Electron beam evaporation unit

Abstract

The electron beam evaporation unit of the present application has: a crucible (2) having a plurality of receiving recesses (21) for evaporation material (Em); an electron beam generating source (3); a shaping and deflecting mechanism (4) for the electron beam; and a crucible cover (5); and can easily perform a filling operation of the evaporation material (Em) and a maintenance operation of the crucible (2). Further, a movable portion is provided which moves the crucible cover between a closed attitude covering the crucible and an open attitude exposing all the receiving recesses; and a guide portion is provided which guides the crucible cover to a normal position where the opening portion (51) of the crucible cover and any of the receiving recesses (21) coincide in the vertical direction by the weight of the crucible cover when returning from the open attitude to the closed attitude. The movable portion and the guide portion are provided at the end portion of the crucible cover covering the diametrically opposite side of the opening portion from the crucible center and are constituted by a hinge mechanism (6) supported freely to swing. The support shaft (62) of the hinge mechanism (6) is cooled by the refrigerant flowing into the flow inlet of the circulation passage (52) in the crucible cover and flowing out of the flow outlet.

Description

TECHNICAL FIELD

[0001] The present application relates to an electron beam type evaporation unit, and particularly to an electron beam type evaporation unit including a crucible having a plurality of evaporation material accommodating recesses on the same circumference on an upper surface, an electron beam generating source, and a shaping deflection mechanism that performs shaping deflection of the electron beam, and evaporates evaporation material by irradiating the shaped and deflected electron beam onto the evaporation material in the evaporation material accommodating recess. BACKGROUND

[0002] As such an electron beam type evaporation unit, for example, the one described in Patent Literature 1 is known. It includes a crucible cover having an opening portion that exposes the evaporation material accommodating recess (hereinafter, referred to as "first evaporation material accommodating recess") at the irradiation position and covers the upper side of the crucible cover with a gap in the vertical direction, with the position of the crucible at which any one of the evaporation material accommodating recesses is positioned at the closest position to the electron beam generating source in the radial direction being the irradiation position. Also, during evaporation of the evaporation material by irradiation of the electron beam, contamination of the evaporation material accommodated in each evaporation material accommodating recess can be suppressed. In addition, in the above-described example, a circulation passage that circulates cooling water is provided in the crucible cover, and the crucible cover is cooled to a prescribed temperature. Also, by a magnetic circuit assembled below the crucible cover, so-called reflected electrons generated when the electron beam is irradiated onto the evaporation material in the first evaporation material accommodating recess are captured by the crucible cover.

[0003] In a case where the electron beam type evaporation unit is disposed in a vacuum chamber and evaporates (films) a processed substrate, after each evaporation material accommodating recess is filled with granular or ingot-shaped evaporation material, the crucible is rotated around the central axis thereof, and the first evaporation material accommodating recess is phase-positioned at the irradiation position. In this state, the first evaporation material accommodating recess and the opening portion coincide in the vertical direction, and only the first evaporation material accommodating recess, and further only the evaporation material filled therein, is exposed. Then, the electron beam is generated in the vacuum chamber in a vacuum atmosphere, the generated electron beam is shaped and deflected, and the evaporation material in the first evaporation material accommodating recess is irradiated with the shaped and deflected electron beam to evaporate the evaporation material, thereby evaporating onto the surface of the processed substrate disposed in the vacuum chamber. In a case where only a prescribed amount of the evaporation material is evaporated (consumed) or in a case where the evaporation material is changed, the crucible is rotated in a state where irradiation of the electron beam is stopped, and for example, the other evaporation material accommodating recess adjacent to the first evaporation material accommodating recess is phase-positioned at the irradiation position. In this state, as with the above, the evaporation material in the other evaporation material accommodating recess is evaporated by irradiation of the electron beam onto the evaporation material, thereby evaporating onto the processed substrate. This operation is repeated to evaporate the evaporation material in each evaporation material accommodating recess, and evaporation of the processed substrate is sequentially performed.

[0004] Here, in the above-described prior example, the crucible cover is fixed to the base plate provided with the electron beam generation source, the crucible, etc. via the fastening mechanism. This is for the following reason. That is, when the evaporation of the evaporation material accommodated in the accommodation recess of the crucible is performed by irradiating the evaporation material with an electron beam in a vacuum atmosphere, not only the crucible but also the crucible cover is heated to a high temperature. At this time, since the crucible with the rotating mechanism, etc. must be cooled, the crucible cover is fixed to the crucible by the fastening mechanism such as a bolt for the purpose of cooling the crucible cover by contact heat conduction (indirectly) with the crucible cover by using the cooling. Therefore, in the case of filling (or replenishing) the evaporation material to each accommodation recess, the crucible needs to be rotated sequentially and the evaporation material is filled to each accommodation recess located at the irradiation position, which is significantly poor in operability. Further, the evaporation material is also attached and accumulated on the wall surface of the accommodation recess including the opening portion which expands in diameter toward the upper surface in a tapered shape at the time of evaporation. At this time, if the evaporation material is accumulated in the opening portion of the accommodation recess, it is likely to hinder the smooth rotation of the crucible, for example, and thus the removal (maintenance) operation of the material is also required, but if the operation of removing the fastening mechanism, removing the crucible cover, etc. is dealt with one by one using a tool, the operability is also significantly poor.

[0005] Prior Art Documents

[0006] Patent Documents

[0007]

Patent Document 1

[0008] PROBLEMS TO BE SOLVED BY THE INVENTION

[0009] In view of the above, it is an object of the present application to provide an electron beam evaporation unit having a structure capable of easily performing a filling operation of evaporation material and a maintenance operation of a crucible.

[0010] MEANS OF SOLVING THE PROBLEMS

[0011] To solve the above-mentioned technical problems, the electron beam evaporation unit of the present invention comprises: a crucible having a plurality of evaporation material receiving recesses located on the same circumference on its upper surface; an electron beam generating source that generates an electron beam; and a shaping deflection mechanism that shapes and deflects the electron beam; the mechanism irradiates the evaporation material in the receiving recesses with the shaped and deflected electron beam onto the evaporation material in the receiving recesses, causing the evaporation material to evaporate; characterized in that it further comprises a crucible lid, with the position of the crucible closest to the electron beam generating source in the radial direction of any one of the receiving recesses as the irradiation position, the crucible lid having an opening that exposes the receiving recess located at the irradiation position and covering the top of the crucible; and further comprising: a movable part that allows the crucible lid to be in a closed position covering the crucible and to allow all the receiving recesses to be in a closed position. The lid is movable between its open and closed positions; and a guide portion, with the position of the lid aligned vertically by the opening and the receiving recess, guides the lid to the correct position by its own weight when returning it from the open to the closed position; the movable portion and the guide portion are supported by a hinge mechanism that swings freely, located at the end of the lid above the radially opposite side of the center of the crucible that covers the opening; a circulation channel is formed inside the lid to circulate refrigerant and cool the lid, with the inlet and outlet of the circulation channel located at the end of the lid with the hinge mechanism, and the support shaft of the hinge mechanism is cooled by the refrigerant flowing into the inlet and outlet of the circulation channel.

[0012] Furthermore, to solve the aforementioned technical problems, the electron beam evaporation unit of the present invention comprises: a crucible having a plurality of receiving recesses for evaporation material located on the same circumference on its upper surface; an electron beam generating source that generates an electron beam; and a shaping deflection mechanism that shapes and deflects the electron beam; the shaped and deflected electron beam is irradiated onto the evaporation material in the receiving recesses, causing the evaporation material to evaporate; characterized in that it comprises a crucible cover, with the position of the crucible closest to the electron beam generating source in the radial direction of any one of the receiving recesses as the irradiation position, the crucible cover having an opening that exposes the receiving recess located at the irradiation position, and covering the crucible. Above; also includes: a movable part that allows the crucible lid to move between a closed position covering the crucible and an open position exposing the entire receiving recess; and a guide part that, with the position of the crucible lid where the opening and the receiving recess are aligned vertically, guides the crucible lid to the correct position by its own weight when returning the crucible lid from the open position to the closed position; the movable part and the guide part are constituted by a hinge mechanism that allows for free swinging support, which is provided on the portion of the crucible lid that covers the radially opposite side of the center of the crucible that is separated from the opening; a circulation channel is formed inside the crucible lid to circulate the refrigerant and cool the crucible lid;

[0013] The hinge mechanism has a pair of support bodies provided on a base plate on which the crucible is provided, and a support shaft fixed to each of the support bodies, and the crucible cover is swingably attached to each of the support shafts via a bearing, and an internal passage allowing the refrigerant to pass through is formed in each of the support shafts so as to communicate with the inflow port and the outflow port of the circulation passage, respectively.

[0014] In the above-described manner, since all of the accommodation recesses are exposed in the open posture of the crucible cover, it is not necessary to particularly rotate the crucible or to detach the crucible cover one by one, and thus the filling operation of the evaporation material and the maintenance operation of the crucible can be easily performed, and the operability can be significantly improved. Further, by providing the guide portion, the filling operation of the evaporation material and the maintenance operation of the crucible can be completed by returning the crucible cover from the open posture to the closed posture. Furthermore, the movable portion and the guide portion are configured by the hinge mechanism that swingably supports the movable portion and the guide portion, and the hinge mechanism is provided at a portion of the crucible cover that covers the upper side opposite to the opening portion with respect to the radial direction of the center of the crucible, and thus the structure that allows the movable portion and the guide portion to be movable and guided between the closed posture and the open posture can be simply achieved without interfering with other components. At this time, if the crucible cover is configured to be held in the posture of standing in the vertical direction, it is advantageous that it is not necessary to previously secure the evacuation space for the open posture of the crucible cover.

[0015] Here, when the evaporation material accommodated in the accommodation recess of the crucible is evaporated by irradiating an electron beam to the evaporation material in a vacuum atmosphere, not only the crucible but also the crucible cover is heated to a high temperature. At this time, since the support shaft of the hinge mechanism is heated to a high temperature, the smooth opening and closing operation of the crucible cover can be hindered at the time of maintenance. In contrast, in the present application, for example, by flowing the refrigerant supplied to the inflow port of the circulation passage and the refrigerant flowing out of the outflow port of the circulation passage in the vicinity of the support shaft of the hinge mechanism, the refrigerant can effectively obtain the heat removal effect on the support shaft. On the other hand, if the internal passage allowing the refrigerant to pass through is formed in the support shaft, and the refrigerant is circulated during the evaporation process, the support shaft can be reliably prevented from being heated to a high temperature. Thus, at the time of maintenance, the crucible cover can be quickly moved to the open posture without using a special tool, and the crucible cover is returned to the normal position only by the weight of the crucible cover (in other words, the crucible cover is not fixed to the crucible by a bolt or the like), and thus the maintenance can be completed.

[0016] In the present application, the following structure can also be employed: a ring-shaped protruding wall portion is provided on the lower surface of the crucible cover around the opening portion, and a seal structure is formed around the storage recess portion by the protruding wall portion when the crucible cover is swung from the open attitude to the closed attitude. At this time, the lower surface of the protruding wall portion can abut against or approach the upper surface portion of the crucible around the storage recess portion. With this seal structure for preventing scattering, when the deposition material in the storage recess portion at the irradiation position is evaporated by irradiation of the electron beam, the deposition of the material evaporated into the other storage recess portions through the gap between the crucible and the crucible cover can be minimized, and thus the contamination of the deposition material can be further suppressed. In this case, a ring-shaped receiving groove that receives the protruding wall portion when the crucible cover is swung from the open attitude to the closed attitude can be provided around the storage recess portion, and the protruding wall portion can be sunk into the receiving groove to form a labyrinth seal structure in the closed attitude of the crucible cover, or a seal structure that does not apply a labyrinth can be formed by allowing the protruding wall portion to contact the receiving groove. In addition, in the case where the ring-shaped protruding wall portion is provided on the lower surface of the crucible cover, a pressing mechanism that applies an upward pressing force to the lower surface of the crucible cover to swing the crucible cover to a rotation-allowing position that allows the rotation of the crucible is preferably provided.

[0017] Further, in the present application, the following structure can be employed: in the case where a circulation passage that circulates a coolant to cool the crucible cover is formed in the crucible cover, the hinge mechanism includes a pair of support bodies provided on a base plate on which the crucible is provided, and a support shaft fixed to each of the support bodies, and the crucible cover is swingably attached to each of the support shafts via a bearing, an internal passage that allows the coolant to pass therethrough is formed in each of the support shafts, and each of the internal passages is connected to an inflow port and an outflow port of the circulation passage. Thus, by connecting an external pipe (for example, a hose made of a flexible metal material) that supplies the coolant (cooling water) to one of the support shafts and an external pipe (for example, a hose made of a flexible metal material) that discharges the coolant to the other support shaft, a structure that circulates the coolant in the circulation passage in the crucible cover can be realized. At this time, the hinge mechanism functions as a guide portion that guides the crucible cover to a normal position by its own weight when the crucible cover is swung from the open attitude to the closed attitude, and functions to allow the relative swing of the crucible cover and the external pipes. Thus, even if the crucible cover is swung, no stress is applied to the external pipes, and thus no adverse situation in which the external pipes are broken by repeated swinging of the crucible cover occurs. BRIEF DESCRIPTION OF DRAWINGS

[0018] Figure 1 FIG. 1 is a perspective view of an electron beam deposition unit according to the present embodiment, which shows the closed attitude of a crucible cover.

[0019] Figure 2This is a perspective view of the electron beam evaporation unit of this embodiment with the crucible lid open.

[0020] Figure 3 yes Figure 1 The side view of the electron beam evaporation unit shown.

[0021] Figure 4 This is a partially enlarged sectional view illustrating the hinge mechanism and the crucible lid.

[0022] Figure 5 (a) is along Figure 1 (a) is a partially enlarged sectional view of the Va-Va line, and (b) is a partially enlarged sectional view of the crucible lid when it is swung to the position where rotation is allowed.

[0023] Figure 6 This is a partially enlarged sectional view illustrating the hinge mechanism and crucible lid of the modified example. Detailed Implementation

[0024] Hereinafter, with reference to the accompanying drawings, an embodiment of the electron beam evaporation unit EB of the present invention, which is installed in the vacuum chamber of a vacuum evaporation apparatus for evaporating and depositing (forming a film) the evaporation material Em onto a substrate to be processed, will be described. Hereinafter, the X-axis and Y-axis directions, which are orthogonal to each other in the plane of the base plate 1 described later, will be used as the orientation for the arrangement towards the vacuum chamber (not shown). Furthermore, terms such as "up" or "down" will be used to indicate the orientation towards the vacuum chamber (not shown). Figure 1 This is explained based on the standard.

[0025] Reference Figures 1 to 3 The electron beam vapor deposition unit EB includes a base plate 1 with a rectangular outline along its long side in the X-axis direction. On the base plate 1, a crucible 2 and an electron beam generation source 3 are arranged side-by-side in the X-axis direction. The side with the electron beam generation source 3 is designated "front" and the side with the crucible 2 is designated "rear" in the X-axis direction. The crucible 2 is constructed of a cylindrical component with good thermal conductivity, such as copper, and has multiple receiving recesses 21 on its upper surface, each containing a vapor deposition material Em located on the same circumference. The crucible 2 is supported by a crucible shaft 22 mounted on the base plate 1, and the crucible 2 can be rotated a predetermined angle around its rotation axis by an external motor located in the atmosphere. The position of the crucible 2 closest to the electron beam generation source 3 in the X-axis direction (radial) passing through the center of the crucible 2 is designated as the irradiation position, and the recess located at this position is designated as the first receiving recess 21a. Furthermore, although not specifically illustrated, crucible 2 is provided with a circulation path for coolant (cooling water). During vapor deposition, crucible 2 is cooled by circulating the coolant through pipe 2a.

[0026] The electron beam generating source 3 has a filament 31 and an anode plate 32 at a ground potential. By applying power to the filament 31 to emit hot electrons, the hot electrons are accelerated by the potential difference with the anode plate 32 to generate an electron beam (not shown) and are extracted upward. The extracted electron beam is shaped and deflected into a predetermined shape by the shaping and deflecting mechanism 4, for example, into a point-like electron beam, and is irradiated onto the evaporation material Em in the first receiving recess 21a. The shaping and deflecting mechanism 4 has a pole piece 41 disposed above the filament 31 and a pair of magnetic yokes 42 disposed in the Y-axis direction with a space therebetween in such a manner as to sandwich the track of the electron beam from the front to the rear in the X-axis direction. Since a publicly known device can be used as the electron beam generating source 3 and the shaping and deflecting mechanism 4, further detailed description is omitted. A plate-like crucible cover 5 of, for example, copper is disposed on the upper surface of the crucible 2.

[0027] Also with reference to Figure 4 An opening portion 51 is formed in the crucible cover 5 to expose only the first receiving recess 21a. In order to move the crucible cover 5 between a closed attitude covering the upper side of the crucible 2 and an open attitude exposing all the receiving recesses 21, a hinge mechanism 6 serving as a movable portion and a guide portion of the present embodiment is disposed on the X-axis direction rear end portion of the crucible cover 5 on the opposite side of the radial direction of the opening portion 51 with respect to the center (rotation axis) of the crucible 2. Here, the open attitude exposing all the receiving recesses 21 means that the crucible cover 5 is not present above all the receiving recesses 21. Typically, Figure 2 The open attitude of the crucible cover 5 in the above is a later-described standing attitude, and the hinge mechanism 6 is configured to allow a change in attitude of substantially 90 degrees from the closed attitude to the open attitude. Thus, the maintenance of the receiving recess 21 closest to the crucible cover 5 can be improved. The hinge mechanism 6 can also have a pair of support bodies 61 standing on the rear end side of the base plate 1. On the upper end of each support body 61, a support shaft 62 is detachably disposed in a fixed or publicly known manner in such a manner as to extend in the Y-axis direction with a hole therethrough. The support shaft 62 is, for example, of stainless steel for corrosion resistance and reduction of outgassing on the vacuum atmosphere side. As a method of fixing the support shaft 62 to the support body 61, screw fixing, a jig, a fastener, or a clip (a method not requiring a hand tool for fixing) can be used, and an adhesive or welding can also be used.

[0028] On the Y-axis direction both side surfaces of the crucible cover 5 on the rear end side, recessed portions 63 recessed toward the inside are formed, and spacer members 64 are fitted into the recessed portions 63 at a position more on the Y-axis direction center side of the crucible cover 5 than the support shafts 62. In the present embodiment, two O-rings are used as the spacer members 64, but it is not limited thereto, and a lip seal or the like of a silicon or fluorine resin material can also be used. In addition, as needed, a vacuum lubricant can be applied to the contact surface of the O-ring or the lip seal with the recessed portion 63, or can be filled between the two O-rings. A bearing housing 65 having a bearing (rolling bearing) 65a that axially supports the support shafts 62 is attached to the Y-axis direction both side surfaces of the crucible cover 5, and the crucible cover 5 is swingably attached to each support shaft 62 via the bearing 65a. In this case, the support shaft 62 in the recessed portion 63 also functions as a sliding surface when the crucible cover 5 is swung, but the sliding surface can also start from a region more on the front end side than the spacer members 64. In this way, the hinge mechanism 6 functions as a guide portion that guides the crucible cover 5 to a regular position by its own weight when the crucible cover 5 is returned from the open attitude to the closed attitude, and also functions to allow the crucible cover 5 to relatively swing with respect to the external pipe described later.

[0029] In the case where the crucible cover 5 is made of copper and there is a problem with lubrication even if a refrigerant is interposed, for example, fluorine resin impregnated nickel plating can be performed on the surface of the support shaft 62. In the case of sliding contact, the longer the contact surface, the lower the surface pressure, so the length of the support shaft 62 is determined taking this into account. In addition, if the surface pressure is sufficient to constitute a sliding bearing, the function of the bearing 65a and the bearing housing 65 that axially support the support shaft 62 (the function as a rolling bearing) can also be replaced by a sliding bearing constituted by the recessed portion 63 and the support shaft 62. In this case, since the protruding portion of the upper surface of the crucible cover 5 formed by the bearing housing 65 does not exist, a structure that is better in terms of maintenance can be formed. In addition to this, if the portion that mainly bears the surface pressure is located more on the Y-axis direction center side of the crucible cover 5 than the spacer members 64, the wear powder generated at the sliding bearing portion is recovered by the refrigerant side circulation system, whereby the wear powder can be prevented from leaking to the outside, and by cleaning the sliding surface, the life as a bearing can be improved.

[0030] Further, on the support body 61, although not particularly illustrated, in order to avoid interference with the crucible 2 and the like, a stopper that limits the swinging range of the lid 5 is provided, and is configured to hold the lid 5 in an upright posture in the upward and downward direction in the open posture. An internal passage 62a that allows the passage of cooling water as a coolant is formed on each support shaft 62 over the entire length thereof. In this case, a substantially V-shaped circulation passage 52 is formed inside the lid 5, and the portions of the internal passage 62a located inside the recesses 63 communicate with the inflow port 52a and the outflow port 52b of the circulation passage 52, respectively. Further, the open posture of the lid 5 formed by the stopper is a posture that is not located above the plurality of receiving recesses 21 of the crucible 2, and is not problematic even if it is a posture other than the above-described upright posture, and if it is a condition that does not require avoidance of interference, it can be swung to a posture in which the lid 5 is inverted (if the closed posture is a substantially 0-degree posture, it is a substantially 180-degree open posture) and held. In this way, even when maintenance is performed from the rear side of the state of the operator Figure 2

[0031] A nut member 62b is provided at the end portion of each support shaft 62 that protrudes outward in the Y-axis direction from the support body 61. Further, by connecting an external pipe that is not illustrated and that extends from a cooling unit that is not illustrated to each support body 61 via the nut member 62b, it is possible to cool the lid 5 using the cooling water that circulates in the circulation passage 52. The fixing method of the connection of the external pipe is not limited thereto, and a hose band or a connector method can also be used. As the external pipe, a hose of a metal material having flexibility is used in consideration of the temperature of the surroundings at the time of evaporation, but is not limited thereto. Regardless of the fixing method or the external pipe, a torsional stress that accompanies the swinging of the lid 5 is not applied to the connection portion by the hinge mechanism 6 (the connection portion does not rotate when fixed to the support body 61), the probability of occurrence of a failure that accompanies leakage of the coolant is reduced, and the maintainability is improved in terms of the replacement frequency and the inspection frequency. Further, a magnetic circuit 7 is provided on the lower surface portion of the lid 5 in which the circulation passage 52 is located, and has a magnetic plate 71 of a soft magnetic material and magnets 72 installed on both sides in the Y-axis direction of the magnetic plate 71. Thereby, it is possible to capture so-called reflected electrons that are generated when an electron beam is irradiated to the evaporation material Em located in the first receiving recess 21a in the irradiation position, with the lid 5. Further, the cooling effect of the coolant is not only an effective supplement of the reflected electrons, but also has an effect of preventing demagnetization of the magnets 72 due to heat.

[0032] Reference Signs List Figure 5 ​On the front side lower surface of the lid 5, a ring-shaped protruding wall portion 53 is provided around the opening portion 51. In correspondence thereto, on the front side upper surface of the crucible 2, a ring-shaped receiving groove 23 is formed around the first receiving recess 21a and receives the protruding wall portion 53. Further, the position of the lid 5 at which the opening portion 51 and the receiving recess 21a coincide in the vertical direction is the normal position, and when the lid 5 is swung from the open attitude to the closed attitude, the protruding wall portion 53 sinks (is received) into the receiving groove 23 due to its own weight, thereby forming a seal structure for preventing scattering. In the case where the structure in which the protruding wall portion 53 sinks into the receiving groove 23 by its own weight is used as a guide portion, the contact portion of the wall and the groove can be formed in a cross-sectional shape of an inclined surface to guide. Thus, the positional accuracy of the lid 5 with respect to the crucible 2 can be improved. In the present embodiment, the height of the protruding wall portion 53 is set, for example, such that its lower end portion abuts against the bottom of the receiving groove 23 in the closed attitude, but its lower end portion can be formed so as not to abut against the receiving groove 23 by forming a labyrinth seal structure. In addition, in the case where the protruding wall portion 53 is formed so as to abut against the receiving groove 23, the protruding wall portion 53 can be formed so as to be able to be removed from the receiving groove 23. Figure 1 and Figure 5 The closed attitude of the lid 5 explained in (a) is constituted by the hinge mechanism 6 as the movable portion and the guide portion, the weight of the lid 5, and the reaction force from the bottom of the receiving groove 23 of the crucible 2, and is a stationary state. In the case where the labyrinth seal structure is formed, the pressing lever described later is subjected to the reaction force, and further, the pressure receiving member 81 is constituted so as to be in a stationary state at a position at which a distance required for the labyrinth is secured.

[0033] However, as described above, in the case where the protruding wall portion 53 sinks into the receiving groove 23, the protruding wall portion 53 interferes with the receiving groove 23 and the crucible 2 cannot be rotated. In the present embodiment, the pressing mechanism 8 that applies a pressing force upward to the lower surface of the lid 5 is provided to swing the lid 5 to a rotation-allowing position that allows the crucible 2 to be rotated (refer to Figure 3 ). The pressing mechanism 8 is constituted by the pressure receiving member 81 mounted on the front side lower surface of the lid 5 and the air cylinder 82 that applies a pressing force upward to the pressure receiving member 81. Further, when the front side of the lid 5 is pushed upward from the closed attitude of the lid 5 shown in (a) by the pressing lever of the air cylinder 82 via the pressure receiving member 81, the lid 5 is swung to the rotation-allowing position. Figure 5 Figure 5 ​(b) the position at which the protruding wall portion 53 is released from the receiving groove 23. Thus, the rotation of the crucible 2 can be performed. In addition, two micro switches Ms are provided as detection means to detect the closed posture and the rotation-allowed position of the crucible cover 5, respectively. In addition, since the crucible cover 5 is swung about the rotation axis determined by the hinge mechanism 6, the relative positional relationship between the opening portion 51 and the receiving recess 21 in the closed posture is maintained by the function as a guide portion, and a bearing and a contact seal are used, so that the torsional stress accompanying the swing due to each rotation of the crucible 2 is not transmitted to the external piping system. That is, the probability of occurrence of a failure accompanied by leakage of refrigerant due to the production operation is reduced, so that the maintenance is improved in terms of the replacement frequency and the inspection frequency.

[0034] With the above embodiment, the structure in which the crucible cover 5 is movable between the closed posture and the opened posture is realized, and in the opened posture of the crucible cover 5, since all the receiving recesses 21 are exposed, it is not necessary to intentionally rotate the crucible 2 or to remove the crucible cover 5 one by one, so that the filling operation of the evaporation material Em and the maintenance operation of the crucible 2 can be easily performed, and the operability can be significantly improved. Moreover, with the guide portion and the detection means, by returning the crucible cover 5 from the opened posture to the closed posture, it is possible to confirm the completion of the filling operation of the evaporation material Em and the maintenance operation of the crucible. Further, by forming a seal structure with the protruding wall portion 53 and the receiving groove 23 in the closed posture of the crucible cover 5, when the evaporation material Em in the first receiving recess 21a is evaporated by irradiation with an electron beam, it is possible to suppress the evaporation material from being introduced into other receiving recesses 21 through the gap between the crucible 2 and the crucible cover 5 as much as possible. Thus, it is possible to further suppress the contamination of the evaporation material Em. Moreover, since no stress is applied to the external piping connected to the support shaft 62 when the crucible cover 5 is swung, no failure such as breakage of the external piping (leakage of refrigerant) occurs due to repeated swinging of the crucible cover 5.

[0035] Here, in the electron beam evaporation unit EB of the above-described embodiment, when the evaporation material Em housed in the housing recess 21 of the crucible 2 is caused to evaporate by irradiating the evaporation material Em with an electron beam in a vacuum atmosphere, not only the crucible 2 but also the crucible cover 5 is heated to a high temperature. At this time, since the support shaft 62 of the hinge mechanism 6 is heated to a high temperature, there is a possibility that the smooth opening and closing action of the crucible cover 5 is hindered at the time of maintenance or the like. In contrast, in the present embodiment, since the structure in which the internal passage 62a of the support shaft 62 is passed through when the cooling water as a coolant is circulated in the circulation passage 52 of the crucible cover 5 is adopted, the support shaft 62 can be reliably prevented from being heated to a high temperature. Thus, at the time of maintenance, the crucible cover 5 can be moved to the open attitude quickly without using a tool in particular, and further, the maintenance can be completed only by returning the crucible cover 5 to the normal position by the self weight (in other words, the crucible cover 5 is not fixed to the crucible 2 by a bolt or the like as in the above-described prior example).

[0036] The above-described embodiment of the present application has been described with reference to the drawings, but various modifications can be made without departing from the technical idea of the present application. In the above-described embodiment, the hinge mechanism 6 that swings the crucible cover 5 is described as an example of the movable portion and the guide portion, but the movable portion is not limited thereto, and can be any portion that can move the crucible cover 5 between the open attitude and the closed attitude. For example, the crucible cover 5 can be configured to be able to move in parallel in the same plane thereof using a publicly known mechanism. On the other hand, as the guide portion, there is no particular limitation as long as the crucible cover 5 can be guided to the normal position when returning from the open attitude to the closed attitude, and for example, can be configured by a guide pin, an embedded portion, a magnetic device, or the like. Further, although not particularly illustrated, the protruding wall portion 53 can be engaged with the receiving groove 23 or the driving shaft of the air cylinder 82 engaged with the pressure receiving member 81 when the crucible cover 5 is swung to the closed attitude, thereby configuring the guide portion. In this case, since the guide portion is lower than the upper surface of the crucible 2 in the direction of gravity, the effect of reducing the probability of the sliding powder being mixed into the evaporation material is obtained. In addition, the bottom surface of the groove of the receiving groove 23 can have a groove shape that reaches the bottom surface of the adjacent receiving groove 23. That is, a shape in which only a convex portion is provided around the housing recess 21 is also included in the technical idea of the receiving groove 23.

[0037] Further, the hinge mechanism 6 as the movable portion or the guide portion is provided with a pair of support bodies 61 and the support shafts 62 are respectively provided in a fixed or publicly known manner, but is not limited thereto, and can be provided in any manner as long as the function as the guide portion is maintained. As the fixing method of the support shafts 62 to the support bodies 61, a method of providing (fixing) only by the weight of the crucible cover 5 can be used. As the method of maintaining the positional relationship between the support shafts 62 and the support bodies 61 using the weight (the method of functioning as the guide portion), examples of a method of providing a guide pin, an embedded or magnetic device, a wedge effect, or the like can be given. Of course, when the lower surface of the crucible cover 5 is pressed upward by the pressing mechanism (when the swinging movement of the crucible cover 5 reaches the range of the rotation permission position), the weight of the crucible cover 5 is provided to be greater than the degree of functioning as the movable portion and the guide portion. In this case, if the structure is provided only by the weight of the crucible cover 5, the operator can easily set the attitude of the freely opened crucible cover 5 by applying a force of the weight degree to the crucible cover 5 at the time of maintenance (in addition, the degree of freedom to reach the opened attitude has an advantage of being able to determine the attitude without being based on the hinge mechanism 6 fixed to the support body 61), and thus it is possible to easily expose all of the accommodation recesses 21, and the crucible cover 5 can be set to the opened attitude without applying a torsional stress to the external pipe by the hinge mechanism 6, thereby providing a structure capable of further improving the maintenance performance. In this structure, the micro switch Ms as the device for detecting that the crucible cover 5 is in the closed attitude (normal state) is also used as an interlock signal of the electron beam irradiated to the evaporation material Em of the first accommodation recess 21a, and is provided as a structure capable of preventing human error at the time of maintenance. In addition, the weight of the crucible cover 5 is also included in the range of not hindering the maintenance performance of the operator, and a structure of increasing the weight by a device or a magnetic force or the like.

[0038] In the above embodiment, the contamination of the evaporation material Em is suppressed by the sealing structure for preventing scattering formed by providing the receiving groove 23 on the crucible 2 and the protruding wall portion 53 on the crucible cover 5, but is not limited thereto. For example, only the protruding wall portion 53 can be provided on the crucible 2 or the crucible cover 5, and the protruding wall portion 53 provided on the crucible 2 or the crucible cover 5 and the upper surface of the crucible 2 or the lower surface of the crucible cover 5 opposite thereto can be brought into abutment or close contact in the closed attitude. At this time, the height (distance in the upward direction) of the protruding wall portion 53 located around the accommodation recess 21 of the upper surface of the crucible 2 is preferably provided to be greater than the opposite height at which the protruding wall portion 53 of the crucible cover 5 cannot be directly viewed in the state of (a). As a specific example, the height of the protruding wall portion 53 of the accommodation recess 21 is provided to be greater than the opposite height at which the protruding wall portion 53 of the crucible cover 5 cannot be directly viewed in the state of (a) by 1 mm or more. Figure 5 (a). As a specific example, the height of the protruding wall portion 53 of the accommodation recess 21 is provided to be greater than the opposite height at which the protruding wall portion 53 of the crucible cover 5 cannot be directly viewed in the state of (a) by 1 mm or more. Figure 5The upper position of the cylindrical portion in the direction of the lower surface of the opening portion 51 of the crucible cover 5 is the same degree of height, thereby ensuring the relative height from the lower surface of the crucible cover 5. Thus, when the evaporation material Em is evaporated, the evaporated material is as much as possible suppressed from entering the sealed structure. Further, the device provided with the micro switch Ms for detecting the closed posture or the rotation permitted posture is described as an example, but is not limited thereto, and other known detection devices can be used.

[0039] In the above embodiment, the device having the support body 61 and the support shaft 62 is described as an example of the hinge mechanism 6 that swingably supports the crucible cover 5, but is not limited thereto. For example, the support body 61 can be constituted by a cooling water pipe having rigidity that supports the crucible cover 5. Further, in the above embodiment, the opened posture in which the entire housing recess 21 is exposed is a posture in which the crucible cover 5 is not present above the entire housing recess 21, and the maintenance can be improved, but the present structure also has an effect on the maintenance operation that requires the attachment and detachment operation of the crucible 2. This is because, generally, an operation space in the vertical direction is required during the attachment and detachment operation of the crucible 2, and an obstacle is present in the horizontal direction. In consideration of this purpose, it is preferable that the opened posture of the crucible cover 5 be a structure that can be in a state in which the crucible cover 5 is not present above the crucible 2 for the purpose of avoiding interference with the crucible 2.

[0040] In the above embodiment, the internal passage 62a that allows the cooling water as a coolant to pass through is formed in each support shaft 62 so as to extend over the entire length thereof, and the coolant is circulated in the circulation passage 52 in the crucible cover 5 via the internal passage 62a, thereby cooling the support shaft 62 of the hinge mechanism 6, but is not limited thereto. For example, as shown in FIG. 12, the support shaft 620 of the hinge mechanism 6 can be a solid shaft without the internal passage, and the circulation passage 520 formed in the crucible cover 5 can be extended to the end surface of the crucible cover 5 in which the hinge mechanism 6 is provided, and the inflow port 520a and the outflow port 520b of the circulation passage 520 can be provided at the end surface. In this case, it is preferable that the portion of the circulation passage 520 be as much as possible located in the vicinity of the support shaft 620. Further, the coolant flowing into the inflow port 520a of the circulation passage 520 and the coolant flowing out of the outflow port 520b of the circulation passage 520 can be used to cool the support shaft 620. In this case, for example, the heat resistant temperature of each component used in the hinge mechanism 6 or the temperature applied to the lubricating oil enclosed in the bearing is set as an upper limit, and the relative position of the hinge mechanism 6 and the circulation passage 520 in which the coolant flows is determined by repeated experiments or computer simulation. Figure 6

[0041] Explanation of Reference Numerals ​

[0042] EB. Electron beam evaporation unit, Em. Evaporation material, 1. Base plate, 2. Crucible, 21. Receiving recess, 3. Electron beam generation source, 4. Shaping deflection mechanism, 5. Crucible cover, 52. Circulation passage, 51. Opening portion, 52a. Inflow port, 52b. Outflow port, 6. Hinge mechanism (movable portion and guide portion), 61. Support body, 62. Support shaft, 62a. Internal passage, 65a. Bearing, 53. Protruding wall portion (member forming a seal structure), 8. Pressing mechanism.

Claims

1. An electron beam evaporation unit, comprising: a crucible having a plurality of recesses for accommodating evaporation materials on the same circumference on an upper surface; and an electron beam generating source for generating an electron beam. and a shaped deflection mechanism that performs shaped deflection of the electron beam; and irradiates the shaped-deflected electron beam onto the evaporation material in the accommodation recess to evaporate the evaporation material, characterized in that: Further comprising a crucible cover having an opening portion that exposes the accommodation recess at the irradiation position, and covers the upper side of the crucible; Further comprising a movable portion that moves the crucible cover between a closed posture that covers the upper side of the crucible, and an open posture that exposes all of the accommodation recesses, and a guide portion that guides the crucible cover to a normal position where the opening portion and the accommodation recesses coincide in the vertical direction, when returning the crucible cover from the open posture to the closed posture, by the weight of the crucible cover; The movable portion and the guide portion are constituted by a hinge mechanism that is supported so as to be able to swing, and is provided at an end portion of the crucible cover that covers the upper side on the opposite side in the radial direction from the opening portion with the center of the crucible interposed therebetween; A circulation passage that circulates refrigerant to cool the crucible cover is formed in the crucible cover, and an inflow port and an outflow port of the circulation passage are located at the end portion side of the crucible cover where the hinge mechanism is provided, and the support shaft of the hinge mechanism is cooled by refrigerant that flows into the inflow port of the circulation passage and refrigerant that flows out of the outflow port of the circulation passage; The crucible is made of copper, and the support shaft is made of stainless steel.

2. An electron beam evaporation unit, comprising: a crucible having a plurality of recesses for accommodating evaporation materials on the same circumference on an upper surface; and an electron beam generating source for generating an electron beam. and a shaped deflection mechanism that performs shaped deflection of the electron beam; and irradiates the shaped-deflected electron beam onto the evaporation material in the accommodation recess to evaporate the evaporation material, characterized in that: Further comprising a crucible cover having an opening portion that exposes the accommodation recess at the irradiation position, and covers the upper side of the crucible; Further comprising a movable portion that moves the crucible cover between a closed posture that covers the upper side of the crucible, and an open posture that exposes all of the accommodation recesses, and a guide portion that guides the crucible cover to a normal position where the opening portion and the accommodation recesses coincide in the vertical direction, when returning the crucible cover from the open posture to the closed posture, by the weight of the crucible cover; The movable portion and the guide portion are constituted by a hinge mechanism that is supported so as to be able to swing, and is provided at a portion of the crucible cover that covers the upper side on the opposite side in the radial direction from the opening portion with the center of the crucible interposed therebetween; A circulation passage that circulates refrigerant to cool the crucible cover is formed in the crucible cover; The hinge mechanism has a pair of support bodies that are respectively provided on a base plate where the crucible is provided, and a support shaft that is respectively fixed to each of the support bodies, and the front end portion of each of the support shafts is fitted to a recess that is respectively provided on both side surfaces of the crucible cover through a seal member, and the crucible cover is swingably mounted to each of the support shafts through a bearing; An internal passage that allows refrigerant to pass is formed in each of the support shafts, and each of the internal passages is respectively communicated with the inflow port and the outflow port of the circulation passage.

3. The electron beam type evaporation unit according to claim 1 or 2, characterized in that: A protruding wall portion in a ring shape is provided on a lower surface of the crucible cover around the opening portion; When the crucible cover is swung from the open attitude to the closed attitude, a seal structure is formed in which the protruding wall portion is in a ring shape around the receiving recess.

4. The electron beam evaporation cell according to claim 3, wherein: A pressing mechanism is further provided which applies a pressing force upward to the lower surface of the crucible cover to swing the crucible cover to a rotation-allowed position in which the crucible is allowed to rotate.

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