Opening and closing mechanism for upper cavity cover of vacuum cavity

Abstract

The invention discloses an opening and closing mechanism for an upper cavity cover of a vacuum cavity. The opening and closing mechanism comprises an upper hearth top cover, a lower hearth rack, an upper cavity module, a lower cavity module, a first lifting structure and a lifting power system, the edge of one side of the upper hearth top cover is hinged to the edge of one side of the lower hearth rack, and the edge of the other side of the upper hearth top cover is connected with the edge of the other side of the lower hearth rack through a second lifting structure. The upper cavity module is located above the lower cavity module and is parallel to the lower cavity module, and the lifting power system controls the upper cavity module to be close to or away from the lower cavity module through the first lifting structure. The invention has the advantages that the upper hearth top cover and the lower hearth rack can be automatically closed or opened, so that the labor intensity is reduced, and the cleaning and maintenance efficiency is improved.

Description

Technical Field

[0001] The invention relates to the technical field of semiconductor equipment, in particular to an opening and closing mechanism for an upper cavity cover of a vacuum cavity. Background Art

[0002] In the existing vacuum reflow soldering equipment in the semiconductor field, the vacuum chamber is the core of the vacuum reflow soldering. Since there is a long preheating and welding area in the front section of the vacuum chamber, this area will volatilize pollutants such as flux during the heating process, and the pollutants will also flow into the vacuum area. If it is not cleaned in time, it is easy to contaminate the surface of the product and cause product defects; it is also easy to increase the running resistance of the chain and increase the load of the transport motor, thereby causing the service life of the equipment to decrease; in order to ensure the welding quality of the product, it is necessary to regularly open the upper chamber cover to clean and maintain the internal components of the vacuum chamber, or when the chamber is still at high temperature, it is also necessary to open the upper chamber cover to check the product or structural changes in the chamber; and the vacuum chamber of semiconductor reflow soldering is generally large and heavy. The weight of the entire upper chamber cover module ranges from about 30 to 200 kg. If it is manually removed from the platform, it generally requires 2 to 3 people (two people lift, and the other person is responsible for safety protection or maintenance). If it is a high temperature situation, it cannot be checked immediately and the equipment needs to be cooled to normal temperature. Summary of the invention

[0003] The technical problem to be solved by the present invention is to provide an opening and closing mechanism for an upper chamber cover of a vacuum chamber in view of the deficiencies in the prior art.

[0004] In order to solve the above technical problems, the present invention adopts the following technical solutions.

[0005] A vacuum chamber upper chamber cover opening and closing mechanism comprises an upper furnace cover, a lower furnace frame, an upper chamber module, a lower chamber module, a first lifting structure and a lifting power system; one side edge of the upper furnace cover is hinged to one side edge of the lower furnace frame, and the other side edge of the upper furnace cover is connected to the other side edge of the lower furnace frame through a second lifting structure; the upper chamber module is located above the lower chamber module and is arranged parallel to the lower chamber module, and the lifting power system controls the upper chamber module to approach or move away from the lower chamber module through the first lifting structure.

[0006] A preferred solution is that the first lifting structure includes two parallel lifting rods, the inner wall of the upper furnace top cover is provided with a slide groove, the first end of the upper cavity module is hinged to the top of a lifting rod, and the second end is slidably connected to the slide groove, and the top of the other lifting rod is used to drive the second end of the upper cavity module to slide up and down along the slide groove.

[0007] A preferred solution is that the lifting power system includes a fixed frame, a cross bar and a power source, the two ends of the cross bar are respectively connected to the bottom of the two lifting rods, the power source drives the cross bar to move up and down, and the fixed frame is provided with an upper travel switch and a lower travel switch; the upper travel switch and the lower travel switch point to the lifting rods respectively.

[0008] A preferred solution is that the upper surface of the lower cavity module is provided with a transport rail, and the transport rail is used to transport the products passing through the furnace.

[0009] A preferred solution is that the two lifting rods movably pass through the two ends of the lower cavity module.

[0010] A preferred solution is that the second lifting structure is a linear lifter, one end of the second lifting structure is hinged to the outer wall of the lower furnace frame, and the other end is hinged to the outer wall of the upper furnace top cover.

[0011] The vacuum chamber upper chamber cover opening and closing mechanism provided by the embodiment of the present invention has at least the following beneficial effects: when the equipment is in normal production, the upper furnace top cover and the lower furnace frame cover each other, the upper chamber module and the lower chamber module are in a parallel state and at a certain height, ensuring that the product flows into the upper surface of the lower chamber module, and the lifting power system starts to work, and the lifting power system drives the upper chamber module to move downward, so that the upper chamber module and the lower chamber module cover each other and close, and vacuum is drawn inside the upper chamber module and the lower chamber module. After the vacuum is drawn, the lifting power system controls the upper chamber module to rise through the first lifting structure, and the furnace products flow out of the lower chamber module; when the present invention needs maintenance, the second lifting structure rises, so that the upper furnace top cover is opened relative to the lower furnace frame, and the upper chamber module is also opened accordingly, so that the maintenance and maintenance of the inside of the vacuum chamber can be realized.

[0012] The above description is only an overview of the technical solution of the present invention. In order to more clearly understand the technical means of the present invention, it can be implemented in accordance with the contents of the specification. In order to make the above and other purposes, features and advantages of the present invention more obvious and easy to understand, the following specifically cites a preferred embodiment and describes it in detail with the accompanying drawings as follows. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 The three-dimensional structure of the upper furnace cover and the lower furnace frame when they are covered with each other in the present invention. Figure 1 ;

[0014] Figure 2 The three-dimensional structure of the upper furnace cover and the lower furnace frame when they are covered with each other in the present invention. Figure 2 ;

[0015] Figure 3 It is a three-dimensional view of the upper furnace cover and the lower furnace frame when they are opened to each other in the present invention;

[0016] Figure 4 It is an internal stereogram of the present invention. DETAILED DESCRIPTION

[0017] In order to explain the idea and purpose of the present application, the present application will be further described below in conjunction with the accompanying drawings and specific embodiments.

[0018] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by technicians in the technical field of this application; the terms used in the specification of the application herein are only for the purpose of describing specific embodiments and are not intended to limit this application; the terms "including" and "having" and any variations thereof in the specification and claims of this application and the above-mentioned drawings are intended to cover non-exclusive inclusions. The terms "first", "second", "left", "right", etc. in the specification and claims of this application or the above-mentioned drawings are used to distinguish different objects, not to describe a specific order.

[0019] Reference to "embodiments" herein means that a particular feature, structure, or characteristic described in conjunction with the embodiments may be included in at least one embodiment of the present application. The appearance of the phrase in various locations in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment that is mutually exclusive with other embodiments. It is explicitly and implicitly understood by those skilled in the art that the embodiments described herein may be combined with other embodiments.

[0020] like Figures 1 to 4 As shown, an embodiment of the present application provides a vacuum chamber upper chamber cover opening and closing mechanism, including an upper furnace top cover 1, a lower furnace frame 2, an upper chamber module 3, a lower chamber module 4, a first lifting structure 5 and a lifting power system 6; one side edge of the upper furnace top cover 1 is hinged to one side edge of the lower furnace frame 2, and the other side edge of the upper furnace top cover 1 is connected to the other side edge of the lower furnace frame 2 through a second lifting structure 7; the upper chamber module 3 is located above the lower chamber module 4 and is arranged parallel to the lower chamber module 4, and the lifting power system 6 controls the upper chamber module 3 to approach or move away from the lower chamber module 4 through the first lifting structure 5.

[0021] like Figures 1 to 4As shown, the lower cavity module 4 is fixed in the lower furnace frame 2. When the equipment is in normal production, the upper furnace cover 1 and the lower furnace frame 2 cover each other, the upper cavity module 3 and the lower cavity module 4 are in a parallel state and at a certain height, ensuring that the product 15 flows into the upper surface of the lower cavity module 4, and the lifting power system 6 starts to work, and the lifting power system 6 drives the upper cavity module 3 to move downward, so that the upper cavity module 3 and the lower cavity module 4 cover each other and close, and vacuumize the upper cavity module 3 and the lower cavity module 4. After the vacuum is exhausted, the lifting power system 6 controls the upper cavity module 3 to rise through the first lifting structure 5, and the furnace product 15 flows out of the lower cavity module 4; when the present invention needs maintenance, the second lifting structure 7 rises, so that the upper furnace cover 1 is opened relative to the lower furnace frame 2, and the upper cavity module 3 is also opened accordingly, so that the maintenance and maintenance of the inside of the vacuum chamber can be realized.

[0022] like Figures 1 to 4 As shown, the first lifting structure 5 includes two parallel lifting rods 8, the inner wall of the upper furnace top cover 1 is provided with a slide groove 9, the first end of the upper cavity module 3 is hinged to the top of a lifting rod 8, and the second end is slidably connected to the slide groove 9, and the top of the other lifting rod 8 is used to drive the second end of the upper cavity module 3 to slide up and down along the slide groove 9.

[0023] like Figures 1 to 4 As shown, when the equipment is in normal production, the upper furnace cover 1 and the lower furnace frame 2 cover each other, the upper cavity module 3 and the lower cavity module 4 are in a parallel state and at a certain height, ensuring that the product 15 flows into the upper surface of the lower cavity module 4, and the lifting power system 6 starts to work, and the lifting power system 6 drives the lifting rod 8 to descend, and the lifting rod 8 drives the upper cavity module 3 to move downward, so that the upper cavity module 3 and the lower cavity module 4 cover each other and close, and vacuumize the upper cavity module 3 and the lower cavity module 4. After the vacuum is exhausted, the lifting power system 6 controls the upper cavity module 3 to rise through the first lifting structure 5, and the furnace product 15 flows out of the lower cavity module 4; when the present invention needs maintenance, the second lifting structure 7 rises, so that the upper furnace cover 1 is opened relative to the lower furnace frame 2, and the second end of the upper cavity module 3 is lifted up together with the upper furnace cover 1, and the upper cavity module 3 is also opened relative to the lower cavity module 4, so that the maintenance and maintenance of the inside of the vacuum chamber can be realized.

[0024] like Figures 1 to 4 As shown, the lifting power system 6 includes a fixed frame 10, a cross bar 11 and a power source 12. The two ends of the cross bar 11 are respectively connected to the bottom of the two lifting rods 8. The power source 12 drives the cross bar 11 to move up and down. The fixed frame 10 is provided with an upper travel switch 13 and a lower travel switch 14; the upper travel switch 13 and the lower travel switch 14 point to the lifting rod 8 respectively.

[0025] like Figures 1 to 4As shown, the upper furnace cover 1 and the lower furnace frame 2 cover each other, the upper cavity module 3 and the lower cavity module 4 are in a parallel state and at a certain height, ensuring that the product 15 flows into the upper surface of the lower cavity module 4, and the lifting power system 6 starts to work, and the lifting power system 6 drives the lifting rod 8 to descend, and the lifting rod 8 drives the upper cavity module 3 to move downward, and the lifting rod 8 descends to the lower stroke switch 14, so that the upper cavity module 3 and the lower cavity module 4 cover each other and close, and the upper cavity module 3 and the lower cavity module 4 are vacuumed. After the vacuum is evacuated, the lifting power system 6 controls the upper cavity module 3 to rise through the first lifting structure 5, the first lifting structure 5 rises to the upper travel switch 13, and the furnace product 15 flows out of the lower cavity module 4; when the present invention needs maintenance, the second lifting structure 7 rises, so that the upper furnace top cover 1 is opened relative to the lower furnace frame 2, and the second end of the upper cavity module 3 is lifted up together with the upper furnace top cover 1, and the upper cavity module 3 is also opened relative to the lower cavity module 4, so that the interior of the vacuum chamber can be maintained.

[0026] like Figures 1 to 4 As shown, the upper surface of the lower cavity module 4 is provided with a transport rail 16 , and the transport rail 16 is used to transport the furnace-passed product 15 .

[0027] like Figures 1 to 4 As shown, the two lifting rods 8 movably pass through the two ends of the lower cavity module 4.

[0028] like Figures 1 to 4 As shown, the second lifting structure 7 is a linear lifter, one end of the second lifting structure 7 is hinged to the outer wall of the lower furnace frame 2, and the other end is hinged to the outer wall of the upper furnace top cover 1.

[0029] The above is a specific implementation of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principles of the present invention. These improvements and modifications are also considered to be within the scope of protection of the present invention.

Claims

1. A vacuum chamber upper chamber cover opening and closing mechanism, characterized in that: It includes an upper furnace cover, a lower furnace frame, an upper cavity module, a lower cavity module, a first lifting structure and a lifting power system; one side edge of the upper furnace cover is hinged to one side edge of the lower furnace frame, and the other side edge of the upper furnace cover is connected to the other side edge of the lower furnace frame through a second lifting structure; the upper cavity module is located above the lower cavity module and is arranged parallel to the lower cavity module, and the lifting power system controls the upper cavity module to approach or move away from the lower cavity module through the first lifting structure.

2. The vacuum chamber upper cover opening and closing mechanism according to claim 1, characterized in that: The first lifting structure includes two parallel lifting rods, the inner wall of the upper furnace top cover is provided with a slide groove, the first end of the upper cavity module is hinged to the top of a lifting rod, and the second end is slidably connected to the slide groove, and the top of the other lifting rod is used to drive the second end of the upper cavity module to slide up and down along the slide groove.

3. The vacuum chamber upper cover opening and closing mechanism according to claim 2, characterized in that: The lifting power system includes a fixed frame, a cross bar and a power source, the two ends of the cross bar are respectively connected to the bottom of the two lifting rods, the power source drives the cross bar to move up and down, and the fixed frame is provided with an upper travel switch and a lower travel switch; the upper travel switch and the lower travel switch point to the lifting rods respectively.

4. The vacuum chamber upper cover opening and closing mechanism according to claim 1, characterized in that: The upper surface of the lower cavity module is provided with a transport rail, and the transport rail is used to transport the products that have passed through the furnace.

5. The vacuum chamber upper cover opening and closing mechanism according to claim 2, characterized in that: The two lifting rods movably pass through the two ends of the lower cavity module.

6. The vacuum chamber upper cover opening and closing mechanism according to claim 1, characterized in that: The second lifting structure is a linear lifter, one end of which is hinged to the outer wall of the lower furnace frame, and the other end of which is hinged to the outer wall of the upper furnace top cover.

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