present application, the first water washing device includes a first gas mixing chamber, a first water washing chamber is provided at the lower part of the first gas mixing chamber, and the bottom of the first water washing chamber is connected to the first water tank.

[0012] In some embodiments of the present application, the second water washing device includes a second gas mixing chamber, a third water washing chamber is provided at the lower part of the second gas mixing chamber, and the bottom of the third water washing chamber is connected to the second water tank.

[0013] Compared with the prior art, the present invention has the following advantages and beneficial effects: the double-water-washing and double-heating tail gas treatment system of the present application realizes multi-stage treatment of tail gas generated in the production process by setting a first water-washing device, a first heating device, a second heating device, and a second water-washing device; the first water-washing can preliminarily remove water-soluble harmful gases and solid particles in the tail gas; the first heating can preheat the tail gas after the first water-washing; the second heating can convert the combustible components in the tail gas into harmless and soluble components through high-temperature combustion; the second water-washing can cool the tail gas after combustion and remove particulate impurities and soluble components in the tail gas to ensure tail gas purification. At the same time, the system adopts an integrated design, and the various devices are compactly connected to reduce the loss of the intermediate links, which effectively saves the system footprint while improving the throughput.

[0014] It is to be understood that the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] The accompanying drawings constituting a part of this document are used to provide a further understanding of this document. The exemplary embodiments and descriptions of this document are used to explain this document and do not constitute an improper limitation on this document. In the accompanying drawings: Figure 1 It is a structural schematic diagram of a double-water-washing and double-heating tail gas treatment system provided by an exemplary embodiment of the present application; Figure 2 is a front view of a double-water-washing and double-heating exhaust gas treatment system provided by an exemplary embodiment of the present application; Figure 3 is a cross-sectional view of a double-water-washing and double-heating tail gas treatment system provided by an exemplary embodiment of the present application; Figure 4 is a front view of a double-water-washing and double-heating exhaust gas treatment system provided by another exemplary embodiment of the present application; Figure 5 is a front view of an exhaust cavity provided by an exemplary embodiment of the present application; Figure 6 yes Figure 5 Cross-sectional view at BB in the middle.

[0016] In the figure: 100, first water washing device; 101, air inlet pipe; 102, first air mixing chamber; 103, first water washing chamber; 104, second water washing chamber; 200, first water tank; 300, first heating device; 301, first heating chamber; 400, second heating device; 401, connecting chamber; 402, second heating chamber; 403, second heating assembly; 500, second water tank; 600, second water washing device; 602, second air mixing chamber; 603, third water washing chamber; 604, fourth water washing chamber; 605, exhaust chamber; 6051, first exhaust chamber; 6052, second exhaust chamber; 6053, third exhaust chamber; 6054, air inlet chamber; 6055, connecting hole. DETAILED DESCRIPTION

[0017] In order to make the purpose, technical scheme and advantages of the embodiments of the present application clearer, the technical scheme in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, rather than all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in the field without making creative work are within the scope of protection of the present application. It should be noted that, in the absence of conflict, the embodiments in the present application and the features in the embodiments can be combined with each other arbitrarily.

[0018] In the field of semiconductor production, a large amount of exhaust gas is generated during the production of chips. Due to the continuous upgrading of technology and materials, the exhaust gas components generated by different processes are also different. In the epitaxial growth process of silicon carbide chips, chemical vapor deposition technology is usually used, and hydrogen and other gases are used as precursor gases. Therefore, during the epitaxial growth process, the precursor gas will react with the gas in the reaction chamber to generate silicon carbide film, and exhaust gas containing hydrogen, hydrogen chloride, solid particles and other components will be generated. In order to ensure safe production and environmental protection, the exhaust gas generated by the silicon carbide epitaxial process needs to be effectively treated.

[0019] Based on this, the exemplary embodiment of the present application provides a double-water-washing and double-heating tail gas treatment system. By setting a first water-washing device, a first heating device, a second heating device, and a second water-washing device, the multi-stage treatment of the tail gas generated in the production process is realized; the first water-washing can preliminarily remove the water-soluble harmful gases and solid particles in the tail gas; the first heating can preheat the tail gas after the first water-washing; the second heating can convert the combustible components in the tail gas into harmless and soluble components through high-temperature combustion; the second water-washing can cool the tail gas after combustion and remove the particulate impurities and soluble components in the tail gas to ensure tail gas purification. At the same time, the system adopts an integrated design, and the various devices are compactly connected to reduce the loss of the intermediate links, which effectively saves the system footprint while improving the throughput.

[0020] Embodiment 1: An exemplary embodiment of the present application provides a double-water-washing and double-heating tail gas treatment system, such as Figures 1 to 3 As shown, the tail gas treatment system includes a first water washing device 100, a first water tank 200, a first heating device 300, a second heating device 400, a second water tank 500, and a second water washing device 600 which are connected in sequence; the first water washing device 100 is used to wash the tail gas entering the system for the first time to remove water-soluble impurities in the tail gas; the first heating device 300 is used to preheat the tail gas after the first water washing; the second heating device 400 is used to heat the tail gas again to burn the combustible substances in the tail gas; the second water washing device 600 is used to cool the tail gas after combustion and remove particulate impurities and soluble components in the tail gas. In this way, after two water washings and two heating and combustion, the harmful components and particulate impurities in the tail gas can be fully removed to ensure tail gas purification; at the same time, the system adopts an integrated design, and the various devices are compactly connected to reduce the loss of the intermediate links, while improving the throughput, effectively saving the system footprint.

[0021] The first water washing device 100 includes a first mixing chamber 102, and a plurality of intake pipes 101 are arranged on the top of the first mixing chamber 102. The plurality of intake pipes 101 are evenly arranged and used to connect to an external exhaust gas delivery device so as to deliver exhaust gas to the system; a valve body is arranged on the intake pipe 101 to control the intake flow of each intake pipe 101. A first water washing chamber 103 and a second water washing chamber 104 are arranged in parallel at the lower part of the first mixing chamber 102, and an intake baffle is arranged between the first mixing chamber 102 and the first water washing chamber 103 and the second water washing chamber 104, and a plurality of diversion holes are distributed on the intake baffle, so that the exhaust gas entering the first mixing chamber 102 through the plurality of intake pipes 101 will be evenly mixed in the first mixing chamber 102, and evenly diverted through the intake baffle, so that the mixed exhaust gas is evenly diverted to the first water washing chamber 103 and the second water washing chamber 104, and the purpose of mixing exhaust gas, buffering airflow and even diversion is achieved at the same time.

[0022] The first water washing chamber 103 and the second water washing chamber 104 are both provided with filter plates at the top, a filter body is provided in the upper inner cavity of the filter plates, and a multi-layer spray assembly is provided at the bottom of the filter plates. The multi-layer spray assembly can spray water at the same time to wash the tail gas passing from top to bottom, so as to fully remove particulate impurities and water-soluble components in the tail gas. The outside of the multi-layer spray assembly is connected to the first water tank 200, and is externally connected to a filter device and a circulation device to realize the circulation of the spray water.

[0023] The bottoms of the first water washing chamber 103 and the second water washing chamber 104 are both connected to the first water tank 200. After being washed by the first water washing chamber 103 and the second water washing chamber 104, the exhaust enters the first water tank 200 and enters the first heating device 300 through the first water tank 200. The first water washing device 100 can regulate the exhaust pressure and stabilize the exhaust pressure by setting the first water washing chamber 103 and the second water washing chamber 104 to divert the exhaust gas intake. At the same time, the first water washing chamber 103 and the second water washing chamber 104 arranged in parallel increase the throughput of the system, improve the work efficiency, and dilute the concentration of the exhaust entering each water washing chamber, so that the water washing is more sufficient, so that the solid particles in the exhaust gas fully enter the water, and the water-soluble components are fully dissolved in the water, so as to deeply purify the exhaust gas.

[0024] like Figure 2As shown, the first heating device 300 includes a first heating chamber 301 disposed on the first water tank 200. The bottom of the first heating chamber 301 is interconnected with the first water tank 200. The tail gas after being washed by the first water washing device 100 enters the first heating device 300 through the first water tank 200 and flows upward from bottom to top. A first heating component is disposed in the first heating chamber 301. The first heating component can preheat the tail gas after washing. The first heating component includes a plurality of heating units. The heating unit is also provided with a thermocouple so as to detect the temperature in the first heating chamber 301 at any time and keep the temperature in the first heating chamber 301 constant. While heating the tail gas, compressed air can be introduced into the first heating chamber 301 to dilute the tail gas and accelerate the tail gas to flow to the second heating chamber 402.

[0025] The second heating device 400 includes a second heating chamber 402 disposed on the second water tank 500. The upper parts of the first heating chamber 301 and the second heating chamber 402 are both connected to the connecting chamber 401. After being preheated by the first heating chamber 301, the exhaust gas flowing through the first heating chamber 301 enters the connecting chamber 401 and then enters the second heating chamber 402. The bottom of the second heating chamber 402 is connected to the second water tank 500. A second heating assembly 403 is disposed in the second heating chamber 402. The second heating assembly 403 can heat the preheated exhaust gas. The second heating assembly 403 includes a plurality of heating units, and a thermocouple is also disposed on the heating unit to detect the temperature in the second heating chamber 402 at any time and keep the temperature in the second heating chamber 402 constant. While heating the exhaust gas, compressed air can be introduced into the second heating chamber 402 to provide sufficient oxygen for the combustion of the exhaust gas.

[0026] The exhaust gas after combustion enters the second water tank 500 from top to bottom, and then enters the second water washing device 600. The second water washing device 600 includes a second gas mixing chamber 602, and a third water washing chamber 603 and a fourth water washing chamber 604 are arranged in parallel at the lower part of the second gas mixing chamber 602, and the bottoms of the third water washing chamber 603 and the fourth water washing chamber 604 are both connected to the second water tank 500. The third water washing chamber 603 and the fourth water washing chamber 604 are both provided with multi-layer spraying components to cool the exhaust gas after combustion, and at the same time, remove particulate matter and water-soluble components in the exhaust gas to further purify the exhaust gas.

[0027] like Figures 4 to 6As shown, an exhaust chamber 605 is provided at the upper part of the second gas mixing chamber 602, and the exhaust chamber 605 includes a first exhaust chamber 6051, a second exhaust chamber 6052 and a third exhaust chamber 6053 connected in sequence from bottom to top, and the diameter of the second exhaust chamber 6052 gradually decreases from bottom to top. In this way, a venturi tube structure is formed between the first exhaust chamber 6051, the second exhaust chamber 6052 and the third exhaust chamber 6053, so that the exhaust gas flow rate passing through the first exhaust chamber 6051, the second exhaust chamber 6052 and the third exhaust chamber 6053 gradually increases and then gradually decreases, which can prevent the exhaust gas from flowing back and prevent the danger of exhaust gas backflow explosion.

[0028] Further, such as Figure 6 As shown, an air inlet chamber 6054 is provided outside the upper portion of the first exhaust chamber 6051, and the air inlet chamber 6054 is connected to compressed air. A plurality of connecting holes 6055 are provided between the air inlet chamber 6054 and the second exhaust chamber 6052. Compressed air can enter the second exhaust chamber 6052 through the connecting holes 6055 to accelerate the exhaust of the exhaust gas.

[0029] Preferably, the plurality of connecting holes 6055 are arranged at equal intervals along the circumferential direction, and the extending direction of the connecting holes 6055 converges from bottom to top toward the center of the second exhaust chamber 6052. In this way, the compressed air entering the second exhaust chamber 6052 through the connecting holes 6055 can form a Figure 6 The compressed air flow shown in the direction of the middle arrow, multiple groups of compressed air flows converge toward the center of the second exhaust chamber 6052 and the third exhaust chamber 6053, so that a negative pressure area is formed in the center of the first exhaust chamber 6051, further accelerating the upward flow of the tail gas after washing. At the same time, the formation of the negative pressure area can prevent the tail gas from flowing in the opposite direction, so that the tail gas can only flow along Figure 6 The exhaust gas flows in the direction of the middle arrow to prevent the risk of explosion caused by the reverse flow of exhaust gas.

[0030] In order to effectively remove the moisture in the tail gas after washing, a water vapor separation device is provided at the upper part of the third water washing chamber 603 and the fourth water washing chamber 604. The water vapor separation device can separate a large amount of water vapor contained in the tail gas after washing from the tail gas, so as to achieve the purpose of drying the tail gas. The water vapor separation device includes an air inlet, a plurality of cyclone exhaust channels are provided on the periphery of the air inlet, a cover plate is provided on the top of the air inlet to prevent the tail gas from flowing directly upward from the air inlet, a slit channel is provided between the air inlet and the cyclone exhaust channel, which is used to connect the air inlet and the cyclone exhaust channel, and the extension direction of the slit channel is tangent to the circumferential side wall of the cyclone exhaust channel, so that the tail gas can cut into the cyclone exhaust channel along the slit channel, increase the contact area between the tail gas and the circumferential side wall of the cyclone exhaust channel, so that the water vapor in the tail gas is better condensed on the circumferential side wall of the cyclone exhaust channel, so as to improve the effect of water vapor separation, and the condensed water droplets can fall down along the circumferential side wall of the cyclone exhaust channel to the second water tank 500.

[0031] Embodiment 2: An exemplary embodiment of the present application provides a double-water-washing and double-heating tail gas treatment system, which includes a first water-washing device 100, a first water tank 200, a first heating device 300, a second heating device 400, a second water tank 500, and a second water-washing device 600 connected in sequence; the first water-washing device 100 is used to wash the tail gas entering the system for the first time to remove water-soluble impurities in the tail gas; the first heating device 300 is used to preheat the tail gas after the first water-washing; the second heating device 400 is used to heat the tail gas again to burn the combustible material in the tail gas; the second water-washing device 600 is used to cool the tail gas after combustion and remove particulate impurities and soluble components in the tail gas. In this way, after two water-washings and two heatings and combustions, the harmful components and particulate impurities in the tail gas can be fully removed to ensure tail gas purification; at the same time, the system adopts an integrated design, and the various devices are compactly connected to reduce the loss of the intermediate links, while improving the throughput, effectively saving the system footprint.

[0032] The first water washing device 100 includes a first gas mixing chamber 102, a first water washing chamber 103 is provided at the lower part of the first gas mixing chamber 102, and the bottom of the first water washing chamber 103 is communicated with the first water tank 200. The second water washing device 600 includes a second gas mixing chamber 602, a third water washing chamber 603 is provided at the lower part of the second gas mixing chamber 602, and the bottom of the third water washing chamber 603 is communicated with the second water tank 500. In this embodiment, the first water washing device 100 and the second water washing device 600 are both provided with a water washing chamber. At this time, the tail gas can also be washed twice and heated twice to achieve full purification of the tail gas.

[0033] In other embodiments, the first water washing device 100 may also include more than two water washing chambers, and the second water washing device 600 may also include more than two water washing chambers. In this case, the exhaust gas can be more fully washed with water to improve the degree of purification of the exhaust gas.

[0034] In this application, the terms "comprises", "comprising" or any other variations thereof are intended to cover non-exclusive inclusion, so that an article or device comprising a series of elements includes not only those elements, but also other elements not explicitly listed, or elements inherent to such article or device. In the absence of more restrictions, an element defined by the sentence "comprising..." does not exclude the presence of other identical elements in the article or device comprising the element.

[0035] Although the preferred embodiments of the present application have been described, those skilled in the art may make other changes and modifications to these embodiments once they have learned the basic creative concept. Therefore, the appended claims are intended to be interpreted as including the preferred embodiments and all changes and modifications falling within the scope of the present application.

[0036] Obviously, those skilled in the art can make various changes and modifications to the present application without departing from the spirit and scope of the present application. Thus, if these modifications and variations of the present application fall within the scope of the claims of the present application and their equivalents, the intention of the present application also includes these modifications and variations.

Claims

1. A double-water-washing and double-heating tail gas treatment system, characterized in that: It includes a first water washing device, a first water tank, a first heating device, a second heating device, a second water tank, and a second water washing device which are connected in sequence; the first water washing device is used to perform the first water washing on the exhaust gas entering the system to remove water-soluble impurities in the exhaust gas; the first heating device is used to preheat the exhaust gas after the first water washing; the second heating device is used to heat the exhaust gas again to burn the combustible substances in the exhaust gas; the second water washing device is used to cool the exhaust gas after combustion and remove particulate impurities and soluble components in the exhaust gas.

2. The double-water-washing and double-heating tail gas treatment system according to claim 1 is characterized in that: The first water washing device comprises a first gas mixing chamber, a first water washing chamber and a second water washing chamber are arranged in parallel at the lower part of the first gas mixing chamber, and the bottoms of the first water washing chamber and the second water washing chamber are both connected to the first water tank.

3. The double-water-washing and double-heating tail gas treatment system according to claim 2 is characterized in that: A filter plate is disposed on the upper part of each of the first water washing chamber and the second water washing chamber, a filter body is disposed on the upper part of the filter plate, and a multi-layer spray assembly is disposed on the lower part of the filter plate.

4. The double-water-washing and double-heating tail gas treatment system according to claim 1 is characterized in that: The second water washing device comprises a second gas mixing chamber, a third water washing chamber and a fourth water washing chamber are arranged in parallel at the lower part of the second gas mixing chamber, and the bottoms of the third water washing chamber and the fourth water washing chamber are both connected to the second water tank.

5. The double-water-washing and double-heating tail gas treatment system according to claim 1 is characterized in that: The first heating device includes a first heating chamber arranged on the first water tank, and a first heating component is arranged in the first heating chamber; the second heating device includes a second heating chamber arranged on the second water tank, and a second heating component is arranged in the second heating chamber; the upper parts of the first heating chamber and the second heating chamber are both connected by a connecting chamber.

6. The double-water-washing and double-heating tail gas treatment system according to claim 4 is characterized in that: An exhaust cavity is disposed on the upper portion of the second gas mixing cavity. The exhaust cavity comprises a first exhaust cavity, a second exhaust cavity and a third exhaust cavity which are sequentially connected from bottom to top. The diameter of the second exhaust cavity gradually decreases from bottom to top.

7. The double-water-washing and double-heating tail gas treatment system according to claim 6 is characterized in that: An air intake cavity is disposed outside the first exhaust cavity, and a plurality of communication holes are disposed between the air intake cavity and the second exhaust cavity.

8. The double-water-washing and double-heating tail gas treatment system according to claim 7 is characterized in that: The plurality of communicating holes are arranged at equal intervals along the circumferential direction, and the extending direction of the communicating holes converges from bottom to top toward the center of the second exhaust cavity.

9. The double-water-washing and double-heating tail gas treatment system according to claim 1, characterized in that: The first water washing device comprises a first gas mixing chamber, a first water washing chamber is arranged at the lower part of the first gas mixing chamber, and the bottom of the first water washing chamber is connected to the first water tank.

10. The double-water-washing and double-heating tail gas treatment system according to claim 1, characterized in that: The second water washing device comprises a second gas mixing chamber, a third water washing chamber is arranged at the lower part of the second gas mixing chamber, and the bottom of the third water washing chamber is communicated with the second water tank.

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