Reverse cutting machining process

Abstract

The invention provides a reverse cutting machining technology. The reverse cutting machining technology comprises the following steps that the total wire quantity S1 of a cutting wire net is determined; obtaining and calculating a cutter feeding wire amount L1, a main cutting wire amount L2, a wire take-up bow wire amount L3, a cutter take-up wire amount L4, a winding tension T0, a cutter feeding tension T1, a main cutting tension T2 and a cutting process pay-off amount S2 of the next cutter cutting process, wherein the cutter feeding wire amount L1, the main cutting wire amount L2, the wire take-up bow wire amount L3, the cutter take-up wire amount L4, the winding tension T0, the cutter feeding tension T1 and the main cutting tension T2 are obtained; calculating the total pay-off amount S4 required by the next cutting; forward paying-off is carried out, the cutting wire is conveyed from the paying-off side to the take-up side, and the conveying amount is S4; the real-time conveying amount of the cutting line is monitored, and the real-time conveying amount monitored in the forward paying-off process serves as the forward paying-off amount; at the moment that the forward pay-off amount reaches the preset node amount, the cutting line tension T < take-up > on the take-up side and the cutting line tension T < pay-off > on the pay-off side are adjusted; and reversely paying off and cutting, conveying the cutting wire from the take-up side to the paying-off side, and cutting the crystal bar by using the cutting wire.

Description

Technical Field

[0001] The invention relates to the technical field of semiconductor production, and in particular to a reverse cutting process. Background Art

[0002] The multi-wire cutting process is a process that uses a wire cutter and a diamond wire as a cutting operation device and a cutting wire respectively to cut a crystal rod to obtain a wafer. The cutting wire extending from the wire wheel on the side of the wire roller is wound around at least two wire rollers arranged at intervals and then wound around another wire wheel on the side of the wire roller, and a wire network is formed between multiple wire rollers. When cutting the crystal rod, the wire roller and the wire wheels on both sides of the wire roller rotate, and the cutting wire is transported from the wire wheel on the side of the wire roller to another wire wheel on the side of the wire roller. During the transportation of the cutting wire, the cutting wire needs to have a certain tension so as to cut the crystal rod efficiently and with high quality. Since the crystal rod cutting process includes multiple cutting stages, the cutting wire tension required for each cutting stage is different, and the cutting wire tension needs to be adjusted according to the cutting progress to meet the process and quality requirements of each cutting stage. The prior art transports the cutting wire by manually operating the wire cutter, and it is difficult to adjust the tension of the cutting wire as needed. The tension of the cutting wire is almost fixed during the transportation of the cutting wire. The cutting wire tension cannot well meet the process and quality requirements of each cutting stage, so that high-quality wafers cannot be efficiently cut as expected, resulting in a low yield rate of wafers. Summary of the invention

[0003] In view of this, the present invention provides a reverse cutting process, which adjusts the tension of a cutting wire used for cutting a crystal rod before reverse cutting so that the tension of the cutting wire meets the requirements of the reverse cutting process of the crystal rod, thereby efficiently cutting high-quality wafers.

[0004] The reverse cutting process based on the wire cutting machine of the present invention includes:

[0005] A. Determine the total quantity S1 of the cutting wire network;

[0006] B. Obtain and calculate the process requirements for the next cut, including the amount of wire used for cutting L1, the amount of wire used for main cutting L2, the amount of wire used for wire bow L3, the amount of wire used for cutting L4, the winding tension T0, the tension required for cutting T1, the tension required for main cutting T2, and the amount of wire release S2 for cutting process;

[0007] C. Calculate the total wire release amount S4 required for the next cutting according to the actual wire release amount L0 of the previous cutting and the wire consumption S0 of the next cutting process;

[0008] D. Forward pay-off, conveying the cutting wire from the pay-off side to the take-up side, with a conveying amount of S4;

[0009] E. Monitor the real-time delivery volume of the cutting line, and use the real-time delivery volume monitored during the forward pay-off process as the forward pay-off volume;

[0010] F. When the forward pay-off reaches the preset node amount, adjust the cutting line tension T on the take-up side respectively. 收 and the cutting wire tension T on the pay-off side 放 ;

[0011] G. Reverse wire pay-off and cutting, transporting the cutting wire from the wire taking-up side to the wire pay-off side, and using the cutting wire transported from the wire taking-up side to the wire pay-off side to cut the crystal rod.

[0012] In some embodiments, the cutting line tension T of the take-up side is adjusted separately. 收 and the cutting wire tension T on the pay-off side 放 include:

[0013] F01, when S4>S1+S2, adjust T at the moment of starting to pay out the line in the forward direction. 收 To make T 收 Reach T0, and adjust T at the moment of starting to pay out the line in the forward direction 放 To make T 放 Reach T0.

[0014] In some embodiments, the cutting line tension T on the take-up side is adjusted. 收 and the cutting wire tension T on the pay-off side 放 Also includes:

[0015] F02, the preset node quantity includes the first node quantity, the first node quantity is (S4-S2-S1), when the forward pay-off quantity reaches the first node quantity (S4-S2-S1), adjust T 放 To make T 放 Reach T2 and make T 收 Maintain T0.

[0016] In some embodiments, the cutting line tension T on the take-up side is adjusted. 收 and the cutting wire tension T on the pay-off side 放 Also includes:

[0017] F03, the preset node quantity includes the second node quantity, the second node quantity is (S4-S2), when the forward pay-off quantity reaches the second node quantity (S4-S2), T 放 Keep T2 and adjust T 收 To make T 收 Reach T2.

[0018] In some embodiments, the cutting line tension T on the take-up side is adjusted. 收 and the cutting wire tension T on the pay-off side 放 Also includes:

[0019] F04, the preset node quantity includes the third node quantity, the third node quantity is (S4-S1-L1), when the forward pay-off quantity reaches the third node quantity (S4-S1-L1), adjust T 放 To make T 放 Reach T1 and make T 收 Keep T2.

[0020] In some embodiments, the cutting line tension T on the take-up side is adjusted. 收 and the cutting wire tension T on the pay-off side 放 Also includes:

[0021] F05, the preset node quantity includes the fourth node quantity, the fourth node quantity is (S4-L1); when the forward pay-off quantity reaches the fourth node quantity (S4-L1), T 放 Keep T1 and adjust T 收 To make T 收 Reach T1.

[0022] In some embodiments, the cutting line tension T of the take-up side is adjusted separately. 收 and the cutting wire tension T on the pay-off side 放 include:

[0023] F11. When S4≤S1+S2 and S4>S2, adjust T at the moment of starting to pay out the line in the forward direction. 放 To make T 放 Reach T2 and adjust T at the moment of starting to release the line in the forward direction 收 To make T 收 Reach T0.

[0024] In some embodiments, the cutting line tension T on the take-up side is adjusted. 收 and the cutting wire tension T on the pay-off side 放 Also includes:

[0025] F12, the preset node quantity includes the second node quantity, the second node quantity is (S4-S2), when the forward pay-off quantity reaches the second node quantity (S4-S2), make T 放 Keep T2 and adjust T 收 To make T 收 Reach T2.

[0026] In some embodiments, the cutting line tension T on the take-up side is adjusted. 收 and the cutting wire tension T on the pay-off side 放 Also includes:

[0027] F13, the preset node quantity includes the third node quantity, the third node quantity is (S4-S1-L1), when the forward pay-off quantity reaches the third node quantity (S4-S1-L1), adjust T 放 To make T放 Reach T1 and make T 收 Keep T2.

[0028] In some embodiments, the cutting line tension T on the take-up side is adjusted. 收 and the cutting wire tension T on the pay-off side 放 Also includes:

[0029] F14, the preset node quantity includes the fourth node quantity, the fourth node quantity is (S4-L1), when the forward release quantity reaches the fourth node quantity (S4-L1), T 放 Keep T1 and adjust T 收 To make T 收 Reach T1.

[0030] In some embodiments, the cutting line tension T of the take-up side is adjusted separately. 收 and the cutting wire tension T on the pay-off side 放 include:

[0031] F21, when S4≤S1+S2 and S4≤S2, adjust T at the moment of starting forward pay-off. 收 To make T 收 Reach T2 and adjust T at the moment of starting to release the line in the forward direction 放 To make T 放 Reach T2.

[0032] In some embodiments, the cutting line tension T on the take-up side is adjusted. 收 and the cutting wire tension T on the pay-off side 放 Also includes:

[0033] F22, the preset node quantity includes the third node quantity, the third node quantity is (S4-S1-L1), when the forward pay-off quantity reaches the third node quantity (S4-S1-L1), adjust T 放 To make T 放 Reach T1 and make T 收 Keep T2.

[0034] In some embodiments, the cutting line tension T on the take-up side is adjusted. 收 and the cutting wire tension T on the pay-off side 放 Also includes:

[0035] F23, the preset node quantity includes the fourth node quantity, the fourth node quantity is (S4-L1), when the forward release quantity reaches the fourth node quantity (S4-L1), T 放 Keep T1 and adjust T 收 To make T 收 Reach T1.

[0036] In some embodiments, all the above steps are repeated, thereby repeatedly reverse-slicing the ingot.

[0037] The reverse cutting process of the present invention is suitable for the subsequent cutting operations of the crystal rods after the first cutting operation is completed. The tension of the cutting wire is pre-adjusted for different cutting stages in the reverse cutting process of the crystal rod. During the forward release, the corresponding cutting wire tension adjustment operation is performed at a specific tension adjustment node, and the cutting wire is prepared with tension for the subsequent reverse release cutting to meet the requirements of the cutting wire tension in each stage of the reverse cutting process, so that the tension change of the cutting wire is adapted to the advancement sequence of each stage of the reverse cutting. At the moment of entering each cutting stage, the tension of the cutting wire has already reached the expected value, so that in each cutting stage of the reverse cutting, the cutting wire can exert the best cutting ability, avoiding the tension of the cutting wire from being set too early and fading too early to cause poor cutting, and avoiding the tension of the cutting wire from lagging behind the specific cutting stage due to reaching the expected value too late, so that the best cutting ability of the cutting wire cannot be exerted in the specific cutting stage, and finally high-quality wafers can be obtained more efficiently; in addition, the present invention can also reduce the fluctuation amplitude of the tension of the cutting wire and prevent abnormal operation of the wire cutting machine. BRIEF DESCRIPTION OF THE DRAWINGS

[0038] Figure 1 A schematic diagram of a wire cutting machine used to implement the reverse cutting process of the present invention;

[0039] Figure 2 A first partial schematic diagram of a wire cutting machine used to implement the reverse cutting process of the present invention;

[0040] Figure 3 It is a second partial schematic diagram of the wire cutting machine used to implement the reverse cutting process of the present invention.

[0041] Explanation of reference numerals: 10, wire roller; 11, wire groove; 20, wire guide wheel; 30, pay-off wheel; 40, take-up wheel; 50, cutting wire; 51, wire net. DETAILED DESCRIPTION

[0042] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0043] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art of the present invention. The terms used herein in the specification of the present invention are only for the purpose of describing specific embodiments and are not intended to limit the present invention. The term "or / and" used herein includes any and all combinations of one or more related listed items.

[0044] The present invention provides a reverse cutting process for cutting a crystal rod, which is a type of multi-wire cutting process. In addition, the multi-wire cutting process also includes a tangent process. The multi-wire cutting process uses a wire cutter and a diamond wire as a cutting operation device and a cutting wire 50, respectively, to cut a whole section of the crystal rod into multiple wafers. Figure 1 The invention is a schematic diagram of a wire cutting machine capable of implementing a multi-wire cutting process. The wire cutting machine can implement both a forward cutting process and a reverse cutting process of the invention.

[0045] The wire sawing machine includes: a plurality of wire rollers 10 arranged in parallel and at intervals, a wire wheel 20, a crystal rod bearing mechanism, two sets of wire wheels, and two sets of wire wheel driving parts that respectively drive the two sets of wire wheels to rotate. One of the two sets of wire wheels is used as a pay-off wheel 30, and the other is used as a take-up wheel 40. Each set of wire wheel driving parts is connected to a set of wire wheels and drives the wire wheels to rotate. Figure 1-2 As shown, one group of wire wheels serves as a pay-off wheel 30 and is located on one side of the wire roller 10, and the other group of wire wheels serves as a take-up wheel 40 and is located on the other side of the wire roller 10. The cutting wire 50 extends from one group of wire wheels and is wound around at least two wire rollers 10, and then is wound around another group of wire wheels, thereby forming a wire net 51 between the multiple wire rollers 10.

[0046] When cutting the crystal rod, the wire roller 10 rotates and the two groups of wire wheels are rotated by the two groups of wire wheel driving parts respectively. The cutting wire 50 is transported from one group of wire wheels to the other group of wire wheels. The crystal rod carrying mechanism carries the crystal rod and drives the crystal rod to move relative to the wire mesh 51, so that the crystal rod contacts the wire mesh 51 and is gradually cut off by the wire mesh 51. The wire wheel 20 is used to guide the cutting wire 50 and can play a role in maintaining the stable transportation of the cutting wire 50.

[0047] When the wire cutting machine implements the tangent processing technology, the conveying direction of the cutting wire 50 is as follows Figure 1 As shown by the thin black arrow, the pay-off wheel 30 on the right side of the wire roller 10 releases the cutting wire 50, and the take-up wheel 40 on the left side of the wire roller 10 reels the cutting wire 50; when the wire cutting machine implements the reverse cutting process, the conveying direction of the cutting wire 50 is as shown in FIG. Figure 1As shown by the dotted arrow, the pay-off wheel 30 on the right side of the wire roller 10 is now used as a take-up wheel responsible for winding up the cutting wire 50, and the take-up wheel 40 on the left side of the wire roller 10 is now used as a pay-off wheel responsible for releasing the cutting wire 50. The process of conveying the cutting wire 50 along the direction of the thin black line arrow is called forward pay-off, and the process of conveying the cutting wire 50 along the direction of the dotted line arrow is called reverse pay-off.

[0048] See also Figure 2 and Figure 3 , the wire roller 10 is provided with a plurality of wire grooves 11 arranged at equal intervals in the axial direction of the wire roller 10, and the wire grooves 11 are for the cutting wire 50 to pass through and be wound around the outer periphery of the wire roller 10. The spacing between any two wire grooves 11 along the axial direction of the wire roller 10 is the groove distance A. When the cutting wire 50 is wound around a plurality of wire rollers 10 and a wire net 51 is formed, the distance between any two cutting wire segments on the wire net 51 is equal to the groove distance A. The total size of the wire net 51 along the axial direction of the wire roller 10 is the length B of the wire net 51. Therefore, the ratio of the length B of the wire net 51 to the groove distance A is the number of cutting wire segments contained in the wire net 51. Since the plurality of wire rollers 10 are arranged in parallel with each other, the lengths of the plurality of cutting wire loops wound around the outer periphery of the wire roller 10 are equal, and the length of each cutting wire loop is the circumference C1 of a single turn of the wire net 51.

[0049] The reverse cutting process of the present invention is applicable to the reverse cutting operation of the crystal rod in the subsequent cutting passes after the first cutting pass is completed, and the reverse cutting process of the present invention is performed at least from the second cut. The cutting segments used to cut the crystal rod in the subsequent cutting passes (including the second cut, the third cut, the fourth cut...) include the cutting segments used in the previous cutting of the crystal rod, that is, the cutting segments where the cutting line 50 contacts and cuts the crystal rod, and the cutting ability is weakened after the previous contact and cutting of the crystal rod, while the cutting segments used to cut the crystal rod in the first cutting pass are all brand new and have stronger cutting ability.

[0050] The reverse cutting process has further process requirements. The cutting process of each cutting knife includes the following four stages, namely the knife entry stage, the main cutting stage, the wire bow stage and the knife closing stage. The requirements for the tension of the cutting wire 50 to be achieved in different stages are different, and the requirements for the delivery amount of the cutting wire 50 are also different, and the delivery direction of the cutting wire 50 is also different in different stages. The delivery amount of the cutting wire 50 is the length of the cutting wire 50 delivered by the pay-off wheel. It can be understood that the delivery amount of the cutting wire 50 is also equal to the length of the cutting wire 50 wound by the take-up wheel.

[0051] by Figure 1 As an example of the reverse cutting process implemented by the wire cutting machine shown in the figure, when in the cutting stage and the main cutting stage, the cutting wire 50 is cut according to Figure 1 The dotted arrow direction is used for conveying, that is, the knife entry stage and the main cutting stage correspond to the reverse wire release process. When in the wire bow stage and the knife retracting stage, the cutting line 50 is conveyed in the direction of the dotted arrow. Figure 1 The medium and thin black line is transported in the direction of the arrow, that is, the bow-retracting stage and the knife-retracting stage correspond to the forward wire-releasing process.

[0052] The reverse cutting process of the present invention comprises the following steps:

[0053] A. Determine the total amount S1 of the cutting wire mesh 51;

[0054] B. Obtain and calculate the process requirements for the next cut, including the amount of wire used for cutting L1, the amount of wire used for main cutting L2, the amount of wire used for wire bow L3, the amount of wire used for cutting L4, the winding tension T0, the tension required for cutting T1, the tension required for main cutting T2, and the amount of wire release S2 for cutting process;

[0055] C. Calculate the total wire release amount S4 required for the next cutting according to the actual wire release amount L0 of the previous cutting and the wire consumption S0 of the next cutting process;

[0056] D. Forward pay-off, conveying the cutting line 50 from the pay-off side to the take-up side, with a conveying amount of S4;

[0057] E. monitoring the real-time delivery amount of the cutting line 50, and using the real-time delivery amount monitored during the forward pay-off process as the forward pay-off amount;

[0058] F. When the forward pay-off reaches the preset node amount, adjust the cutting line tension T on the take-up side respectively. 收 and the cutting wire tension T on the pay-off side 放 ;

[0059] G. Reverse wire unwinding and cutting: the cutting wire 50 is transported from the wire-receiving side to the wire-unwinding side, and the crystal rod is cut using the cutting wire 50 transported from the wire-receiving side to the wire-unwinding side.

[0060] Specifically, in step A, the total amount S1 of the wire mesh 51 cut is calculated by the slot pitch A, the length B of the wire mesh 51 and the circumference C1 of a single turn of the wire mesh 51, and the calculation method is S1 = (B / A) × C1.

[0061] In step B, the wire amount L1 for entering the knife, the wire amount L2 for the main cutting, the wire amount L3 for the wire bow, and the wire amount L4 for closing the knife are proposed by the next cutting process, which means the required conveying amount of the cutting wire 50 in the entering knife stage, the main cutting stage, the wire bow stage, and the closing knife stage respectively; the winding tension T0 is also proposed by the next cutting process, which means the tension required for the cutting wire 50 to be wound on the wire roller 10 and the crystal rod is not cut; the tension required for entering the knife T1 and the tension required for the main cutting T2 are also proposed by the next cutting process, which means the tension required for the cutting wire 50 to be reached in the entering knife stage and the main cutting stage respectively; the wire release amount S2 of the cutting process is the sum of the wire amount L1 for entering the knife and the wire amount L2 for the main cutting.

[0062] Normally, L0>0, L1>0, L2>0; L3<0, L4<0; S1 <L1+L2;S1<S0;S0<S2。L1> 0, L2>0 means: in the reverse cutting process, reverse wire pay-off is performed in the knife entry stage and the main cutting stage; L3<0, L4<0 means: in the reverse cutting process, forward wire pay-off is performed in the wire bow retracting stage and the knife retracting stage.

[0063] In some embodiments, the winding tension T0 is less than the tension required for the cutting wire 50 to reach during the process of contacting and cutting the crystal ingot.

[0064] In step C, the total wire release amount S4 required for the next cut = the actual wire release amount L0 of the previous cut + the wire consumption S0 of the next cut process. The actual wire release amount L0 of the previous cut refers to: the length of the cutting wire 50 released by the wire release wheel during the previous cut. This part of the cutting wire 50 has contacted and cut the crystal rod once, and its cutting ability is weakened compared to the new cutting wire 50 that has not contacted the crystal rod. The actual wire release amount L0 of the previous cut ≈ the wire amount L1' for the entry of the previous cut + the wire amount L2' for the main cutting of the previous cut + the wire amount L3' for the wire bow of the previous cut + the wire amount L4' for the wire closing of the previous cut. The wire consumption S0 of the next cut process is proposed by the process of the next cut.

[0065] Starting from step D, the wire cutting machine starts running. Figure 1 The wire cutting machine shown in the figure is used to perform step D. Figure 1 The pay-off wheel 30 in the forward pay-off is used as a pay-off wheel for releasing the cutting line 50 during the forward pay-off. Figure 1 The take-up wheel 40 in the forward pay-off period is used as a take-up wheel for winding up the cutting line 50. When executing step D, the cutting line 50 is moved along Figure 1 The actual amount of the cutting wire 50 transported from the wire-releasing side to the wire-retrieving side in the direction indicated by the thin black arrow is equal to the total wire-releasing amount S4 calculated in step C.

[0066] The cutting line 50 on the pay-off side includes the cutting line 50 wound on the pay-off wheel 30 and the cutting line 50 between the line roller 10 and the pay-off wheel 30; the cutting line 50 on the take-up side includes the cutting line 50 wound on the take-up wheel 40 and the cutting line 50 between the line roller 10 and the take-up wheel 40.

[0067] Therefore, adjust the cutting wire tension T on the take-up side. 收 That is, the tension of the cutting wire 50 wound on the take-up wheel 40 and / or the cutting wire 50 between the wire roller 10 and the take-up wheel 40 is adjusted; the cutting wire tension T on the release side is adjusted. 放That is, the tension of the cutting line 50 wound on the pay-off wheel 30 and / or the cutting line 50 between the wire roller 10 and the pay-off wheel 30 is adjusted.

[0068] Furthermore, if you run Figure 1 The wire cutting machine shown in the figure performs step G, then Figure 1 The pay-off wheel 30 in the embodiment is used as a take-up wheel for winding up the cutting line 50 during reverse pay-off. Figure 1 The take-up wheel 40 in the reverse pay-off is used as a pay-off wheel to release the cutting line 50. When executing step G, the cutting line 50 is moved along Figure 1 The wire is transported in the direction indicated by the dotted arrow, so that the cutting wire 50 on the receiving side after the previous step D is completed becomes the cutting wire 50 on the releasing side.

[0069] In step E, the monitoring of the real-time delivery amount of the cutting wire 50 runs through step D, step F and step G. The wire cutting machine itself can record and retain the real-time delivery amount of the cutting wire 50 in real time. One of the important purposes of executing step E is to monitor the forward wire release amount in real time. Combined with step F, it can be seen that the moment when the forward wire release amount reaches the preset node amount happens to be the node moment for adjusting the tension of the cutting wire 50. Therefore, executing step E is intended to ensure that the wire cutting machine will not miss the tension adjustment node of the cutting wire 50. The preset node amount is set according to the wire consumption in each cutting stage in the reverse cutting process.

[0070] Step F is performed during the execution of step D, and the reverse cutting process of the present invention is therefore defined as follows: the action of adjusting the tension of the cutting line 50 occurs at several moments during the forward pay-off process, and these moments are the moments when the forward pay-off amount reaches the preset node amount in step F. In other words, the adjustment of the tension of the cutting line 50 has been completed long before the execution of step G.

[0071] The reverse cutting process of the present invention determines whether the forward wire release reaches the preset node amount to determine whether the forward wire release has reached the tension adjustment node. When the monitored forward wire release reaches the preset node amount, the tension adjustment node has been reached, and the wire cutting machine automatically adjusts the cutting wire tension immediately. The wire cutting machine adjusts the cutting wire tension T on the wire receiving side respectively. 收 and the cutting wire tension T on the pay-off side 放 .

[0072] Step E, step F and step G embody the innovative concept of the present invention, namely, pre-adjusting the tension of the cutting wire. During the forward pay-off, the cutting wire tension adjustment operation is performed at the tension adjustment node, and the cutting wire prepares the tension for the subsequent reverse pay-off cutting to meet the requirements of the cutting wire tension at each stage of the reverse cutting process, so that the tension change of the cutting wire is adapted to the advancement sequence of each stage of the reverse cutting. At the moment of entering each cutting stage, the tension of the cutting wire has already reached the expected value, and the cutting wire exerts the best cutting ability in each cutting stage of the reverse cutting, which can more efficiently obtain high-quality wafers, and reduce the fluctuation amplitude of the cutting wire tension to prevent abnormal operation of the wire cutting machine.

[0073] The innovation of the present invention also lies in that before executing step G, the cutting wire 50 on the take-up side has already stored tension, and in this part of the cutting wire 50 on the take-up side, the tension of each segment is adaptively differentiated for different cutting stages in the subsequent reverse cutting process. In other words, different segments of the cutting wire 50 on the take-up side have stored tension of different sizes, and each segment is used to cut the crystal rod or contact the crystal rod in a specific cutting stage in the reverse cutting process.

[0074] The present invention is useful for adjusting the cutting line tension T on the take-up side. 收 and the cutting wire tension T on the pay-off side 放 The specific means are not limited.

[0075] In some embodiments, the two sets of wire wheel driving parts are respectively a wire release driving motor and a wire take-up driving motor. The wire release driving motor is connected to the wire release wheel 30 and can adjust the speed and torque of the power output by itself, thereby changing the speed and torque of the wire release wheel 30 to change the cutting line tension T on the wire release side. 放 The wire-receiving drive motor is connected to the wire-receiving wheel 40 and can adjust the speed and torque of the power output by itself, thereby changing the speed and torque of the wire-receiving wheel 40 to change the cutting wire tension T on the wire-receiving side. 收 .

[0076] In other embodiments, the cutting line tension T on the pay-off side can be adjusted by adjusting the position of the guide wheel on the pay-off side and / or the position of the tension wheel on the pay-off side. 放 The cutting line tension T on the take-up side is adjusted by adjusting the position of the guide wheel on the take-up side and / or the position of the tension wheel on the take-up side. 收 The wire pulley and the tension pulley on the wire-releasing side are wound around the cutting wire 50 on the wire-releasing side, and the wire pulley and the tension pulley on the wire-retrieving side are wound around the cutting wire 50 on the wire-retrieving side.

[0077] The preset node quantities include the first node quantity (S4-S2-S1), the second node quantity (S4-S2), the third node quantity (S4-S1-L1), and the fourth node quantity (S4-L1). As the forward pay-off process progresses, the forward pay-off quantity will reach the first node quantity, the second node quantity, the third node quantity and the fourth node quantity in sequence, that is, the first node quantity (S4-S2-S1) < the second node quantity (S4-S2) < the third node quantity (S4-S1-L1) < the fourth node quantity (S4-L1).

[0078] The amount of wire L1 for entering the knife, the amount of wire L2 for the main cutting, the amount of wire L3 for the wire bow, the amount of wire L4 for closing the knife, the tension T1 required for entering the knife, the tension T2 required for the main cutting, the tension T3 required for the wire bow, the tension T4 required for closing the knife, and the wire consumption S0 of a single knife in the process may all be different for different cutting times. For example, from the second cutting to the third cutting, some or all of the above process parameters may change, resulting in different total wire release amounts S4 required for different cutting times; for example, in some cutting times, the wire consumption S0 of a single knife in the process is 8 kilometers, while in other cutting times, the wire consumption S0 of a single knife in the process is 6 kilometers.

[0079] The relationship between the total wire release amount S4, the total wire net 51 amount S1, and the cutting process wire release amount S2 has the following three situations:

[0080] Case 1: S4>S1+S2;

[0081] Case 2: S4≤S1+S2, and S4>S2;

[0082] Case three, S4≤S1+S2, and S4≤S2.

[0083] For the cutting times that meet the condition 1, in step F, the cutting wire tension T on the take-up side is adjusted respectively. 收 and the cutting wire tension T on the pay-off side 放 The steps include:

[0084] F01, when S4>S1+S2, adjust T at the moment of starting to pay out the line in the forward direction. 收 To make T 收 Reach T0, and adjust T at the moment of starting to pay out the line in the forward direction 放 To make T 放 Reach T0;

[0085] F02, the preset node quantity includes the first node quantity (S4-S2-S1). When the forward pay-off quantity reaches the first node quantity (S4-S2-S1), adjust T 放 To make T 放 Reach T2 and make T 收 Keep T0;

[0086] F03, the preset node quantity includes the second node quantity (S4-S2). When the forward pay-off quantity reaches the second node quantity (S4-S2), T 放 Keep T2 and adjust T 收 To make T 收 Reach T2;

[0087] F04, the preset node quantity includes the third node quantity (S4-S1-L1). When the forward pay-off quantity reaches the third node quantity (S4-S1-L1), adjust T 放 To make T 放 Reach T1 and make T 收 Keep T2;

[0088] F05, the preset node quantity includes the fourth node quantity (S4-L1); when the forward pay-off quantity reaches the fourth node quantity (S4-L1), T 放 Keep T1 and adjust T 收 To make T 收 Reach T1;

[0089] F06, end forward pay-out.

[0090] For the cutting times that meet the second condition, in step F, adjust the cutting wire tension T on the take-up side respectively. 收 and the cutting wire tension T on the pay-off side 放 The steps include:

[0091] F11. When S4≤S1+S2 and S4>S2, adjust T at the moment of starting to pay out the line in the forward direction. 放 To make T 放 Reach T2 and adjust T at the moment of starting to release the line in the forward direction 收 To make T 收 Reach T0;

[0092] F12, the preset node quantity includes the second node quantity (S4-S2). When the forward pay-off quantity reaches the second node quantity (S4-S2), T 放 Keep T2 and adjust T 收 To make T 收 Reach T2;

[0093] F13, the preset node quantity includes the third node quantity (S4-S1-L1). When the forward pay-off quantity reaches the third node quantity (S4-S1-L1), adjust T 放 To make T 放 Reach T1 and make T 收 Keep T2;

[0094] F14, the preset node quantity includes the fourth node quantity (S4-L1). When the forward pay-off quantity reaches the fourth node quantity (S4-L1), T放 Keep T1 and adjust T 收 To make T 收 Reach T1;

[0095] F15, end forward pay-off.

[0096] For the cutting times that meet the third condition, in step F, adjust the cutting wire tension T on the take-up side respectively. 收 and the cutting wire tension T on the pay-off side 放 The steps include:

[0097] F21, when S4≤S1+S2 and S4≤S2, adjust T at the moment of starting forward pay-off. 收 To make T 收 Reach T2 and adjust T at the moment of starting to release the line in the forward direction 放 To make T 放 Reach T2;

[0098] F22, the preset node quantity includes the third node quantity (S4-S1-L1). When the forward pay-off quantity reaches the third node quantity (S4-S1-L1), adjust T 放 To make T 放 Reach T1 and make T 收 Keep T2;

[0099] F23, the preset node quantity includes the fourth node quantity (S4-L1). When the forward pay-off quantity reaches the fourth node quantity (S4-L1), T 放 Keep T1 and adjust T 收 To make T 收 Reach T1;

[0100] F24, end forward pay-out.

[0101] After executing step A, step B, step C, step D, step E, step F and step G in sequence, it means that one reverse cutting operation is completed, and a crystal rod is cut into multiple wafers by the cutting line 50. Continuing to execute step A, step B, step C, step D, step E, step F and step G in sequence, another reverse cutting operation can be completed, thereby cutting a crystal rod into multiple wafers. Therefore, by repeating the above steps in the order of step A, step B, step C, step D, step E, step F and step G in sequence, the crystal rod can be reverse cut repeatedly.

[0102] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0103] Those skilled in the art should recognize that the above embodiments are only used to illustrate the present invention, and are not intended to limit the present invention. As long as they are within the spirit of the present invention, appropriate changes and modifications to the above embodiments are within the scope of protection claimed by the present invention.

Claims

1. A reverse cutting process based on a wire cutting machine, characterized in that: include Determine the total amount S1 of the cutting wire network; Obtain and calculate the process requirements for the next cut, including the amount of wire used for cutting L1, the amount of wire used for main cutting L2, the amount of wire used for wire bow L3, the amount of wire used for cutting L4, the winding tension T0, the tension required for cutting T1, the tension required for main cutting T2, and the amount of wire release S2 for cutting process; According to the actual wire release amount L0 of the previous cutting and the single-cut wire consumption S0 of the next cutting process, the total wire release amount S4 required for the next cutting is calculated; Forward pay-off, the cutting line is transported from the pay-off side to the take-up side, and the transport amount is S4; Monitor the real-time delivery volume of the cutting line, and use the real-time delivery volume monitored during the forward pay-off process as the forward pay-off volume; When the forward pay-off reaches the preset node amount, adjust the cutting line tension T on the take-up side respectively. 收 and the cutting wire tension T on the pay-off side 放 ; The wire is unwound and cut in the reverse direction, the cutting wire is transported from the wire-receiving side to the wire-unwound side, and the crystal rod is cut using the cutting wire transported from the wire-receiving side to the wire-unwound side.

2. The reverse cutting process according to claim 1, characterized in that: Adjust the cutting line tension T on the take-up side separately 收 and the cutting wire tension T on the pay-off side 放 include: When S4>S1+S2, adjust T at the moment of starting to pay out the line in the forward direction. 收 To make T 收 Reach T0, and adjust T at the moment of starting to pay out the line in the forward direction 放 To make T 放 Reach T0.

3. The reverse cutting process according to claim 2, characterized in that: Adjust the cutting line tension T on the take-up side 收 and the cutting wire tension T on the pay-off side 放 Also includes: The preset node quantity includes the first node quantity, which is (S4-S2-S1). When the forward pay-off quantity reaches the first node quantity, adjust T 放 To make T 放 Reach T2 and make T 收 Keep T0; The preset node quantity includes the second node quantity, and the second node quantity is (S4-S2). When the forward pay-off quantity reaches the second node quantity, T 放 Keep T2 and adjust T 收 To make T 收 Reach T2; The preset node quantity includes the third node quantity, which is (S4-S1-L1). When the forward pay-off quantity reaches the third node quantity, adjust T 放 To make T 放 Reach T1 and make T 收 Keep T2; The preset node quantity includes the fourth node quantity, which is (S4-L1). When the forward release quantity reaches the fourth node quantity, T 放 Keep T1 and adjust T 收 To make T 收 Reach T1.

4. The reverse cutting process according to claim 1, characterized in that: Adjust the cutting line tension T on the take-up side separately 收 and the cutting wire tension T on the pay-off side 放 include: When S4≤S1+S2 and S4>S2, adjust T at the moment of starting forward pay-off. 放 To make T 放 Reach T2 and adjust T at the moment of starting to release the line in the forward direction 收 To make T 收 Reach T0.

5. The reverse cutting process according to claim 4, characterized in that: Adjust the cutting line tension T on the take-up side 收 and the cutting wire tension T on the pay-off side 放 Also includes: The preset node quantity includes the second node quantity, and the second node quantity is (S4-S2). When the forward pay-off quantity reaches the second node quantity, T 放 Keep T2 and adjust T 收 To make T 收 Reach T2.

6. The reverse cutting process according to claim 5, characterized in that: Adjust the cutting line tension T on the take-up side 收 and the cutting wire tension T on the pay-off side 放 Also includes: The preset node quantity includes the third node quantity, which is (S4-S1-L1). When the forward pay-off quantity reaches the third node quantity, adjust T 放 To make T 放 Reach T1 and make T 收 Keep T2; The preset node quantity includes the fourth node quantity, which is (S4-L1). When the forward release quantity reaches the fourth node quantity, T 放 Keep T1 and adjust T 收 To make T 收 Reach T1.

7. The reverse cutting process according to claim 1, characterized in that: Adjust the cutting line tension T on the take-up side separately 收 and the cutting wire tension T on the pay-off side 放 include: When S4≤S1+S2 and S4≤S2, adjust T at the moment of starting forward pay-off. 收 To make T 收 Reach T2 and adjust T at the moment of starting to release the line in the forward direction 放 To make T 放 Reach T2.

8. The reverse cutting process according to claim 7, characterized in that: Adjust the cutting line tension T on the take-up side 收 and the cutting wire tension T on the pay-off side 放 Also includes: The preset node quantity includes the third node quantity, which is (S4-S1-L1). When the forward pay-off quantity reaches the third node quantity, adjust T 放 To make T 放 Reach T1 and make T 收 Keep T2.

9. The reverse cutting process according to claim 8, characterized in that: Adjust the cutting line tension T on the take-up side 收 and the cutting wire tension T on the pay-off side 放 Also includes: The preset node quantity includes the fourth node quantity, which is (S4-L1). When the forward release quantity reaches the fourth node quantity, T 放 Keep T1 and adjust T 收 To make T 收 Reach T1.

10. The reverse cutting process according to any one of claims 1 to 9, characterized in that: All the steps of claim 1 are repeatedly performed, thereby repeatedly reverse-slicing the crystal rod.

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