Robot

Abstract

A robot (2) is provided with a hand (20) and a plurality of actuators (40) that respectively drive a plurality of joints (J10), and each of the plurality of actuators (40) has: a main body (110, 210, 340) that is fixed to one link of a multi-joint arm (3) at the joint (J10) to be driven; and an output shaft (120, 220, 350) that protrudes from the body (110, 210, 340) along the axis line, is fixed to another link of the multi-joint arm (3), and rotates about the axis line, and the multi-joint arm (3) further has a sealing member (140, 240, 370) that is attached to one link in a separately detachable state from the body (110, 210, 340) and seals the space between the one link and the output shaft (120, 220, 350) in correspondence with each of the plurality of actuators (40).

Description

Technical Field

[0001] The present disclosure relates to robots. Background Art

[0002] Japanese Patent Application Publication No. 2005-039047 discloses a substrate transport robot, which includes a base, a first arm, a second arm, and a third arm. The first arm is driven by power transmitted from a first servo motor provided on the base through a first power transmission unit. The second arm is driven by power transmitted from a second servo motor provided on the base through a second power transmission unit. The third arm is linked with the second arm by power transmitted by a linkage unit. Summary of the invention

[0003] The present disclosure provides a robot that is effective in achieving both suppression of gas generation in a chamber and maintainability.

[0004] A robot according to one aspect of the present invention comprises: a multi-joint arm having a hand supporting a substrate, a base, an arm connecting the hand and the base, and a plurality of joints arranged along the arm and respectively moving around a vertical axis to change the position and posture of the hand relative to the base; and a plurality of actuators, which respectively drive the plurality of joints, and the plurality of actuators respectively comprise: a main body, which is fixed to a connecting rod of the multi-joint arm in a joint to be driven; and an output shaft, which protrudes from the main body along the axis and is fixed to another connecting rod of the multi-joint arm and rotates around the axis, and the multi-joint arm and the plurality of actuators respectively correspond to each other and are mounted on a connecting rod in a state where they can be separated from the main body and detached, and seal between a connecting rod and the output shaft.

[0005] According to the present disclosure, it is possible to provide a robot that is effective in achieving both suppression of gas generation in a chamber and maintainability. BRIEF DESCRIPTION OF THE DRAWINGS

[0006] Figure 1 It is a top view illustrating the interior of the substrate transfer device.

[0007] Figure 2 It is along Figure 1 Cross-sectional view along line II-II.

[0008] Figure 3 yes Figure 2 Bottom view of the robot in .

[0009] Figure 4 It is along Figure 1 Cross-sectional view along line IV-IV in FIG.

[0010] Figure 5 yes Figure 4 A magnified view of the first arm motor in Figure 1.

[0011] Figure 6 yes Figure 4 A magnified view of the second arm motor in Figure 2.

[0012] Figure 7 yes Figure 4 A magnified image of the hand motors in Figure 2.

[0013] Figure 8 It is a diagram showing a modified example of the hand motor.

[0014] Fig. 9 It is a diagram showing a modified example of the second arm motor.

[0015] Fig.10 It is a diagram showing another modified example of the hand motor.

[0016] Fig.11 It is a diagram showing still another modified example of the hand motor.

[0017] Fig.12 This is a diagram illustrating a tube and an air-cooling flow path.

[0018] Fig.13 The diagram illustrates cable routing. DETAILED DESCRIPTION

[0019] Hereinafter, the embodiments will be described in detail with reference to the drawings. In the description, the same elements or elements having the same functions are denoted by the same reference numerals, and repeated descriptions are omitted.

[0020] 〔Substrate conveying device〕

[0021] Figure 1 and Figure 2 The substrate conveying device 1 shown is a device for conveying substrates W between one or more stations ST10 storing substrates W and a plurality of processing modules PU10. Examples of substrates W include semiconductor substrates, glass substrates, mask substrates, and FPD (Flat Panel Display) substrates. The substrate conveying device 1 includes a chamber 90 and a robot 2. The chamber 90 has a long side direction D11 and a short side direction D12 perpendicular to the long side direction D11. The long side direction D11 and the short side direction D12 are arranged along a horizontal plane.

[0022] The chamber 90 includes a top plate 91 and a bottom plate 92 arranged in a vertical arrangement, and also includes a peripheral wall 93 surrounding a space between the top plate 91 and the bottom plate 92. Hereinafter, the space surrounded by the peripheral wall 93 is referred to as a transfer space S01.

[0023] The peripheral wall 93 includes end walls 94 and 95 that are opposite to each other in the long-side direction D11 and are respectively along the short-side direction D12, and side walls 96 and 97 that are opposite to each other in the short-side direction D12 and are respectively along the long-side direction D11. The interval L11 between the end wall 94 and the end wall 95 is the length of the chamber 90 in the long-side direction D11, and the interval W11 between the side wall 96 and the side wall 97 is the width of the chamber 90 in the short-side direction D12. The interval L11 is larger than the interval W11.

[0024] The one or more stations ST10 and the plurality of processing modules PU10 are arranged around the chamber 90. In the illustrated example, two stations ST10 are arranged along the end wall 95, three processing modules PU10 are arranged along the side wall 96, and three processing modules PU10 are arranged along the side wall 97, but the number and arrangement of the stations ST10 and the number and arrangement of the processing modules PU10 are not limited thereto.

[0025] The robot 2 transports the substrate W between one or more stations ST10 and a plurality of processing modules PU10 in the transport space S01. For example, the robot 2 carries the substrate W out of any one of the one or more stations ST10 and carries it into any one of the plurality of processing modules PU10. In addition, the robot 2 carries the substrate W out of any one of the plurality of processing modules PU10 and carries it into any one of the one or more stations ST10.

[0026] like Figure 2 As shown, the robot 2 includes a multi-joint arm 3 and a plurality of actuators 40. The multi-joint arm 3 includes a plurality of links connected by a plurality of joints J10. The plurality of links include a hand 20, a base 10, and one or more arm links 50, 60 connecting the hand 20 to the base 10. For example, the multi-joint arm 3 includes a hand 20, a base 10, an arm 4, and a plurality of joints J10. The base 10 is fixed to an environment in which the multi-joint arm 3 is installed. The hand 20 supports the substrate W horizontally. The arm 4 connects the base 10 to the hand 20. The plurality of joints J10 are arranged along the arm 4, and move around vertical axes respectively to change the position and posture of the hand 20 relative to the base 10. The plurality of actuators 40 drive the plurality of joints J10 around multiple vertical axes respectively.

[0027] For example, the arm 4 has a first link 50 and a second link 60. The plurality of joints J10 include a first joint J11, a second joint J12, and a third joint J13. The first joint J11 connects the first link 50 to the base 10 in a manner that rotates around a vertical first axis line Ax1. The second joint J12 connects the second link 60 to the end of the first link 50 in a manner that rotates around a vertical second axis line Ax2. The third joint J13 connects the hand 20 to the end of the second link 60 in a manner that rotates around a vertical third axis line Ax3. The base 10, the first link 50, the second link 60, and the hand 20 connected by the joints J11, J12, and J13 are all "links of the multi-joint arm 3."

[0028] The actuator 40 includes arm actuators 41, 42 and a hand actuator 43. The arm actuator 41 (base actuator) drives the first joint J11 in such a manner that the first link 50 rotates around the first axis Ax1 relative to the base 10. The arm actuator 42 drives the second joint J12 in such a manner that the second link 60 rotates around the second axis Ax2 relative to the first link 50 by means of the arm actuator 41 independently of the rotation of the first link 50. The hand actuator 43 drives the third joint J13 in such a manner that the hand 20 rotates around the third axis Ax3 relative to the second link 60 by means of the arm actuator 42 independently of the rotation of the first link 50 by means of the arm actuator 41 and the rotation of the second link 60 by means of the arm actuator 42.

[0029] Along the arm 4 , the arm actuator 41 is located closest to the base 10 , the arm actuator 42 is located second closest to the base 10 , and the hand actuator 43 is located farthest from the base 10 . Being located closest to the base 10 includes being located inside the base 10 .

[0030] At least a portion of the multi-joint arm 3 is disposed in the transport space S01 so that the substrate W can be transported. For example, at least a portion of the multi-joint arm 3 is disposed in the transport space S01 via an opening OP1 provided in the bottom plate 92. Compared with the opening OP1 provided in the top plate 91 for carrying the multi-joint arm 3 into the transport space S01, dust can be suppressed from entering the chamber. The robot 2 may further include a flange 30. The flange 30 holds the base 10 and blocks the opening OP1.

[0031] When the flange 30 blocks the opening OP1, at least the arm 4 and the hand 20 are arranged in the conveying space S01. The base 10 can be arranged in the conveying space S01 or outside the conveying space S01. For example, the base 10 is arranged outside the conveying space S01. By arranging the base 10 outside the conveying space S01, the conveying space S01 can be reduced, and the energy required to make the conveying space S01 a vacuum can be reduced.

[0032] The flange 30 extends to block the opening OP1 in a manner of separating the base 10 from the arm 4 and the hand 20. The flange 30 has a long side direction D1. For example, the flange 30 extends along a plane including the long side direction D1 and a short side direction D2 perpendicular to the long side direction D1, and the length L1 of the flange 30 in the long side direction D1 is greater than the width W1 of the flange 30 in the short side direction D2.

[0033] The first axis Ax1 of the first joint J11 closest to the base 10 among the plurality of joints J10 is located between the one end 31 of the flange 30 and the center 32 of the flange 30 in the long side direction D1 of the flange 30 and is located close to the one end 31. For example, the first axis Ax1 is located between the one end 31 and the center 32 of the flange 30, and the distance from the first axis Ax1 to the one end 31 is smaller than the distance from the first axis Ax1 to the center 32.

[0034] The shape and layout of the flange 30 can be matched with the opening OP1 required to be sufficient from the viewpoint of the workability of assembling the robot 2 into the chamber 90. Therefore, it is effective to achieve both the reduction of the opening OP1 for assembling the robot 2 into the chamber 90 and the workability of assembling the robot 2 into the chamber 90.

[0035] The chamber 90 may also include a second opening OP2 provided on the top plate 91 with a smaller size than the opening OP1, and a cover member 98 for closing the second opening OP2. By suppressing dust from entering the chamber 90 and allowing access to the multi-joint arm 3 in the conveying space S01 from above, the maintainability of the robot 2 can be improved. When viewed from vertically above, at least a portion of the second opening OP2 may overlap with the multi-joint arm 3. The maintainability of the robot 2 can be further improved.

[0036] like Figure 1 As shown, the length L1 of the flange 30 in the longitudinal direction D1 may also be greater than the length L2 of the first connecting rod 50. The shape and layout of the flange 30 can be further matched with the opening OP1 of a required sufficient size / shape. The width W1 of the flange 30 may also be smaller than the length L2 of the first connecting rod 50. The shape and layout of the flange 30 can be further matched with the opening OP1 of a required sufficient size / shape.

[0037] The longitudinal direction D11 of the cavity 90 may coincide with the longitudinal direction D1 of the flange 30. This can prevent the cavity 90 for providing the opening OP1 from expanding. The coincidence includes, for example, being parallel to each other.

[0038] The first axis Ax1 may be located between the side wall 96 (first side wall) and the side wall 97 (second side wall) at a position close to the side wall 96 (first side wall). For example, the distance from the first axis Ax1 to the side wall 96 may be smaller than the distance from the first axis Ax1 to the side wall 97. The first axis Ax1 may be located between the side wall 97 (first side wall) and the side wall 96 (second side wall) at a position close to the side wall 97 (first side wall). For example, the distance from the first axis Ax1 to the side wall 97 may be smaller than the distance from the first axis Ax1 to the side wall 96. The reduction of the chamber 90 and the movable range of the robot 2 can be taken into account.

[0039] The length L2 of the first link 50 may be smaller than the interval W11 between the side wall 96 and the side wall 97 and larger than half the interval W11. This makes it possible to further achieve a balance between the reduction in size of the chamber 90 and the movable range of the robot 2.

[0040] like Figure 2 as well as Figure 3 As shown, the robot 2 may further include a plurality of legs 5. The plurality of legs 5 protrude downward from the base 10 from a plurality of locations surrounding the base 10 in the flange 30. For example, the height of each of the plurality of legs 5 from the flange 30 may be greater than the height of the base 10 from the flange 30. In the example shown in the figure, the robot 2 includes four legs 5, but the number of legs 5 is not limited thereto. As long as the plurality of legs 5 can stand on the ground and support the flange 30, the number and layout of the legs 5 can be appropriately changed.

[0041] The robot 2 before being assembled into the chamber 90 can be supported by the legs 5 so that the base 10 does not contact the ground. Therefore, the maintainability of the robot 2 can be improved.

[0042] like Figure 4 As shown, each of the multiple actuators 40 can also be configured at the joint J10 to be driven. Being configured at the joint J10 means being configured at a position where the axis that becomes the action center of the joint J10 passes. For example, the arm actuator 41 is configured at a position where the first axis Ax1 of the first joint J11 passes, the arm actuator 42 is configured at a position where the second axis Ax2 of the second joint J12 passes, and the hand actuator 43 is configured at a position where the third axis Ax3 of the third joint J13 passes.

[0043] Each of the plurality of actuators 40 may include a motor such as an electric servo motor, for example. The motor included in each of the plurality of actuators 40 may be a direct drive motor.

[0044] The "direct drive motor" in the robot 2 refers to a motor in which a rotor that rotates directly under the action of a rotating magnetic field is fixed to a connecting rod of the multi-jointed arm 3 that is a driven object. The fixing of the rotor to the connecting rod is not limited to direct fixing, and can also be fixed via other components. It is sufficient as long as at least the connecting rod and the rotor are fixed to each other in a manner that does not move relative to each other.

[0045] Since the motors included in each of the plurality of actuators 40 are direct drive motors, each joint J10 is driven without a mobility transmitting element such as a gear or a belt, which is effective in improving the positioning accuracy of the substrate W.

[0046] For example, the arm actuator 41 includes the arm motor 101 (base motor, first arm motor) as a direct drive motor, the arm actuator 42 includes the arm motor 201 (second arm motor) as a direct drive motor, and the hand actuator 43 includes the hand motor 301 as a direct drive motor.

[0047] The robot 2 may also include a wiring space S10 and a cable C10. The wiring space S10 is formed inside the multi-joint arm 3 in a manner that is sealed inside the chamber 90 (inside the conveying space S01) and communicates with the outside of the chamber 90. For example, the wiring space S10 may be airtightly separated from the conveying space S01 (the internal space of the chamber 90). The cable C10 is routed from outside the conveying space S01 to an actuator 40 located in the conveying space S01 among the plurality of actuators 40 via the wiring space S10. Even when the conveying space S01 is set to a vacuum, since the wiring space S10 is maintained at the air pressure outside the conveying space S01, it is possible to suppress the generation of gas from the cable C10 into the conveying space S01.

[0048] The wiring space S10 is sealed in the conveying space S01, which means that in the conveying space S01, the wiring space S10 is isolated from the outside of the wiring space S10 in an airtight state. For example, the wiring space S10 includes the internal space 11 of the base 10, the internal space 52 of the first link 50, and the internal space 62 of the second link 60. The internal space 11, the internal space 52, and the internal space 62 are connected to each other, and the internal space 11 is connected to the outside of the conveying space S01. The robot 2 may also have a plurality of cables C10 that are respectively wired from a controller outside the conveying space S01 to a plurality of actuators 40 via the wiring space S10.

[0049] The multi-joint arm 3 connects the base-side link connected to the end of the base 10 and the hand-side link connected to the end of the hand 20 through a plurality of joints J10. The connection to the end of the base 10 includes the connection to the end of the base 10 via other links. The connection to the end of the hand 20 includes the connection to the end of the hand 20 via other links. The base-side link connected to the end of the base 10 includes the base 10 itself. The hand-side link connected to the end of the hand 20 includes the hand 20 itself.

[0050] For example, the first joint J11 connects the base 10 (base side link) and the first link 50 (hand side link). The second joint J12 connects the first link 50 (base side link) and the second link 60 (hand side link). The third joint J13 connects the second link 60 (base side link) and the hand 20 (hand side link).

[0051] The motor included in each of the plurality of actuators 40 has a stator fixed to the base-side link and an output shaft fixed to the hand-side link, and is rotated around the axis of the joint J10 by a rotating magnetic field generated by the stator.

[0052] For example, the arm motor 101 has a stator 115 fixed to the base 10, and an output shaft 120 fixed to the first link 50, which rotates around the first axis Ax1 of the first joint J11 by the rotating magnetic field generated by the stator 115. The arm motor 201 has a stator 215 fixed to the first link 50, and an output shaft 220 fixed to the second link 60, which rotates around the second axis Ax2 of the second joint J12 by the rotating magnetic field generated by the stator 215. The hand motor 301 has a stator 342 fixed to the second link 60, and an output shaft 350 fixed to the hand 20, which rotates around the third axis Ax3 of the third joint J13 by the rotating magnetic field generated by the stator 342. By fixing the stator of each motor to the base side link, the wiring path to each motor can be shortened. Shortening the wiring path to each motor also helps to further suppress the generation of gas from each cable C10.

[0053] The arm motor 101 may further include a through hole 123 that passes through the output shaft 120 and becomes a part of the wiring space S10. The arm motor 201 may further include a through hole 223 that passes through the output shaft 220 and becomes a part of the wiring space S10. By using the through hole 123 and the through hole 223 as a part of the wiring space S10, the wiring space S10 can be formed while suppressing the enlargement of the multi-joint arm 3.

[0054] The multi-joint arm 3 may further include a second hand 70 that rotates about a third axis Ax3 (hand axis) common to the hand 20. The second hand 70 supports the substrate W horizontally, similarly to the hand 20.

[0055] The hand motor 301 may be a two-axis direct drive motor that independently rotates the hand 20 and the second hand 70. This can achieve both high positioning accuracy and miniaturization.

[0056] The following further illustrates the configurations of the arm motor 101 (first arm motor) and its periphery, the arm motor 201 (second arm motor) and its periphery, and the hand motor 301 and its periphery.

[0057] 〔First arm motor〕

[0058] like Figure 5 As shown, the base 10 has a base shell 12 including an internal space 11 that opens upward. The flange 30 is mounted on the base shell 12 in a manner to block the upward opening of the internal space 11, and extends outward from the base shell 12 over the entire circumference. The arm motor 101 is arranged in the internal space 11 of the base 10 below the flange 30. The arm motor 101 is a radial clearance motor, and has a main body 110, an output shaft 120, bearings 124, 125, a motor cover 116 and a rotation sensor 150. The output shaft 120 protrudes upward from the internal space 11, passes through the flange 30 and is fixed to the first connecting rod 50. For example, the flange 30 includes an opening 33 that opens upward and downward, and the output shaft 120 protrudes to the outside of the internal space 11 through the opening 33 and is fixed to the first connecting rod 50. The body 110 is fixed to the base 10 in the internal space 11 , and the output shaft 120 is rotated about the first axis Ax1 by a rotating magnetic field about the first axis Ax1 .

[0059] The main body 110 includes a motor housing 111, a fixed shaft 112, a through hole 114, and a stator 115. The motor housing 111 is open upward and downward, accommodates other components of the main body 110, and is fixed to the base 10. The fixed shaft 112 is arranged in the motor housing 111 and is fixed to the motor housing 111 in a manner extending along the first axis Ax1. For example, the fixed shaft 112 includes a flange 113 that extends over the entire circumference below the motor housing 111 to a position outside the inner circumference of the motor housing 111, and the flange 113 is fixed to the motor housing 111 by bolt fastening or the like.

[0060] The fixed shaft 112 may also include a through hole 114 that opens upward and downward along the first axis Ax1. The stator 115 is cylindrical and is housed in the motor housing 111 in a manner that surrounds the fixed shaft 112. The stator 115 includes: a yoke that is fixed to the inner circumference of the motor housing 111 by, for example, shrink fitting; and a plurality of coils that are provided on the yoke in a manner that surrounds the fixed shaft 112 and generate a rotating magnetic field according to the supply of electric power.

[0061] The output shaft 120 includes a rotor 121 and a protruding shaft 122. The rotor 121 is cylindrical and is housed in the motor housing 111 at a position closer to the inside than the stator 115 so as to surround the fixed shaft 112. The rotor 121 includes, for example, an iron core and a plurality of permanent magnets provided on the iron core so as to surround the fixed shaft 112. The rotor 121 and the stator 115 are opposed to each other in a radial direction perpendicular to the first axis Ax1, and are directly affected by the rotating magnetic field generated by the stator 115.

[0062] The protruding shaft 122 is fixed to the upper end of the rotor 121, protrudes upward, passes through the flange 30 and is fixed to the first link 50. The arm motor 101 may have a through hole 123 that passes through the protruding shaft 122 along the first axis Ax1 and connects the internal space 11 of the base 10 and the internal space 52 of the first link 50.

[0063] For example, the first link 50 is provided with an opening 53 that allows the through hole 123 to communicate with the internal space 52. In addition, the through hole 123 communicates with the internal space 11 of the base 10 via the through hole 114. Thus, the through hole 123 and the through hole 114 become part of the wiring space S10, and the internal space 52 of the first link 50 communicates with the internal space 11 of the base 10.

[0064] The bearings 124 and 125 are, for example, ball-type radial bearings, and are arranged vertically between the outer peripheral surface of the fixed shaft 112 and the inner peripheral surface of the rotor 121. The bearings 124 and 125 are respectively held by the fixed shaft 112, and hold the rotor 121 so as to rotate about the first axis Ax1.

[0065] The motor cover 116 blocks the upward opening of the motor housing 111 on the outer periphery of the protruding shaft 122. The motor cover 116 extends from the protruding shaft 122 to a position outside the inner periphery of the motor housing 111 over the entire circumference of the motor housing 111 and is fixed to the motor housing 111 from above by bolts or the like.

[0066] The rotation sensor 150 detects the rotation of the output shaft 120. For example, the rotation sensor 150 is a rotary encoder, and has a disk 151 and a sensor head 152 provided in the motor housing 111. The disk 151 holds a pulse pattern arranged in the circumferential direction around the first axis Ax1, and is installed below the rotor 121. The sensor head 152 is an optical sensor that reads the pulse pattern of the disk 151 at a fixed position in the motor housing 111. The sensor head 152 generates a pulse signal corresponding to the read pulse pattern. The sensor head 152 is installed, for example, on the flange 113 of the fixed shaft 112. For example, the rotation sensor 150 outputs detection data indicating the rotation position (rotation angle) of the output shaft 120 as a detection result of the rotation of the output shaft 120 based on the counting result of the pulse signal generated by the sensor head 152.

[0067] The robot 2 may further include a hand-side sealing member 130 that seals between the first link 50 (hand-side link) and the protruding shaft 122, and a base-side sealing member 140 that seals between the base 10 (base-side link) and the protruding shaft 122, corresponding to the arm motor 101. The wiring space S10 can be easily sealed.

[0068] Sealing the first connecting rod 50 and the protruding shaft 122 means substantially preventing the inside of the conveying space S01 from communicating with the inside of the wiring space S10 via the first connecting rod 50 and the protruding shaft 122. Sealing the base 10 and the protruding shaft 122 means substantially preventing the inside of the conveying space S01 from communicating with the inside of the wiring space S10 via the base 10 and the protruding shaft 122. The communication between the inside of the conveying space S01 and the inside of the wiring space S10 includes the communication between the inside of the conveying space S01 and the inside of the wiring space S10 via the outside of the conveying space S01.

[0069] The hand-side sealing member 130 includes a flange 131, an inner seal 132, and an outer seal 133. The flange 131 is mounted on the end of the protruding shaft 122 by bolt fastening, etc., extends over the entire circumference to a position outside the inner circumference of the opening 53 of the first connecting rod 50, and is fixed to the first connecting rod 50 by bolt fastening, etc. The flange 131 includes a through hole 134 that connects the opening 53 of the first connecting rod 50 with the through hole 123 of the protruding shaft 122.

[0070] The inner seal 132 seals between the protruding shaft 122 and the flange 131. The inner seal 132 is, for example, an O-ring, and is disposed between the protruding shaft 122 and the flange 131 so as to surround the through-holes 123 and 134 and is in close contact with the protruding shaft 122 and the flange 131 over the entire circumference.

[0071] The outer seal 133 seals between the first link 50 and the flange 131. The outer seal 133 is, for example, an O-ring, and is disposed between the flange 131 and the first link 50 to surround the opening 53 and the through hole 134, and is in close contact with the flange 131 and the first link 50 over the entire circumference.

[0072] The base-side sealing member 140 seals between the flange 30 and the protruding shaft 122. Sealing between the flange 30 and the protruding shaft 122 means substantially preventing the inside of the conveying space S01 and the inside of the wiring space S10 from communicating with each other through the flange 30 and the protruding shaft 122.

[0073] The base side sealing member 140 may also include a mechanical seal that allows the protruding shaft 122 to rotate relative to the base 10 and is in close contact with the protruding shaft 122. The mechanical seal is a seal that seals between two components that rotate relative to each other. The mechanical seal has a fixed ring fixed to one component and a rotating ring fixed to the other component, and allows the other component to rotate relative to the one component at the contact surface between the fixed ring and the rotating ring, and seals between the one component and the other component.

[0074] By using a mechanical seal, the wiring space S10 can be sealed with a small driving resistance. Therefore, both high positioning accuracy and sealing of the wiring space S10 can be achieved.

[0075] The base side sealing member 140 may be mounted on the base 10 in a state where it can be detached from the main body 110. The base side sealing member 140 may be worn out due to friction with the protruding shaft 122, but the worn base side sealing member 140 can be detached from the main body 110 and easily replaced. Therefore, the robot 2 is effective in both suppressing the generation of gas in the chamber 90 and maintaining the robot 2. The detachable state means that the robot 2 can be detached in a non-destructive manner by releasing the bolt fastening or the like.

[0076] For example, the base side sealing member 140 has a cover 141, an outer seal 147 and an inner seal 148. The cover 141 is mounted on the base 10 from the outside. For example, the cover 141 is mounted on the flange 30. The outer seal 147 seals between the cover 141 and the base 10. The outer seal 147 seals between the cover 141 and the flange 30. The inner seal 148 allows the protruding shaft 122 to rotate relative to the cover 141, and seals between the cover 141 and the protruding shaft 122. The inner seal 148 can also be the above-mentioned mechanical seal. According to the structure of the base side sealing member 140 having the cover 141, the outer seal 147 and the inner seal 148, it is possible to take into account both the reliability of the seal and the maintainability of the base side sealing member 140.

[0077] Sealing between the cover 141 and the flange 30 by the outer seal 147 is not necessarily limited to making the outer seal 147 close to both the cover 141 and the flange 30. For example, sealing between the cover 141 and the flange 30 includes making the outer seal 147 close to other components connected to the cover 141 in an airtight state and the flange 30. Sealing between the cover 141 and the protruding shaft 122 by the inner seal 148 is not necessarily limited to making the inner seal 148 close to both the cover 141 and the protruding shaft 122. For example, sealing between the cover 141 and the protruding shaft 122 includes making the inner seal 148 close to other components connected to the cover 141 in an airtight state and the protruding shaft 122.

[0078] As an example, the cover 141 may be connected to the motor cover 116 in an airtight state, and the inner seal 148 may be in close contact with the motor cover 116 and the protruding shaft 122, thereby sealing the cover 141 and the protruding shaft 122. For example, when the inner seal 148 is the above-mentioned mechanical seal, the fixed ring of the inner seal 148 may be kept in close contact with the inner periphery of the motor cover 116, and the rotating ring of the inner seal 148 may be kept in close contact with the outer periphery of the protruding shaft 122.

[0079] The base 10 may also include a motor bracket 13 and a lifting actuator 14. The main body 110 is fixed to the motor bracket 13. For example, the motor housing 111 is fixed to the motor bracket 13. The lifting actuator 14 is fixed to the flange 30 in the internal space 11, and lifts the motor bracket 13. As a result, the main body 110 including the stator 115 is lifted. As an example of the lifting actuator 14, a ball screw type linear actuator can be cited.

[0080] The main body 110 is raised and lowered by the lifting actuator 14, and the arm 4 and the hand 20 are raised and lowered in the transfer space S01. Thus, the substrate W can be transferred between a transfer source and a transfer destination having different heights.

[0081] When the base 10 has the lifting actuator 14, the cover 141 may be configured to expand and contract as the body 110 is lifted and lowered by the lifting actuator 14. The mobility of the protruding shaft 122 in both the lifting direction and the rotation direction and the sealing performance of the conveying space S01 can be achieved.

[0082] In the case where the inner seal 148 is a mechanical seal, the cover 141 functions as a telescopic seal that seals between the mechanical seal and the flange 30 and telescopes as the main body 110 and the mechanical seal are raised and lowered together. As described above, the mechanical seal has a fixed ring and a rotating ring, the fixed ring is fixed to the cover 141, and the rotating ring is fixed to the protruding shaft 122. Since the fixed ring and the rotating ring need to be kept in contact with each other, it is impossible to raise or lower the rotating ring that is in close contact with the protruding shaft 122 relative to the fixed ring that is in close contact with the cover 141. In the case where the cover 141 functions as a telescopic seal, the fixed ring that is in close contact with the cover 141 and the rotating ring that is in close contact with the protruding shaft 122 can be raised or lowered together by the extension and contraction of the cover 141.

[0083] Thus, by combining the mechanical seal and the telescopic seal, the wiring space S10 can be sealed while keeping the driving resistance in both the lifting direction and the rotation direction low. Therefore, both high positioning accuracy and sealing of the wiring space S10 can be achieved.

[0084] For example, the cover 141 includes a first cover 142, a second cover 144, an intermediate seal 149, and a telescopic portion 146. The first cover 142 surrounds the protruding shaft 122, extends from the protruding shaft 122 to a position outside the inner circumference of the opening 33 over the entire circumference, and is mounted on the flange 30 from above by bolt fastening or the like. Mounting on the flange 30 from above is included in mounting on the base 10 from outside the base 10 (base side link).

[0085] The second cover 144 surrounds the protruding shaft 122 at a position below the first cover 142, extends from the protruding shaft 122 to a position outside the inner circumference of the motor cover 116 over the entire circumference, and is attached to the motor cover 116 from above by bolt fastening or the like. The outer diameter of the second cover 144 may be smaller than the inner diameter of the opening 33. Thus, the entire cover 141 can be attached from above the flange 30 through the opening 33.

[0086] The outer seal 147 seals between the first cover 142 and the flange 30. For example, the outer seal 147 is an O-ring, which is disposed between the first cover 142 and the flange 30 so as to surround the protruding shaft 122, and is in close contact with the first cover 142 over the entire circumference. The intermediate seal 149 seals between the second cover 144 and the motor cover 116. For example, the intermediate seal 149 is an O-ring, which is disposed between the second cover 144 and the motor cover 116 so as to surround the protruding shaft 122, and is in close contact with the second cover 144 and the motor cover 116 over the entire circumference.

[0087] The telescopic portion 146 is a bellows-shaped hose that surrounds the protruding shaft 122 between the first cover 142 and the second cover 144, and is telescopic as the main body 110 is raised and lowered by the lifting actuator. The upper end of the telescopic portion 146 is connected to the first cover 142 in an airtight state throughout the entire circumference, and the lower end of the telescopic portion 146 is connected to the second cover 144 in an airtight state throughout the entire circumference.

[0088] The flange 30 may also include a first flange 35, a second flange 36, an adjustment plate 37, and a plurality of fastening members 38. The first flange 35 faces the inside of the chamber 90 (the conveying space S01). For example, the first flange 35 faces upward. The second flange 36 overlaps below the first flange 35 and faces outside the chamber 90. For example, the second flange 36 faces downward. The adjustment plate 37 is inserted between the first flange 35 and the second flange 36 to adjust the inclination of the second flange 36 relative to the first flange 35. The plurality of fastening members 38 fasten the second flange 36 to the first flange 35.

[0089] The lifting actuator 14 may be fixed to the second flange 36 . The opening 33 may be formed to penetrate both the first flange 35 and the second flange 36 , and the protruding shaft 122 may penetrate the second flange 36 and the first flange 35 and be fixed to the first link 50 .

[0090] According to the structure in which the second flange 36 is fastened to the first flange 35 via the adjustment plate 37, the inclination of the second flange 36 relative to the first flange 35 can be adjusted by partially disposing the adjustment plate 37 between the second flange 36 and the first flange 35 and changing the position, shape, size, etc. of the adjustment plate 37. Since the lifting actuator 14 is fixed to the second flange 36, the installation posture of the robot 2 in the conveying space S01 can be adjusted by adjusting the inclination of the second flange 36 relative to the first flange 35. In this way, the flange 30 can be used to adjust the installation posture of the robot 2.

[0091] The base side sealing member 140 may also seal between the inner seal 148 and the first flange 35. For example, the first cover 142 is mounted on the first flange 35 from above. The outer seal 147 is disposed between the first cover 142 and the first flange 35 so as to surround the protruding shaft 122, and is in close contact with the first cover 142 and the first flange 35 over the entire circumference.

[0092] The telescopic seal can easily absorb the change in the inclination of the second flange 36 relative to the first flange 35, and can maintain the sealing performance between the inside of the conveying space S01 and the outside of the conveying space S01.

[0093] Alternatively, the first flange 35 and the second flange 36 may separate the base 10 from the arm 4 and the hand 20, respectively, and the first flange 35 may extend over the entire periphery of the second flange 36. By providing the first flange 35 and the second flange 36 with an extension degree that separates the base 10 from the arm 4 and the hand 20, respectively, it is possible to ensure the amount of arrangement of the adjustment plate 37. In addition, by preventing the second flange 36 from entering the transport space S01, it is possible to easily maintain the sealing between the inside of the transport space S01 and the outside of the transport space S01.

[0094] 〔Second arm motor〕

[0095] like Figure 6 As shown, the second link 60 is located above the first link 50. The first link 50 includes an opening 54 that opens upward. At least a portion of the arm motor 201 is accommodated in the internal space 52 through the opening 54 from above.

[0096] The arm motor 201 is a radial gap motor, and includes a main body 210, an output shaft 220, bearings 224, 225, and a rotation sensor 260. The output shaft 220 protrudes upward from the internal space 52 and is fixed to the second connecting rod 60. The main body 210 is fixed to the first connecting rod 50, and the output shaft 220 is rotated around the second axis Ax2 by a rotating magnetic field around the second axis Ax2.

[0097] The main body 210 includes a motor housing 211, a fixed shaft 212, a through hole 214, a stator 215, and a motor seal 216. The motor housing 211 is open upward and downward, accommodates other components of the main body 210, and is fixed to the first connecting rod 50. For example, the motor housing 211 is mounted on the first connecting rod 50 from above around the opening 54 by bolt fastening or the like. The fixed shaft 212 is arranged in the motor housing 211 and is fixed to the motor housing 211 in a manner extending along the second axis Ax2. For example, the fixed shaft 212 includes a flange 213 that extends throughout the entire circumference below the motor housing 211 to a position outside the inner circumference of the motor housing 211, and the flange 213 is fixed to the motor housing 211 by bolt fastening or the like. The fixed shaft 212 may also include a through hole 214 that is open upward and downward along the second axis Ax2.

[0098] The stator 215 is cylindrical and is housed in the motor housing 211 in a manner surrounding the fixed shaft 212. The stator 215 includes a yoke portion fixed to the inner circumference of the motor housing 211 by, for example, shrink fit, and a plurality of coils disposed on the yoke portion in a manner surrounding the fixed shaft 212, and generating a rotating magnetic field according to the supply of electric power.

[0099] The motor seal 216 seals the motor housing 211 and the first connecting rod 50. For example, the motor seal 216 is an O-ring, which is disposed between the outer peripheral surface of the motor housing 211 and the inner peripheral surface of the opening 54 and is in close contact with the outer peripheral surface of the motor housing 211 and the inner peripheral surface of the opening 54 over the entire circumference.

[0100] The output shaft 220 includes a rotor 221 and a protruding shaft 222. The rotor 221 is cylindrical and is housed in the motor housing 211 at a position closer to the inside than the stator 215 so as to surround the fixed shaft 212. The rotor 221 includes, for example, an iron core and a plurality of permanent magnets disposed on the iron core so as to surround the fixed shaft 212. The rotor 221 is opposed to the stator 215 in a radial direction perpendicular to the second axis Ax2 and is directly affected by the rotating magnetic field generated by the stator 215.

[0101] The protruding shaft 222 is fixed to the upper end of the rotor 221, protrudes upward, and is fixed to the second link 60. The arm motor 201 may have a through hole 223 that penetrates the protruding shaft 222 along the second axis Ax2 and connects the internal space 52 of the first link 50 and the internal space 62 of the second link 60.

[0102] For example, the second link 60 is provided with an opening 63 that allows the through hole 223 to communicate with the internal space 62. In addition, the through hole 223 communicates with the internal space 52 of the first link 50 via the through hole 214. Thus, the through hole 223 and the through hole 214 become part of the wiring space S10, and the internal space 62 of the second link 60 communicates with the internal space 52 of the first link 50.

[0103] The bearings 224 and 225 are, for example, ball-type radial bearings, and are arranged vertically between the outer peripheral surface of the fixed shaft 212 and the inner peripheral surface of the rotor 221. The bearings 224 and 225 are respectively held by the fixed shaft 212, and hold the rotor 221 so as to rotate about the second axis Ax2.

[0104] The rotation sensor 260 detects the rotation of the output shaft 220. For example, the rotation sensor 260 has a disk 261 and a sensor head 262 provided in the motor housing 211. The disk 261 holds a pulse pattern arranged in the circumferential direction around the second axis Ax2 and is installed below the rotor 221. The sensor head 262 is an optical sensor that reads the pulse pattern of the disk 261 at a fixed position in the motor housing 211. The sensor head 262 generates a pulse signal corresponding to the read pulse pattern. The sensor head 262 is installed, for example, on the flange 213 of the fixed shaft 212. For example, the rotation sensor 260 outputs detection data indicating the rotation position (rotation angle) of the output shaft 220 as a detection result of the rotation of the output shaft 220 based on the counting result of the pulse signal generated by the sensor head 262.

[0105] The robot 2 may further include a hand-side sealing member 230 that seals between the second link 60 (hand-side link) and the protruding shaft 222, and a base-side sealing member 240 that seals between the first link 50 (base-side link) and the protruding shaft 222, corresponding to the arm motor 201. The wiring space S10 can be easily sealed.

[0106] Sealing the second link 60 and the protruding shaft 222 means substantially preventing the inside of the conveying space S01 and the inside of the wiring space S10 from communicating with the protruding shaft 222 via the second link 60. Sealing the first link 50 and the protruding shaft 222 means substantially preventing the inside of the conveying space S01 and the inside of the wiring space S10 from communicating with the protruding shaft 222 via the first link 50.

[0107] The hand-side sealing member 230 has an edge seal 231. The edge seal 231 is, for example, an O-ring, and is disposed between the protruding shaft 222 and the second link 60 so as to surround the through hole 223 and the opening 63, and is in close contact with the protruding shaft 222 and the second link 60 over the entire circumference.

[0108] The base-side sealing member 240 seals between the first link 50 and the protruding shaft 222. Sealing between the first link 50 and the protruding shaft 222 means substantially preventing the inside of the conveying space S01 and the inside of the wiring space S10 from communicating with each other through the first link 50 and the protruding shaft 222.

[0109] The base side sealing member 240 may also include a mechanical seal that allows the protruding shaft 222 to rotate relative to the first connecting rod 50 and is in close contact with the protruding shaft 222. By adopting the mechanical seal, the wiring space S10 can be sealed with a smaller driving resistance. Therefore, it is possible to take into account both high positioning accuracy and the sealing of the wiring space S10. Sealing between the first connecting rod 50 and the protruding shaft 222 is not necessarily limited to making the base side sealing member 240 in close contact with both the first connecting rod 50 and the protruding shaft 222. For example, sealing between the first connecting rod 50 and the protruding shaft 222 includes making the base side sealing member 240 in close contact with other components connected to the first connecting rod 50 in an airtight state and the protruding shaft 222.

[0110] As described above, the motor housing 211 is connected to the first link 50 in an airtight state via the motor seal 216. Therefore, the base-side seal member 240 can also seal between the first link 50 and the protruding shaft 222 by being in close contact with the motor housing 211 and the protruding shaft 222.

[0111] The base side sealing member 240 may also be mounted on the first link 50 in a state where it can be separated from the main body 210. The base side sealing member 240 may be worn out due to friction with the protruding shaft 222, but the worn base side sealing member 240 can be separated from the main body 210 and easily replaced. Therefore, the robot 2 is effective in both suppressing the generation of gas in the chamber 90 and maintaining the robot 2.

[0112] For example, the base side sealing member 240 includes a cover 241, an outer seal 243, and an inner seal 244. The cover 241 is attached to the first link 50 from the outside.

[0113] The outer seal 243 seals between the cover 241 and the first link 50. The inner seal 244 allows the protruding shaft 222 to rotate relative to the cover 241 and seals between the cover 241 and the protruding shaft 222. Since the base side sealing member 240 has a structure including the cover 241, the outer seal 243 and the inner seal 244, both the reliability of the seal and the maintainability of the base side sealing member 240 can be taken into account.

[0114] Mounting the cover 241 on the first link 50 is not necessarily limited to directly mounting the cover 241 on the first link 50. For example, mounting the cover 241 on the first link 50 includes mounting the cover 241 on other components fixed to the first link 50. For example, the cover 241 surrounds the protruding shaft 222, extends over the entire circumference to a position outside the inner circumference of the motor housing 211, and is mounted on the motor housing 211 from above by bolt fastening or the like.

[0115] Sealing between the cover 241 and the first connecting rod 50 by the outer seal 243 is not necessarily limited to making the outer seal 243 in close contact with both the cover 241 and the first connecting rod 50. For example, sealing between the cover 241 and the first connecting rod 50 includes making the outer seal 243 in close contact with other components connected to the first connecting rod 50 in an airtight state and the cover 241. For example, the outer seal 243 is an O-ring, which is arranged between the motor housing 211 and the cover 241 in a manner surrounding the protruding shaft 222, and is in close contact with the motor housing 211 and the cover 241 throughout the entire circumference.

[0116] The inner seal 244 is disposed between the outer circumferential surface of the protruding shaft 222 and the inner circumferential surface of the cover 241, and is in close contact with the cover 241 and the protruding shaft 222 over the entire circumference. For example, the inner seal 244 is the above-mentioned mechanical seal, and the fixed ring of the inner seal 244 is held in close contact with the inner circumferential surface of the cover 241, and the rotating ring of the inner seal 244 is held in close contact with the outer circumferential surface of the protruding shaft 222.

[0117] Sealing between cover 241 and protruding shaft 222 by inner seal 244 is not necessarily limited to making inner seal 244 close to both cover 241 and protruding shaft 222. For example, sealing between cover 241 and protruding shaft 222 includes making inner seal 244 close to other components connected to cover 241 in an airtight state and protruding shaft 222.

[0118] Alternatively, the cover 241 bulges from the first link 50 (first link) toward the second link 60 (second link), and in the direction along the second axis Ax2, the position of the inner seal 244 is farther from the first link 50 than the position of the outer seal 243. The sealing amount of the outer seal 243 and the sealing amount of the inner seal 244 can be ensured independently of each other. Therefore, the reliability of the seal and the maintainability of the base side seal member 240 can be further taken into account.

[0119] The second link 60 may further include a recessed portion 65. The recessed portion 65 opens toward the first link 50 and receives the cover 241 that bulges out from the first link 50. It is possible to suppress an increase in size of the robot 2 due to the sealing member.

[0120] The first connecting rod 50 may also have an opening 56. The opening 56 exposes the through hole 223 to the outside on the opposite side (below) to the side where the second connecting rod 60 is located. For example, the opening 56 exposes the through hole 223 in a direction away from the second connecting rod 60. The multi-jointed arm 3 may also have a back cover 251 that blocks the opening 56. The multi-jointed arm 3 may also have a back sealing member 250 that blocks the opening 56 in a manner that seals the through hole 223 in the internal space 52. By removing the back sealing member 250, cables and the like can be easily routed from the through hole 223 to the inside of the first connecting rod 50.

[0121] The back sealing member 250 includes a back cover 251 and a cover seal 253. The back cover 251 extends to a position outside the inner circumference of the opening 56 over the entire circumference to seal the opening 56 from below, and is mounted on the first connecting rod 50 by bolting or the like. The cover seal 253 seals between the back cover 251 and the first connecting rod 50. The cover seal 253 is, for example, an O-ring, and is disposed between the first connecting rod 50 and the back cover 251 in a manner surrounding the opening 56, and is in close contact with the first connecting rod 50 and the back cover 251 over the entire circumference.

[0122] The back cover 251 may have a recess 252 facing the inside of the first link 50. The recess 252 may be open toward the output shaft 220. The recess 252 allows the through hole 223 to communicate with the internal space 52 of the first link 50. By making the back cover 251 also constitute a part of the wiring space S10, further space saving of the arm 4 can be achieved.

[0123] 〔Hand Motor〕

[0124] like Figure 7 As shown, the hand 20 is arranged at a position higher than the second link 60, and the second hand 70 is arranged at a position higher than the hand 20. The hand motor 301 may also include: an output shaft 350 (first output shaft); a stator 342 (first stator), which rotates the hand 20 around the third axis Ax3 (hand axis) by causing a rotating magnetic field to act on the output shaft 350; an output shaft 320 (second output shaft), which passes through the output shaft 350 along the third axis Ax3; and a stator 315 (second stator), which rotates the second hand 70 around the third axis Ax3 by causing a rotating magnetic field to act on the output shaft 320.

[0125] By utilizing the interior of the output shaft 350 as a space for arranging the output shaft 320 , it is possible to further reduce the size of the hand motor 301 .

[0126] Alternatively, the stator 342 and the stator 315 may be fixed to the second link 60 (base side link), the output shaft 350 may be fixed to the hand 20, the output shaft 320 may pass through the output shaft 350 and the hand 20 and be fixed to the second hand 70, and the stator 342 may be located between the hand 20 and the stator 315. This may further reduce the size of the hand motor 301.

[0127] The hand motor 301 may also have: a first bearing, which is retained on the second connecting rod 60, to retain the output shaft 320 or the output shaft 350 to rotate around a third axis Ax3; and a second bearing, which is retained on the output shaft 320 between the outer periphery of the output shaft 320 and the inner periphery of the output shaft 350, to retain the output shaft 350 to rotate around the third axis Ax3.

[0128] For example, the hand motor 301 has: bearings 323, 324 (first bearings), which are retained on the second connecting rod 60 to retain the output shaft 320 for rotation around the third axis Ax3; and bearings 355, 356 (second bearings), which are retained on the output shaft 320 to retain the output shaft 350 for rotation around the third axis Ax3.

[0129] By utilizing the space between the output shaft 350 and the output shaft 320 as a bearing arrangement space, the output shaft 350 and the output shaft 320 are held mutually, thereby achieving both miniaturization and rigidity of the drive system of the multi-stage hand 20 and the second hand 70 .

[0130] Alternatively, the stator 342 may be mounted on the second link 60 from a side (e.g., above) where the hand 20 and the second hand 70 are arranged, and the stator 315 may be mounted on the second link 60 from a side (e.g., below) opposite to the side where the hand 20 and the second hand 70 are arranged. The stator 315 and the stator 342 may be mounted from different directions, thereby improving the assemblability of the robot 2.

[0131] Alternatively, the hand motor 301 further includes a fixed shaft 312 fixed to the second link 60 and inserted into the output shaft 320 along the third axis Ax3, and the bearings 323 and 324 are held on the fixed shaft 312 between the outer periphery of the fixed shaft 312 and the inner periphery of the output shaft 320 to hold the output shaft 320.

[0132] The hand motor 301 may also be a radial gap motor. For example, the output shaft 320 may also be opposite to the stator 315 in a radial direction perpendicular to the third axis Ax3, and receive a rotating magnetic field from the stator 315. The output shaft 350 may also be opposite to the stator 342 in the radial direction, and receive a rotating magnetic field from the stator 342.

[0133] As an example, the hand motor 301 includes a body 310, an output shaft 320, bearings 323, 324, a rotation sensor 330, a body 340, an output shaft 350, bearings 355, 356, and a rotation sensor 360. The second link 60 includes an opening 68 opened downward. At least a portion of the body 310 is received in the internal space 62 from below through the opening 68.

[0134] The main body 310 includes a motor housing 311, a fixed shaft 312, a stator 315, a motor seal 316, and a motor seal 317. The motor housing 311 is open upward and downward, accommodates other components of the main body 310, and is fixed to the second connecting rod 60. For example, the motor housing 311 is mounted on the second connecting rod 60 from below around the opening 68 by bolt fastening or the like. The fixed shaft 312 is arranged in the motor housing 311 and is fixed to the motor housing 311 in a manner extending along the third axis line Ax3. For example, the fixed shaft 312 includes a flange 313 that extends to a position outside the inner circumference of the motor housing 311 throughout the entire circumference below the motor housing 311, and the flange 313 is fixed to the motor housing 311 by bolt fastening or the like.

[0135] The stator 315 is cylindrical and is housed in the motor housing 311 in a manner surrounding the fixed shaft 312. The stator 315 includes: a yoke portion, which is fixed to the inner circumference of the motor housing 311 by, for example, shrink fit, and a plurality of coils, which are arranged on the yoke portion in a manner surrounding the fixed shaft 312 and generate a rotating magnetic field according to the supply of electric power.

[0136] The motor seal 316 seals between the motor housing 311 and the second connecting rod 60. For example, the motor seal 316 is an O-ring, which is disposed between the second connecting rod 60 and the motor housing 311 in a manner of surrounding the opening 68, and is in close contact with the second connecting rod 60 and the motor housing 311 throughout the entire circumference. The motor seal 317 seals between the motor housing 311 and the flange 313. For example, the motor seal 317 is an O-ring, which is disposed between the motor housing 311 and the flange 313 in a manner of surrounding the fixed shaft 312, and is in close contact with the motor housing 311 and the flange 313 throughout the entire circumference.

[0137] The output shaft 320 includes a rotor 321 and a protruding shaft 322. The rotor 321 is cylindrical and is housed in the motor housing 311 at a position closer to the inside than the stator 315 so as to surround the fixed shaft 312. The rotor 321 includes, for example, an iron core and a plurality of permanent magnets provided on the iron core so as to surround the fixed shaft 312. The rotor 321 is opposed to the stator 315 in a radial direction perpendicular to the third axis Ax3 and is directly affected by the rotating magnetic field generated by the stator 315. The protruding shaft 322 is fixed to the upper end of the rotor 321, protrudes upward, and is fixed to the second hand 70.

[0138] The bearings 323 and 324 are, for example, ball-type radial bearings, and are arranged vertically between the outer circumference of the fixed shaft 312 and the inner circumference of the rotor 321. The bearings 323 and 324 are respectively held by the fixed shaft 312, and hold the rotor 321 so as to rotate about the third axis Ax3.

[0139] The rotation sensor 330 detects the rotation of the output shaft 320. For example, the rotation sensor 330 is a rotary encoder, and has a disk 331 and a sensor head 332 provided in the motor housing 311. The disk 331 holds a pulse pattern arranged in the circumferential direction around the third axis Ax3, and is installed below the rotor 321. The sensor head 332 is an optical sensor that reads the pulse pattern of the disk 331 at a fixed position in the motor housing 311. The sensor head 332 generates a pulse signal corresponding to the read pulse pattern. The sensor head 332 is, for example, mounted on the flange 313 of the fixed shaft 312. For example, the rotation sensor 330 outputs detection data indicating the rotation position (rotation angle) of the output shaft 320 as a detection result of the rotation of the output shaft 320 based on the counting result of the pulse signal generated by the sensor head 332.

[0140] The second link 60 further includes an opening 69 opened upward. At least a portion of the main body 340 is received in the internal space 62 from above through the opening 69.

[0141] The main body 340 includes a motor housing 341, a stator 342, and a motor seal 343. The motor housing 341 is open upward and downward, accommodates other components of the main body 340 and the protruding shaft 322 of the output shaft 320, and is fixed to the second connecting rod 60. For example, the motor housing 341 is mounted on the second connecting rod 60 from above around the opening 69 by bolt fastening or the like.

[0142] The stator 342 is cylindrical and is housed in the motor housing 341 in a manner surrounding the protruding shaft 322. The stator 342 includes a yoke portion fixed to the inner circumference of the motor housing 341 by, for example, shrink fit, and a plurality of coils disposed on the yoke portion in a manner surrounding the protruding shaft 322, and generating a rotating magnetic field in response to the supply of electric power.

[0143] The motor seal 343 seals between the motor housing 341 and the second link 60. For example, the motor seal 343 is an O-ring, and is disposed between the second link 60 and the motor housing 341 to surround the opening 69 and is in close contact with the second link 60 and the motor housing 341 over the entire circumference.

[0144] The output shaft 350 includes a rotor 351 and a protruding shaft 352. The rotor 351 is cylindrical and is housed in the motor housing 341 at a position closer to the inside than the stator 342 so as to surround the protruding shaft 322. The rotor 351 includes, for example, an iron core and a plurality of permanent magnets provided on the iron core so as to surround the protruding shaft 322. The rotor 351 is opposed to the stator 342 in a radial direction perpendicular to the third axis line Ax3 and is directly affected by the rotating magnetic field generated by the stator 342.

[0145] The protruding shaft 352 is cylindrical and surrounds the protruding shaft 322 between the hand 20 and the rotor 351. The protruding shaft 352 is fixed to the upper end of the rotor 351, protrudes upward, and is fixed to the hand 20.

[0146] The bearings 355 and 356 are, for example, ball-type radial bearings, and are arranged vertically between the inner circumference of the protruding shaft 352 and the outer circumference of the protruding shaft 322. The bearings 355 and 356 are respectively held by the protruding shaft 322, and hold the rotor 351 to rotate about the third axis Ax3.

[0147] The rotation sensor 360 detects the rotation of the output shaft 350. For example, the rotation sensor 360 is a rotary encoder having a disk 361 and a sensor head 362. The disk 361 holds a pulse pattern arranged in a circumferential direction around the third axis Ax3 and is installed below the rotor 351. The sensor head 362 is an optical sensor that reads the pulse pattern of the disk 361 at a fixed position in the main body 340. The sensor head 362 generates a pulse signal corresponding to the read pulse pattern. The sensor head 362 is installed, for example, in the motor housing 311 of the main body 310. For example, the rotation sensor 360 outputs detection data indicating the rotation position (rotation angle) of the output shaft 350 as a detection result of the rotation of the output shaft 350 based on the counting result of the pulse signal generated by the sensor head 362.

[0148] The robot 2 may further include a first hand sealing member 370 and a second hand sealing member 380 corresponding to the hand motor 301 .

[0149] The first hand sealing member 370 seals between the second connecting rod 60 and the protruding shaft 352 in a manner that seals the wiring space S10 in the conveying space S01. For example, the first hand sealing member 370 seals between the second connecting rod 60 and the protruding shaft 352 in a manner that airtightly separates the wiring space S10 from the conveying space S01. The first hand sealing member 370 can also be installed on the second connecting rod 60 in a state that can be separated from the main body 340. The first hand sealing member 370 may be worn out due to friction between the protruding shaft 352, but the worn first hand sealing member 370 can be separated from the main body 340 and easily replaced. Therefore, the robot 2 is effective in taking into account both the suppression of gas generation in the chamber 90 and the maintainability. Installing the first hand sealing member 370 on the second connecting rod 60 is not necessarily limited to directly installing the first hand sealing member 370 on the second connecting rod 60. For example, attaching the first hand seal member 370 to the second link 60 includes attaching the first hand seal member 370 to another member fixed to the second link 60. For example, the first hand seal member 370 is attached to the motor housing 341 from above.

[0150] For example, the first hand seal member 370 includes an inner seal 371 and a seal cover 372. The inner seal 371 seals between the second connecting rod 60 and the protruding shaft 352. The sealing between the second connecting rod 60 and the protruding shaft 352 by the inner seal 371 is not necessarily limited to making the inner seal 371 close to both the second connecting rod 60 and the protruding shaft 352. For example, the sealing between the second connecting rod 60 and the protruding shaft 352 includes making the inner seal 371 close to other components connected to the second connecting rod 60 in an airtight state and the protruding shaft 352.

[0151] For example, the inner seal 371 is a mechanical seal, and a fixed ring of the inner seal 371 is in close contact with the inner peripheral surface of the motor housing 341 connected to the second connecting rod 60 in an airtight state, and a rotating ring of the inner seal 371 is in close contact with the outer peripheral surface of the protruding shaft 352. The sealing cover 372 covers the inner seal 371 from above around the protruding shaft 352 and is mounted on the motor housing 341 by bolting or the like.

[0152] The second hand seal member 380 seals between the protruding shaft 352 and the protruding shaft 322 in a manner that the wiring space S10 is sealed in the conveying space S01. The second hand seal member 380 may be attached to the protruding shaft 352 in a state that it can be separated from the main body 310 and the main body 340. The reliability of the seal and the maintainability of the second hand seal member 380 can be achieved at the same time.

[0153] For example, the second hand seal member 380 may also include a second cover 381, a second outer seal 386, and a second inner seal 387. The second cover 381 surrounds the protruding shaft 322 and is mounted on the protruding shaft 352. The second outer seal 386 seals between the second cover 381 and the protruding shaft 352. The second inner seal 387 allows the protruding shaft 322 to rotate relative to the second cover 381 and seals between the second cover 381 and the protruding shaft 322. It is possible to further balance the reliability of the seal and the maintainability of the second hand seal member 380.

[0154] The second cover 381 may also hold the hand 20. By using the second cover 381 as a hand holding member, the number of components can be reduced.

[0155] For example, the second cover 381 includes a fitting portion 382, ​​a flange 383, and a fitting portion 384. The fitting portion 382 is fitted into the protruding shaft 352 from above. The flange 383 protrudes outward from the outer peripheral surface of the fitting portion 382 over the entire circumference above the fitting portion 382. The fitting portion 384 protrudes further upward from the flange 383 with a smaller outer diameter than the flange 383.

[0156] The flange 383 is attached to the protruding shaft 352 by bolt fastening or the like at a position inside the outer periphery of the fitting portion 384. The hand 20 has an opening 21 corresponding to the fitting portion 384. The fitting portion 384 is fitted into the opening 21 from below. The flange 383 is attached to the hand 20 by bolt fastening or the like at a position outside the outer periphery of the fitting portion 384.

[0157] The second outer seal 386 seals between the fitting portion 382 and the protruding shaft 352. The second outer seal 386 is, for example, an O-ring, and is disposed between the outer peripheral surface of the fitting portion 382 and the inner peripheral surface of the protruding shaft 352 over the entire circumference.

[0158] The second inner seal 387 is, for example, a mechanical seal, and its fixed ring is held in close contact with the inner circumferential surface of the second cover 381 , and its rotating ring is held in close contact with the outer circumferential surface of the protruding shaft 322 .

[0159] As exemplified above, by combining the first hand sealing member 370 that seals between the second link 60 and the protruding shaft 352 and the second hand sealing member 380 that seals between the protruding shaft 352 and the protruding shaft 322, it is possible to achieve both miniaturization of the drive system of the hand 20 and the second hand 70 and sealing of the wiring space S10.

[0160] [Variation]

[0161] exist Figure 7, an example is shown in which the motor housing 341 of the main body 340 is mounted on the second connecting rod 60 from above together with the stator 342, and the motor housing 311 of the main body 310 is mounted on the second connecting rod 60 from below together with the stator 315, but the main body 310 and the main body 340 may be integrated and mounted on the second connecting rod 60 from the same direction. For example, Figure 8 The hand motor 301 shown has a motor housing 302 and a motor seal 306 instead of the motor housings 341 , 311 and the motor seal 343 .

[0162] The motor housing 302 is unitized by housing the stators 342 and 315, the output shafts 350 and 320, and the fixed shaft 312. The motor housing 302 is mounted on the second connecting rod 60 from the side where the hand 20 and the second hand 70 are arranged. The motor housing 302 allows the drive system of the hand 20 and the drive system of the second hand 70 to be integrally assembled to the second connecting rod 60, thereby improving the assemblability.

[0163] The motor seal 306 seals between the motor housing 302 and the second connecting rod 60. For example, the motor seal 306 is an O-ring, and is disposed between the second connecting rod 60 and the motor housing 302 to surround the opening 69 and is in close contact with the second connecting rod 60 and the motor housing 302 over the entire circumference.

[0164] The motor housing 302 may also include a first housing 303, a second housing 305, and a plurality of fastening members 304. The first housing 303 accommodates the stator 342. The second housing 305 accommodates the stator 315. The plurality of fastening members 304 are, for example, bolts, and fasten the second housing 305 to the first housing 303. After the stator 342 and the like are separately assembled with respect to the first housing 303 and the stator 315 and the like are assembled with respect to the second housing 305, the second housing 305 can be mounted to the first housing 303, so that the assemblability is further improved.

[0165] In at least any one of the plurality of actuators 40 that are direct drive motors, the stator may be directly embedded in the base-side link or the hand-side link. Fig. 9 In the arm motor 201 , a structure in which the stator 215 is directly embedded in the first link 50 is illustrated.

[0166] The first link 50 is provided with a storage hole 57 that opens upward and downward instead of the opening 54. Also, next to the storage hole 57, an opening 58 is formed that allows the internal space 52 to communicate with the downward direction.

[0167] The stator 215 is received in the receiving hole 57 from above and fixed to the inner peripheral surface of the receiving hole 57 by shrink fitting, etc. The flange 213 of the fixed shaft 212 is attached to the first link 50 around the receiving hole 57 by bolt fastening, etc.

[0168] The cover 241 of the base side sealing member 240 is attached to the motor housing 211 by bolt fastening or the like around the storage hole 57. The outer seal 243 is in close contact with the first link 50 and the cover 241 over the entire circumference of the storage hole 57.

[0169] The back sealing member 250 seals the entire circumference of the storage hole 57 and the opening 58. When the back sealing member 250 is attached to the first link 50, the recessed portion 252 of the back cover 251 allows the protruding shaft 222 to communicate with the internal space 52.

[0170] When the stator is directly embedded in the connecting rod, it is difficult to replace the motor itself. Therefore, it is more beneficial to be able to remove the base-side sealing member 240 separately from the main body 210 and replace it.

[0171] exist Fig. 9 In the embodiment, the fixed shaft 212 is detachably mounted on the first link 50. By stabilizing the posture of the protruding shaft 222 using the fixed shaft 212, the reliability of the seal of the base side seal member 240 can be improved. In addition, since the fixed shaft 212 can be detached, the maintainability of the arm motor 201 is improved.

[0172] The fixed shaft 212 is mounted on the first link 50 from the side opposite to the side where the second link 60 is located, and the back seal member 250 is mounted on the first link 50 in a manner that seals the space between the fixed shaft 212 and the protruding shaft 222 in the first link 50. Both the workability of attaching and detaching the fixed shaft 212 and the sealing performance between the fixed shaft 212 and the protruding shaft 222 can be taken into consideration.

[0173] Fig.10 The structure in which the stator 315 and the stator 342 are directly embedded in the second connecting rod 60 in the hand motor 301 is illustrated. The second connecting rod 60 has a first receiving hole 611 and a second receiving hole 612 instead of the opening 68 and the opening 69. The first receiving hole 611 is opened on the side (upper) where the hand 20 and the second hand 70 are arranged, and receives the stator 342. For example, the first receiving hole 611 is opened toward both the hand 20 and the second hand 70. The second receiving hole 612 is opened on the opposite side (lower) to the side where the hand 20 and the second hand 70 are arranged, and receives the stator 315. For example, the second receiving hole 612 is opened in a direction away from both the hand 20 and the second hand 70. The second connecting rod 60 may also have an inward flange 613 that separates the first receiving hole 611 and the second receiving hole 612 and surrounds the protruding shaft 322.

[0174] An opening 614 is formed beside the second storage hole 612 to allow the internal space 62 to communicate with the bottom. The opening 614 and the second storage hole 612 may be connected.

[0175] The stator 342 is received in the first receiving hole 611 from above, and is directly fixed to the inner surface of the first receiving hole 611 by, for example, shrink fit. The stator 315 is received in the second receiving hole 612 from below, and is directly fixed to the inner surface of the second receiving hole 612 by, for example, shrink fit. By omitting the motor housing 311 and the motor housing 341, the periphery of the hand motor 301 can be further miniaturized.

[0176] The flange 313 of the fixed shaft 312 is attached to the second link 60 around the second receiving hole 612 by bolt fastening or the like.

[0177] The first hand seal member 370 further includes a cover 373 and an outer seal 374. The cover 373 is attached to the second link 60 from the outside. The cover 373 surrounds the protruding shaft 322, extends to the outside of the inner circumference of the first receiving hole 611 over the entire circumference, and is attached to the second link 60 from above by bolt fastening or the like.

[0178] The outer seal 374 seals between the cover 373 and the second connecting rod 60. For example, the outer seal 374 is an O-ring, which is arranged between the cover 373 and the second connecting rod 60 in a manner to surround the protruding shaft 352, and is in close contact with the cover 373 and the second connecting rod 60 over the entire circumference. The inner seal 371 allows the protruding shaft 352 to rotate relative to the cover 373, and seals between the cover 373 and the protruding shaft 352. The sealing cover 372 is mounted on the cover 373 by bolting or the like.

[0179] The multi-joint arm 3 may further include a back seal member 390 that seals the second storage hole 612 and the opening 614. The back seal member 390 can easily seal the drive system of the hand 20 and the second hand 70 that do not include the motor housing 311, 341. By removing the back seal member 390, the fixing shaft 312 can be easily attached and detached, wiring to the stators 315, 342, wiring to the rotation sensors 330, 360, etc. can be easily performed.

[0180] The back sealing member 390 includes a back cover 391 and a cover seal 393. The back cover 391 extends all around to a position outside the inner periphery of the second receiving hole 612 and the opening 614 to seal the second receiving hole 612 and the opening 614 from below, and is mounted on the second connecting rod 60 by bolt fastening or the like. The cover seal 393 seals between the back cover 391 and the second connecting rod 60. The cover seal 393 is, for example, an O-ring, and is disposed between the second connecting rod 60 and the back cover 391 around the second receiving hole 612 and the opening 614, and is in close contact with the second connecting rod 60 and the back cover 391 all around.

[0181] The back cover 391 may have a recessed portion 392 facing the inside of the second link 60. The recessed portion 392 allows the bearing 323 to communicate with the internal space 62 of the second link 60. By making the back cover 391 also constitute a part of the wiring space S10, further space saving of the arm 4 can be achieved.

[0182] The stator 342 (first stator) and the stator 315 (second stator) may also be arranged between the rotation sensor 360 (first rotation sensor) and the rotation sensor 330 (second rotation sensor). For example, the rotation sensor 330 is arranged below the stator 315, and the rotation sensor 360 is arranged above the stator 342. In a state where the stator 342 is fixed to the inner surface of the first storage hole 611 and the stator 315 is fixed to the inner surface of the second storage hole 612, the rotation sensor 360 and the rotation sensor 330 can be easily assembled. Therefore, the assemblability can be improved.

[0183] For example, the disk 361 of the rotation sensor 360 is mounted on the protruding shaft 352 at a position above the rotor 351 and is located in the cover 373. The sensor head 362 is mounted on the cover 373. The disk 331 of the rotation sensor 330 is mounted below the rotor 321. The sensor head 332 is mounted on the flange 313. The assemblability can be further improved.

[0184] Alternatively, a first recess 621 partially separated from the stator 342 may be formed on the inner surface of the first receiving hole 611, and a second recess 622 partially separated from the stator 315 may be formed on the inner surface of the second receiving hole 612. In the rotation sensor 360, the first sensor cable C21 may be arranged via the first recess 621. In the rotation sensor 330, the second sensor cable C22 may be arranged via the second recess 622. The enlargement of the second link 60 can be suppressed, and the wiring paths of the first sensor cable C21 and the second sensor cable C22 can be ensured.

[0185] like Fig.11 As shown, the robot 2 may also include an axial gap type hand motor 701 instead of the radial gap type hand motor 301. By setting the arm motor 101 and the arm motor 201 that exert a larger torque than the hand motor 701 to the radial gap type, and setting the hand motor 701 that does not exert a larger torque than the arm motor 101 and the arm motor 201 to the axial gap type, it is possible to achieve both high positioning accuracy and miniaturization.

[0186] The hand motor 701 has: an output shaft 740 (first output shaft); a stator 731 (first stator), which rotates the hand 20 around a third axis Ax3 (hand axis) by causing a rotating magnetic field to act on the output shaft 740; an output shaft 720 (second output shaft), which passes through the output shaft 740 along the third axis Ax3; and a stator 711 (second stator), which rotates the second hand 70 around the third axis Ax3 by causing a rotating magnetic field to act on the output shaft 720.

[0187] The output shaft 740 has a rotor 742 (first rotor) that faces the stator 731 along the third axis Ax3 (axial direction) and receives a rotating magnetic field from the stator 731, and the output shaft 720 has a rotor 722 (second rotor) that faces the stator 711 along the third axis Ax3 (axial direction) and receives a rotating magnetic field from the stator 711. The drive system of the multi-stage hand 20 and the second hand 70 can be further reduced in height.

[0188] Alternatively, the stator 731 and the stator 711 are fixed to the second connecting rod 60 (base side connecting rod), the output shaft 740 is fixed to the hand 20 , the output shaft 720 passes through the output shaft 740 and the hand 20 and is fixed to the second hand 70 , and the stator 731 is located between the hand 20 and the stator 711 .

[0189] The hand motor 701 may also have: a first bearing, which is retained on the second connecting rod 60, to retain the output shaft 720 or the output shaft 740 to rotate around a third axis Ax3; and a second bearing, which is retained on the output shaft 720 between the outer periphery of the output shaft 720 and the inner periphery of the output shaft 740, to retain the output shaft 740 to rotate around the third axis Ax3.

[0190] For example, the hand motor 701 has: a bearing 723 (first bearing) which is retained on the second connecting rod 60 to retain the output shaft 720 for rotation about the third axis Ax3; and bearings 743, 744 (second bearing) which are retained on the output shaft 720 to retain the output shaft 740 for rotation about the third axis Ax3.

[0191] By utilizing the space between the output shaft 740 and the output shaft 720 as a bearing arrangement space, the output shaft 740 and the output shaft 720 are held mutually, thereby achieving both miniaturization and rigidity of the drive system of the multi-stage hand 20 and the second hand 70 .

[0192] The hand motor 701 may further include a bearing 745 (third bearing) held by the second link 60 and holding the output shaft 740 so as to rotate about the third axis line Ax3. The rigidity can be further improved.

[0193] Alternatively, in the direction along the third axis Ax3, the stator 731 may be located between the stator 711 and the hand 20, the rotors 742 and 722 may be located between the bearings 723 and 745, and the bearing 745 may be located between the bearings 723 and the bearings 743 and 744. This can further achieve both miniaturization and rigidity.

[0194] Alternatively, the multi-jointed arm 3 further includes a frame 750 located between the second link 60 and the hand 20 and the second hand 70 and detachably mounted on the second link 60, the stator 731 being fixed to the second link 60 via the frame 750, and the stator 711 being directly fixed to the second link 60. This can further achieve both miniaturization and ease of assembly.

[0195] The bearing 723 and the bearing 745 may be cross roller bearings, and the bearings 743 and 744 may be radial bearings. This allows for a better balance between miniaturization and rigidity.

[0196] As an example, the hand motor 701 includes a main body 710, an output shaft 720, a bearing 723, a main body 730, an output shaft 740, bearings 743, 744, and a bearing 745. The main body 710 includes a stator 711. The stator 711 includes a yoke 712 and a plurality of coils 713. The yoke 712 is a disk-shaped with a center opening, and is directly fixed to the second connecting rod 60 by, for example, shrink fitting, in a manner of surrounding the third axis Ax3. The plurality of coils 713 are arranged in a manner of surrounding the third axis Ax3, and are fixed above the yoke 712.

[0197] The output shaft 720 has a main shaft 721 and a rotor 722. The main shaft 721 protrudes upward along the third axis Ax3 and is fixed to the second hand 70 through the frame 750 and the hand 20. The rotor 722 has an iron core 724 and a plurality of permanent magnets 725. The iron core 724 protrudes from the main shaft 721 in a flange shape over the entire circumference above the stator 711. The plurality of permanent magnets 725 are arranged in a manner surrounding the third axis Ax3 and are fixed below the iron core 724. The plurality of permanent magnets 725 are opposed to the plurality of coils 713 from above.

[0198] The bearing 723 is held by the second connecting rod 60, and the main shaft 721 is held to rotate around the third axis Ax3. The bearing 723 is, for example, a cross roller bearing. The cross roller bearing has built-in rollers that bear radial loads perpendicular to the third axis Ax3 and rollers that bear axial loads along the third axis Ax3. The bearing 723 can also be arranged at a height surrounded by the rotor 722.

[0199] The main body 730 has a stator 731. The stator 731 has a yoke 732 and a plurality of coils 733. The yoke 732 is a disk-shaped with a center opening, and is fixed to the second connecting rod 60 by, for example, shrink fitting, in a manner of surrounding the third axis Ax3. The plurality of coils 733 are arranged in a manner of surrounding the third axis Ax3, and are fixed below the yoke 732. The stator 731 is located above the stator 711 and the rotor 722, and surrounds the main shaft 721.

[0200] The output shaft 740 includes a main shaft 741 and a rotor 742. The main shaft 741 surrounds the main shaft 721 at a position above the rotor 742. The rotor 742 includes an iron core 746 and a plurality of permanent magnets 747. The iron core 746 extends from the main shaft 741 in a flange shape over the entire circumference between the stator 731 and the rotor 722. The plurality of permanent magnets 747 are arranged in a manner surrounding the third axis line Ax3 and are fixed above the iron core 746. The plurality of permanent magnets 747 are opposed to the plurality of coils 733 from below.

[0201] The bearings 743 and 744 are, for example, ball-type radial bearings, and are arranged vertically between the inner circumference of the main shaft 741 and the outer circumference of the main shaft 721. The bearings 743 and 744 are respectively held by the main shaft 721, and hold the main shaft 741 to rotate about the third axis line Ax3.

[0202] The bearing 745 is held by the frame 750, and holds the main shaft 741 so as to rotate about the third axis line Ax3. Holding by the frame 750 includes holding by the second link 60. The bearing 745 is, for example, a cross roller bearing.

[0203] The rotor 742 and the rotor 722 may be located between the bearing 723 and the bearing 745, and the bearing 745 may be located between the bearing 723 and the bearings 743 and 744. This can further achieve both miniaturization and rigidity.

[0204] exist Fig.11 , a structure in which a third bearing is provided in addition to the first bearing and the second bearing in an axial gap type hand motor 701 is illustrated. In the radial gap type hand motor 301, a third bearing may be provided which is held by the second link 60 and holds the main shaft 741 to rotate about the third axis Ax3.

[0205] like Fig.12As shown, the multi-joint arm 3 may also have a pipe T10 and an air-cooling flow path CR10 corresponding to the motor located inside the chamber 90 (for example, at least one of the arm motor 201 and the hand motor 301). The pipe T10 is arranged inside the wiring space S10, and guides the air for air cooling from the outside of the chamber 90. The air-cooling flow path CR10 receives the gas guided by the pipe T10 and sends it to the inside of the wiring space S10 through the periphery of the motor. For example, the air-cooling flow path CR10 for the arm motor 201 is formed on the first connecting rod 50, and the air-cooling flow path CR10 for the hand motor 301 is formed on the second connecting rod 60. By effectively utilizing the wiring space S10 as an exhaust path for the air-cooling gas, the motor can be cooled with a smaller number of pipes T10.

[0206] like Fig.13 As shown, the robot 2 may further include environmental sensors 810 and 820 for detecting the environment in the wiring space S10. The environmental sensor 810 detects the environment of the internal space 52. The environmental sensor 820 detects the environment of the internal space 62. Examples of the environmental sensors 810 and 820 include temperature sensors and humidity sensors.

[0207] It is also possible to configure that each of the plurality of sensors including the rotation sensors 150, 260, 330, 360 and the environmental sensors 810, 820 has an upper port UP and a lower port LP, and the upper port UP transmits the detection result of the sensor itself and the information received at the lower port LP. According to this configuration, the rotation sensors 150, 260, 330, 360 and the environmental sensors 810, 820 can also be daisy-chained through a series of cables C10 and connected to the robot controller 900 etc. arranged outside the chamber 90.

[0208] For example, cable C10 includes cable C11, cable C12, cable C13, cable C14, cable C15, and cable C16. Cable C11 connects the upper port UP of the environmental sensor 820 to the lower port LP of the rotation sensor 360. Cable C12 connects the upper port UP of the rotation sensor 360 to the lower port LP of the rotation sensor 330. Cable C13 connects the upper port UP of the rotation sensor 330 to the lower port LP of the environmental sensor 810. Cable C14 connects the upper port UP of the environmental sensor 810 to the lower port LP of the rotation sensor 260. Cable C15 connects the upper port UP of the rotation sensor 260 to the lower port LP of the rotation sensor 150. Cable C16 connects the upper port UP of the rotation sensor 150 to the robot controller 900. The above connection order is just an example and can also be changed.

[0209] The environment sensor 820 transmits the detection result of the environment of the internal space 62 from the upper port UP. The rotation sensor 360 receives the detection result of the environment of the environment sensor 820 at the lower port LP via the cable C11, and transmits the detection result of the rotation of the output shaft 350 and the information received at the lower port LP from the upper port UP. The rotation sensor 330 receives the information transmitted from the rotation sensor 360 at the lower port LP via the cable C12, and transmits the detection result of the rotation of the output shaft 320 and the information received at the lower port LP from the upper port UP. The environment sensor 810 receives the information transmitted from the rotation sensor 330 at the lower port LP via the cable C13, and transmits the detection result of the environment of the internal space 52 and the information received at the lower port LP from the upper port UP. The rotation sensor 260 receives the information transmitted from the environment sensor 810 at the lower port LP via the cable C14, and transmits the detection result of the rotation of the output shaft 220 and the information received at the lower port LP from the upper port UP. The rotation sensor 150 receives information sent from the rotation sensor 260 at the lower port LP via the cable C15, and sends the detection result of the rotation of the output shaft 120 and the information received at the lower port LP from the upper port UP. The robot controller 900 receives information sent from the rotation sensor 150 via the cable C16.

[0210] In the above structure, the environment sensor 820 is connected to the rotation sensor 360 via the cable C11 (sensor cable), and the rotation sensor 360 receives the detection result of the environment via the cable C11, and transmits both the detection result of the rotation and the detection result of the environment via the cables C12, C13, C14, C15, and C16 to the outside of the chamber 90. The environment sensor 810 is connected to the rotation sensor 260 via the cable C14 (sensor cable), and the rotation sensor 260 receives the detection result of the environment via the cable C14, and transmits both the detection result of the rotation and the detection result of the environment via the cables C15 and C16 to the outside of the chamber 90. The number of cables can be reduced, and the generation of gas from the cables can be further suppressed.

[0211] 〔Summarize〕

[0212] The above disclosure includes the following structures.

[0213] (1) The robot 2 comprises: a multi-jointed arm 3 having a hand 20 for supporting a substrate W, a base 10, an arm 4 connecting the hand 20 and the base 10, and a plurality of joints J10 arranged along the arm 4 and respectively moving around a vertical axis to change the position and posture of the hand 20 relative to the base 10; and a plurality of actuators 40, which respectively drive the plurality of joints J10, and the plurality of actuators 40 respectively have: a main body 110, 210, 340, which is fixed to one of the joints J10 to be driven in the multi-jointed arm 3 Connecting rod; and output shaft 120, 220, 350, which protrudes from the main body 110, 210, 340 along the axis and is fixed to another connecting rod of the multi-joint arm 3 and rotates around the axis. The multi-joint arm 3 and the multiple actuators 40 also have sealing components 140, 240, 370 corresponding to each other. The sealing component 140, 240, 370 is installed on a connecting rod in a state that it can be separated from the main body 110, 210, 340, so as to seal between the connecting rod and the output shaft 120, 220, 350.

[0214] By sealing between a connecting rod and the output shaft 120, 220, 350 using sealing members 140, 240, 370 corresponding to the plurality of actuators 40, the internal space 62 of the multi-joint arm 3 can be sealed. Therefore, the generation of gas from cables and the like wired to the actuator 40 can be suppressed. The sealing members 140, 240, 370 may be worn out due to friction with the output shaft 120, 220, 350, but the worn sealing members 140, 240, 370 can be separated from the main body 110, 210, 340 and easily replaced. Therefore, the robot 2 is effective in both suppressing the generation of gas in the chamber 90 and maintaining it.

[0215] (2) A robot 2 according to (1), wherein the sealing component 140, 240 of at least any one of the multiple actuators 40 includes: a cover 141, 241, which is mounted on a connecting rod from the outside; an outer seal 147, 243, which seals between the cover 141, 241 and a connecting rod; and an inner seal 148, 244, which allows the output shaft 120, 220 to rotate relative to the cover 141, 241 and seals between the cover 141, 241 and the output shaft 120, 220.

[0216] The reliability of sealing and the maintainability of the sealing members 140 and 240 can be achieved at the same time.

[0217] (3) A robot 2 according to (2), wherein the multi-joint arm 3 has a first link 50 and a second link 60 connected to each other between a base 10 and a hand 20, and a plurality of actuators 40 include an arm actuator 42 for driving a joint J10 connecting the first link 50 and the second link 60, wherein the arm actuator 42 has a main body 210 fixed to the first link 50, an output shaft 220 fixed to the second link 60, a cover 241 bulges from the first link 50 toward the second link 60, and in the direction along the axis, the position of the inner seal 244 is farther from the first link 50 than the position of the outer seal 243.

[0218] The reliability of the seal and the maintainability of the seal member 240 can be further achieved.

[0219] (4) The robot 2 according to (3), wherein the second link 60 has a recess 65 that opens toward the first link 50 and receives the cover 241 of the arm actuator 42 that bulges out from the first link 50 .

[0220] It is possible to suppress an increase in size of the robot 2 due to the sealing member 240 .

[0221] (5) The robot 2 according to (3) or (4), wherein the arm actuator 42 has a through hole 223 that penetrates the output shaft 220 along the axis and connects the internal space 62 of the first link 50 with the internal space 62 of the second link 60 .

[0222] Since the space between the output shaft 220 and the one connecting rod is sealed, an internal space connected to the one connecting rod from the inside of the output shaft 220 can be formed in a state of being sealed relative to the outside of the one connecting rod, and can be used for wiring of cables, etc.

[0223] (6) The robot 2 according to (5), wherein the first link 50 has an opening 56 that exposes the through hole 223 to the outside toward the side opposite to the side where the second link 60 is located, and the multi-jointed arm 3 further has a back cover 251 that blocks the opening 56.

[0224] A cable or the like can be easily routed from the through hole 223 of the output shaft 220 into the first link.

[0225] (7) The robot 2 according to (6), wherein the back cover 251 has a recessed portion 252 that opens toward the first link 50 so that the through hole 223 communicates with the internal space 52 of the first link 50 .

[0226] By making the back cover 251 also constitute a part of the wiring space, further space saving of the arm 4 can be achieved.

[0227] (8) A robot 2 according to any one of (2) to (7), wherein the multi-joint arm 3 includes a connecting rod connected to the base 10, and the plurality of actuators 40 include a base actuator 41 for driving a joint J10 connecting the base 10 and the connecting rod, the base 10 includes a flange 30 for separating the inside and outside of a chamber 90 for housing at least a portion of the multi-joint arm 3, and for the base actuator 41, a main body 110 is located outside the chamber 90, an output shaft 120 passes through the flange 30 and is fixed to the connecting rod, and a cover 141 is mounted on the flange 30.

[0228] The space of the robot 2 in the chamber 90 can be saved.

[0229] (9) The robot 2 according to (8), wherein the robot 2 further includes a lifting actuator 14, which is fixed to the flange 30 and causes the main body 110 of the base actuator 41 to rise and fall, and the cover 141 of the base actuator 41 has a telescopic portion 146 that is telescopic and retractable as the main body 110 is raised and lowered with the aid of the lifting actuator 14.

[0230] The driving resistance in both the lifting direction and the rotation direction can be suppressed to be small, and the wiring space can be sealed. Therefore, both high positioning accuracy and sealing of the internal space can be achieved.

[0231] (10) A robot 2 according to any one of (1) to (9), wherein the plurality of actuators 40 include a hand actuator 43, which causes the hand 20 to rotate around a vertical hand axis Ax3 at a joint J10 located at the farthest position relative to the base 10, and the multi-joint arm 3 also has a second hand 70 that rotates around the same hand axis Ax3 as the hand 20, and the output shaft 350 of the hand actuator 43 is fixed to the hand 20 serving as another connecting rod, and the hand actuator 43 also has a second output shaft 320, which passes through the output shaft 350 and is fixed to the second hand 70 and rotates independently of the output shaft 350, and the robot 2 also has a second sealing member 380, which is installed on the output shaft 350 in a detachable state to seal the output shaft 350 and the second output shaft 320.

[0232] It is possible to achieve both miniaturization of the drive systems of the hand 20 and the second hand 70 and sealing of the internal space.

[0233] (11) A robot 2 according to (10), wherein the second sealing member 380 includes: a second cover 381, which surrounds the second output shaft 320 and is installed on the output shaft 350; a second outer seal 386, which seals the second cover 381 and the output shaft 350; and a second inner seal 387, which allows the second output shaft 320 to rotate relative to the second cover 381 and seals the second cover 381 and the second output shaft 320.

[0234] The reliability of the seal and the maintainability of the second sealing member 380 can be further achieved.

[0235] (12) The robot 2 according to (11), wherein the second cover 381 holds the hand 20 .

[0236] By using the second cover 381 as a holding member for the hand 20 , the number of components can be reduced.

[0237] (13) A robot 2 according to any one of (1) to (12), wherein at least one of the multiple actuators 40 is a direct drive motor, and in the actuator 40 that is a direct drive motor, the main body 110, 210, 340 has an annular stator 115, 215, 342 directly embedded in a connecting rod, and the output shaft 120, 220, 350 includes a rotor housed in the stator 115, 215, 342, and the stator 115, 215, 342 rotates around the axis due to the rotating magnetic field acting on the rotor.

[0238] It is difficult to replace the direct drive motor in which the stator 115, 215, 342 is directly embedded in one connecting rod. Therefore, it is more beneficial to be able to separate the worn sealing member 140, 240, 370 from the main body 110, 210, 340 and easily replace it.

[0239] (14) The robot 2 according to (13), wherein the actuator 40 as a direct drive motor also has a fixed axis, which is mounted on a connecting rod in a detachable state and is inserted into the output shaft 120, 220, 350 along the axis, and the output shaft 120, 220, 350 rotates around the fixed axis.

[0240] By stabilizing the posture of the output shaft 120, 220, 350 by using the fixed shaft, it is possible to improve the reliability of the sealing of the sealing member 140, 240, 370. In addition, since the fixed shaft can be removed, the maintainability of the actuator 40 is improved.

[0241] (15) A robot 2 according to (14), wherein the fixed shaft is mounted on one connecting rod from the opposite side to the side where the other connecting rod is located, and the robot 2 also has a back sealing member 250, which is mounted on one connecting rod in a manner that seals the fixed shaft and the output shaft 120, 220, 350 within one connecting rod.

[0242] It is possible to achieve both the ease of attaching and detaching the fixed shaft and the sealability between the fixed shaft and the output shaft 120 , 220 , 350 .

[0243] As mentioned above, although embodiment was described, this disclosure is not necessarily limited to the said embodiment, Various changes are possible within the range which does not deviate from the summary.

Claims

1. A robot that transports a substrate, wherein: The robot has: a multi-jointed arm comprising a plurality of links connected by a plurality of joints; and Multiple actuators, The plurality of connecting rods include: a hand that supports the base plate; base; and one or more arm links connecting the hand to the base, The plurality of actuators drive the plurality of joints respectively around a plurality of vertical axes. The plurality of actuators respectively have: a body fixed to one of the plurality of links in a joint to be driven; and an output shaft protruding from the main body along the axis and fixed to another link of the plurality of links, and rotating about a vertical axis, The multi-joint arm further includes a sealing member corresponding to each of the plurality of actuators. The sealing member is mounted on the one connecting rod in a state of being detachable from the main body and seals between the one connecting rod and the output shaft.

2. The robot according to claim 1, wherein: The sealing member comprises: a cover mounted to the one connecting rod from the outside; an outer seal that seals between the cover and the one connecting rod; and An inner seal allows the output shaft to rotate relative to the cover and seals between the cover and the output shaft.

3. The robot according to claim 2, wherein: The one or more arm links include a first link and a second link connected to each other between the base and the hand, The plurality of actuators include an arm actuator that drives a joint connecting the first link and the second link. For the arm actuator, the main body is fixed to the first link, and the output shaft is fixed to the second link. The cover bulges from the first link toward the second link, In a direction along the axis, the inner seal is located farther from the first link than the outer seal.

4. The robot according to claim 3, wherein: The second link has a recessed portion that opens toward the first link and receives the cover of the arm actuator that bulges out from the first link.

5. The robot according to claim 3 or 4, wherein: The arm actuator has a through hole that penetrates the output shaft along the axis and allows an internal space of the first link to communicate with an internal space of the second link.

6. The robot according to claim 5, wherein: The first connecting rod has an opening that exposes the through hole to the outside in a direction away from the second connecting rod. The multi-jointed arm also has a back cover that closes the opening.

7. The robot according to claim 6, wherein: The back cover includes a recessed portion that opens toward the output shaft so that the through hole communicates with the internal space of the first connecting rod.

8. The robot according to claim 2, wherein: The one or more arm links include a first link connected to the base, The plurality of actuators include a base actuator that drives a joint connecting the base and the first link. The base includes a flange that separates the inside and outside of a chamber that accommodates at least a portion of the multi-jointed arm, For the base actuator, the body is located outside the chamber, the output shaft passes through the flange and protrudes from the body, and is fixed to the first connecting rod. The cover is mounted on the flange.

9. The robot according to claim 8, wherein: The robot further includes a lifting actuator, which is fixed to the flange and causes the main body of the base actuator to move up and down. The cover of the base actuator has an expansion and contraction portion that expands and contracts as the main body is raised and lowered by the lifting actuator.

10. The robot according to claim 1 or 2, wherein: The plurality of actuators include a hand actuator that rotates the hand about a vertical hand axis at a joint that is located farthest from the base, The multi-jointed arm also has a second hand, which rotates about the hand axis common to the first hand, The output shaft of the hand actuator is fixed to the hand as the other link, The hand actuator further includes a second output shaft, which passes through the output shaft and protrudes from the main body, is fixed to the second hand, and rotates independently of the output shaft. The robot further includes a second sealing member that is detachably mounted on the output shaft and seals a gap between the output shaft and the second output shaft.

11. The robot according to claim 10, wherein: The second sealing member comprises: a second cover surrounding the second output shaft and mounted on the output shaft; a second outer seal that seals between the second cover and the output shaft; and A second inner seal allows the second output shaft to rotate relative to the second cover and seals between the second cover and the second output shaft.

12. The robot according to claim 11, wherein: The second cover holds the hand.

13. The robot according to claim 1 or 2, wherein: at least one of the plurality of actuators is a direct drive motor, In the actuator as a direct drive motor, the main body has an annular stator directly embedded in the one connecting rod, and the output shaft receives a rotating magnetic field generated by the stator and rotates around the axis.

14. The robot according to claim 13, wherein: The actuator as the direct drive motor further includes a fixed shaft which is detachably mounted on the one connecting rod and inserted into the output shaft along the axis. The output shaft rotates around the fixed shaft.

15. The robot according to claim 14, wherein: The fixed shaft is mounted to the one connecting rod from the side opposite to the side where the other connecting rod is located, The robot further includes a back sealing member mounted on the one link so as to seal a space between the fixed shaft and the output shaft within the one link.

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