Silane and chlorosilane waste gas treatment device

Abstract

The utility model relates to the technical field of waste gas purification treatment, in particular to a silane and chlorosilane waste gas treatment device which comprises a filter box, an induced draft fan and a purification tower, a gas outlet of the filter box is communicated with a gas inlet of the purification tower through the induced draft fan, and the filter box comprises a box body, a filter plate, a cleaning brush and a turning assembly. The box body is of a hollow cylinder structure and is transversely placed, the multiple filter plates are transversely arranged in the box body at intervals, the filter plates are rotationally installed in annular grooves formed in the inner wall of the box body, the cleaning brushes are arranged on the left sides of the filter plates, the top ends of the cleaning brushes are connected with the inner wall of the box body, and the turning assembly is arranged at the top end of the box body; the plurality of filter plates are driven to rotate synchronously; the filter plate is simple in structural design, and impurities and particles attached to the surface of the filter plate can be cleaned and collected.

Description

Technical Field

[0001] The utility model relates to the technical field of waste gas purification and treatment, in particular to a silane chlorosilane waste gas treatment device. Background Art

[0002] Silane chlorosilane waste gas is a toxic gas that is harmful to the ecological environment and human health. In order to protect the ecological environment and human health, silane chlorosilane waste gas needs to be purified before it is discharged into the atmosphere to meet environmental emission requirements.

[0003] At present, the commonly used purification system mainly uses a filter device to filter the exhaust gas to absorb impurities and particles contained in the exhaust gas, and then purifies it through an atomization tower before discharging it into the atmosphere, thereby achieving the purification and discharge of the exhaust gas. Since the filter device will absorb impurities and particles in the exhaust gas during the filtering process, it will cause too many impurities and particles attached to the surface of the filter screen in the long run. If it is not cleaned, the filtering effect of the filter device will be significantly reduced, thereby affecting the subsequent purification effect. Utility Model Content

[0004] The technical problem to be solved by the utility model is to overcome the deficiencies in the prior art and provide a silane chlorosilane waste gas treatment device which has a simple structural design and can clean and collect impurities and particles attached to the surface of a filter plate.

[0005] The utility model solves the technical problem by adopting the following technical solution: a silane chlorosilane waste gas treatment device, comprising a filter box, an induced draft fan and a purification tower, wherein the air outlet of the filter box is connected with the air inlet of the purification tower through the induced draft fan, the filter box comprises a box body, a filter plate, a cleaning brush and a rotation assembly, the box body is a hollow cylindrical structure and is placed horizontally, the filter plate is composed of a plurality of blocks, which are arranged in the box body at intervals along the horizontal direction, the filter plate is rotatably installed in an annular groove provided on the inner wall of the box body, the cleaning brush is arranged on the left side of the filter plate, and the top end thereof is connected to the inner wall of the box body, and the rotation assembly is arranged at the top end of the box body to drive the plurality of filter plates to rotate synchronously.

[0006] Furthermore, the rotation assembly includes a cover body, a rotating shaft, a gear, a gear ring and a driving member, the cover body is installed at the top of the box body, the two rotating shafts are arranged in the cover body along the lateral interval, the gears are respectively installed at the left and right ends of the rotating shaft, the gear ring is arranged in an annular groove and sleeved on the filter plate, the rim of the gear passes through the through hole opened in the top of the box body and meshes with the gear ring, and the driving member is installed in the middle of the cover body to drive the two rotating shafts to rotate synchronously.

[0007] Furthermore, the driving member includes a servo motor, a main bevel gear and a slave bevel gear. The servo motor is vertically installed in the middle of the cover body, and its output end extends into the cover body. The main bevel gear is installed at the output end of the servo motor, and the slave bevel gears are respectively installed at opposite ends of the rotating shaft. The main bevel gear is meshed with the slave bevel gear.

[0008] Furthermore, the cleaning brush includes a suspension rod and bristles, the suspension rod is vertically arranged, and the top end of the suspension rod is connected to the inner wall of the box body, and the bristles are spread on the right side of the suspension rod and contact the filter plate.

[0009] Furthermore, the purification tower includes a tower body, a purification layer and a circulating spray system. A liquid outlet is provided at the right bottom end of the tower body. The purification layer has two layers, which are arranged in the tower body at intervals along the longitudinal direction. One end of the circulating spray system is arranged above the purification layer, and the other end thereof is connected to the liquid outlet.

[0010] Furthermore, the circulating spray system includes a spray pipe, an atomizing nozzle, a circulating pump, a liquid outlet pipe and a circulating pipe. The spray pipes are respectively arranged above the purification layer, and the right ends thereof extend outside the tower body. The atomizing nozzles are distributed at the bottom ends of the spray pipes. The circulating pump is arranged on the right side of the tower body. The inlet of the circulating pump is connected to the liquid outlet through the liquid outlet pipe, and the outlet thereof is connected to the right end of the spray pipe through the circulating pipe.

[0011] Furthermore, the purification tower also includes a demisting layer and a filter ball arranged in the tower body, the demisting layer is arranged above the circulating spray system, and the filter ball is arranged at the liquid outlet.

[0012] Furthermore, the filter box also includes a filter collecting assembly, which includes a filter bin, a bidirectional screw, a push plate and a small motor. The filter bin is laterally arranged at the bottom end of the box body, the bidirectional screw is rotatably installed in the filter bin, the push plate is slidably installed in the filter bin, and is respectively threadedly sleeved on both ends of the bidirectional screw, the small motor is installed on the left side of the box body, and its output end is connected to the left end of the bidirectional screw, and a material drop channel and a material discharge port are provided at the bottom end of the box body, the material drop channel is arranged on the left side of the filter plate, the top end of the material drop channel is connected to the inner cavity of the box body, and the bottom end thereof is connected to the filter bin, and the material discharge port is arranged in the middle of the filter bin and is connected to the filter bin.

[0013] The beneficial effects of the utility model are:

[0014] (1) The utility model drives several filter plates to rotate synchronously by means of a rotating assembly, so that the cleaning brush cleans the impurities and particles attached to the surface of the filter plate, thereby avoiding the clogging of the filter screen caused by excessive impurities and particles, thereby ensuring the filtering effect and the subsequent purification effect;

[0015] (2) The utility model collects impurities and particles swept away by the cleaning brush by setting a filter collection component, thereby preventing them from accumulating in the inner cavity of the box and affecting the flow of exhaust gas, further ensuring the purification effect and making collection convenient. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] The utility model is further described below in conjunction with the accompanying drawings and implementation modes.

[0017] Figure 1 It is a structural schematic diagram of the utility model;

[0018] Figure 2 It is a cross-sectional view of the filter box in the utility model;

[0019] Figure 3 yes Figure 2 Enlarged view of part A in the middle;

[0020] Figure 4 It is a schematic diagram of the gear ring in the utility model;

[0021] Figure 5 It is a cross-sectional view of the purification tower in the utility model.

[0022] In the figure: 100, filter box; 110, box body; 111, annular groove; 112, through hole; 113, material drop channel; 114, material outlet; 120, filter plate; 130, cleaning brush; 131, suspension rod; 132, bristles; 140, rotation assembly; 141, cover body; 142, rotating shaft; 143, gear; 144, gear ring; 145, driving member; 1451, servo motor; 1452, main bevel gear; 1453, secondary bevel gear Wheel; 150, filter collection assembly; 151, filter bin; 152, bidirectional screw; 153, push plate; 154, small motor; 200, induced draft fan; 300, purification tower; 310, tower body; 311, liquid outlet; 320, purification layer; 330, circulating spray system; 331, spray pipe; 332, atomizing nozzle; 333, circulating pump; 334, liquid outlet pipe; 335, circulating pipe; 340, demisting layer; 350, filter ball. DETAILED DESCRIPTION

[0023] The present invention is now further described in conjunction with the accompanying drawings. These drawings are simplified schematic diagrams that only illustrate the basic structure of the present invention in a schematic manner, and therefore only show the components related to the present invention.

[0024] Example 1

[0025] like Figure 1-Figure 3As shown, a silane chlorosilane waste gas treatment device includes a filter box 100, an induced draft fan 200 and a purification tower 300. The air outlet of the filter box 100 is connected to the air inlet of the purification tower 300 through the induced draft fan 200. The filter box 100 includes a box body 110, a filter plate 120, a cleaning brush 130 and a rotation assembly 140. The box body 110 is a hollow cylindrical structure and is placed horizontally. The filter plate 120 is composed of a plurality of blocks, which are arranged in the box body 110 along the horizontal interval. The filter plate 120 is rotatably installed in an annular groove 111 opened on the inner wall of the box body 110. The cleaning brush 130 is arranged on the left side of the filter plate 120, and its top end is connected to the inner wall of the box body 110. The rotation assembly 140 is arranged at the top end of the box body 110 to drive the plurality of filter plates 120 to rotate synchronously. By driving the plurality of filter plates 120 to rotate synchronously through the turning assembly 140, the cleaning brush 130 cleans the impurities and particles attached to the surface of the filter plate 120, thereby avoiding filter blockage caused by excessive impurities and particles, thereby ensuring the filtering effect and the subsequent purification effect.

[0026] Specifically, the filter box 100 and the induced draft fan 200 are connected to each other through connecting pipes, and the induced draft fan 200 and the purification tower 300 are connected to each other through connecting pipes. An exhaust port is provided at the top of the purification tower 300. An air inlet is provided at the middle of the left side of the box body 110. There are four filter plates 120, all of which are circular. The cleaning brush 130 includes a suspension rod 131 and bristles 132. The suspension rod 131 is vertically arranged, and its top end is connected to the inner wall of the box body 110. The bristles 132 are spread on the right side of the suspension rod 131 and contact the filter plate 120. It should be noted that the length of the suspension rod 131 is greater than the radius of the filter plate 120, so that there is no dead angle in the cleaning, thereby ensuring the cleaning effect.

[0027] like Figure 2-Figure 4 As shown, the turning assembly 140 includes a cover 141, a rotating shaft 142, a gear 143, a gear ring 144 and a driving member 145. The cover 141 is installed at the top of the housing 110. There are two rotating shafts 142, which are arranged in the housing 141 along the lateral interval. The gears 143 are respectively installed at the left and right ends of the rotating shaft 142. The gear ring 144 is arranged in the annular groove 111 and sleeved on the filter plate 120. The rim of the gear 143 passes through the through hole 112 opened at the top of the housing 110 and meshes with the gear ring 144. The driving member 145 is installed in the middle of the cover 141 to drive the two rotating shafts 142 to rotate synchronously. Specifically, the two ends of the rotating shaft 142 are respectively installed at the top of the housing 110 through the bearing seat.

[0028] like Figure 2As shown, the driving member 145 includes a servo motor 1451, a main bevel gear 1452 and a secondary bevel gear 1453. The servo motor 1451 is vertically mounted in the middle of the housing 141, and its output end extends into the housing 141. The main bevel gear 1452 is mounted at the output end of the servo motor 1451, and the secondary bevel gears 1453 are respectively mounted at the opposite ends of the rotating shaft 142, and the main bevel gear 1452 is meshed with the secondary bevel gear 1453. Through the arrangement of the main bevel gear 1452 and the secondary bevel gear 1453, one servo motor 1451 can drive the two rotating shafts 142 to rotate synchronously, thereby achieving the purpose of energy saving.

[0029] like Figure 1 and Figure 5 As shown, the purification tower 300 includes a tower body 310, a purification layer 320 and a circulating spray system 330. A liquid outlet 311 is provided at the right bottom end of the tower body 310. The purification layer 320 is composed of two layers, which are arranged in the tower body 310 along the longitudinal interval. One end of the circulating spray system 330 is arranged above the purification layer 320, and the other end thereof is connected to the liquid outlet 311. By setting the circulating spray system 330, the purification agent can be recycled, which ensures the purification effect on the one hand and saves the cost on the other hand.

[0030] Specifically, the circulating spray system 330 includes a spray pipe 331, an atomizing nozzle 332, a circulating pump 333, a liquid outlet pipe 334 and a circulating pipe 335. The spray pipes 331 are respectively arranged above the purification layer 320, and the right end thereof extends outside the tower body 310. The atomizing nozzle 332 is distributed at the bottom end of the spray pipe 331, and the circulating pump 333 is arranged on the right side of the tower body 310. The inlet of the circulating pump 333 is connected to the liquid outlet 311 through the liquid outlet pipe 334, and its outlet is connected to the right end of the spray pipe 331 through the circulating pipe 335.

[0031] like Figure 5 As shown, the purification tower 300 also includes a demisting layer 340 and a filter ball 350 arranged in the tower body 310. The demisting layer 340 is arranged above the circulating spray system 330, and the filter ball 350 is arranged at the liquid outlet 311. The demisting layer 340 is arranged to dry the purified exhaust gas; the filter ball 350 is arranged to filter the purification agent at the bottom of the tower body 310 to avoid blockage in the subsequent pipeline. Specifically, the left end of the liquid outlet pipe 334 extends into the tower body 310 through the liquid outlet 311 and is connected to the filter ball 350.

[0032] During purification, the waste gas enters the box body 110 from the air inlet on the left side of the box body 110, and then passes through the four filter plates 120 for filtering in sequence. The filtered waste gas is introduced into the tower body 310 by the induced draft fan 200, and the circulating spray system 330 causes the atomizing nozzle 332 to spray out the purification agent. The waste gas in the tower body 310 rises and passes through the purification layer 320 for purification, and at the same time contacts with the purification agent sprayed from the atomizing nozzle 332 to complete secondary purification and filtration. Finally, the purified waste gas passes through the demisting layer 340 for drying and is discharged from the exhaust port. The cleaning of the filter plate 120 can be performed regularly or simultaneously during the waste gas filtration process.

[0033] Example 2

[0034] Based on Example 1, this embodiment adds a filter collection component 150 to collect impurities and particles swept away by the cleaning brush 130 to prevent them from accumulating in the box 110 and affecting the flow of exhaust gas, further ensuring the purification effect and convenient collection.

[0035] like Figure 1 and Figure 2 As shown, the filter collecting assembly 150 includes a filter bin 151, a bidirectional screw rod 152, a push plate 153 and a small motor 154. The filter bin 151 is laterally arranged at the bottom end of the box body 110, the bidirectional screw rod 152 is rotatably installed in the filter bin 151, the push plate 153 is slidably installed in the filter bin 151, and is respectively threadedly sleeved on both ends of the bidirectional screw rod 152, the small motor 154 is installed on the left side of the box body 110, and its output end is connected to the left end of the bidirectional screw rod 152, and a material dropping channel 113 and a material discharge port 114 are opened at the bottom end of the box body 110, the material dropping channel 113 is arranged on the left side of the filter plate 120, the top end of the material dropping channel 113 is communicated with the inner cavity of the box body 110, and the bottom end thereof is communicated with the filter bin 151, and the material discharge port 114 is arranged in the middle part of the filter bin 151 and communicated with the filter bin 151. Specifically, the top of the material drop channel 113 is designed to be funnel-shaped, so that impurities and particles swept away by the cleaning brush 130 can easily enter the material drop channel 113; the discharge port 114 is designed to be funnel-shaped, so that impurities and particles can be discharged from the discharge port 114 when the push plate 153 pushes the material.

[0036] When the filter material in the filter bin 151 needs to be cleaned, the small motor 154 drives the bidirectional screw rod 152 to rotate, and the rotation of the bidirectional screw rod 152 is converted into the opposite linear motion of the two push plates 153, pushing the filter material in the filter bin 151 to the discharge port 114 in the middle, and then falls from the discharge port 114 into the material transport trolley (not shown in the figure) for transportation away, and finally the small motor 154 drives the two push plates 153 to reset.

[0037] The above-mentioned implementation mode is only for illustrating the technical concept and features of the utility model, and its purpose is to enable people familiar with this technology to understand the content of the utility model and implement it. It cannot be used to limit the protection scope of the utility model. All equivalent changes or modifications made according to the spirit of the utility model should be included in the protection scope of the utility model.

Claims

1. A silane-chlorosilane waste gas treatment device, comprising a filter box (100), an induced draft fan (200) and a purification tower (300), wherein the air outlet of the filter box (100) is connected to the air inlet of the purification tower (300) through the induced draft fan (200), and characterized in that: The filter box (100) comprises a box body (110), a filter plate (120), a cleaning brush (130) and a rotation assembly (140). The box body (110) is a hollow cylindrical structure and is placed horizontally. The filter plate (120) is composed of a plurality of pieces and is arranged in the box body (110) at intervals along the horizontal direction. The filter plate (120) is rotatably installed in an annular groove (111) provided on the inner wall of the box body (110). The cleaning brush (130) is arranged on the left side of the filter plate (120) and its top end is connected to the inner wall of the box body (110). The rotation assembly (140) is arranged at the top end of the box body (110) to drive the plurality of filter plates (120) to rotate synchronously.

2. The silane chlorosilane waste gas treatment device according to claim 1, characterized in that: The rotation assembly (140) comprises a cover body (141), a rotating shaft (142), a gear (143), a gear ring (144) and a driving member (145). The cover body (141) is mounted on the top of the housing (110). There are two rotating shafts (142) which are arranged in the cover body (141) at intervals along the lateral direction. The gears (143) are respectively mounted on the left and right ends of the rotating shaft (142). The gear ring (144) is arranged in an annular groove (111) and sleeved on the filter plate (120). The rim of the gear (143) passes through a through hole (112) provided at the top of the housing (110) and meshes with the gear ring (144). The driving member (145) is mounted in the middle of the cover body (141) to drive the two rotating shafts (142) to rotate synchronously.

3. The silane chlorosilane waste gas treatment device according to claim 2, characterized in that: The driving member (145) comprises a servo motor (1451), a main bevel gear (1452) and a slave bevel gear (1453); the servo motor (1451) is vertically mounted in the middle of the cover body (141), and its output end extends into the cover body (141); the main bevel gear (1452) is mounted on the output end of the servo motor (1451); the slave bevel gear (1453) is respectively mounted on the opposite ends of the rotating shaft (142); the main bevel gear (1452) is meshed with the slave bevel gear (1453).

4. The silane chlorosilane waste gas treatment device according to claim 1, characterized in that: The cleaning brush (130) comprises a suspension rod (131) and bristles (132); the suspension rod (131) is vertically arranged, and the top end thereof is connected to the inner wall of the box body (110); the bristles (132) are spread on the right side of the suspension rod (131) and are in contact with the filter plate (120).

5. The silane chlorosilane waste gas treatment device according to claim 1, characterized in that: The purification tower (300) comprises a tower body (310), a purification layer (320) and a circulating spray system (330); a liquid outlet (311) is provided at the right bottom end of the tower body (310); the purification layer (320) comprises two layers which are arranged in the tower body (310) at intervals along the longitudinal direction; one end of the circulating spray system (330) is arranged above the purification layer (320), and the other end thereof is communicated with the liquid outlet (311).

6. The silane chlorosilane waste gas treatment device according to claim 5, characterized in that: The circulating spray system (330) comprises a spray pipe (331), an atomizing nozzle (332), a circulating pump (333), a liquid outlet pipe (334) and a circulating pipe (335). The spray pipes (331) are respectively arranged above the purification layer (320), and the right ends thereof extend outside the tower body (310). The atomizing nozzles (332) are distributed at the bottom ends of the spray pipes (331). The circulating pump (333) is arranged on the right side of the tower body (310). The inlet of the circulating pump (333) is connected to the liquid outlet (311) through the liquid outlet pipe (334), and the outlet thereof is connected to the right end of the spray pipe (331) through the circulating pipe (335).

7. The silane chlorosilane waste gas treatment device according to claim 5, characterized in that: The purification tower (300) further comprises a demisting layer (340) and a filter ball (350) arranged in the tower body (310), wherein the demisting layer (340) is arranged above the circulating spray system (330), and the filter ball (350) is arranged at the liquid outlet (311).

8. The silane chlorosilane waste gas treatment device according to claim 1, characterized in that: The filter box (100) further comprises a filter collecting assembly (150), wherein the filter collecting assembly (150) comprises a filter bin (151), a bidirectional screw rod (152), a push plate (153) and a small motor (154), wherein the filter bin (151) is transversely arranged at the bottom end of the box body (110), the bidirectional screw rod (152) is rotatably mounted in the filter bin (151), the push plate (153) is slidably mounted in the filter bin (151) and is respectively threadedly sleeved on both ends of the bidirectional screw rod (152), and the small motor (154) is arranged to move the filter bin (151) and the filter bin (151) to move the filter bin (151) and the push plate (153) is slidably mounted in the filter bin (151) and is respectively threadedly sleeved on both ends of the bidirectional screw rod (152). The machine (154) is installed on the left side of the box body (110), and its output end is connected to the left end of the bidirectional screw rod (152). The bottom end of the box body (110) is provided with a material dropping channel (113) and a material discharge port (114). The material dropping channel (113) is arranged on the left side of the filter plate (120). The top end of the material dropping channel (113) is communicated with the inner cavity of the box body (110), and the bottom end thereof is communicated with the filter bin (151). The material discharge port (114) is arranged in the middle of the filter bin (151) and is communicated with the filter bin (151).

Images