Cold trap cleaning equipment and cleaning method

Abstract

The invention provides cold trap cleaning equipment and a cleaning method. A cold trap group is arranged on a first pipeline, two ends of the first pipeline are respectively provided with a first valve and a seventh valve, the first pipeline is connected with one end of a second pipeline between the first valve and the cold trap group, and the first pipeline is connected with the other end of the second pipeline between the seventh valve and the cold trap group; the washing assembly is arranged on a second pipeline, the second pipeline is provided with a thirteenth valve and a ninth valve on the two sides of the washing assembly respectively, the second pipeline is provided with an eighth valve on the side, away from the washing assembly, of the ninth valve, and the second pipeline is connected with one end of a third pipeline between the thirteenth valve and the washing assembly. The second pipeline is connected with the other end of the third pipeline on one side of the eighth valve far away from the ninth valve; a fifteenth valve and a sixteenth valve are respectively arranged at two ends of the third pipeline; the second pipeline is connected with the fourth pipeline, the fourth pipeline is connected with the fifth pipeline, the drying assembly is arranged on the fifth pipeline, the cold trap method is improved, and the cleaning efficiency is improved.

Description

Technical Field

[0001] The present application relates to the technical field of equipment cleaning, and in particular to a cold trap cleaning device and a cleaning method. Background Art

[0002] In the LCD panel production system, the cold trap provides a very low temperature surface to condense the oil, gas and water vapor in the vacuum chamber into liquid or solid, reducing the impact on the vacuum degree, thereby improving the working efficiency of the vacuum pump. The gas in the vacuum chamber contains substances such as photoresist. After a period of use, the photoresist will adhere to the cooling pipe of the cold trap, affecting the cooling effect, and requires regular cleaning. Due to the unique closed structure of the cold trap, each cleaning requires the removal of all the fixing screws on the product and separate cleaning, which makes the cleaning process complicated and takes too long. Summary of the invention

[0003] The purpose of the present application is to provide a cold trap cleaning device to clean the cold trap, improve the cold trap cleaning method, and improve the cleaning efficiency.

[0004] The embodiment of the present application is implemented as follows:

[0005] In a first aspect, an embodiment of the present application provides a cold trap cleaning device, including a cold trap group, a water washing component and a drying component;

[0006] The cold trap group is arranged on the first pipeline, the first valve and the seventh valve are arranged at both ends of the first pipeline respectively, the first pipeline is connected to one end of the second pipeline between the first valve and the cold trap group, and the first pipeline is connected to the other end of the second pipeline between the seventh valve and the cold trap group; the water washing component is arranged on the second pipeline, the thirteenth valve and the ninth valve are arranged on both sides of the water washing component of the second pipeline respectively, the eighth valve is arranged on the side of the ninth valve away from the water washing component of the second pipeline, the second pipeline is connected to one end of the third pipeline between the thirteenth valve and the water washing component, the second pipeline is connected to the other end of the third pipeline on the side of the eighth valve away from the ninth valve, and the fifteenth valve and the sixteenth valve are arranged at both ends of the third pipeline respectively; the second pipeline The first pipeline is connected to one end of the fourth pipeline at the side of the thirteenth valve away from the water washing component, the second pipeline is connected to the other end of the fourth pipeline between the ninth valve and the eighth valve, the fourteenth valve close to the thirteenth valve and the tenth valve close to the ninth valve are respectively arranged at both ends of the fourth pipeline, the twelfth valve is arranged next to the tenth valve of the fourth pipeline, the fourth pipeline is connected to the fifth pipeline between the tenth valve and the twelfth valve, the drying component is arranged on the fifth pipeline, and the eleventh valve is arranged at the head end of the fifth pipeline; the cold trap group includes at least one cold trap arranged in sequence on the first pipeline, the water washing component includes a water tank, the water tank is equipped with a pump close to the ninth valve, the drying component includes a heater, and the heater is equipped with a blower.

[0007] Further, the cold trap assembly includes a first cold trap, a second cold trap and a third cold trap which are arranged in sequence, the first cold trap is close to the first valve, the second valve is arranged between the first cold trap and the second cold trap, and the fifth valve is arranged between the second cold trap and the third cold trap; the first pipe is connected to the head end of the first branch pipe between the first cold trap and the second valve, the first pipe is connected to one end of the second branch pipe between the second cold trap and the fifth valve, the other end of the second branch pipe is connected to the first branch pipe, the first pipe is connected to one end of the third branch pipe between the third cold trap and the seventh valve, the other end of the third branch pipe is connected to the end of the first branch pipe, the third valve is arranged on the side of the first branch pipe away from the third branch pipe, the fourth valve is arranged on the second branch pipe, and the sixth valve is arranged on the third branch pipe.

[0008] In a second aspect, an embodiment of the present application provides a cold trap cleaning method, using the aforementioned cold trap cleaning device, the cleaning steps are:

[0009] S1. Washing:

[0010] S11, counterclockwise cleaning: close the tenth valve, the sixteenth valve, the seventh valve, the first valve, the fourteenth valve, and the fifteenth valve, open the ninth valve, the eighth valve, and the thirteenth valve, turn on the pump, the washing liquid is pumped out through the ninth valve, flows counterclockwise through the second pipeline, the first pipeline, the cold trap, the second pipeline, and then returns to the sink, and circulates and cleans for 1-2 hours, then turns off the pump;

[0011] S12, clockwise cleaning: close the eighth valve, the eleventh valve, the thirteenth valve, the first valve, the seventh valve, open the ninth valve, the tenth valve, the twelfth valve, the fourteenth valve, the fifteenth valve, the sixteenth valve, turn on the pump, the washing liquid is pumped out through the ninth valve, and flows clockwise through the second pipeline, the fourth pipeline, the second pipeline, the first pipeline, the cold trap, the second pipeline, the third pipeline, the second pipeline and then returns to the sink, and the cycle cleaning is carried out for 1-2 hours, and the pump is turned off; the order of steps S11 and S12 can be reversed;

[0012] S2. Open the drain valve of the cold trap to drain the water washing liquid in the cold trap;

[0013] S3, drying:

[0014] S31, clockwise drying: close the tenth valve, the thirteenth valve, the first valve, the sixteenth valve, and the eighth valve, open the eleventh valve, the twelfth valve, the fourteenth valve, and the seventh valve, turn on the heater and the blower, and the hot air flows out through the eleventh valve and the twelfth valve, and flows clockwise through the fifth pipeline, the fourth pipeline, the second pipeline, the first pipeline, and the cold trap, and then is discharged from the seventh valve through the first pipeline. Circulate and bake for 1-2 hours, and then turn off the heater and the blower;

[0015] S32, counterclockwise drying: close the twelfth valve, the sixteenth valve, the ninth valve, the seventh valve, the thirteenth valve, and the fourteenth valve, open the eleventh valve, the tenth valve, the eighth valve, and the first valve, turn on the heater and the blower, and the hot air flows out through the eleventh valve and the tenth valve, and flows counterclockwise through the fifth pipeline, the fourth pipeline, the second pipeline, the first pipeline, and the cold trap, and is discharged from the first valve through the first pipeline. Circulate and bake for 1-2 hours, and turn off the heater and the blower; the order of steps S31 and S32 can be swapped.

[0016] In the cleaning steps S1 and S3, selective cleaning of the first cold trap, the second cold trap and the third cold trap is achieved by controlling the opening and closing states of the second valve, the third valve, the fourth valve, the fifth valve and the sixth valve.

[0017] Further, the selective cleaning method for the first cold trap, the second cold trap and the third cold trap is:

[0018] When cleaning the first cold trap, open the sixth valve and the third valve, and close the fifth valve, the fourth valve, and the second valve;

[0019] When cleaning the first cold trap + the second cold trap, open the sixth valve, the fourth valve, and the second valve, and close the third valve and the fifth valve;

[0020] When cleaning the first cold trap + the third cold trap, open the third valve, the fourth valve, and the fifth valve, and close the second valve and the sixth valve;

[0021] When cleaning the first cold trap + the second cold trap + the third cold trap, open the second valve and the fifth valve, and close the third valve, the fourth valve, and the sixth valve.

[0022] Further, the water washing liquid includes medicine and purified water; step S1 includes:

[0023] S11, counterclockwise cleaning with liquid medicine: close the tenth valve, the sixteenth valve, the seventh valve, the first valve, the fourteenth valve, and the fifteenth valve, open the ninth valve, the eighth valve, and the thirteenth valve, turn on the pump, the liquid medicine is pumped out through the ninth valve, flows counterclockwise through the second pipe, the first pipe, the cold trap, the second pipe, and then returns to the sink, circulates and cleans for 1-2 hours, and then turns off the pump;

[0024] S12, clockwise cleaning with liquid medicine: close the eighth valve, the eleventh valve, the thirteenth valve, the first valve, and the seventh valve, open the ninth valve, the tenth valve, the twelfth valve, the fourteenth valve, the fifteenth valve, and the sixteenth valve, turn on the pump, the liquid medicine is pumped out through the ninth valve, flows clockwise through the second pipe, the fourth pipe, the second pipe, the first pipe, the cold trap, the second pipe, the third pipe, and the second pipe, and then returns to the sink, and the cycle cleaning is carried out for 1-2 hours, and the pump is turned off; the order of steps S11 and S12 can be reversed;

[0025] S13, counterclockwise pure water cleaning: replace the medicinal water in the water tank with pure water, and repeat S11 operation;

[0026] S14, clockwise pure water cleaning: replace the medicinal water in the water tank with pure water, and repeat the operation of S12; the order of steps S13 and S14 can be swapped.

[0027] Furthermore, the mass percentages of the components in the S1 medicinal water are: 20% NH 3 ·H 2 O, 40% NaOH, 20% H 2 O, 20% Fe(OH) 2 .

[0028] Compared with the prior art, the embodiments of the present application have at least the following advantages or beneficial effects:

[0029] The present invention provides a cold trap cleaning device and a cleaning method, which cleverly arrange pipelines, valves, water washing components and drying components, and can realize clockwise water washing, counterclockwise water washing, clockwise drying and counterclockwise drying of the cold trap. Multiple cold traps can be cleaned at the same time, replacing the traditional cleaning method of disassembling products. The cleaning operation is simple to operate and has high efficiency, which can effectively reduce labor costs, and the water washing liquid can be circulated and recycled without pollution to the environment. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without paying creative work.

[0031] Figure 1 A schematic diagram of a cold trap cleaning device provided in Example 1 of the present application;

[0032] Figure 2 This is a schematic diagram of the counterclockwise washing operation in Example 1 of the present application;

[0033] Figure 3 This is a schematic diagram of the clockwise washing operation in Example 1 of the present application;

[0034] Figure 4 This is a schematic diagram of the clockwise drying operation in Example 1 of the present application;

[0035] Figure 5 This is a schematic diagram of the counterclockwise drying operation in Example 1 of the present application;

[0036] Figure 6A schematic diagram of a cold trap cleaning device provided in Example 2 of the present application;

[0037] Figure 7 This is a schematic diagram of the operation of washing the first cold trap counterclockwise in Example 2 of the present application;

[0038] Figure 8 This is a schematic diagram of the clockwise water washing operation of the first cold trap in Example 2 of the present application;

[0039] Fig. 9 This is a schematic diagram of the clockwise drying operation of the first cold trap in Example 2 of the present application;

[0040] Fig.10 This is a schematic diagram of the operation of counterclockwise drying the first cold trap in Example 2 of the present application;

[0041] Fig.11 This is a schematic diagram of the operation of washing the first cold trap + the second cold trap counterclockwise in Example 2 of the present application;

[0042] Fig.12 This is a schematic diagram of the operation of washing the first cold trap + the third cold trap counterclockwise in Example 2 of the present application;

[0043] Fig.13 This is a schematic diagram of the operation of washing the first cold trap + the second cold trap + the third cold trap counterclockwise in Example 2 of the present application;

[0044] Icons: 11-first pipeline, 12-second pipeline, 13-third pipeline, 14-fourth pipeline, 15-fifth pipeline, 111-first branch pipe, 112-second branch pipe, 113-third branch pipe, 201-first valve, 202-second valve, 203-third valve, 204-fourth valve, 205-fifth valve, 206-sixth valve, 207-seventh valve, 208-eighth valve, 209-ninth valve, 210-tenth valve, 211-eleventh valve, 212-twelfth valve, 213-thirteenth valve, 214-fourteenth valve, 215-fifteenth valve, 216-sixteenth valve, 31-sink, 32-pump, 41-heater, 42-blower, 5-cold trap, 51-first cold trap, 52-second cold trap, 53-and third cold trap. DETAILED DESCRIPTION

[0045] In order to make the purpose, technical solution and advantages of the embodiments of the present application clearer, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, rather than all the embodiments. The components of the embodiments of the present application described and shown in the drawings here can be arranged and designed in various different configurations.

[0046] Therefore, the following detailed description of the embodiments of the present application provided in the accompanying drawings is not intended to limit the scope of the present application for which protection is sought, but merely represents selected embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in the field without creative work are within the scope of protection of the present application.

[0047] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0048] In the description of the embodiments of the present application, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be directly connected, or indirectly connected through an intermediate medium, or it can be internal communication between two components. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0049] In the description of the embodiments of the present application, it should be noted that the terms "first", "second", "third", etc. are only used to distinguish the description and cannot be understood as indicating or implying relative importance. In the description of the embodiments of the present application, "multiple" means at least 2. Any component that is not described as "open" or "closed" can be understood as not limiting the open and closed state. For ordinary technicians in this field, the open and closed state can be understood according to the specific circumstances.

[0050] Example 1

[0051] Please refer to Figure 1 The present embodiment provides a cold trap cleaning device, including a cold trap group, a water washing component and a drying component. The cold trap group includes at least one cold trap 5 sequentially arranged on the first pipe 11. In the present embodiment, the number of cold traps 5 is three. In other embodiments of the invention, the number of cold traps 5 may be one or more. The water washing component includes a water tank 31, and the water tank 31 is equipped with a pump 32 near the ninth valve 209. The drying component includes a heater 41, and the heater 41 is equipped with a blower 42.

[0052] The cold trap group is arranged on the first pipeline 11, the cooling pipeline inlet and the cooling pipeline outlet of the cold trap 5 are respectively connected to the first pipeline 11 on both sides, the first valve 201 and the seventh valve 207 are respectively arranged at both ends of the first pipeline 11, the first pipeline 11 is connected to one end of the second pipeline 12 between the first valve 201 and the cold trap group, and the first pipeline 11 is connected to the other end of the second pipeline 12 between the seventh valve 207 and the cold trap group. The water washing assembly is arranged on the second pipeline 12, the thirteenth valve 213 and the ninth valve 209 are respectively arranged on both sides of the water washing assembly of the second pipeline 12, the eighth valve 208 is arranged on the side of the second pipeline 12 away from the water washing assembly at the ninth valve 209, the second pipeline 12 is connected to one end of the third pipeline 13 between the thirteenth valve 213 and the water washing assembly, the second pipeline 12 is connected to the other end of the third pipeline 13 at the side of the eighth valve 208 away from the ninth valve 209, and the fifteenth valve 215 and the sixteenth valve 216 are respectively arranged at both ends of the third pipeline 13. The second pipeline 12 is connected to one end of the fourth pipeline 14 at the side of the thirteenth valve 213 away from the water washing component, and the second pipeline 12 is connected to the other end of the fourth pipeline 14 between the ninth valve 209 and the eighth valve 208. The fourteenth valve 214 close to the thirteenth valve 213 and the tenth valve 210 close to the ninth valve 209 are respectively arranged at both ends of the fourth pipeline 14. The fourth pipeline 14 is provided with a twelfth valve 212 next to the tenth valve 210. The fourth pipeline 14 is connected to the fifth pipeline 15 between the tenth valve 210 and the twelfth valve 212. The drying component is arranged in the fifth pipeline 15, and the eleventh valve 211 is arranged at the head end of the fifth pipeline 15.

[0053] In the LCD panel production system, the cold trap provides a very low temperature surface to condense the oil and water vapor in the vacuum chamber into liquid or solid, reducing the impact on the vacuum degree, thereby improving the working efficiency of the vacuum pump 32. The gas in the vacuum chamber contains substances such as photoresist. After a period of use, the photoresist will adhere to the cooling pipe of the cold trap, affecting the cooling effect, and requires regular cleaning. Using the above-mentioned cold trap cleaning equipment, the cleaning steps of the cold trap in this embodiment are:

[0054] S1. Washing:

[0055] S11, such as Figure 2 As shown, counterclockwise cleaning with chemical solution: close the tenth valve 210, the sixteenth valve 216, the seventh valve 207, the first valve 201, the fourteenth valve 214, and the fifteenth valve 215, open the ninth valve 209, the eighth valve 208, and the thirteenth valve 213, turn on the pump 32, the chemical solution is pumped out through the ninth valve 209 pump 32, flows counterclockwise through the second pipe 12, the first pipe 11, the cold trap 5, the second pipe 12 in turn, and then returns to the water tank 31, and circulates for cleaning for 1-2 hours, and then turns off the pump 32.

[0056] S12, such as Figure 3As shown, clockwise cleaning with liquid medicine: close the eighth valve 208, the eleventh valve 211, the thirteenth valve 213, the first valve 201, the seventh valve 207, open the ninth valve 209, the tenth valve 210, the twelfth valve 212, the fourteenth valve 214, the fifteenth valve 215, the sixteenth valve 216, open the pump 32, the liquid medicine is pumped out of the ninth valve 209 pump 32, and flows clockwise through the second pipe 12, the fourth pipe 14, the second pipe 12, the first pipe 11, the cold trap 5, the second pipe 12, the third pipe 13, the second pipe 12 and then returns to the water tank 31, and the cycle cleaning is 1-2 hours, and the pump 32 is closed. The order of steps S11 and S12 can be reversed.

[0057] The mass percentages of the components of the medicine in this embodiment include: the mass percentages of the components in the medicine are: 20% NH 3 ·H 2 O, 40% NaOH, 20% H 2 O, 20% Fe(OH) 2 The solubility of photoresist in alkaline stripping solution increases, so it is dissolved. Photoresist contains certain acidic parts, such as acidic photoinitiators. In an alkaline environment, these acidic parts will be neutralized, further destroying the structure of the photoresist.

[0058] S13, counterclockwise pure water cleaning: replace the medicinal water in the water tank 31 with pure water, and repeat the operation of S11.

[0059] S14, clockwise pure water cleaning: replace the medicinal water in the water tank 31 with pure water, and repeat the operation of S12. The order of steps S21 and S22 can be reversed.

[0060] S2. Open the drain valve of the cold trap 5 to drain the pure water in the cold trap 5.

[0061] S3, drying:

[0062] S31, such as Figure 4 As shown, clockwise drying: close the tenth valve 210, the thirteenth valve 213, the first valve 201, the sixteenth valve 216, and the eighth valve 208, open the eleventh valve 211, the twelfth valve 212, the fourteenth valve 214, and the seventh valve 207, turn on the heater 41 and the blower 42, and the hot air flows out through the eleventh valve 211 and the twelfth valve 212, and flows clockwise through the fifth pipeline 15, the fourth pipeline 14, the second pipeline 12, the first pipeline 11, and the cold trap 5 in sequence, and then is discharged from the seventh valve 207 through the first pipeline 11. The cycle baking is carried out for 1-2 hours, and the heater 41 and the blower 42 are turned off.

[0063] S32, such as Figure 5As shown, counterclockwise drying: close the twelfth valve 212, the sixteenth valve 216, the ninth valve 209, the seventh valve 207, the thirteenth valve 213, and the fourteenth valve 214, open the eleventh valve 211, the tenth valve 210, the eighth valve 208, and the first valve 201, open the heater 41 and the blower 42, and the hot air flows out through the eleventh valve 211 and the tenth valve 210, and flows counterclockwise through the fifth pipeline 15, the fourth pipeline 14, the second pipeline 12, the first pipeline 11, and the cold trap 5, and then is discharged from the first valve 201 through the first pipeline 11, and the cycle baking is 1-2h, and the heater 41 and the blower 42 are turned off. The order of steps S31 and S32 can be reversed.

[0064] The present invention cleverly arranges pipelines, valves, water washing components and drying components, and can realize clockwise water washing, counterclockwise water washing, clockwise drying and counterclockwise drying of the cold trap 5. Multiple cold traps 5 can be cleaned at the same time, replacing the traditional cleaning method of dismantling products. The cleaning operation is simple to operate and has high efficiency, which can effectively reduce labor costs. The water washing liquid can be circulated and recycled without pollution to the environment.

[0065] Example 2

[0066] Please refer to Figure 6 , this embodiment adds on the basis of embodiment 1: the cold trap assembly includes a first cold trap 515, a second cold trap 525 and a third cold trap 535 arranged in sequence, the first cold trap 515 is close to the first valve 201, a second valve 202 is arranged between the first cold trap 515 and the second cold trap 525, and a fifth valve 205 is arranged between the second cold trap 525 and the third cold trap 5; the first pipeline 11 is connected to the head end of the first branch pipe 111 between the first cold trap 515 and the second valve 202, and the first pipeline 11 is connected to the second cold trap 52 5 and the fifth valve 205 are connected to one end of the second branch pipe 112, the other end of the second branch pipe 112 is connected to the first branch pipe 111, the first pipeline 11 is connected to one end of the third branch pipe 113 between the third cold trap 5 and the seventh valve 207, the other end of the third branch pipe 113 is connected to the end of the first branch pipe 111, the first branch pipe 111 is provided with a third valve 203 on a side of the second branch pipe 112 away from the third branch pipe 113, the second branch pipe 112 is provided with a fourth valve 204, and the third branch pipe 113 is provided with a sixth valve 206.

[0067] By controlling the opening and closing states of the second valve 202, the third valve 203, the fourth valve 204, the fifth valve 205, and the sixth valve 206, selective cleaning of the first cold trap 515, the second cold trap 525, and the third cold trap 535 is achieved, and the cleaning target can be adjusted according to actual needs, thereby improving the flexibility and practicality of the equipment. Specifically:

[0068] When cleaning the first cold trap 515, the sixth valve 206 and the third valve 203 are opened, and the fifth valve 205, the fourth valve 204, and the second valve 202 are closed. Figure 7 The diagram is a schematic diagram of the operation of cleaning the first cold trap 515 counterclockwise; Figure 8 This is a schematic diagram of the operation of cleaning the first cold trap 515 in a clockwise direction; Fig. 9 This is a schematic diagram of the operation of drying the first cold trap 515 in a clockwise direction; Fig.10 This is a schematic diagram of the operation of drying the first cold trap 515 counterclockwise.

[0069] When cleaning the first cold trap 515 + the second cold trap 525 , the sixth valve 206 , the fourth valve 204 , and the second valve 202 are opened, and the third valve 203 and the fifth valve 205 are closed. Fig.11 This is a schematic diagram of the operation of counterclockwise cleaning the first cold trap 515 + the second cold trap 525. When operating other steps, except for the cold trap assembly part, the rest is the same as the aforementioned operation of cleaning the first cold trap 515.

[0070] When cleaning the first cold trap 515 + the third cold trap 5, the third valve 203, the fourth valve 204, and the fifth valve 205 are opened, and the second valve 202 and the sixth valve 206 are closed. Fig.12 It is a schematic diagram of the operation of cleaning the first cold trap 515 + the third cold trap 5 counterclockwise; when operating other steps, except for the cold trap assembly part, the rest is the same as the aforementioned operation of cleaning the first cold trap 515.

[0071] When cleaning the first cold trap 515 + the second cold trap 525 + the third cold trap 5, the second valve 202 and the fifth valve 205 are opened, and the third valve 203, the fourth valve 204, and the sixth valve 206 are closed. Fig.13 This is a schematic diagram of the operation of counterclockwise cleaning the first cold trap 515 + the second cold trap 525 + the second cold trap 525; when operating other steps, except for the cold trap assembly part, the rest is the same as the aforementioned operation of cleaning the first cold trap 515.

[0072] The above are only preferred embodiments of the present application and are not intended to limit the present application. For those skilled in the art, the present application may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A cold trap cleaning device, characterized in that: It includes a cold trap assembly, a water washing assembly and a drying assembly; The cold trap group is arranged on the first pipeline (11); the first valve (201) and the seventh valve (207) are respectively arranged at both ends of the first pipeline (11); the first pipeline (11) is connected to one end of the second pipeline (12) between the first valve (201) and the cold trap group; the first pipeline (11) is connected to the other end of the second pipeline (12) between the seventh valve (207) and the cold trap group; the water washing component is arranged on the second pipeline (12); the second pipeline (12) is respectively provided with a thirteenth valve (213) and a ninth valve (214) on both sides of the water washing component. The second pipe (12) is provided with an eighth valve (208) at a side of the ninth valve (209) away from the water washing component, the second pipe (12) is connected to one end of the third pipe (13) between the thirteenth valve (213) and the water washing component, the second pipe (12) is connected to the other end of the third pipe (13) at a side of the eighth valve (208) away from the ninth valve (209), and a fifteenth valve (215) and a sixteenth valve (216) are respectively provided at both ends of the third pipe (13); the second pipe (12 ) is connected to one end of the fourth pipe (14) at the side of the thirteenth valve (213) away from the water washing component, the second pipe (12) is connected to the other end of the fourth pipe (14) between the ninth valve (209) and the eighth valve (208), a fourteenth valve (214) close to the thirteenth valve (213) and a tenth valve (210) close to the ninth valve (209) are respectively arranged at both ends of the fourth pipe (14), a twelfth valve (212) is arranged next to the tenth valve (210) of the fourth pipe (14), and the fourth pipe (14) is arranged at the A fifth pipe (15) is connected between the tenth valve (210) and the twelfth valve (212); the drying component is arranged on the fifth pipe (15); and an eleventh valve (211) is arranged at the head end of the fifth pipe (15); the cold trap group comprises at least one cold trap (5) arranged in sequence on the first pipe (11); the water washing component comprises a water tank (31); the water tank (31) is equipped with a pump (32) close to the ninth valve (209); and the drying component comprises a heater (41); and the heater (41) is equipped with a blower (42).

2. The cold trap cleaning device according to claim 1, characterized in that: The cold trap assembly comprises a first cold trap (51), a second cold trap (52) and a third cold trap (53) which are arranged in sequence, the first cold trap (51) being close to the first valve (201), the second valve (202) being arranged between the first cold trap (51) and the second cold trap (52), and the fifth valve (205) being arranged between the second cold trap (52) and the third cold trap (53); the first pipe (11) being connected to the head end of the first branch pipe (111) between the first cold trap (51) and the second valve (202), the first pipe (11) being connected to the head end of the first branch pipe (111) between the second cold trap (52) and the fifth valve (205) The first branch pipe (111) is connected to one end of the second branch pipe (112), the other end of the second branch pipe (112) is connected to the first branch pipe (111), the first pipeline (11) is connected to one end of the third branch pipe (113) between the third cold trap (53) and the seventh valve (207), the other end of the third branch pipe (113) is connected to the end of the first branch pipe (111), the first branch pipe (111) is provided with a third valve (203) on the side of the second branch pipe (112) away from the third branch pipe (113), the second branch pipe (112) is provided with a fourth valve (204), and the third branch pipe (113) is provided with a sixth valve (206).

3. A cold trap cleaning method, characterized in that: Using the cold trap cleaning device as claimed in claim 1, the cleaning steps are: S1. Washing: S11, counterclockwise cleaning: close the tenth valve (210), the sixteenth valve (216), the seventh valve (207), the first valve (201), the fourteenth valve (214), and the fifteenth valve (215), open the ninth valve (209), the eighth valve (208), and the thirteenth valve (213), start the pump (32), and the washing liquid is pumped out through the ninth valve (209), flows counterclockwise through the second pipeline (12), the first pipeline (11), the cold trap (5), and the second pipeline (12) and then returns to the water tank (31), and the cycle cleaning is carried out for 1-2 hours, and then the pump (32) is closed; S12, clockwise cleaning: close the eighth valve (208), the eleventh valve (211), the thirteenth valve (213), the first valve (201), and the seventh valve (207); open the ninth valve (209), the tenth valve (210), the twelfth valve (212), the fourteenth valve (214), the fifteenth valve (215), and the sixteenth valve (216); start the pump (32); the washing liquid is pumped out through the ninth valve (209), flows clockwise through the second pipe (12), the fourth pipe (14), the second pipe (12), the first pipe (11), the cold trap (5), the second pipe (12), the third pipe (13), and the second pipe (12); and then returns to the water tank (31); the cycle cleaning is carried out for 1-2 hours, and the pump (32) is closed; the order of steps S11 and S12 can be reversed; S2, opening the drain valve of the cold trap (5) to drain the water washing liquid in the cold trap (5); S3, drying: S31, clockwise drying: close the tenth valve (210), the thirteenth valve (213), the first valve (201), the sixteenth valve (216), and the eighth valve (208), open the eleventh valve (211), the twelfth valve (212), the fourteenth valve (214), and the seventh valve (207), turn on the heater (41) and the blower (42), and the hot air flows out through the eleventh valve (211) and the twelfth valve (212), flows clockwise through the fifth pipeline (15), the fourth pipeline (14), the second pipeline (12), the first pipeline (11), and the cold trap (5), and then is discharged from the seventh valve (207) through the first pipeline (11), and the baking cycle is continued for 1-2 hours, and then the heater (41) and the blower (42) are turned off; S32, counterclockwise drying: close the twelfth valve (212), the sixteenth valve (216), the ninth valve (209), the seventh valve (207), the thirteenth valve (213), and the fourteenth valve (214), open the eleventh valve (211), the tenth valve (210), the eighth valve (208), and the first valve (201), turn on the heater (41) and the blower (42), and the hot air flows out through the eleventh valve (211) and the tenth valve (210), and flows counterclockwise through the fifth pipeline (15), the fourth pipeline (14), the second pipeline (12), the first pipeline (11), and the cold trap (5), and then is discharged from the first valve (201) through the first pipeline (11), and the cycle baking is continued for 1-2 hours, and then the heater (41) and the blower (42) are turned off; the order of steps S31 and S32 can be reversed.

4. The cold trap cleaning method according to claim 3, characterized in that: In a cold trap cleaning device, the cold trap assembly comprises a first cold trap (51), a second cold trap (52) and a third cold trap (53) which are arranged in sequence, the first cold trap (51) being close to the first valve (201), the second valve (202) being arranged between the first cold trap (51) and the second cold trap (52), and the fifth valve (205) being arranged between the second cold trap (52) and the third cold trap (53); the first pipe (11) being connected to the head end of the first branch pipe (111) between the first cold trap (51) and the second valve (202), the first pipe (11) being connected to the head end of the first branch pipe (111) between the second cold trap (52) and the fifth valve (205) ), one end of a second branch pipe (112) is connected between the third branch pipe (112) and the seventh valve (207), the other end of the second branch pipe (112) is connected to the first branch pipe (111), the first pipeline (11) is connected to one end of a third branch pipe (113) between the third cold trap (53) and the seventh valve (207), the other end of the third branch pipe (113) is connected to the end of the first branch pipe (111), a third valve (203) is provided on the side of the first branch pipe (111) away from the third branch pipe (113), a fourth valve (204) is provided on the second branch pipe (112), and a sixth valve (206) is provided on the third branch pipe (113); In the cleaning steps S1 and S3, selective cleaning of the first cold trap (51), the second cold trap (52) and the third cold trap (53) is achieved by controlling the opening and closing states of each valve among the second valve (202), the third valve (203), the fourth valve (204), the fifth valve (205) and the sixth valve (206).

5. The cold trap cleaning method according to claim 4, characterized in that: The selective cleaning method for the first cold trap (51), the second cold trap (52) and the third cold trap (53) is: When cleaning the first cold trap (51), the sixth valve (206) and the third valve (203) are opened, and the fifth valve (205), the fourth valve (204), and the second valve (202) are closed; When cleaning the first cold trap (51) + the second cold trap (52), the sixth valve (206), the fourth valve (204), and the second valve (202) are opened, and the third valve (203) and the fifth valve (205) are closed; When cleaning the first cold trap (51) + the third cold trap (53), the third valve (203), the fourth valve (204), and the fifth valve (205) are opened, and the second valve (202) and the sixth valve (206) are closed; When cleaning the first cold trap (51) + the second cold trap (52) + the third cold trap (53), the second valve (202) and the fifth valve (205) are opened, and the third valve (203), the fourth valve (204) and the sixth valve (206) are closed.

6. The cold trap cleaning method according to any one of claims 3 to 5, characterized in that: The water washing liquid includes medicine and purified water; step S1 includes: S11, cleaning with liquid medicine in a counterclockwise direction: close the tenth valve (210), the sixteenth valve (216), the seventh valve (207), the first valve (201), the fourteenth valve (214), and the fifteenth valve (215), open the ninth valve (209), the eighth valve (208), and the thirteenth valve (213), start the pump (32), the liquid medicine is pumped out through the ninth valve (209), flows counterclockwise through the second pipe (12), the first pipe (11), the cold trap (5), and the second pipe (12), and then returns to the water tank (31), and the cleaning cycle is continued for 1-2 hours, and then the pump (32) is closed; S12, clockwise cleaning with liquid medicine: close the eighth valve (208), the eleventh valve (211), the thirteenth valve (213), the first valve (201), and the seventh valve (207); open the ninth valve (209), the tenth valve (210), the twelfth valve (212), the fourteenth valve (214), the fifteenth valve (215), and the sixteenth valve (216); start the pump (32); the liquid medicine is pumped out through the ninth valve (209); and flows clockwise through the second pipe (12), the fourth pipe (14), the second pipe (12), the first pipe (11), the cold trap (5), the second pipe (12), the third pipe (13), and the second pipe (12); and then returns to the water tank (31); the cleaning cycle is continued for 1-2 hours, and the pump (32) is closed; the order of steps S11 and S12 can be switched; S13, counterclockwise pure water cleaning: replace the medicinal water in the water tank (31) with pure water, and repeat S11 operation; S14, clockwise pure water cleaning: replace the medicinal water in the water tank (31) with pure water, and repeat the operation of S12; the order of steps S13 and S14 can be reversed.

7. The cold trap cleaning method according to claim 6, characterized in that: The mass percentages of the components in the potion are: 20% NH3·H2O, 40% NaOH, 20% H2O, and 20% Fe(OH)2.

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