Microfluidic device

Abstract

The invention relates to the technical field of microfluidics, in particular to a microfluidics device. The microfluidic device comprises a first substrate, a second substrate and a third substrate which are stacked, wherein the second substrate is positioned between the first substrate and the third substrate; in the direction perpendicular to the plane where the first substrate is located, a first interval is formed between the first substrate and the second substrate, and a second interval is formed between the second substrate and the third substrate; the second substrate comprises at least one first through hole, and the first through hole penetrates through the second substrate in the direction perpendicular to the plane where the second substrate is located; the first interval is communicated with the second interval through the first through hole. According to the invention, the requirements of high-throughput and high-precision sample injection can be met in a compatible manner.

Description

Technical Field

[0001] The present disclosure relates to the field of microfluidics, and in particular to a microfluidics device. Background Art

[0002] Microfluidic technology is a technology that is mainly characterized by the manipulation of fluids in micrometer or smaller space. This technology has intersected with disciplines such as chemistry, biology, engineering and physics, and has shown a wide range of application prospects. Droplet microfluidic technology has received widespread attention due to its advantages such as easy fluid operation, high monodispersity, miniaturization, low cost, high sensitivity and high throughput. Microfluidic technology mainly uses the principle of dielectric wetting. By adjusting the electric field between the upper substrate and the lower substrate of the microfluidic chip, the surface tension between the droplet surface and the solid is changed, thereby changing the contact angle between the two, thereby realizing the operation and control of the droplet.

[0003] In the prior art, microfluidic devices have the problem of being difficult to simultaneously meet the requirements of high throughput and high precision injection. Summary of the invention

[0004] In order to solve the above technical problems or at least partially solve the above technical problems, the present disclosure provides a microfluidic device that can meet the requirements of high-throughput and high-precision sample injection.

[0005] The present disclosure provides a microfluidic device, comprising: a first substrate, a second substrate and a third substrate which are stacked, wherein the second substrate is located between the first substrate and the third substrate; along a direction perpendicular to the plane where the first substrate is located, a first interval is included between the first substrate and the second substrate, and a second interval is included between the second substrate and the third substrate; the second substrate comprises at least one first through hole, and along a direction perpendicular to the plane where the second substrate is located, the first through hole penetrates the second substrate; the first interval is connected to the second interval through the first through hole.

[0006] Compared with the prior art, the technical solution provided by the present invention has the following advantages:

[0007] The microfluidic device provided by the present disclosure includes a first substrate, a second substrate and a third substrate which are stacked. Among them, along the direction perpendicular to the plane where the first substrate is located, a first interval is included between the first substrate and the second substrate, and a second interval is included between the second substrate and the third substrate. The second substrate includes at least one first through hole, and the first through hole penetrates the second substrate along the direction perpendicular to the plane where the second substrate is located. The first interval and the second interval are connected through the first through hole, so that the droplets can move between the first interval and the second interval through the first through hole, and the first interval and the second interval can be used to accommodate the droplets, so as to realize high-throughput droplet injection storage. At the same time, the primary separation and mixing of the sample and the reagent solution can be carried out in the first interval, and then the droplets after the treatment are driven into the second interval for subsequent operations, so that high-precision droplet sample processing can be realized in the second interval. That is, the microfluidic device provided by the embodiment of the present disclosure is compatible with the requirements of realizing high-throughput and high-precision injection. BRIEF DESCRIPTION OF THE DRAWINGS

[0008] The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the present disclosure and, together with the description, serve to explain the principles of the present disclosure.

[0009] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, for ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative labor.

[0010] Figure 1 is a plan view of a microfluidic device provided by the present disclosure;

[0011] Figure 2 yes Figure 1 A cross-sectional view of the microfluidic device along the line A-A';

[0012] Figure 3 yes Figure 1 Another cross-sectional view of the microfluidic device along line AA';

[0013] Figure 4 is a plan view of a first substrate provided by the present disclosure;

[0014] Figure 5 is a schematic plan view of another first substrate provided by the present disclosure;

[0015] Figure 6 yes Figure 1 An enlarged schematic diagram of part B of the microfluidic device;

[0016] Figure 7 yes Figure 1 Another enlarged schematic diagram of part B of the microfluidic device;

[0017] Figure 8 yes Figure 1 Another cross-sectional view of the microfluidic device along line AA';

[0018] Fig. 9 is a schematic plan view of a second substrate provided by the present disclosure;

[0019] Fig.10 yes Figure 1 Another cross-sectional view of the microfluidic device along line AA';

[0020] Fig.11 yes Figure 1 Another cross-sectional view of the microfluidic device along line AA';

[0021] Fig.12 is a plan view schematic diagram of another microfluidic device provided by the present disclosure;

[0022] Fig.13 yes Fig.12 A cross-sectional view of the microfluidic device along CC'. DETAILED DESCRIPTION

[0023] In order to more clearly understand the above-mentioned objectives, features and advantages of the present disclosure, the scheme of the present disclosure will be further described below. It should be noted that the embodiments of the present disclosure and the features in the embodiments can be combined with each other without conflict.

[0024] In the following description, many specific details are set forth to facilitate a full understanding of the present disclosure, but the present disclosure may also be implemented in other ways different from those described herein; it is obvious that the embodiments in the specification are only part of the embodiments of the present disclosure, rather than all of the embodiments.

[0025] Figure 1 is a plan view of a microfluidic device provided by the present disclosure, Figure 2 yes Figure 1 A cross-sectional view of the microfluidic device along A-A', referring to Figure 1 and Figure 2 The present embodiment provides a microfluidic device, which includes: a first substrate 10, a second substrate 20 and a third substrate 30 which are stacked, wherein the second substrate 20 is located between the first substrate 10 and the third substrate 30; along a direction perpendicular to the plane where the first substrate 10 is located, a first interval Q1 is included between the first substrate 10 and the second substrate 20, and a second interval Q2 is included between the second substrate 20 and the third substrate 30;

[0026] The second substrate 20 includes at least one first through hole 21 , which penetrates the second substrate 20 along a direction perpendicular to the plane where the second substrate 20 is located; the first interval Q1 is connected to the second interval Q2 through the first through hole 21 .

[0027] Specifically, the embodiment of the present disclosure provides a microfluidic device, which includes a first substrate 10, a second substrate 20, and a third substrate 30 arranged in a stacked manner. In the direction perpendicular to the plane where the first substrate 10 is located, a first interval Q1 is included between the first substrate 10 and the second substrate 20, and the first interval Q1 can be used to accommodate droplets. In the direction perpendicular to the plane where the first substrate 10 is located, a second interval Q2 is included between the second substrate 20 and the third substrate 30, and the second interval Q2 can also accommodate droplets.

[0028] The second substrate 20 includes at least one first through hole 21, and the first through hole 21 penetrates the second substrate 20 in a direction perpendicular to the plane where the second substrate 20 is located. The first interval Q1 and the second interval Q2 can be connected through the first through hole 21, so that the droplets can move between the first interval Q1 and the second interval Q2 through the first through hole 21, and the first interval Q1 and the second interval Q2 can both be used to accommodate droplets, thereby realizing high-throughput droplet injection storage. At the same time, the primary separation and mixing of the sample and the reagent solution can be carried out in the first interval Q1, and then the droplets after the processing are driven into the second interval Q2 for subsequent operations, so that high-precision droplet sample processing can be realized in the second interval Q2. That is, the microfluidic device provided in the embodiment of the present disclosure is compatible with the requirements of high-throughput and high-precision injection.

[0029] Of course, in other embodiments of the present disclosure, primary separation and mixing of samples and reagent solutions may also be performed in the second interval Q2, and then the processed droplets are driven into the first interval Q1 for subsequent operations, thereby achieving high-precision droplet sample processing in the first interval Q1, which will not be elaborated in the present disclosure.

[0030] It should be noted that Figure 1 An arrangement of the first through holes 21 is exemplarily shown in the figure. In other embodiments of the present disclosure, the first through holes 21 may also be arranged in other ways. The present disclosure does not limit the number and size of the first through holes 21 in the second substrate 20. The number and size of the first through holes 21 in the second substrate 20 may be set according to actual needs, and the present disclosure will not go into details here.

[0031] Continue to refer Figure 1 and Figure 2 In some optional embodiments, the first substrate 10 includes a first substrate 11 and a first electrode 12, and the first electrode 12 is located on a side of the first substrate 11 close to the second substrate 20;

[0032] The second substrate 20 includes a second substrate 22, a first array layer 23, a first driving electrode 24 and a second electrode 25. The first array layer 23 is located on a side of the second substrate 22 close to the first substrate 10, the first driving electrode 24 is located on a side of the first array layer 23 close to the first substrate 10, and the second electrode 25 is located on a side of the second substrate 22 close to the third substrate 30. The first driving electrodes 24 are arranged in an array.

[0033] Specifically, the first electrode 12 is disposed on the side of the first substrate 11 in the first substrate 10 close to the second substrate 20, and the first array layer 23 and the first driving electrode 24 are sequentially disposed on the side of the second substrate 22 in the second substrate 20 close to the first substrate 10, the first driving electrodes 24 are arranged in an array, the first array layer 23 is provided with a driving circuit corresponding to the first driving electrode 24, and the driving circuit is electrically connected to the first driving electrode 24 corresponding thereto, and a voltage signal is applied to the first driving electrode 24 electrically connected thereto through the driving circuit. The movement of the droplet in the first interval Q1 is achieved by adjusting the electric field between the first driving electrode 24 and the first electrode 12.

[0034] Figure 3 yes Figure 1 Another cross-sectional view of the microfluidic device along line AA', Figure 4 is a plan view of a first substrate provided by the present disclosure, with reference to Figure 1 , Figure 3 and Figure 4 In some optional embodiments, the first electrode 12 includes a first sub-electrode 121 and a second sub-electrode 122, the second sub-electrode 122 and the first through hole 21 are arranged correspondingly, and the vertical projection of the second sub-electrode 122 on the plane where the third substrate 30 is located and the vertical projection of the corresponding first through hole 21 on the plane where the third substrate 30 is located at least partially overlap.

[0035] Specifically, the first electrode 12 includes a first sub-electrode 121 and a second sub-electrode 122. A common voltage signal is applied to the first sub-electrode 121, and the electric field between the first driving electrode 24 and the first sub-electrode 121 can be adjusted by adjusting the voltage signal on each first driving electrode 24 to achieve the movement of the droplet in the first interval Q1.

[0036] The first sub-electrode 121 and the second sub-electrode 122 are insulated from each other. The second sub-electrode 122 and the first through hole 21 are arranged correspondingly, that is, the second sub-electrode 122 is arranged at a position corresponding to the first through hole 21 , and the second sub-electrodes 122 are also insulated from each other. The vertical projection of the second sub-electrode 122 on the plane where the third substrate 30 is located and the vertical projection of the corresponding first through hole 21 on the plane where the third substrate 30 is located at least partially overlap. When a droplet in the first interval Q1 needs to move to the second interval Q2 through a certain first through hole 21, when the droplet moves to the periphery of the first through hole 21, a high voltage signal is applied to the second sub-electrode 122 corresponding to the first through hole 21, and the droplet can fully move to the corresponding position of the first through hole 21 under the action of the electric field. After the droplet moves to the corresponding position of the first through hole 21, a low voltage signal is applied to the second sub-electrode 122 corresponding to the first through hole 21, or no voltage signal is applied to the second sub-electrode 122 corresponding to the first through hole 21. At this time, the droplet shrinks and can drip from the first through hole 21 to the second interval Q2 under the action of gravity, which is conducive to moving the droplet from the first interval Q1 to the second interval Q2.

[0037] Optionally, the center of the vertical projection pattern of the second sub-electrode 122 on the plane where the third substrate 30 is located overlaps with the center of the vertical projection pattern of the corresponding first through hole 21 on the plane where the third substrate 30 is located, which is conducive to moving the droplet to the corresponding center of the first through hole 21 and then dropping it into the second interval Q2, which is further conducive to moving the droplet from the first interval Q1 to the second interval Q2.

[0038] In some optional embodiments, the vertical projection of the second sub-electrode 122 on the plane where the third substrate 30 is located may overlap with the vertical projection of the corresponding first through hole 21 on the plane where the third substrate 30 is located. In some optional embodiments, the vertical projection of the second sub-electrode 122 on the plane where the third substrate 30 is located may also be located within the vertical projection of the corresponding first through hole 21 on the plane where the third substrate 30 is located. In some optional embodiments, the vertical projection of the first through hole 21 on the plane where the third substrate 30 is located may also be located within the vertical projection of the corresponding second sub-electrode 122 on the plane where the third substrate 30 is located.

[0039] Figure 5 is a plan view of another first substrate provided by the present disclosure, referring to Figure 1 , Figure 3 and Figure 5 In some optional embodiments, the first substrate 10 further includes a first connection line S1, the first connection line S1 and the first electrode 12 are located on the same side of the first substrate 11, and the first connection line S1 is correspondingly connected to the second sub-electrode 122;

[0040] The first sub-electrode 121 includes a first slit 1211 , and the first connection line S1 is located in the first slit 1211 .

[0041] Specifically, a first connecting line S1 is provided in the first substrate 10, and the first connecting line S1 is correspondingly connected to the second sub-electrode 122, that is, the first connecting line S1 and the second sub-electrode 122 can correspond one to one, and the first connecting line S1 is electrically connected to the corresponding second sub-electrode 122, so that a voltage signal can be applied to the second sub-electrode 122 electrically connected to it through the first connecting line S1.

[0042] Of course, in other embodiments of the present disclosure, one second sub-electrode 122 may be connected to at least two first connection lines S1 , which will not be described in detail in the present disclosure.

[0043] The first connecting line S1 and the first electrode 12 are located on the same side of the first substrate 11, and the first sub-electrode 121 includes a first slit 1211, that is, the first slit 1211 is arranged in the first sub-electrode 121, and the first connecting line S1 is arranged in the first slit 1211, so that the first connecting line S1 and the first sub-electrode 121 are insulated from each other, and further the first sub-electrode 121 and the second sub-electrode 122 are insulated from each other.

[0044] It should be noted that, the present embodiment exemplarily shows that the first connecting line S1 and the first electrode 12 are arranged on the same side of the first substrate 11. In other embodiments of the present disclosure, the first connecting line S1 can also be arranged on the side of the first substrate 11 away from the first electrode 12. The first connecting line S1 can also be arranged in other film layers. In this case, the first electrode 12 does not need to be provided with the first gap 1211. Of course, in other embodiments of the present disclosure, other structures can also be used to apply voltage signals to each second sub-electrode 122, which will not be described in detail in the present disclosure.

[0045] Figure 6 yes Figure 1 An enlarged schematic diagram of part B in the microfluidic device, see Figure 1 , Figure 3 , Figure 5 and Figure 6 In some optional embodiments, a vertical projection of the first slit 1211 on the plane where the third substrate 30 is located at least partially overlaps with a vertical projection of the gap between the first driving electrodes 24 on the plane where the third substrate 30 is located.

[0046] Specifically, the first driving electrodes 24 are arranged in an array so that there is a gap between two adjacent first driving electrodes 24, and the vertical projection of the first gap 1211 on the plane where the third substrate 30 is located at least partially overlaps with the vertical projection of the gap between the first driving electrodes 24 on the plane where the third substrate 30 is located, that is, the first gap 1211 in the first sub-electrode 121 is at least partially set in the area corresponding to the gap between the first driving electrodes 24, which is beneficial to reduce the influence of the setting of the first gap 1211 on the electric field formed between the first driving electrode 24 and the first sub-electrode 121.

[0047] Continue to refer Figure 1 , Figure 3 and Figure 5 In some optional embodiments, one end of each first connection line S1 is connected to the corresponding second sub-electrode 122 , and the other end of each first connection line S1 extends to the same end of the first substrate 10 .

[0048] Specifically, one end of each first connecting line S1 is connected to the corresponding second sub-electrode 122, so that a voltage signal is applied to the second sub-electrode 122 connected thereto through the first connecting line S1, and the other end of each first connecting line S1 extends to the same end of the first substrate 10, that is, the other end of each first connecting line S1 that is not connected to the second sub-electrode 122 extends to the same end of the first substrate 10, so that a connecting portion can be set at one end of the first substrate 10 to connect to each first connecting line S1, which is beneficial to provide a corresponding voltage signal to each first connecting line S1.

[0049] It should be noted that Figure 5 exemplarily shows that the first connection lines S1 connected to the same column of second sub-electrodes 122 are arranged on the same side of the column of second sub-electrodes 122. In other embodiments of the present disclosure, the first connection lines S1 connected to the same column of second sub-electrodes 122 may be separately arranged on both sides of the column of second sub-electrodes 122. Figure 5 It is exemplarily shown that the other end of each first connecting line S1 that is not connected to the second sub-electrode 122 extends to one end of the first substrate 10. In other embodiments of the present disclosure, the other end of each first connecting line S1 that is not connected to the second sub-electrode 122 can also extend to other ends of the first substrate 10, which is not repeated in the present disclosure.

[0050] Continue to refer Figure 1 , Figure 3 and Figure 4In some optional embodiments, the first through hole 21 includes a first opening 211, the first opening 211 is located on a side of the first through hole 21 close to the first substrate 10, and the vertical projection of the second sub-electrode 122 on the plane where the third substrate 30 is located is located within the vertical projection of the first opening 211 of the corresponding first through hole 21 on the plane where the third substrate 30 is located.

[0051] Specifically, the opening of the first through hole 21 on the side close to the first substrate 10 is the first opening 211. The droplets in the first interval Q1 enter the first through hole 21 through the first opening 211, and then enter the second interval Q2 through the first through hole 21. When the droplets in the first interval Q1 need to move to the second interval Q2 through a certain first through hole 21, when the droplets move to the periphery of the first through hole 21, a high voltage signal is applied to the second sub-electrode 122 corresponding to the first through hole 21. Under the action of the electric field, the droplets move to the area corresponding to the second sub-electrode 122. Since the vertical projection area of ​​the second sub-electrode 122 on the plane where the third substrate 30 is located is smaller than the vertical projection area of ​​the first through hole 21 corresponding to it on the plane where the third substrate 30 is located, and the vertical projection of the second sub-electrode 122 on the plane where the third substrate 30 is located is located within the vertical projection of the first through hole 21 corresponding to it on the plane where the third substrate 30 is located, This is beneficial for fully moving the entire droplet to the position corresponding to the first orifice 211 in the first through hole 21. After the droplet moves to the position corresponding to the first through hole 21, a low voltage signal is applied to the second sub-electrode 122 corresponding to the first through hole 21, or no voltage signal is applied to the second sub-electrode 122 corresponding to the first through hole 21. At this time, the droplet shrinks, and the entire droplet can enter the first through hole 21 through the first orifice 211 under the action of gravity, and drip from the first through hole 21 into the second interval Q2, which is beneficial for moving the entire droplet from the first interval Q1 to the second interval Q2. At the same time, it is beneficial to improve the accuracy of the volume of the droplet after entering the second interval Q2.

[0052] Figure 7 yes Figure 1 Another enlarged schematic diagram of part B in the microfluidic device, see Figure 1 , Figure 3 , Figure 5 and Figure 7 In some optional embodiments, the first driving electrode 24 includes a third sub-electrode 241, and the third sub-electrode 241 corresponds to the first through hole 21. Along a direction perpendicular to the plane where the third substrate 30 is located, a portion of the first through hole 21 passes through the third sub-electrode 241 corresponding thereto.

[0053] Specifically, the first driving electrode 24 includes a third sub-electrode 241 corresponding to the first through hole 21. The first through hole 21 penetrates the second substrate 20 along a direction perpendicular to the plane where the third substrate 30 is located. Correspondingly, part of the first through hole 21 penetrates the third sub-electrode 241 corresponding thereto, that is, the area of ​​the third sub-electrode 241 corresponding to the first through hole 21 is also provided with a through hole, thereby achieving the first through hole 21 penetrating the second substrate 20 along a direction perpendicular to the plane where the third substrate 30 is located, so that the setting of the third sub-electrode 241 does not affect the movement of droplets between the first interval Q1 and the second interval Q2.

[0054] At the same time, the vertical projection of the third sub-electrode 241 on the plane where the third substrate 30 is located surrounds the vertical projection of the first orifice 211 in the first through hole 21 corresponding thereto on the plane where the third substrate 30 is located, that is, the third sub-electrode 241 can be arranged around the first orifice 211 in the first through hole 21 corresponding thereto, and a high voltage signal can be applied to the third sub-electrode 241, so that the electric field between the third sub-electrode 241 and the first electrode 12 causes the droplet to move to the area corresponding to the middle of the third sub-electrode 241, that is, the droplet moves to the first orifice 2 11, and then apply a low voltage signal to the third sub-electrode 241 corresponding to the first through hole 21, or do not apply a voltage signal to the third sub-electrode 241 corresponding to the first through hole 21. At this time, the droplet shrinks, and the entire droplet can enter the first through hole 21 through the first orifice 211 under the action of gravity, and drip from the first through hole 21 into the second interval Q2, which is beneficial to moving the entire droplet from the first interval Q1 to the second interval Q2, and at the same time, it is beneficial to improve the accuracy of the volume of the droplet after entering the second interval Q2.

[0055] Optionally, the vertical projection area of ​​the third sub-electrode 241 on the plane where the third substrate 30 is located is greater than the vertical projection area of ​​the first opening 211 in the first through hole 21 corresponding thereto on the plane where the third substrate 30 is located, so that the third sub-electrode 241 is arranged around the first opening 211 in the first through hole 21 corresponding thereto. Optionally, the area of ​​the vertical projection pattern of the outer wall of the third sub-electrode 241 on the plane where the third substrate 30 is located may be greater than the vertical projection area of ​​the conventional first driving electrode 24 on the plane where the third substrate 30 is located, and the area of ​​the vertical projection pattern of the outer wall of the third sub-electrode 241 on the plane where the third substrate 30 is located may also be equal to or less than the vertical projection area of ​​the conventional first driving electrode 24 on the plane where the third substrate 30 is located, and it is only necessary to satisfy that the vertical projection area of ​​the third sub-electrode 241 on the plane where the third substrate 30 is located is greater than the vertical projection area of ​​the first opening 211 in the first through hole 21 corresponding thereto on the plane where the third substrate 30 is located, wherein the conventional first driving electrode 24 refers to the first driving electrode 24 that is not affected by the arrangement of the first through hole 21, and the disclosure will not be repeated here.

[0056] Optionally, the vertical projection of the first orifice 211 in the first through hole 21 on the plane where the third substrate 30 is located is centered in the vertical projection of the corresponding third sub-electrode 241 on the plane where the third substrate 30 is located, which is conducive to fully moving the entire droplet to the corresponding position of the first orifice 211 in the first through hole 21. After the droplet moves to the corresponding position of the first through hole 21, a low voltage signal is applied to the third sub-electrode 241 corresponding to the first through hole 21, or no voltage signal is applied to the third sub-electrode 241 corresponding to the first through hole 21. At this time, the droplet shrinks, and the entire droplet can enter the first through hole 21 through the first orifice 211 under the action of gravity, and drip from the first through hole 21 into the second interval Q2, which is conducive to moving the entire droplet from the first interval Q1 to the second interval Q2. At the same time, it is conducive to improving the accuracy of the volume of the droplet after entering the second interval Q2.

[0057] refer to Figure 1 , Figure 3 , Figure 5 and Figure 6 In some optional embodiments, the first driving electrode 24 includes a fourth sub-electrode 242, the first through hole 21 corresponds to the sub-electrode group 24a, the sub-electrode group 24a includes a plurality of fourth sub-electrodes 242, and each fourth sub-electrode 242 in the sub-electrode group 24a is arranged around the first through hole 21 corresponding thereto;

[0058] The portion of the first through hole 21 is the missing portion of each fourth sub-electrode 242 in the corresponding sub-electrode group 24 a.

[0059] Specifically, the second substrate 20 includes a sub-electrode group 24a, the sub-electrode group 24a is arranged corresponding to the first through hole 21, the sub-electrode group 24a includes a plurality of fourth sub-electrodes 242, each of the fourth sub-electrodes 242 in the sub-electrode group 24a is arranged around the first through hole 21 corresponding thereto, and a portion of the first through hole 21 is a missing portion of each of the fourth sub-electrodes 242 in the sub-electrode group 24a corresponding thereto, that is, compared with the conventional first driving electrode 24, each of the fourth sub-electrodes 242 in the sub-electrode group 24a has a missing portion, so that each of the fourth sub-electrodes 242 in the sub-electrode group 24a The shape of the edge of the fourth sub-electrode 242 adjacent to the first through hole 21 matches the shape of the first opening 211 in the first through hole 21 corresponding thereto, and thus the shape of the edge of each fourth sub-electrode 242 adjacent to the first through hole 21 in the sub-electrode group 24a and the shape of the first opening 211 in the first through hole 21 corresponding thereto tend to be the same, thereby achieving that the first through hole 21 penetrates the second substrate 20 in a direction perpendicular to the plane where the third substrate 30 is located, so that the arrangement of each fourth sub-electrode 242 in the sub-electrode group 24a does not affect the movement of the droplet between the first interval Q1 and the second interval Q2. Among them, the conventional first driving electrode 24 refers to the first driving electrode 24 that is not affected by the arrangement of the first through hole 21.

[0060] At the same time, each fourth sub-electrode 242 in the sub-electrode group 24a is arranged around the first through hole 21 corresponding thereto, and a high voltage signal can be applied to each fourth sub-electrode 242 in the sub-electrode group 24a, so that the electric field between each fourth sub-electrode 242 in the sub-electrode group 24a and the first electrode 12 causes the droplet to move to the area corresponding to the middle of the sub-electrode group 24a, that is, the droplet moves to the area corresponding to the first orifice 211, and then a low voltage signal is applied to each fourth sub-electrode 242 in the sub-electrode group 24a corresponding to the first through hole 21, or no voltage signal is applied to each fourth sub-electrode 242 in the sub-electrode group 24a corresponding to the first through hole 21. At this time, the droplet shrinks, and the entire droplet can enter the first through hole 21 through the first orifice 211 under the action of gravity, and drip from the first through hole 21 into the second interval Q2, which is conducive to moving the entire droplet from the first interval Q1 to the second interval Q2, and at the same time, it is conducive to improving the accuracy of the volume of the droplet after entering the second interval Q2.

[0061] It should be noted that Figure 6 It is exemplarily shown that the sub-electrode group 24a includes four fourth sub-electrodes 242 arranged around the corresponding first through holes 21. In other embodiments of the present disclosure, the sub-electrode group 24a may also include other numbers of fourth sub-electrodes 242 arranged around the corresponding first through holes 21, which will not be described one by one in the present disclosure.

[0062] Figure 8 yes Figure 1Another cross-sectional view of the microfluidic device along line A-A', see Figure 1 and Figure 8 In some optional embodiments, the second substrate 20 further includes a third electrode 26 , the third electrode 26 corresponds to the first through hole 21 , and the third electrode 26 is located on a side wall of the first through hole 21 corresponding thereto.

[0063] Specifically, in the second substrate 20, a third electrode 26 is disposed on the side wall of the first through hole 21, and the third electrode 26 and the second electrode 25 are insulated from each other, and the third electrode 26 and the first driving electrode 24 are insulated from each other. When a droplet in the first interval Q1 needs to move to the second interval Q2 through a first through hole 21, when the droplet moves to the first orifice 211 of the first through hole 21, a high voltage signal is applied to the third electrode 26 disposed on the side wall of the first through hole 21, and a common voltage signal is applied to the second electrode 25. The electric field formed between the electrode 26 and the second electrode 25 is beneficial to assisting the droplet to move from the first orifice 211 to the first through hole 21. After the droplet moves into the first through hole 21, a low voltage signal is applied to the third electrode 26 disposed on the side wall of the first through hole 21, or no voltage signal is applied to the third electrode 26 disposed on the side wall of the first through hole 21. At this time, the droplet shrinks and can drip from the first through hole 21 to the second interval Q2 under the action of gravity, which is beneficial to moving the droplet from the first interval Q1 to the second interval Q2.

[0064] Fig. 9 is a plan view of a second substrate provided by the present disclosure, with reference to Figure 1 , Figure 8 and Fig. 9 In some optional embodiments, the second substrate 20 further includes a second connecting wire S2, the second connecting wire S2 and the second electrode 25 are located on the same side of the second substrate 22, and the second connecting wire S2 and the third electrode 26 are connected correspondingly;

[0065] The second electrode 25 includes a second slit 251 , and the second connecting line S2 is located in the second slit 251 .

[0066] Specifically, a second connecting line S2 is provided in the second substrate 20, and the second connecting line S2 and the third electrode 26 are connected correspondingly, that is, the second connecting line S2 and the third electrode 26 can correspond one to one, and the second connecting line S2 is electrically connected to the third electrode 26 corresponding thereto, so that a voltage signal can be applied to the third electrode 26 electrically connected thereto through the second connecting line S2.

[0067] Of course, in other embodiments of the present disclosure, one third electrode 26 may be connected to at least two second connection lines S2 , which will not be described in detail in the present disclosure.

[0068] The second connection line S2 and the second electrode 25 are located on the same side of the second substrate 22. The second electrode 25 includes a second slit 251. The second connection line S2 is located in the second slit 251, so that the second connection line S2 and the second electrode 25 are insulated from each other, and further the third electrode 26 and the second electrode 25 are insulated from each other.

[0069] It should be noted that the present embodiment exemplarily shows that the second connecting line S2 and the second electrode 25 are located on the same side of the second substrate 22. In other embodiments of the present disclosure, the second connecting line S2 can also be arranged in the first array layer 23. Of course, the second connecting line S2 can also be arranged in other film layers. In this case, the second electrode 25 does not need to be provided with the second gap 251. Of course, in other embodiments of the present disclosure, other structures can also be used to apply voltage signals to each third electrode 26, which will not be described in detail in the present disclosure.

[0070] Optionally, one end of each second connection line S2 is connected to the corresponding third electrode 26 , and the other end of each second connection line S2 extends to the same end of the second substrate 20 .

[0071] Specifically, one end of each second connecting line S2 is connected to the corresponding third electrode 26, so that a voltage signal is applied to the third electrode 26 connected thereto through the second connecting line S2, and the other end of each second connecting line S2 extends to the same end of the second substrate 20, that is, the other end of each second connecting line S2 that is not connected to the third electrode 26 extends to the same end of the second substrate 20, which is conducive to providing a corresponding voltage signal to each second connecting line S2.

[0072] It should be noted that Fig. 9 exemplarily shows that the second connection lines S2 connected to the third electrodes 26 disposed on the side walls of the first through holes 21 in the same column are disposed on the same side of the first through holes 21 in the same column. In other embodiments of the present disclosure, the second connection lines S2 connected to the third electrodes 26 disposed on the side walls of the first through holes 21 in the same column may be disposed separately on both sides of the first through holes 21 in the same column. Fig. 9 It is exemplarily shown that the other end of each second connecting line S2 that is not connected to the third electrode 26 extends to one end of the second substrate 20. In other embodiments of the present disclosure, the other end of each second connecting line S2 that is not connected to the third electrode 26 can also extend to other ends of the second substrate 20, which is not repeated in the present disclosure.

[0073] Continue to refer Figure 1 and Figure 3In some optional embodiments, the second substrate 20 further includes a first hydrophobic layer 27 , and the first driving electrode 24 on a side close to the first substrate 10 , the second electrode 25 on a side close to the third substrate 30 , and the inner wall of the first through hole 21 are all provided with the first hydrophobic layer 27 .

[0074] Specifically, a first hydrophobic layer 27 is provided on a side of the first driving electrode 24 close to the first substrate 10, a side of the second electrode 25 close to the third substrate 30, and an inner wall of the first through hole 21, which helps to reduce the adhesion between the droplets and the second substrate 20, thereby reducing the driving voltage required to drive the droplets, and at the same time, helps to move the droplets in the first through hole 21.

[0075] Optionally, the material of the first hydrophobic layer 27 may be Teflon. Optionally, the first hydrophobic layer 27 may be provided on the side of the first driving electrode 24 close to the first substrate 10, the side of the second electrode 25 close to the third substrate 30, and the inner wall of the first through hole 21 by spraying, dipping or other processes.

[0076] Optionally, a first insulating dielectric layer 28 covering the first driving electrode 24 is further disposed between the first array layer 23 and the first hydrophobic layer 27 to prevent the driving electrode 24 from contacting the droplet. The material of the first insulating dielectric layer 28 may be silicon nitride.

[0077] It should be noted that, in other embodiments of the present disclosure, the first hydrophobic layer 27 may also be made of other materials, and the first insulating dielectric layer 28 may also be made of other materials, which will not be described in detail herein.

[0078] Optionally, the first substrate 10 further includes a second hydrophobic layer 13, and the second hydrophobic layer 13 is disposed on the side of the first electrode 12 away from the first substrate 11, thereby facilitating reducing the adhesion between the droplets and the first substrate 10, thereby reducing the driving voltage required to drive the droplets.

[0079] Fig.10 yes Figure 1 Another cross-sectional view of the microfluidic device along line A-A', see Figure 1 and Fig.10 In some optional embodiments, the first through hole 21 includes a first orifice 211 and a second orifice 212 that are oppositely disposed, the first orifice 211 is located on a side of the first through hole 21 close to the first substrate 10, and the second orifice 212 is located on a side of the first through hole 21 close to the third substrate 30;

[0080] The area of ​​the vertical projection pattern of the first opening 211 on the plane where the third substrate 30 is located is smaller than the area of ​​the vertical projection pattern of the second opening 212 on the plane where the third substrate 30 is located.

[0081] Specifically, the first through hole 21 includes a first orifice 211 and a second orifice 212 that are relatively arranged, wherein the first orifice 211 is located on a side of the first through hole 21 close to the first substrate 10, and the second orifice 212 is located on a side of the first through hole 21 close to the third substrate 30, and the area of ​​the vertical projection pattern of the first orifice 211 on the plane where the third substrate 30 is located is smaller than the area of ​​the vertical projection pattern of the second orifice 212 on the plane where the third substrate 30 is located, that is, in the first through hole 21, the size of the second orifice 212 is larger than the size of the first orifice 211, so that when the droplets in the first interval Q1 enter the first through hole 21 through the first orifice 211 and move to the second interval Q2 through the first through hole 21, the droplets are effectively prevented from adhering and accumulating in the first through hole 21, which is beneficial to improving the accuracy of the volume of the droplets after entering the second interval Q2.

[0082] Optionally, the first through hole 21 may be a truncated cone structure. Of course, in other embodiments of the present disclosure, the first through hole 21 may also be other structures, which will not be described in detail herein.

[0083] Continue to refer Figure 1 and Fig.10 In some optional embodiments, the third substrate 30 includes a third substrate 31, a second array layer 32 and a second driving electrode 33, the second array layer 32 is located on a side of the third substrate 31 close to the second substrate 20, the second driving electrode 33 is located on a side of the second array layer 32 close to the second substrate 20, and the second driving electrodes 33 are arranged in an array.

[0084] Specifically, a second electrode 25 is provided on a side of the second substrate 22 of the second substrate 20 close to the third substrate 30, and a common voltage signal is applied to the second electrode 25. A second array layer 32 and a second driving electrode 33 are sequentially provided on a side of the third substrate 31 of the third substrate 30 close to the second substrate 20. The second driving electrodes 33 are arranged in an array, and the second array layer 32 is provided with a driving circuit corresponding to the second driving electrode 33, and the driving circuit is electrically connected to the corresponding second driving electrode 33, and a voltage signal is applied to the second driving electrode 33 electrically connected thereto through the driving circuit. After the droplet moves from the first interval Q1 to the second interval Q2 through the first through hole 21, the movement of the droplet in the second interval Q2 is achieved by adjusting the electric field between the second driving electrode 33 and the second electrode 25, thereby achieving further separation of the droplet and other operations.

[0085] Optionally, the third substrate 30 further includes a third hydrophobic layer 35 , and the third hydrophobic layer 35 is disposed on the side of the second driving electrode 33 close to the second substrate 20 , thereby facilitating reducing the adhesion between the droplets and the third substrate 30 , thereby reducing the driving voltage required to drive the droplets.

[0086] Optionally, the material of the third hydrophobic layer 35 may be Teflon. Optionally, the third hydrophobic layer 35 may be disposed on the side of the second driving electrode 33 close to the second substrate 20 by spraying, dipping or other processes.

[0087] Optionally, a second insulating dielectric layer 34 covering the second driving electrode 33 is further disposed between the second array layer 32 and the third hydrophobic layer 35 to prevent the second driving electrode 33 from contacting the droplet. The material of the second insulating dielectric layer 34 may be silicon nitride.

[0088] It should be noted that, in other embodiments of the present disclosure, the third hydrophobic layer 35 may also be made of other materials, and the second insulating dielectric layer 34 may also be made of other materials, which will not be described in detail herein.

[0089] Continue to refer Figure 1 and Fig.10 In some optional embodiments, the area of ​​the vertical projection pattern of the first driving electrode 24 on the plane where the third substrate 30 is located is greater than the area of ​​the vertical projection pattern of the second driving electrode 33 on the plane where the third substrate 30 is located.

[0090] Specifically, after the droplet enters the first interval Q1, the electric field between the first driving electrode 24 and the first electrode 12 can be adjusted to enable the droplet to move in the first interval Q1, so that the droplet can be initially separated in the first interval Q1. After the droplet moves from the first interval Q1 to the second interval Q2 through the first through hole 21 after the initial separation, the droplet can be moved in the second interval Q2 after the initial separation by adjusting the electric field between the second driving electrode 33 and the second electrode 25, so that the droplet after the initial separation can be further separated. Since the volume of the droplet after the initial separation in the second interval Q2 is smaller than the volume of the droplet that has not been separated in the first interval Q1, accordingly, the area of ​​the vertical projection pattern of the first driving electrode 24 on the plane where the third substrate 30 is located is larger than the area of ​​the vertical projection pattern of the second driving electrode 33 on the plane where the third substrate 30 is located, that is, the size of the first driving electrode 24 is larger than the size of the second driving electrode 33, so that it is conducive to driving the movement of droplets of different volumes, that is, it is conducive to realizing high-precision droplet driving.

[0091] It should be noted that the present disclosure does not specifically limit the specific dimensions of the first drive electrode 24 and the second drive electrode 33, which can be set according to actual needs. The present disclosure also does not specifically limit the number and arrangement of the first drive electrode 24 and the second drive electrode 33, which can be set according to actual needs.

[0092] Fig.11 yes Figure 1 Another cross-sectional view of the microfluidic device along line A-A', see Figure 1 and Fig.11In some optional embodiments, the third substrate 30 includes a third substrate 31, a second array layer 32 and a detection layer 36, the second array layer 32 is located on a side of the third substrate 31 close to the second substrate 20, and the detection layer 36 is located on a side of the second array layer 32 close to the second substrate 20.

[0093] Specifically, the third substrate 30 includes a third substrate 31, a second array layer 32 and a detection layer 36. The second array layer 32 is located on the side of the third substrate 31 close to the second substrate 20, and the detection layer 36 is located on the side of the second array layer 32 close to the second substrate 20. No insulating dielectric layer and hydrophobic layer are provided on the detection layer 36. After the droplet moves to the second interval Q2, the droplet can be detected, that is, the microfluidic device provided by the present disclosure can simultaneously realize operations such as detection and separation.

[0094] Optionally, the detection layer 36 can be an ion sensitive layer. The detection layer 36 can be set as a whole layer, or multiple detection layers 36 arranged in an array can be set. The detection layer 36 can also be multiple photosensitive detection units arranged in an array. Of course, the detection layer 36 can also be other detection layers, which can be specifically set according to actual needs, and the present disclosure will not go into details here.

[0095] Continue to refer Figure 1 and Fig.10 In some optional embodiments, along a direction perpendicular to the plane where the third substrate 30 is located, a height of the first interval Q1 is greater than a height of the second interval Q2.

[0096] Specifically, along a direction perpendicular to the plane where the third substrate 30 is located, the height of the first interval Q1 is H1, and the height of the second interval Q2 is H2, wherein H1 is greater than H2, that is, the height of the first interval Q1 is greater than the height of the second interval Q2.

[0097] After the droplet enters the first interval Q1, the electric field between the first driving electrode 24 and the first electrode 12 can be adjusted to realize the movement of the droplet in the first interval Q1, so that the droplet can be initially separated in the first interval Q1. After the droplet moves from the first interval Q1 to the second interval Q2 through the first through hole 21 after the initial separation, the droplet can be moved in the second interval Q2 after the initial separation by adjusting the electric field between the second driving electrode 33 and the second electrode 25, so that the droplet after the initial separation can be further separated. Since the volume of the droplet after the initial separation in the second interval Q2 is smaller than the volume of the droplet that has not been separated in the first interval Q1, accordingly, the height of the first interval Q1 is greater than the height of the second interval Q2, which is conducive to driving the movement of droplets of different volumes, that is, it is conducive to realizing high-precision droplet driving.

[0098] Continue to refer Figure 1 and Fig.10In some optional embodiments, the first substrate 10 includes at least one second through hole 14, and the second through hole 14 penetrates the first substrate 10 along a direction perpendicular to the plane where the third substrate 30 is located;

[0099] The vertical projection of the second through hole 14 on the plane where the third substrate 30 is located does not overlap with the vertical projection of the first through hole 21 on the plane where the third substrate 30 is located.

[0100] Specifically, the first substrate 10 includes at least one second through hole 14 , and the second through hole 14 penetrates the first substrate 10 along a direction perpendicular to the plane where the third substrate 30 is located, so that the droplet can enter the first interval Q1 through the second through hole 14 .

[0101] After the droplet enters the first interval Q1, the electric field between the first driving electrode 24 and the first electrode 12 can be adjusted to enable the droplet to move in the first interval Q1, so that the droplet can be initially separated in the first interval Q1, and after the droplet is initially separated, it moves from the first interval Q1 to the second interval Q2 through the first through hole 21, and the electric field between the second driving electrode 33 and the second electrode 25 can be adjusted to enable the droplet to move in the second interval Q2 after the initial separation, so that the droplet after the initial separation can be further separated. The vertical projection of the second through hole 14 on the plane where the third substrate 30 is located does not overlap with the vertical projection of the first through hole 21 on the plane where the third substrate 30 is located, so as to prevent the droplet from directly moving to the second interval Q2 through the second through hole 14 and the first through hole 21, so that the droplet can be initially separated in the first interval Q1.

[0102] It should be noted that Figure 1 An arrangement of the second through holes 14 is exemplarily shown in the figure. In other embodiments of the present disclosure, the second through holes 14 may also be arranged in other ways, and the present disclosure does not limit the number and size of the second through holes 14 in the first substrate 10. The number and size of the second through holes 14 in the first substrate 10 may be set according to actual needs, and the corresponding relationship between the first through holes 21 and the second through holes 14 is not limited in the present disclosure. It is sufficient to ensure that the vertical projection of the second through holes 14 on the plane where the third substrate 30 is located does not overlap with the vertical projection of the first through holes 21 on the plane where the third substrate 30 is located. The present disclosure will not go into details here.

[0103] It should be noted that in other embodiments of the present disclosure, the droplets may enter the first interval Q1 through other configurations, which will not be elaborated in detail in the present disclosure.

[0104] Continue to refer Figure 1 and Fig.10 In some optional embodiments, the first through hole 21 includes a first orifice 211, and the first orifice 211 is located on a side of the first through hole 21 close to the first substrate 10;

[0105] The second through hole 14 includes a third opening 141, and the third opening 141 is located at a side of the second through hole 14 away from the second substrate 20;

[0106] The area of ​​the vertical projection pattern of the third opening 141 on the plane where the third substrate 30 is located is greater than the area of ​​the vertical projection pattern of the first opening 211 on the plane where the third substrate 30 is located.

[0107] Specifically, the second through hole 14 includes a third orifice 141, which is located on the side of the second through hole 14 away from the second substrate 20. The droplet enters the second through hole 14 through the third orifice 141, and then enters the first interval Q1 through the second through hole 14. The droplet can be subjected to primary separation and other operations in the first interval Q1. The first through hole 21 includes a first orifice 211, which is located on the side of the first through hole 21 close to the first substrate 10. After the initial separation, the droplet enters the first through hole 21 through the first orifice 211, and then enters the second interval Q2 through the first through hole 21. Since the volume of the droplet after the initial separation in the first interval Q1 is smaller than the volume of the droplet that has not been separated, accordingly, the area of ​​the vertical projection pattern of the third orifice 141 on the plane where the third substrate 30 is located is larger than the area of ​​the vertical projection pattern of the first orifice 211 on the plane where the third substrate 30 is located, that is, the size of the third orifice 141 is larger than the size of the first orifice 211, thereby facilitating the movement of droplets of different volumes.

[0108] Optionally, the second through hole 14 includes a third orifice 141 and a fourth orifice 142 that are arranged opposite to each other, wherein the third orifice 141 is located on a side of the second through hole 14 away from the second substrate 20, and the fourth orifice 142 is located on a side of the second through hole 14 close to the second substrate 20, and an area of ​​a vertical projection pattern of the third orifice 141 on a plane where the third substrate 30 is located is smaller than an area of ​​a vertical projection pattern of the fourth orifice 142 on a plane where the third substrate 30 is located, that is, in the second through hole 14, a size of the fourth orifice 142 is larger than a size of the third orifice 141, so that when a droplet enters the second through hole 14 through the third orifice 141 and moves through the second through hole 14 to the first interval Q1, the droplet is effectively prevented from adhering and accumulating in the second through hole 14, which is beneficial to improving the accuracy of the volume of the droplet after entering the first interval Q1.

[0109] Fig.12 is a plan view of another microfluidic device provided by the present disclosure, Fig.13 yes Fig.12 A cross-sectional view of the microfluidic device along C-C', referring to Fig.12 and Fig.13 In some optional embodiments, the microfluidic device further includes a fourth substrate 40, and the fourth substrate 40 is located between the second substrate 20 and the third substrate 30;

[0110] The fourth substrate 40 includes at least one third through hole 41, which passes through the fourth substrate 40 along a direction perpendicular to the plane where the third substrate 30 is located, and the vertical projection of the third through hole 41 on the plane where the third substrate 30 is located does not overlap with the vertical projection of the first through hole 21 on the plane where the third substrate 30 is located.

[0111] Specifically, the microfluidic device further includes a fourth substrate 40, which is located between the second substrate 20 and the third substrate 30, wherein, along a direction perpendicular to the plane where the first substrate 10 is located, a first interval Q1 is included between the first substrate 10 and the second substrate 20, and the first interval Q1 can be used to accommodate droplets. Along a direction perpendicular to the plane where the first substrate 10 is located, a first sub-interval Q21 is included between the second substrate 20 and the fourth substrate 40, and the first sub-interval Q21 can also accommodate droplets. Along a direction perpendicular to the plane where the first substrate 10 is located, a second sub-interval Q22 is included between the fourth substrate 40 and the third substrate 30, and the second sub-interval Q22 can also accommodate droplets.

[0112] The fourth substrate 40 includes at least one third through hole 41, and the third through hole 41 passes through the fourth substrate 40 in a direction perpendicular to the plane where the third substrate 30 is located. The first sub-interval Q21 and the second sub-interval Q22 can be connected through the third through hole 41, so that the droplets can move between the first interval Q1 and the second interval Q2 through the third through hole 41, and the first sub-interval Q21 and the second sub-interval Q22 can be used to accommodate droplets, so that high-throughput droplet injection storage can be achieved. At the same time, the sample and the reagent solution can be subjected to primary separation and mixing in the first interval Q1, and then the droplets after the treatment are driven to enter the first sub-interval Q21 for subsequent operations, and then the droplets after the treatment are driven to enter the second sub-interval Q22 for further subsequent operations, so that higher-precision sample processing can be achieved in the second sub-interval Q22. That is, the microfluidic device provided in the embodiment of the present disclosure is compatible with the requirements of high-throughput and high-precision injection.

[0113] The vertical projection of the third through hole 41 on the plane where the third substrate 30 is located does not overlap with the vertical projection of the first through hole 21 on the plane where the third substrate 30 is located, thereby preventing the droplets from directly entering the second sub-interval Q22 through the first through hole 21 and the third through hole 41, so that the droplets can perform corresponding operations in the first sub-interval Q21.

[0114] It should be noted that Fig.12An arrangement of the first through hole 21, the second through hole 14 and the third through hole 41 is exemplarily shown in the figure. In other embodiments of the present disclosure, the first through hole 21, the second through hole 14 and the third through hole 41 may also adopt other arrangements, and the present disclosure does not limit the number and shape of the first through hole 21, the second through hole 14 and the third through hole 41 in the microfluidic device. The number and shape of the first through hole 21, the second through hole 14 and the third through hole 41 in the microfluidic device can be set according to actual needs, and the present disclosure will not go into details here.

[0115] Optionally, along the direction perpendicular to the plane where the third substrate 30 is located, the height of the first sub-interval Q21 is greater than the height of the second sub-interval Q22. The area of ​​the vertical projection pattern of the opening of the third through hole 41 close to the second substrate 20 on the plane where the third substrate 30 is located is smaller than the area of ​​the vertical projection pattern of the opening of the first through hole 21 close to the first substrate 10 on the plane where the third substrate 30 is located. The area of ​​the vertical projection pattern of the third driving electrode 42 in the fourth substrate 40 on the plane where the third substrate 30 is located may be smaller than the area of ​​the vertical projection pattern of the first driving electrode 24 on the plane where the third substrate 30 is located. The arrangement of other film layers in the fourth substrate 40 may refer to the arrangement of the corresponding film layers in the second substrate 20, and the present disclosure will not be repeated here.

[0116] It should be noted that in other embodiments of the present disclosure, more layers of substrates may be arranged between the first substrate 10 and the third substrate 30 to meet different needs. The arrangement of the substrates between the first substrate 10 and the third substrate 30 may be arranged with reference to the structure of the second substrate 20. There is no specific corresponding relationship in the distribution of the through holes in each substrate. It is only necessary to satisfy that the through holes of the two adjacent substrates do not overlap in the direction perpendicular to the plane where the third substrate 30 is located. The present disclosure will not elaborate on this.

[0117] It should be noted that, in this article, relational terms such as "first" and "second" are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, the elements defined by the sentence "comprise a ..." do not exclude the existence of other identical elements in the process, method, article or device including the elements.

[0118] The above description is only a specific embodiment of the present disclosure, so that those skilled in the art can understand or implement the present disclosure. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present disclosure. Therefore, the present disclosure will not be limited to the embodiments described herein, but will conform to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A microfluidic device, characterized in that: include: A first substrate, a second substrate and a third substrate are stacked, wherein the second substrate is located between the first substrate and the third substrate; Along a direction perpendicular to the plane where the first substrate is located, a first gap is included between the first substrate and the second substrate, and a second gap is included between the second substrate and the third substrate; The second substrate includes at least one first through hole, and the first through hole penetrates the second substrate along a direction perpendicular to the plane where the second substrate is located; the first interval is connected to the second interval through the first through hole.

2. The microfluidic device according to claim 1, characterized in that: The first substrate comprises a first substrate and a first electrode, wherein the first electrode is located on a side of the first substrate close to the second substrate; The second substrate includes a second substrate, a first array layer, a first driving electrode and a second electrode. The first array layer is located on a side of the second substrate close to the first substrate, the first driving electrode is located on a side of the first array layer close to the first substrate, the second electrode is located on a side of the second substrate close to the third substrate, and the first driving electrodes are arranged in an array.

3. The microfluidic device according to claim 2, characterized in that: The first electrode includes a first sub-electrode and a second sub-electrode, the second sub-electrode and the first through hole are arranged correspondingly, and the vertical projection of the second sub-electrode on the plane where the third substrate is located and the vertical projection of the corresponding first through hole on the plane where the third substrate is located at least partially overlap.

4. The microfluidic device according to claim 3, characterized in that: The first substrate further includes a first connecting line, the first connecting line and the first electrode are located on the same side of the first substrate, and the first connecting line and the second sub-electrode are connected correspondingly; The first sub-electrode includes a first gap, and the first connecting line is located in the first gap.

5. The microfluidic device according to claim 4, characterized in that: A vertical projection of the first slit on the plane where the third substrate is located and a vertical projection of the gap between the first driving electrodes on the plane where the third substrate is located at least partially overlap.

6. The microfluidic device according to claim 4, characterized in that: One end of each of the first connecting lines is connected to the second sub-electrode corresponding thereto, and the other end of each of the first connecting lines extends to the same end of the first substrate.

7. The microfluidic device according to claim 3, characterized in that: The first through hole includes a first opening, which is located on a side of the first through hole close to the first substrate, and the vertical projection of the second sub-electrode on the plane where the third substrate is located is located within the vertical projection of the first opening of the first through hole corresponding to it on the plane where the third substrate is located.

8. The microfluidic device according to claim 2, characterized in that: The first driving electrode includes a third sub-electrode, the third sub-electrode corresponds to the first through hole, and a portion of the first through hole passes through the corresponding third sub-electrode along a direction perpendicular to the plane where the third substrate is located.

9. The microfluidic device according to claim 2, characterized in that: The first driving electrode includes a fourth sub-electrode, the first through hole corresponds to a sub-electrode group, the sub-electrode group includes a plurality of the fourth sub-electrodes, and each of the fourth sub-electrodes in the sub-electrode group is arranged around the first through hole corresponding thereto; The portion of the first through hole is the missing portion of each of the fourth sub-electrodes in the sub-electrode group corresponding thereto.

10. The microfluidic device according to claim 2, characterized in that: The second substrate further includes a third electrode, the third electrode corresponds to the first through hole, and the third electrode is located on a side wall of the first through hole corresponding to the third electrode.

11. The microfluidic device according to claim 10, characterized in that: The second substrate further includes a second connecting line, the second connecting line and the second electrode are located on the same side of the second substrate, and the second connecting line and the third electrode are connected correspondingly; The second electrode includes a second gap, and the second connecting line is located in the second gap.

12. The microfluidic device according to claim 2, characterized in that: The second substrate further includes a first hydrophobic layer, and the first driving electrode near the first substrate, the second electrode near the third substrate, and the inner wall of the first through hole are all provided with the first hydrophobic layer.

13. The microfluidic device according to claim 1, characterized in that: The first through hole comprises a first opening and a second opening which are arranged opposite to each other, wherein the first opening is located on a side of the first through hole close to the first substrate, and the second opening is located on a side of the first through hole close to the third substrate; An area of ​​a vertical projection pattern of the first hole on the plane where the third substrate is located is smaller than an area of ​​a vertical projection pattern of the second hole on the plane where the third substrate is located.

14. The microfluidic device according to claim 2, characterized in that: The third substrate includes a third substrate, a second array layer and a second driving electrode. The second array layer is located on a side of the third substrate close to the second substrate. The second driving electrode is located on a side of the second array layer close to the second substrate. The second driving electrodes are arranged in an array.

15. The microfluidic device according to claim 14, characterized in that: An area of ​​a vertical projection pattern of the first driving electrode on the plane where the third substrate is located is larger than an area of ​​a vertical projection pattern of the second driving electrode on the plane where the third substrate is located.

16. The microfluidic device according to claim 2, characterized in that: The third substrate includes a third substrate, a second array layer and a detection layer, wherein the second array layer is located on a side of the third substrate close to the second substrate, and the detection layer is located on a side of the second array layer close to the second substrate.

17. The microfluidic device according to claim 1, characterized in that: Along a direction perpendicular to a plane where the third substrate is located, a height of the first interval is greater than a height of the second interval.

18. The microfluidic device according to claim 1, characterized in that: The first substrate comprises at least one second through hole, and the second through hole penetrates the first substrate along a direction perpendicular to the plane where the third substrate is located; A vertical projection of the second through hole on the plane where the third substrate is located does not overlap with a vertical projection of the first through hole on the plane where the third substrate is located.

19. The microfluidic device according to claim 18, characterized in that: The first through hole comprises a first opening, and the first opening is located on a side of the first through hole close to the first substrate; The second through hole comprises a third opening, and the third opening is located at a side of the second through hole away from the second substrate; An area of ​​a vertical projection pattern of the third opening on a plane where the third substrate is located is greater than an area of ​​a vertical projection pattern of the first opening on a plane where the third substrate is located.

20. The microfluidic device according to claim 1, characterized in that The microfluidic device further includes a fourth substrate, wherein the fourth substrate is located between the second substrate and the third substrate; The fourth substrate includes at least one third through hole, which passes through the fourth substrate along a direction perpendicular to the plane where the third substrate is located, and the vertical projection of the third through hole on the plane where the third substrate is located does not overlap with the vertical projection of the first through hole on the plane where the third substrate is located.

Images