Mechanical arm applied to conveying window and loading system

Abstract

The mechanical arm is provided with a shoulder joint center, an elbow joint center and a wrist joint center, and comprises at least four power sources arranged in parallel in the horizontal direction; the arm body comprises a large arm, a small arm, a mechanical clamping jaw and a power shaft, the power shaft comprises a power input part and a power output part which are located at the two ends of a shaft body, and the power input part is in transmission connection with the at least four output ends of the kinetic energy assembly; the transmission assembly is in transmission connection with the kinetic energy output part; the transmitted kinetic energy is used for driving the large arm to rotate around the center of the shoulder joint in the horizontal direction, driving the small arm to rotate around the center of the elbow joint in the horizontal direction, driving the mechanical clamping jaw to rotate around the center of the wrist joint in the horizontal direction and driving the mechanical clamping jaw to clamp a wafer conveying box. By the adoption of the scheme, the requirements for multi-angle large-torque movement in a conveying window and overall installation space limitation are met.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor wafer pick-and-place equipment, and in particular to a mechanical arm and a loading system applied to a transfer window. Background Art

[0002] In the semiconductor manufacturing process, wafer transportation is crucial to integrated circuit manufacturing. In order to ensure the quality of wafers when transported between different processes and avoid dust or other contamination of wafers, more and more transportation work adopts standard transportation containers, that is, standard mechanical interface (SMIF) technology is adopted. This system reduces the contamination of wafers by dust particles by significantly reducing the dust particles flowing through the wafers. This effect is achieved by mechanically ensuring that the gas around the wafer remains stationary relative to the wafer during wafer transportation, storage and most processes, and that dust particles in the external environment do not enter the wafer environment. SMIF technology is centered on the concept of "isolation technology", which aims to prevent product contamination by enclosing the wafer in an ultra-clean environment while relaxing the cleanliness requirements outside this enclosed environment.

[0003] SMIF consists of three parts: a container used to enclose and store and transport boxed semiconductor wafers during the manufacturing process, a SMIF wafer box, an input and output device used to open the SMIF wafer box, a SMIF load port, and a clean room that integrates the load port through a process system. The working method of SMIF is usually as follows: an operator or an automated material handling system sends a SMIF wafer box to the SMIF load port. When the automatic batch tracking system identifies that the correct product batch is being loaded and unloaded into the correct equipment, the SMIF load port automatically opens the SMIF wafer box, takes out the wafer and places it in the equipment in the clean room for the corresponding process. When the process step is completed, the wafer is put back into the SMIF wafer box, and then the operator carries it or the automated material handling system (automated material handling system) transports it to the next process.

[0004] The SMIF loading port is usually a fixed transfer window with limited space. In the prior art, a robot arm (Selective Compliance Assembly Robot Arm, SCARA) used for assembly operations is usually used to clamp the wafer box, but SCARA can only move in a straight line, resulting in a limited motion trajectory, each joint cannot move independently, and the torque is small. In the prior art, a multi-joint robot arm is also used. Although it has a large torque, since each independent joint has a power source inside, the overall thickness of the robot arm is increased, and the range of motion of the robot arm in the transfer window is reduced. Summary of the invention

[0005] The purpose of the present invention is to provide a robotic arm and a loading system for a transfer window, which meet the requirements of multi-angle and large-torque movement of the transfer window and overall installation space limitation.

[0006] To achieve the above object, the technical solution of the present invention is as follows: In a first aspect, the present invention provides a robotic arm for a transfer window, having a shoulder joint center, an elbow joint center, and a wrist joint center, comprising: A kinetic energy assembly, located outside the transmission window, includes at least four power sources arranged in parallel in a horizontal direction, and the power source has an output end; The arm body moves within the limited space of the transmission window and can be raised and lowered along the height direction of the transmission window, comprising a large arm, a small arm pivotally connected to the large arm, a mechanical clamp pivotally connected to the small arm, and a power shaft, wherein the power shaft is arranged along the extension direction of the center of the shoulder joint, and the power shaft comprises a power input part and a power output part located at both ends of the shaft body, wherein the power input part is transmission-connected to at least four output ends of the kinetic energy assembly; A transmission assembly, which is in transmission connection with the kinetic energy output part, and is used to transmit the kinetic energy output by the kinetic energy output part; Among them, the kinetic energy transmitted by the transmission assembly is used to drive the upper arm to rotate horizontally around the center of the shoulder joint, drive the lower arm to rotate horizontally around the center of the elbow joint, drive the mechanical gripper to rotate horizontally around the center of the wrist joint, and drive the mechanical gripper to clamp the wafer box.

[0007] The beneficial effect of the mechanical arm applied to the transmission window provided by the present invention is that: through the above scheme, the kinetic energy of multiple power sources is gathered through the power shaft and transmitted to the transmission components of each joint, and then the transmission component transmits the kinetic energy to each joint. The kinetic energy output unit disperses the kinetic energy output by the power source to each joint such as the upper arm, the lower arm, and the mechanical gripper through a reasonable transmission system through multiple transmission levels, ensuring that the mechanical arm can achieve large torque output. In addition, the traditional multi-joint mechanical arm often requires an independent power source for each joint, resulting in a large overall structure and a large space occupation, which limits its use in limited space. The present invention significantly reduces the volume and thickness of the entire mechanical arm by integrating the power source from one side and using a single power shaft for transmission. It is suitable for working environments with limited space such as transmission windows, which not only improves the operational flexibility of the mechanical arm, but also saves the installation space required for the equipment and improves the utilization rate of the space.

[0008] Furthermore, at least four of the power sources include a first motor, a second motor, a third motor and a fourth motor arranged in parallel, the output shaft of the first motor is coaxially arranged with the power shaft, and the second motor, the third motor and the fourth motor have output ends located at different heights.

[0009] Furthermore, it also includes a lifting seat, and at least four power sources are arranged on the lifting seat and can be lifted and lowered synchronously with the lifting seat.

[0010] Further, the kinetic energy assembly further comprises a driving pulley group and a transmission pulley group, wherein the driving pulley group comprises a first pulley drivingly connected to the second motor, a second pulley drivingly connected to the third motor, and a third pulley drivingly connected to the fourth motor; The transmission pulley group includes a fourth pulley, a fifth pulley and a sixth pulley, and the fourth pulley, the fifth pulley and the sixth pulley are coaxially arranged on the kinetic energy input part in sequence along the height direction, and the first pulley, the second pulley and the third pulley are respectively connected to the fourth pulley, the fifth pulley and the sixth pulley for transmission.

[0011] Furthermore, the power shaft includes a tower transmission shaft and an inner shaft, a middle shaft and an outer shaft which are coaxially arranged and rotatably connected in sequence from the inside to the outside along the radial direction of the tower transmission shaft. The tower transmission shaft is coaxially arranged with the center of the shoulder joint, one end of the tower transmission shaft is fixedly connected to the output end of the first motor, and the other end is fixedly connected to the upper arm, and the fourth pulley, the fifth pulley and the sixth pulley are respectively sleeved on the inner shaft, the middle shaft and the outer shaft.

[0012] Furthermore, the transmission assembly includes a shoulder joint pulley group located at the center of the shoulder joint, an elbow joint pulley group located at the center of the elbow joint, and a wrist joint pulley group located at the center of the wrist joint. The shoulder joint pulley group is arranged on the kinetic energy output part for transferring the kinetic energy of the power shaft to the elbow joint pulley group, the elbow joint pulley group is used to transfer the kinetic energy to the wrist joint pulley group, and the wrist joint pulley group is used to transfer the kinetic energy to the mechanical gripper.

[0013] Furthermore, the shoulder joint pulley group includes a seventh pulley, an eighth pulley and a ninth pulley, the ninth pulley is coaxially sleeved on the inner shaft and rotates synchronously with the fourth pulley; the eighth pulley is coaxially sleeved on the middle shaft and rotates synchronously with the fifth pulley; the seventh pulley is coaxially sleeved on the outer shaft and rotates synchronously with the sixth pulley.

[0014] Further, the elbow joint pulley group includes a joint shaft, a tenth pulley, an eleventh pulley, a twelfth pulley, a thirteenth pulley and a fourteenth pulley located at the center of the elbow joint and coaxially arranged, the joint shaft is fixedly connected to the joint of the upper arm, the tenth pulley is transmission connected to the seventh pulley, the eleventh pulley is transmission connected to the eighth pulley, the twelfth pulley is transmission connected to the ninth pulley, the eleventh pulley is fixedly connected to the fourteenth pulley and rotates synchronously, and the twelfth pulley is fixedly connected to the thirteenth pulley and rotates synchronously.

[0015] Furthermore, an inner sleeve is provided inside the tenth pulley, and the inner sleeve is rotatably sleeved on the joint shaft, and a carrying plate is fixedly connected to the side of the inner sleeve facing away from the joint shaft, and the carrying plate is fixedly connected to the forearm; a middle sleeve is provided inside the eleventh pulley and the fourteenth pulley, and the middle sleeve is rotatably connected to the inner sleeve; an outer sleeve is provided inside the twelfth pulley and the thirteenth pulley, and the outer sleeve is rotatably connected to the middle sleeve.

[0016] Furthermore, the wrist joint pulley group includes a fifteenth pulley and a sixteenth pulley which are located at the center of the wrist joint and are coaxially arranged, the fifteenth pulley is transmission-connected to the thirteenth pulley, and the sixteenth pulley is transmission-connected to the fourteenth pulley.

[0017] Furthermore, the fifteenth pulley includes a first bearing and a first wheel body, the mechanical clamp has a clamping shaft for driving the clamping action, the outer ring of the first bearing is fixed in the forearm, the inner ring of the first bearing is fixedly connected to the fifteenth pulley, and the clamping shaft is fixedly connected to the fifteenth pulley.

[0018] Furthermore, the sixteenth pulley includes a second bearing and a second wheel body, the outer ring of the second bearing is fixed in the upper arm, one end face of the inner ring of the second bearing is fixedly connected to the sixteenth pulley, and the other end face of the inner ring of the second bearing is fixedly connected to the mechanical clamp.

[0019] In a second aspect, the present invention provides a loading system, comprising the above-mentioned robotic arm applied to the transfer window, and further comprising: A conveying body having a carrying surface, on which a wafer conveying box for accommodating a wafer box is placed; A frame, mounted on both sides of the conveying body in the height direction; A top cover is arranged at the end of the frame away from the conveying body, the interior of the top cover has a accommodating space, the bottom of the top cover has an opening, and the robotic arm applied to the conveying window is arranged in the accommodating space and extends through the opening to clamp the wafer box.

[0020] The beneficial effect of the loading system provided by the present invention is that by setting a mechanical arm for the transfer window and cooperating with the transfer body, frame and other components, the system can realize the precise loading and handling of the wafer box, ensuring that the wafer box can be stably placed in the mask box during operation, thereby reducing the accuracy loss caused by vibration or misoperation, and ensuring the stability of the semiconductor production process. The top cover is designed to be at the end of the frame away from the transfer body. This arrangement allows the mechanical arm to be placed in the accommodation space and complete the transfer task without occupying too much operating space. By placing the mechanical arm inside the top cover, space can be effectively saved while avoiding excessive external interference. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a schematic diagram of the overall structure of a mechanical arm applied to a transfer window according to an embodiment of the present invention; Figure 2 It is a schematic diagram of the structure of the transmission assembly in an embodiment of the present invention; Figure 3 A partial cross-sectional view of a power shaft according to an embodiment of the present invention; Figure 4 is a cross-sectional view of an elbow joint pulley assembly in an embodiment of the present invention; Figure 5 is a schematic diagram of a wrist joint pulley assembly in an embodiment of the present invention; Figure 6 is a schematic diagram of a driving component in an embodiment of the present invention; Figure 7 Schematic diagram of the structure of the lifting member in the embodiment of the present invention; Figure 8 Schematic diagram of the structure of the loading system in the embodiment of the present invention.

[0022] Reference numerals: 1. Robotic arm applied to the transfer window; 11. Shoulder joint center; 12. Elbow joint center; 13. Wrist joint center; 14. Power source; 141. First motor; 142. Second motor; 143. Third motor; 144. Fourth motor; 145. Lifting seat; 1451. First area; 1452. Second area; 146. Driving pulley set; 1461. First pulley; 1462. Second pulley; 1463. Third pulley; 147. Transmission pulley set; 1471. Fourth pulley; 1472. Fifth pulley; 1473. Sixth pulley; 15. Arm body; 151. Upper arm; 152. Lower arm; 153. Mechanical gripper; 1531. Clamping axis; 16. Power axis; 161. Tower transmission axis; 162. Inner axis; 163. Middle axis; 164. Outer axis; 165. Link axis; 17. Transmission assembly; 171. Shoulder joint pulley assembly; 1711. Seventh pulley; 1712. Eighth pulley; 1713. Ninth pulley; 172. Elbow joint pulley assembly; 1721. Tenth pulley; 1722. Eleventh pulley; 1723. Twelfth pulley; 1724. Thirteenth pulley; 1725. Fourteenth pulley; 1726. Inner sleeve; 1727. Middle sleeve; 1728. Outer sleeve; 173. Wrist joint pulley assembly; 1731. Fifteenth pulley; 1732. Sixteenth pulley; 174. First bearing; 175. Second bearing; 176. Carrying plate; 177. Joint shaft; 2. Transmission body; 3. Frame; 4. Top cover; 5. Driving assembly; 51. Connecting seat; 52. Push-pull member; 521. Driving shaft; 522. Driving rod; 523. First push-pull rod; 524. Second push-pull rod; 53. Sliding seat; 6. Nut slide; 61. Driving motor; 62. Driving wheel; 63. Driven wheel; 64. Screw rod; 7. Transmission window. DETAILED DESCRIPTION

[0023] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention. Unless otherwise defined, the technical terms or scientific terms used herein should be understood by people with general skills in the field to which the present invention belongs. "Including" and similar words used in this article mean that the elements or objects appearing before the word cover the elements or objects listed after the word and their equivalents, without excluding other elements or objects.

[0024] The following is combined with Figure 1 - Attachment Figure 8 , the specific implementation modes of the present invention are further described in detail.

[0025] In a first aspect, the robotic arm 1 used for the transfer window in the present invention includes a kinetic energy component, an arm body 15 and a transmission component 17 .

[0026] Reference Figure 1-Figure 3 The robot arm has a shoulder joint center 11, an elbow joint center 12 and a wrist joint center 13. The arm body 15 includes an upper arm 151, a lower arm 152 pivotally connected to the upper arm 151, a mechanical gripper 153 pivotally connected to the lower arm 152 and a power shaft 16 connected to the upper arm 151. The power shaft 16 is arranged along the extension direction of the shoulder joint center 11, and the power shaft 16 includes a power input part and a power output part located at both ends of the shaft body. The shoulder joint center 11 is located between the upper arm 151 and the power shaft 16, and the upper arm 151 and the power shaft 16 can rotate relative to each other around the extension direction of the axis of the shoulder joint center 11. The elbow joint center 12 is located between the pivot point of the upper arm 151 and the lower arm 152, and the upper arm 151 and the lower arm 152 can rotate relative to each other around the extension direction of the axis of the elbow joint center 12. The wrist joint center 13 is located between the pivot point of the forearm 152 and the mechanical clamp 153, and the forearm 152 and the mechanical clamp 153 can rotate relative to each other around the axis extension direction of the wrist joint center 13. The mechanical clamp 153 has relatively arranged clamping parts, which are respectively located on both sides of the wrist joint activity center.

[0027] Reference Figure 1 The kinetic energy assembly includes at least four power sources 14 arranged in parallel in the horizontal direction, and each power source 14 has an output end. Among them, the power input part below the power shaft 16 is transmission-connected to at least four output ends of the kinetic energy assembly. The transmission assembly 17 is transmission-connected to the kinetic energy output part, and the transmission assembly 17 is used to transmit the kinetic energy output by the kinetic energy output part. Among them, the kinetic energy transmitted by the transmission assembly 17 is used to drive the upper arm 151 to rotate in the horizontal direction around the shoulder joint center 11, drive the lower arm 152 to rotate in the horizontal direction around the elbow joint center 12, drive the mechanical clamp 153 to rotate in the horizontal direction around the wrist joint center 13, and drive the relatively arranged clamping parts of the mechanical clamp 153 to perform a clamping action to clamp or release the wafer box. Specifically, when the relatively arranged clamping parts perform the clamping action, the two clamping parts move in the direction of approaching each other to the wrist joint center 13, thereby realizing the clamping action.

[0028] In some embodiments of the present invention, a lifting seat 145 is further included, and at least four power sources 14 are arranged on the lifting seat 145. The lifting seat 145 includes a first area 1451 and a second area 1452. The at least four power sources 14 include a first motor 141, a second motor 142, a third motor 143 and a fourth motor 144 arranged in parallel. Among them, the output shaft of the first motor 141 is coaxially arranged with the power shaft 16, and the second motor 142, the third motor 143 and the fourth motor 144 have output ends located at different heights. The second motor 142, the third motor 143 and the fourth motor 144 are located in the first area 1451, and the first motor 141 is located in the second area 1452.

[0029] In some other embodiments of the present invention, the lifting seat 145 is fixedly connected to a nut slide 6 (combined with Figure 7 As shown in the figure, a lifting member is connected to the lifting seat 145, and the lifting member includes a driving motor 61, and the driving motor 61 is installed in the transmission window. By setting the lifting seat 145 and integrating the power source 14 on the lifting seat 145, the overall thickness of the robot arm is reduced and the lifting path of the robot arm is extended. The output end of the driving motor 61 is connected to the driving wheel 62, and the driving wheel 62 is connected to the driven wheel 63 through a synchronous belt transmission. The driven wheel 63 is coaxially provided with a screw rod 64 arranged in the vertical direction, and a threaded hole is provided on the nut slide 6. The screw rod 64 is threadedly connected to the nut slide 6 to form a screw rod 64 nut sub-mechanism. At the same time, four sliders are fixedly connected to the lifting seat 145, and the sliders are arranged in a row. The first row of sliders and the second row of sliders are respectively slidably connected to the first slide rail and the second slide rail in the vertical direction. Specifically, the driving motor 61 drives the driving wheel 62 to rotate, driving the driven wheel 63 connected to it through a synchronous belt to rotate. The driven wheel 63 rotates to drive the screw rod 64 to rotate, driving the nut slide 6 to move up and down along the height direction of the screw rod 64, and then driving the lifting seat 145 fixedly connected to the nut slide 6 to move up and down in the vertical direction. The lifting seat 145 slides along the length direction of the slide rail with four sliders.

[0030] Reference Figure 2In other embodiments of the present invention, the kinetic energy assembly further includes a driving pulley group 146 and a transmission pulley group 147. The driving pulley group 146 includes a first pulley 1461 that is sequentially distributed along the left-right direction and is transmission-connected to the second motor 142, a second pulley 1462 that is transmission-connected to the third motor 143, and a third pulley 1463 that is transmission-connected to the fourth motor 144. The transmission pulley group 147 includes a fourth pulley 1471, a fifth pulley 1472, and a sixth pulley 1473 that are sequentially distributed along the vertical direction of the power shaft 16. The fourth pulley 1471, the fifth pulley 1472, and the sixth pulley 1473 are sequentially coaxially arranged on the kinetic energy input portion along the height direction. The first pulley 1461, the second pulley 1462, and the third pulley 1463 are transmission-connected to the fourth pulley 1471, the fifth pulley 1472, and the sixth pulley 1473, respectively. By adopting the above technical solution, it is convenient to transfer the kinetic energy of the parallel power source 14 to the power shaft 16. It avoids the power source 14 being located inside the joint, causing the joint to be too thick. Specifically, the parallel configuration also helps to balance the load and improve the efficiency of the power source 14. At the same time, it avoids the power source 14 being located inside the joint, causing the joint to be too thick. By integrating the power source 14 to the outside of the joint and driving it through a pulley, the path of power transmission can be simplified, the complex gear mechanism can be reduced, and the installation space can be optimized.

[0031] Reference Figure 3 In other embodiments of the present invention, the power shaft 16 includes a tower transmission shaft 161 and an inner layer shaft 162, a middle layer shaft 163 and an outer layer shaft 164 which are coaxially arranged and rotatably connected in sequence along the axis of the tower transmission shaft 161. The tower transmission shaft 161 is coaxially arranged with the shoulder joint center 11, one end of the tower transmission shaft 161 is fixedly connected to the output end of the first motor 141, and the other end is fixedly connected to the arm 151. The first motor 141 is used to directly drive the arm 151 connected thereto to rotate around the axis direction of the tower transmission shaft 161. The fourth pulley 1471, the fifth pulley 1472 and the sixth pulley 1473 are respectively sleeved on the inner layer shaft 162, the middle layer shaft 163 and the outer layer shaft 164. By setting up a tower transmission shaft 161 and an inner layer shaft 162, a middle layer shaft 163 and an outer layer shaft 164 which are coaxially arranged and rotatably connected in sequence along the axis of the tower transmission shaft 161, it is convenient to transfer kinetic energy to each shaft layer respectively, and then transfer the kinetic energy of each power source 14 to the upper arm 151, the lower arm 152 and the mechanical clamp 153 through the power shaft 16.

[0032] In other embodiments of the present invention, needle bearings are arranged between the tower transmission shaft 161, the inner layer shaft 162, the middle layer shaft 163, and the outer layer shaft 164, and the needle bearings are located at both ends of the shafts. The assembly and rolling connection between the tower transmission shaft 161, the inner layer shaft 162, the middle layer shaft 163, and the outer layer shaft 164 are achieved through needle bearings. In other embodiments of the present invention, a link shaft 165 is arranged in the arm 151, and a chain pin is arranged between the tower transmission shaft 161 and the link shaft 165, and the link shaft 165 is driven by driving the chain pin to drive the arm 151 to rotate in the horizontal direction.

[0033] In some embodiments of the present invention, the transmission assembly 17 includes a shoulder joint pulley group 171 located at the shoulder joint center 11, an elbow joint pulley group 172 located at the elbow joint center 12, and a wrist joint pulley group 173 located at the wrist joint center 13. The shoulder joint pulley group 171 is arranged on the kinetic energy output part for transferring the kinetic energy of the power shaft 16 to the elbow joint pulley group 172, the elbow joint pulley group 172 is used to transfer the kinetic energy to the wrist joint pulley group 173, and the wrist joint pulley group 173 is used to transfer the kinetic energy to the mechanical clamp 153.

[0034] Reference Figure 2 Specifically, the shoulder joint pulley group 171 includes a seventh pulley 1711, an eighth pulley 1712 and a ninth pulley 1713. The ninth pulley 1713 is coaxially sleeved on the inner layer shaft 162 and rotates synchronously with the fourth pulley 1471; the eighth pulley 1712 is coaxially sleeved on the middle layer shaft 163 and rotates synchronously with the fifth pulley 1472; the seventh pulley 1711 is coaxially sleeved on the outer layer shaft 164 and rotates synchronously with the sixth pulley 1473. The driving pulley group 146 drives the transmission pulley group 147 to rotate through the synchronous belt. The tower transmission shaft 161 drives the link shaft 165 to rotate through the chain pin; the fourth pulley 1471 drives the ninth pulley 1713 to rotate through the inner layer shaft 162; the fifth pulley 1472 drives the eighth pulley 1712 to rotate through the middle layer shaft 163; the sixth pulley 1473 drives the seventh pulley 1711 to rotate through the outer layer shaft 164.

[0035] Reference Figure 4In other embodiments of the present invention, the elbow joint pulley group 172 includes a joint shaft 177, a tenth pulley 1721, an eleventh pulley 1722, a twelfth pulley 1723, a thirteenth pulley 1724 and a fourteenth pulley 1725, which are coaxially arranged at the center 12 of the elbow joint. The tenth pulley 1721 is connected to the seventh pulley by a synchronous belt, the eleventh pulley 1722 is connected to the eighth pulley 1712 by a synchronous belt, and the twelfth pulley 1723 is connected to the ninth pulley 1713 by a synchronous belt. The eleventh pulley 1722 is fixedly connected to the fourteenth pulley 1725, the twelfth pulley 1723 is fixedly connected to the thirteenth pulley 1724, and the axis of the joint shaft 177 coincides with the rotation center of the elbow joint. The joint shaft 177 is fixedly connected to the upper arm 151, and the fourteenth pulley 1725 is connected to a carrier plate 176.

[0036] The joint shaft 177 is fixedly connected to the joint of the upper arm. Specifically, an inner sleeve 1726, a middle sleeve 1727 and an outer sleeve 1728 are provided. The inner sleeve 1726 is sleeved on the outer wall of the joint shaft 177, the middle sleeve 1727 is sleeved on the outer wall of the inner sleeve 1726, and the inner sleeve 1728 is sleeved on the outer wall of the middle sleeve 1727, and the outer ...

[0037] Reference Figure 5 In other embodiments of the present invention, the wrist joint pulley assembly 173 includes a fifteenth pulley 1731 and a sixteenth pulley 1732 located at the wrist joint center 13 and coaxially arranged, the fifteenth pulley 1731 is connected to the thirteenth pulley 1724 through a synchronous belt, and the sixteenth pulley 1732 is connected to the fourteenth pulley 1725 through a synchronous belt. Specifically, the fifteenth pulley 1731 includes a first bearing 174 and a first wheel body, the mechanical clamp 153 has a clamping shaft 1531 for driving the clamping action, the outer ring of the first bearing 174 is fixed in the forearm 152, the inner ring of the first bearing 174 is fixedly connected to the fifteenth pulley 1731, and the clamping shaft 1531 is fixedly connected to the fifteenth pulley 1731.

[0038] Reference Figure 6In some other embodiments of the present invention, a driving component 5 is further included. The driving component 5 is used to move the relatively arranged clamping parts closer to each other or farther away from each other through the clamping shaft 1531. Specifically, it includes a connecting seat 51, a push-pull member 52, a sliding seat 53, a slider and a slide rail. One end of the sliding seat 53 is connected to the connecting seat 51, and the other end of the sliding seat 53 is connected to the push-pull member 52. The slider is fixedly connected to the sliding seat 53, and the slide rail extends in the horizontal direction. The slider is slidably connected to the slide rail, and the push-pull member 52 is used to drive the sliding seat 53 to move along the extension direction of the slide rail. It also has an installation shell, and the connecting seat 51, the push-pull member 52, the sliding seat 53, the slider and the slide rail are all placed in the installation shell, and the installation seat part extends out of the left and right sides of the installation shell.

[0039] In some other embodiments of the present invention, the push-pull member 52 includes a drive shaft 521, a drive rod 522, a first push-pull rod 523 and a second push-pull rod 524. Specifically, it also includes a rotating disk, which is synchronously connected to the clamping shaft 1531, and the drive rod 522, the first push-pull rod 523 and the second push-pull rod 524 are arranged in the rotating disk. The drive shaft 521 is connected to the middle part of the drive rod 522, and the middle part of the drive rod 522 has a rotation center. The first push-pull rod 523 and the second push-pull rod 524 are respectively hinged at both ends of the drive rod 522. The first push-pull rod 523 and the second push-pull rod 524 are respectively hinged to the sliding seats 53 on both sides. Specifically, one end of the first push-pull rod 523 is connected to the end pin of the drive rod 522, and the other end of the first push-pull rod 523 is connected to the sliding seat 53. The slider is slidably connected to the track, and the drive shaft 521 drives the drive rod 522 in the rotating disk to rotate in the horizontal direction.

[0040] Specifically, when the driving component 5 drives the mechanical clamp 153 to clamp the wafer box through the driving shaft 521, when the clamping shaft 1531 rotates clockwise, the driving rod 522 rotates synchronously, and at the same time, the two ends of the driving rod 522 drive the first push-pull rod 523 and the second push-pull rod 524 to move laterally through the pin shaft. At the same time, the angle between one end of the two push-pull rods and the rotating disk gradually becomes smaller, and the other ends of the two push-pull rods drive the two sliding seats 53 to move towards each other through the pin shaft. The two sliding seats 53 drive the two clamping parts to move towards each other through the connecting seat 51 to clamp the wafer box.

[0041] In other embodiments of the present invention, the sixteenth pulley 1732 includes a second bearing 175 and a second wheel body, the outer ring of the second bearing 175 is fixed in the upper arm 151, one end face of the inner ring of the second bearing 175 is fixedly connected to the sixteenth pulley 1732, and the other end face of the inner ring of the second bearing 175 is fixedly connected to the mechanical clamp 153.

[0042] The implementation principle of the present invention applied to the mechanical arm of the transmission window is as follows: the power source 14 is placed on the top without space restrictions, and the torque is transmitted through multiple levels of transmission, and each joint can move independently. Specifically, the kinetic energy component is divided into four transmission levels and transmitted in sequence. The first transmission level is: the first motor 141 drives the tower transmission shaft 161 to rotate around the shoulder joint center 11, the tower transmission shaft 161 drives the connecting shaft 165 to rotate through the chain pin, and the connecting shaft 165 drives the upper arm 151 to rotate in the horizontal direction; the second transmission level is: the second motor 142 drives the first pulley 1461 to rotate, the first pulley 1461 drives the fourth pulley 1471 to rotate through the synchronous belt, and the fourth pulley 1471 drives the fourth pulley 1471 through the synchronous belt. The inner shaft 162 drives the ninth pulley 1713 to rotate, the ninth pulley 1713 drives the twelfth pulley 1723 to rotate through the synchronous belt, the twelfth pulley 1723 drives the thirteenth pulley 1724 to rotate through the outer sleeve 1728, the thirteenth pulley 1724 drives the sixteenth pulley 1732 to rotate through the synchronous belt, the sixteenth pulley 1732 drives the driving shaft 521 to rotate, and the driving shaft 521 drives the clamping claw of the mechanical clamp 153 to clamp or release the wafer box; the third transmission level is: the third motor 143 drives The second pulley 1462 rotates, the second pulley 1462 drives the fifth pulley 1472 to rotate through the synchronous belt, the fifth pulley 1472 drives the eighth pulley 1712 to rotate through the middle shaft 163, the eighth pulley 1712 drives the eleventh pulley 1722 to rotate through the synchronous belt, the eleventh pulley 1722 drives the fourteenth pulley 1725 to rotate through the middle shaft sleeve 1727, the fourteenth pulley 1725 drives the sixteenth pulley 1732 to rotate through the synchronous belt, the sixteenth pulley 1732 rotates through the second bearing 17 5 drives the mechanical gripper 153 to rotate in the horizontal direction; the fourth transmission level is: the fourth motor 144 drives the third pulley 1463 to rotate, the third pulley 1463 drives the sixth pulley 1473 to rotate through the synchronous belt, the sixth pulley 1473 drives the seventh pulley 1711 to rotate through the outer shaft 164, the seventh pulley 1711 drives the tenth pulley 1721 to rotate through the synchronous belt, the tenth pulley 1721 drives the carrier plate 176 to rotate through the inner sleeve 1726, and then drives the small arm 152 to rotate. The present invention gathers the kinetic energy of multiple power sources 14 through the power shaft 16 and transmits it to the transmission assembly 17 of each joint, and then the transmission assembly 17 transmits the kinetic energy to each joint. Compared with the traditional multi-joint mechanical arm, each joint often requires an independent power source 14, resulting in a large overall structure and a large space. The present invention significantly reduces the thickness of the entire mechanical arm by integrating the power source 14 on one side and using the power shaft 16 for transmission. It is suitable for working environments with limited space such as transfer windows. It not only improves the operational flexibility of the robot arm, but also saves the installation space required for the equipment and improves the utilization of space.

[0043] Reference Figure 8In the second aspect, the present invention also provides a loading system, including the above-mentioned robotic arm applied to the transfer window, and also including a transfer body 2, a frame 3 and a top cover 4. The transfer body 2 has a bearing surface, and a wafer transfer box for accommodating a wafer box is placed on the bearing surface. The frame 3 is installed on the left and right sides of the transfer body 2. The top cover 4 is arranged at the end of the frame 3 away from the transfer body 2, and the interior of the top cover 4 has a accommodating space. The bottom of the top cover 4 has an opening, and the robotic arm applied to the transfer window is arranged in the accommodating space and extends through the opening to clamp the wafer box. By arranging the robotic arm for the transfer window and cooperating with the transfer body 2, the frame 3 and other components, the system can realize the precise loading and handling of the wafer box, and by arranging the kinetic energy component of the robotic arm inside the top cover 4, it can effectively save space and avoid excessive external interference.

[0044] Although the embodiments of the present invention are described in detail above, it is obvious to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations are within the scope and spirit of the present invention as described in the claims. Moreover, the present invention described herein may have other embodiments and may be implemented or realized in a variety of ways.

Claims

1. A robotic arm (1) for use in a transfer window, comprising a shoulder joint center (11), an elbow joint center (12) and a wrist joint center (13), characterized in that: include: A kinetic energy component, located outside the transmission window, comprising at least four power sources (14) arranged in parallel in a horizontal direction, wherein the power source (14) has an output end; The arm body (15) moves within the limited space of the transmission window and can be raised and lowered along the height direction of the transmission window, comprising a large arm (151), a small arm (152) pivotally connected to the large arm (151), a mechanical clamp (153) pivotally connected to the small arm (152), and a power shaft (16), wherein the power shaft (16) is arranged along the extension direction of the shoulder joint center (11), and the power shaft (16) comprises a power input part and a power output part located at both ends of the shaft body, and the power input part is transmission-connected to at least four output ends of the kinetic energy assembly; A transmission assembly (17) is transmission-connected to the kinetic energy output portion, the transmission assembly (17) being used to transmit the kinetic energy output by the kinetic energy output portion; The kinetic energy transmitted by the transmission assembly (17) is used to drive the upper arm (151) to rotate horizontally around the shoulder joint center (11), to drive the lower arm (152) to rotate horizontally around the elbow joint center (12), to drive the mechanical gripper (153) to rotate horizontally around the wrist joint center (13), and to drive the mechanical gripper (153) to clamp a wafer transfer box.

2. The robotic arm (1) for use with a transfer window according to claim 1, characterized in that: The at least four power sources (14) include a first motor (141), a second motor (142), a third motor (143) and a fourth motor (144) arranged in parallel, the output shaft of the first motor (141) being coaxially arranged with the power shaft (16), and the second motor (142), the third motor (143) and the fourth motor (144) having output ends located at different heights.

3. The robotic arm (1) for use with a transfer window according to claim 2, characterized in that: It also comprises a lifting seat (145), on which at least four power sources (14) are arranged and can be lifted and lowered synchronously with the lifting seat (145).

4. The robotic arm (1) for use with a transfer window according to claim 2, characterized in that: The kinetic energy component further comprises a driving pulley group (146) and a transmission pulley group (147), wherein the driving pulley group (146) comprises a first pulley (1461) drivingly connected to the second motor (142), a second pulley (1462) drivingly connected to the third motor (143), and a third pulley (1463) drivingly connected to the fourth motor (144); The transmission pulley group (147) comprises a fourth pulley (1471), a fifth pulley (1472) and a sixth pulley (1473); the fourth pulley (1471), the fifth pulley (1472) and the sixth pulley (1473) are coaxially arranged on the kinetic energy input part in sequence along the height direction; the first pulley (1461), the second pulley (1462) and the third pulley (1463) are respectively connected to the fourth pulley (1471), the fifth pulley (1472) and the sixth pulley (1473) in transmission.

5. The mechanical arm (1) applied to the transfer window according to claim 4, characterized in that: The power shaft (16) comprises a tower transmission shaft (161) and an inner layer shaft (162), a middle layer shaft (163) and an outer layer shaft (164) which are coaxially arranged and rotatably connected in sequence from the inside to the outside along the radial direction of the tower transmission shaft (161); the tower transmission shaft (161) is coaxially arranged with the shoulder joint center (11); one end of the tower transmission shaft (161) is fixedly connected to the output end of the first motor (141), and the other end is fixedly connected to the upper arm (151); the fourth pulley (1471), the fifth pulley (1472) and the sixth pulley (1473) are respectively sleeved on the power input parts of the inner layer shaft (162), the middle layer shaft (163) and the outer layer shaft (164).

6. The robotic arm (1) for use with a transfer window according to claim 5, characterized in that: The transmission assembly (17) comprises a shoulder joint pulley group (171) located at the shoulder joint center (11), an elbow joint pulley group (172) located at the elbow joint center (12), and a wrist joint pulley group (173) located at the wrist joint center (13); the shoulder joint pulley group (171) is arranged on the kinetic energy output part for transmitting the kinetic energy of the power shaft (16) to the elbow joint pulley group (172); the elbow joint pulley group (172) is used to transmit the kinetic energy to the wrist joint pulley group (173); and the wrist joint pulley group (173) is used to transmit the kinetic energy to the mechanical gripper (153).

7. The robotic arm (1) for use with a transfer window according to claim 6, characterized in that: The shoulder joint pulley group (171) comprises a seventh pulley (1711), an eighth pulley (1712) and a ninth pulley (1713) which are sequentially distributed from top to bottom along the height direction; the ninth pulley (1713) is coaxially sleeved on the inner layer shaft (162) and rotates synchronously with the fourth pulley (1471); the eighth pulley (1712) is coaxially sleeved on the middle layer shaft (163) and rotates synchronously with the fifth pulley (1472); the seventh pulley (1711) is coaxially sleeved on the outer layer shaft (164) and rotates synchronously with the sixth pulley (1473).

8. The robotic arm (1) for use with a transfer window according to claim 7, characterized in that: The elbow joint pulley assembly (172) comprises a joint shaft (177) located at the center of the elbow joint (12) and coaxially arranged, a tenth pulley (1721), an eleventh pulley (1722), a twelfth pulley (1723), a thirteenth pulley (1724) and a fourteenth pulley (1725), wherein the joint shaft (177) is fixedly connected to the joint of the upper arm (151), the tenth pulley (1721) is transmission-connected to the seventh pulley (1711), the eleventh pulley (1722) is transmission-connected to the eighth pulley (1712), the twelfth pulley (1723) is transmission-connected to the ninth pulley (1713), the eleventh pulley (1722) is fixedly connected to the fourteenth pulley (1725) and rotates synchronously, and the twelfth pulley (1723) is fixedly connected to the thirteenth pulley (1724) and rotates synchronously.

9. The mechanical arm (1) applied to the transfer window according to claim 8, characterized in that: An inner shaft sleeve (1726) is arranged inside the tenth pulley (1721), and the inner shaft sleeve (1726) is rotatably sleeved on the joint shaft (177), and a bearing plate (176) is fixedly connected to the side of the inner shaft sleeve (1726) away from the joint shaft (177), and the bearing plate (176) is fixedly connected to the forearm (152); a middle shaft sleeve (1727) is arranged inside the eleventh pulley (1722) and the fourteenth pulley (1725), and the middle shaft sleeve (1727) is rotatably connected to the inner shaft sleeve (1726); an outer shaft sleeve (1728) is arranged inside the twelfth pulley (1723) and the thirteenth pulley (1724), and the outer shaft sleeve (1728) is rotatably connected to the middle shaft sleeve (1727).

10. The mechanical arm (1) applied to the transfer window according to claim 9, characterized in that: The wrist joint pulley assembly (173) comprises a fifteenth pulley (1731) and a sixteenth pulley (1732) which are coaxially arranged and located at the center of the wrist joint (13); the fifteenth pulley (1731) is transmission-connected to the thirteenth pulley (1724); and the sixteenth pulley (1732) is transmission-connected to the fourteenth pulley (1725).

11. The mechanical arm (1) applied to the transfer window according to claim 10, characterized in that: The fifteenth pulley (1731) comprises a first bearing (174) and a first wheel body, the mechanical clamp (153) comprises a clamping shaft (1531) for driving a clamping action, the outer ring of the first bearing (174) is fixed in the forearm (152), the inner ring of the first bearing (174) is fixedly connected to the fifteenth pulley (1731), and the clamping shaft (1531) is fixedly connected to the fifteenth pulley (1731).

12. The mechanical arm (1) applied to the transfer window according to claim 10, characterized in that: The sixteenth pulley (1732) comprises a second bearing (175) and a second wheel body, the outer ring of the second bearing (175) is fixed in the upper arm (151), one end surface of the inner ring of the second bearing (175) is fixedly connected to the sixteenth pulley (1732), and the other end surface of the inner ring of the second bearing (175) is fixedly connected to the mechanical clamp (153).

13. A loading system, comprising a mechanical arm (1) applied to a transfer window according to any one of claims 1 to 12, characterized in that: Also includes: A conveying body (2) having a carrying surface, on which a wafer conveying box for accommodating a wafer box is placed; A frame (3) mounted on both sides of the conveying body (2) in the height direction; A top cover (4) is arranged at an end of the frame (3) away from the transfer body (2), the top cover (4) has a storage space inside, the bottom of the top cover (4) has an opening, and the robot arm (1) applied to the transfer window is arranged in the storage space and extends through the opening to clamp the wafer box.

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