Matching parameter determination device and radio frequency power supply system
By designing voltage sampling and current sampling modules in the RF power supply system, combined with processor calculations, the analog value and standing wave ratio of the reflection coefficient between the RF power supply and the load are quickly determined, which solves the problem of impedance matching when powering the RF power supply, and improves the Stability and efficiency of the equipment.
Patent Information
- Application Number
- CN202411374533.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-29
- Publication Date
- 2025-01-03
AI Technical Summary
When the RF power supply powers to the load, it is a challenge to quickly determine matching parameters such as the analog value of the reflection coefficient to avoid damage to the RF power supply and improve output efficiency.
A matching parameter determination device is designed, including a voltage sampling module, a current sampling module and a matching parameter determination module. By sampling the voltage and current of the output path of the RF power supply, the subtraction operation and processor calculate the analog value of the reflection coefficient to ensure that the RF power supply and Impedance matching between loads.
The rapid and accurate determination of the analog value and standing wave ratio of the reflection coefficient are achieved, ensuring the impedance matching between the RF power supply and the load, extending the service life of the RF power supply and improving output efficiency.
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Figure CN119246960A_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the field of radio frequency technology, and in particular to a matching parameter determination device and a radio frequency power supply system. Background Art
[0002] At present, RF power supplies can generate RF signals with RF frequencies and a certain output power. RF power supplies are widely used in many fields, outputting RF signals to the loads of various core manufacturing equipment to supply power to the loads. When the RF power supply supplies power to the load, it is necessary to determine the impedance matching between the RF power supply and the load based on matching parameters such as the reflection coefficient, reflection coefficient modulus, and standing wave ratio, so as to avoid damage to the RF power supply and improve output efficiency. Therefore, how to quickly determine matching parameters such as the reflection coefficient modulus has become a problem that needs to be considered. Summary of the invention
[0003] The present application provides a matching parameter determination device and a radio frequency power supply system, which can quickly determine the reflection coefficient modulus value.
[0004] In a first aspect, a matching parameter determination device is provided, the matching parameter determination device is used to determine the matching parameters when the RF power supply supplies power to the load, the matching parameters at least include the reflection coefficient modulus, the matching parameter determination device includes: a voltage sampling module, a current sampling module and a matching parameter determination module; the voltage sampling module is connected to the output path of the RF power supply, the voltage sampling module has a voltage sampling coefficient, the voltage sampling module is used to sample the voltage of the output path, and obtain a voltage sampling signal proportional to the voltage of the output path according to the voltage sampling coefficient; the current sampling module includes a primary winding and a secondary winding coupled to each other, the primary winding is located in the output path, the current sampling module has a current sampling coefficient, and the current sampling module is used to sample the current of the output path , and obtains a current sampling signal proportional to the current of the output path according to the current sampling coefficient, wherein the secondary winding has a first end and a second end, the first end and the second end are connected, and the midpoint of the connection between the first end and the second end is connected to the output end of the voltage sampling module, so that the first end and the second end have a first voltage signal and a second voltage signal respectively according to the current sampling signal and the voltage sampling signal; the matching parameter determination module is connected to the first end, the second end and the output end of the voltage sampling module, and is used to perform a subtraction operation on the first voltage signal and the second voltage signal to obtain a third voltage signal, and determine the reflection coefficient modulus value at least according to the third voltage signal, the voltage sampling signal, the voltage sampling coefficient and the current sampling coefficient.
[0005] In a possible implementation, the matching parameter determination module includes a subtractor and a processor; the two input ends of the subtractor are respectively connected to the first end and the second end, and are used to perform a subtraction operation on the first voltage signal and the second voltage signal to obtain the third voltage signal; the processor is connected to the output end of the subtractor and the output end of the voltage sampling module, and is used to obtain the third voltage signal output by the output end of the subtractor and the voltage sampling signal output by the voltage sampling module, and determine the reflection coefficient modulus value based on at least the third voltage signal, the voltage sampling signal, the voltage sampling coefficient and the current sampling coefficient.
[0006] In a possible implementation manner, the matching parameter determination module further includes a divider, wherein two input terminals of the divider are selectively connected to the first terminal and the second terminal respectively, and an output terminal of the divider is connected to the processor, and the divider is used to divide the second voltage signal and the first voltage signal when connected to the first terminal and the second terminal respectively to obtain a fourth voltage signal; the processor is also used to control the two input terminals of the divider to be connected to the first terminal and the second terminal respectively when a first preset relationship is satisfied between the voltage sampling coefficient and the current sampling coefficient, and determine the reflection coefficient modulus value according to the fourth voltage signal, the third voltage signal, the voltage sampling signal, the voltage sampling coefficient and the current sampling coefficient; when the first preset relationship is not satisfied between the voltage sampling coefficient and the current sampling coefficient, control the two input terminals of the divider to be disconnected from both the first terminal and the second terminal, and determine the reflection coefficient modulus value only according to the third voltage signal, the voltage sampling signal, the voltage sampling coefficient and the current sampling coefficient.
[0007] In a possible implementation, when the processor determines the modulus of the reflection coefficient based on the fourth voltage signal, the third voltage signal, the voltage sampling signal, the voltage sampling coefficient, and the current sampling coefficient, the processor specifically obtains the first modulus of the reflection coefficient based on the fourth voltage signal, and obtains the second modulus of the reflection coefficient based on the third voltage signal, the voltage sampling signal, the voltage sampling coefficient, and the current sampling coefficient, and then determines the modulus of the reflection coefficient based on the first modulus of the reflection coefficient and the second modulus of the reflection coefficient.
[0008] In a possible implementation, when the processor determines the reflection coefficient modulus based on the third voltage signal, the voltage sampling signal, the voltage sampling coefficient, and the current sampling coefficient, the processor specifically determines the voltage value of the forward wave and the voltage value of the reverse wave based on the third voltage signal, the voltage sampling signal, the voltage sampling coefficient, and the current sampling coefficient, and determines the reflection coefficient modulus based on the voltage value of the forward wave and the voltage value of the reverse wave.
[0009] In a possible embodiment, the matching parameters also include a standing wave ratio, a forward power value, a reverse power value, and a transferred power value; the processor is also used to determine the standing wave ratio based on the voltage value of the forward wave and the voltage value of the reverse wave or the reflection coefficient modulus, and / or determine the forward power value based on the voltage value of the forward wave and the preset characteristic impedance value, and / or determine the reverse power value based on the voltage value of the reverse wave and the preset characteristic impedance value, and / or determine the transferred power value based on the voltage value of the forward wave, the voltage value of the reverse wave, and the preset characteristic impedance value.
[0010] In a possible implementation, the voltage sampling module includes a first capacitor and a second capacitor, the first capacitor and the second capacitor are connected in series between the output path of the RF power supply and the ground, the connection point between the first capacitor and the second capacitor is connected to the connection point between the first end and the second end, and is connected to the matching parameter determination module; wherein the capacitance value of the first capacitor and the capacitance value of the second capacitor are used to enable the voltage sampling module to have the voltage sampling coefficient.
[0011] In a possible implementation, the voltage sampling module further includes a first inductor, which is connected between a midpoint where the first end and the second end are connected and ground, and the first inductor is used to ensure that the midpoint where the first end and the second end are connected is continuously reflected as the voltage sampling signal.
[0012] In a possible implementation, the voltage sampling module further includes a first signal follower and a second signal follower, the first signal follower being connected between a connection point between the first capacitor and the second capacitor and a midpoint where the first end and the second end are connected, and the second signal follower being connected between a connection point between the first capacitor and the second capacitor and the matching parameter determination module, wherein both the first signal follower and the second signal follower are used to maintain the waveform of the voltage sampling signal.
[0013] In the second aspect, a radio frequency power supply system is also provided, the radio frequency power supply system includes a radio frequency power supply and a matching parameter determination device. The matching parameter determination device is used to determine the matching parameters when the radio frequency power supply supplies power to the load, the matching parameters at least include the reflection coefficient modulus, and the matching parameter determination device includes: a voltage sampling module, a current sampling module and a matching parameter determination module; the voltage sampling module is connected to the output path of the radio frequency power supply, the voltage sampling module has a voltage sampling coefficient, the voltage sampling module is used to sample the voltage of the output path, and obtain a voltage sampling signal proportional to the voltage of the output path according to the voltage sampling coefficient; the current sampling module includes a primary winding and a secondary winding coupled to each other, the primary winding is located in the output path, the current sampling module has a current sampling coefficient, the current sampling module is used to sample the current of the output path, and obtain a voltage sampling signal proportional to the voltage of the output path according to the current sampling coefficient; The matching parameter determination module is connected to the first end, the second end and the output end of the voltage sampling module, and is used to perform a subtraction operation on the first voltage signal and the second voltage signal to obtain a third voltage signal, and determine the reflection coefficient modulus value at least according to the third voltage signal, the voltage sampling signal, the voltage sampling coefficient and the current sampling coefficient.
[0014] The matching parameter determination device and the radio frequency power supply system of the present application are configured to connect the first end and the second end of the secondary winding of the current sampling module, and the midpoint of the connection between the first end and the second end is connected to the output end of the voltage sampling module, so that the first end and the second end respectively have a first voltage signal and a second voltage signal according to the current sampling signal and the voltage sampling signal, and to perform a subtraction operation on the first voltage signal and the second voltage signal by configuring the matching parameter determination module to obtain a third voltage signal, and to quickly determine the standing wave ratio according to at least the third voltage signal, the voltage sampling signal, the voltage sampling coefficient and the current sampling coefficient. BRIEF DESCRIPTION OF THE DRAWINGS
[0015] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the background technology, the drawings required for use in the embodiments of the present application or the background technology will be described below.
[0016] Figure 1 Schematic diagram of a matching parameter determination device in an embodiment of the present application.
[0017] Figure 2 Schematic diagram of a matching parameter determination module in an embodiment of the present application.
[0018] Figure 3 It is a schematic diagram of a switch module in an off state and related parts in an embodiment of the present application.
[0019] Figure 4 It is a schematic diagram of a switch module in a conducting state and related parts in an embodiment of the present application.
[0020] Figure 5 It is a schematic diagram of a matching parameter determination device in yet another embodiment of the present application.
[0021] Figure 6 is a schematic diagram of a radio frequency power supply system in an embodiment of the present application.
[0022] Explanation of the accompanying drawings: 1000, RF power supply system, RS, RF power supply, RL, load, 10, matching parameter determination device, 100, voltage sampling module, C1, first capacitor, C2, second capacitor, Us, voltage sampling signal, L1, first inductor, 110, first signal follower, 120, second signal follower, 200, current sampling module, Is, current sampling signal, 210, primary winding, 220, secondary winding, A, first end, U1, first voltage signal, B, second end, U2, second voltage signal, 300, matching parameter determination module, 310, subtractor, U3, third voltage signal, 320, processor, CS1, first switch control signal, CS2, second switch control signal, 330, divider, U4, fourth voltage signal, 400, switch module, S1, first switch, S2, second switch, GND, ground. DETAILED DESCRIPTION
[0023] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.
[0024] In the description of the embodiments of the present application, it should be noted that, unless otherwise clearly specified and limited, the terms "connected" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.
[0025] In the following, the terms "first", "second", and "third" are used for descriptive purposes only and are not to be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first", "second", and "third" may explicitly or implicitly include one or more of the features. In the description of the embodiments of the present application, unless otherwise specified, "multiple" means two or more.
[0026] In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions. For example, a process, method, system, product, or device that includes a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such process, method, product, or device.
[0027] Please also read Figure 1 , Figure 2 , Figure 1 is a schematic diagram of a matching parameter determination device in an embodiment of the present application, Figure 2 FIG. 1 is a schematic diagram of a matching parameter determination module in an embodiment of the present application. Figure 1 , Figure 2As shown, the present application provides a matching parameter determination device 10, which is used to determine the matching parameters when the RF power supply RS supplies power to the load RL, and the matching parameters at least include the reflection coefficient modulus. The matching parameter determination device 10 includes: a voltage sampling module 100, a current sampling module 200 and a matching parameter determination module 300; the voltage sampling module 100 is connected to the output path of the RF power supply RS, the voltage sampling module 100 has a voltage sampling coefficient, the voltage sampling module 100 is used to sample the voltage of the output path, and obtain a voltage sampling signal Us proportional to the voltage of the output path according to the voltage sampling coefficient; the current sampling module 200 includes a primary winding 210 and a secondary winding 220 coupled to each other, the primary winding 210 is located in the output path, the current sampling module 200 has a current sampling coefficient, and the current sampling module 200 is used to The current of the output path is sampled, and a current sampling signal Is proportional to the current of the output path is obtained according to the current sampling coefficient, wherein the secondary winding 220 has a first end A and a second end B, the first end A and the second end B are connected, and the midpoint of the connection between the first end A and the second end B is connected to the output end of the voltage sampling module 100, so that the first end A and the second end B respectively have a first voltage signal U1 and a second voltage signal U2 according to the current sampling signal Is and the voltage sampling signal Us; the matching parameter determination module 300 is connected to the first end A, the second end B and the output end of the voltage sampling module 100, and is used to perform a subtraction operation on the first voltage signal U1 and the second voltage signal U2 to obtain a third voltage signal U3, and determine the reflection coefficient modulus value according to at least the third voltage signal U3, the voltage sampling signal Us, the voltage sampling coefficient and the current sampling coefficient.
[0028] Thus, the above-mentioned matching parameter determination device 10 in the present application is configured to connect the first end A and the second end B of the secondary winding 220 of the current sampling module 200, and the midpoint of the connection between the first end A and the second end B is connected to the output end of the voltage sampling module 100, so that the first end A and the second end B respectively have a first voltage signal U1 and a second voltage signal U2 according to the current sampling signal Is and the voltage sampling signal Us, and the matching parameter determination module 300 is configured to perform a subtraction operation on the first voltage signal U1 and the second voltage signal U2 to obtain a third voltage signal U3, and quickly determine the reflection coefficient modulus value according to at least the third voltage signal U3, the voltage sampling signal Us, the voltage sampling coefficient and the current sampling coefficient.
[0029] Among them, Figure 1 As shown, the first end A and the second end B of the secondary winding 220 can be electrically connected through a wire or other connecting parts, and the midpoint of the connection between the first end A and the second end B is also the midpoint of the wire or other connecting part connected between the first end A and the second end B, that is, the point that is equidistant from the first end A and the second end B.
[0030] Furthermore, the current flow direction in the primary winding 210 is the same as the current flow direction in the output path of the RF power supply RS, the current flow direction in the secondary winding 220 is from the first end A to the second end B, and the output end of the voltage sampling module 100 is connected to the midpoint where the first end A and the second end B are connected, that is, Figure 1 D is shown as the output terminal of the voltage sampling module 100, and C is the midpoint where the first terminal A and the second terminal B are connected. Take the current sampling signal Is as I×Z0 / k and the voltage sampling signal Us as U / m as an example for explanation, wherein I is the current of the output path, Z0 is the preset characteristic impedance value of the output path, U is the voltage of the output path, k is the current sampling coefficient, and m is the voltage sampling coefficient, so that the first terminal A and the second terminal B have a first voltage signal U1 and a second voltage signal U2 respectively, and the first voltage signal U1 is U / m+I×Z0 / 2k, and the second voltage signal U2 is U / mI×Z0 / 2k, and then the third voltage signal U3 obtained by subtracting the first voltage signal U1 from the second voltage signal U2 is I×Z0 / k, and the current I of the output path is (U + -U - ) / Z0, the third voltage signal U3 is (U + -U - ) / k, and the voltage U of the output path is U + +U - , the reflection coefficient modulus is U - / U + , where U + is the voltage value of the forward wave, U - Therefore, the voltage value U of the forward wave can be quickly determined based on at least the third voltage signal U3, the voltage sampling signal Us, the voltage sampling coefficient, and the current sampling coefficient. + and the reverse wave voltage value U - , and thus the reflection coefficient modulus can be quickly determined.
[0031] It should be noted that the preset characteristic impedance value is a preset resistance value of the output path between the RF power supply RS and the load RL, which can be set according to specific needs, generally 50Ω or 75Ω, so that electric energy can be continuously provided to the load RL, and in some embodiments, the reflection coefficient modulus can be determined without using the preset characteristic impedance value, so there is no need to obtain the specific value of the preset characteristic impedance value.
[0032] In one or more embodiments, the current sampling module 200 may be a current transformer including a primary winding 210 and a secondary winding 220 coupled to each other.
[0033] In one or more embodiments, the voltage sampling module 100 may be a device such as a voltage sensor, a transformer, a resistor voltage divider circuit, a capacitor voltage divider circuit, etc., which has a voltage sampling coefficient and can sample the voltage of the output path.
[0034] like Figure 2 As shown, the matching parameter determination module 300 includes a subtractor 310 and a processor 320; the two input terminals of the subtractor 310 are respectively connected to the first terminal A and the second terminal B, and are used to perform a subtraction operation on the first voltage signal U1 and the second voltage signal U2 to obtain a third voltage signal U3; the processor 320 is connected to the output terminal of the subtractor 310 and the output terminal of the voltage sampling module 100, and is used to obtain the third voltage signal U3 output by the output terminal of the subtractor 310 and the voltage sampling signal Us output by the voltage sampling module 100, and determine the reflection coefficient modulus value at least according to the third voltage signal U3, the voltage sampling signal Us, the voltage sampling coefficient and the current sampling coefficient.
[0035] Therefore, the above-mentioned matching parameter determination device 10 in the present application, by setting the matching parameter determination module 300 including a subtractor 310 and a processor 320, to implement a subtraction operation on the first voltage signal U1 and the second voltage signal U2 to obtain the corresponding third voltage signal U3, and configure the processor 320 to determine the reflection coefficient modulus value based on at least the third voltage signal U3, the voltage sampling signal Us, the voltage sampling coefficient and the current sampling coefficient.
[0036] In one or more embodiments, the processor 320 is further configured to determine the impedance matching between the RF power supply RS and the load RL when the RF power supply RS supplies power to the load RL according to the reflection coefficient modulus. Further, when the reflection coefficient modulus is less than or equal to the first preset value, the processor 320 determines that the impedance matching between the RF power supply RS and the load RL is completed, that is, the impedance matching between the RF power supply RS and the load RL is completed; when the reflection coefficient modulus is greater than the first preset value, the processor 320 determines that the impedance matching between the RF power supply RS and the load RL is not completed, that is, the impedance of the RF power supply RS and the load RL is not matched.
[0037] It should be noted that the ideal reflection coefficient modulus is 0, but it is generally believed that when the reflection coefficient modulus is close to 0, the impedance matching between the RF power supply RS and the load RL can be determined. For example, the first preset value can be 0.17, 0.2, and 0.23, etc. Further, the first preset value can be 0.2.
[0038] Please also read Figure 3 , Figure 4 , Figure 3 is a schematic diagram of a switch module in an off state and related parts in an embodiment of the present application, Figure 4FIG. 1 is a schematic diagram of a switch module and related parts in a conducting state in an embodiment of the present application. Figure 3 , Figure 4 As shown, the matching parameter determination module 300 also includes a divider 330, two input terminals of the divider 330 are selectively connected to the first terminal A and the second terminal B respectively, and the output terminal of the divider 330 is connected to the processor 320. The divider 330 is used to divide the second voltage signal U2 and the first voltage signal U1 when connected to the first terminal A and the second terminal B respectively, so as to obtain the fourth voltage signal U4; the processor 320 is also used to control the two input terminals of the divider 330 to be connected to the first terminal A and the second terminal B respectively when the voltage sampling coefficient and the current sampling coefficient meet the first preset relationship, and determine the reflection coefficient modulus value according to the fourth voltage signal U4, the third voltage signal U3, the voltage sampling signal Us, the voltage sampling coefficient and the current sampling coefficient; when the voltage sampling coefficient and the current sampling coefficient do not meet the first preset relationship, control the two input terminals of the divider 330 to be disconnected from both the first terminal A and the second terminal B, and determine the reflection coefficient modulus value only according to the third voltage signal U3, the voltage sampling signal Us, the voltage sampling coefficient and the current sampling coefficient.
[0039] Thus, the above-mentioned matching parameter determination device 10 in the present application, by setting the matching parameter determination module 300 to also include a divider 330, and the two input terminals of the divider 330 are selectively connected to the first terminal A and the second terminal B respectively, so that when the voltage sampling coefficient and the current sampling coefficient satisfy the first preset relationship, the two input terminals of the divider 330 are controlled to be connected to the first terminal A and the second terminal B respectively, and the reflection coefficient modulus value is determined according to the fourth voltage signal U4, the third voltage signal U3, the voltage sampling signal Us, the voltage sampling coefficient and the current sampling coefficient. When the first preset relationship is not satisfied between the voltage sampling coefficient and the current sampling coefficient, the two input terminals of the divider 330 are controlled to be disconnected from the first terminal A and the second terminal B, and the reflection coefficient modulus value is determined only according to the third voltage signal U3, the voltage sampling signal Us, the voltage sampling coefficient and the current sampling coefficient.
[0040] In one or more embodiments, the first preset relationship is m=k, that is, when the voltage sampling coefficient is the same as the current sampling coefficient, the voltage sampling coefficient and the current sampling coefficient satisfy the first preset relationship.
[0041] In one or more embodiments, Figure 3 , Figure 4As shown, the matching parameter determination device 10 may further include a switch module 400, the switch module 400 includes a first switch S1 and a second switch S2, the first switch S1 is connected between the first terminal A and one of the input terminals of the divider 330, and the second switch S2 is connected between the second terminal B and the other input terminal of the divider 330. The processor 320 is used to output a first switch control signal CS1 and a second switch control signal CS2 to control the first switch S1 and the second switch S2 to be turned on or off at the same time, wherein when the first switch S1 and the second switch S2 are turned on at the same time, the switch module 400 is in a turned-on state, and the two input terminals of the divider 330 are connected to the first terminal A and the second terminal B respectively to receive the second voltage signal U2 and the first voltage signal U1; when the first switch S1 and the second switch S2 are turned off at the same time, the switch module 400 is in a turned-off state, and the two input terminals of the divider 330 are disconnected from the first terminal A and the second terminal B to stop receiving the second voltage signal U2 and the first voltage signal U1.
[0042] Among them, when the processor 320 determines the reflection coefficient modulus value according to the fourth voltage signal U4, the third voltage signal U3, the voltage sampling signal Us, the voltage sampling coefficient and the current sampling coefficient, the processor 320 specifically obtains the first modulus value of the reflection coefficient according to the fourth voltage signal U4, and obtains the second modulus value of the reflection coefficient according to the third voltage signal U3, the voltage sampling signal Us, the voltage sampling coefficient and the current sampling coefficient, and then determines the reflection coefficient modulus value according to the first modulus value of the reflection coefficient and the second modulus value of the reflection coefficient.
[0043] Therefore, the above-mentioned matching parameter determination device 10 in the present application, when obtaining the fourth voltage signal U4, can obtain the first modulus value of the reflection coefficient according to the fourth voltage signal U4, and obtain the second modulus value of the reflection coefficient according to the third voltage signal U3, the voltage sampling signal Us, the voltage sampling coefficient and the current sampling coefficient, and then can determine a more accurate modulus value of the reflection coefficient according to the first modulus value of the reflection coefficient and the second modulus value of the reflection coefficient.
[0044] Specifically, when the voltage sampling coefficient and the current sampling coefficient satisfy the first preset relationship, the fourth voltage signal U4 obtained by dividing the second voltage signal U2 by the first voltage signal U1 is (U + +U - ) / (U + -U - ), that is, (1+|Γ|) / (1-|Γ|), wherein |Γ| is the modulus of the reflection coefficient. Therefore, the first modulus of the reflection coefficient can be obtained according to the value of the fourth voltage signal U4, and according to the third voltage signal U3, the voltage sampling signal Us, the voltage sampling coefficient and the current sampling coefficient, see above, the second modulus of the reflection coefficient can be obtained.
[0045] In one or more embodiments, the processor 320 may determine the reflection coefficient modulus value based on the average value of the first modulus value of the reflection coefficient and the second modulus value of the reflection coefficient, or may determine the reflection coefficient modulus value based on the weighted average value of the first modulus value of the reflection coefficient and the second modulus value of the reflection coefficient, or may calibrate the other value based on one of the first modulus value of the reflection coefficient and the second modulus value of the reflection coefficient, and when the difference between the first modulus value of the reflection coefficient and the second modulus value of the reflection coefficient is greater than or equal to a first preset threshold value, determine that the deviation of the other value is large and the confidence of the reflection coefficient modulus value is low, and when the difference between the first modulus value of the reflection coefficient and the second modulus value of the reflection coefficient is less than the first preset threshold value, determine that the deviation of the other value is small and the confidence of the reflection coefficient modulus value is high. The present application is not limited to this.
[0046] Among them, when the processor 320 determines the reflection coefficient modulus value specifically according to the third voltage signal U3, the voltage sampling signal Us, the voltage sampling coefficient and the current sampling coefficient, the processor 320 determines the voltage value of the forward wave and the voltage value of the reverse wave according to the third voltage signal U3, the voltage sampling signal Us, the voltage sampling coefficient and the current sampling coefficient, and determines the reflection coefficient modulus value according to the voltage value of the forward wave and the voltage value of the reverse wave.
[0047] Therefore, the above-mentioned matching parameter determination device 10 in the present application, when the fourth voltage signal U4 is not obtained, can determine the voltage value of the forward wave and the voltage value of the reverse wave only based on the third voltage signal U3, the voltage sampling signal Us, the voltage sampling coefficient and the current sampling coefficient, and then quickly determine the reflection coefficient modulus value based on the voltage value of the forward wave and the voltage value of the reverse wave.
[0048] Specifically, referring to the above, the third voltage signal U3 is (U + -U - ) / k, the voltage sampling signal Us is U / m, and U=U + +U - Therefore, the voltage sampling coefficient and the current sampling coefficient are known, and only the voltage value of the forward wave and the voltage value of the reverse wave are unknown. The voltage value of the forward wave and the voltage value of the reverse wave can be determined according to the value of the third voltage signal U3 and the value of the voltage sampling signal Us, and the reflection coefficient modulus is the ratio of the voltage value of the reverse wave to the voltage value of the forward wave.
[0049] In one or more embodiments, the matching parameters also include standing wave ratio, forward power value, reverse power value and transfer power value; the processor 320 is also used to determine the standing wave ratio based on the voltage value of the forward wave and the voltage value of the reverse wave or the reflection coefficient modulus, and / or determine the forward power value based on the voltage value of the forward wave and the preset characteristic impedance value, and / or determine the reverse power value based on the voltage value of the reverse wave and the preset characteristic impedance value, and / or determine the transfer power value based on the voltage value of the forward wave, the voltage value of the reverse wave and the preset characteristic impedance value.
[0050] Therefore, the above-mentioned matching parameter determination device 10 in the present application, after determining the voltage value of the forward wave and the voltage value of the reverse wave, can also determine the standing wave ratio based on the voltage value of the forward wave and the voltage value of the reverse wave or the reflection coefficient modulus value, and / or determine the forward power value based on the voltage value of the forward wave and the preset characteristic impedance value, and / or determine the reverse power value based on the voltage value of the reverse wave and the preset characteristic impedance value, and / or determine the transmission power value based on the voltage value of the forward wave, the voltage value of the reverse wave and the preset characteristic impedance value, so as to comprehensively obtain various matching parameters.
[0051] Specifically, the standing wave ratio is (U + +U - ) / (U + -U - ), which is also (1+|Γ|) / (1-|Γ|). Therefore, the standing wave ratio can be determined based on the voltage value of the forward wave and the voltage value of the reverse wave. The standing wave ratio can also be determined based on the reflection coefficient modulus. The forward power value is U +2 / Z0, that is, the ratio of the square of the voltage value of the forward wave to the preset characteristic impedance value, and the reverse power value is U -2 / Z0, that is, the ratio of the square of the voltage value of the reverse wave to the preset characteristic impedance value, the transmission power value is (U +2 -U -2 ) / Z0, that is, the ratio of the difference between the square of the voltage value of the forward wave and the square of the voltage value of the reverse wave to the preset characteristic impedance value, that is, the difference between the forward power value and the reverse power value.
[0052] It should be noted that although there is a conversion relationship between the reflection coefficient modulus, standing wave ratio, forward power value, reverse power value and transfer power value, the reflection coefficient modulus, standing wave ratio, forward power value, reverse power value and transfer power value all need to be determined when the RF power supply RS supplies power to the load RL. Generally speaking, the reflection coefficient modulus provides an accurate proportion of the reflected energy, which plays a greater role when the impedance matching needs to be adjusted. The standing wave ratio intuitively displays the ratio of the maximum amplitude to the minimum amplitude on the connection path, which can help quickly identify the severity of the reflected energy, thereby determining whether the impedance matching needs to be adjusted. The forward power value, reverse power value and transfer power value are a direct reflection of the power supply effect of the RF power supply RS on the load RL.
[0053] In one or more embodiments, the processor 320 is further configured to determine the impedance matching between the RF power supply RS and the load RL when the RF power supply RS supplies power to the load RL according to the standing wave ratio and the reflection coefficient modulus. Further, when the standing wave ratio is less than or equal to the second preset value and the reflection coefficient modulus is less than or equal to the first preset value, the processor 320 determines that the impedance matching between the RF power supply RS and the load RL is completed, that is, the impedance matching between the RF power supply RS and the load RL is completed; when the standing wave ratio is greater than the second preset value and / or the reflection coefficient modulus is greater than the first preset value, the processor 320 determines that the impedance matching between the RF power supply RS and the load RL is not completed, that is, the impedance of the RF power supply RS and the load RL is not matched.
[0054] The first preset value corresponding to the second preset value is determined based on the conversion relationship between the reflection coefficient modulus and the standing wave ratio, thereby reflecting whether the impedance matching between the RF power supply RS and the load RL is completed under the same standard.
[0055] Furthermore, the first preset value and the second preset value also satisfy the conversion relationship between the reflection coefficient modulus and the standing wave ratio. For example, the first preset value is A1, and the second preset value is A2, then A2 = (1 + A1) / (1 - A1).
[0056] It should be noted that the ideal standing wave ratio is 1, but it is generally believed that when the standing wave ratio is close to 1, the impedance matching of the RF power supply RS and the load RL can be determined. For example, when the first preset values are 0.17, 0.2, and 0.23, respectively, the second preset values can be approximately 1.4, 1.5, and 1.6, respectively. Further, the first preset value can be 0.2, and the second preset value can be 1.5.
[0057] See also Figure 5 , Figure 5 FIG. 1 is a schematic diagram of a matching parameter determination device in another embodiment of the present application. Figure 5 As shown, the voltage sampling module 100 includes a first capacitor C1 and a second capacitor C2, the first capacitor C1 and the second capacitor C2 are connected in series between the output path of the RF power supply RS and the ground GND, the connection point between the first capacitor C1 and the second capacitor C2 is connected to the connection point between the first end A and the second end B, and is connected to the matching parameter determination module 300; wherein the capacitance value of the first capacitor C1 and the capacitance value of the second capacitor C2 are used to enable the voltage sampling module 100 to have a voltage sampling coefficient.
[0058] Therefore, the above-mentioned matching parameter determination device 10 in the present application samples the voltage of the output path by setting a first capacitor C1 and a second capacitor C2 connected in series between the output path of the RF power supply RS and the ground GND, and determines the voltage sampling coefficient according to the capacitance value of the first capacitor C1 and the capacitance value of the second capacitor C2, thereby obtaining a voltage sampling signal Us proportional to the voltage of the output path.
[0059] like Figure 5 As shown, the voltage sampling module 100 also includes a first inductor L1, which is connected between the midpoint where the first terminal A and the second terminal B are connected and the ground GND. The first inductor L1 is used to make the midpoint where the first terminal A and the second terminal B are connected continuously reflect the voltage sampling signal Us.
[0060] Therefore, the matching parameter determination device 10 in the present application can continuously reflect the voltage sampling signal Us at the midpoint where the first terminal A and the second terminal B are connected by setting the first inductor L1 connected between the midpoint where the first terminal A and the second terminal B are connected and the ground GND.
[0061] The impedance of the first inductor L1 at the output frequency of the RF power supply RS can be greater than the impedance at other frequencies, thereby maintaining a high impedance at the first inductor L1, prohibiting the voltage sampling signal Us from passing through the first inductor L1, so that the midpoint where the first terminal A and the second terminal B are connected is continuously reflected as the voltage sampling signal Us.
[0062] like Figure 5 As shown, the voltage sampling module 100 also includes a first signal follower 110 and a second signal follower 120, the first signal follower 110 is connected between the connection point between the first capacitor C1 and the second capacitor C2 and the midpoint of the connection between the first end A and the second end B, and the second signal follower 120 is connected between the connection point between the first capacitor C1 and the second capacitor C2 and the matching parameter determination module 300, wherein the first signal follower 110 and the second signal follower 120 are both used to maintain the waveform of the voltage sampling signal Us.
[0063] Therefore, the above-mentioned matching parameter determination device 10 in the present application can maintain the waveform of the voltage sampling signal Us by setting the first signal follower 110, the second signal follower 120 and the corresponding connection relationship, thereby improving the accuracy of the matching parameters such as the reflection coefficient modulus and the standing wave ratio obtained by calculation.
[0064] When the voltage sampling module 100 further includes a first signal follower 110 and a second signal follower 120 , the output end of the first signal follower 110 and the output end of the second signal follower 120 may both be output ends of the voltage sampling module 100 .
[0065] In one or more embodiments, the above-mentioned subtractor 310 and divider 330 can be analog operation circuits including electronic components such as operational amplifiers, capacitors, resistors, inductors, etc., or can be digital operation circuits. The present application is not limited to this, as long as the corresponding operation functions can be realized.
[0066] In one or more embodiments, the processor 320 may be a general-purpose processor 320 such as a central processing unit (CPU), or a digital signal processor (DSP), an application specific integrated circuit (ASIC), a field programmable gate array (FPGA), or other programmable logic devices, discrete gate logic devices, transistor logic devices, and other logic control devices, or a microprocessor such as a micro control unit (MCU).
[0067] The matching parameter determination device 10 of the present application, through the above structure, can quickly determine matching parameters such as the reflection coefficient modulus, standing wave ratio, forward power value, reverse power value and transfer power value, so as to quickly reflect the impedance matching between the RF power supply RS and the load RL when the RF power supply RS supplies power to the load RL according to the reflection coefficient modulus, standing wave ratio, forward power value, reverse power value and transfer power value, and judge whether the RF power supply RS and the load RL have completed impedance matching, and provide a variety of methods to determine and verify matching parameters such as the reflection coefficient modulus, standing wave ratio, forward power value, reverse power value and transfer power value.
[0068] See also Figure 6 , Figure 6 FIG. 1 is a schematic diagram of a radio frequency power supply system in an embodiment of the present application. Figure 6 As shown, the present application further provides a radio frequency power supply system 1000, and the radio frequency power supply system 1000 includes a radio frequency power supply RS and a matching parameter determination device 10 in any of the aforementioned embodiments.
[0069] Please refer again Figure 1 .like Figure 1As shown, the matching parameter determination device 10 is used to determine the matching parameters when the radio frequency power supply RS supplies power to the load RL, and the matching parameters at least include the reflection coefficient modulus. The matching parameter determination device 10 includes: a voltage sampling module 100, a current sampling module 200 and a matching parameter determination module 300; the voltage sampling module 100 is connected to the output path of the radio frequency power supply RS, the voltage sampling module 100 has a voltage sampling coefficient, the voltage sampling module 100 is used to sample the voltage of the output path, and obtain a voltage sampling signal Us proportional to the voltage of the output path according to the voltage sampling coefficient; the current sampling module 200 includes a primary winding 210 and a secondary winding 220 coupled to each other, the primary winding 210 is located in the output path, the current sampling module 200 has a current sampling coefficient, and the current sampling module 200 is used to sample the current of the output path. The secondary winding 220 is sampled, and a current sampling signal Is proportional to the current of the output path is obtained according to the current sampling coefficient, wherein the secondary winding 220 has a first terminal A and a second terminal B, the first terminal A and the second terminal B are connected, and the midpoint of the connection between the first terminal A and the second terminal B is connected to the output terminal of the voltage sampling module 100, so that the first terminal A and the second terminal B respectively have a first voltage signal U1 and a second voltage signal U2 according to the current sampling signal Is and the voltage sampling signal Us; the matching parameter determination module 300 is connected to the first terminal A, the second terminal B and the output terminal of the voltage sampling module 100, and is used to perform a subtraction operation on the first voltage signal U1 and the second voltage signal U2 to obtain a third voltage signal U3, and determine the reflection coefficient modulus value according to at least the third voltage signal U3, the voltage sampling signal Us, the voltage sampling coefficient and the current sampling coefficient.
[0070] The more specific structure of the matching parameter determination device 10 can refer to the relevant content of the matching parameter determination device 10 in any of the aforementioned embodiments, which will not be repeated here.
[0071] In one or more embodiments, Figure 6 As shown, the RF power supply RS is used to connect to the load RL to supply power to the load RL, and the matching parameter determination device 10 can be connected to the output path between the RF power supply RS and the load RL to determine the matching parameters when the RF power supply RS supplies power to the load RL.
[0072] The matching parameter determination device 10 and the RF power supply system 1000 of the present application, through the above-mentioned structure, can quickly determine matching parameters such as the reflection coefficient modulus, standing wave ratio, forward power value, reverse power value and transfer power value, so as to quickly reflect the impedance matching between the RF power supply RS and the load RL when the RF power supply RS supplies power to the load RL according to the reflection coefficient modulus, standing wave ratio, forward power value, reverse power value and transfer power value, and judge whether the RF power supply RS and the load RL have completed impedance matching, and provide a variety of methods to determine and verify matching parameters such as the reflection coefficient modulus, standing wave ratio, forward power value, reverse power value and transfer power value.
[0073] The above description is only a specific implementation of the present application, but the protection scope of the present application is not limited thereto. Any technician familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed in the present application, which should be included in the protection scope of the present application; in the absence of conflict, the embodiments of the present application and the features in the embodiments can be combined with each other. Therefore, the protection scope of the present application shall be based on the protection scope of the claims.
Claims
1. A matching parameter determination device, characterized in that: Used to determine the matching parameters when the RF power supply supplies power to the load, the matching parameters at least include the reflection coefficient modulus, and the matching parameter determination device includes: A voltage sampling module connected to the output path of the RF power supply, the voltage sampling module having a voltage sampling coefficient, the voltage sampling module being used to sample the voltage of the output path and obtain a voltage sampling signal proportional to the voltage of the output path according to the voltage sampling coefficient; A current sampling module, comprising a primary winding and a secondary winding coupled to each other, wherein the primary winding is located in the output path, the current sampling module has a current sampling coefficient, and the current sampling module is used to sample the current of the output path, and obtain a current sampling signal proportional to the current of the output path according to the current sampling coefficient, wherein the secondary winding has a first end and a second end, the first end and the second end are connected, and a midpoint where the first end and the second end are connected is connected to the output end of the voltage sampling module, so that the first end and the second end have a first voltage signal and a second voltage signal respectively according to the current sampling signal and the voltage sampling signal; A matching parameter determination module is connected to the first end, the second end and the output end of the voltage sampling module, and is used to perform a subtraction operation on the first voltage signal and the second voltage signal to obtain a third voltage signal, and determine the reflection coefficient modulus value based on at least the third voltage signal, the voltage sampling signal, the voltage sampling coefficient and the current sampling coefficient.
2. The matching parameter determination device according to claim 1, characterized in that: The matching parameter determination module includes a subtractor and a processor; the two input ends of the subtractor are respectively connected to the first end and the second end, and are used to perform a subtraction operation on the first voltage signal and the second voltage signal to obtain the third voltage signal; the processor is connected to the output end of the subtractor and the output end of the voltage sampling module, and is used to obtain the third voltage signal output by the output end of the subtractor and the voltage sampling signal output by the voltage sampling module, and determine the reflection coefficient modulus value at least based on the third voltage signal, the voltage sampling signal, the voltage sampling coefficient and the current sampling coefficient.
3. The matching parameter determination device according to claim 2, characterized in that: The matching parameter determination module also includes a divider, wherein two input terminals of the divider are selectively connected to the first terminal and the second terminal respectively, and an output terminal of the divider is connected to the processor. The divider is used to divide the second voltage signal and the first voltage signal when connected to the first terminal and the second terminal respectively to obtain a fourth voltage signal; the processor is also used to control the two input terminals of the divider to be connected to the first terminal and the second terminal respectively when a first preset relationship is satisfied between the voltage sampling coefficient and the current sampling coefficient, and determine the reflection coefficient modulus value according to the fourth voltage signal, the third voltage signal, the voltage sampling signal, the voltage sampling coefficient and the current sampling coefficient; when the first preset relationship is not satisfied between the voltage sampling coefficient and the current sampling coefficient, control the two input terminals of the divider to be disconnected from both the first terminal and the second terminal, and determine the reflection coefficient modulus value only according to the third voltage signal, the voltage sampling signal, the voltage sampling coefficient and the current sampling coefficient.
4. The matching parameter determination device according to claim 3, characterized in that: When the processor determines the modulus of the reflection coefficient based on the fourth voltage signal, the third voltage signal, the voltage sampling signal, the voltage sampling coefficient and the current sampling coefficient, the processor specifically obtains the first modulus of the reflection coefficient based on the fourth voltage signal, and obtains the second modulus of the reflection coefficient based on the third voltage signal, the voltage sampling signal, the voltage sampling coefficient and the current sampling coefficient, and then determines the modulus of the reflection coefficient based on the first modulus of the reflection coefficient and the second modulus of the reflection coefficient.
5. The matching parameter determination device according to claim 3, characterized in that: When the processor determines the reflection coefficient modulus based on the third voltage signal, the voltage sampling signal, the voltage sampling coefficient and the current sampling coefficient, the processor specifically determines the voltage value of the forward wave and the voltage value of the reverse wave based on the third voltage signal, the voltage sampling signal, the voltage sampling coefficient and the current sampling coefficient, and determines the reflection coefficient modulus based on the voltage value of the forward wave and the voltage value of the reverse wave.
6. The matching parameter determination device according to claim 5, characterized in that: The matching parameters also include standing wave ratio, forward power value, reverse power value and transfer power value; the processor is also used to determine the standing wave ratio according to the voltage value of the forward wave and the voltage value of the reverse wave or the reflection coefficient modulus, and / or determine the forward power value according to the voltage value of the forward wave and a preset characteristic impedance value, and / or determine the reverse power value according to the voltage value of the reverse wave and the preset characteristic impedance value, and / or determine the transfer power value according to the voltage value of the forward wave, the voltage value of the reverse wave and the preset characteristic impedance value.
7. The matching parameter determination device according to claim 1, characterized in that: The voltage sampling module includes a first capacitor and a second capacitor, the first capacitor and the second capacitor are connected in series between the output path of the RF power supply and the ground, the connection point between the first capacitor and the second capacitor is connected to the connection point between the first end and the second end, and is connected to the matching parameter determination module; wherein the capacitance value of the first capacitor and the capacitance value of the second capacitor are used to enable the voltage sampling module to have the voltage sampling coefficient.
8. The matching parameter determination device according to claim 7, characterized in that: The voltage sampling module further includes a first inductor connected between a midpoint where the first end and the second end are connected and ground, and the first inductor is used to ensure that the midpoint where the first end and the second end are connected is continuously reflected as the voltage sampling signal.
9. The matching parameter determination device according to claim 7, characterized in that: The voltage sampling module also includes a first signal follower and a second signal follower, the first signal follower is connected between the connection point between the first capacitor and the second capacitor and the midpoint of the connection between the first end and the second end, and the second signal follower is connected between the connection point between the first capacitor and the second capacitor and the matching parameter determination module, wherein the first signal follower and the second signal follower are both used to maintain the waveform of the voltage sampling signal.
10. A radio frequency power supply system, characterized in that: It comprises a radio frequency power supply and a matching parameter determination device as described in any one of claims 1 to 9.