Microcavity automatic liquid injection method, system and device

Abstract

The invention discloses a microcavity automatic liquid injection method, system and device. The microcavity automatic liquid injection method comprises the steps that a carrier is placed in a vacuum box (11), the carrier (5) comprises a microcavity structure (54), and the vacuum box (11) is vacuumized until the pressure in the vacuum box (11) reaches a first preset vacuum pressure value; after the pressure in the vacuum box (11) reaches a first preset vacuum pressure value, liquid is injected into the carrier (5); after the liquid is injected into the carrier (5), the vacuum box (11) is further vacuumized until the pressure in the vacuum box (11) reaches a second preset vacuum pressure value; maintaining the vacuum box (11) at a second preset vacuum pressure value for a first preset duration; and after the first preset duration is maintained, the vacuum box (11) is decompressed, so that the microcavity structure (54) is filled with the liquid. The carrier (5) is always in a negative pressure environment in a liquid injection process by adopting a two-stage vacuumizing method, and air in the carrier (5) is exhausted as much as possible, so that the detection result is prevented from being influenced by a gas-liquid mixture formed in the microcavity structure (54).

Description

Microcavity automatic liquid injection method, system and device Technical Field

[0001] The present invention belongs to the field of microcavity filling technology, and in particular to a microcavity automatic liquid injection method, system and device. Background Art

[0002] The basic working principle of nanopore sequencing technology: In a microcavity filled with buffer, an insulating film with nanoscale pores (such as a phospholipid bilayer membrane, an artificial membrane, etc.) divides the cavity into two small chambers. When voltage is applied to the electrolyte chamber, ions or other small molecules can pass through the pores, forming a stable and detectable ion current. By mastering the size and surface characteristics of the nanopores, the applied voltage and the solution conditions, different types of biological molecules can be detected. A sequencing chip can contain hundreds or thousands of microcavities with diameters ranging from tens to hundreds of microns. Due to the surface tension of the liquid and the hydrophobic nature of the internal surface of the micropores, as well as the presence of air inside, it is difficult for the buffer solution to completely expel the air inside the cavity and completely fill the cavity.

[0003] Summary of the Invention

[0004] The present invention provides a microcavity automatic liquid injection method, system and device to solve the technical problem of difficulty in exhausting air from a microcavity structure proposed in the prior art.

[0005] To solve the above problems, the present invention provides a first aspect of a microcavity automatic liquid injection method, which includes:

[0006] placing a carrier including a microcavity structure in a vacuum chamber;

[0007] Evacuate the vacuum box until the pressure inside the vacuum box reaches a first preset vacuum pressure value;

[0008] After the pressure in the vacuum box reaches a first preset vacuum pressure value, injecting the liquid into the carrier;

[0009] After the liquid is injected into the carrier, the vacuum box is further evacuated until the pressure inside the vacuum box reaches a second preset vacuum pressure value;

[0010] maintaining the vacuum box at a second preset vacuum pressure value for a first preset time period;

[0011] After maintaining the first preset time, the vacuum box is depressurized to allow the liquid to fill the microcavity structure.

[0012] In an optional solution of the present invention, after placing the carrier in the vacuum box and before evacuating the vacuum box, the method further includes:

[0013] Close the vacuum box;

[0014] Check whether the vacuum box is in a closed state. If the vacuum box is in a closed state, evacuate the vacuum box.

[0015] In an optional solution of the present invention, evacuating the vacuum box until the pressure in the vacuum box reaches a first preset vacuum pressure value includes:

[0016] The vacuum box is evacuated using a first vacuuming speed;

[0017] Real-time detection is performed to determine whether the pressure in the vacuum box reaches a first preset vacuum pressure value: if so, vacuuming is stopped; if not, vacuuming is continued at a first vacuuming speed.

[0018] In an optional solution of the present invention, further evacuating the vacuum box until the pressure of the vacuum box reaches a second preset vacuum pressure value comprises:

[0019] The vacuum box is further evacuated using a second evacuation speed, wherein the second evacuation speed is not less than the first evacuation speed;

[0020] Real-time detection is performed to determine whether the pressure inside the vacuum box reaches a second preset vacuum pressure value: if so, vacuuming is stopped; if not, vacuuming is continued at a second vacuuming speed.

[0021] In an optional solution of the present invention, injecting the liquid into the carrier includes:

[0022] Open the injection control valve;

[0023] injecting the liquid into the vehicle for a second preset time period;

[0024] Close the filling control valve.

[0025] In an optional solution of the present invention, depressurizing the vacuum box includes:

[0026] Relieving pressure from the vacuum box at a first preset pressure relief rate until the pressure in the vacuum box reaches a third preset vacuum pressure value;

[0027] After the pressure in the vacuum box reaches the third preset vacuum pressure value, the vacuum box is further depressurized at a second preset pressure relief speed until the pressure in the vacuum box reaches a fourth preset vacuum pressure value.

[0028] In an optional solution of the present invention, the first preset pressure relief speed is smaller than the second preset pressure relief speed.

[0029] A second aspect of the present invention provides a microcavity automatic liquid injection system for implementing the above-mentioned microcavity automatic liquid injection method. A carrier is placed in a vacuum box. The microcavity automatic liquid injection system includes:

[0030] a first vacuuming module, configured to evacuate the vacuum box until the pressure in the vacuum box reaches a first preset vacuum pressure value;

[0031] a liquid injection module configured to inject liquid into the carrier after the pressure in the vacuum box reaches a first preset vacuum pressure value;

[0032] a second vacuuming module, configured to further evacuate the vacuum box after the liquid is injected into the carrier, until the pressure of the vacuum box reaches a second preset vacuum pressure value;

[0033] a pressure maintaining module, configured to maintain the vacuum box at a second preset vacuum pressure value for a first preset period of time;

[0034] The pressure relief module is configured to relieve the pressure of the vacuum box after maintaining the pressure for a first preset time, so that the liquid is filled in the microcavity structure.

[0035] In an optional solution of the present invention, the microcavity automatic liquid injection system further includes:

[0036] an execution module configured to open or close the vacuum box;

[0037] The detection module is used to detect whether the vacuum box is in a closed state, and to evacuate the vacuum box when the vacuum box is in the closed state.

[0038] In an optional solution of the present invention, the first vacuum module includes:

[0039] a first vacuuming unit for vacuuming the vacuum box at a first vacuuming speed;

[0040] The first detection unit detects in real time whether the pressure inside the vacuum box reaches a first preset vacuum pressure value: if so, vacuuming is stopped; if not, vacuuming is continued at a first vacuuming speed.

[0041] In an optional solution of the present invention, the second vacuum module includes:

[0042] a second vacuuming unit, further vacuuming the vacuum box using a second vacuuming speed, the second vacuuming speed being no less than the first vacuuming speed;

[0043] The second detection unit detects in real time whether the pressure inside the vacuum box reaches a second preset vacuum pressure value: if so, vacuuming is stopped; if not, vacuuming is continued at a second vacuuming speed.

[0044] In an optional solution of the present invention, the liquid injection module is configured to open or close the liquid injection control valve, so that the liquid injection control valve injects liquid into the vehicle when in an open state.

[0045] In an optional solution of the present invention, the pressure relief module includes:

[0046] a first pressure relief unit configured to relieve pressure in the vacuum box at a first preset pressure relief speed until the pressure in the vacuum box reaches a third preset vacuum pressure value;

[0047] The second pressure relief unit is configured to further relieve the pressure of the vacuum box at a second preset pressure relief speed after the pressure in the vacuum box reaches a third preset vacuum pressure value, until the pressure in the vacuum box reaches a fourth preset vacuum pressure value.

[0048] A third aspect of the present invention provides a microcavity automatic liquid injection device, comprising a vacuum box assembly, an operating table assembly, a liquid injection assembly, and a control assembly;

[0049] The vacuum box assembly includes a vacuum box and a driving mechanism. The vacuum box is used to place the carrier and includes a box body and a box door. The driving mechanism is connected to the box door. The carrier includes a microcavity structure.

[0050] An operating table assembly, including a vacuum pump assembly connected to a vacuum box;

[0051] A liquid injection assembly, which is controlled and connected to the carrier;

[0052] The control assembly is respectively connected to the vacuum box assembly, the operating table assembly and the liquid injection assembly, and is used to control the driving mechanism to drive the box door to open and close the box body, control the vacuum pump assembly to evacuate or relieve the pressure of the vacuum box, and control the liquid injection assembly to inject liquid into the carrier.

[0053] In an optional solution of the present invention, the vacuum pump assembly includes a vacuum pump and a pressure relief valve, and the vacuum pump and the pressure relief valve are both connected to the vacuum box;

[0054] The control assembly is used to control the vacuum pump to evacuate the vacuum box, and to control the pressure relief valve to relieve pressure in the vacuum box.

[0055] In an optional solution of the present invention, the drive mechanism includes a switch signal component, which is connected to the control assembly signal. The control assembly determines whether the vacuum box is in a closed state or an open state based on the signal sent by the switch signal component.

[0056] In an optional solution of the present invention, the vacuum box further includes a pressure sensor, which is arranged in the box body, and the control assembly is connected to the pressure sensor signal to determine whether the pressure value inside the vacuum box reaches a preset value.

[0057] In an optional scheme of the present invention, the liquid injection assembly includes a liquid injection control valve and a liquid injection pipeline; the liquid injection pipeline is connected to the vehicle, the liquid injection control valve is arranged on the liquid injection pipeline, and the control assembly is used to open or close the liquid injection control valve so that the liquid injection pipeline injects liquid into the vehicle when the liquid injection control valve is in the open state.

[0058] In an optional solution of the present invention, the microcavity automatic liquid injection device further includes a frame, the frame including a frame body and a protective cover, a protective chamber is formed in the frame body, and the protective cover is movably connected to the frame body to open and close the protective chamber;

[0059] The vacuum box assembly is arranged in the protection room, and the operating table assembly is connected to the frame body and is located on one side of the protection room.

[0060] In an optional solution of the present invention, the control assembly is integrated into the operating console assembly.

[0061] In an optional solution of the present invention, the carrier also includes a liquid storage chamber, a liquid flow channel and an air storage chamber. The liquid storage chamber is used to store the liquid to be filled, the microcavity structure is arranged to overlap with at least part of the liquid flow channel, and the air storage chamber is used to store gas when the vacuum pump assembly evacuates the vacuum box.

[0062] Compared with the prior art, the present invention has the following beneficial effects:

[0063] In the solution provided by the present invention, first, the vacuum box is evacuated to a first level, so that the pressure inside the vacuum box is at a first preset vacuum pressure value, and liquid injection is performed in an environment where the carrier is at the first preset vacuum pressure value. Next, the vacuum box is evacuated to a second level, so that the pressure inside the vacuum box is at a second preset vacuum pressure value and the pressure is maintained for a first preset time, so that the carrier injected with liquid is exhausted in an environment where the second preset vacuum pressure value is. Finally, the vacuum box is depressurized, so that the pressure inside the vacuum box gradually increases. Under the influence of the gradually increasing ambient pressure, the liquid injected into the carrier flows into the microcavity structure to complete the filling.

[0064] It can be seen that in the present disclosure, a two-stage vacuuming method is adopted to ensure that the carrier is always in a negative pressure environment during the liquid injection process, and the air in the carrier is discharged as much as possible, so that the microcavity structure does not contain air, avoiding the formation of a gas-liquid mixture in the microcavity structure and affecting the detection results. BRIEF DESCRIPTION OF THE DRAWINGS

[0065] In order to more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the specific embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0066] FIG1 shows a block diagram of the steps of a microcavity automatic liquid injection method according to some embodiments of the present disclosure;

[0067] FIG2 shows a schematic diagram of a microcavity automatic liquid injection device according to some embodiments of the present disclosure;

[0068] FIG3 shows a schematic diagram of the vacuum box assembly 1 in the microcavity automatic liquid injection device in FIG2 ;

[0069] FIG4 shows a schematic diagram of the operating table assembly 2 in the microcavity automatic liquid injection device in FIG2 ;

[0070] FIG5 shows a partial cross-sectional view of a carrier according to some embodiments of the present disclosure;

[0071] FIG6 shows a block diagram of the connections of the various assemblies of the microcavity automatic liquid injection device in FIG2 ;

[0072] FIG7 shows a connection block diagram of a microcavity automatic liquid injection system according to some embodiments of the present disclosure;

[0073] FIG8 shows a flowchart of the process of automatically filling a microcavity with liquid by the automatic microcavity filling device in FIG2 .

[0074] In the above drawings, the components represented by the reference numerals are as follows:

[0075] 1. Vacuum box assembly; 11. Vacuum box; 111. Box body; 112. Box door; 113. Pressure sensor; 12. Drive mechanism; 121. Switch signal component

[0076] 2. Operation table assembly; 21. Vacuum pump assembly; 211. Vacuum pump; 212. Pressure relief valve;

[0077] 3. Liquid injection assembly; 31. Liquid injection control valve;

[0078] 4. Control assembly;

[0079] 5. Carrier; 51. Liquid storage cavity; 52. Liquid flow channel; 53. Gas storage cavity; 54. Microcavity structure

[0080] 6. Frame; 61. Frame body; 62. Protective cover; R. Protective room;

[0081] 71. First vacuum pumping module; 711. First vacuum pumping unit; 712. First detection unit; 72. Liquid injection module; 73. Second vacuum pumping module; 731. Second vacuum pumping unit; 732. Second detection unit; 74. Pressure maintaining module; 75. Pressure relief module; 751. First pressure relief unit; 752. Second pressure relief unit; 76. Execution module; 77. Detection module. DETAILED DESCRIPTION

[0082] In order to make the above and other features and advantages of the present invention more clear, the present invention is further described below with reference to the accompanying drawings. It should be understood that the specific embodiments given herein are for the purpose of explaining to those skilled in the art and are only exemplary and not restrictive.

[0083] FIG1 shows a flowchart of a method for automatically filling a microcavity according to some embodiments of the present disclosure. Referring to FIG1 , the method for automatically filling a microcavity includes the following steps.

[0084] In step S11 , the carrier 5 including the microcavity structure 54 is placed in the vacuum box 11 .

[0085] In some embodiments, a chamber is provided within the vacuum chamber 11, and a negative pressure environment is created by a vacuum pump. In practical applications, the carrier 5 can be a detection module loaded with a sequencing chip. As previously described, the sequencing chip has multiple microcavities, meaning that the carrier 5 includes a microcavity structure 54. Placing the carrier 5 within the vacuum chamber 11 places the microcavity structure 54 within a chamber capable of maintaining a negative pressure environment.

[0086] It should be noted that the microcavity structure 54 includes a plurality of microcavities with diameters ranging from tens of micrometers to hundreds of micrometers.

[0087] Step S12: evacuate the vacuum box 11 until the pressure of the vacuum box 11 reaches a first preset vacuum pressure value.

[0088] It is understandable that the vacuum box 11 can only be evacuated when the chamber inside the vacuum box 11 is isolated from the outside air, thereby forming a negative pressure environment inside the chamber. It should be noted that when the chamber inside the vacuum box 11 is isolated from the outside air, the vacuum box 11 is in a closed state.

[0089] Therefore, between step S11 and step S12, the method further includes:

[0090] Step S111 , closing the vacuum box 11 .

[0091] Step S112 , detecting whether the vacuum box 11 is in a closed state, and evacuating the vacuum box 11 if the vacuum box 11 is in a closed state.

[0092] Understandably, closing the vacuum box 11 means that the vacuum box 11 forms a chamber isolated from the outside air, that is, the vacuum box 11 is switched to a closed state. Executing step S111 does not guarantee that the vacuum box 11 is in the closed state. Therefore, step S112 further determines whether the vacuum box 11 is in the closed state. Only after confirming that the vacuum box 11 is in the closed state can the vacuuming operation be performed. Therefore, step S112 ensures that the vacuum box 11 is in the closed state, avoiding ineffective vacuuming operations.

[0093] As mentioned above, after ensuring that the vacuum box 11 is in a closed state, step S12 can be executed. In step S12, the pressure in the vacuum box 11 is set to a first preset vacuum pressure value through vacuum operation, that is, the carrier 5 is placed in a negative pressure environment of the first preset vacuum pressure value. By executing step S12, preparation is made for the liquid injection operation on the carrier 5.

[0094] In the present disclosure, step S12 includes:

[0095] Step S121 : vacuuming the vacuum box 11 at a first vacuuming speed.

[0096] Step S122 , detecting in real time whether the pressure in the vacuum box 11 reaches a first preset vacuum pressure value; if so, stopping vacuuming; if not, continuing vacuuming at a first vacuuming speed.

[0097] It can be understood that before the liquid injection operation is performed on the carrier 5 , steps S121 and S122 are performed to ensure that the carrier 5 is in a negative pressure environment of the first preset vacuum pressure value.

[0098] Step S13 , after the pressure in the vacuum box 11 reaches a first preset vacuum pressure value, injecting liquid into the carrier 5 .

[0099] This step is the liquid injection step, and the carrier 5 is injected with liquid under a first preset vacuum pressure value. As can be understood, because the carrier 5 is in a negative pressure environment, the liquid is injected into the carrier 5 under the pressure difference between the external atmospheric pressure and the first preset vacuum pressure value. Thus, the carrier 5 is injected with liquid under a negative pressure environment to minimize the risk of air entering the microcavity structure.

[0100] In the present disclosure, step S13 includes:

[0101] Step S131, opening the liquid injection control valve 31;

[0102] Step S132, injecting liquid into the carrier 5 and continuing for a second preset time;

[0103] Step S133: close the liquid injection control valve 31.

[0104] Specifically, steps S131 to S133 complete the injection of liquid into the carrier 5. Opening the injection control valve 31 opens the injection line connected to the carrier 5, allowing the liquid to flow into the carrier 5. The volume of liquid injected into the carrier 5 can be adjusted by controlling the second preset opening time of the injection control valve 31. When the volume of liquid injected into the carrier 5 meets the test requirements, the injection control valve 31 is closed to complete the injection.

[0105] In step S14 , after the liquid is injected into the carrier 5 , the vacuum box 11 is further evacuated until the pressure inside the vacuum box 11 reaches a second preset pressure value.

[0106] Specifically, after the liquid injection operation is completed for the carrier 5 under the condition that the pressure in the vacuum box 11 is at the first preset pressure value, step S14 is executed to further evacuate the vacuum box 11 under the condition that the pressure in the vacuum box 11 is at the first preset pressure value, so that the pressure in the vacuum box 11 is at the second preset pressure value. It should be noted that the carrier 5 contains air, and during the process of further evacuating the vacuum box 11, the pressure in the vacuum box 11 gradually decreases, and the air contained in the carrier 5 is gradually discharged.

[0107] Obviously, the second preset vacuum pressure value is lower than the first preset vacuum pressure value. Vacuum pressure refers to the situation where the absolute pressure is lower than the atmospheric pressure. The larger the absolute value of the vacuum pressure value, the better the vacuum degree.

[0108] In the present disclosure, step S14 includes:

[0109] Step S141, further evacuating the vacuum box 11 using a second evacuation speed, wherein the second evacuation speed is not less than the first evacuation speed;

[0110] Step S142 , detecting in real time whether the pressure inside the vacuum box 11 reaches a second preset vacuum pressure value: if so, stopping vacuuming; if not, continuing vacuuming at a second vacuuming speed.

[0111] Through step S141 and step S142, it is ensured that the pressure in the vacuum box 11 is at the second preset vacuum pressure value. As mentioned above, the first preset vacuum pressure value and the second preset time are the decisive factors for adjusting the volume of liquid injected into the carrier 5, and the first vacuuming speed directly affects the error between the actual pressure in the vacuum box 11 and the first preset vacuum pressure value. It can be understood that the smaller the first vacuuming speed, the smaller the error between the actual pressure in the vacuum box 11 and the first preset vacuum pressure value, and thus the higher the accuracy of controlling the volume of injected liquid. Of course, if the first vacuuming speed is too small, the vacuuming operation time is too long, which seriously affects the injection efficiency. Therefore, the first vacuuming speed should be appropriate. In specific applications, the error requirement between the actual pressure in the vacuum box 11 and the second preset vacuum pressure value is not high. Preferably, the second vacuuming speed is not less than the first vacuuming speed to avoid the entire vacuuming operation time being too long.

[0112] In step S15, the vacuum chamber 11 is maintained at a second predetermined vacuum pressure for a first predetermined period of time. While the carrier 5 is at the second predetermined vacuum pressure, the first predetermined period of time is maintained to expel as much air from the carrier 5 as possible. This is done to minimize the presence of air in the microcavity structure 54 before the liquid is filled into the microcavity structure 54.

[0113] In step S16 , after maintaining the first preset time, the vacuum box 11 is depressurized to allow the liquid to fill the microcavity structure.

[0114] Specifically, the vacuum box 11 is depressurized, i.e., the vacuum box 11 is connected to the outside air, allowing the outside air to enter the vacuum box 11. It is understood that during the depressurization process, the pressure in the vacuum box 11 gradually increases. Under the influence of the increasing ambient pressure, the liquid in the carrier 5 flows toward the microcavity structure 54 and fills the microcavity structure 54, thus completing the entire liquid injection process.

[0115] In the microcavity automatic liquid injection method provided by the present invention, first, the vacuum box 11 is subjected to the first stage of vacuum pumping, so that the pressure inside the vacuum box 11 is at a first preset vacuum pressure value, and liquid injection is performed in an environment where the carrier 5 is at the first preset vacuum pressure value. Next, the vacuum box 11 is subjected to the second stage of vacuum pumping, so that the pressure inside the vacuum box 11 is at a second preset vacuum pressure value and the pressure is maintained for a first preset time, so that the carrier 5 injected with liquid is exhausted in an environment of the second preset vacuum pressure value. Finally, the vacuum box 11 is depressurized, so that the pressure inside the vacuum box 11 gradually increases. Under the action of the gradually increasing ambient pressure, the liquid injected into the carrier 5 flows to the microcavity structure 54 to complete the filling.

[0116] It can be seen that in the present disclosure, a two-stage vacuum pumping method is adopted to ensure that the carrier 5 is always in a negative pressure environment during the liquid injection process, and the air in the carrier 5 is discharged as much as possible, so that the microcavity structure does not contain air, avoiding the formation of a gas-liquid mixture in the microcavity structure to affect the detection results.

[0117] In the present disclosure, step S16 includes:

[0118] Step S161 : depressurizing the vacuum box 11 at a first preset depressurization speed until the pressure in the vacuum box 11 reaches a third preset vacuum pressure value.

[0119] Step S162 : After the pressure in the vacuum box 11 reaches the third preset vacuum pressure value, the vacuum box 11 is further depressurized at a second preset pressure relief speed until the pressure in the vacuum box 11 reaches a fourth preset vacuum pressure value.

[0120] In the present disclosure, a two-stage pressure relief method is used to relieve the pressure of the vacuum box 11. During the first stage of pressure relief, pressure relief is performed at a first preset pressure relief rate. The pressure in the vacuum box 11 gradually increases, and the liquid in the carrier 5 flows toward and fills the microcavity structure 54. It can be understood that the smaller the first preset pressure relief rate, the slower the rate of pressure change in the vacuum box 11, and accordingly, the slower the flow rate of the liquid in the carrier 5, which facilitates the fluid to fully fill the microcavity structure 54. When the pressure in the vacuum box 11 reaches the third preset vacuum pressure value, it is determined that the liquid has completely filled the microcavity structure 54, and the first stage of pressure relief is completed.

[0121] After the first stage of pressure relief is completed, the second stage of pressure relief is performed at a second preset pressure relief rate. The second stage of pressure relief is determined to be complete when the pressure within the vacuum box 11 reaches a fourth preset vacuum pressure value. It should be noted that the fourth preset vacuum pressure value is close to atmospheric pressure, which facilitates switching the state of the vacuum box 11.

[0122] It is understandable that in the above description, the fourth preset vacuum pressure value is greater than the third preset vacuum pressure value, and the second preset pressure relief speed should be as fast as possible to avoid excessive pressure relief time. In actual application, the second preset pressure relief speed far exceeds the first preset pressure relief speed.

[0123] It is understood that during the aforementioned vacuuming and pressure relief process, the second preset vacuum pressure value achieved during the second stage of vacuuming is the minimum. In specific applications, the third preset vacuum pressure value is less than the first preset vacuum pressure value. In other words, the third preset vacuum pressure value is between the first preset pressure value and the second preset pressure value. In some preferred embodiments, the absolute value of the difference between the third preset vacuum pressure value and the first preset vacuum pressure value is greater than the absolute value of the difference between the third preset vacuum pressure value and the second preset vacuum pressure value.

[0124] FIG2 shows a schematic diagram of a microcavity automatic liquid injection device provided according to some embodiments of the present disclosure. FIG3 shows a schematic diagram of the vacuum box assembly 1 in the microcavity automatic liquid injection device in FIG2 . FIG4 shows a schematic diagram of the operating table assembly 2 in the microcavity automatic liquid injection device in FIG2 . FIG6 shows a connection block diagram of the various assemblies of the microcavity automatic liquid injection device in FIG2 . Referring to FIG2 , FIG3 and FIG6 , the microcavity automatic liquid injection device includes a vacuum box assembly 1, an operating table assembly 2, an injection assembly 3 and a control assembly 4. The control assembly 4 is connected to the vacuum box assembly 1, the operating table assembly 2 and the injection assembly 3, respectively. The microcavity automatic liquid injection device can implement the above-mentioned microcavity automatic liquid injection method.

[0125] The vacuum box assembly 1 includes a vacuum box 11 and a driving mechanism 12. The vacuum box 11 includes a box body 111 and a box door 112. The driving mechanism 12 is connected to the box door 112. The control assembly 4 is connected to the driving mechanism 12 signal, so that it can control the driving mechanism 12 to drive the box door 112 to open and close the box body 111, thereby switching the vacuum box 11 between a closed state and an open state.

[0126] It can be understood that in step S11, the driving mechanism 12 drives the box door 112 to open the box body 111, so that the vacuum box 11 is in the open state. Only when the vacuum box 11 is in the open state can the carrier 5 be placed in the vacuum box 11. In step S111, the driving mechanism 12 drives the box door 112 to close the box body 111, so that the vacuum box 11 switches from the open state to the closed state.

[0127] Referring to FIG. 3 , in the illustrated embodiment, the drive mechanism 12 is a pneumatic drive mechanism, which utilizes a cylinder as a power component to drive the door 112 to open and close the housing 111. Of course, the drive mechanism 12 is not limited to this. For example, if the drive mechanism 12 is a hydraulic drive mechanism, the drive mechanism 12 may utilize a cylinder as a power component to drive the door 112 to open and close the housing. For example, if the drive mechanism 12 is an electric drive mechanism, the drive mechanism 12 may utilize an electric push rod as a power component. As long as the drive mechanism 12 can drive the door 112 to open and close the housing 111, no specific limitation is imposed herein.

[0128] In the present disclosure, the drive mechanism 12 includes a switch signal component 121, which is signal-connected to the control assembly 4 for sending a switch signal to the control assembly 4. The control assembly 4 determines the state of the vacuum box 11 based on the switch signal.

[0129] It can be understood that in step S112 , the control assembly 4 detects whether the vacuum box 11 is in the closed state according to the switch signal sent by the switch signal component 121 .

[0130] For ease of understanding, please refer to Figure 3, in which the drive mechanism 12 is taken as an example of a pneumatic drive mechanism. The drive mechanism 12 includes a cylinder, and magnetic induction switches are provided at both ends of the cylinder barrel of the cylinder. The magnetic induction switch serves as a switch signal component 121. When the magnetic induction switch close to the box door 112 is energized, the box door 112 opens the box body 111, confirming that the vacuum box 11 is in the open state; when the magnetic induction switch away from the box door 112 is energized, the box door 112 closes the box body 111, confirming that the vacuum box 11 is in the closed state.

[0131] Of course, the switch signal component 121 is not limited to this embodiment. For example, the switch signal component 121 may be a proximity switch disposed on the housing 111. When the housing door 112 closes the housing 111, the proximity switch is energized, confirming that the vacuum chamber 11 is in the closed state. When the housing door 112 is away from the housing 111, the proximity switch is de-energized, confirming that the vacuum chamber 11 is in the open state. The switch signal component 121 is not limited to the above embodiment; it is sufficient to ensure that the control assembly 4 can determine the state of the vacuum chamber 11 based on the switch signal transmitted by the switch signal component 121.

[0132] It should be noted that if, after the control assembly 4 issues a signal to close the door 112, it is detected that the vacuum chamber 11 is still open, this indicates that the drive mechanism 12 has not yet fully engaged. Different types of drive mechanisms 12 employ different response methods. For example, if the drive mechanism 12 is a pneumatic drive mechanism, with the cylinder serving as the power component and the cylinder not fully engaged, the preferred response method is to issue an abnormality alarm to prompt manual intervention. For example, if the drive mechanism 12 is an electric drive mechanism, with the electric push rod serving as the power component and the electric push rod not fully engaged, the preferred response method is to allow the electric push rod to continue its engagement.

[0133] In the present disclosure, the operating table assembly 2 includes a vacuum pump assembly 21 , which is connected to the vacuum box 11 . The control assembly 4 is connected to the operating table assembly 2 to control the vacuum pump assembly 21 to evacuate or depressurize the vacuum box 11 .

[0134] Furthermore, the vacuum pump assembly 21 includes a vacuum pump 211 and a pressure relief valve 212. Both the vacuum pump 211 and the pressure relief valve 212 are connected to the vacuum tank 11, specifically via a gas pipeline (not shown). The control assembly 4 is used to control the vacuum pump 211 to evacuate the vacuum tank 11 and to control the pressure relief valve 212 to relieve pressure from the vacuum tank 11.

[0135] It is understood that in steps S12 and S14, the vacuum box 11 is evacuated by the vacuum pump 211. In steps S121 and S141, the vacuum pump 211's evacuation speed is controlled to evacuate the vacuum box 11 at a first evacuation speed or a second evacuation speed. In step S15, the vacuum pump 211 is controlled to stop operating for a first preset time period, so that the vacuum box 11 maintains the second preset vacuum pressure for the first preset time period.

[0136] In step S16, the vacuum pump 211 is in a stopped state, and the pressure relief valve 212 is opened to relieve the pressure in the vacuum box 11. For steps S161 and S162, in an optional embodiment, controlling the opening of the pressure relief valve 212 allows the vacuum box 11 to relieve pressure at a first preset pressure relief rate or a second preset pressure relief rate. In another optional embodiment, the vacuum box 11 is connected to two pressure relief lines, and the pressure relief valve 212 includes a slow pressure relief valve and a fast pressure relief valve. The slow pressure relief valve and the fast pressure relief valve are respectively arranged on the two pressure relief lines. The slow pressure relief valve is configured to relieve pressure at a first preset pressure relief rate when opened, and the fast pressure relief valve is configured to relieve pressure at a second preset pressure relief rate when opened. Pressure relief is achieved by switching the pressure relief valves 212 with different pressure relief rates.

[0137] In the present disclosure, the vacuum box 11 further includes a pressure sensor 113, which is disposed on the box body 111. The control assembly 4 is signal-connected to the pressure sensor 113 for detecting the pressure within the vacuum box 11. It is understood that in steps 122, 142, S161, and S162, the pressure sensor 113 is used to detect in real time whether the pressure within the vacuum box 11 has reached a preset value.

[0138] In the present disclosure, the liquid injection assembly 3 includes a liquid injection control valve 31 and a liquid injection pipeline (not shown). The liquid injection pipeline is connected to the carrier 5, and the liquid injection control valve 31 is disposed on the liquid injection pipeline. The control assembly 4 is used to open or close the liquid injection control valve 31 so that the liquid injection pipeline injects liquid into the carrier 5 when the liquid injection control valve 31 is open.

[0139] It can be understood that steps S131 to S133 are executed by controlling the liquid injection assembly 3 through the control assembly 4. After the control assembly 4 controls the liquid injection control valve 31 to be in an open state and maintains it for a second preset time, the liquid injection control valve 31 is switched to a closed state to complete the injection of liquid into the carrier 5.

[0140] Referring to Figures 2 and 4 , in the present disclosure, the control assembly 4 is integrated into the console assembly 2. In a specific application, the console assembly 2 includes a cabinet, and the control assembly 4 is mounted in the cabinet. In some embodiments, the control assembly 4 includes a control module and an input module.

[0141] For example, the input module includes buttons and a touch screen display mounted on the cabinet. The buttons include a start button for issuing a start signal, and the touch screen display allows for input of preset parameters, including a preset vacuum pressure value, a vacuuming speed, and a preset pressure relief speed. Upon receiving the start signal, the control module can issue a command, causing the microcavity automatic liquid injection device to automatically execute the above method according to the preset parameters, thereby achieving automated liquid injection.

[0142] It should be noted that the control module includes but is not limited to: a general-purpose processor, a special-purpose processor, a conventional processor, a digital signal processor (DSP), multiple microprocessors, one or more microprocessors associated with a DSP core, a controller, a microcontroller, a single-chip microcomputer, an application-specific integrated circuit (ASIC), a field-programmable gate array (FPGA) circuit, any other type of integrated circuit (IC) and a state machine, etc.

[0143] In the present disclosure, the microcavity automatic liquid injection device further includes a frame 6, which includes a frame body 61 and a protective cover 62. A protective chamber R is formed within the frame body 61, and the protective cover 62 is movably connected to the frame body 61 to open and close the protective chamber R. The vacuum box assembly 1 is disposed within the protective chamber R, and the operating table assembly 2 is connected to the frame body 61 and is located on one side of the protective chamber R.

[0144] In a specific application, the frame body 61 is composed of a support frame and a sheet metal cover covering the support frame, forming a protective chamber R. The protective cover 62 is movably connected to the frame body 61 via a linear guide mechanism, thereby enabling the opening and closing of the protective chamber R. It can be understood that various cables and pipelines between the vacuum box assembly 1 and the operating table assembly 2 can be arranged on the frame 6, and the frame 6 supports and protects the vacuum box assembly 1 and the operating table assembly 2, providing a good environment for ensuring normal operation of the device.

[0145] In order to facilitate understanding of the technical solution disclosed in the present invention, the following is an example of the process of realizing automatic microcavity liquid injection through the microcavity automatic liquid injection device. Please refer to Figure 5. It should be supplemented that the carrier 5 used in the liquid injection process also includes a liquid storage chamber 51, a liquid flow channel 52 and an air storage chamber 53. The liquid storage chamber 51 is connected to the liquid injection pipeline and is used to store the liquid to be filled. The microcavity structure 54 is arranged to overlap with at least part of the liquid flow channel 52. The air storage chamber 53 is used to store gas when the vacuum pump assembly 21 evacuates the vacuum box 11. Figure 8 shows a flowchart of the process of automatic microcavity liquid injection through the microcavity automatic liquid injection device. The following is a detailed explanation in combination with Figures 5 and 8 and taking an injection volume of 300ul as an example.

[0146] After the device is powered on and the system is initialized, the vacuum chamber 11 is in the open state. At this point, the protective cover 62 can be opened, and the carrier 5 can be placed in the vacuum chamber 11 before the protective cover 62 is closed. When the start button is pressed, the drive mechanism 12 is controlled to drive the chamber door 112 to close the chamber 111, switching the vacuum chamber 11 from the open state to the closed state. After the drive mechanism 12 has reached its full position, the switch signal component 121 sends a switch signal to the control module to confirm that the vacuum chamber 11 is in the closed state.

[0147] After confirming that the vacuum box 11 is in the closed state, the vacuum pump 211 is turned on and the vacuum pump 211 is controlled to evacuate the vacuum box 11 at a first evacuation speed. In this embodiment, the first evacuation speed is 1.5 m / s. 3 Furthermore, the pressure in the vacuum box 11 is detected in real time by the pressure sensor 113. When the pressure in the vacuum box 11 reaches a first preset vacuum pressure value, the vacuum pump 211 is turned off, thus completing the first stage of vacuuming.

[0148] Next, the liquid injection control valve 31 is opened and maintained in the open state for a second preset time, so that the liquid injection time reaches the second preset time, thereby completing the injection of liquid into the liquid storage chamber 51. It should be noted that, in a specific application, the second preset time is 1ms to 200ms, the first preset vacuum pressure value is -5KPa to -50KPa, and the first vacuum pumping speed is 0.1m 3 / h to 1.5m 3 In this embodiment, the first preset vacuum pressure value is -15KPa, and the second preset time length is 10ms. By coordinating the first preset vacuum pressure value and the second preset time length, the injection volume can be accurately controlled to reach 300ul.

[0149] It is understandable that, under the condition that the injection volume is determined, the larger the first preset vacuum pressure value is, the smaller the second preset time length is. In other words, under the condition that the injection volume is determined, the first preset vacuum pressure value and the second preset time length are negatively correlated.

[0150] Next, continue to turn on the vacuum pump 211, control the vacuum pump 211 to further evacuate the vacuum box 11 at the second vacuuming speed, and use the pressure sensor 113 to detect the pressure in the vacuum box 11 in real time. When the pressure in the vacuum box 11 reaches the second preset vacuum pressure value, turn off the vacuum pump 211, and the second stage of vacuuming is completed. After the second stage of vacuuming is completed, the pressure in the vacuum box 11 is maintained at the second preset vacuum pressure value for the first preset time. In this embodiment, the second vacuuming speed is 14.4m 3 / h, the second preset vacuum pressure value is -98Kpa, and the first preset time is 60000ms.

[0151] It can be seen that in the two-stage vacuuming process, the second vacuuming speed is faster than the first vacuuming speed. The vacuuming is performed slowly first to slowly allow the pressure in the vacuum box 11 to reach the first preset vacuum pressure value to ensure the accuracy of the injected liquid volume. Then the vacuuming is performed quickly to quickly allow the pressure in the vacuum box 11 to reach the second preset vacuum pressure value to avoid excessive vacuuming time.

[0152] It should be noted that when liquid is injected into the liquid storage chamber 51, the liquid flow channel 52 is closed and contains air. During the second-stage vacuuming process, the pressure in the vacuum box 11 gradually decreases, and the air pressure in the liquid flow channel 52 is higher than the pressure in the vacuum box 11, so it can be discharged from the liquid storage chamber 51. The vacuum box 11 is maintained at the second preset vacuum pressure value for the first preset time period to expel as much air as possible from the liquid flow channel 52.

[0153] Then, after maintaining the pressure for the first preset period of time, the pressure relief valve 212 is opened, and the pressure relief valve 212 is controlled to relieve the pressure on the vacuum box 11 at a first preset pressure relief speed. When the pressure in the vacuum box 11 reaches the third preset vacuum pressure value, the pressure relief valve 212 is controlled to further relieve the pressure on the vacuum box 11 at a second preset pressure relief speed until the pressure in the vacuum box 11 reaches the fourth preset vacuum pressure value.

[0154] In this embodiment, during the first-stage pressure relief process, as the pressure within the vacuum box 11 gradually increases, the liquid in the liquid storage chamber 51 flows toward the liquid flow channel 52 under the action of the pressure within the vacuum box 11, and then flows along the liquid flow channel 52 toward the gas storage chamber 53. During this process, the liquid passes through the microcavity structure 54 to fill it. Secondly, the air remaining in the liquid flow channel 52 is compressed into the gas storage chamber 53, thereby preventing the formation of a gas-liquid mixture in the microcavity structure 54. During the second-stage pressure relief process, the pressure within the vacuum box 11 is rapidly brought close to atmospheric pressure.

[0155] In this embodiment, the first pressure relief speed is 0.1m 3 / h, the third preset vacuum pressure value is -85Kpa, and the second pressure relief speed is 1m 3 / h, and the fourth preset vacuum pressure value is -0.5 kPa. It can be seen that in this embodiment, a two-stage pressure relief scheme is adopted, which is first slow pressure relief and then fast pressure relief. The slow pressure relief is mainly to slow down the flow of liquid in the flow channel 52, thereby achieving the purpose of effectively filling the microcavity structure 54 and ensuring the filling effect; the fast pressure relief is mainly to shorten the pressure relief time, so that the pressure in the vacuum box 11 quickly approaches atmospheric pressure.

[0156] Next, when the pressure within the vacuum box 11 reaches a fourth predetermined vacuum pressure value, the drive mechanism 12 is controlled to open the vacuum box 11, switching the vacuum box 11 from a closed state to an open state. In this embodiment, the fourth predetermined vacuum pressure value is close to atmospheric pressure, and the pressure difference between the interior of the vacuum box 11 and the outside atmosphere is not excessive, thereby ensuring that the vacuum box 11 can be opened normally by the drive mechanism 12.

[0157] Finally, it is determined whether the vacuum box 11 is in the open state according to the signal sent by the switch signal component 121. If it is determined that the vacuum box 11 is in the open state, it is confirmed that the entire liquid injection process is completed.

[0158] Please refer to Figure 7. As an implementation of the above method, Figure 7 shows a connection block diagram of a microcavity automatic liquid injection system provided according to some embodiments of the present disclosure. The system corresponds to the method embodiment shown in Figure 1, and the system can be specifically applied to various electronic devices.

[0159] Please refer to Figure 7. The microcavity automatic liquid injection system includes a first vacuum pumping module 71, a liquid injection module 72, a second vacuum pumping module 73, a pressure maintaining module 74 and a pressure relief module 75. The first vacuum pumping module 71 is configured to vacuum the vacuum box 11 until the pressure inside the vacuum box 11 reaches a first preset vacuum pressure value. The liquid injection module 72 is configured to inject liquid into the carrier 5 after the pressure inside the vacuum box 11 reaches the first preset vacuum pressure value. The second vacuum pumping module 73 is configured to further vacuum the vacuum box 11 after the liquid is injected into the carrier 5 until the pressure of the vacuum box 11 reaches a second preset vacuum pressure value. The pressure maintaining module 74 is configured to maintain the vacuum box 11 at the second preset vacuum pressure value for a first preset time. The pressure relief module 75 is configured to relieve the pressure of the vacuum box 11 after maintaining the first preset time, so that the liquid is filled in the microcavity structure.

[0160] In some optional embodiments, the microcavity automatic liquid injection system further includes an execution module 76 and a detection module 77. The execution module 76 is configured to open or close the vacuum box 11. The detection module 77 is configured to detect whether the vacuum box 11 is in a closed state and, if the vacuum box 11 is in a closed state, evacuate the vacuum box 11.

[0161] In some optional embodiments, the first vacuuming module 71 includes a first vacuuming unit 711 and a first detection unit 712. The first vacuuming unit 711 vacuums the vacuum box 11 at a first vacuuming speed. The first detection unit 712 detects in real time whether the pressure inside the vacuum box 11 reaches a first preset vacuum pressure value. If so, vacuuming is stopped; if not, vacuuming is continued at the first vacuuming speed.

[0162] In some optional embodiments, the second vacuuming module 73 includes a second vacuuming unit 731 and a second detection unit 732. The second vacuuming unit 731 further evacuates the vacuum box 11 at a second vacuuming speed, which is no less than the first vacuuming speed. The second detection unit 732 detects in real time whether the pressure inside the vacuum box 11 reaches a second preset vacuum pressure value. If so, vacuuming is stopped; if not, vacuuming is continued at the second vacuuming speed.

[0163] In some optional embodiments, the liquid injection module 72 is configured to open or close the liquid injection control valve 31 so that the liquid injection control valve 31 injects liquid into the vehicle 5 when in the open state.

[0164] In some optional embodiments, the pressure relief module 75 includes a first pressure relief unit 751 and a second pressure relief unit 752. The first pressure relief unit 751 is configured to relieve pressure from the vacuum box 11 at a first preset pressure relief rate until the pressure inside the vacuum box 11 reaches a third preset vacuum pressure value. The second pressure relief unit 752 is configured to further relieve pressure from the vacuum box 11 at a second preset pressure relief rate after the pressure inside the vacuum box 11 reaches the third preset vacuum pressure value until the pressure inside the vacuum box 11 reaches a fourth preset vacuum pressure value.

[0165] It is understandable that each module recorded in the system corresponds to each step in the above method. Therefore, the operations, features and beneficial effects described above for the method are also applicable to the system and the modules contained therein, and will not be repeated here.

[0166] The flowcharts and block diagrams in the accompanying drawings illustrate the possible implementation architecture, functions and operations of the systems, methods and computer program products according to various embodiments of the present disclosure. In this regard, each box in the flowchart or block diagram can represent a module, program segment, or a part of code, and the module, program segment, or a part of code contains one or more executable instructions for implementing the specified logical function. It should also be noted that in some alternative implementations, the functions marked in the box can also occur in a different order than the order marked in the accompanying drawings. For example, two boxes represented in succession can actually be executed substantially in parallel, and they can sometimes be executed in the opposite order, depending on the functions involved. It should also be noted that each box in the block diagram and / or flowchart, as well as the combination of boxes in the block diagram and / or flowchart, can be implemented using a dedicated hardware-based system that performs the specified function or operation, or can be implemented using a combination of dedicated hardware and computer instructions.

[0167] It should be noted that the concepts of "first" and "second" mentioned in this disclosure are only used to distinguish different devices, modules or units, and are not used to limit the order or interdependence of the functions performed by these devices, modules or units.

[0168] Although the embodiments of the present invention have been shown and described above, it will be understood that the above embodiments are illustrative and are not to be construed as limitations on the present invention. A person skilled in the art may change, modify, replace and modify the above embodiments within the scope of the present invention.

Claims

1. A microcavity automatic liquid injection method, characterized in that: The microcavity automatic liquid injection method comprises: placing a carrier including a microcavity structure in a vacuum chamber; evacuating the vacuum box until the pressure inside the vacuum box reaches a first preset vacuum pressure value; After the pressure in the vacuum box reaches the first preset vacuum pressure value, injecting liquid into the carrier; After the liquid is injected into the carrier, the vacuum box is further evacuated until the pressure in the vacuum box reaches a second preset vacuum pressure value; maintaining the vacuum box at the second preset vacuum pressure value for a first preset time period; After maintaining the first preset time, the vacuum box is depressurized to allow the liquid to fill the microcavity structure.

2. The microcavity automatic liquid injection method according to claim 1, characterized in that: After placing the carrier in the vacuum box and before evacuating the vacuum box, the method further includes: closing the vacuum box; Detecting whether the vacuum box is in a closed state, and evacuating the vacuum box when the vacuum box is in the closed state.

3. The microcavity automatic liquid injection method according to claim 1, characterized in that: The vacuum box is evacuated until the pressure in the vacuum box reaches a first preset vacuum pressure value, comprising: evacuating the vacuum box at a first vacuuming speed; Real-time detection is performed to determine whether the pressure in the vacuum box reaches a first preset vacuum pressure value: if so, vacuuming is stopped; if not, vacuuming is continued at the first vacuuming speed.

4. The microcavity automatic liquid injection method according to claim 3, characterized in that: Further evacuating the vacuum box until the pressure of the vacuum box reaches a second preset vacuum pressure value, comprising: further evacuating the vacuum box using a second evacuation speed, wherein the second evacuation speed is not less than the first evacuation speed; Real-time detection is performed to determine whether the pressure inside the vacuum box reaches the second preset vacuum pressure value: if so, vacuuming is stopped; if not, vacuuming is continued at the second vacuuming speed.

5. The microcavity automatic liquid injection method according to claim 1, characterized in that: Injecting the liquid into the vehicle comprises: Open the injection control valve; injecting liquid into the carrier for a second predetermined time period; Close the filling control valve.

6. The microcavity automatic liquid injection method according to claim 1, characterized in that: Relieving the pressure of the vacuum box, comprising: Relieving pressure from the vacuum box at a first preset pressure relief rate until the pressure in the vacuum box reaches a third preset vacuum pressure value; After the pressure in the vacuum box reaches the third preset vacuum pressure value, the vacuum box is further depressurized at a second preset pressure relief speed until the pressure in the vacuum box reaches a fourth preset vacuum pressure value.

7. The microcavity automatic liquid injection method according to claim 6, characterized in that: The first preset pressure relief speed is smaller than the second preset pressure relief speed.

8. A micro-cavity automatic liquid injection system, characterized in that: For implementing the microcavity automatic liquid injection method according to any one of claims 1 to 7, a carrier is placed in a vacuum box, and the microcavity automatic liquid injection system comprises: a first vacuuming module, configured to evacuate the vacuum box until the pressure in the vacuum box reaches a first preset vacuum pressure value; a liquid injection module, configured to inject liquid into the carrier after the pressure in the vacuum box reaches a first preset vacuum pressure value; a second vacuuming module, configured to further vacuum the vacuum box after the liquid is injected into the carrier, until the pressure of the vacuum box reaches a second preset vacuum pressure value; a pressure maintaining module, configured to maintain the vacuum box at the second preset vacuum pressure value for a first preset time period; The pressure relief module is configured to relieve the pressure of the vacuum box after maintaining the first preset time period, so that the liquid is filled in the microcavity structure.

9. The microcavity automatic liquid injection system according to claim 8, characterized in that: The microcavity automatic liquid injection system also includes: an execution module, configured to open or close the vacuum box; The detection module is used to detect whether the vacuum box is in a closed state, and to evacuate the vacuum box when the vacuum box is in the closed state.

10. The microcavity automatic liquid injection system according to claim 8, characterized in that: The first vacuum module includes: a first vacuuming unit for vacuuming the vacuum box at a first vacuuming speed; The first detection unit detects in real time whether the pressure inside the vacuum box reaches a first preset vacuum pressure value: if so, the vacuuming is stopped; if not, the vacuuming is continued at a first vacuuming speed.

11. The microcavity automatic liquid injection system according to claim 8, characterized in that: The second vacuum module includes: a second vacuuming unit, configured to further vacuum the vacuum box using a second vacuuming speed, wherein the second vacuuming speed is not less than the first vacuuming speed; The second detection unit detects in real time whether the pressure inside the vacuum box reaches a second preset vacuum pressure value: if so, the vacuuming is stopped; if not, the vacuuming is continued at a second vacuuming speed.

12. The microcavity automatic liquid injection system according to claim 8, characterized in that: The liquid injection module is configured to open or close the liquid injection control valve, so that the liquid injection control valve injects liquid into the carrier when in an open state.

13. The microcavity automatic liquid injection system according to claim 8, characterized in that: The pressure relief module includes: a first pressure relief unit configured to relieve pressure from the vacuum box at a first preset pressure relief speed until the pressure in the vacuum box reaches a third preset vacuum pressure value; The second pressure relief unit is configured to further relieve the pressure of the vacuum box at a second preset pressure relief speed after the pressure in the vacuum box reaches a third preset vacuum pressure value, until the pressure in the vacuum box reaches a fourth preset vacuum pressure value.

14. A micro-cavity automatic liquid injection device, characterized in that: Including vacuum box assembly, operating table assembly, injection assembly and control assembly; The vacuum box assembly includes a vacuum box and a driving mechanism. The vacuum box is used to place a carrier and includes a box body and a box door. The driving mechanism is connected to the box door. The carrier includes a microcavity structure. An operating table assembly, including a vacuum pump assembly, wherein the vacuum pump assembly is connected to the vacuum box; a liquid injection assembly, controlledly connected to the carrier; The control assembly is respectively connected to the vacuum box assembly, the operating table assembly and the liquid injection assembly, and is used to control the driving mechanism to drive the box door to open and close the box body, control the vacuum pump assembly to evacuate or relieve the pressure of the vacuum box, and control the liquid injection assembly to inject liquid into the carrier.

15. The microcavity automatic liquid injection device according to claim 14, characterized in that: The vacuum pump assembly includes a vacuum pump and a pressure relief valve, and both the vacuum pump and the pressure relief valve are connected to the vacuum box; The control assembly is used to control the vacuum pump to evacuate the vacuum box, and to control the pressure relief valve to relieve pressure from the vacuum box.

16. The microcavity automatic liquid injection device according to claim 14, characterized in that: The driving mechanism includes a switch signal component, which is connected to the control assembly by signal. The control assembly determines whether the vacuum box is in a closed state or an open state according to the signal sent by the switch signal component.

17. The microcavity automatic liquid injection device according to claim 14, characterized in that: The vacuum box further includes a pressure sensor, which is disposed on the box body. The control assembly is connected to the pressure sensor signal to determine whether the pressure value inside the vacuum box reaches a preset value.

18. The microcavity automatic liquid injection device according to claim 14, characterized in that: The liquid injection assembly includes a liquid injection control valve and a liquid injection pipeline; The liquid injection pipeline is connected to the carrier, the liquid injection control valve is arranged on the liquid injection pipeline, and the control assembly is used to open or close the liquid injection control valve so that the liquid injection pipeline injects liquid into the carrier when the liquid injection control valve is in the open state.

19. The microcavity automatic liquid injection device according to claim 14, characterized in that: The microcavity automatic liquid injection device further comprises a frame, the frame comprising a frame body and a protective cover, a protective chamber is formed in the frame body, and the protective cover is movably connected to the frame body to open and close the protective chamber; The vacuum box assembly is arranged in the protection room, and the operating table assembly is connected to the frame body and is located on one side of the protection room.

20. The microcavity automatic liquid injection device according to any one of claims 14 to 19, characterized in that: The control assembly is integrated into the operating console assembly.

21. The microcavity automatic liquid injection device according to claim 14, characterized in that: The carrier also includes a liquid storage chamber, a liquid flow channel and an air storage chamber. The liquid storage chamber is used to store the liquid to be filled. The microcavity structure is arranged to overlap with at least part of the liquid flow channel. The air storage chamber is used to store gas when the vacuum pump assembly evacuates the vacuum box.

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