Optical platform with breadboard active damping

Abstract

The invention provides an optical platform with breadboard active damping, and the platform comprises a platform unit which comprises a top plate, a platform inner core and a platform bottom plate, and the platform inner core is disposed between the platform top plate and the platform bottom plate; the active damping component is arranged on the platform unit, and a sensor module and a driver module are arranged in the active damping component; the sensor module is electrically connected with the feedback unit, vibration signals collected by the sensor module are collected, analyzed and processed by the feedback unit to obtain input signals, and the driver module generates vibration according to data of the input signals to counteract vibration of the external environment. The influence of bending vibration of the platform is counteracted to the maximum extent in an active balance mode, the alignment accuracy of optical equipment installed on the workbench is improved, and therefore the precision in the optical performance testing process is improved.

Description

Technical Field

[0001] The invention belongs to the technical field of optical platforms, and in particular relates to an optical platform with breadboard active damping. Background Art

[0002] An optical table is a rigid platform used to support vibration-sensitive equipment. A typical optical table consists of two panels and a lightweight honeycomb core, forming a sandwich structure. Due to their high stiffness-to-weight ratio, these tables are widely used in optical research and high-precision manufacturing, and are often used in conjunction with flexible pneumatic isolators.

[0003] These current systems provide good isolation from floor vibrations, but the platform deviates from ideal rigid-body behavior at its natural frequencies of platform bending vibrations, which can affect the alignment of optical devices mounted on the platform, degrading optical performance. Summary of the invention

[0004] The invention provides an optical platform with breadboard active damping, aiming to solve the problem that the bending vibration of the platform will affect the alignment of optical equipment installed on the workbench, thereby reducing the optical performance.

[0005] The present invention is implemented as follows: an optical platform with breadboard active damping, comprising:

[0006] A platform unit, the platform unit comprising a top plate, a platform inner core and a platform bottom plate, the platform inner core being arranged between the platform top plate and the platform bottom plate;

[0007] An active damping component, wherein the active damping component is arranged on the platform unit, and wherein a sensor module and a driver module are arranged in the active damping component;

[0008] The feedback unit is electrically connected to the sensor module. The vibration signal collected by the sensor module is collected, analyzed and processed by the feedback unit to obtain an input signal. The driver module generates vibration according to the data of the input signal to offset the vibration of the external environment.

[0009] Preferably, the number of the active damping components is two groups, and the active damping components are arranged in different areas of the platform unit.

[0010] Open one set of active damping components and continue to increase the gain by a small amount until the system becomes unstable, and record the maximum gain S1 before instability. Open another set of active damping components and continue to increase the gain by a small amount until the system becomes unstable, and record the maximum gain S2 before instability.

[0011] Turn on two sets of active damping components at the same time and continue to increase the gain by a small amount at a growth rate proportional to S1 and S2 until the system becomes unstable. Record the maximum gain S3 before instability. S3 is the most effective gain required.

[0012] Preferably, the active damping component comprises two groups of first active damping components, and the first active damping components are arranged between the platform top plate and the platform bottom plate.

[0013] Preferably, the active damping component comprises two groups of second active damping components, and the second active damping components are arranged on the end surface of the platform top plate away from the platform bottom plate.

[0014] Preferably, the first active damping component comprises a first sensor module and a first driver module; the feedback unit is electrically connected to the first sensor module and the first driver module respectively;

[0015] The first sensor module includes a first sensor and a sensor housing, wherein the first sensor is arranged inside the sensor housing and senses the vibration state through the connection between the sensor housing and the platform top plate;

[0016] The first driver module includes an active damping component housing and a brake; the two ends of the active damping component housing are respectively connected to the platform top plate and the platform bottom plate, the brake is arranged inside the active damping component housing, and the feedback unit makes the brake vibrate according to the input signal to offset the vibration of the platform top plate and the platform bottom plate.

[0017] Preferably, the brake comprises a first magnetic mass block, a first drive coil and a first elastic sheet; the first magnetic mass block is connected to the housing of the active damping component through the first elastic sheet;

[0018] The first driving coil generates a magnetic field to cause the first magnetic mass block to vibrate, and the vibration generated by the first magnetic mass block acts on the housing of the active damping component through the first elastic sheet.

[0019] Preferably, the second active damping component comprises a second sensor module and a second driver module;

[0020] The second sensor module includes a lower housing of a detachable component and a second sensor, wherein the second sensor is located inside the lower housing of the detachable component, and both the lower housing of the detachable component and the second sensor are connected to the platform top plate; the second driver module acts on the lower housing of the detachable component.

[0021] Preferably, the second driver module includes an upper shell of the detachable component, a second magnetic mass block, a second drive coil and a second elastic sheet, the second drive coil is arranged on the periphery of the second magnetic mass block, the second magnetic mass block is connected to the upper shell of the detachable component through the second elastic sheet, the second drive coil generates a magnetic field to make the second magnetic mass block vibrate, and the vibration generated by the second magnetic mass block acts on the upper shell of the detachable component through the second elastic sheet.

[0022] Preferably, the feedback unit comprises a connector, a preamplifier, a bandpass filter and a phase corrector;

[0023] The connector collects vibration signals from the active damping component, the vibration signals are first amplified by a preamplifier, and the amplified vibration signals are then filtered by a bandpass filter to retain signals in the frequency band of 100 Hz to 400 Hz. The signals in the frequency band of 100 Hz to 400 Hz are adjusted to a phase of 1 / 2π by a phase corrector to obtain a frequency modulated signal, and the frequency modulated signal is multiplied by a gain factor K and then noise is eliminated by a driver to form an input signal, and the input signal is transmitted to the driver module.

[0024] Compared with the prior art, the embodiments of the present application have the following beneficial effects:

[0025] The optical platform with breadboard active damping provided by the present invention obtains the state information of the bending vibration of the platform through the sensor module in the active damping component and then actively uses the driver module to offset the vibration, and uses the active balancing method to offset the influence of the bending vibration of the platform to the greatest extent, thereby improving the accuracy of alignment of optical equipment installed on the workbench, thereby improving the accuracy in the optical performance test process. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 It is a structural schematic diagram of an optical platform with breadboard active damping provided by the present invention.

[0027] Figure 2 The present invention provides a schematic structural diagram of a first active damping component of an optical platform with breadboard active damping.

[0028] Figure 3 The present invention provides a schematic structural diagram of a second active damping component of an optical platform with breadboard active damping.

[0029] Figure 4 The present invention provides a schematic structural diagram of a control flow chart in an optical platform with breadboard active damping.

[0030] Figure 5It is a spectrum schematic diagram of a stable state and an unstable state of an optical platform with breadboard active damping provided by the present invention.

[0031] Figure 6 It is a schematic diagram of the FFT spectrum of acceleration in the initial state of an optical platform with breadboard active damping provided by the present invention.

[0032] Figure 7 The diagram is a schematic diagram of an FFT spectrum of acceleration of an optical platform with breadboard active damping provided by the present invention after a tuning effect is applied.

[0033] Description of reference numerals:

[0034] 1. Platform top plate; 2. Platform bottom plate; 3. First active damping component; 4. Second active damping component; 5. Connector; 6. Data transmission channel; 7. Controller; 8. Platform side plate; 9. Platform inner core;

[0035] 31. first sensor; 32. sensor housing; 33. active damping component housing; 35. first magnetic mass block; 36. first drive coil; 37. first elastic sheet; 38. brake; 39. first data transmission line;

[0036] 41. Lower housing of detachable component; 42. Second magnetic mass block; 43. Upper housing of detachable component; 44. Second driving coil; 45. Second elastic sheet; 46. Second data transmission line; 47. Second sensor. DETAILED DESCRIPTION

[0037] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by technicians in the technical field of this application; the terms used in the specification of the application herein are only for the purpose of describing specific embodiments and are not intended to limit this application; the terms "including" and "having" and any variations thereof in the specification and claims of this application and the above-mentioned drawings are intended to cover non-exclusive inclusions. The terms "first", "second", etc. in the specification and claims of this application or the above-mentioned drawings are used to distinguish different objects, not to describe a specific order.

[0038] Reference to "embodiments" herein means that a particular feature, structure, or characteristic described in conjunction with the embodiments may be included in at least one embodiment of the present application. The appearance of the phrase in various locations in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment that is mutually exclusive with other embodiments. It is explicitly and implicitly understood by those skilled in the art that the embodiments described herein may be combined with other embodiments.

[0039] The embodiment of the present invention provides an optical platform with breadboard active damping, such as Figure 1-Figure 7 As shown, the optical platform with breadboard active damping includes:

[0040] A platform unit, the platform unit comprising a top plate 1, a platform inner core 9 and a platform bottom plate 2, wherein the platform inner core 9 is arranged between the platform top plate 1 and the platform bottom plate 2;

[0041] An active damping component, wherein the active damping component is arranged on the platform unit, and wherein a sensor module and a driver module are arranged in the active damping component;

[0042] A feedback unit, the feedback unit includes a connector 5, a data transmission channel 6 and a controller 7. The sensor module is electrically connected to the connector 5. The data transmission channel 6 transmits the data of the connector 5 to the controller 7. The vibration signal collected by the sensor module is analyzed and processed by the controller 7 to obtain an input signal;

[0043] The working principle of the active damping component is as follows: the sensor module collects vibration signal data, and the feedback unit analyzes and adjusts the input signal, and then transmits the vibration amplitude signal that needs to be applied to the active damping component according to the input signal data. In this embodiment, the current signal is used to control the magnetic field amplitude to allow the driver module to generate a vibration amplitude. Here, the data transmission channel 6 is used to transmit the current signal data back to the connector 5 again, and the connector 5 distributes the current signal data to different driver modules respectively, so that the driver module can generate a specified vibration amplitude to counteract the vibration of the external environment.

[0044] There are two groups of active damping components, which are arranged in different areas of the platform unit. One group of active damping components is turned on alone to continuously increase a small amount of gain until the system becomes unstable, and the maximum gain S1 before instability is recorded. Another group of active damping components is turned on alone to continuously increase a small amount of gain until the system becomes unstable, and the maximum gain S2 before instability is recorded. Both groups of active damping components are turned on at the same time and the gain is continuously increased by a small amount at a growth rate with a ratio between S1 and S2 until the system becomes unstable, and the maximum gain S3 before instability is recorded. S3 is the most effective gain required.

[0045] like Figure 5 As shown in Figure 2, when the acceleration changes significantly, the system is unstable. Figure 5 When the acceleration changes greatly during 5 to 10 seconds, the system is unstable.

[0046] As a preferred implementation in this embodiment, the controller 7 includes a preamplifier, a bandpass filter and a phase corrector; the preamplifier, the bandpass filter and the phase corrector are connected in series in sequence, the vibration signal collected by the connector 5 is first amplified by the preamplifier, and the vibration signal after the amplification process is filtered by the bandpass filter, and the signal in the frequency band of 100Hz to 400Hz is retained, and the signal in the frequency band of 100Hz to 400Hz is adjusted to a phase of 1 / 2π by the phase corrector to obtain a frequency modulation signal, and the frequency modulation signal is multiplied by the gain factor K and the noise is eliminated by the driver to form an input signal;

[0047] like Figure 6 and Figure 7 As shown, Figure 6 is the FFT spectrum of acceleration in the initial state, Figure 7 This is the FFT spectrum of acceleration after the tuning effect is applied. After the tuning process, the fluctuation range of the acceleration data is significantly reduced;

[0048] In this embodiment, the preamplifier, the bandpass filter and the phase corrector are prior art devices, and the gain factor K also uses prior art parameters;

[0049] As a preferred implementation in this embodiment, the active damping component includes a first active damping component 3 and a second active damping component 4;

[0050] The first active damping component 3 includes a first sensor module and a first driver module; the first sensor module and the first driver module are electrically connected to the connector 5, and the signal data of the connector 5 is respectively interacted with the first sensor module and the first driver module through the first data transmission line 39 provided on the first active damping component 3;

[0051] The first sensor module includes a first sensor 31 and a sensor housing 32. The first sensor 31 is disposed inside the sensor housing 32 and senses the vibration state through the connection between the sensor housing 32 and the platform top plate 1.

[0052] The first driver module includes an active damping component housing 33 and a brake 38; the two ends of the active damping component housing 33 are respectively connected to the platform top plate 1 and the platform bottom plate 2, and the brake 38 is arranged inside the active damping component housing 33, and the brake 38 includes a first magnetic mass block 35, a first driving coil 36 and a first elastic sheet 37; the first magnetic mass block 35 is connected to the active damping component housing 33 through the first elastic sheet 37; the first driving coil 36 generates a magnetic field to make the first magnetic mass block 35 vibrate, and the first magnetic mass block 35 generates vibration to act on the active damping component housing 33 through the first elastic sheet 37.

[0053] The second active damping component 4 includes a second sensor module, a second driver module and a second data transmission line 46; the second data transmission line 46 is electrically connected to the second sensor module, the second driver module and the connector respectively;

[0054] The second sensor module includes a detachable lower housing 41 and a second sensor 47, wherein the second sensor 47 is located inside the detachable lower housing 41, and the second sensor 47 is connected to the platform top plate 1;

[0055] The second driver module comprises a removable upper housing 43, a second magnetic mass block 42, a second driving coil 44 and a second elastic sheet 45, wherein the second driving coil 44 is arranged around the second magnetic mass block 42, and the second magnetic mass block 42 is connected to the removable upper housing 43 through the second elastic sheet 45, and the second driving coil 44 generates a magnetic field to vibrate the second magnetic mass block 42, and the vibration of the second magnetic mass block 42 acts on the removable upper housing 43 through the second elastic sheet 45;

[0056] In a further preferred embodiment of the present invention, two groups of first active damping components 3 are respectively arranged between the platform top plate 1 and the platform bottom plate 2;

[0057] In this embodiment, the active damping component uses two sets of first active damping components 3 arranged between the platform top plate 1 and the platform bottom plate 2 as damping devices to offset external environmental vibrations; the first active damping components 3 are arranged in advance inside the platform top plate 1 and the platform bottom plate 2, and are not easy to disassemble;

[0058] In a further preferred embodiment of the present invention, two groups of second active damping components 4 are arranged on the end surface of the platform top plate 1 away from the platform bottom plate 2;

[0059] In this embodiment, the active damping component uses two sets of second active damping components 4 on the outside of the platform top plate 1 as damping devices to offset external environmental vibrations; since the second active damping components 4 are directly arranged on the platform top plate 1, the active damping components can be removed when not needed;

[0060] As a preferred implementation in this embodiment, a platform side plate 8 is further provided between the platform top plate 1 and the platform bottom plate 2 ; and the controller 7 in the feedback unit is arranged on the platform side plate 8 .

[0061] It should be noted that, for the above-mentioned embodiments, for the sake of simplicity, they are all described as a series of action combinations, but those skilled in the art should know that the present invention is not limited by the described order of actions, because according to the present invention, some steps may be performed in other orders or simultaneously. Secondly, those skilled in the art should also know that the embodiments described in the specification are all preferred embodiments, and the actions and modules involved are not necessarily required by the present invention.

[0062] The above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit the scope of protection of the invention. Obviously, the described embodiments are only some embodiments of the present invention, rather than all embodiments. Based on these embodiments, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention. Although the present invention has been described in detail with reference to the above embodiments, ordinary technicians in this field can still combine, add, delete or make other adjustments to the features in the various embodiments of the present invention according to the circumstances without conflict, without making creative work, so as to obtain different other technical solutions that do not deviate from the concept of the present invention in essence, and these technical solutions also belong to the scope of protection of the present invention.

Claims

1. An optical platform with breadboard active damping, characterized in that: include: A platform unit, the platform unit comprising a top plate, a platform inner core and a platform bottom plate, the platform inner core being arranged between the platform top plate and the platform bottom plate; An active damping component, wherein the active damping component is arranged on the platform unit, and wherein a sensor module and a driver module are arranged in the active damping component; The feedback unit is electrically connected to the sensor module. The vibration signal collected by the sensor module is collected, analyzed and processed by the feedback unit to obtain an input signal. The driver module generates vibration according to the data of the input signal to offset the vibration of the external environment.

2. An optical platform with breadboard active damping as claimed in claim 1, characterized in that: There are two groups of active damping components, which are arranged in different areas of the platform unit. Open one set of active damping components and continue to increase the gain by a small amount until the system becomes unstable, and record the maximum gain S1 before instability. Open another set of active damping components and continue to increase the gain by a small amount until the system becomes unstable, and record the maximum gain S2 before instability. Turn on two sets of active damping components at the same time and continue to increase the gain by a small amount at a growth rate proportional to S1 and S2 until the system becomes unstable. Record the maximum gain S3 before instability. S3 is the most effective gain required.

3. An optical platform with breadboard active damping as claimed in claim 2, characterized in that: The active damping component includes two groups of first active damping components, and the first active damping components are arranged between the platform top plate and the platform bottom plate.

4. An optical platform with breadboard active damping as claimed in claim 2, characterized in that: The active damping component comprises two groups of second active damping components, and the second active damping components are arranged on the end surface of the platform top plate away from the platform bottom plate.

5. An optical platform with breadboard active damping as claimed in claim 3, characterized in that: The first active damping component includes a first sensor module and a first driver module; The feedback unit is electrically connected to the first sensor module and the first driver module respectively; The first sensor module includes a first sensor and a sensor housing, wherein the first sensor is arranged inside the sensor housing and senses the vibration state through the connection between the sensor housing and the platform top plate; The first driver module includes an active damping component housing and a brake; the two ends of the active damping component housing are respectively connected to the platform top plate and the platform bottom plate, the brake is arranged inside the active damping component housing, and the feedback unit makes the brake vibrate according to the input signal to offset the vibration of the platform top plate and the platform bottom plate.

6. An optical platform with breadboard active damping as claimed in claim 5, characterized in that: The brake comprises a first magnetic mass block, a first driving coil and a first elastic sheet; the first magnetic mass block is connected to the housing of the active damping component through the first elastic sheet; The first driving coil generates a magnetic field to cause the first magnetic mass block to vibrate, and the vibration generated by the first magnetic mass block acts on the housing of the active damping component through the first elastic sheet.

7. An optical platform with breadboard active damping as claimed in claim 4, characterized in that: The second active damping component includes a second sensor module and a second driver module; The second sensor module includes a lower housing of a detachable component and a second sensor, wherein the second sensor is located inside the lower housing of the detachable component, and both the lower housing of the detachable component and the second sensor are connected to the platform top plate; the second driver module acts on the lower housing of the detachable component.

8. An optical platform with breadboard active damping as claimed in claim 7, characterized in that: The second driver module includes an upper shell of a detachable component, a second magnetic mass block, a second drive coil and a second elastic sheet. The second drive coil is arranged around the second magnetic mass block. The second magnetic mass block is connected to the upper shell of the detachable component through the second elastic sheet. The second drive coil generates a magnetic field to make the second magnetic mass block vibrate. The vibration generated by the second magnetic mass block acts on the upper shell of the detachable component through the second elastic sheet.

9. An optical platform with breadboard active damping as claimed in claim 6 or 8, characterized in that: The feedback unit includes a connector, a preamplifier, a bandpass filter and a phase corrector; The connector collects vibration signals from the active damping component, the vibration signals are first amplified by a preamplifier, and the amplified vibration signals are then filtered by a bandpass filter to retain signals in the frequency band of 100 Hz to 400 Hz. The signals in the frequency band of 100 Hz to 400 Hz are adjusted to a phase of 1 / 2π by a phase corrector to obtain a frequency modulated signal, and the frequency modulated signal is multiplied by a gain factor K and then noise is eliminated by a driver to form an input signal, and the input signal is transmitted to the driver module.

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