Airflow generator, airflow fan and array airflow fan

Abstract

The invention relates to the technical field of heat dissipation, in particular to an airflow generator, an airflow fan and an array airflow fan. The airflow generator comprises a surrounding plate, a resonant diaphragm, a back plate and a lead. The surrounding plate is provided with a through hole, the two ends of the through hole are provided with a resonant diaphragm and a back plate respectively, and the surrounding plate, the resonant diaphragm and the back plate jointly define a cavity. The resonance diaphragm comprises a thin film and piezoelectric ceramics, the thin film is connected with the surrounding plate, the piezoelectric ceramics are connected to the thin film, and the vibration frequency of the resonance diaphragm is larger than or equal to 20 kHz. The back plate is provided with an inlet and an outlet, and the inlet and the outlet are both communicated with the cavity. And the lead is connected with the piezoelectric ceramic. The pressure of the gas in the cavity is changed through the vibration of the resonant diaphragm, and the gas continuously enters the cavity from the inlet and then flows out from the outlet under the action of the pressure difference of the internal gas and the external gas, so that the continuous, stable and low-noise gas flow can be formed.

Description

Technical Field

[0001] The present invention relates to the field of heat dissipation technology, and in particular to an airflow generator, an airflow fan and an array airflow fan. Background Art

[0002] Generally, the air holes for micro-flow output of ultrasonic air pumps are small (less than 1mm in diameter), the gas flow is very low, and the output airflow is a point-like airflow. Although ordinary jet fans have a large output airflow, the noise is very high (>65Hz) because the resonance frequency is between tens of Hz and hundreds of Hz, and the output airflow is also a very small linear surface airflow. Ultrasonic air pumps and jet fans also have the problem of inlet and outlet air at the same port, the air outlet efficiency is only 50%, and the output air is discontinuous and unstable. When used in heat dissipation scenarios, there is also a risk of hot air being inhaled due to the proximity to the heat source, which further reduces the heat dissipation efficiency. The above-mentioned ultrasonic air pumps and ordinary jet fans cannot be well applied to some heat dissipation scenarios with high heat dissipation requirements and low noise requirements. There is an urgent need for a product with high heat dissipation efficiency, low noise, and stable air inlet and outlet to assist in heat dissipation. Summary of the invention

[0003] The purpose of the present invention is to overcome the problem that some heat dissipation scenarios with high heat dissipation requirements and low noise requirements in the prior art cannot provide airflow requirements with low noise and stable inlet and outlet air, and to provide an airflow generator, an airflow fan and an array airflow fan.

[0004] In a first aspect, the present invention provides an airflow generator, comprising:

[0005] The enclosure is provided with a through hole, and a resonance diaphragm and a back plate are respectively provided at both ends of the through hole. The enclosure, the resonance diaphragm and the back plate are jointly enclosed to form a cavity.

[0006] The resonant diaphragm includes a film and piezoelectric ceramics. The film is connected to the enclosure plate, and the piezoelectric ceramics are connected to the film. The vibration frequency of the resonant diaphragm is greater than or equal to 20 kHz.

[0007] The back plate is provided with an inlet and an outlet, and both the inlet and the outlet are communicated with the cavity.

[0008] A lead is connected to the piezoelectric ceramic.

[0009] The present invention provides an airflow generator, which drives the piezoelectric ceramic to vibrate through the lead wire, and then drives the resonant diaphragm to vibrate, so that the gas in the cavity is compressed or expanded. When the gas in the cavity is compressed, the gas pressure in the cavity will be greater than the gas pressure outside the airflow generator. Under the action of the pressure difference between the internal and external gases, the gas in the cavity flows to the outside of the airflow generator through the outlet, and the outlet only allows the airflow to flow out; when the gas in the cavity expands, the gas pressure in the cavity will be less than the gas pressure outside the airflow generator. Under the action of the pressure difference between the internal and external gases, the gas outside the airflow generator flows into the cavity through the inlet, and the inlet only allows the airflow to flow in. Under the reciprocating vibration of the resonant diaphragm, the gas will continuously enter the cavity from the inlet and then flow out from the outlet to form a continuous airflow. Since the gas inlet and outlet are separately arranged, the formed airflow is continuous and stable, and can be well applied in scenarios with high heat dissipation requirements. At the same time, since the vibration frequency of the resonant diaphragm is greater than or equal to 20KHz, which is far away from the frequency range received by the human ear, the noise is low.

[0010] The shape of the through hole can be rectangular, circular, square, polygonal or irregular.

[0011] The piezoelectric ceramic is connected to the film, and the piezoelectric ceramic may be on a side facing the cavity or on a side facing away from the cavity.

[0012] When the film or the back panel is connected to the enclosure, the through holes are completely covered and are tightly connected to the surface of the enclosure. The tightly connected means that there is no gap between the connections. The connection method can be welding, bonding, etc.

[0013] The lead wire is used to load the electrical signal onto the piezoelectric ceramic, and the piezoelectric ceramic converts the electrical signal into mechanical vibration by using the inverse piezoelectric effect, thereby driving the resonance diaphragm to vibrate.

[0014] Preferably, the number of the inlets is greater than the number of the outlets. Ensure that the area of ​​the air inlet of the air flow generator is greater than the area of ​​the air outlet, because a larger air inlet area allows the air flow to enter the device at a lower flow rate, thereby reducing the pressure loss and resistance caused by excessive flow rate.

[0015] Preferably, the shape of the airflow generator is a square, and the side length of the square is 10mm-50mm. This shape facilitates the assembly of the airflow generator to form a device with stronger airflow. The thickness of the airflow generator is 1mm-10mm. The airflow generator can be made into different thicknesses according to different application scenarios to meet different usage requirements.

[0016] Preferably, the resonant diaphragm also includes two frequency-locking plates, which are respectively connected to the two sides of the piezoelectric ceramic, and one of the frequency-locking plates is connected to the film. The frequency-locking plate can lock the frequency of the resonant diaphragm, that is, to ensure that the self-resonance frequency of the resonant diaphragm remains unchanged for a long time, to ensure that it can work long-term, efficiently and stably, and to reduce the environmental changes that cause the resonant frequency of the resonant diaphragm to have a large change. The piezoelectric ceramic is directly connected (generally by pasting) to the film. Due to long-term work, the adhesive layer between the piezoelectric ceramic and the film is heated, causing the glue of the adhesive layer to soften and loosen, causing the resonant frequency of the resonant diaphragm to change. The frequency-locking plate can prevent the piezoelectric ceramic from being directly connected to the film, can play a certain heat dissipation effect, reduce the influence of temperature on the adhesive layer, and thereby reduce the change in the resonant frequency of the resonant diaphragm.

[0017] The materials of the film and the frequency-locking plate are both metal materials, such as stainless steel, titanium alloy or nickel-chromium stainless steel, etc., to meet the requirements of higher resonant frequency. The metal material is conducive to the heat dissipation of the piezoelectric ceramic, can reduce the surface temperature of the piezoelectric ceramic, so that the dielectric constant of the piezoelectric ceramic changes less and is within a controllable range.

[0018] Preferably, the film and the frequency-locking plate are both made of nickel-chromium stainless steel, which is a material with excellent elastic properties and can meet the requirements of high-frequency vibration.

[0019] Preferably, the airflow generator also includes a controller and a temperature sensor. The temperature sensor is used to collect the temperature of the piezoelectric ceramic. The controller can control the power supply to output a corresponding driving frequency and transmit it to the piezoelectric ceramic through the lead according to the temperature-frequency change curve of the piezoelectric ceramic and the temperature collected by the temperature sensor. Considering that the dielectric constant of the piezoelectric ceramic increases under high temperature conditions, the resonant frequency of the resonant diaphragm becomes lower, which in turn causes the resonant frequency of the airflow generator to change, and ultimately causes the vibration amplitude to decrease, and the air output of the airflow generator is reduced. This solution can ensure that under different high-temperature environments, the natural frequency of the resonant diaphragm is consistent with the frequency output by the driving power supply, and is always at the resonant frequency, ensuring that the resonant diaphragm is always operating at the maximum amplitude.

[0020] In a second aspect, the present invention provides an airflow fan comprising at least three of the airflow generators, wherein a plurality of the airflow generators enclose a prism, wherein the back plate of the airflow generator faces the inner side of the prism, a frame plate is provided on the inner side of the prism, and the inlet and the outlet are respectively located on both sides of the frame plate.

[0021] The present invention provides an airflow fan, which combines a plurality of airflow generators together through the frame plate to form an integral structure, and can superimpose the point airflow of each airflow generator on each other to expand it into a surface airflow, thereby forming a high-efficiency strong flow with a larger air outlet area, expanding the airflow coverage area, greatly improving the heat dissipation effect, and increasing applicability.

[0022] The frame plate separates the inlet and the outlet and divides the prism into two sections. The frame plate can be perpendicular to the axis of the prism or can be inclined, as long as it ensures that the inlet or outlet of all the airflow generators are located on one side of the frame plate. The end of the prism with the inlet is the air inlet end of the airflow fan, and the end of the prism with the outlet is the air outlet end of the airflow fan. The cross-sectional shape of the prism can be a triangle, square, rectangle, hexagon, trapezoid, etc.

[0023] Preferably, the airflow fan comprises six of the airflow generators, the prism is a regular hexagonal prism, and the frame plate is a regular hexagon.

[0024] In a third aspect, the present invention provides an array airflow fan, wherein a plurality of regular hexagonal prism-shaped airflow fans are stacked and arranged into a regular hexagonal prism stack in such a manner that their central axes overlap with each other, and the inlet on each of the airflow fans faces the same end of the regular hexagonal prism stack.

[0025] The present invention provides an array airflow fan, in which a plurality of regular hexagonal prism-shaped airflow fans are stacked and arranged in a manner that their central axes overlap with each other, forming a regular hexagonal prism with a higher height, which can increase the airflow intensity by multiples according to the number of the airflow fans, further increasing the airflow volume of the inlet and outlet winds.

[0026] Preferably, a plurality of said regular hexagonal prism stacks are arranged in the same direction in a honeycomb array and connected to each other. This solution can further expand the air outlet area.

[0027] Compared with the prior art, the present invention has the following beneficial effects:

[0028] 1. The present invention provides an airflow generator, wherein the gas pressure in the cavity changes by the vibration of the resonant diaphragm, and under the effect of the pressure difference between the internal and external gases, the gas continuously enters the cavity from the inlet and flows out from the outlet, thereby forming a continuous and stable airflow, and because the vibration frequency is far away from the frequency range received by the human ear, the noise generated is low;

[0029] 2. The present invention provides an airflow fan, which combines a plurality of airflow generators together through the frame plate to form an integral structure, and can superimpose the point-like airflow of each airflow generator on each other to expand it into a planar airflow, thereby forming a high-efficiency strong flow with a larger air outlet area, thereby expanding the airflow coverage area, greatly improving the heat dissipation effect, and increasing applicability;

[0030] 3. The present invention provides an array airflow fan, in which a plurality of regular hexagonal prism-shaped airflow fans are stacked and arranged in a manner that the central axes overlap with each other, which can increase the airflow intensity by multiples according to the number of the airflow fans, further increasing the airflow volume of the inlet and outlet winds. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] Figure 1 A perspective view of the airflow generator.

[0032] Figure 2 Schematic diagram of the structure of the airflow generator.

[0033] Figure 3 Schematic diagram of the structure of the resonant diaphragm of the airflow generator.

[0034] Figure 4 2 is a first schematic diagram of an airflow fan.

[0035] Figure 5 2 is a second schematic diagram of an airflow fan.

[0036] Figure 6 Schematic diagram of array airflow fan.

[0037] Figure 7 Schematic diagram of a radiator with an airflow generator.

[0038] Markings in the figure:

[0039] 1- Airflow generator,

[0040] 11-Resonant diaphragm,

[0041] 111-film, 112-piezoelectric ceramics, 113-frequency-locking plate,

[0042] 12-enclosure, 13-back plate, 14-inlet, 15-outlet, 16-check valve, 17-lead,

[0043] 2- Airflow fan,

[0044] 21-frame plate,

[0045] 3- Controller,

[0046] 4- Airflow box,

[0047] 41-air flow box air inlet end, 42-air flow box air outlet end,

[0048] 5- Radiator,

[0049] 53- first raised strip, 54- second raised strip. DETAILED DESCRIPTION

[0050] The present invention is further described in detail below in conjunction with specific embodiments. However, this should not be understood as the scope of the above subject matter of the present invention being limited to the following embodiments, and all technologies realized based on the content of the present invention belong to the scope of the present invention.

[0051] Unless otherwise specified, in the description of the specific embodiments of the present invention, the terms indicating the orientation or position relationship such as "up", "down", "left", "right", "center", "inside", "outside", etc. are all expressions based on the orientation or position relationship shown in the drawings, or are the orientation or position relationship when the invented product / equipment / device is usually used. These terms of orientation or position relationship are only for the convenience of describing the scheme of the present invention or simplifying the description in the specific embodiments, so as to facilitate the technicians to quickly understand the scheme, and do not indicate or imply that a specific device / component / element must have a specific orientation, or be constructed and operated in a specific position relationship, and therefore cannot be understood as a limitation on the present invention.

[0052] In addition, if the terms "horizontal", "vertical", "overhanging", "parallel" and the like appear, it does not mean that the corresponding devices / components / elements are required to be absolutely horizontal or vertical or overhanging or parallel, but may be slightly tilted or have deviations. For example, "horizontal" only means that its direction is more horizontal than "vertical", and does not mean that the structure must be completely horizontal, but may be slightly tilted. Alternatively, it can be simplified to mean that the corresponding devices / components / elements are set in directions such as "horizontal", "vertical", "overhanging", "parallel", etc., and can have an error / deviation of ±10% relative to the corresponding direction setting, more preferably an error / deviation within ±8%, more preferably an error / deviation within ±6%, more preferably an error / deviation within ±5%, and more preferably an error / deviation within ±4%. As long as the corresponding device / component / element is within the error / deviation range, it can still achieve its role in the scheme of the present invention.

[0053] In addition, the expressions “first”, “second”, “third”, etc., which appear in the terms, are merely used to distinguish the description of the same or similar components and should not be understood as emphasizing or implying the relative importance of specific components.

[0054] In addition, in the description of the embodiments of the present invention, "several", "plurality" and "a number" represent at least 2. It can be any number such as 2, 3, 4, 5, 6, 7, 8, 9, and even more than 9.

[0055] In addition, in the description of the technical solution of the present invention, unless otherwise clearly specified / defined / restricted, the terms "set", "install", "connect", "connected", "provided with", "laid", and "arranged" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection, and can be welding, riveting, bolting, threading, and other commonly used connection means in the field. This connection can be a mechanical connection, an electrical connection, or a communication connection; it can be a direct connection, or an indirect connection through an intermediate medium, and it can be the internal connection of two elements.

[0056] Example 1

[0057] like Figure 1 , Figure 2 As shown, an airflow generator includes a surrounding plate 12, a resonant diaphragm 11, a back plate 13 and a lead 17.

[0058] The enclosure 12 is provided with a through hole, and the two ends of the through hole are provided with a resonant diaphragm 11 and a back plate 13 respectively, and the enclosure 12, the resonant diaphragm 11 and the back plate 13 together enclose a cavity. The shape of the through hole can be square.

[0059] The resonant diaphragm 11 includes a film 111 and a piezoelectric ceramic 112 . The film 111 is connected to the enclosure 12 . The piezoelectric ceramic 112 is connected to the film 111 and faces the outside of the cavity. The vibration frequency of the resonant diaphragm 11 is greater than or equal to 20 kHz.

[0060] The back plate 13 is provided with an inlet 14 and an outlet 15, both of which are connected to the cavity. The inlet 14 and the outlet 15 are both provided with a one-way valve 16, and the one-way valve 16 includes a valve flap that can cover the inlet 14 and the outlet 15. The valve flap of the inlet 14 is located on the inner side of the back plate 13, and the valve flap of the outlet 15 is located on the outer side of the back plate 13. When the airflow passes through the inlet 14 and the outlet 15, the valve flap is pushed away from the back plate 13. At this time, the one-way valve 16 is in an open state. When the airflow tries to flow back from one side of the valve flap to the other side, the valve flap will be affected by the reverse pressure, and the valve flap will fit tightly on the back plate 13, blocking the inlet 14 or the outlet 15, thereby preventing the reverse flow of gas. This effect ensures the "one-way" characteristic of the one-way valve 16.

[0061] The lead wire 17 is connected to the piezoelectric ceramic 112 .

[0062] In an optional embodiment, the number of inlets 14 may be greater than the number of outlets 15, and the specific numbers of inlets 14 and outlets 15 may be: 2 and 1, 3 and 2, 4 and 3, 4 and 2, 5 and 4, 5 and 3, 6 and 5, 6 and 4, 6 and 3, respectively.

[0063] In an optional embodiment, the shape of the airflow generator 1 can be a square, the side length of the square can be 10mm-50mm, and the specific side length can be 10mm, 15mm, 20mm, 25mm, 30mm, 35mm, 40mm, 45mm, 50mm. The thickness of the airflow generator 1 can be 1mm-10mm, and the specific thickness can be 1mm, 2mm, 3mm, 4mm, 5mm, 6mm, 7mm, 8mm, 9mm, 10mm.

[0064] In an optional embodiment, in one or more embodiments, such as Figure 3 As shown, the resonant diaphragm 11 can also include two frequency-locking plates 113, and the two frequency-locking plates 113 are respectively connected to the two sides of the piezoelectric ceramic 112, and one of the frequency-locking plates 113 is connected to the film 111. The piezoelectric ceramic 112 can adopt high-frequency piezoelectric ceramics, which have superior performance, high piezoelectricity, piezoelectric constant d33>820PC / N, Curie temperature point greater than 200°C, suitable for long-term operation in a high-temperature environment of 85°C, and a wide operating temperature range. The film 111, the frequency-locking plate 113, and the piezoelectric ceramic 112 can be pasted together using differential pressure curing and step temperature curing processes. The differential pressure curing refers to bonding multiple layers of materials together, first evacuating to form a negative pressure to remove bubbles in the adhesive material layer, and then filling with an inert gas positive pressure to form a positive pressure. Under the protection of the inert gas positive pressure state, the adhesive glue is not vaporized during high-temperature curing, and the internal stress is removed by controlling the positive and negative differential pressure of the air pressure. The step temperature curing is a curing method that uses multiple temperature stages to gradually increase the temperature during the material curing process. This method achieves the purpose of controlling product performance, avoiding defects and improving production efficiency by curing at different temperature stages.

[0065] In an optional embodiment, the film 111 and the frequency locking plate 113 may both be nickel-chromium stainless steel.

[0066] In an optional implementation, an airflow generator of this embodiment may also include a controller 3 and a temperature sensor, wherein the temperature sensor is used to collect the temperature of the piezoelectric ceramic 112, and the controller 3 can control the power supply to output a corresponding driving frequency and transmit it to the piezoelectric ceramic 112 through the lead 17 according to the temperature-frequency change curve of the piezoelectric ceramic 112 and the temperature collected by the temperature sensor. The temperature-frequency change curve is obtained through experiments. The controller 3 can output a constant high-frequency driving frequency greater than or equal to 20kHz and a corresponding driving voltage to drive the resonant diaphragm 11 to vibrate at a high frequency. Multiple airflow generators 1 can use a controller 3 for centralized power supply and drive control.

[0067] Example 2

[0068] An airflow fan comprises at least three airflow generators 1.

[0069] A plurality of airflow generators 1 are enclosed to form a prism, the back plate 13 of the airflow generator 1 faces the inner side of the prism, a frame plate 21 is provided on the inner side of the prism, and the inlet 14 and the outlet 15 are respectively located on both sides of the frame plate 21. The frame plate 21 divides the prism into two sections, the section with the inlet 14 is the air inlet end of the airflow fan, and the section with the outlet 15 is the air outlet end of the airflow fan.

[0070] In an optional embodiment, if Figure 4 , 5 As shown, six airflow generators 1 may be included, the prism may be a regular hexagonal prism, and the frame plate 21 may be a regular hexagon and perpendicular to the axis of the regular hexagonal prism. The regular hexagonal prism is divided into two sections, the upper and lower sections, by the frame plate 21, the air intake end of the airflow fan is located at the upper section of the regular hexagonal prism, and the air outlet end of the airflow fan is located at the lower section of the regular hexagonal prism.

[0071] Example 3

[0072] An array airflow fan includes several regular hexagonal prism-shaped airflow fans as described in Embodiment 2.

[0073] A plurality of regular hexagonal prism-shaped airflow fans 2 are stacked and arranged to form a regular hexagonal prism stack in such a manner that their central axes overlap with each other, and the inlet 14 on each airflow fan 2 faces the same end of the regular hexagonal prism stack.

[0074] In an optional embodiment, a plurality of the regular hexagonal prism stacks can be arranged in the same direction in a honeycomb array and connected to each other. Each of the regular hexagonal prism stacks is a unit of the honeycomb array, and is connected to the side wall of an adjacent regular hexagonal prism stack through its side wall. A plurality of regular hexagonal prism style airflow fans can be combined according to the actual required heat dissipation area size, airflow intensity, etc. For example, Figure 6 As shown, 36 regular hexagonal prism-shaped airflow fans are arranged in a honeycomb array, that is, three layers are stacked, with 12 fans in each layer, and are connected to a controller 3.

[0075] Example 4

[0076] like Figure 7 As shown, an airflow generator described in Example 1 is applied to a radiator.

[0077] One or more airflow generators 1 are installed inside the airflow box 4. The airflow box 4 is a rectangular tube. The front and rear openings of the rectangular tube are the airflow box air inlet end 41 and the airflow box air outlet end 42 of the airflow box 4. When the airflow generator 1 is installed inside the airflow box 4, the end of the back plate 13 close to the inlet 14 should face the airflow box air inlet end 41, and the end of the back plate 13 close to the outlet 15 should face the airflow box air outlet end 42. When multiple airflow generators 1 are installed together, a certain distance needs to be kept between them to ensure the normal inflow and outflow of airflow.

[0078] The radiator 5 can be a long metal plate with a length of 50 mm and a width of 20 mm. A first raised strip 53 is provided on the metal plate, and the height of the first raised strip 53 is 5 mm. The airflow generator 1 with a side length of 14 mm and a thickness of 1 mm is installed in an airflow box 4 with an inner cross-sectional size of 2 mm×16 mm, a wall thickness of 1 mm, and a length of 18 mm. An area with a size of 18 mm×18 mm is selected on the metal plate, which can specifically be one end of the metal plate. The first raised strip 53 is cut off by 4 mm in height to form a second raised strip 54, and the airflow box 4 is installed in the area of ​​the second raised strip 54 in an embedded manner.

[0079] In industrial equipment and daily small household appliances, there are generally two requirements for heat dissipation and airflow, especially the heat dissipation requirements in ultra-thin electronic products, such as laptops, smart phones, ultra-thin displays, handheld products, etc., which all want to have an ultra-thin volume (for example, thickness below 5mm) and high heat dissipation efficiency product to help heat dissipation. An ultra-thin airflow generator 1 and a metal long strip style heat sink 5 can be used to help the heat dissipation of ultra-thin electronic products, and can provide a long-term uninterrupted operation, large air volume, and low noise heat dissipation airflow.

[0080] In an optional implementation manner, the shape of the heat sink 5 may be other styles, such as a cube shape, a fin shape, a tower shape, etc., and the airflow generator 1 may be embedded in the heat sink 5 of other styles as in this embodiment.

[0081] The airflow generator 1 described in Example 1 can be used alone or applied to a heat sink as in Example 4, and cooperate with the heat sink 5 to form a linear surface airflow to dissipate heat for low-power devices. As described in Examples 2 and 3, multiple airflow generators 1 can be combined and arranged in an array to form a high-efficiency airflow fan with a large area and a large flow rate to meet the heat dissipation requirements of high-power modules and devices. By designing a combined array of a single airflow generator 1, the problem of low airflow volume of a single airflow generator 1 is solved. The design of the airflow generator 1 also solves the problem of small air volume of the point airflow output by the micro air pump. The airflow generator 1 can form a linear area airflow to increase the air volume of the output airflow. In addition, the inlet and outlet are respectively designed as the inlet 14 and the outlet 15, which solves the problem of low air outlet efficiency in the micro air pump and the jet fan where the air inlet and air outlet are the same, and avoids the problem of hot air inhalation, which further deteriorates the heat dissipation efficiency.

[0082] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. An airflow generator, characterized in that: include: A surrounding plate (12), wherein the surrounding plate (12) is provided with a through hole, and a resonant diaphragm (11) and a back plate (13) are respectively provided at two ends of the through hole, and the surrounding plate (12), the resonant diaphragm (11) and the back plate (13) are together enclosed to form a cavity; The resonant diaphragm (11) comprises a thin film (111) and a piezoelectric ceramic (112), the thin film (111) is connected to the enclosure (12), the piezoelectric ceramic (112) is connected to the thin film (111), and the vibration frequency of the resonant diaphragm (11) is greater than or equal to 20 kHz; The back plate (13) is provided with an inlet (14) and an outlet (15), and the inlet (14) and the outlet (15) are both in communication with the cavity; A lead wire (17), wherein the lead wire (17) is connected to the piezoelectric ceramic (112).

2. An airflow generator according to claim 1, characterized in that: The number of the inlets (14) is greater than the number of the outlets (15).

3. The airflow generator according to claim 1, characterized in that: The shape of the airflow generator (1) is a square, the side length of the square is 10 mm-50 mm, and the thickness of the airflow generator (1) is 1 mm-10 mm.

4. The airflow generator according to claim 1, characterized in that: The resonant diaphragm (11) further comprises two frequency-locking plates (113), wherein the two frequency-locking plates (113) are respectively connected to two sides of the piezoelectric ceramic (112), and one of the frequency-locking plates (113) is connected to the film (111).

5. An airflow generator according to claim 4, characterized in that: The film (111) and the frequency locking plate (113) are both made of nickel-chromium stainless steel.

6. An airflow generator according to any one of claims 1 to 5, characterized in that: It also includes a controller (3) and a temperature sensor, wherein the temperature sensor is used to collect the temperature of the piezoelectric ceramic (112). The controller (3) can control the power supply to output a corresponding driving frequency based on the temperature-frequency variation curve of the piezoelectric ceramic (112) and the temperature collected by the temperature sensor, and transmit the driving frequency to the piezoelectric ceramic (112) through the lead wire (17).

7. An airflow fan, characterized in that: The invention comprises at least three airflow generators according to any one of claims 1 to 6, wherein a plurality of the airflow generators (1) enclose a prism, a back plate (13) of the airflow generator (1) faces the inner side of the prism, a frame plate (21) is provided on the inner side of the prism, and the inlet (14) and the outlet (15) are respectively located on both sides of the frame plate (21).

8. An airflow fan according to claim 7, characterized in that: It comprises six airflow generators (1), the prism is a regular hexagonal prism, and the frame plate (21) is a regular hexagon.

9. An array airflow fan, characterized in that: It comprises a plurality of air flow fans as described in claim 8, wherein a plurality of the regular hexagonal prism-shaped air flow fans are stacked and arranged into a regular hexagonal prism stack in such a way that the central axes overlap with each other, and the inlet (14) on each of the air flow fans faces the same end of the regular hexagonal prism stack.

10. The array airflow fan according to claim 9, characterized in that: A plurality of regular hexagonal prism stacks are arranged in the same direction in a honeycomb array and are interconnected.

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