Chemical source conveying pipeline structure and PEALD equipment

Abstract

The invention discloses a chemical source conveying pipeline structure and PEALD equipment, the chemical source conveying pipeline structure comprises a carrier gas conveying pipeline, a carrier gas inlet pipeline and a reaction source output pipeline, the carrier gas conveying pipeline is connected with a reaction cavity in an on-off manner, and the carrier gas inlet pipeline is connected with the carrier gas conveying pipeline and a reaction source inlet in an on-off manner; the reaction source output pipeline is connected with the reaction source outlet and the reaction cavity in an on-off manner; wherein the carrier gas conveying pipeline, the carrier gas inlet pipeline and the reaction source output pipeline are all provided with ALD valves, at least one of the carrier gas inlet pipeline and the reaction source output pipeline is provided with a pneumatic valve, the pneumatic valve is arranged at the upstream position of the ALD valve, and the pneumatic valve has an interlocking function. According to the pneumatic valve, the ALD valve is released and is not affected by the relay, rapid response of the ALD valve is achieved, meanwhile, the interlocking function is set on the pneumatic valve, and the safety requirement is met.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor manufacturing, and in particular to a chemical source delivery pipeline structure and PEALD equipment. Background Art

[0002] In the prior art, in semiconductor process equipment such as PEALD equipment (plasma enhanced atomic layer deposition equipment), the carrier gas enters the liquid source cylinder, carries the reaction source into the reaction chamber, and the gas mixed with the reaction gas is sprayed onto the wafer surface through a spray plate to realize the film forming process. The carrier gas entering and exiting the liquid source bottle is controlled by the fast response switching of the ALD valve, and the ALD valve is arranged at the inlet and outlet of the liquid source bottle. In terms of safety, it must have an interlock function to limit the switching conditions.

[0003] As for the above-mentioned ALD valve problem, the technical disadvantage is that the normal response time of the ALD valve is 14-16ms, while after the ALD valve is associated with interlock, its response time fluctuates between 24-28ms. The reason is that the ALD valve has an interlock function, so it is necessary to use a relay to determine whether the valve opening conditions are met in the valve opening instruction. Therefore, the valve opening signal will be delayed by 6-8ms after passing through a relay. Because the production requirement is that the alarm value of the ALD valve response time of the PEALD equipment is 25ms, the response speed of 24-28ms will frequently trigger an alarm, resulting in the process recipe being unable to proceed smoothly. Summary of the invention

[0004] The purpose of the present invention is to overcome the shortcomings of the prior art and to provide a chemical source delivery pipeline structure and a PEALD device, which aims to ensure that the ALD valve has a fast response time and has an interlocking function for safety.

[0005] To achieve the above object, the present invention adopts the following technical solutions:

[0006] In one aspect, the present invention provides a chemical source delivery pipeline structure, comprising:

[0007] A carrier gas delivery pipeline, which is connected to the reaction chamber in an on-off manner;

[0008] A carrier gas inlet pipeline, which is connected to the carrier gas delivery pipeline and the reaction source inlet in an on-off manner;

[0009] A reaction source output pipeline, connected to the reaction source outlet and the reaction chamber in an on-off manner;

[0010] Among them, the carrier gas delivery pipeline, the carrier gas inlet pipeline and the reaction source output pipeline are all provided with ALD valves, and at least one of the carrier gas inlet pipeline and the reaction source output pipeline is provided with a pneumatic valve, the pneumatic valve is arranged at the upstream position of the ALD valve, and the pneumatic valve is provided with an interlocking function.

[0011] Furthermore, the carrier gas inlet pipeline and the reaction source output pipeline are both provided with manual valves.

[0012] Further, when only the carrier gas inlet pipeline is provided with the pneumatic valve, the manual valve of the carrier gas inlet pipeline is arranged at a downstream position of the ALD valve of the carrier gas inlet pipeline, and the manual valve of the reaction source output pipeline is arranged at an upstream position of the ALD valve of the reaction source output pipeline.

[0013] Further, when only the reaction source output pipeline is provided with the pneumatic valve, the manual valve of the carrier gas inlet pipeline is arranged at a downstream position of the ALD valve of the carrier gas inlet pipeline, and the manual valve of the reaction source output pipeline is arranged at an upstream position of the pneumatic valve of the reaction source output pipeline.

[0014] Further, the manual valve of the carrier gas inlet pipeline is arranged at a downstream position of the ALD valve of the carrier gas inlet pipeline, and the manual valve of the reaction source output pipeline is arranged at an upstream position of the pneumatic valve of the reaction source output pipeline.

[0015] Furthermore, the pneumatic valve and the ALD valve are designed independently or integratedly.

[0016] Furthermore, the carrier gas delivery pipeline and the reaction source output pipeline are provided with the ALD valve which is shared by both.

[0017] Furthermore, the carrier gas delivery pipeline and the reaction source output pipeline are provided with a common ALD valve which is a three-way valve.

[0018] On the other hand, the present invention also provides a PEALD device, including a reaction source container, a reaction chamber and the above-mentioned chemical source delivery pipeline structure, wherein the reaction source container is provided with a reaction source inlet and a reaction source outlet, and the reaction chamber is provided with a reaction cavity.

[0019] The beneficial effects of the present invention compared with the prior art are as follows: a pneumatic valve is provided on at least one of the carrier gas inlet pipeline and the reaction source output pipeline, and the pneumatic valve is arranged upstream of the ALD valve, and an interlocking function is provided on the pneumatic valve, thereby releasing the ALD valve so that it is not affected by the relay, thereby achieving a rapid response of the ALD valve, and at the same time, the interlocking function is provided on the pneumatic valve to meet the safety requirements.

[0020] The above description is only an overview of the technical solution of the present invention. In order to more clearly understand the technical means of the present invention, it can be implemented in accordance with the contents of the specification. In order to make the above and other purposes, features and advantages of the present invention more obvious and easy to understand, the following preferred embodiments are specifically cited and described in detail as follows. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other accompanying drawings can be obtained based on these accompanying drawings without paying any creative work.

[0022] Figure 1 A schematic diagram of the principle of a PEALD device provided in Embodiment 1 of the present invention;

[0023] Figure 2 A schematic diagram of an integrated solution of a PEALD device provided in Embodiment 1 of the present invention;

[0024] Figure 3 A schematic diagram of the principle of a PEALD device provided in Embodiment 2 of the present invention;

[0025] Figure 4 A schematic diagram of an integrated solution of a PEALD device provided in Embodiment 2 of the present invention;

[0026] Figure 5 A schematic diagram of the principle of a PEALD device provided in Embodiment 3 of the present invention;

[0027] Figure 6 Schematic diagram of the integrated solution of the PEALD device provided in Example 3 of the present invention.

[0028] Reference numerals

[0029] 1. Carrier gas delivery pipeline; 2. Carrier gas inlet pipeline; 3. Reaction source output pipeline; 4. ALD valve; 5. Pneumatic valve; 6. Manual valve; 7. Reaction source container; 71. Reaction source inlet; 72. Reaction source outlet. DETAILED DESCRIPTION

[0030] The technical solution of the present invention will be clearly and completely described below in conjunction with the specific embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0031] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

[0032] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In the description of the present invention, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0033] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0034] In the present invention, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being "above", "above" or "above" a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being "below", "below" or "below" a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0035] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be a central element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. The terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used herein are for illustrative purposes only and are not intended to be the only implementation method.

[0036] Embodiment 1

[0037] like Figure 1 to Figure 2 As shown, an embodiment of the present invention provides a PEALD device, which includes a reaction source container 7, a reaction chamber and a chemical source delivery pipeline structure. The reaction source container 7 may be a bottle-shaped structure, and the reaction source container 7 contains a liquid reaction source. The reaction source container 7 is provided with a reaction source inlet 71 and a reaction source outlet 72, and the reaction chamber is provided with a reaction chamber; the chemical source delivery pipeline structure includes a carrier gas delivery pipeline 1, a carrier gas inlet pipeline 2 and a reaction source output pipeline 3, the carrier gas delivery pipeline 1 is connected to the reaction chamber in a switchable manner, the carrier gas inlet pipeline 2 is connected to the carrier gas delivery pipeline 1 and the reaction source inlet 71 in a switchable manner, the reaction source output pipeline 3 is connected to the reaction source outlet 72 and the reaction chamber in a switchable manner, the carrier gas delivery pipeline 1, the carrier gas inlet pipeline 2 and the reaction source output pipeline 3 are all provided with an ALD valve 4, the carrier gas inlet pipeline 2 is provided with a pneumatic valve 5, the pneumatic valve 5 is provided at the upstream position of the ALD valve 4 (the upstream position refers to the upstream relative position in the carrier gas flow direction), and the pneumatic valve 5 is provided with an interlock function.

[0038] Specifically, the carrier gas delivery pipeline 1 is used to transport the carrier gas. On the one hand, the carrier gas is directly delivered to the reaction chamber by the carrier gas delivery pipeline 1, and on the other hand, the carrier gas enters the reaction source container 7 through the carrier gas inlet pipeline 2, and carries the reaction source from the reaction source output pipeline 3 into the reaction chamber.

[0039] The pneumatic valve 5 can be a pneumatic ball valve, a pneumatic butterfly valve, a pneumatic diaphragm valve or a pneumatic needle valve, etc.

[0040] By setting a pneumatic valve 5 in the carrier gas inlet pipeline 2, and arranging the pneumatic valve 5 upstream of the ALD valve 4, and setting an interlocking function on the pneumatic valve 5, the ALD valve 4 is released so that it is not affected by the relay, thereby achieving a rapid response of the ALD valve 4. At the same time, the interlocking function is set on the pneumatic valve 5 to meet the safety requirements.

[0041] The pneumatic valve 5 and the ALD valve 4 can be designed independently or integrated. Figure 2 As shown, Figure 2It is an integrated design scheme, and the carrier gas delivery pipeline 1 and the reaction source output pipeline 3 are provided with an ALD valve 4 shared by both, and the ALD valve 4 shared by both is a three-way valve.

[0042] After the carrier gas enters from position A, on the one hand, the carrier gas first passes through the pneumatic valve 5 on the carrier gas inlet pipeline 2, and then passes through the ALD valve 4 on the carrier gas inlet pipeline 2, and then enters the reaction source container 7 from position B. After coming out of the reaction source container 7, the carrier gas enters the reaction source output pipeline 3 from position C, passes through the ALD valve 4 shared by the reaction source output pipeline 3 and the carrier gas delivery pipeline 1, and then enters the reaction chamber from position D; on the other hand, the carrier gas first passes through the ALD valve 4 on the carrier gas delivery pipeline 1, and then enters the reaction chamber after passing through the ALD valve 4 shared by the reaction source output pipeline 3 and the carrier gas delivery pipeline 1.

[0043] This design saves physical space, reduces multiple pipe sections and leak points, and reduces the probability of particle deposition. Overall, it ensures the fast response of the ALD valve in a small and limited space while achieving the interlock function.

[0044] Specifically, Figure 1 to Figure 2 As shown, both the carrier gas inlet pipeline 2 and the reaction source outlet pipeline 3 are provided with a manual valve 6. The manual valve 6 can be a manual ball valve, a manual butterfly valve or a manual gate valve.

[0045] In this embodiment, the manual valve 6 of the carrier gas inlet pipeline 2 is arranged downstream of the ALD valve 4 of the carrier gas inlet pipeline 2, and the manual valve 6 of the reaction source output pipeline 3 is arranged upstream of the ALD valve 4 of the reaction source output pipeline 3.

[0046] The carrier gas entering the carrier gas inlet pipeline 2 passes through the pneumatic valve 5, the ALD valve 4 and the manual valve 6 in sequence, and then enters the reaction source container 7 from the reaction source inlet 71. The carrier gas carrying the reaction source comes out from the reaction source outlet 72 and enters the reaction source output pipeline 3, and passes through the manual valve 6 and the ALD valve 4 of the reaction source output pipeline 3 in sequence, and finally leads to the reaction chamber.

[0047] Embodiment 2

[0048] The difference between this embodiment and the first embodiment is that the pneumatic valve 5 is arranged at a different position. In the first embodiment, the pneumatic valve 5 is arranged on the carrier gas inlet pipeline 2 , while in this embodiment, the pneumatic valve 5 is arranged on the reaction source output pipeline 3 .

[0049] like Figure 3 to Figure 4As shown, a PEALD device includes a reaction source container 7, a reaction chamber and a chemical source delivery pipeline structure. The reaction source container 7 can be a bottle-shaped structure, and the reaction source container 7 contains a liquid reaction source. The reaction source container 7 is provided with a reaction source inlet 71 and a reaction source outlet 72, and the reaction chamber is provided with a reaction chamber; the chemical source delivery pipeline structure includes a carrier gas delivery pipeline 1, a carrier gas inlet pipeline 2 and a reaction source output pipeline 3, the carrier gas delivery pipeline 1 is connected to the reaction chamber in a switchable manner, the carrier gas inlet pipeline 2 is connected to the carrier gas delivery pipeline 1 and the reaction source inlet 71 in a switchable manner, the reaction source output pipeline 3 is connected to the reaction source outlet 72 and the reaction chamber in a switchable manner, the carrier gas delivery pipeline 1, the carrier gas inlet pipeline 2 and the reaction source output pipeline 3 are all provided with an ALD valve 4, and the reaction source output pipeline 3 is provided with a pneumatic valve 5, which is provided at the upstream position of the ALD valve 4 (the upstream position refers to the upstream relative position in the carrier gas flow direction), and the pneumatic valve 5 is provided with an interlock function.

[0050] Specifically, the carrier gas delivery pipeline 1 is used to transport the carrier gas. On the one hand, the carrier gas is directly delivered to the reaction chamber by the carrier gas delivery pipeline 1, and on the other hand, the carrier gas enters the reaction source container 7 through the carrier gas inlet pipeline 2, and carries the reaction source from the reaction source output pipeline 3 into the reaction chamber.

[0051] The pneumatic valve 5 can be a pneumatic ball valve, a pneumatic butterfly valve, a pneumatic diaphragm valve or a pneumatic needle valve, etc.

[0052] By setting a pneumatic valve 5 in the reaction source output pipeline 3, and arranging the pneumatic valve 5 upstream of the ALD valve 4, and setting the interlocking function on the pneumatic valve 5, the ALD valve 4 is released so that it is not affected by the relay, thereby achieving a rapid response of the ALD valve 4. At the same time, the interlocking function is set on the pneumatic valve 5 to meet the safety requirements.

[0053] The pneumatic valve 5 and the ALD valve 4 can be designed independently or integrated. Figure 4 As shown, Figure 4 It is an integrated design scheme, and the carrier gas delivery pipeline 1 and the reaction source output pipeline 3 are provided with an ALD valve 4 shared by both, and the ALD valve 4 shared by both is a three-way valve.

[0054] After the carrier gas enters from position A, on the one hand, the carrier gas passes through the ALD valve 4 on the carrier gas entry pipeline 2, and then enters the reaction source container 7 from position B. After coming out of the reaction source container 7, the carrier gas enters the reaction source output pipeline 3 from position C, first passes through the pneumatic valve 5 of the reaction source output pipeline 3, and then passes through the ALD valve 4 shared by the reaction source output pipeline 3 and the carrier gas delivery pipeline 1, and then enters the reaction chamber from position D; on the other hand, the carrier gas first passes through the ALD valve 4 on the carrier gas delivery pipeline 1, and then enters the reaction chamber after passing through the ALD valve 4 shared by the reaction source output pipeline 3 and the carrier gas delivery pipeline 1.

[0055] This design saves physical space, reduces multiple pipe sections and leak points, and reduces the probability of particle deposition. Overall, it ensures the fast response of the ALD valve while achieving the interlocking function in a small and limited space.

[0056] Specifically, Figure 3 to Figure 4 As shown, both the carrier gas inlet pipeline 2 and the reaction source outlet pipeline 3 are provided with a manual valve 6. The manual valve 6 can be a manual ball valve, a manual butterfly valve or a manual gate valve.

[0057] In this embodiment, the manual valve 6 of the carrier gas inlet pipeline 2 is arranged downstream of the ALD valve 4 of the carrier gas inlet pipeline 2, and the manual valve 6 of the reaction source output pipeline 3 is arranged upstream of the pneumatic valve 5 of the reaction source output pipeline 3.

[0058] The carrier gas entering the carrier gas inlet pipeline 2 passes through the ALD and the manual valve 6 in sequence, and then enters the reaction source container 7 from the reaction source inlet 71. The carrier gas carrying the reaction source comes out from the reaction source outlet 72 and enters the reaction source output pipeline 3, and passes through the manual valve 6, the pneumatic valve 5 and the ALD valve 4 of the reaction source output pipeline 3 in sequence, and finally leads to the reaction chamber.

[0059] Embodiment 3

[0060] The difference between this embodiment and the first embodiment lies in the different positions and numbers of the pneumatic valves 5 . In the first embodiment, the pneumatic valves 5 are arranged on the carrier gas inlet pipeline 2 , while in this embodiment, pneumatic valves 5 are arranged on both the reaction source output pipeline 3 and the carrier gas inlet pipeline 2 .

[0061] like Figure 5-Figure 6 As shown, a PEALD device includes a reaction source container 7, a reaction chamber and a chemical source delivery pipeline structure. The reaction source container 7 can be a bottle-shaped structure, and the reaction source container 7 is filled with a liquid reaction source. The reaction source container 7 is provided with a reaction source inlet 71 and a reaction source outlet 72, and the reaction chamber is provided with a reaction chamber; the chemical source delivery pipeline structure includes a carrier gas delivery pipeline 1, a carrier gas inlet pipeline 2 and a reaction source output pipeline 3, the carrier gas delivery pipeline 1 is connected to the reaction chamber in a switchable manner, the carrier gas inlet pipeline 2 is connected to the carrier gas delivery pipeline 1 and the reaction source inlet 71 in a switchable manner, the reaction source output pipeline 3 is connected to the reaction source outlet 72 and the reaction chamber in a switchable manner, the carrier gas delivery pipeline 1, the carrier gas inlet pipeline 2 and the reaction source output pipeline 3 are all provided with an ALD valve 4, the carrier gas inlet pipeline 2 and the reaction source output pipeline 3 are all provided with a pneumatic valve 5, the pneumatic valve 5 is arranged at the upstream position of the ALD valve 4 (the upstream position refers to the upstream relative position in the carrier gas flow direction), and the pneumatic valve 5 is provided with an interlocking function.

[0062] Specifically, the carrier gas delivery pipeline 1 is used to transport the carrier gas. On the one hand, the carrier gas is directly delivered to the reaction chamber by the carrier gas delivery pipeline 1, and on the other hand, the carrier gas enters the reaction source container 7 through the carrier gas inlet pipeline 2, and carries the reaction source from the reaction source output pipeline 3 into the reaction chamber.

[0063] The pneumatic valve 5 can be a pneumatic ball valve, a pneumatic butterfly valve, a pneumatic diaphragm valve or a pneumatic needle valve, etc.

[0064] By setting a pneumatic valve 5 in the carrier gas inlet pipeline 2 and the reaction source output pipeline 3, and arranging the pneumatic valve 5 upstream of the ALD valve 4, and setting an interlocking function on the pneumatic valve 5, the ALD valve 4 is released so that it is not affected by the relay, thereby achieving a rapid response of the ALD valve 4. At the same time, the interlocking function is set on the pneumatic valve 5 to meet the safety requirements.

[0065] The pneumatic valve 5 and the ALD valve 4 can be designed independently or integrated. Figure 6 As shown, Figure 6 It is an integrated design scheme, and the carrier gas delivery pipeline 1 and the reaction source output pipeline 3 are provided with an ALD valve 4 shared by both, and the ALD valve 4 shared by both is a three-way valve.

[0066] After the carrier gas enters from position A, on the one hand, the carrier gas first passes through the pneumatic valve 5 on the carrier gas inlet pipeline 2, and then passes through the ALD valve 4 on the carrier gas inlet pipeline 2, and then enters the reaction source container 7 from position B. After coming out of the reaction source container 7, the carrier gas enters the reaction source output pipeline 3 from position C, first passes through the pneumatic valve 5 of the reaction source output pipeline 3, and then passes through the ALD valve 4 shared by the reaction source output pipeline 3 and the carrier gas delivery pipeline 1, and then enters the reaction chamber from position D; on the other hand, the carrier gas first passes through the ALD valve 4 on the carrier gas delivery pipeline 1, and then enters the reaction chamber after passing through the ALD valve 4 shared by the reaction source output pipeline 3 and the carrier gas delivery pipeline 1.

[0067] This design saves physical space, reduces multiple pipe sections and leakage points, and reduces the probability of particle deposition. Overall, it ensures the rapid response of the ALD valve 4 in a small and limited space while achieving the interlocking function.

[0068] Specifically, Figures 5 and 6 As shown, both the carrier gas inlet pipeline 2 and the reaction source outlet pipeline 3 are provided with a manual valve 6. The manual valve 6 can be a manual ball valve, a manual butterfly valve or a manual gate valve.

[0069] In this embodiment, the manual valve 6 of the carrier gas inlet pipeline 2 is arranged downstream of the ALD valve 4 of the carrier gas inlet pipeline 2, and the manual valve 6 of the reaction source output pipeline 3 is arranged upstream of the pneumatic valve 5 of the reaction source output pipeline 3.

[0070] The carrier gas entering the carrier gas inlet pipeline 2 passes through the pneumatic valve 5, the ALD valve 4 and the manual valve 6 in sequence, and then enters the reaction source container 7 from the reaction source inlet 71. The carrier gas carrying the reaction source comes out from the reaction source outlet 72 and enters the reaction source output pipeline 3, and passes through the manual valve 6, the pneumatic valve 5 and the ALD valve 4 of the reaction source output pipeline 3 in sequence, and finally leads to the reaction chamber.

[0071] In order to reflect the technical advantages of this application compared with the prior art, the following specific explanation is given:

[0072] In the process of implementing the present application, the does times and does purge times are stable in each cycle, which solves the unstable factors caused by the hardware and meets the safety requirements of the machine.

[0073] The existing technology has a does time of 250ms, a delay of 14ms, a does purge time of 300ms, and each cycle requires T1=564ms. Each pair of wafer film deposition requires 400 cycles, that is, T=225600ms.

[0074] The existing technology has a production capacity of 22 pairs of wafers per hour, which means RUN528 pairs of wafers in 24 hours. After the delay problem is solved in this application, 2983.2 seconds (about 50 minutes) will be saved in 24 hours.

[0075] It is calculated by the following formula that the solution of the present application will save R=5% of time compared with the prior art.

[0076]

[0077] T=(T1+Td)*C.

[0078] In the above formula, C represents the number of cycles, T1 represents the time consumed for a single cycle in the prior art (ms), Tn represents the time consumed for a single cycle in the present application (ms), T represents the time consumed for deposition of each pair of wafers (ms), Td represents the delay time of the ALD valve (ms), and R represents the time saving ratio of the present application.

[0079] The above is only a specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can easily think of various equivalent modifications or replacements within the technical scope disclosed by the present invention, and these modifications or replacements should be included in the protection scope of the present invention. Therefore, the protection scope of the present invention shall be based on the protection scope of the claims.

Claims

1. A chemical source delivery pipeline structure, characterized in that: include: A carrier gas delivery pipeline, which is connected to the reaction chamber in an on-off manner; A carrier gas inlet pipeline, which is connected to the carrier gas delivery pipeline and the reaction source inlet in an on-off manner; A reaction source output pipeline, connected to the reaction source outlet and the reaction chamber in an on-off manner; Among them, the carrier gas delivery pipeline, the carrier gas inlet pipeline and the reaction source output pipeline are all provided with ALD valves, and at least one of the carrier gas inlet pipeline and the reaction source output pipeline is provided with a pneumatic valve, the pneumatic valve is arranged at the upstream position of the ALD valve, and the pneumatic valve is provided with an interlocking function.

2. A chemical source delivery pipeline structure according to claim 1, characterized in that: The carrier gas inlet pipeline and the reaction source output pipeline are both provided with manual valves.

3. A chemical source delivery pipeline structure according to claim 2, characterized in that: When only the carrier gas inlet pipeline is provided with the pneumatic valve, the manual valve of the carrier gas inlet pipeline is arranged at the downstream position of the ALD valve of the carrier gas inlet pipeline, and the manual valve of the reaction source output pipeline is arranged at the upstream position of the ALD valve of the reaction source output pipeline.

4. A chemical source delivery pipeline structure according to claim 2, characterized in that: When only the reaction source output pipeline is provided with the pneumatic valve, the manual valve of the carrier gas inlet pipeline is arranged at the downstream position of the ALD valve of the carrier gas inlet pipeline, and the manual valve of the reaction source output pipeline is arranged at the upstream position of the pneumatic valve of the reaction source output pipeline.

5. A chemical source delivery pipeline structure according to claim 2, characterized in that: The manual valve of the carrier gas inlet pipeline is arranged at a downstream position of the ALD valve of the carrier gas inlet pipeline, and the manual valve of the reaction source output pipeline is arranged at an upstream position of the pneumatic valve of the reaction source output pipeline.

6. A chemical source delivery pipeline structure according to any one of claims 2 to 5, characterized in that: The pneumatic valve and the ALD valve are designed independently or integrated.

7. A chemical source delivery pipeline structure according to any one of claims 2 to 5, characterized in that: The carrier gas delivery pipeline and the reaction source output pipeline are provided with the ALD valve shared by both.

8. A chemical source delivery pipeline structure according to any one of claim 7, characterized in that: The carrier gas delivery pipeline and the reaction source output pipeline are provided with a common ALD valve which is a three-way valve.

9. A PEALD device, characterized in that: It comprises a reaction source container, a reaction chamber and the chemical source delivery pipeline structure according to any one of claims 1 to 8, wherein the reaction source container is provided with a reaction source inlet and a reaction source outlet, and the reaction chamber is provided with a reaction cavity.

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