Closed furnace bottom heating device for chemical deposition furnace

Abstract

The invention relates to the field of heating equipment, in particular to a closed furnace bottom heating device for a chemical deposition furnace, which comprises a flange plate connected with a furnace bottom flange seat, an insulating cover, a heater and a conductive device, the insulating cover is connected to the surface of the flange plate, and a sealing cavity for mounting the heater is reserved between an inner cavity of the insulating cover and the surface of the flange plate; and the conductive device is connected between the heater and the flange plate and can be used for electrifying the heater. Through the arrangement of the flange plate, the insulating cover, the heater and the conductive device, process gas in the furnace body is not prone to entering the sealing cavity and forming deposited carbon on the surface of the heater, the running stability of the heater is guaranteed, the heater is not prone to damage in the running process, the heater does not need to be maintained after the whole inner furnace pipe is dismounted, and the maintenance cost is reduced. Therefore, the use cost of the chemical deposition furnace is reduced.

Description

Technical Field

[0001] The present application relates to the field of heating equipment, and in particular to a closed furnace bottom heating device for a chemical deposition furnace. Background Art

[0002] Chemical vapor deposition furnace is one of the main equipment for preparing high-performance C / C composite materials. Usually, heaters are installed around the walls of the deposition furnace. However, when the deposition furnace is large in size, the temperature at the center and bottom of the furnace is relatively low, which affects the overall temperature uniformity of the equipment. Therefore, large-size deposition furnaces mainly install heaters directly below the furnace body and connect the wires through the electrode lead-out device.

[0003] However, during the actual use of the furnace body, due to the process of forming deposited carbon filling carbon fibers by pyrolysis of the C / C composite material using a gas phase precursor, part of the deposited carbon is easily deposited around the heater. When the furnace body works for a long time, it is easy to cause damage to the heater. It is necessary to remove the entire inner furnace and then repair the heater, which prolongs the maintenance workload of the heater and increases the cost of using the chemical deposition furnace. Summary of the invention

[0004] In order to improve the problem that deposited carbon is easily deposited around the heater, the present application provides a closed furnace bottom heating device for a chemical deposition furnace.

[0005] The present application provides a closed furnace bottom heating device X for a chemical deposition furnace, which adopts the following technical solution: A closed furnace bottom heating device for a chemical deposition furnace comprises a flange connected to a furnace bottom flange seat, an insulating cover, a heater and a conductive device, wherein the insulating cover is connected to the surface of the flange, a sealed cavity for installing the heater is reserved between the inner cavity of the insulating cover and the surface of the flange, the conductive device is connected between the heater and the flange, and the conductive device can energize the heater.

[0006] By adopting the above technical scheme, the flange is installed on the surface of the flange seat at the bottom of the furnace, and the heater is installed in the sealed cavity, so as to achieve isolation between the process gas in the furnace body and the heater, so that the process gas in the furnace body is not easy to enter the sealed cavity and form carbon deposits on the surface of the heater, thereby ensuring the stability of the operation of the heater and preventing the heater from being damaged during operation. There is no need to remove the entire inner furnace and then repair the heater, thereby reducing the use cost of the chemical deposition furnace; at the same time, the conductive device energizes the heater, and the heater generates a large amount of heat energy, thereby achieving stable heat supply to the inner cavity of the furnace body and ensuring the stability of the process gas reaction in the furnace body.

[0007] Optionally, an inert gas inlet and an inert gas outlet are provided at intervals on the surface of the flange, and the inert gas inlet and the inert gas outlet are both connected to the sealed cavity.

[0008] By adopting the above technical scheme, the inert gas enters the sealed cavity through the inert gas inlet, and is discharged from the inert gas outlet after filling the sealed cavity. The inert gas surrounds the heater, so that the process gas in the furnace body is not easy to enter the sealed cavity and form carbon deposits on the surface of the heater; at the same time, when the heater is heated up, the pressure of the inert gas introduced into the sealed cavity is controlled, so that the inert gas pressure in the sealed cavity is higher than the process gas pressure in the furnace body, so that the process gas in the furnace body is not easy to enter the sealed cavity, thereby further improving the sealing stability of the sealed cavity.

[0009] Optionally, a fixing ring is connected to the surface of the flange facing the insulating cover, and the inner ring wall of the fixing ring presses against the circumferential outer wall of the insulating cover to form a seal.

[0010] By adopting the above technical solution, when the insulating cover is installed on the surface of the flange, the inner wall of the fixing ring presses against the circumferential outer wall of the insulating cover to form a seal, so that the process gas in the furnace body is not easy to enter the sealing cavity through the abutment between the fixing ring and the insulating cover, thereby improving the sealing stability of the sealing cavity.

[0011] Optionally, the conductive device includes an electrode rod, a terminal block and an electrode connecting rod, the surface of the flange is provided with an electrode interface for the electrode rod to pass through, the electrode interface is connected to the sealed cavity, the surface of the terminal block is provided with an electrode hole 1 for the electrode rod to pass through, the surface of the terminal block is provided with a plurality of terminal holes spaced apart, one end of the electrode connecting rod is connected to the heater, the other end of the electrode connecting rod is connected to the electrode rod, and the end of the electrode rod away from the electrode connecting rod is sequentially provided with an electrode interface and an electrode hole 1.

[0012] By adopting the above technical solution, one end of the electrode connecting rod is installed on the heater, and the other end of the electrode connecting rod is installed on the electrode rod. The end of the electrode rod away from the electrode connecting rod is penetrated with the electrode interface and the electrode hole one in sequence. The inner wall of the electrode hole one is pressed against the circumferential outer wall of the electrode rod. At the same time, the cable is screwed with the inner wall of the wiring hole to complete the wiring, so as to realize the power supply to the heater and ensure the stability of the operation of the heater.

[0013] Optionally, the conductive device further comprises a sealing assembly, which comprises a baffle, an insulating flange 1, an insulating flange 2, a sealing ring 1 and a fixing nut, wherein the baffle, the insulating flange 1, the sealing ring 1 and the insulating flange 2 are coaxially sleeved on the outer periphery of the electrode rod in sequence, the baffle abuts against the outer wall of the electrode rod to form a limit, the fixing nut is threadedly tightened and fixed on the end of the electrode rod away from the baffle, driving the insulating flange 1 and the insulating flange 2 to clamp the two sides of the sealing ring 1, the inner ring of the sealing ring 1 abuts against the outer peripheral surface of the electrode rod to form a seal, and the outer ring of the sealing ring 1 abuts against the inner wall of the electrode interface to form a seal.

[0014] By adopting the above technical scheme, the baffle, insulating flange 1, sealing ring 1 and insulating flange 2 are coaxially sleeved on the outer periphery of the electrode rod in sequence, the baffle abuts against the outer wall of the electrode rod to form a limit, the fixing nut is threadedly tightened and fixed on the end of the electrode rod away from the baffle, the fixing nut and the baffle clamp the insulating flange 1 and the insulating flange 2, the insulating flange 1 and the insulating flange 2 squeeze the sealing ring 1, driving the inner ring of the sealing ring 1 to abut against the circumferential outer wall of the electrode rod to form a seal, and the outer ring of the sealing ring 1 to abut against the inner wall of the electrode interface to form a seal, so that the inert gas in the sealing cavity is not easy to overflow from the abutment between the electrode rod and the electrode interface, thereby improving the sealing stability of the sealing cavity.

[0015] Optionally, the conductive device also includes a cooling water pipe, and a cooling channel for cooling water to flow is provided at the end of the electrode rod protruding from the electrode interface. A water inlet and a water outlet are provided at one end of the cooling water pipe, and the other end of the cooling water pipe is connected to the electrode rod. The inner cavity of the cooling water pipe is connected to the cooling channel, and water enters the cooling channel through the water inlet, and the water in the cooling channel is discharged through the water outlet.

[0016] By adopting the above technical solution, water enters the cooling channel through the water inlet, the water fully contacts the inner wall of the cooling channel and exchanges heat, thereby cooling the electrode rod. At the same time, the water in the cooling channel is discharged through the water outlet, thereby circulating the water in the cooling channel, thereby improving the cooling efficiency of the electrode rod.

[0017] Optionally, the flange is connected to a thermocouple integrated device, the flange is connected to a thermocouple seat, the inner cavity of the thermocouple seat is connected to the sealed cavity, and the detection end of the thermocouple integrated device is embedded in the inner cavity wall of the thermocouple seat to form a connection.

[0018] By adopting the above technical solution, the thermocouple seat is installed on the flange disk, the inner cavity of the thermocouple seat is connected to the sealed cavity, and the detection end of the thermocouple integrated device is embedded in the inner cavity wall of the thermocouple seat to form a connection. The thermocouple integrated device can accurately control and measure the temperature in the sealed cavity, thereby improving the accuracy of heating the inner cavity of the furnace body.

[0019] Optionally, a blind pin is embedded in the inner wall of the thermocouple seat away from the sealing cavity.

[0020] By adopting the above technical solution, the blind pin is embedded in the inner cavity wall of the thermocouple seat away from the sealed cavity, so as to achieve the sealing of the inner cavity of the thermocouple seat, so that external impurities are not easy to enter the sealed cavity through the inner cavity of the thermocouple seat to interfere with the heater, thereby ensuring the stability of the operation of the heater; when it is necessary to control the temperature separately, a thermocouple integrated device of the same diameter is used to replace the blind pin to realize arbitrary switching of various modes of the closed furnace bottom heating device for the chemical deposition furnace.

[0021] Optionally, the thermocouple seat is connected to a sealing component, and the inner cavity wall of the thermocouple seat is provided with a sealing cavity for accommodating the sealing component, and the sealing component includes a second sealing ring, a spacer ring, a pressing sleeve and a locking nut, and the second sealing ring, the spacer ring and the pressing sleeve are sequentially sleeved on the outer periphery of the blind pin, and the locking nut is threadedly connected to the outer peripheral surface of the thermocouple seat, and the surface of the locking nut squeezes the pressing sleeve, driving the spacer ring to squeeze the second sealing ring, and the inner ring of the second sealing ring presses against the outer peripheral surface of the blind pin to form a seal, and the outer ring of the second sealing ring presses against the inner wall of the sealing cavity to form a seal.

[0022] By adopting the above technical scheme, the second sealing ring, the spacer ring and the compression sleeve are sequentially sleeved on the outer periphery of the blind pin, the locking nut is threadedly tightened and fixed on the outer peripheral surface of the thermocouple seat, the surface of the locking nut squeezes the compression sleeve, driving the compression sleeve to squeeze the spacer ring, and the spacer ring applies pressure to the second sealing ring, the second sealing ring is deformed under pressure, the inner ring of the second sealing ring is pressed against the outer peripheral surface of the blind pin to form a seal, and the outer ring of the second sealing ring is pressed against the inner wall of the sealing cavity to form a seal, so that the inert gas in the sealing cavity is not easy to overflow from the connection between the blind pin and the thermocouple seat, thereby improving the sealing stability of the sealing cavity.

[0023] Optionally, the flange is connected to an insulation component, the insulation component includes a support rod, a partition and an insulation plate, one end of the support rod is connected to the surface of the flange facing the sealing cavity, the other end of the support rod is connected to the partition surface, the insulation plate surface is connected to the partition surface facing the heater, the partition surface is spaced apart to provide a thermocouple hole and an electrode hole two for an electrode connecting rod to pass through, the thermocouple holes correspond one to one with the thermocouple seats, the surface of the insulation plate facing the electrode hole two is provided with an electrode hole three for the electrode connecting rod to pass through, the surface of the insulation plate facing the thermocouple hole is provided with a thermocouple channel, and the thermocouple channel passes through the insulation plate surface in a direction close to the heater.

[0024] By adopting the above technical solution, one end of the support rod is connected to the flange surface, and the other end of the support rod is connected to the partition surface. The support rod provides support for the partition. At the same time, the insulation plate is installed on the partition surface facing the heater. The insulation plate can accumulate the heat energy generated by the heater and reduce energy consumption, thereby embodying the concept of energy saving. At the same time, the end of the electrode connecting rod is penetrated by electrode hole 2 and electrode hole 3 and connected to the heater. The inner wall of electrode hole 2 provides support for the electrode connecting rod, so that the electrode connecting rod is not easy to deviate in the sealed cavity, thereby improving the limiting stability of the electrode connecting rod in the sealed cavity.

[0025] In summary, the present application includes at least one of the following beneficial technical effects: 1. The arrangement of flange, insulating cover, heater and conductive device makes it difficult for process gas in the furnace to enter the sealed cavity and form carbon deposits on the heater surface, thus ensuring the stability of the heater operation and making it difficult for the heater to be damaged during operation. It is not necessary to dismantle the entire inner furnace before repairing the heater, thereby reducing the use cost of the chemical deposition furnace; 2. The inert gas inlet and the inert gas outlet are set to control the pressure of the inert gas introduced into the sealed cavity, so that the inert gas pressure in the sealed cavity is higher than the process gas pressure in the furnace body, so that the process gas in the furnace body is not easy to enter the sealed cavity, and the sealing stability of the sealed cavity is further improved; 3. The setting of the fixing ring, the inner ring wall of the fixing ring is pressed against the circumferential outer wall of the insulating cover to form a seal, so that the process gas in the furnace body is not easy to enter the sealing cavity through the abutment between the fixing ring and the insulating cover, thereby improving the sealing stability of the sealing cavity. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 It is a schematic diagram of the overall structure in Example 1 of the present application.

[0027] Figure 2 It is a schematic diagram of the local structure in Example 1 of the present application.

[0028] Figure 3 It is a schematic diagram of the overall structure of the flange and insulation assembly in Example 1 of the present application.

[0029] Figure 4 It is a partial cross-sectional view in Example 1 of the present application.

[0030] Figure 5 It is a schematic diagram of the overall structure of the terminal block in Example 1 of the present application.

[0031] Figure 6 It is a partial cross-sectional view of the terminal block in Example 2 of the present application, mainly showing the reinforcement components.

[0032] Figure 7 It is a partial cross-sectional view of the terminal block in Example 2 of the present application, mainly showing the heat dissipation component.

[0033] Explanation of reference numerals: 1. flange; 11. inert gas inlet; 12. inert gas outlet; 13. electrode interface; 2. insulating cover; 21. insulating part one; 22. insulating part two; 23. insulating part three; 24. sealing chamber; 3. heater; 4. conductive device; 41. electrode rod; 411. sealing ring groove; 412. cooling channel; 42. terminal block; 421. electrode hole one; 422. slit; 423. threaded hole; 424. terminal hole; 425. reinforcement chamber; 426. sliding chamber; 427. heat dissipation channel; 428. heat dissipation groove; 43. electrode connecting rod; 44. sealing assembly; 441. baffle; 442. insulating flange one; 443. insulating flange two; 444. Sealing ring one; 445, fixing nut; 45, cooling water pipe; 451, water inlet; 452, water outlet; 5, fixing ring; 6, thermocouple seat; 61, sealing cavity; 7, blind pin; 8, sealing assembly; 81, sealing ring two; 82, spacer ring; 83, pressing sleeve; 84, locking nut; 9, insulation assembly; 91, support rod; 92, partition; 921, thermocouple hole; 922, electrode hole two; 93, insulation board; 931, electrode hole three; 932, thermocouple channel; 10, reinforcement assembly; 101, inflatable piston; 102, reinforcement ring capsule; 1021, air outlet; 103, elastic part; 14, heat dissipation assembly; 141, heat dissipation plate; 1411, heat dissipation hole; 142, thermal expansion and contraction block. DETAILED DESCRIPTION

[0034] The following is combined with Figure 1-7 This application is described in further detail.

[0035] The embodiment of the present application discloses a closed furnace bottom heating device for a chemical deposition furnace.

[0036] Example 1 Reference Figure 1 and Figure 2 A closed furnace bottom heating device for a chemical deposition furnace comprises a flange 1 fixed to a furnace bottom flange seat by bolts, an insulating cover 2, a heater 3 and a conductive device 4, the insulating cover 2 comprises an insulating part 1 21, an insulating part 22 and an insulating part 3 23, in the embodiment of the present application, the insulating part 1 21 is a circular plate, the insulating part 22 and the insulating part 3 23 are both cylinders, one end of the insulating part 22 in the axial direction is coaxially fixed to the surface of the insulating part 1 21, the connection between the insulating part 22 and the insulating part 1 21 is sealed by graphite emulsion, the other end of the insulating part 22 in the axial direction is coaxially fixed to the end of the insulating part 3 23, and the connection between the insulating part 22 and the insulating part 3 23 is sealed by graphite emulsion, a fixing ring 5 is coaxially welded and fixed to the surface of the flange 1, the end of the insulating part 3 23 away from the insulating part 22 is embedded in the inner ring of the fixing ring 5, the circumferential outer wall of the insulating part 3 23 is pressed against the inner ring wall of the fixing ring 5 to form a fixation, and the connection between the insulating part 3 23 and the fixing ring 5 is sealed by graphite emulsion.

[0037] Reference Figure 1 and Figure 2 A sealed cavity 24 for installing the heater 3 is reserved between the inner cavity of the insulating cover 2 and the surface of the flange 1. In the embodiment of the present application, the heater 3 includes a plurality of graphite heating plates, and the plurality of graphite heating plates are fixed in pairs to form the heater 3; when the flange 1 is fixed to the flange seat at the bottom of the furnace by bolts, the insulating cover 2 is embedded in the inner cavity of the furnace body, and the heater 3 heats the inner cavity of the furnace body. At the same time, the process gas in the furnace body is not easy to enter the sealed cavity 24 and form carbon deposition on the surface of the heater 3, thereby ensuring the stability of the operation of the heater 3 and making the heater 3 not easily damaged during operation. There is no need to remove the entire inner furnace and then repair the heater 3, thereby reducing the use cost of the chemical deposition furnace.

[0038] Reference Figure 2 and Figure 3 An inert gas inlet 11 and an inert gas outlet 12 are provided on the surface of the flange 1 at intervals, and the inert gas outlet 12 and the inert gas inlet 11 are both connected to the sealed cavity 24. The inert gas outlet 12 and the inert gas inlet 11 are installed with the inert gas pipeline through quick-release clamps. When the heater 3 starts to heat up, by controlling the pressure of the inert gas entering the sealed cavity 24, the inert gas pressure in the sealed cavity 24 is made higher than the process gas pressure in the furnace body, so that the process gas in the furnace body is not easy to enter the sealed cavity 24 to form carbon deposition on the surface of the heater 3, thereby further improving the sealing stability of the sealed cavity 24.

[0039] Reference Figure 2 and Figure 4 , the conductive device 4 is installed between the heater 3 and the flange 1, and the conductive device 4 can energize the heater 3; the conductive device 4 includes an electrode rod 41, a terminal block 42, an electrode connecting rod 43, a sealing component 44 and a cooling water pipe 45. In the embodiment of the present application, the number of the electrode rod 41, the terminal block 42, the electrode connecting rod 43, the sealing component 44 and the cooling water pipe 45 are all two, and the flange 1 is provided with two electrode interfaces 13 for the electrode rod 41 to pass through, and the electrode interfaces 13 are connected to the sealing cavity 24, and the sealing components 44 correspond to the electrode interfaces 13 one by one. It can improve the sealing stability between the electrode interface 13 and the electrode rod 41; the surface of the electrode rod 41 facing the electrode interface 13 is provided with a sealing ring groove 411 for accommodating a sealing component 44, and the sealing component 44 includes a baffle 441, an insulating flange 1 442, an insulating flange 2 443, a sealing ring 1 444 and a fixing nut 445. In the embodiment of the present application, the material of the insulating flange 1 442 and the insulating flange 2 443 is polytetrafluoroethylene, and the material of the sealing ring 1 444 can be rubber or silicone. In the embodiment of the present application, the material of the sealing ring 1 444 is rubber, which has a certain deformation ability.

[0040] Reference Figure 4The baffle 441, the insulating flange 1 442, the sealing ring 1 444 and the insulating flange 2 443 are coaxially sleeved on the outer circumference of the electrode rod 41 in sequence, the surface of the baffle 441 is pressed against the inner wall of the sealing ring groove 411 to form a positioning, the fixing nut 445 is threadedly tightened and fixed on the end of the electrode rod 41 away from the baffle 441, the surface of the fixing nut 445 is pressed against the surface of the insulating flange 2 443, the baffle 441 and the fixing nut 445 clamp the insulating flange 1 442 and the insulating flange 2 443 on both sides, the insulating flange 1 442 and the insulating flange 2 443 squeeze the sealing ring 1 444, the sealing ring 1 444 is deformed under pressure, the inner ring wall of the sealing ring 1 444 is pressed against the inner wall of the sealing ring groove 411 to form a seal, the outer ring wall of the sealing ring 1 444 is pressed against the inner wall of the electrode interface 13 to form a seal, so that the inert gas in the sealing cavity 24 is not easy to overflow from the connection between the electrode rod 41 and the electrode interface 13, and the sealing stability between the outer circumference of the electrode rod 41 and the inner wall of the electrode interface 13 is improved.

[0041] Reference Figure 2 and Figure 5 The terminal block 42 corresponds to the electrode rod 41 one by one, an electrode hole 421 for the electrode rod 41 to pass through is provided on the surface of the terminal block 42, a slit 422 is provided on the surface of the terminal block 42, the slit 422 is connected to the electrode hole 421, and two threaded holes 423 for threaded connection are provided on the surface of the terminal block 42 at intervals, the axis of the threaded hole 423 and the axis of the electrode hole 421 are perpendicular to each other, the two threaded holes 423 are located on both sides of the electrode hole 421, and the two threaded holes 423 are connected to the slit 422. When the screw corresponds to the threaded hole 423 one by one and is tightened, the inner wall of the slit 422 is clamped, and the inner wall of the electrode hole 421 is pressed against the outer peripheral surface of the electrode rod 41 to form a fixation, thereby ensuring good contact between the electrode rod 41 and the terminal block 42.

[0042] Reference Figure 5 A plurality of wiring holes 424 are spaced apart on the surface of the wiring row 42, the axis of the wiring hole 424 is parallel to the axis of the electrode hole 421, the wiring hole 424 passes through the outer wall of the wiring row 42 along its own axis, and the inner wall of the wiring hole 424 is provided for the cable to be screwed and fixed to complete the wiring, thereby ensuring the stability of the power supply.

[0043] Reference Figure 2 and Figure 4 In the embodiment of the present application, the material of the electrode connecting rod 43 is graphite, and an external thread groove for threaded connection of the end of the electrode connecting rod 43 is provided at the end of the electrode connecting rod 41 in the axial direction of the electrode rod 41 located in the sealed cavity 24. The end of the electrode connecting rod 43 away from the electrode rod 41 is fixed on the heater 3 to achieve stable power supply to the heater 3.

[0044] Reference Figure 4A water inlet 451 and a water outlet 452 are provided at the end of the cooling water pipe 45, and the cooling water pipe 45 corresponds to the electrode rod 41 one by one. A cooling channel 412 for cooling water is provided on the end surface of the electrode rod 41 away from the electrode connecting rod 43, and a thread groove is provided on the inner wall of the cooling channel 412 to be threadedly connected to the end of the cooling water pipe 45. When the end of the cooling water pipe 45 is embedded in the cooling channel 412 and the threads are tightened on the inner wall of the thread groove, the inner cavity of the cooling water pipe 45 is connected to the cooling channel 412, and water enters the cooling channel 412 from the water inlet 451, and the water exchanges heat with the inner wall of the cooling channel 412 to achieve cooling of the electrode rod 41. At the same time, the water in the cooling channel 412 is discharged from the water outlet 452 to achieve the circulation of the water in the cooling channel 412, thereby improving the cooling efficiency of the electrode rod 41.

[0045] Reference Figure 4 , the flange 1 is connected with a thermocouple integrated device, a thermocouple seat 6 is fixed on the disk surface of the flange 1 facing away from the sealing cavity 24, the inner cavity of the thermocouple seat 6 is connected to the sealing cavity 24, a blind pin 7 is embedded in the inner cavity of the thermocouple seat 6, the blind pin 7 closes the inner cavity of the thermocouple seat 6, so that the outside air is not easy to enter the sealing cavity 24 through the inner cavity of the thermocouple seat 6, thereby improving the sealing stability of the sealing cavity 24; when it is necessary to control the temperature in the sealing cavity 24 separately, the blind pin 7 is replaced by a thermocouple integrated device of the same diameter, and the detection end of the thermocouple integrated device is screwed and fixed to the inner cavity wall of the thermocouple seat 6 to achieve installation of the thermocouple integrated device and the thermocouple seat 6, and the thermocouple integrated device can control and measure the temperature in the sealing cavity 24, thereby achieving precise control of the inner cavity temperature of the furnace body.

[0046] Reference Figure 4 , the thermocouple seat 6 is equipped with a sealing component 8, and the sealing component 8 can improve the sealing between the thermocouple integrated device and the thermocouple seat 6; the inner wall of the thermocouple seat 6 is provided with a sealing cavity 61 for accommodating the sealing component 8, and the sealing component 8 includes a sealing ring 81, a spacer ring 82, a pressing sleeve 83 and a locking nut 84. The material of the sealing ring 81 is rubber or silicone. In the embodiment of the present application, the material of the sealing ring 81 is rubber, which has a certain deformation ability. In the embodiment of the present application, the number of the sealing ring 81 is two, and the sealing ring 81, the spacer ring 82, the sealing ring 81 and the pressing sleeve 83 are sequentially sleeved on the outer periphery of the blind pin 7, and the locking nut 84 is provided. The tightening nut 84 is threadedly tightened and fixed on the outer peripheral surface of the thermocouple seat 6, and an oil pressure sleeve 83 is applied to the surface of the locking nut 84. Two sealing rings 81 are located on both sides of the spacer ring 82. One of the sealing rings 81 is squeezed and deformed by the spacer ring 82 and the pressure sleeve 83, and the other sealing ring 81 is squeezed and deformed by the inner wall of the sealing cavity 61 and the spacer ring 82. The inner rings of the two sealing rings 81 are pressed against the outer peripheral surface of the blind pin 7 to form a seal, and the outer rings of the sealing rings 81 are pressed against the inner wall of the sealing cavity 61 to form a seal, so that the inert gas in the sealing cavity 24 is not easy to overflow from the connection between the blind pin 7 and the thermocouple seat 6, thereby improving the sealing stability of the sealing cavity 24.

[0047] Reference Figure 2 and Figure 3 The flange 1 is equipped with an insulation component 9, which can store the heat energy generated by the heater 3. The insulation component 9 includes a support rod 91, a partition 92 and an insulation board 93. The number of the support rods 91 can be one, two or more. In the embodiment of the present application, the number of the support rods 91 is multiple, and one end of the multiple support rods 91 is welded and fixed to the disk surface of the flange 1 facing the sealing cavity 24 at intervals, and the other ends of the multiple support rods 91 are welded and fixed to the board surface of the partition 92 at intervals. The board surface of the insulation board 93 is fixed on The partition 92 has a surface facing the heater 3, and has a thermocouple hole 921 and two electrode holes 922 for the electrode connecting rods 43 to pass through, which are spaced apart on the partition 92 surface. The thermocouple holes 921 correspond one to one with the thermocouple seats 6. The surface of the insulation board 93 facing the thermocouple hole 921 has an electrode hole 931 for the electrode rod 41 connecting rod to pass through. The surface of the insulation board 93 facing the thermocouple hole 921 has a thermocouple channel 932, which penetrates the surface of the insulation board 93 in the direction close to the heater 3.

[0048] The implementation principle of a closed furnace bottom heating device for a chemical deposition furnace in Example 1 of the present application is as follows: when the flange plate 1 is fixed to the furnace bottom flange seat by bolts, the insulating cover 2 is embedded in the inner cavity of the furnace body, and the heater 3 heats the inner cavity of the furnace body. At the same time, the process gas in the furnace body is not easy to enter the sealed cavity 24 and form deposited carbon on the surface of the heater 3, thereby ensuring the stability of the operation of the heater 3 and making the heater 3 not easily damaged during operation. There is no need to dismantle the entire inner furnace shell and then repair the heater 3, thereby reducing the use cost of the chemical deposition furnace.

[0049] Example 2 Reference Figure 4 and Figure 6The difference between Example 2 and Example 1 is that the terminal block 42 is connected to a reinforcement component 10, and the reinforcement component 10 can increase the pressing force between the terminal block 42 and the electrode rod 41. The reinforcement component 10 includes an elastic member 103, an inflatable piston 101 and a reinforcement ring capsule 102. The material of the reinforcement ring capsule 102 can be rubber or silicone. In the embodiment of the present application, the material of the reinforcement ring capsule 102 is rubber, which has a certain deformation ability. The inner wall of the electrode hole 421 is provided with a reinforcement cavity 425 for accommodating the reinforcement ring capsule 102. The inner ring wall of the reinforcement ring capsule 102 can press against the outer peripheral surface of the electrode rod 41 to form a fixation. The material of the inflatable piston 101 can be rubber or silicone. In the embodiment of the present application, the material of the inflatable piston 101 is rubber. The rubber has a certain deformation ability. The inner wall of the slit 422 is provided with a sliding cavity 426 for the sliding of the inflatable piston 101. The sliding direction of the inflatable piston 101 and the axis of the threaded hole 423 are parallel to each other. The sliding cavity 426 is connected to the inner cavity of the reinforcement ring bag 102. The elastic member 103 can be a compression spring or a tension spring. In the embodiment of the present application, the elastic member 103 is a compression spring with a certain deformation ability. One end of the elastic member 103 in the elastic direction is fixed on the inner wall of the sliding cavity 426, and the other end of the elastic member 103 in the elastic direction is fixed on the surface of the inflatable piston 101. The elastic member 103 has the elastic force to drive the inflatable piston 101 to slide in the direction away from the sliding cavity 426, and the end of the inflatable piston 101 tends to protrude from the inner wall of the slit 422.

[0050] Reference Figure 2 and Figure 6 When the screw thread is tightened and fixed on the inner wall of the threaded hole 423, the inner wall of the slit 422 is clamped, the inner wall of the slit 422 abuts against the surface of the inflation piston 101 and drives the inflation piston 101 to slide toward the sliding chamber 426, the air pressure in the sliding chamber 426 increases, and the air in the sliding chamber 426 enters the inner cavity of the reinforcement ring capsule 102, and the inner ring wall of the reinforcement ring capsule 102 abuts against the outer peripheral surface of the electrode rod 41 to form a fixation.

[0051] Reference Figure 4 and Figure 7The terminal block 42 is provided with a heat dissipation assembly 14, which can dissipate heat at the connection between the terminal block 42 and the electrode rod 41. The heat dissipation assembly 14 includes a heat dissipation plate 141 and a thermal expansion and contraction block 142. A heat dissipation channel 427 is provided on the inner wall of the reinforcement cavity 425. The heat dissipation channel 427 is connected to the electrode hole 421. The heat dissipation channel 427 is provided with a heat dissipation groove 428 for the heat dissipation plate 141 to slide toward the inner wall of the reinforcement ring capsule 102. A heat dissipation hole 1411 connected to the heat dissipation channel 427 is provided on the surface of the heat dissipation plate 141. An air outlet 1021 connected to the heat dissipation groove 428 is provided on the surface of the reinforcement ring capsule 102. The air outlet 1021 is connected to the inner cavity of the reinforcement ring capsule 102. The material of the thermal expansion and contraction block 142 can be rubber or nylon. In the embodiment, the material of the thermal expansion and contraction block 142 is nylon, which has a certain thermal expansion coefficient. One end of the thermal expansion and contraction block 142 is fixed to the inner wall of the heat dissipation groove 428, and the other end of the thermal expansion and contraction block 142 is fixed to the board surface of the heat dissipation plate 141. The heat dissipation plate 141 separates the heat dissipation channel 427 and the air outlet 1021. When the thermal expansion and contraction block 142 heats up and expands, the heat dissipation plate 141 is driven to slide on the inner wall of the heat dissipation groove 428, and the air outlet 1021, the heat dissipation hole 1411 and the heat dissipation channel 427 are connected in sequence. The air in the reinforced ring bag 102 passes through the air outlet 1021 and the heat dissipation hole 1411 in sequence and is discharged from the heat dissipation channel 427. The air fully contacts the terminal block 42 and the electrode rod 41 and performs heat exchange, thereby achieving cooling of the terminal block 42 and the electrode rod 41.

[0052] The implementation principle of a closed furnace bottom heating device for a chemical deposition furnace in Example 2 of the present application is as follows: when the thermal expansion and contraction block 142 heats up and expands, the heat sink 141 is driven to slide on the inner wall of the heat sink 428, and the air outlet 1021, the heat dissipation holes 1411 and the heat dissipation channel 427 are connected in sequence, and the air in the reinforced ring bag 102 passes through the air outlet 1021 and the heat dissipation holes 1411 in sequence and is discharged from the heat dissipation channel 427, and the air fully contacts the terminal block 42 and the electrode rod 41 and performs heat exchange, thereby achieving cooling of the terminal block 42 and the electrode rod 41.

[0053] The above are all preferred embodiments of the present application, and the protection scope of the present application is not limited thereto. Therefore, any equivalent changes made according to the structure, shape, and principle of the present application should be included in the protection scope of the present application.

Claims

1. A closed furnace bottom heating device for a chemical deposition furnace, characterized in that: The invention comprises a flange (1) connected to a furnace bottom flange seat, an insulating cover (2), a heater (3) and a conductive device (4); the insulating cover (2) is connected to the surface of the flange (1); a sealed cavity (24) for installing the heater (3) is reserved between the inner cavity of the insulating cover (2) and the surface of the flange (1); the conductive device (4) is connected between the heater (3) and the flange (1); and the conductive device (4) can energize the heater (3).

2. The closed furnace bottom heating device for a chemical deposition furnace according to claim 1, characterized in that: An inert gas inlet (11) and an inert gas outlet (12) are provided on the surface of the flange (1) at intervals, and the inert gas inlet (11) and the inert gas outlet (12) are both connected to the sealed cavity (24).

3. The closed furnace bottom heating device for a chemical deposition furnace according to claim 1, characterized in that: A fixing ring (5) is connected to the surface of the flange (1) facing the insulating cover (2), and the inner wall of the fixing ring (5) is pressed against the circumferential outer wall of the insulating cover (2) to form a seal.

4. The closed furnace bottom heating device for a chemical deposition furnace according to claim 2, characterized in that: The conductive device (4) comprises an electrode rod (41), a terminal block (42) and an electrode connecting rod (43); an electrode interface (13) for the electrode rod (41) to pass through is provided on the surface of the flange (1); the electrode interface (13) is connected to the sealed cavity (24); an electrode hole (421) for the electrode rod (41) to pass through is provided on the surface of the terminal block (42); a plurality of terminal holes (424) are provided at intervals on the surface of the terminal block (42); one end of the electrode connecting rod (43) is connected to the heater (3); the other end of the electrode connecting rod (43) is connected to the electrode rod (41); the electrode interface (13) and the electrode hole (421) are sequentially provided at the end of the electrode rod (41) away from the electrode connecting rod (43).

5. The closed furnace bottom heating device for a chemical deposition furnace according to claim 4, characterized in that: The conductive device (4) further comprises a sealing assembly (44), wherein the sealing assembly (44) comprises a baffle (441), an insulating flange 1 (442), an insulating flange 2 (443), a sealing ring 1 (444) and a fixing nut (445); the baffle (441), the insulating flange 1 (442), the sealing ring 1 (444) and the insulating flange 2 (443) are coaxially sleeved on the outer periphery of the electrode rod (41) in sequence; the baffle (441) abuts against the outer wall of the electrode rod (41) to form a limit; the fixing nut (445) is threadedly tightened and fixed on the end of the electrode rod (41) away from the baffle (441), driving the insulating flange 1 (442) and the insulating flange 2 (443) to clamp the two sides of the sealing ring 1 (444); the inner ring of the sealing ring 1 (444) abuts against the outer peripheral surface of the electrode rod (41) to form a seal; and the outer ring of the sealing ring 1 (444) abuts against the inner wall of the electrode interface (13) to form a seal.

6. The closed furnace bottom heating device for a chemical deposition furnace according to claim 4, characterized in that: The conductive device (4) further comprises a cooling water pipe (45); the end of the electrode rod (41) protruding from the electrode interface (13) is provided with a cooling channel (412) for cooling water to flow; one end of the cooling water pipe (45) is provided with a water inlet (451) and a water outlet (452) at intervals; the other end of the cooling water pipe (45) is connected to the electrode rod (41); the inner cavity of the cooling water pipe (45) is connected to the cooling channel (412); water enters the cooling channel (412) through the water inlet (451); and the water in the cooling channel (412) is discharged through the water outlet (452).

7. The closed furnace bottom heating device for a chemical deposition furnace according to claim 1, characterized in that: The flange (1) is connected to a thermocouple integrated device, the flange (1) is connected to a thermocouple seat (6), the inner cavity of the thermocouple seat (6) is connected to the sealing cavity (24), and the detection end of the thermocouple integrated device is embedded in the inner cavity wall of the thermocouple seat (6) to form a connection.

8. The closed furnace bottom heating device for a chemical deposition furnace according to claim 7, characterized in that: A blind pin (7) is embedded in the inner wall of the thermocouple seat (6) away from the sealing cavity (24).

9. The closed furnace bottom heating device for a chemical deposition furnace according to claim 8, characterized in that: The thermocouple seat (6) is connected to a sealing component (8). The inner wall of the thermocouple seat (6) is provided with a sealing cavity (61) for accommodating the sealing component (8). The sealing component (8) comprises a second sealing ring (81), a spacer ring (82), a pressing sleeve (83) and a locking nut (84). The second sealing ring (81), the spacer ring (82) and the pressing sleeve (83) are sequentially sleeved on the outer periphery of the blind pin (7). The locking nut (84) is threadedly connected to the outer peripheral surface of the thermocouple seat (6). The surface of the locking nut (84) squeezes the pressing sleeve (83), driving the spacer ring (82) to squeeze the second sealing ring (81). The inner ring of the second sealing ring (81) presses against the outer peripheral surface of the blind pin (7) to form a seal. The outer ring of the second sealing ring (81) presses against the inner wall of the sealing cavity (61) to form a seal.

10. The closed furnace bottom heating device for a chemical deposition furnace according to claim 4, characterized in that: The flange (1) is connected to a heat preservation component (9), the heat preservation component (9) comprising a support rod (91), a partition (92) and a heat preservation plate (93), one end of the support rod (91) being connected to a surface of the flange (1) facing the sealing cavity (24), the other end of the support rod (91) being connected to a plate surface of the partition (92), the plate surface of the heat preservation plate (93) being connected to a surface of the partition (92) facing the heater (3), and the plate surface of the partition (92) being provided with thermocouple holes (921) at intervals. ) and an electrode hole two (922) for the electrode connecting rod (43) to pass through, the thermocouple hole (921) corresponds to the thermocouple seat (6) one by one, the surface of the insulation board (93) facing the electrode hole two (922) is provided with an electrode hole three (931) for the electrode connecting rod (43) to pass through, the surface of the insulation board (93) facing the thermocouple hole (921) is provided with a thermocouple channel (932), and the thermocouple channel (932) penetrates the surface of the insulation board (93) in a direction close to the heater (3).

Images