Method and device for detecting flatness of film surface of thin film
By reflecting the reference object, the principle of light reflection is used to accurately judge the flatness of the film surface, and the subjectivity and difficulty of the flatness of the film surface in the prior art are solved, and the objectivity and accuracy of the detection are improved , promotes quality control and defect improvement.
Patent Information
- Application Number
- CN202411301017.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-18
- Publication Date
- 2025-01-03
AI Technical Summary
In the prior art, it is difficult to accurately detect unevenness in the film surface flatness inspection, and it is highly subjective, which affects quality control and subsequent processing.
By reflecting the reference object (such as multiple carbon tapes or colored tapes that are pasted vertically equidistantly in parallel) on the surface of the film to be detected, the flatness and unevenness of the film are determined based on the deformation position and degree of the reflection by using the light reflection. Spend.
It realizes accurate inspection and determination of the flatness of the film surface, improves the ability to control quality and improve defects, reduces subjectivity, and improves the objectivity and accuracy of detection.
Smart Images
Figure CN119245557A_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the technical field of thin film products, and in particular to a method and device for detecting the flatness of a thin film surface. Background Art
[0002] Thin film products are widely used in various fields. However, since there is often residual stress in the film preparation process, the film surface flatness is poor, which affects its performance and has an adverse effect on subsequent processing procedures. Therefore, the film surface flatness needs to be checked, generally by naked vision or with the help of light. However, the conventional method of checking the film surface flatness by naked vision and with the help of light is difficult, it is difficult to find uneven areas on the film surface, and it is highly subjective, making it difficult to judge the unevenness. Summary of the invention
[0003] (1) Technical issues to be solved
[0004] The present application provides a method for detecting the flatness of a thin film surface, which solves the problems in the above-mentioned background technology.
[0005] (2) Technical solution
[0006] In a first aspect, the present application provides a thin film surface flatness detection method, which is implemented by a thin film surface flatness detection device, wherein the thin film surface flatness detection device includes a reference object;
[0007] The thin film surface flatness detection method comprises:
[0008] Reflecting the reference object on the surface of the film to be tested;
[0009] The flatness of the film surface of the film to be detected is determined according to the deformation state of the reflection of the reference object on the surface of the film to be detected.
[0010] Furthermore, the thin film surface flatness detection device also includes a glass table;
[0011] Before reflecting the reference object on the surface of the film to be detected, the method further comprises:
[0012] The film to be tested is spread flat on the glass table.
[0013] Furthermore, the thin film surface flatness detection device also includes a light;
[0014] The step of reflecting the reference object on the surface of the film to be detected comprises:
[0015] The angle of the light is adjusted so that the reference object is reflected on the surface of the film to be tested.
[0016] Furthermore, determining the flatness of the surface of the film to be detected according to the deformation state of the reflection of the reference object on the surface of the film to be detected includes:
[0017] Determining the uneven position of the film surface of the film to be detected according to the deformed position of the reflection of the reference object on the surface of the film to be detected;
[0018] The unevenness of the film surface of the film to be detected is determined according to the degree of deformation of the reflection of the reference object on the surface of the film to be detected.
[0019] Furthermore, the reference object is a plurality of carbon ribbons pasted vertically and equidistantly in parallel;
[0020] The step of determining the flatness of the surface of the film to be detected according to the deformation state of the reflection of the reference object on the surface of the film to be detected comprises:
[0021] Determining the uneven position of the film surface of the film to be detected according to the bending position of the reflection of the carbon ribbon on the surface of the film to be detected;
[0022] The unevenness of the film surface of the film to be detected is determined according to the number and range of the bends of the reflection of the carbon ribbon on the surface of the film to be detected.
[0023] Furthermore, the reference object is a plurality of colored tapes pasted vertically and equidistantly in parallel;
[0024] The step of determining the flatness of the surface of the film to be detected according to the deformation state of the reflection of the reference object on the surface of the film to be detected comprises:
[0025] Determine the uneven position of the film surface of the film to be detected according to the bending position of the reflection of the colored tape on the surface of the film to be detected;
[0026] The unevenness of the film surface of the film to be detected is determined according to the number and range of the curved lines of the reflection of the colored tape on the surface of the film to be detected.
[0027] Furthermore, the reference object is a plurality of carbon ribbons pasted into a uniform grid shape;
[0028] The step of determining the flatness of the surface of the film to be detected according to the deformation state of the reflection of the reference object on the surface of the film to be detected comprises:
[0029] Determine the uneven position of the film surface of the film to be detected according to the deformed grid position of the reflection of the carbon ribbon on the surface of the film to be detected;
[0030] The unevenness of the film surface of the film to be detected is determined according to the number of deformed grids of the reflection of the carbon ribbon on the surface of the film to be detected.
[0031] In a second aspect, the present application provides a thin film surface flatness detection device for implementing the thin film surface flatness detection method as described above; the thin film surface flatness detection device includes a reference object, and the reference object is used to be reflected on the surface of the film to be detected.
[0032] Furthermore, the film surface flatness detection device further comprises a glass table, and the film to be detected is laid flat on the glass table.
[0033] Furthermore, the film surface flatness detection device further comprises a light, and the light is used to reflect the reference object on the surface of the film to be detected.
[0034] (3) Beneficial effects
[0035] The above technical solution of the present application has the following advantages:
[0036] The first aspect of the present application provides a method for detecting the flatness of a thin film surface, which reflects a reference object on the surface of the thin film to be detected, and determines the flatness of the thin film surface to be detected according to the deformation state of the reflection of the reference object on the surface of the thin film to be detected. This method can better inspect and determine the flatness of the film surface, thereby better performing quality control and defect improvement.
[0037] It can be understood that the beneficial effects of the second aspect mentioned above can be found in the relevant description of the first aspect mentioned above, and will not be repeated here. BRIEF DESCRIPTION OF THE DRAWINGS
[0038] In order to more clearly illustrate the specific implementation methods of the present application or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.
[0039] Figure 1 A schematic diagram of the process flow of the thin film surface flatness detection method provided in this application. DETAILED DESCRIPTION
[0040] In the following description, specific details such as specific system structures, technologies, etc. are provided for the purpose of illustration rather than limitation, so as to provide a thorough understanding of the embodiments of the present application. However, it should be clear to those skilled in the art that the present application may also be implemented in other embodiments without these specific details. In other cases, detailed descriptions of well-known systems, devices, circuits, and methods are omitted to prevent unnecessary details from obstructing the description of the present application.
[0041] It should be understood that when used in the present specification and the appended claims, the term "comprising" indicates the presence of described features, wholes, steps, operations, elements and / or components, but does not exclude the presence or addition of one or more other features, wholes, steps, operations, elements, components and / or combinations thereof.
[0042] In addition, in the description of the present application specification and the appended claims, the terms "first", "second", "third", etc. are only used to distinguish the descriptions and cannot be understood as indicating or implying relative importance.
[0043] References to "one embodiment" or "some embodiments" etc. described in the specification of this application mean that one or more embodiments of the present application include specific features, structures or characteristics described in conjunction with the embodiment. Therefore, the statements "in one embodiment", "in some embodiments", "in some other embodiments", "in some other embodiments", etc. that appear in different places in this specification do not necessarily refer to the same embodiment, but mean "one or more but not all embodiments", unless otherwise specifically emphasized in other ways. The terms "including", "comprising", "having" and their variations all mean "including but not limited to", unless otherwise specifically emphasized in other ways. "Multiple" means "two or more".
[0044] Thin film products are widely used in various fields. However, since there is often residual stress in the film preparation process, the film surface flatness is poor, which affects its performance and has an adverse effect on subsequent processing procedures. Therefore, the film surface flatness needs to be checked, generally by naked vision or with the help of light. However, the conventional method of checking the film surface flatness by naked vision and with the help of light is difficult, it is difficult to find uneven areas on the film surface, and it is highly subjective, making it difficult to judge the unevenness.
[0045] In response to the above problems, the present application provides a method and device for detecting the flatness of a thin film surface, which can better inspect and determine the flatness of the film surface, thereby better performing quality control and defect improvement.
[0046] The specific implementation methods of the present application are further described in detail below in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present application but are not intended to limit the scope of the present application.
[0047] The thin film surface flatness detection method provided in this embodiment is implemented by a thin film surface flatness detection device, and the thin film surface flatness detection device includes a reference object.
[0048] like Figure 1As shown, the film surface flatness detection method comprises: reflecting the reference object on the surface of the film to be detected; and determining the flatness of the film surface to be detected according to the deformation state of the reflection of the reference object on the surface of the film to be detected.
[0049] By reflecting a reference object on the surface of the film to be tested and determining the flatness of the film surface to be tested based on the deformation state of the reflection of the reference object on the surface of the film to be tested, the flatness of the film surface can be better inspected and judged, thereby better performing quality control and defect improvement.
[0050] In some embodiments, the film surface flatness detection device further comprises a glass table. Before reflecting the reference object on the surface of the film to be detected, the method further comprises: laying the film to be detected flat on the glass table.
[0051] In some embodiments, the film surface flatness detection device further comprises a light. The step of reflecting the reference object on the surface of the film to be detected comprises: adjusting the angle of the light so that the reference object is reflected on the surface of the film to be detected.
[0052] In some embodiments, determining the flatness of the film surface to be detected based on the deformation state of the reflection of the reference object on the film surface to be detected includes: determining the uneven position of the film surface to be detected based on the deformation position of the reflection of the reference object on the film surface to be detected; determining the unevenness of the film surface to be detected based on the deformation degree of the reflection of the reference object on the film surface to be detected.
[0053] In some embodiments, the reference object is a plurality of carbon ribbons pasted vertically and equidistantly in parallel. The flatness of the film surface to be detected is determined according to the deformation state of the reflection of the reference object on the film surface to be detected, including: determining the uneven position of the film surface to be detected according to the bending position of the reflection of the carbon ribbon on the film surface to be detected; determining the unevenness of the film surface to be detected according to the number and range of the bending of the reflection of the carbon ribbon on the film surface to be detected.
[0054] In some embodiments, the reference object is a plurality of colored tapes pasted vertically and equidistantly in parallel. Determining the flatness of the film surface to be detected based on the deformation state of the reflection of the reference object on the film surface to be detected includes: determining the uneven position of the film surface to be detected based on the bending position of the reflection of the colored tape on the film surface to be detected; determining the unevenness of the film surface to be detected based on the number and range of the bending lines of the reflection of the colored tape on the film surface to be detected.
[0055] In some embodiments, the reference object is a plurality of carbon ribbons pasted in a uniform grid shape. The flatness of the film surface to be detected is determined based on the deformation state of the reflection of the reference object on the film surface to be detected, including: determining the uneven position of the film surface to be detected based on the position of the deformed grid of the reflection of the carbon ribbon on the film surface to be detected; determining the degree of unevenness of the film surface to be detected based on the number of deformed grids of the reflection of the carbon ribbon on the film surface to be detected.
[0056] In application, use carbon ribbon or colored tape to stick them vertically and equidistantly on the wall. Lay the film flat on a flat glass table, adjust the light angle so that the carbon ribbon or colored tape is reflected on the film, and observe the reflected light of the carbon ribbon or colored tape on the film. According to the principle of light reflection, if the film surface is flat, the reflection of the carbon ribbon or colored tape on the film surface will be flat and uniform. If there are local areas where the film surface is uneven, the reflection of the carbon ribbon or colored tape on the film surface will be partially curved. The degree of unevenness at that location can be determined based on the number and range of the curved reflection of the carbon ribbon or colored tape.
[0057] If the vertically pasted carbon ribbon or colored tape is not obvious, the carbon ribbon or colored tape can be pasted into a uniform grid shape. Other operations are the same. The number of deformed grids reflected on the film surface is used to judge the unevenness of the local area.
[0058] The thin film surface flatness detection method provided in the embodiment of the present application utilizes the principle of light reflection. The reflection of an object will cause deformation in the uneven area of the film surface, so that the uneven areas of the film surface can be easily observed. A uniform long strip is reflected on the film, and the degree of unevenness of the film surface can be quantified by counting the number of deformations of the reflection of the long strip on the film and the severity of the deformation. This method is designed to detect the flatness of the film surface of a thin film product, which can better observe the flatness of the film surface and provides a method for quantifying unevenness.
[0059] This embodiment also provides a thin film surface flatness detection device, which is used to implement the thin film surface flatness detection method as described above. The thin film surface flatness detection device includes a reference object, which is used to be reflected on the surface of the film to be detected.
[0060] In some embodiments, the thin film surface flatness detection device further includes a glass table, and the thin film to be detected is laid flat on the glass table.
[0061] In some embodiments, the thin film surface flatness detection device further includes a light, and the light is used to reflect the reference object on the surface of the film to be detected.
[0062] Those skilled in the art can clearly understand that for the convenience and simplicity of description, only the division of the above-mentioned functional units and modules is used as an example for illustration. In actual applications, the above-mentioned functions can be assigned to different functional units and modules as needed, that is, the internal structure of the device can be divided into different functional units or modules to complete all or part of the functions described above. The functional units and modules in the embodiments can be integrated into one processing unit, or each unit can exist physically separately, or two or more units can be integrated into one unit. In addition, the specific names of the functional units and modules are only for the convenience of distinguishing each other, and are not used to limit the scope of protection of this application.
[0063] The embodiments described above are only used to illustrate the technical solutions of the present application, rather than to limit them. Although the present application has been described in detail with reference to the aforementioned embodiments, a person skilled in the art should understand that the technical solutions described in the aforementioned embodiments may still be modified, or some of the technical features may be replaced by equivalents. Such modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present application, and should all be included in the protection scope of the present application.
Claims
1. A method for detecting the flatness of a thin film surface, characterized in that: This is achieved by a thin film surface flatness detection device, wherein the thin film surface flatness detection device includes a reference object; The thin film surface flatness detection method comprises: Reflecting the reference object on the surface of the film to be tested; The flatness of the film surface of the film to be detected is determined according to the deformation state of the reflection of the reference object on the surface of the film to be detected.
2. The thin film surface flatness detection method according to claim 1, characterized in that: The thin film surface flatness detection device also includes a glass table; Before reflecting the reference object on the surface of the film to be detected, the method further comprises: The film to be tested is spread flat on the glass table.
3. The thin film surface flatness detection method according to claim 1, characterized in that: The thin film surface flatness detection device also includes a light; The step of reflecting the reference object on the surface of the film to be detected comprises: The angle of the light is adjusted so that the reference object is reflected on the surface of the film to be tested.
4. The thin film surface flatness detection method according to claim 1, characterized in that: The step of determining the flatness of the surface of the film to be detected according to the deformation state of the reflection of the reference object on the surface of the film to be detected comprises: Determining the uneven position of the film surface of the film to be detected according to the deformed position of the reflection of the reference object on the surface of the film to be detected; The unevenness of the film surface of the film to be detected is determined according to the degree of deformation of the reflection of the reference object on the surface of the film to be detected.
5. The thin film surface flatness detection method according to claim 1, characterized in that: The reference object is a plurality of carbon ribbons pasted vertically and equidistantly in parallel; The step of determining the flatness of the surface of the film to be detected according to the deformation state of the reflection of the reference object on the surface of the film to be detected comprises: Determining the uneven position of the film surface of the film to be detected according to the bending position of the reflection of the carbon ribbon on the surface of the film to be detected; The unevenness of the film surface of the film to be detected is determined according to the number and range of the bends of the reflection of the carbon ribbon on the surface of the film to be detected.
6. The thin film surface flatness detection method according to claim 1, characterized in that: The reference object is a plurality of colored tapes pasted vertically and equidistantly in parallel; The step of determining the flatness of the surface of the film to be detected according to the deformation state of the reflection of the reference object on the surface of the film to be detected comprises: Determine the uneven position of the film surface of the film to be detected according to the bending position of the reflection of the colored tape on the surface of the film to be detected; The unevenness of the film surface of the film to be detected is determined according to the number and range of the curved lines of the reflection of the colored tape on the surface of the film to be detected.
7. The thin film surface flatness detection method according to claim 1, characterized in that: The reference object is a plurality of carbon ribbons pasted into a uniform grid shape; The step of determining the flatness of the surface of the film to be detected according to the deformation state of the reflection of the reference object on the surface of the film to be detected comprises: Determine the uneven position of the film surface of the film to be detected according to the deformed grid position of the reflection of the carbon ribbon on the surface of the film to be detected; The unevenness of the film surface of the film to be detected is determined according to the number of deformed grids of the reflection of the carbon ribbon on the surface of the film to be detected.
8. A thin film surface flatness detection device, characterized in that: Used to implement the thin film surface flatness detection method as described in any one of claims 1 to 7; the thin film surface flatness detection device includes a reference object, and the reference object is used to be reflected on the surface of the film to be detected.
9. The thin film surface flatness detection device according to claim 8, characterized in that: The thin film surface flatness detection device further comprises a glass table, and the thin film to be detected is laid flat on the glass table.
10. The thin film surface flatness detection device according to claim 8, characterized in that: The film surface flatness detection device further comprises a light, and the light is used to reflect the reference object on the surface of the film to be detected.
Citation Information
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