Single-channel silicon wafer correction mechanism

Abstract

The present invention relates to a single-channel silicon wafer correction mechanism, comprising a fixed plate, a power assembly and a correction assembly are arranged on the fixed plate, the bottom of the correction assembly is connected to the power assembly; the power assembly comprises a sliding block, a servo motor, a belt, a pulley 1 and a pulley 2, one end of the fixed plate is provided with a servo motor, the power output end of the servo motor is provided with a pulley 2, the inner side of the other end of the fixed plate is slidably connected to the sliding block, the upper side of the sliding block is rotatably connected to the pulley 1, a belt is connected between the pulley 1 and the pulley 2, and the belt is sleeved on the outer side of the pulley 1 and the pulley 2. By using the side beam and the abutting side plate, the sliding block and the side beam can be quickly locked, so that the sliding block can be movable, the belt is loosened, and the power assembly cannot provide pressure for the correction assembly to lock the silicon wafer, thereby extremely quickly releasing the locked state of the silicon wafer.

Description

Technical Field

[0001] The invention belongs to the field of silicon wafer production, in particular to a single-channel silicon wafer correction mechanism. Background Art

[0002] The production process of silicon wafers mainly includes steps such as crystal pulling, cutting, outer diameter rounding, slicing, chamfering, grinding, etching and cleaning. These steps together ensure that the geometric dimensions and surface quality of silicon wafers meet the standards to meet the requirements of semiconductor devices and integrated circuits. During production, silicon wafers and semi-finished silicon wafers need to be transported. In order to prevent silicon wafers and semi-finished silicon wafers from deviating during transportation, a correction mechanism is required. The existing correction mechanism also has the probability of completely clamping the silicon wafer during the correction process. When the motor and command failure occur, the existing equipment cannot quickly release this clamping, which leads to equipment damage, such as motor burnout, belt damage, etc. Therefore, a single-channel silicon wafer correction mechanism is proposed. Summary of the invention

[0003] The purpose of this section is to summarize some aspects of embodiments of the present invention and briefly introduce some preferred embodiments. Some simplifications or omissions may be made in this section and the specification abstract and the invention title of this application to avoid blurring the purpose of this section, the specification abstract and the invention title, and such simplifications or omissions cannot be used to limit the scope of the present invention.

[0004] In view of the following technical problems in the prior art: the existing correction mechanism may completely clamp the silicon wafer during the correction process, and the existing equipment cannot quickly release the clamping when the motor and command failure occur, which may cause damage to the equipment.

[0005] In order to solve the above technical problems, the present invention provides the following technical solutions: a single-channel silicon wafer correction mechanism comprises a fixed plate, a power assembly and a correction assembly are arranged on the fixed plate, and the bottom of the correction assembly is connected to the power assembly;

[0006] The power assembly includes a sliding block, a servo motor, a belt, a pulley 1 and a pulley 2. The servo motor is provided at one end of the fixed plate, and the power output end of the servo motor is provided with a pulley 2. The inner side of the other end of the fixed plate is slidably connected to the sliding block, and the upper side of the sliding block is rotatably connected to the pulley 1. A belt is connected between the pulley 1 and the pulley 2, and the belt is sleeved on the outer sides of the pulley 1 and the pulley 2.

[0007] The correction assembly is composed of two groups of adjustment units, which include a chassis, a linkage plate, a vertical beam, a fixed frame and an adjustment seat. Two linkage plates are arranged at the bottom of each chassis, and the belt passes between the two linkage plates on the lower side of the chassis. Each chassis has a linkage plate fixedly connected to one side of the belt through a clamping block. The upper side of the chassis is connected to the fixed frame through a vertical beam, and the fixed frame is arranged on the lower side of the adjustment seat.

[0008] As a preferred technical solution of the single-lane silicon wafer correction mechanism, one of the adjustment units is connected to one side of the belt, and the other adjustment unit is connected to the other side of the belt;

[0009] The two adjusting units are connected to different sides of the belt, so that the two adjusting units move in opposite directions when the belt is running.

[0010] As a preferred technical solution of the single-channel silicon wafer correction mechanism, the bottom of the fixed plate is connected to the connecting frame through a connecting column, the connecting frame is horizontally arranged, and a connecting column is respectively arranged at the four corners of the connecting frame. A flat plate is arranged at the bottom of the linkage plate, and the flat plate is movably connected to the connecting frame;

[0011] The connecting frame provides support for the bottom of the fixing plate and is used to connect the correction mechanism with other structures.

[0012] As a preferred technical solution of the single-channel silicon wafer correction mechanism, a linear track is arranged on the inner side of the fixed plate, and a linear slider is arranged on the bottom end of the linkage plate, and the linear slider is slidably connected with the linear track;

[0013] The linear slider enables the linkage plate and the correction component where the linkage plate is located to perform linear motion.

[0014] As a preferred technical solution of the single-channel silicon wafer correction mechanism, the sliding block is connected to a tension adjustment unit, the tension adjustment unit is installed at one end of the fixed plate, the tension adjustment unit includes a side beam, a connecting rod 1, a connecting rod 2, an air cylinder and an inner cylinder, two air cylinders are arranged on the fixed plate, the sliding block is connected to the side beam through the connecting rod 1, and the inner cylinder is slidably connected in the air cylinder;

[0015] A piston is provided at one end of the inner cylinder located inside the air cylinder, and the piston is slidably connected to the inner side of the air cylinder;

[0016] The tension adjustment unit further includes a spring and a slider, the second connecting rod extends into the inner cylinder and is plugged into the slider, the slider is slidably connected to the inner cylinder, and a spring is provided at one end of the slider away from the second connecting rod;

[0017] The tension adjustment unit further comprises a spacer and a gasket, wherein a gasket is respectively arranged on both sides of the spacer, and one of the gaskets abuts against the spring;

[0018] The compressed air in the air cylinder and the spring will squeeze the connecting rod 2, thereby causing the side beam to tighten the belt on the pulley 1 through the connecting rod 1 and the sliding block.

[0019] The tensioning adjustment unit also includes a groove, a connecting groove, a clamping groove, a locking rod, a side beam, an abutting side plate, a hammer plate and a side wheel. A groove is respectively provided on both sides of the sliding block, a connecting groove is provided in the middle of the sliding block, and two opposite vertical surfaces of the connecting groove are respectively provided with a plurality of clamping grooves, and the clamping groove communicates with the groove and the connecting groove. The connecting rod extends into the connecting groove, and the side beam is screwed into the groove. A permanent magnet is provided on the upper side of the side beam, and the side beam is locked in position in the connecting groove by the permanent magnet. A locking groove is provided on the connecting rod, and a locking rod is clamped in the locking groove. Both ends of the locking rod extend into the grooves of the two side walls of the connecting groove through the clamping groove.

[0020] Two abutting side plates are arranged on one side of the side beam close to the groove, and both ends of the locking rod are rotatably connected to a side wheel respectively, and the side wheel extends between the two abutting side plates;

[0021] The lower abutting side plate is horizontally arranged, the upper abutting side plate is inclinedly arranged, a hammer plate is arranged on the side of the side beam away from the sliding block, and the distance between the ends of the two abutting side plates away from the hammer plate is smaller than that between the ends close to the hammer plate;

[0022] The locking rod passes through the clamping groove and the locking groove, so that the connecting rod is locked in the connecting groove, and then the sliding block and the side beam are locked;

[0023] The side beam can be rotated quickly by hammering the hammer plate, and the locking rod can be squeezed out of the inner side of the locking groove by the abutting side plate on the side beam, thereby releasing the lock between the sliding block and the side beam.

[0024] The single-channel silicon wafer correction mechanism of the present invention has the beneficial effects of: through the use of side beams and abutting side plates, the sliding block and the side beams can be quickly locked, so that the sliding block can be movable, the belt can be loosened, and the power component cannot provide pressure for the correction component to lock the silicon wafer, thereby extremely quickly releasing the locked state of the silicon wafer. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following briefly introduces the drawings required for describing the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative labor. Among them:

[0026] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0027] Figure 2 It is a schematic diagram of the structure of the power assembly of the present invention;

[0028] Figure 3 It is a structural schematic diagram of the tension adjustment unit of the present invention;

[0029] Figure 4 It is a schematic diagram of the internal structure of the sliding block of the present invention;

[0030] Figure 5 It is a schematic diagram of the top view of the side beam of the present invention;

[0031] Figure 6 It is a schematic cross-sectional structural diagram of the front side beam of the present invention;

[0032] Figure 7 It is a structural schematic diagram of the locking rod of the present invention;

[0033] Figure 8 For the present invention Figure 3 Schematic diagram of the local enlarged structure of part A.

[0034] Figure numerals: fixed plate 1, sliding block 2, side beam 3, connecting rod 1 4, pulley 1 5, pulley 2 6, connecting frame 7, linkage plate 8, servo motor 9, belt 10, connecting column 11, vertical beam 12, fixed frame 13, adjustment seat 14, silicon wafer 15, abutment wheel 16, chassis 17, clamping block 18, linear rail 19, linear slider 20, connecting rod 2 21, air cylinder 22, groove 23, connecting groove 24, snap-on groove 25, locking rod 27, locking groove 28, side beam 29, abutment side plate 30, hammer plate 31, side wheel 32, spacer 33, gasket 34, inner cylinder 35, spring 36, slider 37, piston 38. DETAILED DESCRIPTION

[0035] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the specific implementation methods of the present invention are described in detail below in conjunction with the accompanying drawings.

[0036] In the following description, many specific details are set forth to facilitate a full understanding of the present invention, but the present invention may also be implemented in other ways different from those described herein, and those skilled in the art may make similar generalizations without violating the connotation of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0037] Secondly, the term "one embodiment" or "embodiment" as used herein refers to a specific feature, structure, or characteristic that may be included in at least one implementation of the present invention. The term "in one embodiment" that appears in different places in this specification does not necessarily refer to the same embodiment, nor does it refer to a separate or selective embodiment that is mutually exclusive with other embodiments.

[0038] Secondly, the present invention is described in detail with reference to the schematic diagram. When describing the embodiments of the present invention in detail, for the sake of convenience, the cross-sectional diagrams showing the device structure will not be partially enlarged according to the general scale, and the schematic diagrams are only examples, which should not limit the scope of protection of the present invention. In addition, in actual production, the three-dimensional dimensions of length, width and depth should be included.

[0039] like Figures 1 to 8 As shown, the present invention proposes a single-channel silicon wafer correction mechanism, comprising a fixed plate 1, on which a power assembly and a correction assembly are arranged, and the bottom of the correction assembly is connected to the power assembly;

[0040] The power assembly includes a sliding block 2, a servo motor 9, a belt 10, a pulley 1 5 and a pulley 2 6. The servo motor 9 is provided at one end of the fixed plate 1, and the power output end of the servo motor 9 is provided with a pulley 2 6. The inner side of the other end of the fixed plate 1 is slidably connected to the sliding block 2, and the upper side of the sliding block 2 is rotatably connected to the pulley 1 5. A belt 10 is connected between the pulley 1 5 and the pulley 2 6, and the belt 10 is sleeved on the outer sides of the pulley 1 5 and the pulley 2 6.

[0041] The correction assembly is composed of two groups of adjustment units, which include a chassis 17, a linkage plate 8, a vertical beam 12, a fixed frame 13 and an adjustment seat 14. Two linkage plates 8 are arranged at the bottom of each chassis 17, and the belt 10 passes between the two linkage plates 8 on the lower side of the chassis 17. Each chassis 17 has a linkage plate 8 fixedly connected to one side of the belt 10 through a clamping block 18. The upper side of the chassis 17 is connected to the fixed frame 13 through the vertical beam 12, and the fixed frame 13 is arranged on the lower side of the adjustment seat 14.

[0042] One of the adjustment units is connected to one side of the belt 10, and the other adjustment unit is connected to the other side of the belt 10;

[0043] The two adjustment units are connected to different sides of the belt 10 , so that when the belt 10 is running, the two adjustment units move in opposite directions.

[0044] The bottom of the fixed plate 1 is connected to the connecting frame 7 through a connecting column 11. The connecting frame 7 is horizontally arranged. A connecting column 11 is respectively arranged at the four corners of the connecting frame 7. A flat plate is arranged at the bottom of the linkage plate 8. The flat plate is movably connected to the connecting frame 7.

[0045] The connecting frame 7 provides support for the bottom of the fixing plate 1 and is used to connect the correction mechanism with other structures.

[0046] A linear track 19 is disposed on the inner side of the fixed plate 1, and a linear slider 20 is disposed on the bottom end of the linkage plate 8, and the linear slider 20 is slidably connected to the linear track 19;

[0047] The linear slider 20 enables the linkage plate 8 and the correction component where the linkage plate 8 is located to perform linear motion.

[0048] The sliding block 2 is connected to the tensioning adjustment unit, which is installed at one end of the fixed plate 1. The tensioning adjustment unit includes a side beam 3, a connecting rod 1 4, a connecting rod 21, an air cylinder 22 and an inner cylinder 35. Two air cylinders 22 are arranged on the fixed plate 1. The sliding block 2 is connected to the side beam 3 through the connecting rod 1 4. The inner cylinder 35 is slidably connected in the air cylinder 22.

[0049] The inner cylinder 35 is provided with a piston 38 at one end located inside the air cylinder 22, and the piston 38 is slidably connected to the inner side of the air cylinder 22;

[0050] The tension adjustment unit further includes a spring 36 and a slider 37. The second connecting rod 21 extends into the inner cylinder 35 and is plugged into the slider 37. The slider 37 is slidably connected to the inner cylinder 35. The end of the slider 37 away from the second connecting rod 21 is provided with a spring 36.

[0051] The tension adjustment unit further includes a spacer 33 and a gasket 34. A gasket 34 is disposed on both sides of the spacer 33, and one gasket 34 abuts against a spring 36.

[0052] The compressed air in the air cylinder 22 and the spring 36 will squeeze the connecting rod 21, thereby causing the side beam 3 to tighten the belt 10 on the pulley 1 5 through the connecting rod 1 4 and the sliding block 2.

[0053] The tensioning adjustment unit also includes a groove 23, a connecting groove 24, a snap-in groove 25, a locking rod 27, a side beam 29, an abutting side plate 30, a hammer plate 31 and a side wheel 32. A groove 23 is respectively provided on both sides of the sliding block 2, a connecting groove 24 is provided in the middle of the sliding block 2, and two opposite vertical surfaces of the connecting groove 24 are respectively provided with a plurality of snap-in grooves 25, and the snap-in grooves 25 communicate with the groove 23 and the connecting groove 24. The connecting rod 14 extends into the connecting groove 24, and the side beam 29 is screwed into the groove 23. A permanent magnet is provided on the upper side of the side beam 29, and the side beam 29 is locked in position in the connecting groove 24 by the permanent magnet. A locking groove 28 is provided on the connecting rod 14, and a locking rod 27 is snapped into the locking groove 28. Both ends of the locking rod 27 extend into the grooves 23 on the two side walls of the connecting groove 24 through the snap-in grooves 25.

[0054] The side beam 29 is provided with two abutting side plates 30 on one side close to the groove 23, and the two ends of the locking rod 27 are rotatably connected with a side wheel 32, and the side wheel 32 extends between the two abutting side plates 30; the tension degree can be adjusted by adjusting the number of the spacers 33;

[0055] The lower abutting side plate 30 is horizontally arranged, and the upper abutting side plate 30 is inclinedly arranged. A hammer plate 31 is arranged on the side of the side beam 29 away from the sliding block 2, and the distance between the ends of the two abutting side plates 30 away from the hammer plate 31 is smaller than that between the ends close to the hammer plate 31.

[0056] Each adjustment seat 14 is rotatably connected to a plurality of abutment wheels 16 .

[0057] Embodiment: The servo motor 9 controls the belt 10 to run through the pulley 2 6, and the belt 10 moves the adjustment unit and approaches each other, so that the adjustment seat 14 and the abutment wheel 16 on the adjustment unit approach each other, and the abutment wheel 16 pushes the silicon wafer 15, so that the posture of the silicon wafer 15 is adjusted, and the position of the silicon wafer 15 is centered, so that the position of the silicon wafer 15 is corrected and the silicon wafer 15 is centered;

[0058] When the silicon wafer 15 is completely clamped and clamped, due to the failure of the motor and the command, the locking rod 27 passes through the clamping groove 25 and the locking groove 28, so that the connecting rod 4 is locked in the connecting groove 24, and then the sliding block 2 and the side beam 3 are locked, and the side beam 29 can be quickly rotated by hammering the hammer plate 31, and the abutting side plate 30 on the side beam 29 is used to form a downward hammering on the locking rod 27 to make it detach from the inner side of the locking groove 28, thereby releasing the lock between the sliding block 2 and the side beam 3, allowing the sliding block 2 to move, so that the belt 10 is loosened, and the power component cannot provide pressure for the correction component to lock the silicon wafer 15, thereby releasing the locked state of the silicon wafer 15.

[0059] It will be appreciated that in the development of any actual implementation, as in any engineering or design project, numerous implementation-specific decisions may be made. Such a development effort may be complex and time-consuming, but will be a routine task of design, fabrication, and production for those of ordinary skill having the benefit of this disclosure without undue experimentation.

[0060] It should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention rather than to limit it. Although the present invention has been described in detail with reference to the preferred embodiments, those skilled in the art should understand that the technical solutions of the present invention may be modified or replaced by equivalents without departing from the spirit and scope of the technical solutions of the present invention, which should all be included in the scope of the claims of the present invention.

Claims

1. Single-channel silicon wafer correction mechanism, characterized by: It comprises a fixing plate (1), on which a power assembly and a correction assembly are arranged, and the bottom of the correction assembly is connected to the power assembly; The power assembly comprises a sliding block (2), a servo motor (9) is arranged at one end of the fixed plate (1), a belt pulley 2 (6) is arranged at the power output end of the servo motor (9), the inner side of the other end of the fixed plate (1) is slidably connected to the sliding block (2), the upper side of the sliding block (2) is rotatably connected to the belt pulley 1 (5), and a belt (10) is connected between the belt pulley 1 (5) and the belt pulley 2 (6); The correction assembly is composed of two groups of adjustment units, each of which includes a chassis (17), each of which is provided with two linkage plates (8) at the bottom, the belt (10) passes between the two linkage plates (8) at the bottom of the chassis (17), each chassis (17) has a linkage plate (8) fixedly connected to one side of the belt (10) through a clamping block (18), the upper side of the chassis (17) is connected to a fixing frame (13) through a vertical beam (12), and the fixing frame (13) is provided at the bottom of the adjustment seat (14); The sliding block (2) is connected to a tensioning adjustment unit, and the tensioning adjustment unit is mounted on one end of the fixed plate (1); The tensioning adjustment unit comprises a side beam (3), a connecting rod 1 (4), a connecting rod 2 (21), an air cylinder (22) and an inner cylinder (35); two air cylinders (22) are arranged on the fixed plate (1); the sliding block (2) is connected to the side beam (3) via the connecting rod 1 (4); and the inner cylinder (35) is slidably connected inside the air cylinder (22); The tensioning adjustment unit further comprises a groove (23), a connecting groove (24), a snap-fit ​​groove (25), a locking rod (27), a side beam (29), an abutting side plate (30), a hammer plate (31) and a side wheel (32); a groove (23) is respectively provided on both sides of the sliding block (2); a connecting groove (24) is provided in the middle of the sliding block (2); two opposite vertical surfaces of the connecting groove (24) are respectively provided with a plurality of snap-fit ​​grooves (25); the snap-fit ​​grooves (25) are connected to the groove (23) and the connecting groove (24); the connecting rod (4) extends into the connecting groove (24); the side beam (29) is screwed into the groove (23); a locking groove (28) is provided on the connecting rod (4); the locking groove (28) is snap-fitted with the locking rod (27); both ends of the locking rod (27) extend into the grooves (23) on the two side walls of the connecting groove (24) through the snap-fit ​​grooves (25); Two abutting side plates (30) are arranged on one side of the side beam (29) close to the groove (23); two ends of the locking rod (27) are rotatably connected to a side wheel (32), and the side wheel (32) extends between the two abutting side plates (30); The lower abutting side plate (30) is arranged horizontally, and the upper abutting side plate (30) is arranged obliquely. A hammer plate (31) is arranged on the side of the side beam (29) away from the sliding block (2), and the distance between the ends of the two abutting side plates (30) away from the hammer plate (31) is smaller than that between the ends close to the hammer plate (31).

2. The single-channel silicon wafer correction mechanism according to claim 1, characterized in that: One of the adjustment units is connected to one side of the belt (10), and the other adjustment unit is connected to the other side of the belt (10).

3. The single-channel silicon wafer correction mechanism according to claim 1, characterized in that: The bottom of the fixed plate (1) is connected to the connecting frame (7) via a connecting column (11); the connecting frame (7) is arranged horizontally; a connecting column (11) is respectively arranged at the four corners of the connecting frame (7); a flat plate is arranged at the bottom of the linkage plate (8); the flat plate is movably connected to the connecting frame (7).

4. The single-channel silicon wafer correction mechanism according to claim 1, characterized in that: A linear track (19) is arranged on the inner side of the fixed plate (1), and a linear slider (20) is arranged on the bottom end of the linkage plate (8), wherein the linear slider (20) is slidably connected to the linear track (19).

5. The single-channel silicon wafer correction mechanism according to claim 1, characterized in that: A piston (38) is provided at one end of the inner cylinder (35) located inside the air cylinder (22), and the piston (38) is slidably connected to the inner side of the air cylinder (22).

6. The single-channel silicon wafer correction mechanism according to claim 1, characterized in that: The tension adjustment unit further comprises a spring (36) and a slider (37); the second connecting rod (21) extends into the inner cylinder (35) and is plugged into the slider (37); the slider (37) is slidably connected to the inner cylinder (35); and a spring (36) is provided at one end of the slider (37) away from the second connecting rod (21).

7. The single-channel silicon wafer correction mechanism according to claim 6, characterized in that: The tension adjustment unit further comprises a spacer (33) and a gasket (34), wherein a gasket (34) is respectively arranged on both sides of the spacer (33), and one of the gaskets (34) is in contact with a spring (36).

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